Cutting process for ring line squaring machine

Abstract

The application discloses a cutting process of a ring line square machine, which comprises an entering cutting section, a cutting section, a returning line deceleration section and an exiting cutting section; wherein, (1) the entering cutting section is cut into 1-5% of the total stroke at a feeding forward speed of 60-80 mm / min; (2) the cutting section is cut into 70-80% of the total stroke at a feeding forward speed of 70-95 mm / min; (3) the returning line deceleration section is first retreated at a feeding reverse speed of 70-90 mm / min, and then cut into 85-95% of the total stroke at a feeding forward speed of 40-55 mm / min; and (4) the exiting cutting section is cut into 100% of the total stroke at a feeding forward speed of 15-25 mm / min. The cutting process can improve the good product rate of the single crystal silicon rough square rod and reduce the size range of the single crystal silicon rough square rod.

Description

Technical Field

[0001] This invention relates to a cutting process for a loop square rooting machine. Background Technology

[0002] In the processing of monocrystalline silicon, monocrystalline silicon round rods need to be machined into monocrystalline silicon square rods in the machining workshop, and then cut into monocrystalline silicon wafers in the slicing workshop. During the machining process, the monocrystalline silicon round rods are processed into rough monocrystalline silicon square rods using a squaring machine, and then the rough monocrystalline silicon square rods are processed into finished monocrystalline silicon square rods using a grinding machine. Different cutting processes of the ring squaring machine affect the service life of the ring and cutting wheels, the machine tool uptime, and the dimensional tolerances and yield of the rough monocrystalline silicon square rods.

[0003] Therefore, how to improve the service life of auxiliary materials such as ring wires and cutting wheels, increase the machine tool uptime, improve the yield of monocrystalline silicon square rods, and reduce the dimensional variation of monocrystalline silicon square rods, so as to achieve the purpose of cost reduction and efficiency improvement, is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a cutting process for a ring wire squaring machine, which can improve the service life of the ring wire and auxiliary materials such as the cutting wheel, improve the machine tool uptime, improve the yield of monocrystalline silicon squaring rods, and reduce the dimensional difference of monocrystalline silicon squaring rods.

[0005] This invention provides a cutting process for a circular squaring machine, comprising an entry section, a cutting section, a return deceleration section, and an exit section; wherein,

[0006] (1) The cutting section is fed forward at a speed of 60-80 mm / min to cut into the tool to 1-5% of the total stroke;

[0007] (2) The cutting section is fed forward at a speed of 70-95 mm / min to cut into the section to 70-80% of the total stroke;

[0008] (3) The return deceleration section first retracts at a feed reverse speed of 70-90 mm / min, and then cuts in at a feed forward speed of 40-55 mm / min to 85-95% of the total stroke;

[0009] (4) The cutting section cuts into the forward direction at a feed speed of 15-25 mm / min until 100% of the total stroke.

[0010] In this invention, the cutting process of the loop square cutter mainly consists of the infeed section, the cutting section, the return deceleration section, and the exit section.

[0011] In step (1) of the present invention, the feed forward speed of the infeed section can be 60-80 mm / min, preferably 65-75 mm / min, and more preferably 68-72 mm / min; the percentage of the cut to the total stroke can be 1-5%, preferably 1.5-3.5%, and more preferably 2-3%. This can prevent large differences in the infeed dimensions and line marks caused by infeed line vibration.

[0012] In step (2) of the present invention, the feed forward speed of the cutting section can be 70-95 mm / min, preferably 75-90 mm / min, more preferably 75-85 mm / min; the percentage of cut-in to the total stroke can be 70-80%, preferably 72-80%, more preferably 74-77%. The cutting section can be divided into a high-speed cutting section and a stable cutting section. The feed forward speed of the high-speed cutting section can be 85-95 mm / min, preferably 88-93 mm / min, more preferably 88-90 mm / min; the percentage of cut-in to the total stroke can be 45-55%, preferably 48-52%, more preferably 49-51%. The high-speed cutting section can quickly cut and process products, improving processing efficiency. The feed forward speed of the stable cutting section can be 70-85 mm / min, preferably 72-80 mm / min, more preferably 74-77 mm / min; the percentage of cut-in to the total stroke can be 70-80%, preferably 72-80%, more preferably 74-77%. Stabilize cutting speed, reduce circular line vibration, minimize dimensional differences in processed products, and improve product yield.

