conveying device

Abstract

A conveyance device does not cause an adsorption pad outside a medium to contact a placement surface even when conveying a medium of different size from an adsorption surface. The adsorption mechanism of the conveyance device includes four first adsorption pads arranged at positions overlapping four inner corners of a first adsorption region (11) and four second adsorption pads arranged at positions overlapping four inner corners of a second adsorption region (13) containing the first adsorption region inside. The adsorption mechanism includes a suction mechanism (60), a first suction passage (61) connecting the suction mechanism and the first adsorption pads, a second suction passage (62) connecting the suction mechanism and the second adsorption pads, a connection disconnection mechanism (63) disconnecting the second suction passage, and a movable frame lifting mechanism (23) moving the second adsorption pads between the same adsorption position as the first adsorption pads in the Z-axis direction and a retreat position away from the first adsorption pads in the Z2 direction.

Description

Technical Field

[0001] This invention relates to a transport device that uses an adsorption pad to adsorb and transport a medium disposed on a mounting surface. Background Technology

[0002] Patent Document 1 describes a transport device for transporting flexible media such as printed circuit boards using a transport arm equipped with multiple adsorption pads. In this document, vacuum piping is connected to each adsorption pad of the transport arm. When adsorbing and holding the media disposed on a mounting surface, a vacuum is provided to the adsorption pads, and the transport arm is lowered toward the mounting surface, so that the pad portions of all the adsorption pads come into contact with the media. Thus, when the media is adsorbed by each adsorption pad, the transport device raises the transport arm, moves the media to a designated location, and stops providing vacuum to each adsorption pad. Existing technical documents Patent documents

[0003] Patent Document 1: Japanese Patent Application Publication No. 2013-180891

[0004] Here, we consider using a transport device with multiple adsorption pads to transport various media of different sizes. However, if we want to use a transport device capable of handling large media to transport media smaller than themselves, when adsorbing the media placed on the mounting surface, several of the adsorption pads will be located on the outer periphery of the media. Therefore, when the transport arm is lowered toward the mounting surface, the adsorption pads located on the outer periphery of the media do not contact the media but contact the mounting surface. Here, if the adsorption pads, intended to contact the media, do not contact the media but contact the mounting surface, there is a possibility that the adsorption pads will wear or be damaged. Summary of the Invention

[0005] In view of the above problems, the objective of the present invention is to provide a transport device that prevents the adsorption pad located on the outside of the medium from contacting the mounting surface, even when transporting media of different sizes adsorbed from the transport surface.

[0006] To address the aforementioned issues, the present invention provides a transport device that adsorbs and transports a flexible medium placed on a mounting surface. The device comprises: an adsorption mechanism for adsorbing the medium; and a lifting mechanism for raising and lowering the adsorption mechanism. When three mutually orthogonal axial directions are defined as the X-axis, Y-axis, and Z-axis, the vertical direction is defined as the Z-axis, Z1 direction is defined as downward, and Z2 direction is defined as upward, the adsorption mechanism has: four first adsorption pads arranged to overlap with the four interior corners of a pre-defined rectangular first adsorption area on the mounting surface when viewed from the Z-axis direction; four second adsorption pads arranged to overlap with the four interior corners of a second adsorption area on the mounting surface that includes the first adsorption area when viewed from the Z-axis direction; a suction mechanism; a first suction path connecting the suction mechanism to the first adsorption pads; and a second suction path connecting the suction mechanism to the second... An adsorption pad connection; a connection disconnection mechanism that connects or disconnects the second suction path; and a second adsorption pad moving mechanism that moves the second adsorption pad between an adsorption position and a retraction position, wherein the adsorption position is the same as the first adsorption pad in the Z-axis direction, and the retraction position is a position that moves upward away from the first adsorption pad. When the first adsorption pad is used to adsorb the medium for transport, the suction mechanism is driven to descend while the second adsorption pad is positioned in the retraction position and the second suction path is disconnected, thereby bringing the first adsorption pad into contact with the medium on the mounting surface. When the first and second adsorption pads are used to adsorb the medium for transport, the suction mechanism is driven to descend while the second adsorption pad is positioned in the adsorption position and the second suction path is connected, thereby bringing the first and second adsorption pads into contact with the medium on the mounting surface.

[0007] According to the present invention, the adsorption mechanism comprises: four first adsorption pads disposed at positions overlapping the four interior corners of a first adsorption region; and four second adsorption pads disposed at positions overlapping the four interior corners of a second adsorption region including the first adsorption region. Furthermore, the four second adsorption pads are movable to an adsorption position and a retracted position above the adsorption position. Therefore, when handling large media, by lowering the adsorption mechanism with the second adsorption pads positioned at the same height as the first position, the first and second adsorption pads come into contact with the media, and the media is adsorbed by the first and second adsorption pads. That is, large media are adsorbed by the four first adsorption pads and the four adsorption pads located outside the four first adsorption pads. Therefore, even if the media is flexible, media deflection during handling can be prevented or suppressed. Here, if the media deflects during handling, a load is applied to a particular adsorption pad, sometimes causing the media to fall; however, according to the present invention, such a situation can be prevented or suppressed. On the other hand, when handling small media, the adsorption mechanism is lowered with the second adsorption pads positioned in the retracted position. Therefore, while avoiding contact between the second adsorption pad and the substrate surface, only the first adsorption pad comes into contact with the medium, utilizing the first adsorption pad to adsorb the medium. Thus, wear or damage caused by contact between the second adsorption pad and the substrate surface can be prevented or suppressed.

[0008] In this invention, the adsorption mechanism may have: a reference frame; a fixed frame supporting four first adsorption pads; and a movable frame supporting four second adsorption pads. The fixed frame is connected to the reference frame, and the second adsorption pad moving mechanism includes a cylinder connected to the movable frame. The cylinder is mounted on the reference frame to raise and lower the movable frame. This facilitates the raising and lowering of the four second adsorption pads.

[0009] In this invention, the cylinder may be a double-acting cylinder. The second adsorption pad moving mechanism includes a solenoid valve for driving the cylinder. The solenoid valve switches between a first air supply path and a second air supply path. The first air supply path is connected to a first port of the cylinder that applies pressure when the movable frame is lowered, and the second air supply path is connected to a second port of the cylinder that applies pressure when the movable frame is raised. The connection disconnection mechanism includes a normally closed air gate valve for opening and closing the second intake path; and a valve-operated air supply path for supplying actuating air to the air gate valve, the valve-operated air supply path being connected to the first air supply path. Thus, when compressed air is supplied to the first air supply path connected to the first port of the cylinder to lower the movable frame on which the second adsorption pad is mounted, this compressed air is also supplied from the first air supply path to the air gate valve via the valve-operated air supply path. Consequently, the air gate valve opens the second intake path, and the second adsorption pad becomes capable of adsorbing the medium. That is, when the second adsorption pad moves from the retracted position to the suction position, the second adsorption pad automatically becomes capable of adsorbing the medium.

[0010] In this invention, when two directions perpendicular to and orthogonal to the vertical direction are designated as the X-axis and Y-axis, the first adsorption region, when viewed from the vertical direction, has a first adsorption region first side and a second adsorption region side that are opposite each other in the X-axis direction and extend in the Y-axis direction. Similarly, when viewed from the vertical direction, the second adsorption region has a second adsorption region first side and a second adsorption region second side that are opposite each other in the X-axis direction and extend in the Y-axis direction. The first adsorption region is located at the center of the second adsorption region. In this way, when the first and second adsorption pads attract the medium, the first adsorption pad attracts the central portion of the medium, and the second adsorption pad attracts the outer peripheral portion of the medium. Therefore, it is easier to prevent or suppress medium deflection during transport.

[0011] In this invention, four first adsorption pads may be respectively mounted on the fixed frame via a first position adjustment mechanism. The first position adjustment mechanism includes: a first movement-allowing portion that allows each first adsorption pad to move radially a first distance from the center of the first adsorption area on the fixed frame when viewed from the vertical direction; and a first fixing mechanism that fixes the first adsorption pads to the fixed frame in a state that prevents radial movement. In this way, the position of each of the four first adsorption pads can be adjusted radially when viewed from the center of the first adsorption area. Therefore, it is easy to handle media of different sizes.

