A silicon nitride high-pressure exhaust device
By designing a detachable exhaust pipe and a dust collection filter, the problems of large size, heavy weight, and inconvenient cleaning of silicon nitride high-pressure exhaust devices were solved, achieving the separation and collection of gas and dust, and ensuring the normal operation of the device under high temperature and high pressure.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZHUZHOU RUIDEER METALLURGICAL EQUIP MFG CO LTD
- Filing Date
- 2023-12-22
- Publication Date
- 2026-07-14
Smart Images
Figure CN117760227B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of silicon nitride sintering technology, and more particularly to a high-pressure exhaust device for silicon nitride. Background Technology
[0002] Silicon nitride ceramics are inorganic ceramic materials that do not shrink during sintering. Silicon nitride has very high strength, especially hot-pressed silicon nitride, which is one of the hardest substances in the world. It possesses properties such as high strength, low density, and high temperature resistance. Si3N4 ceramics are covalent compounds with the basic structural unit being the [SiN4] tetrahedron. A silicon atom is located at the center of the tetrahedron, surrounded by four nitrogen atoms at the four vertices. These nitrogen atoms then share a single atom across three tetrahedra, forming a continuous and robust network structure in three-dimensional space.
[0003] During the sintering of silicon nitride ceramics, gases such as nitrogen and silicon nitride dust suspended in the gas are generated. Therefore, it is necessary to discharge and collect the gas and silicon nitride dust from the high-temperature furnace. In the existing technology, a high-pressure exhaust tank is used to collect and remove the gas and silicon nitride dust discharged from the high-temperature furnace. However, this structure is large, bulky and inflexible, complex and has many intermediate blockages (multiple ball valves and heat dissipation fins). It is very inconvenient to clean and often gets blocked under high temperature and high pressure conditions, preventing it from working properly and ensuring normal operation during the sintering process. Summary of the Invention
[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide a silicon nitride high-pressure exhaust device that solves the problems of large size, bulkiness, inflexibility, complex structure, and inconvenience in cleaning of existing silicon nitride high-pressure exhaust devices.
[0005] To achieve the above objectives, the present invention provides the following technical solution: a silicon nitride high-pressure exhaust device, comprising an exhaust pipe assembly, a valve body, and a filter dust collection mechanism. The exhaust pipe assembly is formed by several high-temperature and high-pressure resistant exhaust pipes detachably connected to form an exhaust channel. The first end of the exhaust pipe assembly is connected to a high-temperature furnace, and the tail end of the exhaust pipe assembly is provided with parallel branches, one of which is connected to a vacuum pump, and the other is connected to a gas collection port. The exhaust pipe assembly is provided with a first cooling structure. The valve body is located on the parallel branch at the tail end of the exhaust pipe assembly. The filter dust collection mechanism is detachably located at the first end of the exhaust pipe assembly for filtering dust in the flowing gas and collecting the dust.
[0006] The exhaust pipe assembly includes a first exhaust pipe, a second exhaust pipe, a third exhaust pipe, a fourth exhaust pipe, a fifth exhaust pipe, a sixth exhaust pipe, a seventh exhaust pipe, an eighth exhaust pipe, and several ninth exhaust pipes. The first exhaust pipe has a dust discharge port at its first end, which is connected to a high-temperature furnace. The first exhaust pipe is connected to the second exhaust pipe at its tail end. The ends of the first exhaust pipe are detachably connected to a first sealing structure. The filter dust collection mechanism is detachably installed at the end of the first exhaust pipe near the second exhaust pipe. The second, third, fourth, fifth, and sixth exhaust pipes are connected end-to-end in sequence. The tail ends of the second, fourth, fifth, and sixth exhaust pipes are detachably connected to a second sealing structure. The tail end of the third exhaust pipe is connected in parallel to the seventh exhaust pipe. The end of the seventh exhaust pipe away from the third exhaust pipe is connected to a vacuum pump. The sixth exhaust pipe is connected in parallel to the eighth exhaust pipe and several ninth exhaust pipes. The ends of the eighth and ninth exhaust pipes away from the sixth exhaust pipe are connected to a gas collection port.
[0007] Both the first and second sealing structures are blind flanges, which are detachably installed on the first, second, fourth, fifth, and sixth exhaust pipes by bolts.
