Femtosecond laser grating pair compressor adjustable ramp module

Abstract

The application relates to a femtosecond laser grating-to-compressor adjustable climbing module, which comprises a first mirror frame with a first positioning surface for fixing a reflecting mirror; a second mirror frame mounted on the first mirror frame and having a second positioning surface for fixing another reflecting mirror, the second positioning surface being perpendicular to the first positioning surface; and a connecting assembly for connecting the first mirror frame and the second mirror frame and adjusting the perpendicularity between the first positioning surface of the first mirror frame and the second positioning surface of the second mirror frame. The first mirror frame and the second mirror frame are machined respectively, the first positioning surface of the first mirror frame is perpendicular to the second positioning surface of the second mirror frame, the perpendicularity precision requirement is lower, the machining difficulty is smaller, the first mirror frame and the second mirror frame are connected through the connecting assembly after being machined, the perpendicularity precision between the first positioning surface and the second positioning surface is adjusted through the connecting assembly, so that the parallelism of the outcoming light of the mirror surface after the reflecting mirror is fixed meets the requirement, the machining difficulty is smaller, and the cost is lower.

Description

Technical Field

[0001] This invention relates to the field of compressor technology, and in particular to an adjustable climb-up module for a femtosecond laser grating to a compressor. Background Technology

[0002] A femtosecond laser is a type of laser capable of generating ultrashort pulses at the femtosecond level. Compared to traditional nanosecond lasers, femtosecond lasers have shorter pulse widths and higher optical energy densities. A grating compressor is a key component used for pulse compression in femtosecond lasers. To compress laser pulses greater than 100 mJ (millijoules) and at 100 Hz to the femtosecond level, the spacing between the grating pairs in the compressor must be greater than 2 meters. Considering that the single-sided margin of a typical mirror is generally no more than 2 millimeters, to achieve a spacing greater than 2 meters between grating pairs, the parallelism of the incoming and outgoing light from the mirrors on the frame of the grating compressor's climbing module (a structure used to adjust the height of the parallel light between the grating pairs) must be less than 1 micrometer. Therefore, the perpendicularity requirements of the two positioning surfaces on the frame used to fix the two mirrors are extremely high, making manufacturing difficult and costly. Summary of the Invention

[0003] Based on this, it is necessary to provide an adjustable climbing module for a femtosecond laser grating to a compressor, which can reduce processing difficulty and lower costs, in order to address the above-mentioned technical problems.

[0004] This invention provides an adjustable climb-up module for a femtosecond laser grating-to-compressor, comprising:

[0005] The first frame has a first positioning surface for fixing the mirror;

[0006] The second mirror frame, mounted on the first mirror frame, has a second positioning surface for fixing another mirror, the second positioning surface being perpendicular to the first positioning surface;

[0007] A connecting component is used to connect a first eyeglass frame and a second eyeglass frame, and to adjust the perpendicularity between the first positioning surface of the first eyeglass frame and the second positioning surface of the second eyeglass frame.

[0008] In one embodiment, the connecting assembly includes a plurality of connectors and a plurality of adjusting members. The connectors are used to connect and stabilize the second frame on the first frame, and the adjusting members are used to adjust the spacing and / or angle of the second frame relative to the first frame to adjust the perpendicularity between the second positioning surface and the first positioning surface.

[0009] In one embodiment, the connector includes a plug screw and an elastic element, the second frame has a through hole, the first frame has a screw hole corresponding to the through hole, the elastic element is sleeved on the plug screw, the plug screw passes through the through hole and is fixed on the screw hole, and the elastic element is pressed onto the second frame.

[0010] In one embodiment, the adjusting member includes a threaded rod and a nut. The nut is screwed onto the threaded rod, and one end of the nut has a flange. The second frame has an adjusting hole, and the adjusting hole has a recessed portion on one side opposite to the first frame. The surface of the nut is clearance-fitted with the adjusting hole, and the flange is housed in the recessed portion. The end of the threaded rod opposite to the first frame abuts against the first frame.