[0012] In this invention, four second adsorption pads may be respectively mounted on the movable frame via a second position adjustment mechanism. The second position adjustment mechanism includes: a second movement allowing portion that allows each second adsorption pad to move radially a second distance on the movable frame when viewed from the vertical direction; and a second fixing mechanism that fixes the second adsorption pads to the movable frame in a state preventing radial movement, wherein the second distance is longer than the first distance. This allows adjustment of the position of each of the four second adsorption pads radially when viewed from the center of the first adsorption region. Furthermore, the radial position of the second adsorption pads can be adjusted with a relatively long second distance. Therefore, it is easy to handle media of different sizes.

[0013] In this invention, the movable frame may include: a base frame; four extended frames having a second movement allowance and extending radially outward from the outer periphery of the base frame; and an extension frame fixing mechanism for fixing each extended frame to the base frame. The extension frame fixing mechanism is capable of changing the fixed position of each extended frame in the base frame between a first position and a second position, wherein the second position is offset circumferentially from the first position, and the second movement allowance allows the second adsorption pad to move radially when the extended frame is fixed in the first position, and allows the second adsorption pad to move in a direction offset from the radial direction when the extended frame is fixed in the second position. In this way, each second adsorption pad can be adjusted radially as viewed from the center of the first adsorption region and in directions intersecting the radial direction.

[0014] In this invention, when viewed from the vertical direction, four third adsorption pads are provided at positions overlapping the second adsorption area, each disposed between two adjacent second adsorption pads in the circumferential direction. These third adsorption pads are mounted on the movable frame and connected to the second suction path. This allows for the adsorption of large media using the first, second, and third adsorption pads. Therefore, it is possible to suppress the deflection of the adsorbed media.

[0015] Next, in this invention, if the two directions perpendicular to and orthogonal to the vertical direction are defined as the X-axis and Y-axis directions, when viewed from the vertical direction, the first adsorption region has a first adsorption region first side and a second adsorption region side that are opposite each other in the X-axis direction and extend in the Y-axis direction. When viewed from the vertical direction, the second adsorption region has a second adsorption region first side and a second adsorption region second side that are opposite each other in the X-axis direction and extend in the Y-axis direction. When viewed from the vertical direction, the first adsorption region first side overlaps with the second adsorption region first side at the center of the second adsorption region first side in the Y-axis direction. In this way, when the first and second adsorption pads attract the medium, the first adsorption pad adsorbs a region of the medium biased towards the X-axis direction, and the second adsorption pad adsorbs both sides of the region of the first adsorption pad attracting the medium in the Y-axis direction and the region of the first adsorption pad attracting the medium in the X2 direction.

[0016] In this invention, four first adsorption pads may be respectively mounted on the fixed frame via a first position adjustment mechanism. The first position adjustment mechanism includes: a first movement allowing portion, which allows each first adsorption pad to move a first distance along the Y-axis direction on the fixed frame when viewed from the vertical direction; and a first fixing mechanism, which fixes the first adsorption pads to the fixed frame in a state that prevents movement in the Y-axis direction. In this way, the position of each of the four first adsorption pads can be adjusted in the Y-axis direction.

[0017] In this invention, four second adsorption pads may be respectively mounted on the movable frame via a second position adjustment mechanism. The second position adjustment mechanism includes: a second movement allowing portion that allows each second adsorption pad to move a second distance along the Y-axis direction on the movable frame when viewed from the vertical direction; and a second fixing mechanism that fixes the second adsorption pads to the movable frame in a state preventing movement in the Y-axis direction, wherein the second distance is longer than the first distance. In this way, the position of each of the four second adsorption pads can be adjusted in the Y-axis direction. Furthermore, the Y-axis position of the second adsorption pads can be adjusted with a relatively long second distance.

[0018] In this invention, the movable frame may include: a pair of track frames opposite each other in the Y-axis direction and extending along the X-axis direction; two extending frames extending from each track frame toward their inner periphery in a direction approaching each other along the Y-axis direction; a mounting frame mounted on the pair of track frames in a movable state along the X-axis direction and extending along the Y-axis direction; and a mounting frame fixing mechanism that fixes the mounting frame to the track frames in a state that prevents movement in the X-axis direction. Viewed from the vertical direction, the mounting frame is located on the side opposite to the first side of the first adsorption region on the second side of the first adsorption region. Two of the four second adsorption pads are respectively fixed to each extending frame via the second position adjustment mechanism, and the other two of the four second adsorption pads are respectively mounted to the mounting frame via the second position adjustment mechanism. In this way, the position of the two second adsorption pads can be adjusted in the X-axis direction.

[0019] In this invention, two third adsorption pads may be provided, which overlap with the second adsorption region when viewed from the vertical direction, and are separately arranged between the second sides of the first and second adsorption regions in the Y-axis direction. The third adsorption pads are mounted on the movable frame and connected to the second suction path. In this way, when handling large-sized media, the first, second, and third adsorption pads can be used to adsorb the media. Therefore, the deflection of the adsorbed media can be suppressed.

[0020] According to the present invention, when handling large-sized media, the adsorption mechanism is lowered with the second adsorption pad positioned at the same height as the first position, bringing both the first and second adsorption pads into contact with the media, thereby adsorbing the media using the first and second adsorption pads. Conversely, when handling small-sized media, the adsorption mechanism is lowered with the second adsorption pad positioned in a retracted position. This avoids contact between the second adsorption pad and the mounting surface, ensuring that only the first adsorption pad contacts the media, thus adsorbing the media using the first adsorption pad. Therefore, wear or damage caused by contact between the second adsorption pad and the mounting surface can be prevented or suppressed. Attached Figure Description

[0021] Figure 1 This is a perspective view of the conveying device of Embodiment 1. Figure 2 Viewed from below Figure 1 A top view of the transport device. Figure 3 It is a three-dimensional view of the fixed frame and the first adsorption pad. Figure 4 It is a 3D view of the base frame, an extended frame, and the second adsorption pad. Figure 5 This is a circuit diagram of the cylinder drive system and the suction system of the suction cushion. Figure 6 This is a side view of the adsorption mechanism that adsorbs the medium corresponding to the first adsorption region. Figure 7 This is a side view of the adsorption mechanism that adsorbs the medium corresponding to the second adsorption region. Figure 8 This is a perspective view of the conveying device of Embodiment 2. Figure 9 Viewed from below Figure 8 A top view of the transport device. Figure 10 It is a three-dimensional view of the fixed frame and the first adsorption pad. Figure 11 It is a 3D view of the movable frame, the second adsorption pad, and the third adsorption pad. Figure 12 This is a side view of the adsorption mechanism that adsorbs the medium corresponding to the first adsorption region. Figure 13 This is a side view of the adsorption mechanism that adsorbs the medium corresponding to the second adsorption region. Detailed Implementation

[0022] Hereinafter, embodiments of the conveying device to which the present invention is applied will be described with reference to the accompanying drawings.

[0023] (Example 1) Figure 1 This is a perspective view of the conveying device that utilizes the present invention. Figure 2 This is a top view of the transport device from below. Figure 3 It is a three-dimensional view of the fixed frame and the first adsorption pad. Figure 4 It is a three-dimensional view of the base frame, an extended frame, and the second adsorption pad.

[0024] like Figure 1 As shown, in this example, the conveying device 1 conveys a flexible medium 3 disposed on the mounting surface 2. The medium 3 is sheet-shaped and rectangular. In this example, the medium 3 is an OLED substrate. The OLED substrate is a substrate with thin-film transistors, an OLED having organic EL elements, and a thin-film sealing layer stacked on it. The planar shape of the OLED substrate is rectangular.