[0008] The blind flange is equipped with an O-ring at the connection between it and each exhaust pipe.
[0009] The first cooling structure includes sleeves respectively fitted on the outside of the first exhaust pipe, the second exhaust pipe, the third exhaust pipe, the fourth exhaust pipe and the fifth exhaust pipe. The sleeves form closed cooling water channels with the first exhaust pipe, the second exhaust pipe, the third exhaust pipe, the fourth exhaust pipe and the fifth exhaust pipe. One end of the cooling water channel is provided with a water inlet and the other end is provided with a water outlet.
[0010] The first exhaust pipe is also equipped with a second cooling structure, which is installed inside the first exhaust pipe near the second exhaust pipe via a blind flange.
[0011] The second cooling structure includes an outer water pipe and an inner water pipe arranged parallel to the first exhaust pipe. The outer water pipe is sleeved outside the inner water pipe. The end of the inner water pipe away from the second exhaust pipe is connected to the outer water pipe. The end of the outer water pipe away from the second exhaust pipe is sealed. The ends of the inner water pipe and the outer water pipe near the second exhaust pipe extend through the blind flange to the outside and are respectively connected to the inlet water pipe and the outlet water pipe.
[0012] The dust collection and filtration mechanism includes several filter plates for filtering dust in the gas. The filter plates are spaced apart and fitted onto the outer water pipe and matched with the inner wall of the first exhaust pipe. One side of the filter plate is bent in the direction of gas flow to form a bend. The bend and the inner wall of the first exhaust pipe form a gap for gas flow. The bends of two adjacent filter plates are staggered.
[0013] The dust collection mechanism also includes a dust collection box located at the bottom of the first exhaust pipe near the second exhaust pipe. The dust collection box is connected to the adjacent blind flange via a connecting block, and the bottom of the dust collection box is equipped with wheels.
[0014] The valve body includes a high-pressure isolation valve, a pneumatic regulating valve, a manual ball valve, and a pneumatic exhaust valve. The high-pressure isolation valve and the pneumatic regulating valve are installed on the seventh exhaust pipe, the manual ball valve is installed on the eighth and ninth exhaust pipes, and the pneumatic exhaust valve is installed on the ninth exhaust pipe.
[0015] Compared to existing technologies, the above technical solution brings the following technical effects:
[0016] This invention utilizes a design where several exhaust pipes are detachably connected to form an exhaust channel. Gases and silicon nitride dust discharged from the high-temperature furnace pass through this channel, where a filtration and dust collection mechanism filters and collects the dust. The gas then flows to the tail end of the exhaust pipe assembly for further collection, achieving separate collection of the gas and silicon nitride dust generated within the high-temperature silicon nitride furnace. By replacing the existing high-pressure exhaust tank structure with a detachable pipe structure, and with the filtration and dust collection mechanism detachably mounted on the exhaust pipe assembly, this device is small, flexible, simple in structure, and easy to disassemble for cleaning, preventing blockages under high temperature and pressure conditions and ensuring normal operation during the sintering process. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention;
[0019] Figure 2 yes Figure 1 The diagram on the left;
[0020] Figure 3 This is an internal sectional view of the first exhaust pipe of the present invention;
[0021] Explanation of key component symbols:
[0022] 1. Exhaust pipe assembly; 101. First exhaust pipe; 102. Second exhaust pipe; 103. Third exhaust pipe; 104. Fourth exhaust pipe; 105. Fifth exhaust pipe; 106. Sixth exhaust pipe; 107. Seventh exhaust pipe; 108. Eighth exhaust pipe; 109. Ninth exhaust pipe; 2. Valve body; 21. High-pressure isolation valve; 22. Pneumatic regulating valve; 23. Manual ball valve; 24. Pneumatic exhaust valve; 3. Filter and dust collection mechanism; 31. Filter plate; 32. Dust collection box; 4. Gas collection port; 5. First cooling structure; 6. Dust discharge port; 7. First sealing structure; 8. Second sealing structure; 9. Second cooling structure; 91. External water pipe; 92. Internal water pipe; 10. Water inlet pipe; 11. Water outlet pipe; 12. Connecting block; 13. Traveling wheels. Detailed Implementation
[0023] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0024] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.
[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.
[0026] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.
