Method and device for on-line automatic detection of parallelism of flat workpieces

Abstract

The application discloses a kind of workpiece plane parallelism online automatic detection method and device thereof.The method is arranged between two planes surface array detector, half-transmission half-reflection turning mirror, objective lens;In the light path of objective lens emission, right-angle prism and ridge prism are arranged;In the side of half-transmission half-reflection turning mirror, differentiation plate, collimating lens and light source are arranged;The relative offset of two light spots on X and Y direction on array detector is calculated;Whether the two planes of workpiece is parallel to each other is judged.The device includes photoelectric coordinate digital detection system (1) and workpiece clamp (6), and there is prism system (2) by base (2-6), two supports (2-5), two universal adjusting devices (2-4), two prism clamps (2-3), right-angle prism (2-1) and ridge prism (2-2) on detection table (7);There are slide rails (4) on both sides of the prism system, and there is workpiece clamp (6) by clamping body (6-2), supporting block (6-3), pressing screw (6-1) on slide rail (4).

Description

Technical Field

[0001] This invention relates to an online automatic detection method for the parallelism of planar workpieces, and also to a device for implementing the method, belonging to the field of form and position error detection. Background Technology

[0002] Currently, the parallel flat crystal method or block gauge verification method is widely used to measure the parallelism between two face-to-face smooth flat workpieces. This method is not only extremely inconvenient to operate and requires high skill from the measurement personnel, but also time-consuming and labor-intensive. Furthermore, the accuracy of the measurement is easily affected by the skill of the measurement personnel. Summary of the Invention

[0003] In view of the above-mentioned defects in the existing technology, the present invention aims to provide an online automatic detection method for the parallelism of planar workpieces that is easy to operate and provides accurate measurement results; another objective of the present invention is to provide an apparatus for implementing the method.

[0004] To achieve the above objectives, the method of the present invention adopts the following technical solution: 1) Place an array detector, a semi-transparent and semi-reflective mirror, and an objective lens sequentially along the Y direction between two face-to-face workpieces to be measured; 2) Place a right-angle prism and a roof prism sequentially along the X-direction in the light path exiting the objective lens; 3) A splitting plate, a collimating lens, and a light source are sequentially placed along the X direction on one side of the semi-transparent and semi-reflective folding mirror to ensure that the light passing through the splitting plate is reflected by the semi-transparent and semi-reflective folding mirror and then passes through the objective lens and is divided into a left light path and a right light path by the right-angle prism and the roof prism. The left light path and the right light path are reflected by the workpiece to be measured and then pass through the right-angle prism and the roof prism again, and then pass through the objective lens and the semi-transparent and semi-reflective folding mirror in sequence to illuminate the area array detector, forming two light spots. 4) Calculate the relative offset ΔX in the X direction and the relative offset ΔY in the Y direction of the two light spots using a computer electrically connected to the area array detector; 5) If △X=0 and △Y=0, the computer automatically determines that the two workpieces to be measured are parallel to each other; otherwise, the computer automatically determines that the two workpieces to be measured are not parallel to each other.

[0005] The device provided by this invention includes a photoelectric coordinate digital detection system and a workpiece fixture fixed on a detection table; it includes a photoelectric coordinate digital detection system and a workpiece fixture fixed on a detection table; a prism system fixed on the detection table is located in the direction of the emitted light path of the photoelectric coordinate digital detection system. The prism system consists of two supports fixed on a base, prism fixtures fixed on each support respectively by a universal adjustment device, and right-angle prisms and roof prisms correspondingly fixed on the two prism fixtures; there is a set of slide rails fixed on the detection table on both sides of the prism system, and each set of slide rails has a workpiece fixture mounted on a first slider; both sets of workpiece fixtures consist of a support block fixed on the first slider by a fixture body and a clamping screw mounted on the fixture body.

[0006] In the above technical solution, the universal adjustment device consists of a fixed seat fixed on the bracket, an adjustment seat located above the fixed seat, a steel ball positioned between the adjustment seat and the fixed seat, a tension spring connected between the fixed seat and the adjustment seat, and two threaded ball head rods installed on the fixed seat. The two threaded ball head rods and the steel ball together form a three-point support for the adjustment seat.

