Loading and unloading device and its operation method

Abstract

This application relates to the field of semiconductor testing line technology, and discloses a loading and unloading device and its usage method. In the loading and unloading device, a moving cart carries a material storage mechanism, a material picking and placing mechanism, and a rectangular coordinate loading and unloading mechanism to adjust their positions, so that the loading and unloading device can be moved to the external testing equipment to be loaded and unloaded, and load and unload the equipment. When expanding or reducing the production capacity of the semiconductor testing line, the loading and unloading device only needs to be moved to the expanded or reduced semiconductor testing line to perform loading and unloading operations for the testing equipment. The loading and unloading device does not need to be installed or dismantled at the place of use, and the moving distance can be flexibly adjusted according to the expansion or reduction of the semiconductor testing line, which greatly improves the convenience of expanding or reducing the production capacity of the semiconductor testing line.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing line technology, and in particular to a loading and unloading device and its usage method. Background Technology

[0002] Semiconductor testing lines typically consist of one or two rows of testing equipment plus an automated loading and unloading mechanism. This mechanism usually employs multi-axis robots to transfer wafers to be tested or already tested. The working area is the set of all points reachable by the end of the robot's arm or the center of its wrist. Multi-axis robots have a limited working range, meaning one robot can only handle the loading and unloading of one or two surrounding testing devices. For rows of testing equipment in a semiconductor testing line, multiple multi-axis robots are needed to meet the loading and unloading requirements. When expanding or reducing the capacity of a semiconductor testing line, not only does the number of testing devices need to be increased or decreased, but the number of multi-axis robots used for loading and unloading also needs to be increased or decreased accordingly. This necessitates the installation or removal of multi-axis robots, which is labor-intensive and impacts production, making expansion or reduction of semiconductor testing lines inconvenient. Summary of the Invention

[0003] This application aims to at least solve one of the technical problems existing in the prior art. Therefore, the main objective of this application is to propose a loading / unloading device and its usage method, aiming to solve the technical problem of inconvenience caused by automatic loading / unloading mechanisms to the expansion or reduction of semiconductor testing lines.

[0004] To achieve the above objectives, this application proposes a loading / unloading device for use in a semiconductor testing line. The semiconductor testing line includes one or two rows of testing devices arranged at intervals along the X direction. The loading / unloading device is located on one side of one row of the testing devices in the Y direction, or between two rows of the testing devices, with the Y direction perpendicular to the X direction. The loading / unloading device includes:

[0005] A mobile vehicle is provided with a vehicle body, a loading platform and a gantry frame. The vehicle body is used to move along the X direction between two rows of the testing equipment. The loading platform and the gantry frame are both located on the vehicle body. The crossbeam of the gantry frame is located on the side of the loading platform away from the vehicle body in the Z direction.

[0006] The material storage mechanism and the material handling mechanism are both installed on the mobile vehicle. The material handling mechanism is used to transfer the material sheet between the material storage mechanism and the loading platform.

[0007] A rectangular coordinate loading and unloading mechanism is installed on the crossbeam and is used to transfer material sheets between the loading platform and external testing equipment.

[0008] The Z direction is perpendicular to both the X and Y directions.

[0009] Optionally, the mobile vehicle is also equipped with a gantry frame, and the crossbeam of the gantry frame is located on the side of the loading platform away from the vehicle body in the Z direction;

[0010] The rectangular coordinate loading and unloading mechanism includes:

[0011] A first robotic arm is mounted on the crossbeam and is used to transfer the material sheet along the Y and Z directions.

[0012] Optionally, the rectangular coordinate loading and unloading mechanism further includes:

[0013] The first positioning drive unit is used to mount the first robot arm on the crossbeam. The first robot arm moves along the X direction under the drive of the first positioning drive unit.

[0014] Optionally, the rectangular coordinate loading and unloading mechanism further includes:

[0015] The second robotic arm is mounted on the crossbeam and is used to transfer the material sheet along the Y and Z directions.

[0016] Optionally, the material handling mechanism includes:

[0017] A material handling X-axis moving component is mounted on the moving vehicle;

[0018] A Z-axis material handling component is installed on the X-axis material handling component and moves along the X direction under the drive of the X-axis material handling component.

[0019] A material handling and transfer component is installed on the material handling and transfer Z-axis moving component and moves along the Z-axis under the drive of the material handling and transfer Z-axis moving component.

[0020] Optionally, the storage mechanism includes:

[0021] A material storage Z-axis moving component is installed on the moving vehicle;

[0022] The material storage assembly has multiple storage positions for storing material sheets, and the multiple storage positions are distributed along the Z direction; the material storage assembly is installed on the material storage Z-direction moving component and moves along the Z direction under the drive of the material storage Z-direction moving component.

[0023] Optionally, the storage assembly includes:

[0024] A storage rack is installed on the Z-axis moving component and moves along the Z-axis under the drive of the Z-axis moving component.

[0025] A storage box is movably installed on the storage rack, and multiple storage positions are located in the storage box.

[0026] Optionally, the loading and unloading device further includes:

[0027] A box-pushing mechanism is installed on the mobile vehicle and is used to move the storage box out of the storage rack.

[0028] Optionally, the loading and unloading device further includes:

[0029] A pre-alignment mechanism is installed on the mobile vehicle and is used to rotate and adjust the angle of the material sheet.

[0030] Another technical solution proposed in this application is as follows: A method of using the loading and unloading device as described above, comprising the following steps:

[0031] Place the sample to be tested into the storage mechanism;

[0032] The vehicle body is moved to the loading / unloading position of the external testing equipment;

[0033] The material handling mechanism transfers the material to be tested placed on the storage mechanism to the loading platform;

[0034] The rectangular coordinate loading and unloading mechanism transfers the material to be tested placed on the loading platform to the external testing equipment;

[0035] The rectangular coordinate loading and unloading mechanism transfers the inspected sheet from the external testing equipment to the loading platform;

[0036] The material handling mechanism transfers the inspected material sheet placed on the material loading platform to the storage mechanism.

[0037] Compared with the prior art, this application provides a loading and unloading device and its usage method. In the loading and unloading device, the positions of the mobile trolley carrying the storage mechanism, the picking and placing mechanism, and the rectangular coordinate loading and unloading mechanism are adjusted so that the loading and unloading device can be moved to the external testing equipment to be loaded and unloaded, and load and unload the equipment. When expanding or reducing the production capacity of the semiconductor testing line, the loading and unloading device only needs to be moved to the expanded or reduced semiconductor testing line to perform loading and unloading operations for the testing equipment. The loading and unloading device does not need to be installed or removed at the place of use, and the moving distance can be flexibly adjusted according to the expansion or reduction of the semiconductor testing line, which greatly improves the convenience of expanding or reducing the production capacity of the semiconductor testing line.

