A continuous high-precision slicing device for crystal rods

Abstract

The application discloses a crystal bar continuous high-precision slicing device, and particularly relates to the field of semiconductor manufacturing, which comprises a support and a supporting cylinder fixedly installed on one side of the support, a displacement mechanism is installed on the supporting cylinder, a power mechanism is installed on the other side of the support, a polishing disc, a cutting mechanism and a spraying mechanism are installed on the power mechanism, the displacement mechanism is used in cooperation with the cutting mechanism to correct the displacement relationship between one end of the crystal bar and the surface of the polishing disc, the spraying mechanism is used in cooperation with the power mechanism to intermittently spray the surface of the polishing disc with cooling liquid, the cutting mechanism is used in cooperation with the power mechanism to continuously slice the crystal bar, and the polishing disc is used in cooperation with the power mechanism to polish the surface of the crystal bar; through the setting of the second transmission assembly, the polishing disc, the displacement mechanism and the cleaning plate, the continuous cutting and polishing of the slicing can be realized, the water stains and impurities on the polishing disc can be cleaned, and the slicing efficiency and cutting effect of the crystal bar are improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, specifically to a device for continuous high-precision slicing of crystal rods. Background Technology

[0002] Patent publication number CN111571833B discloses a single-crystal silicon rod slicing device. Its structure includes a power distribution box, a cutting head, an infeed device, a processing table, a fixing base, and a base. The fixing base is mounted on the base, and the processing table is located on the fixing base. The cutting head cooperates with the infeed device. The beneficial effects of this invention are: when the clamping layer on the clamping head contacts the single-crystal silicon rod, the magnetic properties of the two magnetic blocks are opposite, attracting each other and strengthening the clamping force of the clamping head. Under this dual action, the clamping head can clamp and fix the single-crystal silicon rod. Furthermore, the two movable slots can be pushed out and replaced according to the diameter of the single-crystal silicon rod to adapt to its size. When the two movable slots and the two fixed slots are on the same arc, they stop moving outward and simultaneously apply force to the single-crystal silicon rod, fixing it in place. This prevents the single-crystal silicon rod from shifting under the impact force of the wire saw, ensuring the relative fixation of the single-crystal silicon rod's position during processing, and further guaranteeing the slicing quality of the single-crystal silicon rod.

[0003] The slices produced by existing slicing equipment have rough surfaces and require subsequent polishing. In addition, the crystal rod will generate debris during the cutting process. If it is not cleaned in time, the cutting line will rub against the debris, which may generate sparks and affect the cutting quality of the crystal rod. Summary of the Invention

[0004] The purpose of this invention is to provide a device for continuous high-precision slicing of crystal rods.

[0005] The technical problem solved by this invention is that the surface of crystal rods needs to be polished after slicing, which reduces production efficiency; the surface of the slices cut from the crystal rods is rough, and the debris generated during cutting affects the cutting quality of the crystal rods.

[0006] This invention can be achieved through the following technical solution: it includes a bracket and a support cylinder fixedly installed on one side of the bracket. A displacement mechanism is installed on the support cylinder, and a power mechanism is installed on the other side of the bracket. A grinding disc, a cutting mechanism, and a spraying mechanism are installed on the power mechanism. The displacement mechanism works with the cutting mechanism to correct the displacement relationship between one end of the crystal rod and the surface of the grinding disc. The spraying mechanism works with the power mechanism to intermittently spray coolant onto the surface of the grinding disc. The cutting mechanism works with the power mechanism to continuously slice the crystal rod. The grinding disc works with the power mechanism to grind the surface of the crystal rod.

[0007] A further technical improvement of the present invention is that the power mechanism includes a first transmission component and a second transmission component, the first transmission component and the second transmission component are driven by a synchronous belt pulley, and the second transmission component rotates simultaneously when the first transmission component rotates.

[0008] Furthermore, the first transmission assembly includes a first rotating rod rotatably connected to the top of one side of the bracket, and a first connecting rod is rotatably mounted at the end of the first rotating rod away from the bracket. The rotation of the first rotating rod drives the first connecting rod to push and pull the push-pull rod.

[0009] Furthermore, the second transmission assembly includes a second rotating rod rotatably connected to the bottom of one side of the bracket. A second connecting rod is rotatably mounted at the end of the second rotating rod away from the bracket. When the second rotating rod rotates, one end of it drives the grinding disc to rotate, and the other end drives the second rotating rod to rotate. The rotating second rotating rod drives the second connecting rod to push and pull the cutting mechanism in the horizontal direction.