[0027] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0028] like Figures 1 to 3 As shown, the silicon nitride high-pressure exhaust device of this embodiment includes an exhaust pipe assembly 1, a valve body 2, and a filter dust collection mechanism 3. The exhaust pipe assembly 1 is formed by several high-temperature and high-pressure resistant exhaust pipes detachably connected to form an exhaust channel. The first end of the exhaust pipe assembly 1 is connected to a high-temperature furnace, and the last end of the exhaust pipe assembly 1 is provided with a parallel branch. One of the parallel branches is connected to a vacuum pump (not shown in the figure), and the other parallel branch is connected to a gas collection port 4. The exhaust pipe assembly 1 is provided with a first cooling structure 5. The valve body 2 is provided on the parallel branch at the last end of the exhaust pipe assembly 1. The filter dust collection mechanism 3 is detachably provided at the first end of the exhaust pipe assembly 1 and is used to filter dust in the flowing gas and collect the dust.
[0029] Specifically, the exhaust pipe assembly 1 is composed of several carbon steel pipes that are detachably connected by bolts between two connecting flanges. This allows for easy disassembly during cleaning. The carbon steel pipes are resistant to high temperature and high pressure. The first end of the exhaust pipe assembly 1 is connected to the existing wax inlet of the high-temperature furnace, and the inner diameter of the exhaust pipe assembly 1 is larger than that of the wax inlet of the high-temperature furnace, increasing the pressure-bearing area.
[0030] Before silicon nitride is sintered in a vacuum high-temperature furnace, the air in the furnace and exhaust channel is first evacuated, creating a vacuum. During sintering, silicon nitride generates a large amount of gas and silicon nitride dust suspended in the gas. Since a large amount of nitrogen needs to be added to the furnace during sintering, the furnace becomes at normal pressure. The valve 2 at the end of the exhaust pipe assembly 1 is opened, and the pressure inside the furnace is greater than the pressure in the exhaust channel. This allows the gas and dust in the furnace to enter the exhaust channel from the dewaxing port. The first cooling structure 5 absorbs heat from the gas, cooling the gas in the exhaust channel. As the gas temperature decreases, dust adheres more easily to the exhaust channel. The dust collection and filtration mechanism 3 filters the dust in the passing gas, intercepting and collecting the dust to separate the gas from the dust. The gas continues to flow along the exhaust channel to the parallel branch at the end of the exhaust pipe assembly 1. By controlling the valve 2 on the parallel branch corresponding to the vacuum pump and gas collection port 4, the gas can be selected to exit from the vacuum pump or be discharged from the gas collection port 4 for collection. This device replaces the high-pressure exhaust tank with a pipeline structure, achieving a small and flexible size, a simple structure that is easy to disassemble and clean, and avoiding blockages under high temperature and high pressure conditions.
[0031] The installation of the vacuum pump can be selected and controlled according to the production process. The vacuum pump controls the entry of external air into the exhaust channel or controls the discharge of gas in the exhaust channel by reversing the direction of rotation. The vacuum pump can adjust the pressure inside the furnace according to actual needs to ensure that the gas generated inside the high-temperature furnace passes smoothly through the exhaust channel.
[0032] Specifically, the bottom of the exhaust pipe assembly 1 is provided with a support structure to support it, and the height of the exhaust pipe assembly 1 can be adjusted through the support structure.
[0033] In one specific embodiment, the exhaust pipe assembly 1 includes a first exhaust pipe 101, a second exhaust pipe 102, a third exhaust pipe 103, a fourth exhaust pipe 104, a fifth exhaust pipe 105, a sixth exhaust pipe 106, a seventh exhaust pipe 107, an eighth exhaust pipe 108, and several ninth exhaust pipes 109. The first exhaust pipe 101 has a dust discharge port 6 at its head, which is connected to a high-temperature furnace. The tail end of the first exhaust pipe 101 is connected to the second exhaust pipe 102. A first sealing structure 7 is detachably connected to both ends of the first exhaust pipe 101. A filter dust collection mechanism 3 is detachably disposed at one end of the first exhaust pipe 101 near the second exhaust pipe 102. Pipe 102, third exhaust pipe 103, fourth exhaust pipe 104, fifth exhaust pipe 105 and sixth exhaust pipe 106 are connected end to end in sequence. The tail ends of the second exhaust pipe 102, fourth exhaust pipe 104, fifth exhaust pipe 105 and sixth exhaust pipe 106 are all detachably connected to a second sealing structure 8. The tail end of the third exhaust pipe 103 is connected in parallel to the seventh exhaust pipe 107. The end of the seventh exhaust pipe 107 away from the third exhaust pipe 103 is connected to a vacuum pump. The sixth exhaust pipe 106 is connected in parallel to the eighth exhaust pipe 108 and several ninth exhaust pipes 109. The ends of the eighth exhaust pipe 108 and the ninth exhaust pipes 109 away from the sixth exhaust pipe 106 are connected to the gas collection port 4.