[0007] In the above technical solution, there is a grinding device mounted on the slide rail via a second slider between the prism system and the two workpiece fixtures. Both grinding devices consist of a grinding seat fixed on the second slider, a sliding sleeve installed in the grinding seat, a ball cup sleeve fixed in the sliding sleeve by threads, a top grinding sleeve extending into the sliding sleeve and threadedly connected to the ball cup sleeve, a ball head screw installed in the ball cup sleeve, an adjusting screw sleeve threadedly connected to the ball cup sleeve and pressing the ball head screw, an adjusting handwheel extending into the grinding seat and threadedly connected to the ball head screw, four radial adjusting screws evenly distributed on the sliding sleeve and in contact with the top grinding sleeve, a clamping rod installed in the grinding seat, and a locking nut threadedly engaged with the clamping rod.

[0008] In the above technical solution, there is a locking bar fixed to the detection table on both sides of the prism system, and each locking bar has a T-shaped groove on its surface; each of the two clamping bodies is equipped with a first T-shaped bolt that matches the T-shaped groove, and each first T-shaped bolt has a locking knob; each of the two grinding seats is equipped with a second T-shaped bolt that matches the T-shaped groove, and each second T-shaped bolt has a second locking nut.

[0009] The photoelectric coordinate digital detection system in the above technical solution consists of an array detector, a semi-transparent and semi-reflective mirror, and an objective lens arranged sequentially along the Y direction, and a collimating plate, a collimating lens, and a light source arranged sequentially along the X direction.

[0010] Compared with the prior art, the present invention, by adopting the above-mentioned technical solution, adds a prism system including a right-angle prism and a roof prism to the self-collimation measurement principle, and therefore has the following advantages: 1) It can quickly, intuitively, accurately and quantitatively detect the parallelism of the flat workpieces to be measured, which not only simplifies the measurement operation and greatly improves the measurement accuracy and efficiency, but also corrects and repairs the parallelism of the two flat workpieces to be measured by means of mold repair.

[0011] 2) It can not only detect the parallelism between two planes of a large flat workpiece on the job site, but also quickly detect and repair the anvil of measuring tools such as micrometers.

[0012] 3) There is no physical contact with the workpiece to be measured, so the workpiece is not damaged. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the optical path principle of the method of the present invention; Figure 2 This is a three-dimensional structural schematic diagram of the device of the present invention; Figure 3 yes Figure 2 View A in the middle; Figure 4 yes Figure 3 The left view; Figure 5 yes Figure 2 Top view; Figure 6 This is a three-dimensional structural diagram of the prism system of the device of the present invention; Figure 7 , Figure 8 This is a schematic diagram of the three-dimensional structure of the prism clamp fixed on the universal adjustment device; Figure 9 This is a three-dimensional structural diagram of the universal adjustment device of the present invention; Figure 10 yes Figure 9 View B in the middle; Figure 11 yes Figure 10 C-C section view in the middle; Figure 12 yes Figure 10 Top view; Figure 13 This is a three-dimensional structural diagram of the combination of the workpiece clamp and the grinding device of the present invention; Figure 14 yes Figure 13 The view in direction D; Figure 15 yes Figure 14 The E-E section view in the middle; Figure 16 yes Figure 14 F-F section view in the figure.