[0025] The conveying device 1 includes: an adsorption mechanism 5 for adsorbing the medium 3 on the mounting surface 2; a lifting mechanism 6 for raising and lowering the adsorption mechanism 5; and a moving mechanism 7 for moving the lifting mechanism 6 in a direction parallel to the mounting surface 2. The lifting mechanism 6 is supported by the moving mechanism 7. The lifting mechanism 6 includes an actuator (not shown) for moving the adsorption mechanism 5 in the vertical direction. In the following description, the three mutually orthogonal axes are designated as the X-axis, Y-axis, and Z-axis. The direction along the X-axis is designated as the X-axis direction, the direction along the Y-axis as the Y-axis direction, and the direction along the Z-axis as the Z-axis direction. Furthermore, one of the X-axis directions is designated as the X1 direction, and the other as the X2 direction; one of the Y-axis directions is designated as the Y1 direction, and the other as the Y2 direction; one of the Z-axis directions is designated as the Z1 direction, and the other as the Z2 direction. The mounting surface 2 is a plane extending in the X-axis and Y-axis directions. The Z-axis direction is the vertical direction. The Z1 direction is downward, and the Z2 direction is upward.

[0026] (Adsorption mechanism) like Figure 2 As shown, the adsorption mechanism 5 includes: four first adsorption pads 12, which are disposed at positions overlapping the four interior corners of a rectangular first adsorption region 11 pre-defined on the mounting surface 2; and four second adsorption pads 14, which, when viewed from the Z-axis direction, are disposed at positions overlapping the four interior corners of a second adsorption region 13 on the mounting surface 2 that includes the first adsorption region 11 inside. Furthermore, at positions overlapping the second adsorption region 13 when viewed from the Z-axis direction, the adsorption mechanism 5 includes four third adsorption pads 15, each disposed between two adjacent second adsorption pads 14 in the circumferential direction.

[0027] like Figure 1 , Figure 2 As shown, when viewed from the Z-axis direction, the first adsorption region 11 includes: a first side 11a and a second side 11b of the first adsorption region that are opposite each other in the X-axis direction and extend in the Y-axis direction; and a third side 11c and a fourth side 11d of the first adsorption region that are opposite each other in the Y-axis direction and extend in the X-axis direction. The first adsorption region 11 is a rectangle that is longer in the Y-axis direction than in the X-axis direction. Furthermore, when viewed from the Z-axis direction, the second adsorption region 13 includes: a first side 13a and a second side 13b of the second adsorption region that are opposite each other in the X-axis direction and extend in the Y-axis direction; and a third side 13c and a fourth side 13d of the second adsorption region that are opposite each other in the Y-axis direction and extend in the X-axis direction. The second adsorption region 13 is a rectangle that is longer in the Y-axis direction than in the X-axis direction. The first adsorption region 11 is located at the center of the second adsorption region 13.

[0028] The first adsorption pad 12, the second adsorption pad 14, and the third adsorption pad 15 are identical components. For example... Figure 1 , Figure 3 As shown, the first adsorption pad 12, the second adsorption pad 14, and the third adsorption pad 15 each have a pad portion 16 and a shaft portion 17. The pad portion 16 is made of resin and is deformable. The shaft portion 17 has an airflow path communicating with the pad portion 16 internally. The shaft portion 17 has a flange portion 18 protruding radially outward at the midpoint of its vertical direction. In addition, the shaft portion 17 has external threads at its upper end.

[0029] In addition, such as Figure 1 As shown, the adsorption mechanism 5 includes a reference frame 20 connected to the lifting mechanism 6. Additionally, as... Figure 2 As shown, the adsorption mechanism 5 includes: a fixed frame 21 on which a first adsorption pad 12 is mounted; and a movable frame 22 on which a second adsorption pad 14 and a third adsorption pad 15 are mounted. Furthermore, as... Figure 1 As shown, the adsorption mechanism 5 includes a movable frame lifting mechanism 23 (second adsorption pad moving mechanism) for raising and lowering the movable frame 22. The movable frame lifting mechanism 23 includes a cylinder 24 connected to the movable frame 22. The cylinder 24 is fixed to the base frame 20 to raise and lower the movable frame 22. In this example, two cylinders 24 are provided.

[0030] like Figure 1 As shown, the reference frame 20 has: a rectangular frame portion 25; a cylindrical portion 26 extending from the center of the frame portion 25 in the Z1 direction; and a connecting portion 27 extending radially outward from the upper part of the cylindrical portion 26 and connecting the cylindrical portion 26 and the frame portion 25. Two cylinders 24 are fixed on both sides of the cylindrical portion 26 in the Y-axis direction. A fixing frame 21 is fixed to the lower end of the cylindrical portion 26. Figure 3 As shown, the fixing frame 21 includes: a plate portion 28 having a rectangular outline when viewed from the Z-axis direction; and four protrusions 29 extending radially outward from the four corners of the plate portion 28. The center of the plate portion 28 is fixed to the cylindrical portion 26. The four first adsorption pads 12 are respectively fixed to the fixing frame 21 via a first position adjustment mechanism 30.

[0031] like Figure 3As shown, the first position adjustment mechanism 30 includes: a first movement allowance 31, which allows each first adsorption pad 12 to move radially a first distance D1 from the center P of the first adsorption area 11 on the fixed frame 21; and a first fixing mechanism 32, which fixes the first adsorption pad 12 to the fixed frame 21 in a state that prevents radial movement. The first movement allowance 31 has four first elongated holes 21a extending from the four corners of the plate portion 28 to the protrusion 29. Each first adsorption pad 12 is fixed to the fixed frame 21 by a first stop screw 33 screwed into the shaft portion 17 from above, with the first elongated hole 21a passing through the flange portion 18 of the shaft portion 17. The first stop screw 33 is the first fixing mechanism 32 that fixes the first adsorption pad 12 to the fixed frame 21.

[0032] like Figure 2 As shown, the movable frame 22 includes: a base frame 35; four extending frames 36 extending radially outward from the outer periphery of the base frame 35; and an extending frame fixing mechanism 37 for fixing each extending frame 36 to the base frame 35. Figure 2 , Figure 4 It can be seen that the four second adsorption pads 14 are respectively fixed on the four extended setting frames 36 via the second position adjustment mechanism 38.

[0033] like Figure 4 As shown, the second position adjustment mechanism 38 includes: a second movement allowance 39, which allows each second adsorption pad 14 to move radially a second distance D2 from the center P of the first adsorption region 11 on the extension frame 36; and a second fixing mechanism 40, which fixes the second adsorption pad 14 to the extension frame 36 in a state that prevents radial movement. The second movement allowance 39 is a second elongated hole 36a extending radially in each extension frame 36. Each second adsorption pad 14 is fixed to the extension frame 36 by a second stop screw 41 screwed into the shaft portion 17 from the Z2 direction side, with the portion of the shaft portion 17 further in the Z2 direction than the flange portion 18 passing through the second elongated hole 36a. The second stop screw 41 is a second fixing mechanism 40 that fixes the second adsorption pad 14 to the fixing frame 21.

[0034] Here, the base frame 35 includes: a hexagonal frame plate portion 42 when viewed from the Z-axis direction; and four protruding plate portions 43 in the frame plate portion 42 that protrude radially outward from four sides extending in the X-axis and Y-axis directions. Figure 2 As shown, when viewing the adsorption mechanism 5 from the Z-axis direction, the fixed frame 21 is located on the inner circumference of the frame plate portion 42. Therefore, when the movable frame 22 is raised and lowered by the action of the cylinder 24, the movable frame 22 and the fixed frame 21 do not interfere with each other.

[0035] like Figure 4As shown, the extension frame fixing mechanism 37 fixes the inner peripheral end edges of each extension frame 36 in a state along each of the four sides of the frame plate portion 42 extending in directions intersecting the X and Y axes. Furthermore, the extension frame fixing mechanism 37 allows the fixing position of each extension frame 36 on the base frame 35 to be changed between a first position and a second position along the four sides of the frame plate portion 42 extending in directions intersecting the X and Y axes. More specifically, the extension frame fixing mechanism 37 includes: a frame movement allowing portion 45 that allows each extension frame 36 to move; and a frame fixing mechanism 46 that fixes the extension frame 36 to the frame plate portion 42. The frame movement allowing portion 45 has elongated holes 42a, which are respectively provided on the four sides of the frame plate portion 42 extending in directions intersecting the X and Y axes. The frame fixing mechanism 46 includes: a connecting plate 47, which is fixed to the lower surface of the inner peripheral side portion of each extended frame 36 and extends to the inner peripheral side, and contacts the lower surface of the frame plate portion 42; a fixing shaft portion 48, which extends from the connecting plate 47 in the Z-axis direction; and a fixing member 49, which is installed from the Z2 direction side on the fixing shaft portion 48 through the elongated hole 42a in the Z-axis direction, so that the connecting plate 47 is fixed in a state of being tightly attached to the frame plate portion 42.