[0038] Existing multi-axis robots for loading and unloading operations require the use of loading and unloading conveyor lines, which transport the wafers to be tested or the wafers that have already been tested, respectively. This requires a large installation space. When expanding or reducing the capacity of a semiconductor testing line, the multi-axis robots, loading and unloading conveyor lines for loading and unloading the testing equipment also need to be adjusted accordingly, resulting in a large amount of installation and disassembly work. In contrast, the loading and unloading device provided in this application includes a moving vehicle, a storage mechanism, a pick-and-place mechanism, and a Cartesian coordinate loading and unloading mechanism. The loading and unloading device has the functions of being movable, storing, and loading and unloading, requiring less installation space and further improving the convenience of expanding or reducing the capacity of a semiconductor testing line. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0040] Figure 1 A schematic diagram of the loading and unloading device provided in this application applied to a semiconductor testing line;

[0041] Figure 2 A three-dimensional structural diagram of the loading and unloading device provided in this application;

[0042] Figure 3 A front view schematic diagram of the loading and unloading device provided in this application;

[0043] Figure 4 An exploded three-dimensional structural diagram of the loading and unloading device provided in this application;

[0044] Figure 5 A three-dimensional exploded structural diagram of the loading and unloading device provided in this application from another perspective;

[0045] Figure 6 A three-dimensional structural diagram of the first robotic arm in the loading and unloading device provided in this application;

[0046] Figure 7 A three-dimensional structural schematic diagram of the first robotic arm in the loading and unloading device provided in this application from another perspective;

[0047] Figure 8 A three-dimensional schematic diagram of a portion of the structure of the loading and unloading device provided in this application;

[0048] Figure 9 A partial schematic diagram of the three-dimensional structure of the material handling mechanism in the loading and unloading device provided in this application;

[0049] Figure 10 For this application Figure 4 Enlarged diagram of section A in the middle;

[0050] Figure 11 A three-dimensional structural diagram of the pre-alignment mechanism in the loading and unloading device provided in this application;

[0051] Figure 12 A process flow diagram illustrating the usage of the loading and unloading device provided in this application.

[0052] Explanation of icon numbers:

[0053] 10. Loading and unloading device;

[0054] 11. Mobile vehicle; 111. Vehicle body; 112. Loading platform; 1121. Guide chute; 113. Gantry frame; 1131. Crossbeam;

[0055] 12. Material storage mechanism; 121. Material storage Z-axis moving component; 122. Material storage assembly; 1221. Material storage position; 1222. Storage rack; 1223. Storage box;

[0056] 13. Material handling mechanism; 131. Material handling X-axis moving component; 132. Material handling Z-axis moving component; 133. Material handling transfer component; 1331. Fixing component; 1332. Pushing drive component; 1333. Pushing component; 1334. Pushing port; 1335. Magnet;

[0057] 14. Cartesian coordinate loading and unloading mechanism; 141. First robotic arm; 1411. First Y-axis moving component; 1412. Loading and unloading Z-axis moving component; 1413. Loading and unloading transfer component; 1414. Second Y-axis moving component; 142. First positioning drive component; 143. Second robotic arm; 144. Second positioning drive component;

[0058] 15. Box pushing mechanism; 151. Box pushing drive component; 152. Push plate;

[0059] 16. Pre-alignment mechanism; 161. Lifting component; 162. Rotary table;

[0060] 17. Material handling mechanism; 171. Material handling drive component; 172. Material handling component;

[0061] 20. Semiconductor testing line;

[0062] 21. Testing equipment.

[0063] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0064] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0065] This application aims to solve the technical problem of inconvenience caused by automatic loading and unloading mechanisms to the expansion or reduction of semiconductor testing lines. It provides a loading and unloading device and its usage method. In the loading and unloading device, a moving trolley carries a material storage mechanism, a material pick-and-place mechanism, and a rectangular coordinate loading and unloading mechanism to adjust their positions. This allows the loading and unloading device to be moved to the external testing equipment to be loaded and unloaded. When expanding or reducing the semiconductor testing line, the loading and unloading device only needs to be moved to the expanded or reduced semiconductor testing line to perform loading and unloading operations on the testing equipment. The loading and unloading device does not need to be installed or dismantled at the usage site, and the moving distance can be flexibly adjusted according to the expansion or reduction of the semiconductor testing line, greatly improving the convenience of expanding or reducing the semiconductor testing line. See the following embodiments for details.

[0066] Please refer to the following: Figure 1 , Figure 2 and Figure 3 The first embodiment of this application provides a loading / unloading device 10, applied to a semiconductor testing line 20. The semiconductor testing line 20 includes one or two rows of testing devices 21 arranged at intervals along the X direction. The loading / unloading device 10 is located on one side of a row of testing devices 21 in the Y direction, or between two rows of testing devices 21, with the Y direction perpendicular to the X direction. The loading / unloading device 10 includes a moving cart 11, a storage mechanism 12, a picking and placing mechanism 13, and a rectangular coordinate loading / unloading mechanism 14. The moving cart 11 is provided with a cart body 111, a loading platform 112, and a gantry frame 113. Both 112 and the gantry 113 are located on the vehicle body 111. The crossbeam 1131 of the gantry 113 is located on the side of the loading platform 112 facing away from the vehicle body 111 in the Z direction. The storage mechanism 12 and the loading / unloading mechanism 13 are both installed on the mobile vehicle 11. The loading / unloading mechanism 13 is used to transfer material sheets between the storage mechanism 12 and the loading platform 112. The rectangular coordinate loading / unloading mechanism 14 is installed on the crossbeam 1131 and is used to transfer material sheets between the loading platform 112 and the external testing equipment 21. The Z direction is perpendicular to the X and Y directions.

[0067] It is understood that a semiconductor testing line 20 generally has one or two rows of testing devices 21, each row including multiple testing devices 21, and the multiple testing devices 21 in each row are arranged at intervals along the X direction; the testing devices 21 adopt automatic probe stations for testing LED chips; the two rows of testing devices 21 are arranged back to back, and in the middle of the two rows of testing devices 21 is a running channel for the loading and unloading device 10 to operate. The Y direction is perpendicular to the X direction, and the loading and unloading device 10 can move along the X direction on one side of the Y direction of a row of testing devices 21 to realize the loading and unloading operation of the row of testing devices 21. The loading / unloading device 10 provided in this application is used in a semiconductor testing line 20. In use, the loading / unloading device 10 moves to the loading / unloading position of the testing equipment 21 to load and unload materials for the testing equipment 21. The back of the testing equipment 21 has a loading / unloading interface. The loading action of the loading / unloading device 10 refers to transferring the wafer to be tested into the loading / unloading interface of the testing equipment 21, and the unloading action of the loading / unloading device 10 refers to removing the tested wafer from the loading / unloading interface of the testing equipment 21. Since the loading / unloading device 10 provided in this application includes a moving cart 11, a storage mechanism 12, a pick-and-place mechanism 13, and a rectangular coordinate loading / unloading mechanism 14, the storage mechanism 12 stores wafers, and the pick-and-place mechanism 13 cooperates with the rectangular coordinate loading / unloading mechanism 14 to transfer wafers between the storage mechanism 12 and the external testing equipment 21, thus realizing the loading / unloading of materials for the external testing equipment 21. The loading and unloading device 10 is moved and adjusted by a mobile cart 11 carrying a material storage mechanism 12, a material handling mechanism 13, and a rectangular coordinate loading and unloading mechanism 14, so that it can be moved to the external testing equipment 21 to be loaded and unloaded, and load and unload the equipment. The loading and unloading device 10 provided in this application has a wide working range and can meet the loading and unloading needs of one or two rows of testing equipment 21 in the LED testing line. When the semiconductor testing line 20 is expanded or reduced, the loading and unloading device 10 only needs to be moved to the expanded or reduced semiconductor testing line 20 to carry out the loading and unloading operation of the testing equipment 21. Since the loading and unloading device 10 has the functions of being movable, storing materials, and loading and unloading, it does not need to be installed or removed at the place of use. The moving distance can be flexibly adjusted according to the expansion or reduction of the semiconductor testing line 20, which greatly improves the convenience of expanding or reducing the semiconductor testing line 20.