[0014] In the diagram: 1. Photoelectric coordinate digital detection system; 1-1. Light source; 1-2. Collimating lens; 1-3. Diverging plate; 1-4. Area array detector; 1-5. Semi-transparent and semi-reflective folding mirror; 1-6. Objective lens; 2. Prism system; 2-1. Right-angle prism; 2-2. Ridge prism; 2-3. Prism clamp; 2-3-1. Top plate; 2-3-2. Support frame; 2-3-3. Clamping screw; 2-4. Universal adjustment device; 2-4-1. Adjustment seat; 2-4-2. Threaded ball head rod; 2-4-3. Fixed seat; 2-4-4. Tension spring; 2-4-5. Clearance hole; 2-4-6. Tension spring rod; 2-4-7. Steel ball; 2-5. Bracket; 2-6. Base; To be measured. 3. Flat workpiece; 4. Slide rail; 5. Grinding device; 5-1. Radial adjusting screw; 5-2. Top grinding sleeve; 5-3. Second locking nut; 5-4. Grinding seat; 5-5. Adjusting handwheel; 5-6. Sliding sleeve; 5-7. Locking nut; 5-8. Ball cup sleeve; 5-9. Adjusting screw sleeve; 5-10. Ball head screw; 5-11. Second T-bolt; 5-12. Workpiece clamp; 6. Clamping screw; 6-2. Clamp body; 6-3. Support block; 6-4. Second locking nut; 6-5. Locking knob; 6-6. First T-bolt; 6-7. Stud; 7. Inspection table; 8. Auxiliary slide rail; 9. Auxiliary clamp; 10. Locking bar; 11. Grinding block. Detailed Implementation

[0015] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0016] like Figure 1 As shown, the detection method provided by this invention is as follows: 1) Place the array detector 1-4, the semi-transparent and semi-reflective mirror 1-5, and the objective lens 1-6 sequentially along the Y direction between the two planes of the workpiece 3 to be measured; 2) Place right-angle prism 2-1 and roof prism 2-2 sequentially along the X direction in the light path of objective lens 1-6; 3) On one side of the semi-transparent and semi-reflective mirror 1-5, along the X direction, place the dispersing plate 1-3, the collimating lens 1-2, and the light source 1-1 in sequence; 4) Adjust the angles of the right-angle prism 2-1 and the ridge prism 2-2 to ensure that the light passing through the crosshair slit on the dividing plate 1-3 is reflected by the semi-transparent and semi-reflective folding mirror 1-5 and then passes through the objective lens 1-6. The light is then divided into a left light path and a right light path by the right-angle prism 2-1 and the ridge prism 2-2. The left light path and the right light path are reflected by the two planes of the workpiece 3 to be measured and then pass through the right-angle prism 2-1 and the ridge prism 2-2 again. They then pass through the objective lens 1-6 and the semi-transparent and semi-reflective folding mirror 1-5 in sequence and illuminate the CCD of the area array detector 1-4. The two light rays passing through the crosshair slit form two light spots on the CCD. 5) Calculate the relative offset ΔX in the X direction and the relative offset ΔY in the Y direction of the two light spots using a computer (not shown in the figure) that is electrically connected to the area array detector 1-4; 6) If △X=0 and △Y=0, the computer automatically determines that the two workpieces to be measured are parallel to each other; otherwise, the computer automatically determines that the two workpieces to be measured are not parallel to each other.

[0017] The detection device provided by the present invention is as follows: Figures 2-16 As shown: It includes a photoelectric coordinate digital detection system 1 and a workpiece fixture 6 fixed on the detection table 7. The photoelectric coordinate digital detection system 1 consists of an area array detector 1-4, a semi-transparent and semi-reflective folding mirror 1-5, and an objective lens 1-6 arranged sequentially along the Y direction, and a collimating plate 1-3, a collimating lens 1-2, and a light source 1-1 arranged sequentially along the X direction.

[0018] In the optical path emission direction of the photoelectric coordinate digital detection system 1, there is a prism system 2 fixed on the detection stage 7. The prism system consists of two supports 2-5 fixed on the base 2-6, universal adjustment devices 2-4 fixed on each support 2-5, prism clamps 2-3 fixed on each universal adjustment device 2-4, and right-angle prisms 2-1 and ridge prisms 2-2 correspondingly fixed on the two prism clamps 2-3.

[0019] The prism clamp 2-3 consists of a support frame 2-3-2 fixed on the universal adjustment device 2-4, a top plate 2-3-1 fixed on the support frame, and multiple clamping screws 2-3-3 located on the top plate.

[0020] On the left and right sides of the prism system 2, there is a set of slide rails 4 arranged along the X direction and fixed on the inspection table 7. Each set of slide rails 4 has a workpiece clamp 6 mounted on it via a first slider (not shown in the figure). Each workpiece clamp 6 consists of a clamp body 6-2 fixed on the first slider, a support block 6-3 fixed on the clamp body, and a clamping screw 6-1 located on the top of the clamp body 6-2.