[0036] Here, when each extended mounting frame 36 is fixed to a first position on the outer periphery of each protrusion 29 of the fixed frame 21 by the extended mounting frame fixing mechanism 37, the second movement allowing part 39 allows the second adsorption pad 14 to move radially. That is, as Figure 2 As shown, when each extension frame 36 is fixed in the first position, the elongated hole 42a provided in each extension frame 36 extends radially from the center P of the first adsorption region 11. Furthermore, when each extension frame 36 is fixed in a position different from the first position (the second position) by the extension frame fixing mechanism 37, the second movement allowing part 39 allows the second adsorption pad 14 to move in a direction deviating from the radial direction. That is, when each extension frame 36 is fixed in the second position, the elongated hole 42a provided in each extension frame 36 extends in a direction intersecting the radial direction.

[0037] Next, third suction pads 15 are installed on the protruding plate 43 of the base frame 35 via the third position adjustment mechanism 51. For example... Figure 4As shown, the third position adjustment mechanism 51 includes: a third movement allowance 52 that allows each third adsorption pad 15 to move along the extending direction of the protruding plate portion 43; and a third fixing mechanism 53 that fixes the third adsorption pad 15 to the protruding plate portion 43. The third movement allowance 52 is a third elongated hole 43a provided in the protruding plate portion 43. Each third adsorption pad 15 is fixed to the protruding plate portion 43 by a third stop screw 54 screwed into the shaft portion 17 from the Z2 direction side, with the portion of the shaft portion 17 further in the Z2 direction than the flange portion 18 passing through the third elongated hole 43a. The third stop screw 54 is the third fixing mechanism 53 that fixes the third adsorption pad 15 to the fixing frame 21.

[0038] (The cylinder's drive system and the suction system of the suction pad) Figure 5 This is a circuit diagram of the drive system of cylinder 24 and the suction system of the suction cushion. Figure 5 (a) is the state in which the cylinder 24 raises the movable frame 22. Figure 5 (b) represents the state in which cylinder 24 lowers the movable frame 22. For example... Figure 5 As shown, the movable frame lifting mechanism 23 includes a cylinder 24 and a solenoid valve 55 for driving the cylinder 24. The cylinder 24 is a double-acting type. The solenoid valve 55 switches between a first air supply path 56 and a second air supply path 57. The first air supply path 56 is connected to a first port 24a of the cylinder 24 that applies pressure when the movable frame 22 is lowered, and the second air supply path 57 is connected to a second port 24b of the cylinder 24 that applies pressure when the movable frame 22 is raised.

[0039] On the other hand, the suction system of the first adsorption pad 12, the second adsorption pad 14, and the third adsorption pad 15 includes: a suction mechanism 60; a first suction passage 61 connecting the suction mechanism 60 and the first adsorption pad 12; a second suction passage 62 connecting the suction mechanism 60, the second adsorption pad 14, and the third adsorption pad 15; and a connection disconnection mechanism 63 for connecting or disconnecting the second suction passage 62. The connection disconnection mechanism 63 includes: a normally closed air gate valve 64 for opening and closing the second suction passage 62; and a valve actuation air supply passage 65 for supplying actuation air to the air gate valve 64. The valve actuation air supply passage 65 is connected to the first air supply passage 56.

[0040] (The movement of the transport device) Figure 6 This is a side view of the adsorption mechanism 5 when observing the state of the medium 3 corresponding to the first adsorption region 11 from the X-axis direction. Figure 7 This is a side view of the adsorption mechanism 5 when observing the state of the medium 3 corresponding to the second adsorption region 13 from the X-axis direction.

[0041] When transporting the small-sized medium 3 corresponding to the first adsorption region 11, the transport device 1, as follows: Figure 5 As shown in (a), the solenoid valve 55 of the movable frame lifting mechanism 23 is activated, connecting the second port 24b of the cylinder 24 to the second air supply passage 57. Compressed air is then supplied to the second port 24b, causing the cylinder 24 to actuate and raise the movable frame 22. Consequently, the second suction pad 14 and the third suction pad 15 mounted on the movable frame 22 are positioned in the retracted position.

[0042] Furthermore, the conveying device 1 actuates the suction mechanism 60, which communicates with the first suction path 61 and the second suction path 62. Here, the connection disconnection mechanism 63, which connects to and disconnects the second suction path 62, which communicates with the second adsorption pad 14 and the third adsorption pad 15, is equipped with a normally closed air gate valve 64. In this state, no operating air is supplied to the air gate valve 64. Therefore, the air gate valve 64 shuts off the second suction path 62. As a result, the suction mechanism 60 performs vacuum suction from the first adsorption pad 12 only via the first suction path 61.

[0043] Subsequently, the conveying device 1 lowers the adsorption mechanism 5 via the lifting mechanism 6, bringing the first adsorption pad 12 into contact with the medium 3 on the mounting surface 2. Here, the second adsorption pad 14 and the third adsorption pad 15 are positioned in a retracted position. Therefore, as... Figure 6 As shown, the conveying device 1 avoids contact between the second adsorption pad 14 and the third adsorption pad 15 and the mounting surface 2, while only allowing the first adsorption pad 12 to contact the medium 3 to adsorb the medium 3. Therefore, it can prevent or suppress wear or damage caused by contact between the second adsorption pad 14 and the third adsorption pad 15 and the mounting surface 2.

[0044] When the medium 3 is adsorbed by the first adsorption pad 12, the lifting mechanism 6 raises the adsorption mechanism 5. Additionally, the moving mechanism moves the lifting mechanism 6, transporting the medium 3 to a next platform different from the placement surface 2.

[0045] Next, when transporting the large-sized medium 3 corresponding to the second adsorption region 13, such as... Figure 5 As shown in (b), the conveying device 1 actuates the solenoid valve 55 of the movable frame lifting mechanism 23, connecting the first port 24a of the cylinder 24 to the first air supply passage 56. Compressed air is then supplied to the first port 24a, causing the cylinder 24 to actuate and lower the movable frame 22. Consequently, the second adsorption pad 14 and the third adsorption pad 15, mounted on the movable frame 22, are positioned at the same adsorption height as the first adsorption pad 12.

[0046] Additionally, the conveying device 1 activates the suction mechanism 60, which communicates with the first suction path 61 and the second suction path 62. Here, the first air supply path 56, which supplies compressed air to the first port 24a, is connected to the valve-operated air supply path 65, which connects or disconnects the air gate valve 64 of the second suction path 62. Therefore, when compressed air is supplied to the first port 24a, the air gate valve 64 activates, and the suction mechanism 60 connects with the second adsorption pad 14 and the third adsorption pad 15. As a result, the suction mechanism 60 performs vacuum suction from the first adsorption pad 12 via the first suction path 61, and performs vacuum suction from the second adsorption pad 14 and the third adsorption pad 15 via the second suction path 62.

[0047] Subsequently, the conveying device 1 lowers the adsorption mechanism 5 via the lifting mechanism 6. Here, the second adsorption pad 14 and the third adsorption pad 15 are positioned at the same adsorption height as the first adsorption pad 12. Furthermore, the first adsorption pad 12, the second adsorption pad 14, and the third adsorption pad 15 are all connected to the suction mechanism 60. Therefore, as... Figure 7 As shown, the conveying device 1 brings four first adsorption pads 12, four second adsorption pads 14 located outside the four first adsorption pads 12, and four third adsorption pads into contact with and adsorb the medium 3. Therefore, even if the medium 3 is flexible, it is possible to prevent or suppress the deflection of the medium 3 during conveying. Here, if a large medium 3 deflects during conveying, a load is applied to a particular adsorption pad, which may sometimes cause the medium 3 to fall, but according to this example, such an event can be prevented or suppressed.