[0068] Specifically, the loading and unloading device 10 includes a moving vehicle 11, a storage mechanism 12, a picking and placing mechanism 13, and a rectangular coordinate loading and unloading mechanism 14. The moving vehicle 11 is equipped with a vehicle body 111, a loading platform 112, and a gantry frame 113. The loading platform 112 and the gantry frame 113 are located on the vehicle body 111. The crossbeam 1131 of the gantry frame 113 is located on the side of the loading platform 112 facing away from the vehicle body 111 in the Z direction. The gantry frame 113 generally includes the crossbeam 1131 and two vertical beams located at both ends of the crossbeam 1131, making the gantry frame 113 as a whole in the shape of an inverted "U". The crossbeam 1131 of the gantry frame 113 is located on the horizontal line of the "U". The crossbeam 1131 of the gantry frame 113 can be set to extend along the X direction and be located on the loading platform 112 in the Z direction. On the side opposite to the vehicle body 111, with the Z direction perpendicular to the X and Y directions, the crossbeam 1131 is located above the top surface of the loading platform 112. The rectangular coordinate loading and unloading mechanism 14 is suspended below the crossbeam 1131, located above the loading platform 112, realizing the transfer of material sheets above the loading platform 112, transferring the material sheets between the loading platform 112 and the external detection equipment 21, and making full use of the vertical space of the loading and unloading device 10, which helps to reduce the horizontal volume of the loading and unloading device 10. The rectangular coordinate loading and unloading mechanism 14 is a mechanism that performs linear movement in three-dimensional coordinate space, such as linear movement along the X and Y directions, linear movement along the X and Z directions, linear movement along the Y and Z directions, or linear movement along the X and Z directions. The material storage mechanism 12 and the loading / unloading mechanism 13 can be installed on the vehicle body 111, the loading platform 112, or the gantry frame 113. The moving vehicle 11 carries the material storage mechanism 12, the loading / unloading mechanism 13, and the rectangular coordinate loading / unloading mechanism 14 to the external detection equipment 21 for loading / unloading. The vehicle body 111 moves along the X-direction between two rows of detection equipment 21, maximizing operational efficiency. The vehicle body 111 can also move in other directions. X, Y, and Z are mutually orthogonal; with the Z-direction as the vertical direction, the X and Y directions are on the horizontal plane. This application does not limit the number of material storage mechanisms 12; one or more material storage mechanisms 12 can be provided. With the material handling mechanism 13 located at either end of the loading platform 112 in the X direction, it only transfers material sheets between one end of the loading platform 112 and the storage mechanism 12. Alternatively, one or more storage mechanisms 12 can be provided at both ends of the loading platform 112 in the X direction, and the material handling mechanism 13 can transfer material sheets between the loading platform 112 and the storage mechanisms 12 located at both ends of the loading platform 112. This is beneficial for increasing the material sheet storage space, improving the material sheet capacity of the loading and unloading device 10, and improving the material handling efficiency. It also avoids the material handling mechanism 13 interfering with the operation of the rectangular coordinate loading and unloading mechanism 14. In the figures of this application, only two storage mechanisms 12 are shown, with one storage mechanism 12 provided at each end of the loading platform 112 in the X direction.The rectangular coordinate loading / unloading mechanism 14 is located above the loading platform 112. It transfers material sheets between the loading platform 112 and the external testing equipment 21. The rectangular coordinate loading / unloading mechanism 14, in conjunction with the pick-and-place mechanism 13, enables automatic loading and unloading operations for the external testing equipment 21. The loading platform 112 serves as a transfer station for the rectangular coordinate loading / unloading mechanism 14 and the pick-and-place mechanism 13, which helps improve the material transfer efficiency and prevents interference between the actions of the rectangular coordinate loading / unloading mechanism 14 and the pick-and-place mechanism 13.

[0069] In some embodiments, the vehicle body 111 is an AGV (Automated Guided Vehicle), RGV (Rail Guided Vehicle), or IGV (Intelligent Guided Vehicle), which makes the vehicle body 111 controllable, reliable, and highly efficient in movement.

[0070] Please refer to the following: Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 In some embodiments, the rectangular coordinate loading and unloading mechanism 14 includes a first manipulator 141, which is mounted on the crossbeam 1131 and is used to transfer the material sheet along the Y and Z directions.

[0071] It can be understood that the first robotic arm 141 is suspended and installed below the crossbeam 1131, above the loading platform 112. It moves linearly along the Y and Z directions to transfer the material sheet between the loading platform 112 and the loading / unloading interface of the external testing equipment 21. Specifically, during the loading process, the first robotic arm 141 moves along the Z direction, the material sheet is detached from the loading platform 112, then moves along the Y direction, the material sheet approaches the external testing equipment 21 (i.e., moves away from the loading platform 112), and finally moves along the Z direction, the material sheet is placed in the loading / unloading interface of the external testing equipment 21. During the unloading process, the first robotic arm 141 moves along the Z direction, the material sheet is detached from the loading / unloading interface of the external testing equipment 21, then moves along the Y direction, the material sheet approaches the loading platform 112 (i.e., moves away from the external testing equipment 21), and finally moves along the Z direction, the material sheet is placed on the loading platform 112.

[0072] Please continue to refer to the following: Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5In some embodiments, the rectangular coordinate loading and unloading mechanism 14 further includes a first positioning drive 142, and the first robot arm 141 is mounted on the crossbeam 1131 through the first positioning drive 142. The first robot arm 141 moves along the X direction under the drive of the first positioning drive 142.

[0073] It is understood that the first positioning drive 142 is used to drive the robot arm to move along the X direction and adjust the position of the first robot arm 141 relative to the loading and unloading interface of the external detection device 21. Since the moving cart 11 in the loading and unloading device 10 carries the first robot arm 141 to the loading and unloading position of the external detection device 21, the first robot arm 141 may not be aligned with the loading and unloading interface. The first positioning drive 142 can make the first robot arm 141 accurately aligned with the loading and unloading interface, thus improving the working quality of the first robot arm 141. In addition, the first positioning drive 142 drives the robot arm to move along the X direction, while the first robot arm 141 only moves in the Y and Z directions, thus separating the movements and avoiding the movement actions being performed by the same component. This allows the first robot arm 141 and the first positioning drive 142 to move simultaneously, which is beneficial to improving the transfer efficiency.

[0074] Please continue to refer to the following: Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 In some embodiments, the rectangular coordinate loading and unloading mechanism 14 further includes a second robot arm 143, which is mounted on the crossbeam 1131 and is used to transfer the material sheet along the Y and Z directions.