[0021] To facilitate the adjustment of the height of the support block 6-3, the support block is installed on the clamp body 6-2 by studs 6-7 and locked in place by the second locking nut 6-4.

[0022] To facilitate the adjustment of the angles of the right-angle prism 2-1 and the ridge prism 2-2, the universal adjustment device 2-4 consists of a fixed seat 2-4-3 fixed on the bracket 2-5, an adjustment seat 2-4-1 located above the fixed seat, a steel ball 2-4-7 positioned between the adjustment seat and the fixed seat 2-4-3 through a recess (not shown in the figure), a tension spring 2-4-4 connecting the fixed seat 2-4-3 and the adjustment seat 2-4-1, and two threaded ball-head rods 2-4-2 installed on the fixed seat 2-4-3.

[0023] For ease of processing and installation, both the fixed seat 2-4-3 and the adjusting seat 2-4-1 are provided with clearance holes 2-4-5. A tension spring rod 2-4-6 is installed in each clearance hole 2-4-5. The two ends of the tension spring 2-4-4 are hung on the corresponding tension spring rod 2-4-6, which tightens the fixed seat 2-4-3 and the adjusting seat 2-4-1. Two threaded ball head rods 2-4-2 and steel balls 2-4-7 together form a three-point support for the adjusting seat 2-4-1.

[0024] Rotating the knob on the threaded ball head jack 2-4-2 (not shown in the figure) adjusts the height of the threaded ball head jack 2-4-2, thereby causing the surface of the adjusting seat 2-4-1 to swing around the support point of the steel ball 2-4-7 along the X-axis or Y-axis, which allows for adjustment of the posture of the right-angle prism 2-1 and the roof prism 2-2 respectively.

[0025] In order to correct the parallelism of the workpiece 3 to be tested, a grinding device 5 is installed on the slide rail 4 via a second slider (not shown in the figure) between the prism system 2 and the two workpiece clamps 6. Both grinding devices 5 consist of a grinding seat 5-4 fixed on the second slider, a sliding sleeve 5-6 installed in the grinding seat, a ball cup sleeve 5-8 with an inner spherical surface fixed in the sliding sleeve by threads, a top grinding sleeve 5-2 extending into the sliding sleeve 5-6 and threadedly connected to the ball cup sleeve, a ball head screw 5-11 installed in the ball cup sleeve 5-8 and adapted to the inner spherical surface, an adjusting screw sleeve 5-10 threadedly connected to the ball cup sleeve 5-8 and pressing the ball head screw 5-11, an adjusting handwheel 5-5 extending into the grinding seat 5-4 and threadedly connected to the ball head screw 5-11, four radial adjusting screws 5-1 evenly distributed on the sliding sleeve 5-6 and in contact with the top grinding sleeve 5-2, a clamping rod 5-9 installed in the grinding seat 5-4, and a locking nut 5-7 threadedly engaged with the clamping rod. The middle section of the clamping rod 5-9 has an inner arc surface adapted to the outer cylindrical surface of the sliding sleeve 5-6. The main function of the radial adjusting screw 5-1 is to adjust the cantilever end of the top-grinding sleeve 5-2 (i.e. Figure 12 The left end of the sleeve is supported to prevent it from swaying. The clamping rod 5-9 locks the sliding sleeve 5-6 to prevent it from rotating during grinding. The adjusting handwheel 5-5 is mainly used to control the clamping pressure of the top grinding sleeve 5-2 on the grinding block 11.

[0026] To prevent the workpiece 3 to be tested from moving during the inspection process, there is a locking bar 10 fixed to the inspection table 7 on both sides of the prism system 2. The surface of both locking bars 10 has a T-groove (not shown in the figure). Both clamping bodies 6-2 are equipped with first T-bolts 6-6 that are adapted to the T-grooves, and each first T-bolt 6-6 has a locking knob 6-5. By rotating the locking knob 6-5, the workpiece clamp 6 can be locked onto the slide rail 4 through the first T-bolts 6-6.

