Micro-chromatographic column with uniform stationary phase and method for preparing the same
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
- Filing Date
- 2023-10-20
- Publication Date
- 2026-07-24
Smart Images
Figure CN117741029B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of microelectromechanical systems and relates to a microchromatographic column with a uniform stationary phase and its preparation method. Background Technology
[0002] Gas chromatography, as a common analytical method, has been widely used in fields such as petrochemicals, drug testing, energy exploration, and environmental monitoring.
[0003] The core component of a gas chromatograph is the gas chromatographic column, which separates the gases in a mixed sample to be analyzed. In the entire testing system, the performance of the gas chromatographic column directly affects the analytical results of the entire gas chromatography system, as it plays a crucial role in separating the mixed gases. The stationary phase is one of the key factors determining the separation effect of the gas chromatographic column. The stationary phase has different adsorption and desorption capacities for different gases, resulting in different flow rates of different gas components in the channel, ultimately achieving the separation of the mixed gases. Inhomogeneous distribution of the stationary phase can lead to problems such as low resolution and severe peak tailing. Therefore, the uniformity of the stationary phase distribution determines the separation performance; a uniform distribution of the stationary phase is essential for achieving efficient separation of the detected gases.
[0004] Currently, the main methods for forming the stationary phase of microchromatographic columns are dynamic coating and static coating. In addition, chemical vapor deposition, metal evaporation, sputtering, and layer-by-layer stacking techniques have also been used in stationary phase preparation. However, it remains difficult to prepare microchromatographic columns with a uniform stationary phase. There are two main reasons for this: First, current microchromatographic columns are generally based on silica-glass bonding. The microchannels of the microchromatographic column are composed of two heterogeneous materials, silica and glass, making it difficult to obtain a stationary phase with uniform thickness distribution on different material surfaces. Second, the interaction between the microchannel surface and the stationary phase material is weak, making it difficult to obtain a stationary phase with uniform thickness distribution and easily leading to column bleed.
[0005] Therefore, it is necessary to provide a microchromatographic column with a uniform stationary phase and its preparation method. Summary of the Invention
[0006] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a microchromatographic column with a uniform stationary phase and a method for preparing the same, so as to solve the problem of uniformity of the stationary phase in the prior art.
[0007] To achieve the above and other related objectives, the present invention provides a microchromatographic column having a homogeneous stationary phase, the microchromatographic column comprising:
[0008] Substrate and cover plate;
[0009] A microchannel located in the substrate, the microchannel having a first port and a second port;
[0010] A first hydrophilic metal oxide layer and a second hydrophilic metal oxide layer, wherein the first hydrophilic metal oxide layer covers the surface of the substrate and the microchannel, the second hydrophilic metal oxide layer covers the surface of the cover plate, and the cover plate is bonded to the substrate based on the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer to cover the microchannel and form a closed microchannel.
[0011] A hydrophilic stationary phase layer covers the inner surface of the closed microchannels.
[0012] Optionally, it also includes a micropillar array composed of multiple micropillars located within the microchannel, wherein the micropillars include elliptical micropillars or circular micropillars; the morphology of the microchannel includes serpentine extension, zigzag extension, U-shaped extension or spiral extension.
[0013] Optionally, the first hydrophilic metal oxide layer includes one or a combination of a hydrophilic aluminum oxide layer, a hydrophilic zinc oxide layer, and a hydrophilic tin oxide layer; the second hydrophilic metal oxide layer includes one or a combination of a hydrophilic aluminum oxide layer, a hydrophilic zinc oxide layer, and a hydrophilic tin oxide layer.
[0014] Optionally, the hydrophilic stationary phase layer includes one or a combination of a hydrophilic MOF layer and a hydrophilic mesoporous silica layer.
[0015] Optionally, the substrate includes a silicon substrate, a glass substrate, or a ceramic substrate; the cover plate includes a glass cover plate, a silicon cover plate, or a ceramic cover plate.
[0016] This invention also provides a method for preparing a microchromatographic column with a uniform stationary phase, comprising the following steps:
[0017] Provide substrate;
[0018] The substrate is patterned, and a microchannel is formed in the substrate, the microchannel having a first port and a second port;
[0019] A first hydrophilic metal oxide layer is formed covering the surface of the substrate and the microchannel;
[0020] A cover plate is provided, and a second hydrophilic metal oxide layer is formed on the surface of the cover plate;
[0021] The cover plate is bonded to the substrate based on the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer to cover the microchannel and form a closed microchannel;
[0022] A hydrophilic stationary phase layer is formed, which covers the inner surface of the closed microchannel.