[0011] In one embodiment, the threaded rod has a spherical portion at one end relative to the first frame, and the first frame has a spherical groove at the location opposite to the spherical portion, with the spherical portion abutting against the spherical groove.

[0012] In one embodiment, the end of the threaded rod facing away from the spherical portion has an internal hexagonal groove, and the outer diameter of the end is smaller than the inner diameter of the nut.

[0013] In one embodiment, the top of the flange portion has a protrusion, and the sidewall of the recessed portion is provided with a groove for receiving the protrusion.

[0014] In one embodiment, the sidewall of the recessed platform is provided with a plurality of grooves of different depths along the axial direction of the adjustment hole.

[0015] In one embodiment, the size of the groove is larger than the size of the protrusion, and the surface of the nut component that mates with the adjustment hole has multiple scale lines, with the scale lines extending to the outside of the adjustment hole.

[0016] In one embodiment, the first frame has a first storage slot, the bottom of which is the first positioning surface, and the second frame has a second storage slot opposite to the first storage slot, the bottom of which is the second positioning surface.

[0017] The aforementioned femtosecond laser grating-to-compressor adjustable climbing module achieves this by separately machining a first and a second mirror mount, ensuring that the first positioning surface of the first mount is perpendicular to the second positioning surface of the second mount. This perpendicularity requires relatively low precision and is relatively easy to machine. After the machined first and second mirror mounts are connected by a connecting assembly, the perpendicularity between the first and second positioning surfaces is adjusted using this assembly to ensure that the parallelism of the incident and incoming light rays on the fixed mirror surface meets the requirements. The machining of the first and second mirror mounts is relatively simple and inexpensive, and the adjustment of the perpendicularity precision using the connecting assembly is also straightforward. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the adjustable climb-up module of a femtosecond laser grating pair compressor according to one embodiment.

[0020] Figure 2 for Figure 1 Exploded view of the adjustable ramp-up module of the compressor for the grating of the mid-femtosecond laser;

[0021] Figure 3 An exploded view of a femtosecond laser grating to compressor adjustable ramp-up module according to one embodiment;

[0022] Figure 4 This is a schematic diagram illustrating the working principle of the reflector in the climbing module of the present invention.

[0023] Figure 5 for Figure 3 A schematic diagram of the structure of the adjustment component.

[0024] Figure label:

[0025] 110. First frame; 111. Spherical groove; 112. First positioning surface; 114. First storage slot; 116. First fastener; 120. Second frame; 121. Adjustment hole; 122. Second positioning surface; 124. Second storage slot; 126. Second fastener; 130. Connecting assembly; 132. Connector; 131. Plug screw; 133. Elastic element; 134. Adjusting element; 135. Threaded rod; 137. Nut; 101. Spherical part; 102. Flange part; 103. Protrusion; 104. Groove; 50. First reflector; 60. Second reflector. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this specification are for illustrative purposes only and do not represent the only possible implementation.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0029] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0031] The following is combined Figures 1-5 The present invention describes an adjustable climbing module for a femtosecond laser grating to a compressor.

[0032] like Figure 1 and Figure 2 As shown, in one embodiment, a femtosecond laser grating to compressor adjustable climbing module includes a first frame 110, a second frame 120 and a connecting component 130, wherein the second frame 120 is connected to the first frame 110 via the connecting component 130.

[0033] The first mirror frame 110 has a first positioning surface 112 for fixing the first reflecting mirror 50. See Figure 3 Preferably, the first frame 110 has a first storage groove 114, the bottom of the first storage groove 114 is a first positioning surface 112, the first reflector 50 is stored in the first storage groove 114 and fixed on the first positioning surface 112 by the first fastener 116.