[0010] Furthermore, the spraying mechanism includes two water collection tanks that are fixedly connected to the top sides of the support respectively. A nozzle is fixedly installed at the bottom of the outer peripheral wall of the water collection tank. A piston cylinder is fixedly installed at the end of the water collection tank away from the nozzle. A push-pull rod is slidably arranged between the two piston cylinders. The center position of the outer peripheral wall of the push-pull rod is rotatably connected to the end of the first connecting rod away from the support. Driven by the first transmission component, the push-pull rod reciprocates within the two piston cylinders, thereby spraying the coolant in the two piston cylinders alternately onto the surface of the crystal rod being polished and the surface of the polishing disc.

[0011] Furthermore, the cutting mechanism includes a support plate rotatably connected to the end of the second link away from the bracket. Slide plates are fixedly installed at both ends of the support plate. The slide plates are slidably connected to the inner wall of the bracket. Pulling rollers are rotatably installed on one side of each of the two slide plates. Diamond wire is fixedly installed between the two pulling rollers. The diamond wire is wound onto the pulling rollers by the pulling rollers, thereby realizing the pulling of the diamond wire.

[0012] Furthermore, the displacement mechanism includes two clamping plates that are slidably disposed on both sides of the outer peripheral wall of the support cylinder. A support rod is fixedly installed at one end of the clamping plate extending to the outside of the support cylinder. A sliding groove is provided at the bottom of the bracket, and the bottom end of the support rod is slidably connected to the sliding groove. A telescopic rod is slidably disposed on one side of the sliding plate, and the end of the telescopic rod away from the sliding plate is rotatably connected to the outer peripheral wall of the support rod. The sliding groove is used to correct the positional relationship between the clamping plate and the crystal rod, so that the clamping plate fixes the crystal rod when the crystal rod is pressed against the grinding disc to prevent the crystal rod from rotating.

[0013] Furthermore, the telescopic rod has a certain damping when it extends and retracts. One end of the clamping plate extends into the support cylinder and is adapted to the outer peripheral wall of the crystal rod. When one end of the crystal rod is pressed against the surface of the grinding disc, the telescopic rod is driven by the sliding plate to overcome its own extension and retraction damping, thereby correcting the positional relationship between the cutting mechanism and the displacement mechanism.

[0014] Furthermore, each of the two slides has a sliding rod that is slidably installed on the side away from the inner wall of the support. The sliding rod has a certain degree of damping when it slides. A cleaning plate is fixedly installed on the top of the two sliding rods. The cleaning plate is made of rubber material and has a certain degree of damping when the sliding rod slides. It is used to scrape the surface of the grinding disc in conjunction with the rotation of the grinding disc when it moves back and forth on the surface of the grinding disc.

[0015] Furthermore, a retaining plate is fixedly installed on the support near the bottom of the grinding disc. The thickness of the retaining plate increases continuously from top to bottom, and one side of the top of the retaining plate is on the same plane as the surface of the grinding disc.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. By setting up a second transmission component, a grinding disc, a displacement mechanism, and a cleaning plate, the second transmission component drives the cutting mechanism to cut the crystal rod while simultaneously driving the grinding disc to grind one end of the crystal rod. The displacement mechanism, in conjunction with the sliding of the sliding plate, clamps the crystal rod and moves one end to the surface of the grinding disc. When a slice of the crystal rod is cut, the displacement mechanism drives the crystal rod to detach from the surface of the grinding disc, allowing the cut slice to slide off the surface of the grinding disc. This process is repeated to achieve continuous slicing and grinding of the crystal rod. During the slicing, grinding, and cutting process, the cleaning plate, in conjunction with the rotation of the grinding disc, cleans the water stains and impurities from the surface of the grinding disc, improving the slicing efficiency and cutting effect of the crystal rod.

[0018] 2. By setting up a first transmission component, a push-pull rod, piston cylinders, a water collection tank, and nozzles, the first transmission component drives the push-pull rod to act on the two piston cylinders, so that the two piston cylinders intermittently act on the two water collection tanks, and the two nozzles set at the bottom of the two water collection tanks are in an interlocked spraying state, thereby causing the spraying mechanism to intermittently spray coolant on the surface of the grinding disc or the crystal rod cutting area, thereby cleaning, cooling and lubricating the surface of the grinding disc and the crystal rod cutting area to improve the accuracy of crystal rod cutting. Attached Figure Description

[0019] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0020] Figure 1 This is a front view of the overall structure of the present invention;

[0021] Figure 2 This is a cross-sectional view of the structure of the present invention;

[0022] Figure 3 This is a rear view of the overall structure of the present invention;

[0023] Figure 4 This is a front sectional view of the structure of the present invention;

[0024] Figure 5This is a schematic diagram showing the connection between the first transmission component and the second transmission component of the present invention;

[0025] Figure 6 This is a schematic diagram showing the connection between the cutting mechanism and the displacement mechanism of the present invention;

[0026] Figure 7 This is a schematic diagram of the slide groove of the present invention.

