一种制备多功能膜的方法及光学视窗
By using magnetron sputtering technology and metal doping to form a dense, multifunctional film, the problem of insufficient density in nano-coatings is solved, achieving self-cleaning function and improved service life under different light conditions.
CN117778974BActive Publication Date: 2026-07-17ZHEJIANG DAHUA TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZHEJIANG DAHUA TECH CO LTD
- Filing Date
- 2023-12-20
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Existing nano-coatings lack sufficient density, making them susceptible to salt spray corrosion, resulting in short service life, and their self-cleaning function is limited by ultraviolet light irradiation.
Method used
Using magnetron sputtering technology, titanium dioxide or zinc oxide targets are sputtered under high pressure to form an oxide film, and then silicon dioxide targets are sputtered under low pressure to form a coating layer. Combined with metal doping, a dense multifunctional film is formed.
Benefits of technology
It improves the density and hydrophilicity of the membrane, expands the light conditions for self-cleaning function, and increases the service life and light transmittance of the membrane.
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Figure CN117778974B_ABST
Abstract
本申请提供了一种制备多功能膜的方法及光学视窗，通过提升膜层的致密性，提升膜层的耐盐雾腐蚀性能，从而有效延长膜层的使用寿命以及提升用户体验。该方法包括：使第一目标靶材在不低于1.2Pa的第一工作气压中被溅射，以在基材的待沉积表面沉积，得到由氧化物颗粒构成的氧化膜；所述第一目标靶材包括二氧化钛靶或氧化锌靶；在低于1.0Pa的第二工作气压中，使第二目标靶材被溅射，以在所述氧化物颗粒的表面形成包覆层，得到所述多功能膜；所述第二目标靶材包括二氧化硅靶或氧化铝靶，其中，所述第一目标靶材中所述二氧化钛靶或氧化锌靶的射频电源功率与所述第二目标靶材的射频电源功率之差大于或等于40W。
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