A processing method for silicon V-groove array for installing curved optical fiber

Abstract

The present invention provides a processing method for a silicon V-groove array for installing an arc-shaped optical fiber, comprising: S1, providing a silicon wafer, and cleaning and drying the silicon wafer; S2, preparing silicon nitride mask patterns of different widths on the surface of the dried silicon wafer to form a target silicon wafer; S3, soaking the target silicon wafer in a mixed solution of potassium hydroxide and isopropanol to perform alkaline wet etching to form a silicon wafer with a V-groove array of different depths; S4, removing excess impurities on the surface of the silicon wafer with the V-groove array of different depths, and centrifugally washing and vacuum drying the silicon wafer with the V-groove array of different depths from which the excess impurities have been removed. The present invention controls the opening size of the V-groove array by designing mask patterns of different widths, thereby processing V-groove channels with inconsistent depths, thereby realizing an arc-shaped distribution of the optical fiber array in the Z-axis direction.

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