[0034] Specifically, the first fastener 116 includes a first pressure plate and a first locking screw. The first pressure plate is pressed against the edge of the reflector 50. The first pressure plate has a screw hole. The first locking screw passes through the first positioning surface 112 and is screwed into the screw hole to fix the reflector 50 on the first positioning surface 112.

[0035] The second mirror frame 120 is mounted on the first mirror frame 110 and has a second positioning surface 122 for fixing another mirror 50. The second positioning surface 122 is perpendicular to the first positioning surface 112. Preferably, the second mirror frame 120 has a second storage groove 124 opposite to the first storage groove 114. The bottom of the second storage groove 124 is the second positioning surface 122. The other mirror 50 is stored in the second storage groove 124 and fixed to the second positioning surface 122 by fasteners.

[0036] Specifically, the second fastener 126 includes a second pressure plate and a second locking screw. The second pressure plate is pressed against the edge of the second reflector 60. The second pressure plate has a screw hole. The second locking screw passes through the second positioning surface 122 and is screwed into the screw hole to fix the second reflector 60 on the second positioning surface 122.

[0037] The connecting component 130 is used to connect the first frame 110 and the second frame 120, and to adjust the perpendicularity between the first positioning surface 112 of the first frame 110 and the second positioning surface 122 of the second frame 120.

[0038] Specifically, during the manufacturing process of the first lens frame 110 and the second lens frame 120, the goal is to ensure that the first positioning surface 112 and the second positioning surface 122 are perpendicular to each other after the first lens frame 110 and the second lens frame 120 are connected and assembled. Because the perpendicularity accuracy requirement for the first positioning surface 112 and the second positioning surface 122 is high, it is difficult to meet the perpendicularity accuracy requirement in a single manufacturing process, and the manufacturing cost is extremely high. Therefore, in this embodiment, after manufacturing the first lens frame 110 and the second lens frame 120, the perpendicularity accuracy is adjusted by the connecting assembly 130 to meet the requirement that the parallelism of the light entering and exiting the reflector is less than 1 micrometer. See [link to documentation]. Figure 4 .

[0039] In this embodiment, the adjustable climbing module for the femtosecond laser grating compressor is fabricated by machining the first mirror frame 110 and the second mirror frame 120 respectively, so that the first positioning surface 112 of the first mirror frame 110 and the second positioning surface 122 of the second mirror frame 120 are perpendicular. This perpendicularity requires relatively low precision and is relatively easy to manufacture. After the fabricated first mirror frame 110 and second mirror frame 120 are connected by the connecting component 130, the perpendicularity between the first positioning surface 112 and the second positioning surface 122 is adjusted by the connecting component 130 to ensure that the parallelism of the incoming and outgoing light on the mirror surface after fixing the reflector 50 meets the requirements. The first mirror frame 110 and the second mirror frame 120 in this embodiment are relatively easy to manufacture and have low cost, and the adjustment of the perpendicularity precision by the connecting component 130 is also relatively simple.

[0040] like Figure 3 and Figure 5 As shown, in one embodiment, the connecting assembly 130 includes a plurality of connectors 132 and a plurality of adjusters 134. The connectors 132 are used to connect and stabilize the second frame 120 on the first frame 110. The adjusters 134 are used to adjust the spacing and / or angle of the second frame 120 relative to the first frame 110 to adjust the perpendicularity between the second positioning surface 122 and the first positioning surface 112.

[0041] Optionally, the connector 132 includes a plug screw 131 and an elastic element 133. The second frame 120 has a through hole, and the first frame 110 has a screw hole corresponding to the through hole. The elastic element 133 is sleeved on the plug screw 131, and the plug screw 131 passes through the through hole and is fixed in the screw hole. The elastic element 133 is pressed against the second frame 120. Optionally, the elastic element 133 is a spring, and the end of the thread of the plug screw 131 has a wave. When screwed to the end of the thread, the wave abuts against the edge of the threaded hole, so that the plug screw 131 can be tightened and stabilized in the screw hole. Furthermore, the crucial role of the bolster is that, since each locking screw 131 has the same specification and the distance between the bolster and the cap of the locking screw 131 is fixed, after the second frame 120 is installed and connected to the first frame 110, the elastic pressure of the identical elastic element 133 on the second frame 120 is the same. Therefore, after multiple locking screws 131 are tightened, the force on the edge of the second frame 120 is more uniform, preventing tilting caused by uneven force, and facilitating the adjustment of the distance and / or angle of the second frame 120 relative to the first frame 110. Optionally, a washer is also provided between the elastic element 133 and the cap of the locking screw 131.