[0013] According to the cutting process of the present invention, preferably, the cutting section includes a high-speed cutting section and a stable cutting section; wherein,

[0014] The high-speed cutting section first cuts into the ground at a feed forward speed of 85-95 mm / min to 45-55% of the total stroke;

[0015] The stable cutting section then cuts in at a forward feed speed of 70-85 mm / min until it reaches 70-80% of the total stroke.

[0016] In step (3) of the present invention, the feed reverse speed of the return deceleration section can be 70-90 mm / min, preferably 75-85 mm / min, more preferably 78-82 mm / min; the feed forward speed can be 40-55 mm / min, preferably 45-52 mm / min, more preferably 48-50 mm / min. The percentage of cut-in to the total stroke can be 85-95%, preferably 85-92%, more preferably 88-90%. The return deceleration section first retracts at the feed reverse speed to reduce the wire bow, and then reduces the feed forward speed to cut in, reducing the wear of the loop and cutting wheel, reducing the fatigue strength of the loop, increasing the service life of the loop and cutting wheel, reducing costs, reducing the number of auxiliary material replacements, increasing equipment uptime, increasing production efficiency, and reducing the stress change of the loop caused by sudden deceleration, thereby reducing the surface dimensional difference of the processed product and improving the product yield.

[0017] According to the cutting process of the present invention, preferably, in step (3), the distance of reverse retraction is 2 to 7 mm.

[0018] In step (4) of the present invention, the forward feed speed of the cutting section can be 15-25 mm / min, preferably 18-23 mm / min, and more preferably 20-22 mm / min. This can reduce the change in circumferential stress caused by sudden deceleration, thereby reducing the surface dimensional difference of the processed product and improving the product yield.

[0019] According to the cutting process of the present invention, preferably, it further includes a speed-up section; the speed-up section is disposed between the infeed section and the cutting section, and it cuts into the cutting section at a feed forward speed of 70-90 mm / min to 10-15% of the total stroke.

[0020] In this invention, a speed-up section can also be provided between the infeed section and the cutting section. The feed forward speed can be 70-90 mm / min, preferably 75-85 mm / min, and more preferably 78-82 mm / min; the percentage of the cut to the total stroke can be 10-15%, preferably 12-15%, and more preferably 14-15%. This can stably increase the processing speed, act as a buffer, prevent excessive cutting wire bowing, and reduce wear on the loop and cutting wheel.

[0021] According to the cutting process of the present invention, preferably, it further includes a cutting-through feed section; the cutting-through feed section is set after the exit section, and it first retracts at a feed reverse speed of 15-25 mm / min, and then cuts in at a feed forward speed of 15-25 mm / min, continuously pulling the blade until it cuts through.

[0022] In this invention, a cutting-through feed section can be provided after the exit section. The reverse feed speed of the cutting-through feed section can be 15-25 mm / min, preferably 18-23 mm / min, and more preferably 19-21 mm / min; the forward feed speed can be 8-15 mm / min, preferably 9-13 mm / min, and more preferably 10-12 mm / min. This not only achieves the same effect as the return deceleration section, thus reducing costs and increasing efficiency, but also reduces the stress on the loop and prevents chipping at the exit edge.

[0023] According to the cutting process of the present invention, preferably, in the cutting through the feed section, the distance of the reverse retraction is 8-15mm, and the distance of the forward cutting is 2-6mm.

[0024] This invention provides a cutting process for a circular squaring machine, comprising a cutting section, a cutting section, a return deceleration section, and a cutting exit section; wherein,

[0025] (1) The cutting section is fed forward at a speed of 60-80 mm / min to cut into the tool to 1-5% of the total stroke;

[0026] (2) The cutting section is fed forward at a speed of 70-95 mm / min to cut into the section to 70-80% of the total stroke;

[0027] (3) The return deceleration section first retracts at a feed reverse speed of 70-90 mm / min, and then cuts in at a feed forward speed of 40-55 mm / min to 85-95% of the total stroke;

[0028] (4) The cutting section cuts into the forward direction at a feed speed of 15-25 mm / min until 100% of the total stroke.