[0027] In the diagram: 1. Support; 2. First transmission assembly; 201. First rotating rod; 202. First connecting rod; 3. Second transmission assembly; 301. Second rotating rod; 302. Second connecting rod; 4. Grinding disc; 5. Water collection tank; 6. Nozzle; 7. Piston cylinder; 8. Push-pull rod; 9. Support plate; 10. Slide plate; 11. Pull-wire roller; 12. Diamond wire; 15. Slide rod; 16. Cleaning plate; 17. Support cylinder; 18. Displacement mechanism; 1801. Clamping plate; 1802. Support rod; 1803. Slide groove; 1804. Telescopic rod; 19. Retention plate; 20. Conveyor table. Detailed Implementation

[0028] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided.

[0029] Please see Figure 1-7 As shown, this embodiment provides a continuous high-precision slicing device for crystal rods, including a support 1, a first transmission component 2 installed on the top of one side of the support 1, a second transmission component 3 installed on the support 1 near the bottom of the first transmission component 2, a spraying mechanism installed at one end of the first transmission component 2, and a cutting mechanism installed at one end of the second transmission component 3.

[0030] The first transmission assembly 2 includes a first rotating rod 201 rotatably mounted on the top of one side of the bracket 1, and a drive motor for driving the first rotating rod 201 to rotate is mounted on the other side of the bracket 1. A first connecting rod 202 is rotatably mounted on the end of the first rotating rod 201 away from the bracket 1. The second transmission assembly 3 includes a second rotating rod 301 rotatably mounted on the bottom of one side of the bracket 1. The second rotating rod 301 and the first rotating rod 201 are driven by a synchronous belt pulley. A second connecting rod 302 is rotatably mounted on the end of the second rotating rod 301 away from the bracket 1. A grinding disc 4 is fixedly mounted on the end of the second rotating rod 301 away from the second connecting rod 302 through the bracket 1.

[0031] The spraying mechanism includes two water collection tanks 5 fixedly installed on the top two sides of the bracket 1, respectively. Coolant is provided in the water collection tanks 5. Spray nozzles 6 are fixedly installed on the bottom of the outer peripheral wall of the water collection tanks 5. A piston cylinder 7 is fixedly installed at one end of the water collection tanks 5. A push-pull rod 8 is slidably arranged between the two piston cylinders 7. Piston plates (not shown in the figure) are fixedly installed at both ends of the push-pull rod 8. The center of the outer peripheral wall of the push-pull rod 8 is rotatably connected to the end of the first connecting rod 202 away from the first rotating rod 201.

[0032] The first rotating rod 201 drives the push-pull rod 8 through the first connecting rod 202 to intermittently push and pull the piston plates in the two piston cylinders 7, so that the two piston cylinders 7 intermittently act on the two water collection tanks 5, and the two nozzles 6 respectively set at the bottom of the two water collection tanks 5 are in an interlocked spraying state.

[0033] The cutting mechanism includes a support plate 9 rotatably connected to the end of the second connecting rod 302 away from the first rotating rod 201. Slide plates 10 are fixedly installed at both ends of the support plate 9. The slide plates 10 are slidably connected to the bracket 1. A wire pull roller 11 is rotatably installed on the side of the slide plate 10 away from the support plate 9. A drive motor (not shown in the figure) for driving the wire pull roller 11 to rotate is installed on the slide plate 10. A diamond wire 12 is fixedly installed between the two wire pull rollers 11. A slide rod 15 is slidably arranged through the side of the slide plate 10 away from the bracket 1. The slide rod 15 has a certain damping when sliding. A cleaning plate 16 is fixedly installed at the top of the two slide rods 15. The cleaning plate 16 is made of rubber material.