[0023] Optionally, when patterning the substrate, the process further includes forming a micropillar array composed of multiple micropillars within the microchannel, wherein the micropillars include elliptical micropillars or circular micropillars; the morphology of the formed microchannel includes serpentine extension, zigzag extension, U-shaped extension, or spiral extension.
[0024] Optionally, the method for forming the first hydrophilic metal oxide layer includes ALD, sputtering, or evaporation, and the first hydrophilic metal oxide layer formed includes one or a combination of hydrophilic aluminum oxide, hydrophilic zinc oxide, and hydrophilic tin oxide; the method for forming the second hydrophilic metal oxide layer includes ALD, sputtering, or evaporation, and the second hydrophilic metal oxide layer formed includes one or a combination of hydrophilic aluminum oxide, hydrophilic zinc oxide, and hydrophilic tin oxide.
[0025] Optionally, the method for forming the hydrophilic stationary phase layer includes a coating method, wherein the formed hydrophilic stationary phase layer includes one or a combination of a hydrophilic MOF layer and a hydrophilic mesoporous silica layer.
[0026] Optionally, the method of bonding the cover plate to the substrate based on the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer includes anodic bonding.
[0027] As described above, the microchromatographic column with a uniform stationary phase and its preparation method of the present invention can achieve homogeneous and good bonding between the substrate and the cover plate through the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer; the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer can homogenize the inner surface of the closed microchannel, improving the uniformity of the hydrophilic stationary phase layer; the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer can provide a hydrophilic surface, improve the hydrophilicity of the inner surface material of the closed microchannel, effectively improve the uniformity of the hydrophilic stationary phase layer, thereby improving the separation performance of the microchromatographic column. Attached Figure Description
[0028] Figure 1 The diagram shows the process flow chart for preparing the microchromatographic column in an embodiment of the present invention.
[0029] Figure 2 The diagram shown is a schematic representation of the structure formed by the microchannels and micropillar array on the patterned substrate in an embodiment of the present invention.
[0030] Figure 3 The diagram shown is a structural schematic of the first hydrophilic metal oxide layer after its formation in an embodiment of the present invention.
[0031] Figure 4 The diagram shown is a schematic diagram of the structure after the cover plate and the substrate are bonded in an embodiment of the present invention.
[0032] Figure 5The diagram shown is a schematic representation of the structure after the formation of a hydrophilic fixed phase layer in an embodiment of the present invention.
[0033] Figure 6 This diagram illustrates the principle of the combination of a hydrophilic metal oxide layer and a hydrophilic stationary phase layer in an embodiment of the present invention.
[0034] Component designation explanation
[0035] 100 substrate
[0036] 101 micropillar array
[0037] 102 microchannels
[0038] 103 First Port
[0039] 104 Second Port
[0040] 201 First hydrophilic metal oxide layer
[0041] 202 Second hydrophilic metal oxide layer
[0042] 300 cover plate
[0043] 400 Closed Microchannel
[0044] 500 hydrophilic fixed phase layer Detailed Implementation
[0045] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
[0046] In the detailed description of embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.
[0047] For ease of description, spatial relation terms such as “below,” “under,” “lower than,” “below,” “above,” and “upper” may be used herein to describe the relationship between one element or feature shown in the accompanying drawings and other elements or features. It will be understood that these spatial relation terms are intended to include orientations of the device in use or operation other than those depicted in the drawings, and may include embodiments in which the first and second features are formed in direct contact, or embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact. Furthermore, when a layer is referred to as “between” two layers, it may be the only layer between the two layers, or there may be one or more layers in between.
[0048] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.
