A method for multi-wire cutting of quartz material

Abstract

This invention discloses a method for multi-wire cutting of quartz material. This method provides a new and different material bonding method, fully utilizing the internal space of the quartz ring. By employing a ring-and-insert nesting method, the ring and indenter are simultaneously cut on the same vertical operating plane, solving the problem of increased width and reduced cutting efficiency in double-row cases. Furthermore, if the processing range allows, an additional row of material can be added, enabling simultaneous processing of multiple indenters in two rows. The processing method of this invention is simple to operate, does not change the original operating procedures and methods, and can efficiently improve equipment capacity and utilization.

Description

Technical Field

[0001] This invention relates to the field of quartz material cutting and processing technology, and more specifically, to a method for multi-wire cutting of quartz materials. Background Technology

[0002] With the rapid development of the chip industry, the semiconductor equipment industry has also grown rapidly. Quartz glass products, as a crucial component of semiconductor equipment, are experiencing increasing demand. The cutting and blanking of quartz glass materials is a key part of this process, making cutting efficiency and equipment performance particularly important.

[0003] The current processing methods are: (1) when the combined outer diameter of the two materials is less than the processing range, double-row single-row cutting is used; (2) when the outer diameter of a single material exceeds half of the processing range, the single material is cut separately. These two processing methods have the following problems: in the case of double-row single-row ring anchorage, the cutting width increases and the cutting rate decreases; in the case of separate cutting, the internal space of the ring is wasted and the equipment efficiency is low. Summary of the Invention

[0004] This invention overcomes the shortcomings of increased width and reduced cutting efficiency in the case of double-row quartz materials, and provides a processing method for multi-wire cutting of quartz materials. It can realize the simultaneous processing of multiple quartz materials in double rows by means of quartz rings and quartz inlays, thereby improving the cutting efficiency.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a method for multi-wire cutting of quartz material, the specific steps of which are as follows:

[0006] Step a: Place the quartz ring on the resin pad and glue it in place;

[0007] Step b: Set the quartz ingot into the quartz ring and bond it together with resin glue;

[0008] Step c: Fix the entire material onto the multi-wire cutting platform using the resin pad, and use the positioning device to position and support the quartz ring and quartz ingot until the resin is completely cured.

[0009] Step e: Cut the entire material from top to bottom using a multi-wire cutting device.

[0010] This invention provides a method for multi-wire cutting of quartz material, wherein the quartz ring and quartz indenter are made of quartz material; the processing method involves using the quartz material, bonding the material firmly with resin adhesive through a ring and indenter fitting method; then adhesively bonding the entire material onto a resin pad; finally, installing and fixing the entire material on a multi-wire cutting platform, and completing the cutting process using a four-axis roller and cutting wire of a multi-wire cutting device; the multi-wire cutting device is existing technology and will not be described in detail in this application; by bonding the quartz indenter to the quartz ring with resin adhesive, two materials can be cut simultaneously without changing the material cutting height, cutting width, and cutting speed, thus achieving efficient utilization of the equipment's capacity.

[0011] Preferably, the quartz ring has a circular structure, while the quartz ingot has a cylindrical structure, with the inner diameter of the quartz ring being larger than the outer diameter of the quartz ingot. This facilitates the nesting combination of the ring and ingot, thereby improving the utilization rate of product cutting.

[0012] Preferably, the outer diameter of the quartz ring is less than or equal to 600 mm, and the material height is less than or equal to 400 mm, so that the quartz ring is within the allowable range of the multi-wire cutting platform.

[0013] Preferably, the positioning device in step c includes several servo motors mounted on the multi-wire cutting platform, a lead screw mounted on the output shaft of the servo motor, and a lower support frame slidably mounted in the upper groove of the multi-wire cutting platform, with the lower support frame threadedly connected to the lead screw.