[0034] When the first rotating rod 201 rotates, it drives the second rotating rod 301 to rotate simultaneously via the synchronous belt pulley. The rotation of the second rotating rod 301 drives the grinding disc 4 at one end to rotate simultaneously. The rotating grinding disc 4 can grind the crystal rod pressed against its surface. The second rotating rod 301 drives the support plate 9 to move back and forth via the second connecting rod 302 at its other end. The support plate 9 drives the sliding plates 10 at both ends to slide on the inner wall of the bracket 1. The support plate 9 drives the diamond wire 12 to move back and forth on one side of the grinding disc 4 via the two sliding plates 10. The diamond wire 12 is pulled by the staggered rotation between the two wire rollers 11, thereby increasing the friction when the diamond wire 12 contacts the crystal rod, so as to improve the accuracy of crystal rod cutting.

[0035] Two sliding plates 10 drive the cleaning plate 16 to scrape the surface of the grinding disc 4 via two sliding rods 15. The rotation of the grinding disc 4 also removes water stains and impurities from the surface of the grinding disc 4. When the cleaning plate 16 is blocked by the crystal rod during its movement, the cleaning plate 16 drives the sliding rod 15 to slide on the sliding plate 10 to avoid interference from the crystal rod. Until the slicing is completed and the plate slides out of the grinding disc 4, the cleaning plate 16 will slide back and forth on the surface of the grinding disc 4 following the sliding of the sliding plate 10.

[0036] A support cylinder 17 is fixedly installed on one side of the bracket 1 near the grinding disc 4. A displacement mechanism 18 is installed on the support cylinder 17. The displacement mechanism 18 includes two clamping plates 1801 that are respectively slidably disposed on both sides of the outer peripheral wall of the support cylinder 17. One end of the clamping plate 1801 extending into the support cylinder 17 is adapted to the outer peripheral wall of the crystal rod. A support rod 1802 is fixedly installed on the other end of the clamping plate 1801. A sliding groove 1803 is provided at the bottom of the bracket 1. The bottom end of the support rod 1802 is slidably connected to the bracket 1 through the sliding groove 1803. A telescopic rod 1804 is slidably disposed on one side of the slide plate 10 near the support rod 1802. The telescopic rod 1804 has a certain damping when it extends and retracts. The end of the telescopic rod 1804 away from the slide plate 10 is rotatably connected to the outer peripheral wall of the support rod 1802.

[0037] As the crystal rod is placed into the support cylinder 17, the sliding plate 10 moves from the bottom to the top of the crystal rod. The sliding plate 10, via the telescopic rod 1804, drives the bottom end of the support rod 1802 to slide to the end of the groove 1803 near the grinding disc 4. At this time, the support rod 1802, through the action of the groove 1803, causes one end of the clamping plate 1801 to adhere to the outer peripheral wall of the crystal rod. The crystal rod is firmly clamped by the two clamping plates 1801, and one end is moved to the surface of the grinding disc 4. As the sliding plate 10 continues to move upwards, due to the crystal rod... Securely fixed, the sliding plate 10 overcomes the damping of the telescopic rod 1804 during its extension and retraction. The extension of the telescopic rod 1804 corrects the position of the sliding plate 10 and the support rod 1802. Conversely, the sliding plate 10 drives the bottom of the support rod 1802 to slide to the other end of the groove 1803 via the telescopic rod 1804. At this time, the end of the clamping plate 1801 is separated from the outer peripheral wall of the crystal rod. This process is repeated to continuously slice the crystal rod with high precision and simultaneously complete the grinding process at one end.

[0038] The bottom of the support 1 is provided with a retention plate 19 corresponding to the surface of the grinding disc 4. The thickness of the retention plate 19 increases continuously from top to bottom, and one side of the top of the retention plate 19 is on the same plane as the surface of the grinding disc 4. A conveyor table 20 is installed at the bottom of the retention plate 19.

[0039] The wafers on the crystal rod slide down the grinding disc 4 onto the retention plate 19, and then slide along the surface of the retention plate 19 to the surface of the conveyor 20. The wafers that have slid to the surface of the conveyor 20 can then be conveyed to the designated position by the conveyor 20.

