Oht travel prevention blockage control method
Patent Information
- Application Number
- CN202311687472.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-11
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2043-12-11
AI Technical Summary
但现阶段单一OHT控制系统,无法多方面考虑到晶圆搬送过程中的异常状况,因此发生OHT行走阻塞的概率较高
[0019] Real-time monitoring: The system monitors the status of OHTs, WPS, and APs in real time through OHT management, WPS management, and AP management modules. When an anomaly occurs, such as an OHT malfunctioning, power supply failure, or network failure, the system will immediately detect it and take appropriate action. For example, if an OHT on a certain track malfunctions, the system will increase the weight of that track to prevent other OHTs from causing congestion there.
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Figure CN117787519B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of OHT walking technology, specifically to an OHT walking anti-blockage control method. Background Technology
[0002] Currently, the semiconductor industry is developing rapidly, and the localization of chip production has accelerated the development of chip manufacturing-related systems. Automated wafer transport systems are required in semiconductor processes. Currently, domestically produced wafer transport systems are still in their early stages of development. A crucial indicator in these systems is transport efficiency, and excellent anti-blocking control can effectively improve this efficiency. However, current single-stage OHT (Out-of-Temperature Transport) control systems cannot adequately consider abnormal situations during wafer transport, resulting in a relatively high probability of OHT travel blockage. Summary of the Invention
[0003] This invention provides an OHT walking blockage prevention control method, which solves the above-mentioned technical problems.
[0004] The solution of the present invention to the above-mentioned technical problems is as follows:
[0005] An OHT (Out-of-Temperature Throat) walking blockage prevention control method includes the following steps:
[0006] S1. Enable the anti-blocking function. Monitor the component status in real time through OHT management, WPS management, and AP management. If an anomaly occurs, update the dynamic weight. Then, monitor the weight through the grid and trigger path recalculation to avoid congestion.
[0007] In S2 and OHT management, the system monitors the real-time status of the OHT and maintains the weight of the track where the OHT is located through different statuses. When the OHT picks up or puts down goods, a fixed dynamic weight of 30 is added. When the OHT is on a certain track, a fixed dynamic weight of 5 is added. When the OHT malfunctions and cannot move, a fixed dynamic weight of 999 is added.
[0008] In S3 and WPS management, the system monitors the real-time status of WPS. If the WPS status is abnormal, it will obtain the mapping relationship between the WPS and the track configured in the data, update the corresponding track and add a dynamic weight of 999; otherwise, it will not do anything or will subtract the added dynamic weight.
[0009] In S4 AP management, the system monitors the AP status in real time. If an AP is detected as abnormal, the system will obtain the mapping relationship between the AP and the track configured in the database and update the corresponding track by adding a dynamic weight of 999. Otherwise, no action will be taken or the added dynamic weight will be subtracted.
[0010] S5, S2, S3, and S4 above have monitored and updated the dynamic weights corresponding to the tracks. At this time, the grid lock module will use the real-time dynamic weights to calculate the congestion status of the OHT route. If congestion is detected, the route will be replanned in real time to bypass the congested section.
[0011] S6. The path distribution process is as follows: The system receives a micro-command from the MCS. The micro-command mainly includes the starting point of the pickup location and the ending point of the delivery location. The system starts selecting OHTs, obtains all idle OHTs without tasks, calculates the path for all idle OHTs, and selects the OHT closest to the task starting point using the Dijkstra algorithm. The dynamic weight information maintained in S2, S3, and S4 is used during the path calculation. After the optimal OHT is selected, the system controls the OHT to travel to the starting point, start picking up the goods, and complete the picking up. After the picking up is completed, the optimal path to the destination is calculated again using the Dijkstra algorithm, and finally the goods are delivered to the destination.