[0014] The multi-wire cutting platform is equipped with two sets of slides. Servo motor 1 is fixedly installed on the inner wall of the slide. One end of the lead screw is fixedly installed on the output shaft of servo motor 1, and the other end is rotatably connected to the other end of the slide. The lower support frame can be used to support and limit the lower side of the quartz ring end to prevent the quartz ring from shifting due to cutting force. When it is necessary to use the lower support frame to limit and support the end of the quartz ring, servo motor 1 is started first. The start of servo motor 1 drives the lead screw to rotate. The rotation of the lead screw drives the lower support frame to move to the left or right, thereby limiting and supporting the quartz ring on the resin pad.

[0015] Preferably, there are two sets of lower support frames, which are respectively set on both sides of the quartz ring port. The lower support frame includes a support body one, a piston cylinder one set on the support body one, and a support body two set on the piston push rod of the piston cylinder one, and the support body two is slidably connected to the support body one.

[0016] The upper side wall of the second support body is provided with an arc-shaped groove, and the bottom wall of the arc-shaped groove is provided with a rectangular clearance groove. The second support body is provided on the opposite side of the first support body on both sides. When the second support body moves to the lower side of the quartz ring, the resin pad enters the rectangular clearance groove. At this time, the first piston cylinder is activated. The first piston cylinder drives the piston push rod to move the second support body upward, thereby limiting and supporting the quartz ring on the upper side of the resin pad, which facilitates the multi-line cutting processing of the whole material.

[0017] Preferably, the positioning device also includes a top support positioning device, which includes a piston cylinder two mounted on the support body one, a housing on the piston push rod of the piston cylinder two, telescopic rod one and telescopic rod two offsetly mounted on the upper and lower side walls of the housing, a servo motor two mounted inside the housing, a gear mounted on the output shaft of the servo motor two, and the gear meshing with a rack mounted on the opposite side wall of the telescopic rod one and telescopic rod two.

[0018] When the quartz indenter, fitted inside the quartz ring, needs positioning and support, piston cylinder two is activated first. Piston cylinder two drives the piston push rod to move the housing, extending it from the end of the quartz ring into the upper space between the quartz ring and the quartz indenter (the extension height of the housing is pre-set so that it is in the middle position of the extension space). After it is fully extended, servo motor two is activated. Servo motor two drives the gear to rotate, and the gear rotation drives telescopic rod one and telescopic rod two to move in opposite directions, thereby limiting and pressing the inner wall of the quartz ring and the upper wall of the outer diameter of the quartz indenter. This prevents the connection position from shifting due to uneven application of resin glue, thus further improving the stability of the combined material after the quartz ring and quartz indenter are fitted during multi-wire cutting, improving the overall material cutting quality and efficiency.

[0019] Preferably, one end of the telescopic rod is provided with a top support plate, and the top support plate is provided with an outwardly convex arc-shaped surface.

[0020] This facilitates the fit between the top support plate and the inner diameter surface of the quartz ring, improving the stability of the top support positioning device's limiting support.

[0021] Preferably, the telescopic rod is provided with a top support plate at both ends, and the top support plate is provided with a concave arc-shaped surface.

[0022] This facilitates the fit between the second top support plate and the upper surface of the outer diameter of the quartz indenter, improving the stability of the top support positioning device's limiting support.

[0023] Preferably, the support body 1 is provided with a mounting seat, the piston cylinder 2 is fixedly mounted on the mounting seat, the mounting seat is slidably mounted in the slide groove, and a set of telescopic springs is provided between the upper and lower bottom walls of the slide groove and the mounting seat.

[0024] The design of this mounting base allows for a wider range of applications for the top support positioning device. It enables the quartz indenter to be fixed in place simply by extending the housing into the upper space between the quartz ring and the quartz indenter (without needing to pre-set the housing extension height to ensure it is in the middle of the extension space).