[0040] In use, the crystal rod is first placed inside the support cylinder 17. Then, the displacement mechanism 18 drives one end of the crystal rod to adhere to the surface of the grinding disc 4. Next, the first transmission assembly 2 and the second transmission assembly 3 rotate simultaneously. The first rotation assembly causes the two nozzles 6 in the spraying mechanism to be in an interlocked spraying state. The water collection tank 5 intermittently sprays its internal coolant onto the surface of the grinding disc 4 and the crystal rod cutting area through the two nozzles 6. The second transmission assembly 3 drives the grinding disc 4 to grind one end of the crystal rod and also drives the cutting mechanism to grind the crystal rod. The outer peripheral wall is cut. When a slice is cut from one end of the crystal rod, the crystal rod is moved back by the displacement mechanism 18, so that the cut slice falls onto the retention plate 19 and slides along the retention plate 19 to the top of the conveyor table 20. Then, the displacement mechanism 18 pushes one end of the crystal rod onto the surface of the grinding disc 4. The above steps are repeated to continuously grind and cut slices. During the crystal rod slicing process, the cleaning plate 16 cleans the water stains and impurities on the surface of the grinding disc 4 by the drive of the slide plate 10 and the rotation of the grinding disc 4 itself.

[0041] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A continuous high-precision slicing device for crystal rods, comprising a support (1) and a support cylinder (17) fixedly installed on one side of the support (1), characterized in that, A displacement mechanism (18) is installed on the support cylinder (17), and a power mechanism is installed on the other side of the bracket (1). A grinding disc (4), a cutting mechanism, and a spraying mechanism are installed on the power mechanism. The displacement mechanism (18) works with the cutting mechanism to correct the displacement relationship between one end of the crystal rod and the surface of the grinding disc (4). The spraying mechanism works with the power mechanism to intermittently spray coolant onto the surface of the grinding disc (4). The cutting mechanism works with the power mechanism to continuously slice the crystal rod. The grinding disc (4) works with the power mechanism to grind the surface of the crystal rod. The power mechanism includes a first transmission assembly (2) and a second transmission assembly (3), which are driven by a synchronous belt pulley; the first transmission assembly (2) includes a first rotating rod (201) rotatably connected to the top of one side of the bracket (1), and a first connecting rod (202) is rotatably mounted at the end of the first rotating rod (201) away from the bracket (1); the second transmission assembly (3) includes a second rotating rod (301) rotatably connected to the bottom of one side of the bracket (1), and a second connecting rod (302) is rotatably mounted at the end of the second rotating rod (301) away from the bracket (1). The spraying mechanism includes two water collection tanks (5) that are fixedly connected to the top two sides of the bracket (1) respectively. A nozzle (6) is fixedly installed on the bottom of the outer peripheral wall of the water collection tank (5). A piston cylinder (7) is fixedly installed at the end of the water collection tank (5) away from the nozzle (6). A push-pull rod (8) is slidably arranged between the two piston cylinders (7). The center of the outer peripheral wall of the push-pull rod (8) is rotatably connected to the end of the first connecting rod (202) away from the bracket (1). The cutting mechanism includes a support plate (9) rotatably connected to the end of the second link (302) away from the bracket (1). Slide plates (10) are fixedly installed at both ends of the support plate (9). The slide plates (10) are slidably connected to the inner wall of the bracket (1). A wire pull roller (11) is rotatably installed on one side of each of the two slide plates (10). A diamond wire (12) is fixedly installed between the two wire pull rollers (11). The displacement mechanism (18) includes two clamping plates (1801) that are respectively slidably disposed on both sides of the outer peripheral wall of the support cylinder (17). A support rod (1802) is fixedly installed at one end of the clamping plate (1801) extending to the outside of the support cylinder (17). A sliding groove (1803) is provided at the bottom of the bracket (1). The bottom end of the support rod (1802) is slidably connected to the sliding groove (1803). A telescopic rod (1804) is slidably disposed on one side of the sliding plate (10). The end of the telescopic rod (1804) away from the sliding plate (10) is rotatably connected to the outer peripheral wall of the support rod (1802).

2. The continuous high-precision slicing device for crystal rods according to claim 1, characterized in that, The telescopic rod (1804) has a certain damping when it extends and retracts, and one end of the clamping plate (1801) extending into the support cylinder (17) is adapted to the outer peripheral wall of the crystal rod.

3. The continuous high-precision slicing device for crystal rods according to claim 1, characterized in that, Both of the two slide plates (10) have sliding rods (15) slidably installed on the side away from the inner wall of the bracket (1). The sliding rods (15) have a certain damping when sliding. Cleaning plates (16) are fixedly installed on the top of the two sliding rods (15). The cleaning plates (16) are made of rubber material.

4. The continuous high-precision slicing device for crystal rods according to claim 1, characterized in that, A retaining plate (19) is fixedly provided on the bracket (1) near the bottom of the grinding disc (4). The thickness of the retaining plate (19) increases continuously from top to bottom, and the top side of the retaining plate (19) is on the same plane as the surface of the grinding disc (4).

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