[0027] Similarly, to prevent the grinding device 5 from moving during the grinding process, both grinding seats 5-4 are equipped with second T-bolts 5-1 that are compatible with the T-slots, and each second T-bolt 5-12 has a second locking nut 5-3. By rotating the second locking nut 5-3, the grinding device 5 can be locked onto the slide rail 4 through the second T-bolts 5-1.

[0028] To enhance the stability of the large flat workpiece 3 to be tested, an auxiliary support platform (not shown in the figure) is added to one side of the testing table 7, forming a T-shaped structure. An auxiliary slide rail 8 is fixed to the surface of the auxiliary support platform, and an auxiliary clamp 9 is mounted on the auxiliary slide rail via an auxiliary slider (not shown in the figure). The auxiliary clamp 9 can be used to clamp the large flat workpiece 3 to be tested, thereby improving the stability of the large flat workpiece 3 to be tested during the testing or grinding process.

[0029] The detection principle of this invention: The divergent light emitted by light source 1-1 becomes parallel light after passing through collimating lens 1-2 and illuminates the dividing plate 1-3. The parallel light passes through the crosshair slit on the dividing plate 1-3 to form a cross beam. The cross beam is reflected by semi-transparent and semi-reflective mirror 1-5 and passes through objective lens 1-6. It is then divided into left and right light paths by right-angle prism 2-1 and roof prism 2-2.

[0030] The left optical path, reflected by the workpiece 3 to be tested on the left, passes sequentially through the right-angle prism 2-1, objective lens 1-6, and semi-transparent / semi-reflective folding mirror 1-5 to reach the area array detector 1-4, forming a left light spot. The right optical path, reflected by the workpiece 3 to be tested on the right, passes sequentially through the roof prism 2-2, objective lens 1-6, and semi-transparent / semi-reflective folding mirror 1-5 to reach the area array detector 1-4, forming a right light spot. The relative offset ΔX in the X direction and the relative offset ΔY in the Y direction of the two light spots are calculated. If ΔX=0 and ΔY=0, it indicates that the two workpieces to be tested 3 are parallel; otherwise, the two workpieces to be tested 3 are not parallel and need to be ground and corrected.

[0031] Working principle of the device of this invention: 1) Fix the two anvils of the flat workpiece 3 to be measured (such as an outside micrometer) onto the corresponding workpiece fixtures 6, and use the auxiliary fixture 9 to fix the arc-shaped part of the outside micrometer. Adjust the orientation of the right-angle prism 2-1 and the roof prism 2-2 using the universal adjustment device 2-4 to ensure that the left and right optical paths form light spots on the area array detector 1-4. The relative offset ΔX in the X direction and the relative offset ΔY in the Y direction of the two light spots can be used to determine whether the two anvils of the outside micrometer are parallel.

[0032] 2) If the two anvils of the outside micrometer are not parallel, they need to be ground: Place the two grinding devices 5 close to the corresponding anvils, and use the top grinding sleeve 5-2 to press the grinding block 11 between the corresponding anvils of the grinding device 5. Repeatedly rotate the grinding block 11 to grind the anvils. During the grinding process, the gap between the top grinding sleeve 5-2 and the grinding block 11, and the gap between the grinding block 11 and the anvil, will gradually increase. At this time, the gap can be eliminated by rotating the adjusting handwheel 5-5 until the two anvils are parallel to each other.