[0048] When the medium 3 is adsorbed by the first adsorption pad 12, the second adsorption pad 14, and the third adsorption pad 15, the lifting mechanism 6 raises the adsorption mechanism 5. Additionally, the moving mechanism moves the lifting mechanism 6, transporting the medium 3 to a next platform different from the placement surface 2.

[0049] (Effects) According to this example, the adsorption mechanism 5 has: a base frame 20; a fixed frame 21 supporting four first adsorption pads 12; and a movable frame 22 supporting four second adsorption pads 14 and four third adsorption pads 15. The fixed frame 21 is connected to the base frame 20. The movable frame lifting mechanism 23 has a cylinder 24 connected to the movable frame 22. The cylinder 24 is fixed to the base frame 20, causing the movable frame 22 to rise and fall. Therefore, it is easy to raise and lower the four second adsorption pads 14 and the four third adsorption pads 15.

[0050] Furthermore, cylinder 24 is a double-acting cylinder, and the movable frame lifting mechanism 23 includes a solenoid valve 55 for driving cylinder 24. Solenoid valve 55 switches between a first air supply path 56 and a second air supply path 57. The first air supply path 56 is connected to a first port 24a of cylinder 24 that applies pressure when the movable frame 22 is lowered, and the second air supply path 57 is connected to a second port 24b of cylinder 24 that applies pressure when the movable frame 22 is raised. The connection / disconnection mechanism 63 includes a normally closed air gate valve 64 that opens and closes the second intake path 62; and a valve-operating air supply path 65 for supplying operating air to the air gate valve 64. The valve-operating air supply path 65 is connected to the first air supply path 56. Therefore, when compressed air is supplied to the first air supply passage 56, which is connected to the first port 24a of the cylinder 24, in order to lower the movable frame 22 on which the second adsorption pad 14 and the third adsorption pad 15 are mounted, this compressed air is also supplied from the first air supply passage 56 to the air gate valve 64 via the valve-operated air supply passage 65. As a result, since the air gate valve 64 opens the second intake passage 62, the second adsorption pad 14 and the third adsorption pad 15 become capable of adsorbing the medium 3. That is, when the second adsorption pad 14 moves from the retracted position to the intake position, the second adsorption pad 14 automatically becomes capable of adsorbing the medium 3.

[0051] In this example, the first adsorption region 11 is located in the center of the second adsorption region 13. Therefore, when the first adsorption pad 12 and the second adsorption pad 14 are used to attract the medium 3, the first adsorption pad 12 attracts the central portion of the medium 3, and the second adsorption pad 14 attracts the outer peripheral portion of the medium 3. Therefore, it is easy to prevent or suppress the deflection of the medium 3 during transportation.

[0052] In this example, four first adsorption pads 12 are respectively fixed to the fixed frame 21 via a first position adjustment mechanism 30. The first position adjustment mechanism 30 includes: a first movement allowing part 31, which allows each first adsorption pad 12 to move radially a first distance D1 from the center P of the first adsorption region 11 on the fixed frame 21 when viewed from the Z-axis direction; and a first fixing mechanism 32, which fixes the first adsorption pads 12 to the fixed frame 21 in a state that prevents radial movement. Therefore, the position of each of the four first adsorption pads 12 can be adjusted radially when viewed from the center P of the first adsorption region 11. Therefore, it is easy to handle media 3 of different sizes.

[0053] Furthermore, the four second adsorption pads 14 are respectively fixed to the movable frame 22 via a second position adjustment mechanism 38. The second position adjustment mechanism 38 includes: a second movement allowing part 39, which allows each second adsorption pad 14 to move radially along the movable frame 22 by a second distance D2 when viewed from the Z-axis direction; and a second fixing mechanism 40, which fixes the second adsorption pads 14 to the movable frame 22 in a state that prevents radial movement, the second distance D2 being longer than the first distance D1. In this way, the position of each of the four second adsorption pads 14 can be adjusted radially when viewed from the center P of the first adsorption region 11. In addition, the radial position of the second adsorption pads 14 can be adjusted with a relatively long second distance D2. Therefore, it is easy to handle media 3 of different sizes.

[0054] In this example, the movable frame 22 includes: a base frame 35; four extended frames 36 having a second movement allowance 39 and extending radially outward from the outer periphery of the base frame 35; and an extended frame fixing mechanism 37 for fixing each extended frame 36 to the base frame 35. The extended frame fixing mechanism 37 can change the fixed position of each extended frame 36 in the base frame 35 circumferentially within the range of the elongated hole. When the extended frame 36 is fixed in a first circumferential position, the second movement allowance 39 allows the second adsorption pad 14 to move radially. When the extended frame 36 is fixed in a position deviating from the first position (second position), the second movement allowance 39 allows the second adsorption pad 14 to move in a direction deviating from the radial direction. Therefore, each second adsorption pad 14 can be adjusted radially and in directions intersecting the radial direction as viewed from the center P of the first adsorption region 11.

[0055] (Example 2) Figure 8 This is a perspective view of the conveying device 1A according to Embodiment 2 of the present invention. Figure 9 This is a top view of the conveying device 1A in this example, viewed from the Z1 direction. Figure 10 This is a three-dimensional view of the fixed frame 21 and the first adsorption pad 12. Figure 11 This is a perspective view of the movable frame 22, the second suction pad 14, and the third suction pad 15. The conveying device 1A in this example has a structure corresponding to the conveying device 1 in the above example. Therefore, the corresponding structures are labeled with the same symbols, and their detailed descriptions are omitted.

[0056] like Figure 8 As shown, the conveying device 1A includes: an adsorption mechanism 5A for adsorbing the medium 3 on the mounting surface 2; a lifting mechanism 6 for raising and lowering the adsorption mechanism 5A; and a moving mechanism 7 for moving the lifting mechanism 6 in a direction parallel to the mounting surface 2.

[0057] (Adsorption mechanism) like Figure 8As shown, the adsorption mechanism 5A includes: four first adsorption pads 12, which are arranged to overlap with the four interior corners of a rectangular first adsorption region 11 pre-defined on the mounting surface 2; and four second adsorption pads 14, which, when viewed from the Z-axis direction, are arranged to overlap with the four interior corners of a second adsorption region 13 on the mounting surface 2 that includes the first adsorption region 11 inside. Furthermore, the adsorption mechanism 5A includes two third adsorption pads 15, which are arranged to overlap with the second adsorption region 13 but not with the first adsorption region 11 when viewed from the Z-axis direction.

[0058] Viewed from the Z-axis direction, the first adsorption region 11 includes: a first side 11a and a second side 11b of the first adsorption region extending opposite each other in the X-axis direction and along the Y-axis direction; and a third side 11c and a fourth side 11d of the first adsorption region extending opposite each other in the Y-axis direction and along the X-axis direction. Viewed from the Z-axis direction, the second adsorption region 13 includes: a first side 13a and a second side 13b of the second adsorption region extending opposite each other in the X-axis direction and along the Y-axis direction; and a third side 13c and a fourth side 13d of the second adsorption region extending opposite each other in the Y-axis direction and along the X-axis direction. Viewed from the Z-axis direction, the first side 11a of the first adsorption region overlaps with the center of the first side 13a of the second adsorption region in the Y-axis direction. Therefore, the first adsorption region 11 is biased towards the X1 direction within the second adsorption region 13.

[0059] In addition, such as Figure 1 As shown, the adsorption mechanism 5A includes: a base frame 20 connected to the lifting mechanism 6; a fixed frame 21 on which a first adsorption pad 12 is mounted; a movable frame 22 on which a second adsorption pad 14 and a third adsorption pad 15 are mounted; and a movable frame lifting mechanism 23 for raising and lowering the movable frame 22. The movable frame lifting mechanism 23 includes a cylinder 24 connected to the movable frame 22. The cylinder 24 is fixed to the base frame 20 and raises and lowers the movable frame 22. The cylinder 24 is a double-acting cylinder. In this example, two cylinders 24 are provided.