[0075] It is understood that the second robotic arm 143 has the same structure and working principle as the first robotic arm 141. The first robotic arm 141 and the second robotic arm 143 are installed side by side on the crossbeam 1131 along the X direction. Using two robotic arms (the first robotic arm 141 and the second robotic arm 143) is beneficial to improving the transfer efficiency. The first robotic arm 141 can be used for two rows of external detection devices 21 respectively. The two rows of external detection devices 21 are located on both sides of the loading and unloading device 10 in the Y direction, so that the first robotic arm 141 and the second robotic arm 143 can simultaneously load and unload the corresponding external detection devices 21, thereby improving the loading and unloading efficiency.

[0076] Please refer to the following: Figure 1 , Figure 2 , Figure 4 , Figure 5 , Figure 6 and Figure 7In some embodiments, the first robotic arm 141 and the second robotic arm 143 have the same structure. The first robotic arm 141 includes a first Y-axis moving member 1411, a loading / unloading Z-axis moving member 1412, and a loading / unloading transfer member 1413; the first Y-axis moving member 1411 is mounted on the first positioning drive member 142; the loading / unloading Z-axis moving member 1412 is mounted on the first Y-axis moving member 1411 and moves along the Y direction under the drive of the first Y-axis moving member 1411; the loading / unloading transfer member 1413 is mounted on the loading / unloading Z-axis moving member 1412 and moves along the Z direction under the drive of the loading / unloading Z-axis moving member 1412.

[0077] It is understood that the loading / unloading transfer component 1413 is used to fix the material sheet, moves along the Y direction under the drive of the first Y-axis moving component 1411, and moves along the Z direction under the drive of the loading / unloading Z-axis moving component 1412, thereby realizing the transfer of the material sheet along the Y and Z directions. The loading / unloading transfer component 1413 can adopt a suction cup structure, clamping structure, etc., to realize the fixing and release of the material sheet and ensure the reliability of the material sheet transfer process; the first Y-axis moving component 1411 can adopt a combination structure of guide rail, slider and synchronous belt assembly, or it can adopt a ball screw or other linear drive structure; the loading / unloading Z-axis moving component 1412 can adopt a linear drive structure such as cylinder, hydraulic cylinder, linear motor, synchronous belt assembly, ball screw structure, etc. The specific actions are as follows: During the loading process, the loading / unloading transfer member 1413 moves along the Z direction under the drive of the loading / unloading Z-direction moving member 1412, fixing and transferring the piece to be tested away from the loading platform 112. Then, under the drive of the first Y-direction moving member 1411, it moves along the Y direction, and the loading / unloading transfer member 1413 transfers the piece to be tested closer to the external testing equipment 21 (i.e., away from the loading platform 112). Finally, under the drive of the loading / unloading Z-direction moving member 1412, it moves along the Z direction, and the loading / unloading transfer member 1413 transfers the piece to be tested and releases it to the external testing equipment. In the loading and unloading interface of 21; during the unloading process, the loading and unloading transfer member 1413 moves along the Z direction under the drive of the loading and unloading Z direction moving member 1412, fixes and transfers the inspected piece away from the loading and unloading interface of the external testing device 21, and then moves along the Y direction under the drive of the first Y direction moving member 1411, transferring the inspected piece close to the loading platform 112 (i.e. away from the external testing device 21), and finally the loading and unloading transfer member 1413 moves along the Z direction under the drive of the loading and unloading Z direction moving member 1412, transferring and releasing the inspected piece onto the loading platform 112.

[0078] Please continue to refer to the following: Figure 1 , Figure 2 , Figure 4 , Figure 5 , Figure 6 and Figure 7In some embodiments, the first robotic arm 141 further includes a second Y-axis moving member 1414, which is mounted on the first positioning drive member 142. The first Y-axis moving member 1411 moves along the Y direction under the drive of the second Y-axis moving member 1414.

[0079] It is understood that the first robotic arm 141 has two Y-axis driving components (first Y-axis moving component 1411 and second Y-axis moving component 1414), so that the loading and unloading transfer component 1413 moves and adjusts its position along the Y direction under the drive of the two Y-axis driving components (first Y-axis moving component 1411 and second Y-axis moving component 1414). By setting the first Y-axis moving component 1411 and the second Y-axis moving component 1414, it is beneficial to increase the speed of the loading and unloading transfer component 1413 moving along the Y direction, and at the same time, it is also beneficial to increase the working range of the loading and unloading transfer component 1413 in the Y direction. For example, when the first Y-axis moving component 1411 and the second Y-axis moving component 1414 drive the loading and unloading transfer component 1413 to move in the same direction, the moving distance is superimposed, the working range is expanded, which is beneficial to reduce the deployment distance and prevent the first Y-axis moving component 1411 and the second Y-axis moving component 1414 from interfering with the external detection equipment 21 when the moving vehicle 11 moves. The second Y-axis moving component 1414 can adopt a combination structure of guide rail, slider and timing belt assembly, or it can adopt a ball screw or other linear drive structure.

[0080] Please continue to refer to the following: Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 In some embodiments, the rectangular coordinate loading and unloading mechanism 14 further includes a second positioning drive 144, and the second robot arm 143 is mounted on the crossbeam 1131 through the second positioning drive 144. The second robot arm 143 moves along the X direction under the drive of the second positioning drive 144.

[0081] It is understood that the second positioning drive 144 and the first positioning drive 142 have the same structure and working principle, and the description of the first positioning drive 142 can be referred to. The second positioning drive 144 can be used to accurately align the second robot 143 with the loading and unloading interface, thereby improving the working quality of the second robot 143. The second positioning drive 144 and the second robot 143 can move simultaneously, which is beneficial to improving the transfer efficiency.

[0082] In some embodiments, the first positioning drive 142 and the second positioning drive 144 have the same structure, both including a guide rail, a slider, and a timing belt assembly. The guide rail and slider provide guidance for the movement of the first robot 141 or the second robot 143 in the X direction, improving the stability of the X-direction position adjustment of the first robot 141; the timing belt assembly, as a power source, precisely drives the displacement of the first robot 141 or the second robot 143 in the X direction, preventing deviation and ensuring high displacement accuracy, thus ensuring that the first robot 141 or the second robot 143 is aligned with the loading / unloading interface, which helps improve the quality of operation; the timing belt assembly can also be replaced with a ball screw structure or other linear drive structures.

[0083] In some embodiments, the second robotic arm 143 is mounted on the crossbeam 1131 via the first positioning drive member 142, and the second robotic arm 143 moves along the X direction under the drive of the first positioning drive member 142.

[0084] It is understood that the first robotic arm 141 and the second robotic arm 143 are both mounted on the crossbeam 1131 through the same first positioning drive component 142, so that the first positioning drive component 142 can drive the first robotic arm 141 and the second robotic arm 143 to move together in the X direction, which helps to simplify the structure of the loading and unloading device 10. In actual use, the installation distance of the first robotic arm 141 and the second robotic arm 143 in the X direction can be set to be the same as or approximately the same as the distance between the loading and unloading interfaces of the two rows of external detection devices 21, so that the drive of the first positioning drive can realize that the first robotic arm 141 and the second robotic arm 143 are aligned with the corresponding loading and unloading interfaces, which helps to improve the work efficiency and work quality.