[0042] In this embodiment, the adjusting member 134 includes a threaded rod 135 and a nut 137. The nut 137 is screwed onto the threaded rod 135. The threads of the threaded rod 135 and the nut 137 are precision fine threads with a pitch of 0.4 to 1 mm, used to finely adjust the relative distance and / or angle between the second frame 120 and the first frame 110. One end of the nut 137 has a flange 102, and the second frame 120 has an adjusting hole 121. (See also...) Figure 2 The adjustment hole 121 has a recessed portion (not shown) on one side relative to the first frame 110. The surface of the nut 137 is clearance-fitted with the adjustment hole 121 and the flange portion 102 is housed in the recessed portion. The threaded rod 135 abuts against the first frame 110 at one end relative to the first frame 110.

[0043] The threaded rod 135 has a spherical portion 101 at one end relative to the first frame 110, and a spherical groove 111 at the point where the first frame 110 is opposite to the spherical portion 101. The spherical portion 101 abuts against the spherical groove 111. The cooperation between the spherical portion 101 and the spherical groove 111 reduces the frictional resistance and lateral offset force between the end of the threaded rod 135 and the first frame 110 during the tightening process, thereby reducing adjustment deviation. Optionally, the end of the threaded rod 135 facing away from the spherical portion 101 has an internal hexagonal groove, and the outer diameter of the end is smaller than the inner diameter of the nut 137. The threaded rod 135 is equipped with a tightening tool, which can be a manual tool or a precision electronic tool to improve tightening accuracy.

[0044] Preferably, the flange portion 102 has a protrusion 103 at its top end, and the side wall of the recessed portion is provided with a groove (not shown) for receiving the protrusion 103. The protrusion 103 cooperates with the groove to prevent the nut 137 from rotating with the threaded rod 135. The side wall of the recessed portion is provided with multiple grooves of different depths along the axial direction of the adjustment hole 121, with a depth difference of 2 to 5 mm between adjacent grooves. By cooperating with the protrusions in grooves of different depths, the relative distance and / or rear angle between the second frame 120 and the first frame 110 can be coarsely adjusted. By coarse and fine adjustment through the adjustment member 134, the first positioning surface 112 and the second positioning surface 122 can be adjusted by ±3 degrees in two directions and ±2 mm in the height direction, allowing an input light deviation of ±5 degrees.

[0045] The groove is larger than the protrusion 103 so that the nut 137 slides axially along the adjusting hole 121 without resistance. The surface of the clearance fit portion of the nut 137 with the adjusting hole 121 has multiple scale lines. When the adjusting member 134 is installed in the adjusting hole 121, the scale-lined portion of the nut 137 extends to the outside of the adjusting hole 121.