[0060] Viewed from the Z-axis direction, the reference frame 20 is positioned at the center of the adsorption mechanism 5A in the Y-axis direction. The reference frame 20 includes a first extension portion 71 extending along the Z-axis direction; and a second extension portion 72 extending from the lower end of the first extension portion 71 in the X1 direction. Two cylinders 24 are fixed to both sides of the first extension portion 71 in the Y-axis direction.

[0061] Furthermore, the reference frame 20 includes: a first longitudinal frame 73 extending in the Z1 direction from the end of the second extension portion 72 opposite to the first extension portion 71; and a second longitudinal frame 74 extending in the Z1 direction parallel to the first longitudinal frame 73 in the X2 direction. The second longitudinal frame 74 is mounted on the second extension portion 72. In this example, the fixed position of the second longitudinal frame 74 in the second extension portion 72 along the X-axis direction can be changed. That is, the reference frame 20 includes: a longitudinal frame movement allowance 75 that allows the second longitudinal frame 74 to move in the X-axis direction; and a longitudinal frame fixing mechanism 76 that fixes the second longitudinal frame 74 to the second extension portion 72 when preventing the second longitudinal frame 74 from moving in the X-axis direction. The longitudinal frame movement allowance 75 is an elongated hole 72a extending in the second extension portion 72 in the X-axis direction. In this example, the second longitudinal frame 74 includes a fixing shaft portion 74a protruding upward. The longitudinal frame fixing mechanism 76 includes a fixing member 70, which is mounted from the Z2 direction side to a fixing shaft portion 74a through a through hole 72a along the Z-axis direction, thereby fixing the second longitudinal frame 74 to the second extension portion 72.

[0062] Fixing frames 21 are fixed to the lower ends of the first longitudinal frame 73 and the second longitudinal frame 74, respectively. Each fixing frame 21 includes a first mounting plate portion 77 extending in the Y1 direction from the lower end of the first longitudinal frame 73 and a second mounting plate portion 78 extending in the Y2 direction. Additionally, each fixing frame 21 includes a third mounting plate portion 79 extending in the Y1 direction from the lower end of the second longitudinal frame 74 and a fourth mounting plate portion 80 extending in the Y2 direction.

[0063] like Figure 10 As shown, four first adsorption pads 12 are respectively fixed to each of the four mounting plate portions 77-80 via a first position adjustment mechanism 30. The first position adjustment mechanism 30 includes: a first movement allowance portion 31, which allows each first adsorption pad 12 to move a first distance D1 along the Y-axis direction on each mounting plate portion 77-80; and a first fixing mechanism 32, which fixes the first adsorption pad 12 to the fixing frame 21 in a state that prevents radial movement. The first movement allowance portion 31 is a first elongated hole 21a that extends longer along the X-axis direction in each mounting plate portion 77-80. Each first adsorption pad 12 is fixed to the fixing frame 21 by a first stop screw 33 screwed into the shaft portion 17 from the Z2 direction side, with the portion of the shaft portion 17 further in the Z2 direction than the flange portion 18 passing through the first elongated hole 21a. The first stop screw 33 is the first fixing mechanism 32 that fixes the first adsorption pad 12 to the fixing frame 21.

[0064] like Figure 11As shown, the movable frame 22 includes: a pair of track frames 81 and 82 that are opposite each other in the Y-axis direction and extend in the X-axis direction; and a first connecting frame 83 and a second connecting frame 84 mounted on protruding portions 81a and 82a of each track frame 81 and 82 that protrude in the Z2 direction. The first connecting frame 83 and the second connecting frame 84 connect the pair of track frames 81 and 82. The first connecting frame 83 extends in the Y-axis direction at the center of the protruding portions 81a and 82a in the X-axis direction. Two cylinders 24 are connected to the central portion of the first connecting frame 83 in the Y-axis direction. The second connecting frame 84 extends in the Y-axis direction at the end of the protruding portions 81a and 82a in the X2 direction.

[0065] Furthermore, the movable frame 22 includes: two extended frames 85 extending from the ends of the pair of track frames 81 and 82 in the X1 direction respectively along the Y-axis direction toward each other; a first mounting frame 86 mounted on the pair of track frames 81 and 82 in a movable state in the X-axis direction and extending in the Y-axis direction; and a first mounting frame position adjustment mechanism 87 that fixes the first mounting frame 86 to the track frames 81 and 82 in a state that prevents movement in the X-axis direction. The movable frame 22 also includes: a second mounting frame 88, which is mounted on the pair of track frames 81 and 82 between the extended frames 85 in the X-axis direction and the first mounting frame 86 in a movable state in the X-axis direction and extends in the Y-axis direction; and a second mounting frame position adjustment mechanism 89 that fixes the second mounting frame 88 to the track frames 81 and 82 in a state that prevents movement in the X-axis direction.

[0066] Here, as Figure 9 As shown, when viewed from the Z-axis direction, the first mounting frame 86 and the second mounting frame 88 are located on the side opposite to the first side 11a of the first adsorption region, on the second side 11b of the first adsorption region. That is, the first mounting frame 86 and the second mounting frame 88 are positioned further in the X2 direction than the fixed frame 21. Therefore, when the movable frame 22 is raised and lowered by the action of the cylinder 24, the movable frame 22 does not interfere with the fixed frame 21.

[0067] like Figure 9 and Figure 11As shown, four second adsorption pads 14 are mounted on the movable frame 22 via a second position adjustment mechanism 38. More specifically, two of the four second adsorption pads 14 located in the X1 direction are respectively mounted on each extension frame 85 via the second position adjustment mechanism 38. The second position adjustment mechanism 38 includes: a second movement allowance 39, which allows each second adsorption pad 14 to move a second distance D2 along the Y-axis direction on each extension frame 85; and a second fixing mechanism 40, which fixes the second adsorption pads 14 to the extension frame 85 in a state that prevents movement in the Y-axis direction. The second movement allowance 39 is a second elongated hole 85a extending along the Y-axis direction in each extension frame 85. Each second adsorption pad 14 is fixed to the extension frame 85 by a second stop screw 41 screwed into the shaft portion 17 from the Z2 direction side, with the portion of the shaft portion 17 further in the Z2 direction than the flange portion 18 passing through the second elongated hole 85a. The second stop screw 41 is the second fixing mechanism 40 that fixes the second adsorption pad 14 to the fixing frame 21. Figure 9 As shown, the moving distance of the second adsorption pad 14 along the Y-axis (the length of the second elongated hole 85a) is longer than the moving distance of the first adsorption pad 12 along the Y-axis (the length of the first elongated hole 21a).

[0068] Two of the four second adsorption pads 14 located in the X2 direction are respectively mounted on the first mounting frame 86 via the second position adjustment mechanism 38. For example... Figure 11 As shown, the second position adjustment mechanism 38 includes: a second movement allowance 39, which allows each second adsorption pad 14 to move a second distance D2 along the Y-axis direction on the first mounting frame 86; and a second fixing mechanism 40, which fixes the second adsorption pad 14 to the first mounting frame 86 in a state that prevents movement in the Y-axis direction. The second movement allowance 39 is a second elongated hole 86a extending along the Y-axis direction in the first mounting frame 86, provided at both one end and the other end of the first mounting frame 86 in the Y-axis direction. Each second adsorption pad 14 is fixed to the first mounting frame 86 by screwing a second stop screw 41 into the shaft portion 17 from the Z2 direction side, with the portion of the shaft portion 17 further in the Z2 direction than the flange portion 18 passing through the second elongated hole 86a. The second stop screw 41 is the second fixing mechanism 40 that fixes the second adsorption pad 14 to the first mounting frame 86. The distance the second adsorption pad 14 moves along the Y-axis (the length of the second elongated hole 86a) is longer than the distance the first adsorption pad 12 moves along the Y-axis (the length of the first elongated hole 21a).