[0049] See Figures 2-5 This embodiment provides a microchromatographic column with a homogeneous stationary phase, the microchromatographic column comprising:
[0050] Substrate 100 and cover plate 300;
[0051] Microchannel 102, the microchannel 102 is located in the substrate 100, the microchannel 102 has a first port 103 and a second port 104;
[0052] Micropillar array 101, the micropillar array 101 being located in the microchannel 102;
[0053] A first hydrophilic metal oxide layer 201 and a second hydrophilic metal oxide layer 202 are provided. The first hydrophilic metal oxide layer 201 covers the surface of the substrate 100, the microchannel 102 and the micropillar array 101. The second hydrophilic metal oxide layer 202 covers the surface of the cover plate 300. The cover plate 300 is bonded to the substrate 100 based on the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 to cover the microchannel 102 and form a closed microchannel 400, such that the surface of the closed microchannel 400 is coated with a hydrophilic metal oxide layer.
[0054] A hydrophilic fixed phase layer 500 covers the inner surface of the closed microchannel 400.
[0055] In this embodiment, a micropillar array 101 composed of multiple micropillars is provided in the microchannel 102, but it is not limited to this. In another embodiment, the micropillar array 101 may not be provided in the microchannel 102. The specific choice can be made according to the needs.
[0056] Specifically, in the microchromatographic column of this embodiment, the first hydrophilic metal oxide layer 201 covering the surface of the substrate 100, the microchannel 102, and the microcolumn array 101, and the second hydrophilic metal oxide layer 202 covering the cover plate 300, when the substrate 100 and the cover plate 300 in the microchromatographic column are made of different materials, and the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 are made of the same material, homogeneous bonding between the substrate 100 and the cover plate 300 can be achieved, which can further improve the bonding force; the presence of the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 can make the inner surface of the closed microchannel 400 homogeneous, so that the hydrophilic stationary phase layer 500 only contacts the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202, thus improving the uniformity of the distribution of the hydrophilic stationary phase layer 500.
[0057] Furthermore, since both the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 are hydrophilic, they can provide a hydrophilic surface to improve the hydrophilicity of the inner surface material of the closed microchannel 400. When in contact with the hydrophilic stationary phase layer 500, the uniformity of the distribution of the hydrophilic stationary phase layer 500 can be effectively improved, thereby improving the separation performance of the microchromatographic column.
[0058] As an example, the first hydrophilic metal oxide layer 201 may include one or a combination of a hydrophilic aluminum oxide layer, a hydrophilic zinc oxide layer, and a hydrophilic tin oxide layer; the second hydrophilic metal oxide layer 202 may include one or a combination of a hydrophilic aluminum oxide layer, a hydrophilic zinc oxide layer, and a hydrophilic tin oxide layer.
[0059] Specifically, the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 can provide hydrophilic groups to combine with the hydrophilic stationary phase layer 500 which has hydrophilic groups, thereby improving the interfacial force, making the hydrophilic stationary phase layer 500 uniformly distributed, and less prone to column loss.
[0060] The first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 can be made of the same material, or different materials can be used as needed. The first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 can be a single layer or a stacked composite structure. No excessive limitation is made here, and the choice can be made as needed.
[0061] In this embodiment, the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 are preferably made of the same material, and the hydrophilic alumina layer is selected as the hydrophilic metal oxide layer. However, it is not limited to this. As needed, the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 can also be a stacked composite structure. Preferably, the hydrophilic metal oxide layer exposed on the surface of the closed microchannel 400 is made of the same material in order to improve the bonding force between the hydrophilic metal oxide layer and the hydrophilic fixed phase layer 500.
[0062] As an example, the hydrophilic stationary phase layer 500 may include one or a combination of a hydrophilic MOF layer and a hydrophilic mesoporous silica layer, but is not limited thereto.
[0063] Specifically, the hydrophilic fixed phase layer 500 has different adsorption and desorption capabilities for different gases, which allows different gas components to have different flow rates in the closed microchannel 400 and different gas components to reach the second port 104 from the first port 103 at different times, thereby enabling the separation of the mixed gas.
[0064] The hydrophilic properties of the hydrophilic fixed phase layer 500 enable it to interact well with the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 located on the inner surface of the closed microchannel 400, thereby improving the uniformity of the distribution of the hydrophilic fixed phase layer 500.
[0065] Regarding the selection of the material of the hydrophilic stationary phase layer 500, it can be a single-layer hydrophilic MOF layer, such as HKUST-1 layer, UiO-67 layer, etc., to provide hydrophilic groups, such as -NH2, -COOH, -OH, etc. Alternatively, the hydrophilic stationary phase layer 500 can also be selected as a hydrophilic mesoporous silica layer, or the hydrophilic stationary phase layer 500 can also be a stacked composite structure of hydrophilic MOF, or a stacked composite structure composed of hydrophilic MOF layer and hydrophilic mesoporous silica layer, etc.