[0029] This invention also provides a cutting process for a circular squaring machine, comprising a cutting entry section, a speed-up section, a cutting section, a return deceleration section, and a cutting exit section; wherein,

[0030] (1) The cutting section is fed forward at a speed of 60-80 mm / min to cut into the tool to 1-5% of the total stroke;

[0031] (2) During the acceleration phase, feed forward at a speed of 70-90 mm / min until 10-15% of the total stroke is reached;

[0032] (3) The cutting section is fed forward at a speed of 70-95 mm / min to cut into the section to 70-80% of the total stroke;

[0033] (4) The return deceleration section first retracts at a feed reverse speed of 70-90 mm / min, and then cuts in at a feed forward speed of 40-55 mm / min to 85-95% of the total stroke;

[0034] (5) The cutting section cuts into the forward direction at a feed speed of 15-25 mm / min until 100% of the total stroke.

[0035] This invention further provides a cutting process for a circular squaring machine, comprising a cutting entry section, a speed-up section, a high-speed cutting section, a stable cutting section, a return deceleration section, and a cutting exit section; wherein,

[0036] (1) The cutting section is fed forward at a speed of 60-80 mm / min to cut into the tool to 1-5% of the total stroke;

[0037] (2) During the acceleration phase, feed forward at a speed of 70-90 mm / min until 10-15% of the total stroke is reached;

[0038] (3) The high-speed cutting section cuts into the forward feed at a speed of 85-95 mm / min to 45-55% of the total stroke;

[0039] (4) The stable cutting section cuts into the forward feed speed of 70-85 mm / min until 70-80% of the total stroke;

[0040] (5) The return deceleration section first retracts at a feed reverse speed of 70-90 mm / min, and then cuts in at a feed forward speed of 40-55 mm / min to 85-95% of the total stroke;

[0041] (6) The cutting section cuts into the forward direction at a feed speed of 15-25 mm / min until 100% of the total stroke.

[0042] This invention further provides a cutting process for a circular squaring machine, comprising a process entry section, a speed-up section, a high-speed cutting section, a stable cutting section, a return deceleration section, a cut-out section, and a cutting-through feed section; wherein,

[0043] (1) The cutting section is fed forward at a speed of 60-80 mm / min to cut into the tool to 1-5% of the total stroke;

[0044] (2) During the acceleration phase, feed forward at a speed of 70-90 mm / min until 10-15% of the total stroke is reached;

[0045] (3) The high-speed cutting section cuts into the forward feed at a speed of 85-95 mm / min to 45-55% of the total stroke;

[0046] (4) The stable cutting section cuts into the forward feed speed of 70-85 mm / min until 70-80% of the total stroke;

[0047] (5) The return deceleration section first retracts at a feed reverse speed of 70-90 mm / min, and then cuts in at a feed forward speed of 40-55 mm / min to 85-95% of the total stroke;

[0048] (6) The cutting section cuts into the forward direction at a feed speed of 15-25 mm / min until 100% of the total stroke;

[0049] (7) The cutting feed section first retracts at a reverse feed speed of 15-25 mm / min, then cuts in at a forward feed speed of 8-15 mm / min, and continues to pull the cutter until it cuts through.

[0050] The cutting process of the annular squaring machine of the present invention can reduce the wear of the annular wire and the cutting wheel, reduce the fatigue strength of the annular wire, increase the service life of the annular wire and the cutting wheel, reduce costs, reduce the number of auxiliary material replacements, increase equipment uptime, increase production efficiency, and at the same time reduce the stress change of the annular wire caused by sudden deceleration, thereby reducing the surface dimensional difference of the processed products, avoiding edge chipping at the exit of the blade, and improving product yield. Detailed Implementation

[0051] The present invention will be further described below with reference to specific embodiments, but the scope of protection of the present invention is not limited thereto.

[0052] Example 1

[0053] The cutting process of the loop squaring machine in this embodiment includes an entry section, a speed-up section, a high-speed cutting section, a stable cutting section, a return deceleration section, an exit section, and a cutting-through feed section; wherein...