[0069] Two third adsorption pads 15 are respectively mounted on the second mounting frame 88 via a third position adjustment mechanism 51. The third position adjustment mechanism 51 includes: a third movement allowance 52, which allows each third adsorption pad 15 to move a second distance D2 along the Y-axis direction on the second mounting frame 88; and a third fixing mechanism 53, which fixes the second adsorption pad 14 to the first mounting frame 86 in a state that prevents movement in the Y-axis direction. The third movement allowance 52 is a third elongated hole 88a extending along the Y-axis direction in the second mounting frame 88, provided at both one end and the other end of the second mounting frame 88 in the Y-axis direction. Each third adsorption pad 15 is fixed to the second mounting frame 88 with the portion of the shaft portion 17 further in the Z2 direction than the flange portion 18 passing through the third elongated hole 88a, by a third stop screw 54 screwed into the shaft portion 17 from the Z2 direction side. The third stop screw 54 is the third fixing mechanism 53 that fixes the third adsorption pad 15 to the second mounting frame 88. The distance the third adsorption pad 15 moves along the Y-axis (the length of the third long hole 88a) is the same as the distance the second adsorption pad 14 moves along the Y-axis (the lengths of the second long holes 85aa and 86a), and is longer than the distance the first adsorption pad 12 moves along the Y-axis (the length of the first long hole 21a).

[0070] Here, a plate-like member 92 extending in the X-axis direction is fixed to the lower side of the first track frame 81 in the Y1 direction, one of the pair of track frames 81 and 82. The plate-like member 92 is positioned opposite the lower surface of the first track frame 81 with a predetermined gap. The first mounting frame 86 and the second mounting frame 88 are supported on the first track frame 81 in a state that allows them to move in the X-axis direction by inserting their ends in the Y1 direction into this gap. In this state, the ends of the first mounting frame 86 and the second mounting frame 88 in the Y2 direction are in contact with the lower surface of the second track frame 82 in the Y2 direction, one of the pair of track frames 81 and 82.

[0071] The first frame positioning adjustment mechanism 87 and the second frame positioning adjustment mechanism 89 each have a frame movement allowance 93, which allows the first frame 86 to move along the second track frame 82 in the X-axis direction. The frame movement allowance 93 is an elongated hole 82b extending in the X-axis direction provided on the second track frame 82. Furthermore, the first frame positioning adjustment mechanism 87 and the second frame positioning adjustment mechanism 89 each have a frame fixing mechanism 94, which fixes each frame in a state that prevents movement of each frame in the X-axis direction. The frame fixing mechanism 94 includes: a through hole (not shown) that penetrates the Y2-direction end portion of each frame 86, 88 in the Z-axis direction; and a support member 98 that is mounted from the Z1 direction to the Y2-direction end portion of each frame. The support member 98 includes: an abutment plate portion 99 that abuts against each of the supporting frames in the Z1 direction; and a fixing shaft portion 100 that protrudes from the abutment plate portion 99 in the Z2 direction and passes through a through hole 97 and an elongated hole, protruding from the upper surface of the second track frame 82 in the Z2 direction. Additionally, the frame fixing mechanism 94 includes a fixing member 101 that is mounted on the fixing shaft portion 100 from the Z2 direction side, fixing each supporting frame in a state of tight contact with the second track frame 82.

[0072] Here, in this example, the number of third adsorption pads 15 is two, which differs from Embodiment 1 where the number of third adsorption pads 15 is four. However, apart from this point, the circuit diagrams of the drive system of cylinder 24 and the suction system of the suction pads are the same. Figure 5 The circuit diagram shown is the same as that of Embodiment 1. Furthermore, the operation of the transport device 1 is the same as that of the transport device 1 in Embodiment 1.

[0073] (Effects) Figure 12 This is a side view of the adsorption mechanism 5A that adsorbs the medium 3 corresponding to the first adsorption region 11. Figure 13 This is a side view of the adsorption mechanism for adsorbing the medium 3 corresponding to the second adsorption region 13. In this example, when transporting the small-sized medium 3 corresponding to the first adsorption region 11, the transport device 1A also actuates the solenoid valve 55 of the movable frame lifting mechanism 23, connecting the second port 24b of the cylinder 24 to the second air supply path 57. Compressed air is then supplied to the second port 24b, thus driving the cylinder 24 to raise the movable frame 22. Therefore, the second adsorption pad 14 and the third adsorption pad 15 mounted on the movable frame 22 are positioned in the retracted position.

[0074] Furthermore, the conveying device 1A activates the suction mechanism 60, which communicates with the first suction path 61 and the second suction path 62. Here, the connection disconnection mechanism 63, which disconnects the second suction path 62 from the second adsorption pad 14 and the third adsorption pad 15, is a normally closed air gate valve 64. Without supplying operating air to the air gate valve 64 and the connection disconnection mechanism 63, the second suction path 62 is cut off. Therefore, the suction mechanism 60 performs vacuum suction from the first adsorption pad 12 only via the first suction path 61.

[0075] Here, the second adsorption pad 14 is positioned in the retracted position. Therefore, as Figure 12 As shown, when the adsorption mechanism 5A descends, the transport device 1A ensures that only the first adsorption pad 12 contacts the medium 3 while preventing the second adsorption pad 14 from contacting the mounting surface 2, thus adsorbing the medium 3. Therefore, wear or damage caused by contact between the second adsorption pad 14 and the third adsorption pad 15 and the mounting surface 2 can be prevented or suppressed. Furthermore, in this example, the first adsorption region 11 is biased towards the medium 3 disposed on the mounting surface 2 in the X1 direction. Therefore, the transport device 1A cantileveredly holds the X1-direction end portion of the medium 3.

[0076] Next, when transporting the large-sized medium 3 corresponding to the second adsorption area 13, the transport device 1A actuates the solenoid valve 55 of the movable frame lifting mechanism 23, connecting the first port 24a of the cylinder 24 to the first air supply path 56. Compressed air is then supplied to the first port 24a, thus driving the cylinder 24 and lowering the movable frame 22. Therefore, the second adsorption pad 14 and the third adsorption pad 15, mounted on the movable frame 22, are positioned at the same adsorption height as the first adsorption pad 12.

[0077] Additionally, the conveying device 1A activates the suction mechanism 60, which communicates with the first suction path 61 and the second suction path 62. Here, the first air supply path 56, which supplies compressed air to the first port 24a, is connected to the valve-operated air supply path 65, which connects to or disconnects the air gate valve 64 of the second suction path 62. Therefore, when compressed air is supplied to the first port 24a, the air gate valve 64 activates, and the suction mechanism 60 connects to the second adsorption pad 14 and the third adsorption pad 15. Thus, the suction mechanism 60 performs vacuum suction from the first adsorption pad 12 via the first suction path 61, and performs vacuum suction from the second adsorption pad 14 and the third adsorption pad 15 via the second suction path 62.

[0078] Here, the second adsorption pad 14 and the third adsorption pad 15 are positioned at the same height as the first adsorption pad 12. Furthermore, the first adsorption pad 12, the second adsorption pad 14, and the third adsorption pad 15 are all connected to the suction mechanism 60. Figure 13As shown, when transporting large-sized media 3, it is adsorbed by four second adsorption pads 14 and two third adsorption pads located outside the four first adsorption pads 12, together with the four first adsorption pads 12.

[0079] According to this example, the adsorption mechanism 5A has: a reference frame 20; a fixed frame 21 supporting four first adsorption pads 12; and a movable frame 22 supporting four second adsorption pads 14 and two third adsorption pads 15. The fixed frame 21 is connected to the reference frame 20. The movable frame lifting mechanism 23 has a cylinder 24 connected to the movable frame 22. The cylinder 24 is fixed to the reference frame 20, causing the movable frame 22 to rise and fall. Therefore, it is easy to raise and lower the four second adsorption pads 14 and the two third adsorption pads 15. In addition, in this example, the second adsorption area 13 is biased towards the medium 3 disposed on the mounting surface 2 in the X1 direction. Therefore, the conveying device 1A holds the X1 direction end portion of the medium 3 in a cantilever manner.