[0066] like Figure 6In this embodiment, both the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 are hydrophilic aluminum oxide layers, and the hydrophilic stationary phase layer 500 is an HKUST-1 layer to form a good bonding force. However, the selection of the first hydrophilic metal oxide layer 201, the second hydrophilic metal oxide layer 202 and the hydrophilic stationary phase layer 500 is not limited to this.
[0067] As an example, the substrate 100 may include a silicon substrate, a glass substrate, or a ceramic substrate; the cover plate 300 may include a glass cover plate, a silicon cover plate, or a ceramic cover plate.
[0068] Specifically, the substrate 100 and the cover plate 300 can be made of the same material, but different materials can be used as needed. In this embodiment, the substrate 100 is a commonly used silicon substrate, and the cover plate 300 is a glass cover plate, but it is not limited to these.
[0069] As an example, the micropillars in the micropillar array 101 may include elliptical micropillars or circular micropillars.
[0070] Specifically, when the micropillar is an elliptical micropillar, preferably the major axis of the elliptical micropillar is parallel to the extending direction of the microchannel 102, and the minor axis of the elliptical micropillar is parallel to the width direction of the microchannel 102, such as... Figure 2 As shown, the micropillar array 101 can be formed by arranging multiple micropillars located in the microchannel 102, which greatly reduces the area of the "quasi-zero flow velocity region" formed by the micropillars, so as to facilitate the uniform attachment of the hydrophilic fixed phase layer 500 and make the flow velocity distribution in the column uniform. However, it is not limited to this. The micropillars can also be circular micropillars. The specific morphology of the micropillar array 101 is not limited here.
[0071] As an example, the morphology of the microchannel 102 may include a serpentine extension, a zigzag extension, a U-shaped extension, or a spiral extension.
[0072] Specifically, such as Figure 2 In this embodiment, the microchannel 102 extends in a serpentine shape. Of course, in other examples, the microchannel 102 can also extend in the substrate 100 in any way, such as zigzag extension, U-shaped extension, spiral extension, etc. There are no excessive restrictions here.
[0073] See Figure 1 The present invention also provides a method for preparing a microchromatographic column with a uniform stationary phase, comprising the following steps:
[0074] S1: Provide substrate 100;
[0075] S2: Pattern the substrate 100 and form a microchannel 102 and a micropillar array 101 in the substrate 100, wherein the microchannel 102 has a first port 103 and a second port 104, and the micropillar array 101 is located in the microchannel 102;
[0076] S3: Form a first hydrophilic metal oxide layer 201 covering the surfaces of the substrate 100, the microchannel 102 and the micropillar array 101;
[0077] S4: Provide a cover plate 300, and form a second hydrophilic metal oxide layer 202 on the surface of the cover plate 300;
[0078] S5: The cover plate 300 is bonded to the substrate 100 based on the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 to cover the microchannel 102 and form a closed microchannel 400.
[0079] S6: Form a hydrophilic fixed phase layer 500, which covers the inner surface of the closed microchannel 400.
[0080] Specifically, the microchromatographic column described above can be prepared using this method, but it is not limited to this method. It can also be adapted and transformed as needed. In this embodiment, when the substrate 100 is patterned, a microcolumn array 101 composed of multiple microcolumns is formed in the microchannel. However, it is not limited to this. In another embodiment, the microcolumn array 101 may not be provided in the microchannel 102. The specific selection can be made as needed.
[0081] The following is in conjunction with the appendix Figure 2 ~Attached Figure 5 The preparation of the microchromatographic column is described below.
[0082] First, refer to Figure 1 and Figure 2 Steps S1 and S2 are performed to provide a substrate 100 and to pattern the substrate 100, forming a microchannel 102 and a micropillar array 101 in the substrate 100, wherein the microchannel 102 has a first port 103 and a second port 104, and the micropillar array 101 is located in the microchannel 102.