[0054] (1) The infeed section is fed steadily at a forward speed of 70 mm / min to 2% of the total stroke to prevent large differences in the infeed size and line marks caused by the vibration of the infeed line.

[0055] (2) The speed-up section feeds at a forward speed of 80 mm / min to 15% of the total stroke, steadily increasing the processing speed, preventing excessive cutting wire bow, and reducing wear on the ring wire and cutting wheel;

[0056] (3) The high-speed cutting section cuts into the forward direction at a feed speed of 90 mm / min to 50% of the total stroke, quickly cutting and processing products and improving processing efficiency;

[0057] (4) The stable cutting section cuts into the forward feed at a speed of 80 mm / min to 75% of the total stroke, stabilizes the cutting speed, reduces the ring line jitter, reduces the dimensional difference of the processed products, and improves the product yield.

[0058] (5) The return deceleration section first retracts 5mm at a feed reverse speed of 80mm / min to reduce the wire bow, and then cuts into the line at a feed forward speed of 50mm / min to 90% of the total stroke to reduce the wear of the loop and the cutting wheel and reduce the fatigue strength of the loop.

[0059] (6) The cutting section cuts into the forward feed speed of 20 mm / min to 100% of the total stroke. Since there is a certain wire bow in the loop cutting process, after the wire bow has traveled 100% of the total stroke, some loops are still left inside the processed product and not cut through. At this time, low-speed cutting is beneficial to reduce the stress change of the loop caused by sudden deceleration.

[0060] (7) The cutting feed section first retracts 10mm at a reverse feed speed of 20mm / min to reduce wire bowing, then cuts in 5mm at a forward feed speed of 10mm / min, continuing to pull the cutter until it cuts through. This reduces wear on the loop and cutting wheel, lowers the fatigue strength of the loop, increases the service life of the loop and cutting wheel, reduces costs, reduces the number of auxiliary material replacements, increases equipment uptime, and improves production efficiency. At the same time, it reduces stress changes on the loop caused by sudden deceleration, thereby reducing the surface dimensional differences of the processed products, avoiding edge chipping at the cutter exit, and improving product yield.

[0061] The cutting speed for each segment is 2400 m / min.

[0062] Example 2

[0063] The cutting process of the loop squaring machine in this embodiment includes an entry section, a cutting section, a return deceleration section, and an exit section; wherein,

[0064] (1) The infeed section is fed steadily at a forward speed of 70 mm / min to 2% of the total stroke;

[0065] (2) The cutting section is fed forward at a speed of 85 mm / min to cut into 75% of the total stroke;

[0066] (3) In the deceleration section, first back 5mm at a feed reverse speed of 80mm / min to reduce the bow, and then cut in to 90% of the total stroke at a feed forward speed of 50mm / min.

[0067] (4) The cutting section cuts into the forward direction at a feed speed of 20 mm / min until 100% of the total stroke.

[0068] Example 3

[0069] The cutting process of the loop squaring machine in this embodiment includes an entry section, a speed-up section, a cutting section, a return deceleration section, and an exit section; wherein,

[0070] (1) The infeed section is fed steadily at a forward speed of 70 mm / min to 2% of the total stroke;

[0071] (2) The acceleration phase involves cutting into the feed forward speed of 80 mm / min to 15% of the total stroke;

[0072] (3) The cutting section is fed forward at a speed of 85 mm / min to cut into 75% of the total stroke;

[0073] (4) In the deceleration section, first back 5mm at a feed reverse speed of 80mm / min to reduce the bow, and then cut in to 90% of the total stroke at a feed forward speed of 50mm / min.

[0074] (5) The cutting section cuts into the forward direction at a feed speed of 20 mm / min until 100% of the total stroke.

[0075] Example 4

[0076] The cutting process of the loop squaring machine in this embodiment includes an infeed section, a cutting section, a return deceleration section, an exit section, and a cutting-through feed section; wherein...