Claims

1. An online automatic detection device for the parallelism of a planar workpiece, comprising a photoelectric coordinate digital detection system fixed on a detection table and a workpiece fixture; characterized in that: In the optical path of the photoelectric coordinate digital detection system (1), there is a prism system (2) fixed on the detection table (7). The prism system consists of two brackets (2-5) fixed on the base (2-6), prism clamps (2-3) fixed on each bracket (2-5) respectively by a universal adjustment device (2-4), and right-angle prisms (2-1) and ridge prisms (2-2) fixed on the two prism clamps (2-3) respectively. There is a set of slide rails (4) fixed on the detection table (7) on both sides of the prism system (2). Each set of slide rails (4) has a workpiece clamp (6) installed by a first slider. The two workpiece clamps (6) are both composed of a support block (6-3) fixed on the first slider by a clamp body (6-2) and a clamping screw (6-1) installed on the clamp body (6-2). There is a second slider between the prism system (2) and the two workpiece clamps (6). The grinding device (5) on the slide rail (4) consists of a grinding seat (5-4) fixed on the second slider, a sliding sleeve (5-6) installed in the grinding seat, a ball cup sleeve (5-8) fixed in the sliding sleeve by threads, a top grinding sleeve (5-2) extending into the sliding sleeve (5-6) and threadedly connected to the ball cup sleeve, a ball head screw (5-11) installed in the ball cup sleeve (5-8), an adjusting screw sleeve (5-10) threadedly connected to the ball cup sleeve (5-8) and pressing the ball head screw (5-11), an adjusting handwheel (5-5) extending into the grinding seat (5-4) and threadedly connected to the ball head screw (5-11), four radial adjusting screws (5-1) evenly distributed on the sliding sleeve (5-6) and in contact with the top grinding sleeve (5-2), a clamping rod (5-9) installed in the grinding seat (5-4), and a locking nut (5-7) threadedly engaged with the clamping rod.

2. The apparatus according to claim 1, characterized in that: The universal adjustment device (2-4) consists of a fixed seat (2-4-3) fixed on the bracket (2-5), an adjustment seat (2-4-1) located above the fixed seat, a steel ball (2-4-7) positioned between the adjustment seat and the fixed seat (2-4-3), a tension spring (2-4-4) connecting the fixed seat (2-4-3) and the adjustment seat (2-4-1), and two threaded ball head rods (2-4-2) installed on the fixed seat (2-4-3). The two threaded ball head rods (2-4-2) and the steel ball (2-4-7) together form a three-point support for the adjustment seat (2-4-1).

3. The apparatus according to claim 1, characterized in that: On both sides of the prism system (2), there is a locking bar (10) fixed on the detection table (7), and each locking bar (10) has a T-shaped groove on its surface; each of the two clamping bodies (6-2) is equipped with a first T-shaped bolt (6-6) that is compatible with the T-shaped groove, and each first T-shaped bolt (6-6) has a locking knob (6-5); each of the two grinding seats (5-4) is equipped with a second T-shaped bolt (5-12) that is compatible with the T-shaped groove, and each second T-shaped bolt (5-12) has a second locking nut (5-3).

4. A detection method using the online automatic detection device for the parallelism of a planar workpiece as described in claim 1, characterized in that... The method is as follows: 1) Place the array detector (1-4), the semi-transparent and semi-reflective mirror (1-5), and the objective lens (1-6) sequentially along the Y direction between two face-to-face planar workpieces (3). 2) Place a right-angle prism (2-1) and a roof prism (2-2) in sequence along the X direction in the output light path of the objective lens (1-6). 3) Along the X direction on one side of the semi-transparent and semi-reflective folding mirror (1-5), a splitting plate (1-3), a collimating lens (1-2), and a light source (1-1) are arranged in sequence to ensure that the light passing through the splitting plate (1-3) is reflected by the semi-transparent and semi-reflective folding mirror (1-5) and then passes through the objective lens (1-6) and is divided into a left light path and a right light path by the right-angle prism (2-1) and the roof prism (2-2). The left light path and the right light path are reflected by the workpiece (3) to be measured and then pass through the right-angle prism (2-1) and the roof prism (2-2) again and then pass through the objective lens (1-6) and the semi-transparent and semi-reflective folding mirror (1-5) in sequence to illuminate the area array detector (1-4) to form two light spots; 4) Calculate the relative offset ΔX in the X direction and the relative offset ΔY in the Y direction of the two light spots using a computer electrically connected to the area array detector (1-4); 5) If △X=0 and △Y=0, the computer automatically determines that the two plane workpieces (3) to be measured are parallel to each other; otherwise, the computer automatically determines that the two plane workpieces (3) to be measured are not parallel to each other.

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