[0012] S7. Even if the path has been optimized at the start of the transport task, anomalies during the journey cannot be avoided. In this case, grid lock plays a role in path optimization and avoiding congestion. During the journey, the OHT scans the barcodes on the track in real time using a barcode scanner, so the system can know which track the OHT is on. In the OHT's barcode change event, the system will judge the dynamic weight of the track in the planned path in real time. If the dynamic weight of the next track is greater than 999, it proves that an OHT anomaly, WPS anomaly, AP anomaly, etc. have occurred. At this time, the current OHT needs to change the path to avoid congestion. The system will wait for 10 seconds and then start planning a new path. If there is a shorter path than the current path, the system will modify the OHT path to bypass the abnormal path and avoid OHT transmission congestion.
[0013] Based on the above technical solution, the present invention can be further improved as follows.
[0014] Furthermore, the OHT management module is used to record the status of the OHT, whether it is abnormal, and the number of vehicles on a certain track during the real-time operation of the OHT. This is used to determine whether there is OHT downtime causing track congestion or whether a certain track is congested due to an excessive number of OHTs.
[0015] Furthermore, the WPS management module is used for Wireless Power System management. Wireless Power System, abbreviated as WPS, is used to monitor the power supply module of OHT. Each track has a corresponding electrical cabinet for power supply. This invention will monitor the status of the electrical cabinet. If an abnormal power supply voltage or electrical cabinet failure occurs, the corresponding track will be marked, its weight will be increased, OHT passage will be prohibited, and the path will be recalculated.
[0016] Furthermore, the AP management module monitors the AP wireless network module. In the OHT transport area, OHT communication is managed by multiple AP wireless network modules. Each AP manages a corresponding area. If an AP malfunctions, all OHTs in the area it is responsible for will be unable to communicate. This module will monitor the AP status in real time and report the abnormal area when an abnormality occurs. The OHT will calculate the transport path in real time to avoid abnormal sections.
[0017] Furthermore, the Grid lock module is used to handle congestion situations that occur during the real-time operation of the OHT. If there are abnormally stopped OHTs, abnormal power supply conditions, or abnormal network conditions on a certain path, this module will replan the optimal path through dynamic weights.
[0018] The beneficial effects of this invention are:
[0019] Real-time monitoring: The system monitors the status of OHTs, WPS, and APs in real time through OHT management, WPS management, and AP management modules. When an anomaly occurs, such as an OHT malfunctioning, power supply failure, or network failure, the system will immediately detect it and take appropriate action. For example, if an OHT on a certain track malfunctions, the system will increase the weight of that track to prevent other OHTs from causing congestion there.
[0020] Dynamic weight control: The system dynamically adjusts the weights of tracks based on different situations. For example, in the OHT management module, the system increases fixed dynamic weights based on the OHT's status (such as whether it is picking up or dropping off goods, or whether it is on a certain track), thereby affecting the OHT's route selection. In the WPS and AP management modules, the system updates the dynamic weights of tracks based on the status of WPS and AP. By increasing weights, congested sections are avoided, OHT traffic volume is reduced, and the overall system efficiency is improved.
[0021] Path recalculation: When anomalies or congestion occur, the system triggers path recalculation, replanning the optimal path to avoid abnormal road segments. For example, in the Grid lock module, the system handles congestion conditions caused by OHTs in real time. If there are abnormally stopped OHTs, abnormal power supply conditions, or abnormal network conditions on a certain path, the module will replan the optimal path using dynamic weights to bypass the abnormal road segments.
[0022] MCS Micro-Command Selection: Before a task begins, the system selects the nearest idle, task-free OHT (Outgoing Task Leader) to the task's starting point and performs path calculation. Taking into account dynamic weight information, the optimal OHT is selected for task execution. For example, in the path distribution process, the system receives micro-commands from the MCS, obtains all idle, task-free OHTs, and selects the OHT closest to the task's starting point using Dijkstra's algorithm.
[0023] To avoid congestion, the system scans barcodes on the tracks and determines the dynamic weights of the tracks in real time to decide whether a route change is necessary. When an abnormal path is detected, the system waits for a period and plans a new path to ensure smooth OHT operation. For example, during OHT operation, the system scans barcodes on the tracks in real time and determines the dynamic weights of the planned track segments in real time during the OHT's barcode change event. If the dynamic weight of the next track segment exceeds 999, it indicates an OHT anomaly, WPS anomaly, or AP anomaly. In this case, the current OHT needs to change its route to avoid congestion.