[0077] (1) The infeed section is fed steadily at a forward speed of 70 mm / min to 2% of the total stroke;

[0078] (2) The cutting section is fed forward at a speed of 85 mm / min to cut into 75% of the total stroke;

[0079] (3) In the deceleration section, first back 5mm at a feed reverse speed of 80mm / min to reduce the bow, and then cut in to 90% of the total stroke at a feed forward speed of 50mm / min.

[0080] (4) The cutting section cuts in at a forward feed speed of 20 mm / min until 100% of the total stroke;

[0081] (5) When cutting through the feed section, first back 10mm at a feed reverse speed of 20mm / min to reduce the bow, then cut in 5mm at a feed forward speed of 10mm / min, and continue pulling the cutter until it cuts through.

[0082] Example 5

[0083] The cutting process of the loop squaring machine in this embodiment includes an entry section, a speed-up section, a high-speed cutting section, a stable cutting section, a return deceleration section, and an exit section; wherein...

[0084] (1) The infeed section is fed steadily at a forward speed of 70 mm / min to 2% of the total stroke;

[0085] (2) The acceleration phase involves cutting into the feed forward speed of 80 mm / min to 15% of the total stroke;

[0086] (3) The high-speed cutting section cuts into the forward feed at a feed speed of 90 mm / min to 50% of the total stroke;

[0087] (4) The stable cutting section cuts in at a forward feed speed of 80 mm / min to 75% of the total stroke;

[0088] (5) In the return deceleration section, first back 5mm at a feed reverse speed of 80mm / min to reduce the bow, and then cut in to 90% of the total stroke at a feed forward speed of 50mm / min.

[0089] (6) The cutting section cuts into the forward direction at a feed speed of 20 mm / min until 100% of the total stroke.

[0090] Example 6

[0091] The cutting process of the loop squaring machine in this embodiment includes an entry section, a high-speed cutting section, a stable cutting section, a return deceleration section, an exit section, and a cutting-through feed section; wherein...

[0092] (1) The infeed section is fed steadily at a forward speed of 70 mm / min to 2% of the total stroke;

[0093] (2) The high-speed cutting section cuts into the forward feed at a speed of 90 mm / min to 50% of the total stroke;

[0094] (3) The stable cutting section cuts in at a forward feed speed of 80 mm / min until 75% of the total stroke;

[0095] (4) In the deceleration section, first back 5mm at a feed reverse speed of 80mm / min to reduce the bow, and then cut in to 90% of the total stroke at a feed forward speed of 50mm / min.

[0096] (5) The cutting section cuts in at a forward feed speed of 20 mm / min until 100% of the total stroke;

[0097] (6) When cutting through the feed section, first back 10mm at a feed reverse speed of 20mm / min to reduce the bow, then cut in 5mm at a feed forward speed of 10mm / min, and continue pulling the cutter until it cuts through.

[0098] The yield and dimensional range of single-crystal silicon square rods produced by the cutting processes of Examples 1 to 6 are shown in Table 1.

[0099] Table 1

[0100]

[0101] This invention is not limited to the above-described embodiments. Any modifications, improvements, or substitutions that can be conceived by those skilled in the art without departing from the essential content of this invention fall within the scope of this invention.

Claims

1. A cutting process for a circular squaring machine, characterized in that, It includes the entry section, cutting section, return deceleration section, and exit section; among which, (1) The feed rate in the infeed section is 60-72 mm / min, and the cutter enters the tool to 1-5% of the total stroke. (2) The cutting section is fed forward at a speed of 75-95 mm / min until 70-80% of the total stroke is reached; (3) The return deceleration section first retracts at a feed reverse speed of 70-90 mm / min, and then cuts in at a feed forward speed of 40-55 mm / min to 85-95% of the total stroke; (4) The cutting section cuts into the forward direction at a feed speed of 15-25 mm / min until 100% of the total stroke.

2. The cutting process according to claim 1, characterized in that, In step (3), the distance of the reverse retreat is 2 to 7 mm.

3. The cutting process according to claim 1, characterized in that, It also includes a speed-up section; the speed-up section is located between the infeed section and the cutting section, and it cuts into the feed forward direction at a feed speed of 75-82 mm / min to 10-15% of the total stroke.