[0085] Please refer to the following: Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 8 and Figure 9 In some embodiments, the material handling mechanism 13 includes a material handling X-direction moving member 131, a material handling Z-direction moving member 132, and a material handling transfer member 133; the material handling X-direction moving member 131 is mounted on the moving vehicle 11; the material handling Z-direction moving member 132 is mounted on the material handling X-direction moving member 131 and moves along the X direction under the drive of the material handling X-direction moving member 131; the material handling transfer member 133 is mounted on the material handling Z-direction moving member 132 and moves along the Z direction under the drive of the material handling Z-direction moving member 132.

[0086] It can be understood that the pick-and-place transfer component 133 is used to fix the material sheet, moves along the X direction under the drive of the pick-and-place X-direction moving component 131, and moves along the Z direction under the drive of the pick-and-place Z-direction moving component 132, thereby realizing the transfer of the material sheet along the X and Z directions. The pick-and-place transfer component 133 can adopt a suction cup structure, clamping structure, etc., to realize the fixing and release of the material sheet and ensure the reliability of the material sheet transfer process; the pick-and-place X-direction moving component 131 can adopt a combination structure of guide rail, slider and synchronous belt assembly, or it can adopt a ball screw or other linear drive structure; the pick-and-place Z-direction moving component 132 can adopt a linear drive structure such as cylinder, hydraulic cylinder, linear motor, synchronous belt assembly, ball screw structure, etc. Among them, the X-direction moving part and the Z-direction moving part 132 for picking and placing materials are located on one side of the loading platform 112 in the Y direction; the picking and placing transfer part 133 is located above the top surface of the loading platform 112 in the Z direction and is connected to the picking and placing Z-direction moving part 132 through an extension frame.

[0087] The specific actions are as follows: During the loading process, the pick-and-place transfer member 133 moves along the X direction under the drive of the pick-and-place X-direction moving member 131, approaches the storage mechanism 12, and moves along the Z direction under the drive of the pick-and-place Z-direction moving member 132, so that the pick-and-place transfer member 133 is aligned with the material to be tested stored in the storage mechanism 12. The pick-and-place transfer member 133 moves along the X direction under the drive of the pick-and-place X-direction moving member 131, so that the pick-and-place transfer member 133 fixes the material to be tested, and then moves along the X direction to the position of the material to be tested pre-placed on the loading platform 112. Finally, the pick-and-place transfer member 133 moves along the Z direction under the drive of the pick-and-place Z-direction moving member 132 and releases the material to be tested onto the loading platform 112; During the unloading process, the pick-and-place transfer member 133 moves along the X direction under the drive of the pick-and-place X-direction moving member 131. The material pick-and-place transfer member 133 moves closer to the loading platform 112, aligning the material pick-and-place transfer member 133 with the inspected sheet placed on the loading platform 112. Then, driven by the Z-direction moving member 132, the material pick-and-place transfer member 133 moves along the Z-direction, fixing the inspected sheet. Next, driven by the Z-direction moving member 132, the material pick-and-place transfer member 133 transfers the inspected sheet away from the loading platform 112 and moves along the X-direction, driven by the X-direction moving member 131, bringing it closer to the storage mechanism 12. Finally, driven by the Z-direction moving member 132, the material pick-and-place transfer member 133 moves along the Z-direction, aligning the sheet with the storage position in the storage mechanism 12, and driven by the X-direction moving member, releases the sheet onto the storage mechanism 12.

[0088] Please continue to refer to the following: Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 8 and Figure 9 In some embodiments, the material handling and transfer component 133 includes a fixing component 1331, a pushing drive component 1332, and a pushing component 1333; the fixing component 1331 is installed on the Z-axis moving component 132, and the side of the fixing component 1331 that contacts the material sheet is provided with a pushing opening 1334; the pushing drive component 1332 is installed on the fixing component 1331, the driving end of the pushing drive component 1332 is connected to the pushing component 1333, the pushing component 1333 is accommodated in the pushing opening 1334, and extends or retracts into the pushing opening 1334 under the drive of the pushing drive component 1332.

[0089] It is understood that the fixing component 1331 is used to fix the sheet material. A magnet 1335, a vacuum nozzle, or other structure can be installed on the side of the fixing component 1331 that contacts the sheet material to magnetically or vacuum-attract and fix the sheet material, which helps prevent damage during fixing. Alternatively, an adhesive layer can be installed on the side of the fixing component 1331 that contacts the sheet material to fix the sheet material by adhesive bonding, which also helps prevent damage during fixing. Driven by the Z-axis moving component 132, the fixing component 1331 approaches and contacts the sheet material, fixing it in place. The push port 1334 is located on the side of the fixing component 1331 that contacts the sheet material. The push component 1333 is housed in the push port 1334 and extends or retracts from the push port 1334 under the drive of the push drive component 1332 to push the sheet material away from the fixing component 1331, thus releasing the sheet material from the fixing frame. The push drive component 1332 can be a linear drive structure such as a cylinder, hydraulic cylinder, electric actuator, or linear motor.

[0090] Please continue to refer to the following: Figure 8 and Figure 9 In some embodiments, the fixing member 1331 has push ports 1334 on both sides that are in contact with the material sheet. The material handling and transfer member 133 may include two push members 1333, which are respectively housed in the two push ports 1334. The two push members 1333 extend or retract into the push ports 1334 by the drive of the corresponding push drive member 1332, so as to push the material sheet away from the fixing member 1331 and release the material sheet from the fixing frame. The push drive member 1332 may be a double-headed hydraulic cylinder or a pneumatic cylinder, so that the two push members 1333 can be respectively installed on the two drive ends of the double-headed hydraulic cylinder or pneumatic cylinder, which helps to simplify the structure.

[0091] Please continue to refer to the following: Figure 2 and Figure 8 In some embodiments, the loading platform 112 is provided with a guide groove 1121, which is arranged through the X direction and is used to accommodate the material sheet.

[0092] It is understandable that by setting the guide groove 1121, it is convenient to store the material pieces. The guide groove 1121 also provides guidance for the material piece transfer process. The material pick-and-place mechanism 13 transfers the material pieces by sliding in the guide groove 1121, which serves as a material transfer channel. The guide groove 1121 is set through the X direction, which facilitates the transfer of material pieces between the loading platform 112 and the storage mechanism 12 installed at both ends of the loading platform 112. This allows the material pick-and-place mechanism 13 to move only along the guide groove 1121 to transfer the material pieces between the loading platform 112 and the storage mechanism 12, which helps to improve the working efficiency of the material pick-and-place mechanism 13.

[0093] Please refer to the following: Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 10 In some embodiments, the storage mechanism 12 includes a storage Z-axis moving member 121 and a storage assembly 122; the storage Z-axis moving member 121 is mounted on the moving vehicle 11; the storage assembly 122 is provided with a plurality of storage positions 1221 for storing material pieces, and the plurality of storage positions 1221 are distributed along the Z direction; the storage assembly 122 is mounted on the storage Z-axis moving member 121 and moves along the Z direction under the drive of the storage Z-axis moving member 121.