[0025] Compared with the prior art, the beneficial effects of the present invention are: (1) The present invention can bond the quartz ingot to the quartz ring with resin glue, thereby achieving the simultaneous cutting of two materials without changing the material cutting height, cutting width and cutting speed, and realizing the efficient utilization of equipment capacity; (2) The present invention is provided with a positioning device, and the lower support frame of the positioning device can be used for the support and limit of the lower side of the end of the quartz ring, preventing the quartz ring from shifting due to cutting force; (3) The present invention is provided with a top support positioning device, so that the connection between the quartz ring and the quartz ingot will not shift due to uneven application of resin glue, thereby further improving the stability of the combined material after the quartz ring and the quartz ingot are fitted in multi-wire cutting, and improving the overall material cutting quality and efficiency. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a positioning device, a quartz ring, and a quartz indenter assembly according to the present invention;

[0027] Figure 2 This is a schematic diagram of the structure of the quartz ring and quartz ingot combination of the present invention;

[0028] Figure 3 This is a partial cross-sectional view of the positioning device of the present invention;

[0029] Figure 4 yes Figure 3 Sectional view at point "AA" in the middle;

[0030] In the diagram: 1. Quartz ring; 2. Resin pad; 3. Quartz indenter; 4. Resin adhesive; 5. Multi-wire cutting platform; 600. Positioning device; 7. Multi-wire cutting equipment; 601. Servo motor 1; 602. Lead screw; 603. Slide groove; 604. Lower support frame; 605. Support body 1; 606. Piston cylinder 1; 607. Support body 2; 608. Arc groove; 609. Rectangular clearance groove; 800. Top support positioning device; 801. Piston cylinder 2; 802. Box body; 803. Telescopic rod 1; 804. Telescopic rod 2; 805. Servo motor 2; 806. Gear; 807. Top support plate 1; 809. Arc surface 1; 810. Top support plate 2; 811. Arc surface 2; Upper space; 900. Auxiliary adjustment mechanism; 901. Mounting slot; 902. Mounting seat; 903. Telescopic spring. Detailed Implementation

[0031] The technical solution of the invention will be further described in detail below through specific embodiments and in conjunction with the accompanying drawings:

[0032] Example 1:

[0033] See appendix Figure 1 To be continued Figure 3 A method for multi-wire cutting of quartz material, the specific steps of which are as follows:

[0034] Step a: Place the quartz ring 1 on the resin pad 2 and glue them together;

[0035] Step b: Set the quartz ingot 3 into the quartz ring 1 and use resin glue 4 to bond them together, with the resin glue placed at the lowest position of the inner diameter of the quartz ring.

[0036] Step c: Fix the entire material onto the multi-wire cutting platform 5 using the resin pad 2, and position and support the quartz ring 1 and quartz ingot 3 using the positioning device 600 until the resin is completely cured.

[0037] Step e: The entire material is cut from top to bottom using the multi-wire cutting device 7.

[0038] The quartz ring and quartz ingot are made of quartz material. The quartz ring has a circular structure, and the quartz ingot has a cylindrical structure. The inner diameter of the quartz ring is larger than the outer diameter of the quartz ingot. This facilitates the nesting combination of the ring and ingot, thereby improving the utilization rate of product cutting.

[0039] The outer diameter of the quartz ring is less than or equal to 600 mm. The material height is less than or equal to 400 mm, ensuring that the quartz ring is within the allowable range of the multi-wire cutting platform.

[0040] The processing method of this application is as follows: using the aforementioned quartz material, the material is firmly bonded together with resin adhesive through a ring and indentation sleeve; then the entire material is glued onto a resin pad; finally, the entire material is installed and fixed on a multi-wire cutting platform, and the product is cut using a four-axis roller and cutting wire of a multi-wire cutting machine; the multi-wire cutting machine is existing technology and will not be described in detail in this application; by using resin adhesive to bond the quartz indenter to the quartz ring, two materials can be cut simultaneously without changing the material cutting height, cutting width, and cutting speed, thus achieving efficient utilization of the equipment's capacity. Specific Implementation Example 2:

[0042] See appendix Figure 1 To be continued Figure 4 This embodiment further supplements the positioning device based on specific embodiment 1:

[0043] The positioning device 600 includes two servo motors 601 mounted on the multi-wire cutting platform 5, a lead screw 602 mounted on the output shaft of the servo motor 602, and a lower support frame 604 slidably mounted in a slide groove 603 on the upper side of the multi-wire cutting platform. The lower support frame is threadedly connected to the lead screw. The multi-wire cutting platform has two sets of slide grooves. The servo motor 601 is fixedly mounted on the inner wall of the slide groove. One end of the lead screw is fixedly mounted on the output shaft of the servo motor 602, and the other end is rotatably connected to the other end of the slide groove. The lower support frame can be used for supporting and limiting the lower side of the quartz ring end, preventing the quartz ring from shifting due to cutting force. There are two sets of lower support frames, respectively located on both sides of the quartz ring end. The lower support frame includes a support body 605, a piston cylinder 606 mounted on the support body 606, and a second support body 607 mounted on the piston rod of the piston cylinder 606, with the second support body slidably connected to the support body 606. The upper side wall of the second support body is provided with an arc-shaped groove 608, and the bottom wall of the arc-shaped groove is provided with a rectangular clearance groove 609. The second support body is provided on the opposite side of the first support body on both sides. When the second support body moves to the lower side of the quartz ring, the resin pad enters the rectangular clearance groove. At this time, the first piston cylinder is activated. The first piston cylinder drives the piston push rod to move the second support body upward, thereby limiting and supporting the quartz ring on the upper side of the resin pad, which facilitates the multi-line cutting processing of the whole material.

[0044] When the lower support frame is needed to limit the end of the quartz ring, first start the servo motor one. The servo motor one starts and drives the lead screw to rotate. The rotation of the lead screw drives the lower support frame to move to one side of the quartz ring. When the support body two on the lower support frame moves to the lower side of the quartz ring, the resin pad enters the rectangular clearance groove. At this time, start the piston cylinder one. The piston cylinder one drives the piston push rod to move the support body two to the upper side, thereby limiting the quartz ring on the upper side of the resin pad, which facilitates the multi-wire cutting processing of the whole material. Specific Implementation Example 3:

[0046] See appendix Figure 1 To be continued Figure 4 This embodiment adds a top support positioning device 800 to the positioning device in specific embodiment 1. It includes a piston cylinder 801 mounted on a support body, a housing 802 on the piston rod of piston cylinder 802, and telescopic rods 803 and 804 offsetly arranged in the upper and lower side walls of the housing. A servo motor 805 is housed inside the housing, and a gear 806 is mounted on the output shaft of the servo motor 806. The gear meshes with a rack 807 located in the opposite side wall of telescopic rods 801 and 804. A top support plate 808 is located at the end of telescopic rod 808, with a convex arc-shaped surface 809, which can fit against the inner diameter surface of the quartz ring. A top support plate 810 is located at the end of telescopic rod 802, with a concave arc-shaped surface 811, which can fit against the outer diameter surface of the quartz ring.

[0047] When the quartz ingot, fitted inside the quartz ring, needs positioning and support, piston cylinder two is activated first. Piston cylinder two drives the piston push rod to move the housing, allowing it to extend from the end of the quartz ring into the upper space 812 between the quartz ring and the quartz ingot (the extension height of the housing is pre-set so that it is in the middle position of the extension space). After it is fully extended, servo motor two is activated. Servo motor two drives the gear to rotate, and the gear rotation drives telescopic rod one and telescopic rod two to move in opposite directions, thereby limiting and pressing the inner wall of the quartz ring and the upper wall of the outer diameter of the quartz ingot. This prevents the connection position from shifting due to uneven application of resin glue, thus further improving the stability of the combined material after the quartz ring and quartz ingot are fitted during multi-wire cutting, improving the overall material cutting quality and efficiency. Specific Implementation Example 4:

[0049] See appendix Figure 1 To be continued Figure 4 This embodiment adds an auxiliary adjustment mechanism 900 based on specific embodiment 1. It includes a mounting seat 902 that is slidably disposed in a mounting groove 901 on one side wall of the support body, a piston cylinder 2 that is fixedly disposed on the mounting seat, the mounting seat that is slidably disposed in a sliding groove, and a set of telescopic springs 903 that are disposed between the upper and lower bottom walls of the sliding groove and the mounting seat.

[0050] The design of this mounting base allows for a wider range of applications for the top support positioning device. It enables the quartz indenter to be fixed in place simply by extending the housing into the upper space between the quartz ring and the quartz indenter (without needing to pre-set the housing extension height to ensure it is in the middle of the extension space).