[0034] Both the first sealing structure 7 and the second sealing structure 8 are blind flanges. The ends of the first exhaust pipe 101, second exhaust pipe 102, fourth exhaust pipe 104, fifth exhaust pipe 105, and sixth exhaust pipe 106 are welded with connecting flanges. The blind flanges are detachably connected to each connecting flange by bolts. Gas and silicon nitride dust inside the high-temperature furnace pass through the first exhaust pipe 101, and dust adheres to the inner wall of the first exhaust pipe 101. This dust can be removed by disassembling the end of the first exhaust pipe 101 (e.g., ...). Figure 1 The blind flange at the right end facilitates access to the first exhaust pipe 101 (e.g., the end of the right exhaust pipe). Figure 1 Clean the right end, and then install the blind flange to seal the first exhaust pipe 101. Most of the dust is filtered and collected by the dust collection mechanism 3. Since the dust collection mechanism 3 can be detached and installed on the first exhaust pipe 101, it can be disassembled and cleaned periodically. A very small amount of dust continues to flow with the gas. Similarly, after disassembling other blind flanges, the dust in other corresponding exhaust pipes can also be cleaned. After cleaning, the blind flange is installed.
[0035] In one specific embodiment of this invention, an "O" ring is provided at the connection between the blind flange and each exhaust pipe to prevent gas and dust from being discharged from the exhaust channel.
[0036] In one specific embodiment, the first cooling structure 5 includes sleeves respectively fitted on the outside of the first exhaust pipe 101, the second exhaust pipe 102, the third exhaust pipe 103, the fourth exhaust pipe 104 and the fifth exhaust pipe 105. The sleeves and the first exhaust pipe 101, the second exhaust pipe 102, the third exhaust pipe 103, the fourth exhaust pipe 104 and the fifth exhaust pipe 105 form closed cooling water channels. One end of the cooling water channel is provided with a water inlet and the other end is provided with a water outlet.
[0037] The first exhaust pipe 101, the second exhaust pipe 102, the third exhaust pipe 103, the fourth exhaust pipe 104, and the fifth exhaust pipe 105 form a water jacket structure with the sleeve. Gas runs in the first exhaust pipe 101, the second exhaust pipe 102, the third exhaust pipe 103, the fourth exhaust pipe 104, and the fifth exhaust pipe 105, and cooling water runs in the cooling water channel. When the cooling water carries away the heat in the gas, it cools down the gas, and dust adheres better to the exhaust channel.
[0038] In one specific embodiment, a second cooling structure 9 is also provided inside the first exhaust pipe 101. The second cooling structure 9 is installed inside the first exhaust pipe 101 near the end of the second exhaust pipe 102 via a blind flange. The second cooling structure 9 includes an outer water pipe 91 and an inner water pipe 92 arranged parallel to the first exhaust pipe 101. The outer water pipe 91 is sleeved outside the inner water pipe 92. The end of the inner water pipe 92 away from the second exhaust pipe 102 is connected to the outer water pipe 91. The end of the outer water pipe 91 away from the second exhaust pipe 102 is sealed. The ends of the inner water pipe 92 and the outer water pipe 91 near the second exhaust pipe 102 extend through the blind flange to the outside and are respectively connected to the inlet pipe 10 and the outlet pipe 11.
[0039] Cooling water is injected into the inlet pipe 10 and flows along the inner water pipe 92. It flows to the other end of the inner water pipe 92 and enters the outer water pipe 91. It then flows along the outer water pipe 91 until it flows out from the outlet pipe 11. The cooling water forms a meandering loop, which greatly increases the flow distance, improves the heat absorption capacity, and further cools the gas.