[0024] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it according to the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Specific embodiments of the present invention are given in detail in the following embodiments and their accompanying drawings. Attached Figure Description
[0025] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention.
[0026] In the attached diagram:
[0027] Figure 1 This is a schematic diagram of the overall anti-blocking process of the present invention;
[0028] Figure 2 This is a schematic diagram of OHT management according to the present invention;
[0029] Figure 3 This is a schematic diagram of WPS management according to the present invention;
[0030] Figure 4 This is a schematic diagram of AP management according to the present invention;
[0031] Figure 5 This is a schematic diagram illustrating the path distribution of the present invention;
[0032] Figure 6 This is a schematic diagram of the grid lock of the present invention. Detailed Implementation
[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0034] Please see Figures 1 to 6 As shown, the embodiments provided by the present invention are as follows:
[0035] Example 1
[0036] An OHT (Out-of-Temperature Throat) walking blockage prevention control method includes the following steps:
[0037] S1. Enable the anti-blocking function. Monitor the component status in real time through OHT management, WPS management, and AP management. If an anomaly occurs, update the dynamic weight. Then, monitor the weight through the grid and trigger path recalculation to avoid congestion.
[0038] In S2 and OHT management, the system monitors the real-time status of OHTs and maintains the weight of the track where the OHT is located through different statuses. When an OHT picks up or puts down goods, a fixed dynamic weight of 30 is added. When an OHT is on a certain track, a fixed dynamic weight of 5 is added. When an OHT malfunctions and cannot move, a fixed dynamic weight of 999 is added. The OHT management module is used to record the status of OHTs, whether they are malfunctioning, and the number of vehicles on a certain track during the real-time movement of OHTs. This is used to determine whether there is OHT downtime causing track congestion or whether a certain track is congested due to an excessive number of OHTs.
[0039] In S3 and WPS management, the system monitors the real-time status of WPS. If the WPS status is abnormal, it will obtain the mapping relationship between the WPS and the track configured in the data, update the corresponding track and increase the dynamic weight by 999. Otherwise, no processing is done or the increased dynamic weight is reduced. The WPS management module is used for Wireless Power System management. Wireless Power System is abbreviated as WPS and is used to monitor the power supply module of OHT. Each track has a corresponding power cabinet. This invention will monitor the status of the power cabinet. If the power supply voltage is abnormal or the power cabinet is down, the corresponding track is marked, the weight is increased, OHT passage is prohibited, and the path is recalculated.
[0040] In S4, AP management, the system monitors the AP status in real time. If an AP is detected as abnormal, it retrieves the mapping relationship between the AP and the track configured in the database and updates the corresponding track by adding a dynamic weight of 999. Otherwise, no action is taken or the added dynamic weight is subtracted. The AP management module monitors the AP wireless network module. In the OHT transport area, OHT communication is managed by multiple AP wireless network modules. Each AP manages a corresponding area. If an AP is abnormal, all OHTs in the area it is responsible for will be unable to communicate. This module monitors the AP status in real time and reports the abnormal area when an abnormality occurs. The OHT will calculate the transport path in real time to avoid abnormal sections.
[0041] S5. S2, S3, and S4 above have monitored and updated the dynamic weights corresponding to the tracks. At this time, the grid lock module will use the real-time dynamic weights to calculate the congestion status of the OHT route. If congestion is detected, the route will be replanned in real time to bypass the congested section. The grid lock module is used to process the congestion status of the OHT in real time during the real-time operation of the OHT. If there is an abnormally stopped OHT, abnormal power supply, or abnormal network condition on a certain route, the module will replan the optimal route through dynamic weights.