[0083] Specifically, the substrate 100 may include a silicon substrate, a glass substrate, or a ceramic substrate, etc. The substrate 100 may be patterned using a DRIE process. For example, a mask layer (not shown), such as a silicon oxide mask layer, a silicon nitride mask layer, or a photoresist mask layer, may be formed on the surface of the substrate 100. The mask layer is patterned by photolithography and etching, and then the substrate 100 is etched to form the microchannel 102 with the first port 103 and the second port 104 and the micropillar array 101 in the substrate 100. The mask layer is then removed. The method for patterning the substrate 100 is not limited to the DRIE process.
[0084] Next, refer to Figure 1 and Figure 3 Step S3 is executed to form a first hydrophilic metal oxide layer 201 covering the surfaces of the substrate 100, the microchannel 102 and the micropillar array 101.
[0085] The method for forming the first hydrophilic metal oxide layer 201 may include, but is not limited to, atomic layer deposition (ALD), sputtering, or evaporation. The formed first hydrophilic metal oxide layer 201 may include one or a combination of hydrophilic aluminum oxide, hydrophilic zinc oxide, and hydrophilic tin oxide. In this embodiment, the atomic layer deposition method is preferred because it exhibits excellent performance in conformal deposition of thin films within the high aspect ratio microchannel 102.
[0086] Next, refer to Figure 1 and Figure 4 In step S4, a cover plate 300 is provided, and a second hydrophilic metal oxide layer 202 is formed on the surface of the cover plate 300.
[0087] Specifically, the cover plate 300 may include a glass cover plate, a silicon cover plate, or a ceramic cover plate. The cover plate 300 and the substrate 100 may be made of the same material or different materials, which is not limited here.
[0088] The method for forming the second hydrophilic metal oxide layer 202 may include, but is not limited to, atomic layer deposition (ALD), sputtering or evaporation. The formed second hydrophilic metal oxide layer 202 may include one or a combination of hydrophilic aluminum oxide layer, hydrophilic zinc oxide layer and hydrophilic tin oxide layer.
[0089] The preparation method of the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 is not overly restricted here, but the ALD method is preferred. The materials of the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 can be homogeneous or heterogeneous, and are not overly restricted here.
[0090] Next, refer to Figure 1and Figure 4 In step S5, the cover plate 300 is bonded to the substrate 100 based on the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 to cover the microchannel 102 and form a closed microchannel 400.
[0091] The cover plate 300 can be bonded to the substrate 100 using, but is not limited to, anodizing bonding. The bonding process conditions can be selected as needed, and no excessive restrictions are imposed here.
[0092] Specifically, the cover plate 300 can be placed in the cathode of the bonding machine, and the substrate 100 can be placed in the anode of the bonding machine to perform silicon glass anodic bonding. After bonding is completed, the first port 103 and the second port 104 can be exposed by dicing. Then, capillaries (not shown) can be installed and fixed in the first port 103 and the second port 104 to facilitate the subsequent preparation of the hydrophilic fixed phase layer 500.
[0093] In this embodiment, it is preferable that the first hydrophilic metal oxide layer 201 and the second hydrophilic metal oxide layer 202 are made of the same material, so as to improve the bonding force between the cover plate 300 and the substrate 100, and to improve the uniformity of the distribution of the subsequent hydrophilic fixed phase layer 500.
[0094] Next, refer to Figure 1 and Figure 5 Step S6 is executed to form a hydrophilic fixed phase layer 500, which covers the inner surface of the closed microchannel 400.
[0095] Specifically, the method for forming the hydrophilic stationary phase layer 500 may be a coating method, such as a dynamic coating method, but is not limited to this. The formed hydrophilic stationary phase layer 500 may include one or a combination of a hydrophilic MOF layer and a hydrophilic mesoporous silica layer.
[0096] The types and beneficial effects of the first hydrophilic metal oxide layer 201, the second hydrophilic metal oxide layer 202, and the hydrophilic stationary phase layer 500 will not be elaborated here; please refer to the above introduction of the microchromatographic column.
[0097] In summary, the microchromatographic column with a uniform stationary phase and its preparation method of the present invention achieve good homogeneous bonding between the substrate and the cover plate through the first and second hydrophilic metal oxide layers; the first and second hydrophilic metal oxide layers homogenize the inner surface of the closed microchannels, improving the uniformity of the hydrophilic stationary phase layer; the first and second hydrophilic metal oxide layers provide a hydrophilic surface, improving the hydrophilicity of the inner surface material of the closed microchannels, effectively improving the uniformity of the hydrophilic stationary phase layer, thereby improving the separation performance of the microchromatographic column.