[0046] During assembly and use, the second frame 120 is mounted on the first frame 110 via the connector 132, and the adjusting member 134 is assembled and the threaded rods 135 of the multiple adjusting members 134 are kept in the same relative position as the nut member 137. Due to the weight of the second frame 120 itself and the action of the elastic member 133, the protrusion 103 of the nut member 137 abuts against the groove and the spherical part 101 of the threaded rod 135 abuts against the spherical groove 111. During the perpendicularity adjustment of the first positioning surface 112 and the second positioning surface 122, the second frame 120 is moved upward or deflected under force. Once the perpendicularity of the first positioning surface 112 and the second positioning surface 122 reaches the required accuracy, the change in the scale on the surface of the nut 137 is observed and recorded (the adjusting member 134 in the adjusting hole 121 corresponding to the part of the second frame 120 that has moved upward or deflected will slide down along the adjusting hole 121 due to its own gravity). The external force on the second frame 120 is removed, and the corresponding threaded rod 135 is turned according to the change in the scale of the nut 137. The adjustment is completed when the axial movement of the threaded rod 135 is equal to the change in the scale of the nut 137. It is not necessary to adjust the second frame 120 and turn the adjusting member 134 at the same time, which simplifies the adjustment process. If the change in scale is large, the adjusting member 134 at the corresponding position can be coarsely adjusted first, that is, a suitable groove and protrusion 103 are selected for matching, and then the threaded rod 135 is turned for fine adjustment. The present invention sets the frame of the climbing reflector (first reflector 50 and second reflector 60) as a first frame 110 and a second frame 120, and uses a precision screw thread rod 135 to adjust the local spacing and angle, so that the three-dimensional direction of the second reflector 60 is adjustable, thereby offsetting the processing error and reducing the requirements for processing accuracy.

[0047] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0048] The above-described embodiments are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the appended claims.

Claims

1. A femtosecond laser grating-to-compressor adjustable climbing module, characterized in that, include: The first frame has a first positioning surface for fixing the mirror; The second mirror frame, mounted on the first mirror frame, has a second positioning surface for fixing another mirror, the second positioning surface being perpendicular to the first positioning surface; A connecting component for connecting a first eyeglass frame and a second eyeglass frame, and for adjusting the perpendicularity between a first positioning surface of the first eyeglass frame and a second positioning surface of the second eyeglass frame; The connecting assembly includes multiple connectors and multiple adjusting components. The connectors are used to connect and stabilize the second frame onto the first frame. The connectors include plug screws and elastic elements. The adjusting components include threaded rods and nuts. The nuts are screwed onto the threaded rods, and one end of the nuts has a flange.

2. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 1, characterized in that, The adjusting member is used to adjust the distance and / or angle between the second frame and the first frame, so as to adjust the perpendicularity between the second positioning surface and the first positioning surface.

3. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 2, characterized in that, The second frame has a through hole, and the first frame has a screw hole corresponding to the through hole. The elastic element is sleeved on the plug screw, the plug screw passes through the through hole and is fixed on the screw hole, and the elastic element is pressed onto the second frame.

4. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 2 or 3, characterized in that, The second frame has an adjustment hole, and the adjustment hole has a recessed portion on one side opposite to the first frame. The surface of the nut is clearance-fitted with the adjustment hole and the flange is housed in the recessed portion. The threaded rod abuts against the first frame at one end opposite to the first frame.

5. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 4, characterized in that, The threaded rod has a spherical portion at one end relative to the first frame, and the first frame has a spherical groove at the position opposite to the spherical portion, with the spherical portion abutting against the spherical groove.

6. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 5, characterized in that, The threaded rod has an internal hexagonal groove at one end facing away from the spherical part, and the outer diameter of the end is smaller than the inner diameter of the nut.

7. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 4, characterized in that, The top of the flange portion has a protrusion, and the side wall of the recessed portion is provided with a groove for receiving the protrusion.

8. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 7, characterized in that, The sidewall of the recessed platform is provided with multiple grooves of different depths along the axial direction of the adjustment hole.

9. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 7, characterized in that, The size of the groove is larger than the size of the protrusion, and the surface of the nut and the adjustment hole clearance fit portion has multiple scale lines, and the portion with scale lines extends to the outside of the adjustment hole.

10. The femtosecond laser grating-to-compressor adjustable climbing module according to claim 1, characterized in that, The first frame has a first storage slot, the bottom of which is the first positioning surface. The second frame has a second storage slot opposite to the first storage slot, the bottom of which is the second positioning surface.

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