[0094] It is understood that the storage component 122 has multiple storage positions 1221 for storing material pieces, which allows the storage component 122 to store multiple material pieces. This helps ensure the continuous operation of the loading and unloading device 10 and avoids stopping work due to material shortage. The storage component 122 is installed on the storage Z-axis moving part 121 and moves along the Z-axis under the drive of the storage Z-axis moving part 121 to adjust the position of the storage component 122 relative to the loading platform 112 and the picking and unloading mechanism 13. This helps reduce the movement path and movement time of the picking and unloading structure and improves the material piece transfer efficiency. Since the multiple storage positions 1221 in the storage component 122 are distributed along the Z-axis, when the storage component 122 moves along the Z-axis under the drive of the storage Z-axis moving part 121, the multiple storage positions 1221 are aligned with the loading platform 112 or the picking and unloading mechanism 13 in sequence. This helps reduce the movement path and movement time of the picking and unloading structure and improves the material piece transfer efficiency. The storage position 1221 has an opening facing the loading platform 112 to facilitate the removal or placement of the sheet from or into the storage position 1221. The Z-axis moving component 121 can be a combination of a guide rail, a slider, and a timing belt assembly, or it can be a ball screw or other linear drive structure.

[0095] Please continue to refer to the following: Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 10In some embodiments, the storage assembly 122 includes a storage rack 1222 and a storage box 1223; the storage rack 1222 is mounted on the storage Z-axis moving member 121 and moves along the Z-axis under the drive of the storage Z-axis moving member 121; the storage box 1223 is movably mounted on the storage rack 1222, and a plurality of storage positions 1221 are located in the storage box 1223.

[0096] It is understood that the storage component 122 includes a storage rack 1222 and a storage box 1223. The storage box 1223 is movably installed on the storage rack 1222, and multiple storage positions 1221 are located in the storage box 1223, so that the storage box 1223 can be moved off or placed on the storage rack 1222, which facilitates the replacement of the storage box 1223, that is, facilitates the loading or unloading of material sheets into boxes in the loading and unloading device 10, which helps to improve the ease of use of the loading and unloading device 10.

[0097] Please continue to refer to the following: Figure 2 , Figure 3 , Figure 4 and Figure 5 In some embodiments, the loading and unloading device 10 further includes a box pushing mechanism 15, which is installed on the mobile vehicle 11 and is used to move the storage box 1223 out of the storage rack 1222.

[0098] It is understood that the pusher mechanism 15 is used to remove the storage box 1223 from the storage rack 1222, which facilitates the automatic recycling of the inspected material pieces that are full in the storage box 1223 and improves the ease of use of the loading and unloading device 10. This application does not limit the number of pusher mechanisms 15. The number of pusher mechanisms 15 can be set to correspond to the number of storage mechanisms 12. Each storage mechanism 12 corresponds to one pusher mechanism 15. When a storage mechanism 12 is set at one end of the loading platform 112 in the X direction, the pusher mechanism 15 and the storage mechanism 12 are located at the same end of the loading platform 112. When one or more storage mechanisms 12 are set at both ends of the loading platform 112 in the X direction, pusher mechanisms 15 are also installed at both ends of the loading platform 112.

[0099] Please continue to refer to the following: Figure 2 , Figure 3 , Figure 4 and Figure 5 In some embodiments, the box-pushing mechanism 15 includes a box-pushing drive 151 and a push plate 152. The box-pushing drive 151 is mounted on the mobile vehicle 11, and the push plate 152 is mounted on the drive end of the box-pushing drive 151 and pushes the storage box 1223 to move under the drive of the box-pushing drive 151, so that the storage box 1223 is disengaged from the storage rack 1222.

[0100] It is understood that by using the pusher 151 and the pusher plate 152, the storage box 1223 is pushed off the storage rack 1222, which facilitates the automatic recycling of the inspected pieces that are full in the storage box 1223. The pushing direction of the pusher plate 152 is the same as the direction in which the storage box 1223 is installed into the storage rack 1222. The storage box 1223 can move along the X direction, along the Y direction, or along other directions on the storage rack 1222. That is, the storage rack 1222 is provided with holes that are through-holes in the X direction, along the Y direction, or along other directions. The storage box 1223 is placed in these holes. Similarly, the pusher plate 152 moves along the X direction, along the Y direction, or along other directions under the drive of the pusher 151 to push the storage box 1223 out of the storage rack 1222. The push box drive component 151 can adopt a combination structure of guide rail, slider and synchronous belt assembly, or a ball screw, or a linear drive structure such as cylinder, hydraulic cylinder, linear motor, etc.

[0101] Please continue to refer to the following: Figure 2 , Figure 4 , Figure 5 and Figure 8 In some embodiments, the loading and unloading device 10 further includes a pre-alignment mechanism 16, which is mounted on the moving vehicle 11 and is used to rotate and adjust the angle of the material sheet.

[0102] It is understood that the pre-alignment mechanism 16 can be used to rotate and adjust the angle of the material sheet so that the orientation of the material sheet meets the loading and unloading requirements of the external detection equipment 21, thereby ensuring the quality of the loading and unloading operation. The pre-alignment mechanism 16 is installed on the mobile vehicle 11, specifically located below the loading platform 112. A working hole or opening is provided on the loading platform 112 to facilitate the pre-alignment mechanism 16 in adjusting the angle of the material sheet within the working hole or opening. The number of pre-alignment mechanisms 16 can be set to two, corresponding to the first robot arm 141 and the second robot arm 143 respectively, to achieve feeding for the first robot arm 141 and the second robot arm 143, thereby improving the loading efficiency.

[0103] Please refer to the following: Figure 2 , Figure 4 , Figure 5 , Figure 8 and Figure 11 In some embodiments, the pre-alignment mechanism 16 includes a lifting member 161 and a rotating table 162; the lifting member 161 is mounted on the moving vehicle 11; the rotating table 162 is mounted on the lifting member 161 and moves along the Z direction with the drive member of the lifting member 161; the rotating table 162 is used to support and rotate the material sheet.

[0104] It is understood that the lifting component 161 is installed on the mobile vehicle 11, specifically below the loading platform 112. A working hole or opening is provided on the loading platform 112 to accommodate the lifting component 161 and the rotating platform 162. The rotating platform 162 supports and rotates the material sheet, and the lifting component 161 drives the rotating platform 162 to move along the Z-direction. When adjusting the angle of the material sheet, the lifting component 161 drives the rotating platform 162 to rise, passing through the working hole or opening on the loading platform 112, and supporting the material sheet placed on the loading platform 112. Then, the rotating platform 162 rotates to adjust the angle of the material sheet, ensuring that the orientation of the material sheet meets the loading requirements of the external testing equipment 21. The rotating platform 162 can use a combination of a motor and a synchronous belt as its power source, or a combination of a motor and a reducer, or other rotary drive structures as its power source. The top surface of the rotary table 162 is provided with multiple vacuum suction holes. The rotary table 162 is connected to a vacuum pump to create negative pressure, and the material sheet is adsorbed and fixed through the vacuum suction holes, which helps to ensure the stability of the material sheet angle adjustment process. The lifting component 161 can adopt a linear drive structure such as a cylinder, hydraulic cylinder, or linear motor.

[0105] Please continue to refer to the following: Figure 3 , Figure 4 and Figure 5 In some embodiments, the loading and unloading device 10 further includes a material straightening mechanism 17, which is installed on the material storage assembly 122 and located at the outlet position of the material storage position 1221 in the material storage assembly 122. The material straightening mechanism 17 is used to restrict the material sheet from detaching from the material storage position 1221.