[0042] S6. The path distribution process is as follows: The system receives a micro-command from the MCS. The micro-command mainly includes the starting point of the pickup location and the ending point of the delivery location. The system starts selecting OHTs, obtains all idle OHTs without tasks, calculates the path for all idle OHTs, and selects the OHT closest to the task starting point using the Dijkstra algorithm. The dynamic weight information maintained in S2, S3, and S4 is used during the path calculation. After the optimal OHT is selected, the system controls the OHT to travel to the starting point, start picking up the goods, and complete the picking up. After the picking up is completed, the optimal path to the destination is calculated again using the Dijkstra algorithm, and finally the goods are delivered to the destination.
[0043] S7. Even if the path has been optimized at the start of the transport task, anomalies during the journey cannot be avoided. In this case, grid lock plays a role in path optimization and avoiding congestion. During the journey, the OHT scans the barcodes on the track in real time using a barcode scanner, so the system can know which track the OHT is on. In the OHT's barcode change event, the system will judge the dynamic weight of the track in the planned path in real time. If the dynamic weight of the next track is greater than 999, it proves that an OHT anomaly, WPS anomaly, AP anomaly, etc. have occurred. At this time, the current OHT needs to change the path to avoid congestion. The system will wait for 10 seconds and then start planning a new path. If there is a shorter path than the current path, the system will modify the OHT path to bypass the abnormal path and avoid OHT transmission congestion.
[0044] When using the OHT walking anti-blockage control method based on Example 1:
[0045] Real-time monitoring: The system monitors the status of OHTs, WPS, and APs in real time through OHT management, WPS management, and AP management modules. When an anomaly occurs, such as an OHT malfunctioning, power supply failure, or network failure, the system will immediately detect it and take appropriate action. For example, if an OHT on a certain track malfunctions, the system will increase the weight of that track to prevent other OHTs from causing congestion there.
[0046] Dynamic weight control: The system dynamically adjusts the weights of tracks based on different situations. For example, in the OHT management module, the system increases fixed dynamic weights based on the OHT's status (such as whether it is picking up or dropping off goods, or whether it is on a certain track), thereby affecting the OHT's route selection. In the WPS and AP management modules, the system updates the dynamic weights of tracks based on the status of WPS and AP. By increasing weights, congested sections are avoided, OHT traffic volume is reduced, and the overall system efficiency is improved.
[0047] Path recalculation: When anomalies or congestion occur, the system triggers path recalculation, replanning the optimal path to avoid abnormal road segments. For example, in the Grid lock module, the system handles congestion conditions caused by OHTs in real time. If there are abnormally stopped OHTs, abnormal power supply conditions, or abnormal network conditions on a certain path, the module will replan the optimal path using dynamic weights to bypass the abnormal road segments.
[0048] MCS Micro-Command Selection: Before a task begins, the system selects the nearest idle, task-free OHT (Outgoing Task Leader) to the task's starting point and performs path calculation. Taking into account dynamic weight information, the optimal OHT is selected for task execution. For example, in the path distribution process, the system receives micro-commands from the MCS, obtains all idle, task-free OHTs, and selects the OHT closest to the task's starting point using Dijkstra's algorithm.
[0049] To avoid congestion, the system scans barcodes on the tracks and determines the dynamic weights of the tracks in real time to decide whether a route change is necessary. When an abnormal path is detected, the system waits for a period and plans a new path to ensure smooth OHT operation. For example, during OHT operation, the system scans barcodes on the tracks in real time and determines the dynamic weights of the planned track segments in real time during the OHT's barcode change event. If the dynamic weight of the next track segment exceeds 999, it indicates an OHT anomaly, WPS anomaly, or AP anomaly. In this case, the current OHT needs to change its route to avoid congestion.
[0050] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Those skilled in the art can readily implement the present invention based on the accompanying drawings and the above description. However, any modifications, alterations, or variations made by those skilled in the art without departing from the scope of the present invention, utilizing the disclosed technical content, are equivalent embodiments of the present invention. Furthermore, any modifications, alterations, or variations made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the present invention.