[0051] The beneficial effects of the present invention are: (1) The present invention can bond the quartz ingot to the quartz ring with resin glue, thereby achieving the simultaneous cutting of two materials without changing the material cutting height, cutting width and cutting speed, thus realizing the efficient utilization of equipment capacity; (2) The present invention is equipped with a positioning device, and the lower support frame of the positioning device can be used for the support and limit of the lower side of the end of the quartz ring, preventing the quartz ring from shifting due to cutting force; (3) The present invention is equipped with a top support positioning device, so that the connection between the quartz ring and the quartz ingot will not shift due to uneven application of resin glue, thereby further improving the stability of the combined material after the quartz ring and the quartz ingot are fitted in multi-wire cutting, and improving the overall material cutting quality and efficiency.

[0052] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any way. Other variations and modifications may be made without departing from the technical solutions described in the claims.

Claims

1. A method for multi-wire cutting of quartz material, characterized in that, The specific steps are as follows: Step a: Place the quartz ring (1) on the resin pad (2) and glue it together; Step b: Insert the quartz ingot (3) into the quartz ring (1) and bond it with resin glue (4); Step c: The entire material is fixedly installed on the multi-wire cutting platform (5) using the resin pad (2), and the quartz ring (1) and quartz ingot (3) are positioned and supported by the positioning device (600) until the resin adhesive (4) is completely cured; wherein, the positioning device includes a lower support frame (604) slidably disposed in the upper side slide groove (603) of the multi-wire cutting platform (5), the lower support frame (604) includes a support body (605), and the positioning device also includes a top support positioning device (800), which includes a support body (605) disposed in the support body. (605) piston cylinder two (801), piston cylinder two (801) piston push rod box (802), box (802) with telescopic rod one (803) and telescopic rod two (804) offset in the upper and lower side walls of box (802), box (802) with servo motor two (805) inside, servo motor two (805) with gear (806) on output shaft of servo motor two (805), gear (806) meshing with rack (807) provided in the opposite side wall of telescopic rod one (803) and telescopic rod two (804); Step e: The entire material is cut from top to bottom using a multi-wire cutting device (7).

2. The processing method for multi-wire cutting of quartz material according to claim 1, characterized in that, The quartz ring (1) has a circular structure, and the quartz ingot (3) has a cylindrical structure. The inner diameter of the quartz ring (1) is larger than the outer diameter of the quartz ingot (3).

3. The processing method for multi-wire cutting of quartz material according to claim 2, characterized in that, The outer diameter of the quartz ring (1) is less than or equal to 600 mm.

4. The method for multi-wire cutting of quartz material according to any one of claims 1-3, characterized in that, The positioning device (600) in step c includes several servo motors (601) set on the multi-wire cutting platform (5), a lead screw (602) set on the output shaft of the servo motors (601), and a lower support frame (604) threadedly connected to the lead screw (602).

5. The processing method for multi-wire cutting of quartz material according to claim 4, characterized in that, There are two sets of lower support frames (604), which are respectively set on both sides of the port of the quartz ring (1). The lower support frame (604) also includes a piston cylinder (606) set on the support body (605) and a support body (607) set on the piston rod of the piston cylinder (606). The support body (607) is slidably connected to the support body (605).

6. The processing method for multi-wire cutting of quartz material according to claim 1, characterized in that, One end of the telescopic rod is provided with a top support plate (808), and the top support plate (808) is provided with an outwardly protruding arc-shaped surface (809).

7. The processing method for multi-wire cutting of quartz material according to claim 1, characterized in that, The telescopic rod 2 (804) has a top support plate 2 (810) at its end, and the top support plate 2 (810) has a concave arc-shaped surface 2 (811).

8. The method for multi-wire cutting of quartz material according to claim 5, characterized in that, The support body (605) is provided with a mounting seat (902), the piston cylinder (801) is fixedly mounted on the mounting seat (902), the mounting seat (902) is slidably mounted in the slide groove (603), and a set of telescopic springs (903) are provided between the upper and lower bottom walls of the slide groove (603) and the mounting seat (902).

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