[0098] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.
Claims
1. A microchromatographic column with a homogeneous stationary phase, characterized in that, The microchromatographic column includes: Substrate and cover plate; A microchannel located in the substrate, the microchannel having a first port and a second port; A first hydrophilic metal oxide layer and a second hydrophilic metal oxide layer are provided. The first hydrophilic metal oxide layer covers the surface of the substrate and the microchannel, and the second hydrophilic metal oxide layer covers the surface of the cover plate. The cover plate is bonded to the substrate based on the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer to cover the microchannel and form a closed microchannel. The first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer are made of the same material, so that the inner surface of the closed microchannel is homogeneous. A hydrophilic stationary phase layer covers the inner surface of the closed microchannels, and the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer provide hydrophilic groups to bind with the hydrophilic stationary phase layer having hydrophilic groups.
2. The microchromatographic column according to claim 1, characterized in that: It also includes a micropillar array composed of multiple micropillars located within the microchannel, wherein the micropillars include elliptical micropillars or circular micropillars; the morphology of the microchannel includes serpentine extension, zigzag extension, U-shaped extension or spiral extension.
3. The microchromatographic column according to claim 1, characterized in that: The first hydrophilic metal oxide layer includes one or a combination of a hydrophilic aluminum oxide layer, a hydrophilic zinc oxide layer, and a hydrophilic tin oxide layer; the second hydrophilic metal oxide layer includes one or a combination of a hydrophilic aluminum oxide layer, a hydrophilic zinc oxide layer, and a hydrophilic tin oxide layer.
4. The microchromatographic column according to claim 1, characterized in that: The hydrophilic stationary phase layer includes one or a combination of a hydrophilic MOF layer and a hydrophilic mesoporous silica layer.
5. The microchromatographic column according to claim 1, characterized in that: The substrate includes a silicon substrate, a glass substrate, or a ceramic substrate; the cover plate includes a glass cover plate, a silicon cover plate, or a ceramic cover plate.
6. A method for preparing a microchromatographic column with a homogeneous stationary phase, characterized in that, Includes the following steps: Provide substrate; The substrate is patterned, and a microchannel is formed in the substrate, the microchannel having a first port and a second port; A first hydrophilic metal oxide layer is formed covering the surface of the substrate and the microchannel; A cover plate is provided, and a second hydrophilic metal oxide layer is formed on the surface of the cover plate; The cover plate is bonded to the substrate based on the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer to cover the microchannel and form a closed microchannel; wherein the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer are made of the same material, so that the inner surface of the closed microchannel is homogeneous. A hydrophilic stationary phase layer is formed, which covers the inner surface of the closed microchannel, and the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer provide hydrophilic groups to bind with the hydrophilic stationary phase layer having hydrophilic groups.
7. The method for preparing the microchromatographic column according to claim 6, characterized in that: The patterning of the substrate also includes forming a micropillar array composed of multiple micropillars within the microchannel, wherein the micropillars include elliptical micropillars or circular micropillars; the morphology of the formed microchannel includes serpentine extension, zigzag extension, U-shaped extension or spiral extension.
8. The method for preparing a microchromatographic column according to claim 6, characterized in that: The method for forming the first hydrophilic metal oxide layer includes ALD, sputtering, or evaporation, and the first hydrophilic metal oxide layer formed includes one or a combination of hydrophilic aluminum oxide layer, hydrophilic zinc oxide layer, and hydrophilic tin oxide layer; the method for forming the second hydrophilic metal oxide layer includes ALD, sputtering, or evaporation, and the second hydrophilic metal oxide layer formed includes one or a combination of hydrophilic aluminum oxide layer, hydrophilic zinc oxide layer, and hydrophilic tin oxide layer.
9. The method for preparing a microchromatographic column according to claim 6, characterized in that: The method for forming the hydrophilic stationary phase layer includes a coating method, wherein the formed hydrophilic stationary phase layer includes one or a combination of a hydrophilic MOF layer and a hydrophilic mesoporous silica layer.
10. The method for preparing a microchromatographic column according to claim 6, characterized in that: The method of bonding the cover plate to the substrate based on the first hydrophilic metal oxide layer and the second hydrophilic metal oxide layer includes anodizing bonding.