Claims
1. A method for preventing congestion during OHT movement, characterized in that, Includes the following steps: S1. Enable the anti-blocking function. Monitor the component status in real time through OHT management, WPS management, and AP management. If an anomaly occurs, update the dynamic weight. Then, monitor the weight through the grid and trigger path recalculation to avoid congestion. In S2 and OHT management, the system monitors the real-time status of the OHT and maintains the weight of the track where the OHT is located through different statuses. When the OHT picks up or puts down goods, a fixed dynamic weight of 30 is added. When the OHT is on a certain track, a fixed dynamic weight of 5 is added. When the OHT malfunctions and cannot move, a fixed dynamic weight of 999 is added. In S3 and WPS management, the system monitors the real-time status of WPS. If the WPS status is abnormal, it will obtain the mapping relationship between the WPS and the track configured in the data, update the corresponding track and add a dynamic weight of 999; otherwise, it will not do anything or will subtract the added dynamic weight. In S4 AP management, the system monitors the AP status in real time. If an AP is detected as abnormal, the system will obtain the mapping relationship between the AP and the track configured in the database and update the corresponding track by adding a dynamic weight of 999. Otherwise, no action will be taken or the added dynamic weight will be subtracted. S5, S2, S3, and S4 above have monitored and updated the dynamic weights corresponding to the tracks. At this time, the grid lock module will use the real-time dynamic weights to calculate the congestion status of the OHT route. If congestion is detected, the route will be replanned in real time to bypass the congested section. S6. The path distribution process is as follows: The system receives a micro-command from the MCS. The micro-command mainly includes the starting point of the pickup location and the ending point of the delivery location. The system starts selecting OHTs, obtains all idle OHTs without tasks, calculates the path for all idle OHTs, and selects the OHT closest to the task starting point using the Dijkstra algorithm. The dynamic weight information maintained in S2, S3, and S4 is used during the path calculation. After the optimal OHT is selected, the system controls the OHT to travel to the starting point, start picking up the goods, and complete the picking up. After the picking up is completed, the optimal path to the destination is calculated again using the Dijkstra algorithm, and finally the goods are delivered to the destination. S7. Even if the path has been optimized at the start of the transport task, anomalies during the journey cannot be avoided. This is where Gridlock comes in to optimize the path and avoid congestion. During the journey, the OHT scans the barcodes on the track in real time using a barcode scanner, so the system can know which track the OHT is on. In the OHT's barcode change event, the system will judge the dynamic weight of the track in the planned path in real time. If the dynamic weight of the next track is greater than 999, it means that an OHT, WPS, or AP anomaly has occurred. At this time, the current OHT needs to change its path to avoid congestion. The system will wait for 10 seconds and then start planning a new path. If there is a shorter path than the current path, the system will modify the OHT path to bypass the abnormal path and avoid OHT transmission congestion.
2. The OHT walking blockage prevention control method according to claim 1, characterized in that: The OHT management module is used to record the status of OHTs, whether they are abnormal, and the number of vehicles on a certain track during real-time operation of OHTs. This is used to determine whether OHT downtime is causing track congestion or whether a certain track is congested due to an excessive number of OHTs.
3. The OHT walking blockage prevention control method according to claim 1, characterized in that: The WPS management module is used for Wireless Power System management. Wireless Power System, abbreviated as WPS, is used to monitor the power supply module of OHT. Each track has a corresponding power supply cabinet. It monitors the status of the power cabinet. If there is an abnormal power supply voltage or the power cabinet fails, the corresponding track is marked, the weight is increased, OHT passage is prohibited, and the path is recalculated.
4. The OHT walking blockage prevention control method according to claim 1, characterized in that: The AP management module monitors the AP wireless network modules. In the OHT transport area, OHT communication is managed by multiple AP wireless network modules. Each AP manages a corresponding area. If an AP malfunctions, all OHTs in the area it is responsible for will be unable to communicate. This module will monitor the AP status in real time and report the abnormal area when an abnormality occurs. The OHT will calculate the transport path in real time to avoid abnormal sections.
5. The OHT walking blockage prevention control method according to claim 1, characterized in that: The Grid Lock module is used to handle congestion in real time during the real-time operation of the OHT. If there is an abnormally stopped OHT, abnormal power supply, or abnormal network condition on a certain path, this module will replan the optimal path through dynamic weights.
Citation Information
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