[0040] like Figure 3 As shown, in one specific embodiment, the dust collection mechanism 3 includes a plurality of filter plates 31 for filtering dust in the gas. The filter plates 31 are annular and are spaced on the outer water pipe 91 and matched with the inner wall of the first exhaust pipe 101. One side of the filter plate 31 is bent in the direction of gas flow to form a bend. The bend and the inner wall of the first exhaust pipe 101 form a gap for gas flow. The bends of two adjacent filter plates 31 are staggered. The dust collection mechanism 3 also includes a dust collection box 32 located at the bottom of the first exhaust pipe 101 near the second exhaust pipe 102. The dust collection box 32 is connected to the adjacent blind flange through the connecting block 12. The bottom of the dust collection box 32 is provided with a traveling wheel 13.
[0041] When gas and dust pass through filter plate 31, the gas flows smoothly through the gap between the bend and the inner wall of the first exhaust pipe 101 due to its good fluidity. Dust impacts and accumulates on filter plate 31. The bends of adjacent filter plates 31 are staggered (the bend of the first filter plate 31 is at the top, the bend of the second filter plate 31 is at the bottom, and the bend of the third filter plate 31 is at the top, creating a symmetrical staggered design; a left-right symmetrical staggered design is also possible). This causes the gas to flow in a curved path, better filtering the gas and dust. During cleaning, the blind flange is removed from the tail of the first exhaust pipe 101, and pulled outwards, causing the filter plate 31 and dust collection box 32 to move. The filter plate 31 scrapes the dust from the inner wall of the first exhaust pipe 101, and the dust falls into the dust collection box 32. The dust adhering to the filter plate 31 is then processed. The bottom of the dust collection box 32 is equipped with casters 13, making the dust collection box 32 more flexible in its movement.
[0042] In one specific embodiment, the valve body 2 includes a high-pressure isolation valve 21, a pneumatic regulating valve 22, a manual ball valve 23, and a pneumatic exhaust valve 24. The high-pressure isolation valve 21 and the pneumatic regulating valve 22 are installed on the seventh exhaust pipe 107. The high-pressure isolation valve 21 can be used to protect the pneumatic regulating valve 22. The manual ball valve 23 is installed on the eighth exhaust pipe 108 and the ninth exhaust pipe 109 and can control the gas emission. The pneumatic exhaust valve 24 is installed on the ninth exhaust pipe 109. Under normal circumstances, the manual ball valve 23 on the ninth exhaust pipe 109 is normally open, and the manual ball valve 23 on the eighth exhaust pipe 108 is normally closed. When the pneumatic exhaust valve 24 is damaged, it is controlled by the manual ball valve 23. When the high-temperature furnace leaks gas, the manual ball valve 23 and the pneumatic exhaust valve 24 are closed.
[0043] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0044] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments, as long as they meet the purpose of the present invention, and all such changes should be within the scope of protection claimed by the present invention. For example, different combinations of specific embodiments and different combinations of distinguishing technical features.
Claims
1. A silicon nitride high-pressure exhaust device, characterized in that, include: An exhaust pipe assembly (1) is formed by detachably connecting several high-temperature and high-pressure exhaust pipes to form an exhaust channel. The first end of the exhaust pipe assembly (1) is connected to a high-temperature furnace. The tail end of the exhaust pipe assembly (1) is provided with parallel branches, one of which is connected to a vacuum pump and the other is connected to a gas collection port (4). The exhaust pipe assembly (1) is provided with a first cooling structure (5). Valve body (2) is installed on the parallel branch at the tail end of exhaust pipe assembly (1); The dust collection mechanism (3) is detachably installed at the head end of the exhaust pipe assembly (1) and is used to filter dust in the flowing gas and collect the dust. The exhaust pipe assembly (1) includes a first exhaust pipe (101), a second exhaust pipe (102), a third exhaust pipe (103), a fourth exhaust pipe (104), a fifth exhaust pipe (105), a sixth exhaust pipe (106), a seventh exhaust pipe (107), an eighth exhaust pipe (108), and several ninth exhaust pipes (109). The first exhaust pipe (101) has a dust discharge port (6) at its head end, which is connected to a high-temperature furnace. The tail end of the first exhaust pipe (101) is connected to the second exhaust pipe (102). The ends of the first