[0106] It is understandable that, in order to facilitate the material handling mechanism 13 to take out or put in the material storage position 1221, the outlet of the material storage position 1221 is directly connected to the outside. The material handling mechanism 17 is used to restrict the material from leaving the material storage position 1221, so as to prevent the material from falling out of the outlet of the material storage position 1221 during the movement of the moving vehicle 11, and to ensure the stability of the position of the material stored in the material storage component 122.

[0107] Please continue to refer to the following: Figure 3 , Figure 4 and Figure 5 In some embodiments, the material straightening mechanism 17 includes a material straightening drive 171 and a material straightening component 172. The material straightening drive 171 is mounted on the material storage assembly 122, and the material straightening component 172 is mounted on the material straightening drive 171. The material straightening component 172 extends along the Z direction and, driven by the material straightening drive 171, blocks or disengages from the outlet of the material storage position 1221.

[0108] It can be understood that the material assembly 172 moves under the driving action of the material assembly drive 171, forming a block on the outlet of the storage position 1221 to prevent the material sheet from falling out of the storage position 1221. Alternatively, the material assembly 172 may detach from the outlet of the storage position 1221, allowing the material sheet to be moved out of the outlet of the storage position 1221, so that the material pick-and-place mechanism 13 can normally pick up and put in the material sheet. The direction in which the material assembly drive 171 drives the material assembly 172 to move is perpendicular to the outlet direction of the storage position 1221. For example, if the outlet of the storage position 1221 is opened in the X direction, then the material assembly drive 171 drives the material assembly 172 to move in the Y direction. If the outlet of the storage position 1221 is opened in the Y direction, then the material assembly drive 171 drives the material assembly 172 to move in the X direction, so that the material assembly 172 moves under the drive of the material assembly drive 171, blocking or detaching from the outlet of the storage position 1221.

[0109] In some embodiments, when the loading and unloading device 10 is working, firstly, the storage mechanisms 12 installed at both ends (first end and second end) of the loading platform 112 in the X direction are loaded with material pieces. Specifically, the storage box 1223 filled with material pieces to be tested can be loaded onto the storage rack 1222 manually or by an external mechanism. The body 111 of the moving vehicle 11 moves to the loading position of the No. 1 testing equipment. While the body 111 moves, the storage component 122 at the first end is driven by the storage Z-direction moving component 121 to align the first storage position 1221 at the top of the storage component 122 with the guide groove 1121 of the loading platform 112. Then, the picking and unloading mechanism 13 pulls out the first material piece stored in the first storage position 1221 and drags the first material piece along the guide groove 1121 to the pre-alignment mechanism 16 corresponding to the first robotic arm 141. The material is unloaded; simultaneously, driven by the Z-axis moving component 121, the storage component 122 at the first end aligns the second storage position 1221 at the top of the storage component 122 with the guide groove 1121 of the loading platform 112, waiting to pick up the material; then, the pre-alignment mechanism 16 corresponding to the first robot 141 positions and lifts the first material piece and rotates its orientation, turning the first material piece to the required direction, and then puts the first material piece back onto the guide groove 1121; the first robot 141 transfers the first material piece and rises along the Z-axis, and driven by the first positioning drive component 142, aligns it with the loading and unloading interface of the No. 1 testing equipment, and the first robot 141 moves along the Y-axis toward the No. 1 automatic probe, putting the first material piece at the first end into the loading and unloading interface of the No. 1 testing equipment; then the first robot 141 returns to the material picking position.

[0110] Simultaneously, after the material handling mechanism 13 places the first piece of material from the storage component 122 at the first end to the pre-alignment mechanism 16 corresponding to the first robot arm 141, the material handling mechanism 13 will continue to move along the X direction toward the storage component 122 at the second end, take out the first piece of material at the top of the storage component 122 at the second end, and move along the guide groove 1121 to drag the first piece of material at the second end to the pre-alignment mechanism 16 corresponding to the second robot arm 143. The pre-alignment mechanism 16 corresponding to the second robot arm 143 will then adjust the orientation of the first piece of material at the second end. Then, while putting down the first piece of material from the storage component 122 at the second end, the material handling mechanism 13 will continue to move along the X direction toward the storage component 122 at the first end. When it reaches the storage component 122 at the first end, it will take out the second piece of material stored in the second storage position 1221 of the storage component 122 at the first end.

[0111] Then, as mentioned above, the material handling mechanism 13 also places the second material piece stored in the second storage position 1221 of the first end storage component 122 onto the pre-alignment mechanism 16 corresponding to the first robot arm 141. After the orientation adjustment of the second material piece is completed, the pre-alignment mechanism 16 places the material piece onto the guide groove 1121. Then, similarly, the first robot arm 141 descends along the Z direction, fixes the second material piece, and then rises. Driven by the first positioning drive 142, the first robot arm 141 aligns with the loading and unloading interface of the #2 testing equipment. The first robot arm 141 moves along the Y direction toward the #2 testing equipment and puts the second material piece at the first end into the loading and unloading interface of the #2 testing equipment. Immediately afterwards, the first robot arm 141 returns to the material handling position.

[0112] After loading the materials for testing equipment #1 and #2, the vehicle body 111 of the mobile cart 11 moves to the loading position for testing equipment #3 and #4. At this time, as mentioned before, the second robotic arm 143 descends along the Z direction, fixes the first material piece at the second end, and then rises. Driven by the second positioning drive 144, the second robotic arm 143 aligns with the loading / unloading interface of testing equipment #3, and moves along the Y direction toward testing equipment #3, placing the first material piece at the second end into the loading / unloading interface of testing equipment #3; then the second robotic arm 143 returns to the material picking position.

[0113] Driven by the rear precision positioning drive mechanism, the rear pick-and-place robot aligns with the receiving position of the #3 inspection device. The rear loading robot extends to the right and moves towards the #3 inspection device to place the material sheet into it. Then, the rear robot retracts to the material pick-up position. The second material sheet, which has been synchronously positioned, is then retrieved. Driven by the rear precision positioning drive mechanism, the rear pick-and-place robot aligns with the receiving position of the #4 inspection device. The rear loading robot extends to the left and moves towards the #4 inspection device to place the material sheet into it. Then, the front robot retracts to the material pick-up position.

[0114] Similarly, after the testing equipment completes the sheet inspection, it will return the inspected sheet to the loading / unloading interface of the testing equipment. The body 111 of the moving vehicle 11 will move to the loading / unloading position of this testing equipment. The first robotic arm 141 (or the second robotic arm 143) that was originally unloading the sheet will be positioned by the corresponding first positioning drive 142 (or the second positioning drive 144). The first robotic arm 141 (or the second robotic arm 143) will then move along the Y and Z directions to remove the inspected sheet and place it in the pre-alignment mechanism 16 corresponding to the first robotic arm 141 (or the second robotic arm 143) for edge adjustment and positioning. At the same time, the corresponding storage component 122 will be in the storage Z direction. Driven by the moving part 121, the storage position 1221 corresponding to the inspected piece in the storage assembly 122 is adjusted to the receiving height along the Z direction; then the picking and placing mechanism 13 pushes the inspected piece along the guide groove 1121 into the corresponding storage position 1221; then, the vehicle body 111 moves to the loading and unloading position of the second robot 143 (or the first robot 141). After the second robot 143 (or the first robot 141) is precisely positioned by the second positioning drive 144 (or the first positioning drive 142), the second robot 143 (or the first robot 141) takes out the inspected piece with the adjusted orientation and sends it into an empty testing device for testing.

