一种基于微腔和微气室的光学测温装置及其实现方法

By using an optical temperature measurement device based on microcavities and microcells, molecular or atomic absorption spectra are calibrated using the free spectral range of the microcavities, and combined with the linear output of semiconductor lasers, the drift of traditional thermometers and the limitations of large etalons are solved, realizing miniaturized, integrated and rapid temperature measurement.

CN117782349BActive Publication Date: 2026-07-17BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
Filing Date
2023-11-30
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Traditional thermometers are significantly affected by external environmental factors, leading to drift in temperature measurement results. Furthermore, large etalons limit the integration and real-time measurement of Doppler-stretched temperature measurement.

Method used

An optical temperature measurement device based on microcavities and microcells is used to calibrate the absorption lines of molecules or atoms through the free spectral range of the microcavities. Combined with the linear relationship between the output wavelength of the semiconductor laser and the injected current, broadband swept-frequency laser output is achieved, simplifying the optical path structure and performing temperature calculations.

Benefits of technology

It achieves the integration, simplification, and long-term online measurement of temperature measuring devices, avoiding the problems of large size, high cost, and long measurement time, and has the advantages of high precision and fast measurement.

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Abstract

本发明公开的一种基于微腔和微气室的光学测温装置及其实现方法,属于温度计量领域。本发明包括激光输出模块、标定光路、探测光路、数据采集及处理模块。激光输出模块用于产生宽带扫描激光。标定光路内设置一微腔,根据微腔自由光谱范围(FSR)标定激光扫频的间隔和范围。探测光路内设置一微型气室作为温度敏感元件,用于产生携带气室温度信息的分子或原子吸收谱。数据采集及处理模块用于获取标定光路和探测光路在时域上的光谱信号,并通过时域至频域信号映射、光谱拟合处理等过程计算出热力学温度。本发明有效解决了多普勒展宽测温技术领域中标准具体积大、光路复杂、测量时间长等难题,具有结构简单、易于集成、成本低、适应性好的优点。
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