exhaust pipe (101) are detachably connected to a first sealing structure (7). The filter dust collection mechanism (3) The first exhaust pipe (101) is detachably installed at one end near the second exhaust pipe (102). The second exhaust pipe (102), the third exhaust pipe (103), the fourth exhaust pipe (104), the fifth exhaust pipe (105) and the sixth exhaust pipe (106) are connected end to end in sequence. The tail ends of the second exhaust pipe (102), the fourth exhaust pipe (104), the fifth exhaust pipe (105) and the sixth exhaust pipe (106) are detachably connected to the second sealing structure (8). The tail end of the third exhaust pipe (103) is connected in parallel to the seventh exhaust pipe (107). The end of the seventh exhaust pipe (107) away from the third exhaust pipe (103) is connected to the vacuum pump. The sixth exhaust pipe (106) is connected in parallel to the eighth exhaust pipe (108) and several ninth exhaust pipes (109). The ends of the eighth exhaust pipe (108) and the ninth exhaust pipes (109) away from the sixth exhaust pipe (106) are connected to the gas collection port (4). The first exhaust pipe (101) is also provided with a second cooling structure (9), which is installed inside the first exhaust pipe (101) near the second exhaust pipe (102) via a blind flange; The second cooling structure (9) includes an outer water pipe (91) and an inner water pipe (92) arranged parallel to the first exhaust pipe (101). The outer water pipe (91) is sleeved on the outside of the inner water pipe (92). The end of the inner water pipe (92) away from the second exhaust pipe (102) is connected to the outer water pipe (91). The end of the outer water pipe (91) away from the second exhaust pipe (102) is sealed. The ends of the inner water pipe (92) and the outer water pipe (91) near the second exhaust pipe (102) extend through the blind flange to the outside and are respectively connected to the inlet pipe (10) and the outlet pipe (11).
2. The silicon nitride high-pressure exhaust device according to claim 1, characterized in that, The first sealing structure (7) and the second sealing structure (8) are both blind flanges, which are detachably installed on the first exhaust pipe (101), the second exhaust pipe (102), the fourth exhaust pipe (104), the fifth exhaust pipe (105) and the sixth exhaust pipe (106) by bolts.
3. The silicon nitride high-pressure exhaust device according to claim 2, characterized in that, The blind flange is equipped with an "O" ring at the connection between it and each exhaust pipe.
4. The silicon nitride high-pressure exhaust device according to claim 1, characterized in that, The first cooling structure (5) includes sleeves respectively fitted on the outside of the first exhaust pipe (101), the second exhaust pipe (102), the third exhaust pipe (103), the fourth exhaust pipe (104) and the fifth exhaust pipe (105). The sleeves and the first exhaust pipe (101), the second exhaust pipe (102), the third exhaust pipe (103), the fourth exhaust pipe (104) and the fifth exhaust pipe (105) form closed cooling water channels. One end of the cooling water channel is provided with a water inlet and the other end is provided with a water outlet.
5. The silicon nitride high-pressure exhaust device according to claim 4, characterized in that, The dust collection and filtration mechanism (3) includes several filter plates (31) for filtering dust in the gas. The filter plates (31) are spaced apart and fitted onto the outer water pipe (91) and matched with the inner wall of the first exhaust pipe (101). One side of the filter plate (31) is bent in the direction of gas flow to form a bend. The bend and the inner wall of the first exhaust pipe (101) form a gap for gas flow. The bends of two adjacent filter plates (31) are staggered.
6. The silicon nitride high-pressure exhaust device according to claim 5, characterized in that, The dust collection mechanism (3) further includes a dust collection box (32) located at the bottom of the first exhaust pipe (101) near the second exhaust pipe (102). The dust collection box (32) is connected to the adjacent blind flange via a connecting block (12). The bottom of the dust collection box (32) is provided with a walking wheel (13).
7. The silicon nitride high-pressure exhaust device according to claim 1, characterized in that, The valve body (2) includes a high-pressure isolation valve (21), a pneumatic regulating valve (22), a manual ball valve (23), and a pneumatic exhaust valve (24). The high-pressure isolation valve (21) and the pneumatic regulating valve (22) are installed on the seventh exhaust pipe (107), the manual ball valve (23) is installed on the eighth exhaust pipe (108) and the ninth exhaust pipe (109), and the pneumatic exhaust valve (24) is installed on the ninth exhaust pipe (109).