[0115] Please refer to the following: Figure 1 , Figure 2 , Figure 3 and Figure 12 The second embodiment of this application also provides a method for using the loading and unloading device 10, including the following steps:

[0116] S100. Place the sample to be tested into the storage mechanism 12;

[0117] S200, the vehicle body 111 moves to the loading / unloading position of the external testing equipment 21;

[0118] S300, the material handling mechanism 13 transfers the material to be tested placed on the storage mechanism 12 to the loading platform 112;

[0119] S400, the rectangular coordinate loading and unloading mechanism 14 transfers the material to be tested placed on the loading platform 112 to the external testing equipment 21;

[0120] S500, the rectangular coordinate loading and unloading mechanism 14 transfers the inspected material sheet on the external testing equipment 21 to the loading platform 112;

[0121] S600, the material handling mechanism 13 transfers the inspected material sheet placed on the material loading platform 112 to the material storage mechanism 12.

[0122] It is understood that the loading and unloading device 10 can be used to load and unload the testing equipment 21 arranged in rows in the semiconductor testing line 20; the storage mechanism 12 stores the wafers, and the pick-and-place mechanism 13 cooperates with the rectangular coordinate loading and unloading mechanism 14 to transfer the wafers between the storage mechanism 12 and the external testing equipment 21, thereby loading and unloading the external testing equipment 21; the moving cart 11 carries the storage mechanism 12, the pick-and-place mechanism 13 and the rectangular coordinate loading and unloading mechanism 14 to move and adjust their positions, so that the loading and unloading device 10 can be moved to the external testing equipment 21 to be loaded and unloaded, and load and unload the equipment. The loading and unloading device 10 has a wide working range and can meet the loading and unloading needs of one or two rows of testing equipment 21 in the semiconductor testing line 20. When the semiconductor testing line 20 is expanded or reduced, the loading and unloading device 10 only needs to be moved to the expanded or reduced semiconductor testing line 20 to carry out loading and unloading operations for the testing equipment 21. Since the loading and unloading device 10 has the functions of being movable, storing materials and loading and unloading, it does not need to be installed or removed at the place of use. The moving distance can be flexibly adjusted according to the expansion or reduction of the semiconductor testing line 20, which greatly improves the convenience of expanding or reducing the semiconductor testing line 20.

[0123] In summary, this application provides a loading and unloading device and its usage method. The loading and unloading device comprises a mobile trolley carrying a material storage mechanism, a material handling mechanism, and a rectangular coordinate loading and unloading mechanism, which adjust their positions to allow the device to be moved to an external testing device for loading and unloading. When expanding or reducing the capacity of a semiconductor testing line, the loading and unloading device only needs to be moved to the expanded or reduced capacity semiconductor testing line to perform loading and unloading operations on the testing equipment. The loading and unloading device does not require installation or removal at the usage site and its movement distance can be flexibly adjusted according to the expansion or reduction of the semiconductor testing line, greatly improving the convenience of expanding or reducing the capacity of the semiconductor testing line.

[0124] It should be noted that if the embodiments of this application involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0125] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or," "and / or," or "and / or" throughout the text implies three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where A and B are simultaneously satisfied. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0126] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural transformations made based on the content of the specification and drawings of this application under the concept of this application, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this application.

Claims

1. A loading / unloading device, applied to a semiconductor testing line, the semiconductor testing line comprising one or two rows of testing devices arranged at intervals along the X direction, the loading / unloading device being located on one side of one row of the testing devices in the Y direction, or located between two rows of the testing devices, the Y direction being perpendicular to the X direction, characterized in that, The loading and unloading device includes: The mobile vehicle is equipped with a vehicle body, a loading platform and a gantry frame. The vehicle body is used to move between two rows of the testing equipment along the X direction. The loading platform and the gantry frame are both located on the vehicle body. The crossbeam of the gantry frame is located on the side of the loading platform away from the vehicle body in the Z direction. The material storage mechanism and the material handling mechanism are both installed on the mobile vehicle. The material handling mechanism is used to transfer the material sheet between the material storage mechanism and the loading platform. A rectangular coordinate loading and unloading mechanism is installed on the crossbeam and is used to transfer material sheets between the loading platform and external testing equipment. The Z direction is perpendicular to both the X and Y directions.

2. The loading and unloading device as described in claim 1, characterized in that, The rectangular coordinate loading and unloading mechanism includes: A first robotic arm is mounted on the crossbeam and is used to transfer the material sheet along the Y and Z directions.

3. The loading and unloading device as described in claim 2, characterized in that, The rectangular coordinate loading and unloading mechanism also includes: The first positioning drive unit is used to mount the first robot arm on the crossbeam. The first robot arm moves along the X direction under the drive of the first positioning drive unit.

4. The loading and unloading device as described in claim 2, characterized in that, The rectangular coordinate loading and unloading mechanism also includes: The second robotic arm is mounted on the crossbeam and is used to transfer the material sheet along the Y and Z directions.

5. The loading and unloading device as described in claim 1, characterized in that, The material handling mechanism includes: A material handling X-axis moving component is mounted on the moving vehicle; A Z-axis material handling component is installed on the X-axis material handling component and moves along the X direction under the drive of the X-axis material handling component. A material handling and transfer component is installed on the material handling and transfer Z-axis moving component and moves along the Z-axis under the drive of the material handling and transfer Z-axis moving component.

6. The loading and unloading device as described in claim 1, characterized in that, The storage mechanism includes: A material storage Z-axis moving component is installed on the moving vehicle; The material storage assembly has multiple storage positions for storing material sheets, and the multiple storage positions are distributed along the Z direction; the material storage assembly is installed on the material storage Z-direction moving component and moves along the Z direction under the drive of the material storage Z-direction moving component.

7. The loading and unloading device as described in claim 6, characterized in that, The storage component includes: A storage rack is installed on the Z-axis moving component and moves along the Z-axis under the drive of the Z-axis moving component. A storage box is movably installed on the storage rack, and multiple storage positions are located in the storage box.

8. The loading and unloading device as described in claim 7, characterized in that, The loading and unloading device also includes: A box-pushing mechanism is installed on the mobile vehicle and is used to move the storage box out of the storage rack.

9. The loading and unloading device as described in claim 1, characterized in that, The loading and unloading device also includes: A pre-alignment mechanism is installed on the mobile vehicle and is used to rotate and adjust the angle of the material sheet.

10. A method of using the loading and unloading device as described in any one of claims 1-9, characterized in that, Including the following steps: Place the sample to be tested into the storage mechanism; The vehicle body is moved to the loading / unloading position of the external testing equipment; The material handling mechanism transfers the material to be tested placed on the storage mechanism to the loading platform; The rectangular coordinate loading and unloading mechanism transfers the material to be tested placed on the loading platform to the external testing equipment; The rectangular coordinate loading and unloading mechanism transfers the inspected sheet from the external testing equipment to the loading platform; The material handling mechanism transfers the inspected material sheet placed on the material loading platform to the storage mechanism.

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