4. The cutting process according to claim 3, characterized in that, The cutting section includes a high-speed cutting section and a stable cutting section; wherein... The high-speed cutting section first cuts in at a forward feed speed of 88-95 mm / min to 45-55% of the total stroke; The stable cutting section then cuts in at a forward feed speed of 77-85 mm / min to 70-80% of the total stroke.

5. The cutting process according to claim 4, characterized in that, It also includes a cutting feed section; the cutting feed section is located after the exit section, and it first retracts at a feed reverse speed of 15-25 mm / min, and then cuts in at a feed forward speed of 8-15 mm / min, continuously pulling the blade until it cuts through.

6. The cutting process according to claim 5, characterized in that, In the cutting-through feed section, the reverse retraction distance is 8–15 mm, and the forward cutting distance is 2–6 mm.

7. A cutting process for a circular squaring machine, characterized in that, It consists of an entry section, a cutting section, a return deceleration section, and an exit section; among which, (1) The infeed section cuts into the ground at a feed rate of 70 mm / min to 2% of the total stroke; (2) The cutting section is fed forward at a speed of 85 mm / min to 75% of the total stroke; (3) In the return deceleration section, first move back 5mm at a feed reverse speed of 80mm / min, then move forward at a feed speed of 50mm / min to cut into 90% of the total stroke; (4) The cutting section cuts into the forward direction at a feed speed of 20 mm / min until 100% of the total stroke.

8. A cutting process for a circular squaring machine, characterized in that, It consists of an entry section, a speed-up section, a cutting section, a return deceleration section, and an exit section; among which, (1) The infeed section cuts into the ground at a feed rate of 70 mm / min to 2% of the total stroke; (2) During the acceleration phase, the feed forward speed is 80 mm / min, cutting into the path until 15% of the total stroke is reached; (3) The cutting section is fed forward at a speed of 85 mm / min to 75% of the total stroke; (4) In the return deceleration section, first retract 5mm at a feed reverse speed of 80mm / min, then cut in to 90% of the total stroke at a feed forward speed of 50mm / min; (5) The cutting section cuts into the forward direction at a feed speed of 20 mm / min until 100% of the total stroke.

9. A cutting process for a circular squaring machine, characterized in that, It consists of an entry section, a speed-up section, a high-speed cutting section, a stable cutting section, a return deceleration section, and an exit section; among which, (1) The infeed section cuts into the ground at a feed rate of 70 mm / min to 2% of the total stroke; (2) During the acceleration phase, the feed forward speed is 80 mm / min, cutting into the path until 15% of the total stroke is reached; (3) The high-speed cutting section cuts in at a feed forward speed of 90 mm / min to 50% of the total stroke; (4) The stable cutting section cuts in at a forward feed speed of 80 mm / min until 75% of the total stroke is reached; (5) In the return deceleration section, first retract 5mm at a feed reverse speed of 80mm / min, then cut in to 90% of the total stroke at a feed forward speed of 50mm / min; (6) The cutting section cuts into the forward direction at a feed speed of 20 mm / min until 100% of the total stroke.

10. A cutting process for a circular squaring machine, characterized in that, It consists of an entry section, a speed-up section, a high-speed cutting section, a stable cutting section, a return deceleration section, an exit section, and a through-feed section; among which... (1) The infeed section cuts into the ground at a feed rate of 70 mm / min to 2% of the total stroke; (2) During the acceleration phase, the feed forward speed is 80 mm / min, cutting into the path until 15% of the total stroke is reached; (3) The high-speed cutting section cuts in at a feed forward speed of 90 mm / min to 50% of the total stroke; (4) The stable cutting section cuts in at a forward feed speed of 80 mm / min until 75% of the total stroke is reached; (5) In the return deceleration section, first retract 5mm at a feed reverse speed of 80mm / min, then cut in to 90% of the total stroke at a feed forward speed of 50mm / min; (6) The cutting section cuts in at a forward feed speed of 20 mm / min until 100% of the total stroke; (7) When cutting through the feed section, first back 10mm at a feed reverse speed of 20mm / min, then cut in 5mm at a feed forward speed of 10mm / min, and continue pulling the cutter until it cuts through.

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