[0080] Furthermore, cylinder 24 is a double-acting cylinder, and the movable frame lifting mechanism 23 includes a solenoid valve 55 for driving cylinder 24. Solenoid valve 55 switches between a first air supply path 56 and a second air supply path 57. The first air supply path 56 is connected to a first port 24a of cylinder 24 that applies pressure when the movable frame 22 is lowered, and the second air supply path 57 is connected to a second port 24b of cylinder 24 that applies pressure when the movable frame 22 is raised. The connection / disconnection mechanism 63 includes a normally closed air gate valve 64 that opens and closes the second intake path 62; and a valve-operating air supply path 65 for supplying operating air to the air gate valve 64. The valve-operating air supply path 65 is connected to the first air supply path 56. Therefore, when compressed air is supplied to the first air supply passage 56, which is connected to the first port 24a of the cylinder 24, in order to lower the movable frame 22 on which the second adsorption pad 14 and the third adsorption pad 15 are mounted, this compressed air is also supplied from the first air supply passage 56 to the air gate valve 64 via the valve-operated air supply passage 65. As a result, since the air gate valve 64 opens the second intake passage 62, the second adsorption pad 14 and the third adsorption pad 15 become capable of adsorbing the medium 3. That is, when the second adsorption pad 14 moves from the retracted position to the intake position, the second adsorption pad 14 automatically becomes capable of adsorbing the medium 3.

[0081] In this example, viewed from the Z-axis direction, the first adsorption region 11 has a first adsorption region first side 11a and a second adsorption region second side 11b that are opposite each other in the X-axis direction and extend in the Y-axis direction. The second adsorption region 13 has a second adsorption region first side 13a and a second adsorption region second side 13b that are opposite each other in the X-axis direction and extend in the Y-axis direction. The first adsorption region first side 11a overlaps with the second adsorption region first side 13a at the center of the second adsorption region first side 13a in the Y-axis direction. Therefore, when the first adsorption pad 12 and the second adsorption pad 14 are used to attract the medium 3, the first adsorption pad 12 adsorbs the region of the medium 3 biased towards the X1 direction, and the second adsorption pad 14 adsorbs the two sides of the region of the first adsorption pad 12 that attracts the medium 3 in the Y-axis direction and the region of the first adsorption pad 12 that attracts the medium 3 in the X2 direction.

[0082] In this example, four first adsorption pads 12 are respectively fixed to the fixed frame 21 via a first position adjustment mechanism 30. Viewed from the Z-axis direction, the first position adjustment mechanism 30 includes: a first movement allowance 31 that allows each first adsorption pad 12 to move a first distance D1 along the Y-axis direction on the fixed frame 21; and a first fixing mechanism 32 that fixes the first adsorption pads 12 to the fixed frame 21 in a state that prevents movement in the Y-axis direction. Therefore, the position of each of the four first adsorption pads 12 can be adjusted in the Y-axis direction. Thus, it is easy to handle media 3 of different sizes.

[0083] Furthermore, the four second adsorption pads 14 are respectively fixed to the movable frame 22 via the second position adjustment mechanism 38. That is, two of the four second adsorption pads 14 are respectively mounted to each extended mounting frame 85 via the second position adjustment mechanism 38. The two second adsorption pads 14 located in the X2 direction are respectively mounted to the first mounting frame 86 via the second position adjustment mechanism 38. The second position adjustment mechanism 38 includes: a second movement allowing part 39, which allows each second adsorption pad 14 to move a second distance D2 along the Y-axis direction on each extended mounting frame 85; and a second fixing mechanism 40, which fixes the second adsorption pads 14 to the extended mounting frame 85 in a state that prevents movement in the Y-axis direction. Therefore, the position of each of the four second adsorption pads 14 can be adjusted in the Y-axis direction. In addition, the position of the second adsorption pad 14 in the Y-axis direction can be adjusted by a relatively long second distance D2. Therefore, it is easy to handle media 3 of different sizes.

[0084] Furthermore, the movable frame 22 includes: a pair of track frames 81 and 82 that are opposite each other in the Y-axis direction and extend in the X-axis direction; two extended mounting frames 85 that extend from each track frame 81 and 82 toward their inner periphery in the Y-axis direction toward each other; a first mounting frame 86 that is movable in the X-axis direction and is mounted on the pair of track frames 81 and 82; and a mounting frame fixing mechanism 94 that fixes the first mounting frame 86 to the track frames 81 and 82 in a state that prevents movement in the X-axis direction. When viewed from the Z-axis direction, the first mounting frame 86 is located on the side opposite to the first side 11a of the first adsorption region on the second side 11b. Two of the four second adsorption pads 14 are fixed to each of the extended mounting frames 85 via a second position adjustment mechanism 38, and the other two of the four second adsorption pads 14 are mounted on the mounting frames via the second position adjustment mechanism 38. Therefore, in this example, the positions of the two second adsorption pads 14 located in the X2 direction of the first adsorption region 11 can be adjusted in the X-axis direction.

[0085] Furthermore, in this example, when viewed from the Z-axis direction, two third adsorption pads 15 are provided, overlapping the second adsorption region 13 and separated in the Y-axis direction between the second side 11b of the first adsorption region and the second side 13b of the second adsorption region. The third adsorption pads 15 are mounted on the movable frame 22 and connected to the second suction path 62. In this way, when transporting a large-sized medium 3, the medium 3 can be adsorbed by the first adsorption pad 12, the second adsorption pad 14, and the third adsorption pad 15. Therefore, it is possible to suppress the deflection of the adsorbed medium 3. Symbol Explanation

[0086] 1…Transporting device; 2…Placement surface; 3…Medium; 5…Adsorption mechanism; 6…Lifting mechanism; 11…First adsorption area; 11a…First side of the first adsorption area; 11b…Second side of the first adsorption area; 11c…Third side of the first adsorption area; 11d…Fourth side of the first adsorption area; 12…First adsorption pad; 13…Second adsorption area; 13a…First side of the second adsorption area; 13b…Second side of the second adsorption area; 13c…Third side of the second adsorption area; 13d…Fourth side of the second adsorption area; 14…Second adsorption pad; 15…Third adsorption pad; 16…Pad portion; 17…Shaft portion; 18…Flange portion; 20…Reference frame; 21…Fixing frame; 22… 23…Modible frame lifting mechanism; 24…Cylinder; 24a…First port; 24b…Second port; 25…Frame portion; 26…Cylinder portion; 27…Connecting portion; 28…Plate portion; 29…Protrusion; 30…First position adjustment mechanism; 31…First movement allowable portion; 32…First fixing mechanism; 33…First stop screw; 35…Base frame; 36…Extended frame; 37…Extended frame fixing mechanism; 38…Second position adjustment mechanism; 39…Second movement allowable portion; 40…Second fixing mechanism; 41…Second stop screw; 42…Frame plate portion; 43…Protruding plate portion; 45…Frame movement allowable portion; 46…Frame fixing mechanism; 4 7…Connecting plate; 48…Fixing shaft; 49…Fixing member; 51…Third position adjustment mechanism; 52…Third movement allowance; 53…Third fixing mechanism; 54…Third stop screw; 55…Solenoid valve; 56…First air supply path; 57…Second air supply path; 60…Intake mechanism; 61…First intake path; 62…Second intake path; 63…Connection / disconnection mechanism; 64…Air gate valve; 65…Valve actuation air supply path; 70…Fixing member; 71…First extension setting part; 72…Second extension setting part; 73…First longitudinal frame; 74…Second longitudinal frame; 74a…Fixing shaft; 75…Longitudinal frame movement allowance; 76…Longitudinal frame fixing mechanism ; 77… First mounting plate; 78… Second mounting plate; 79… Third mounting plate; 80… Fourth mounting plate; 81… First track frame; 82… Second track frame; 83… Connecting frame; 85… Extension frame; 86… First support frame; 87… First support frame position adjustment mechanism; 88… Second support frame; 89… Second support frame position adjustment mechanism; 91… Third position adjustment mechanism; 92… Plate-shaped component; 93… Support frame movement allowable part; 94… Frame fixing mechanism; 97… Through hole; 98… Support member; 99… Abutment plate; 100… Fixing shaft; 101… Fixing member; D1… First distance; D2… Second distance.

Claims

1. A conveying device for conveying a flexible medium placed on a mounting surface by adsorption, characterized in that, It comprises: an adsorption mechanism for adsorbing the medium; and a lifting mechanism for raising and lowering the adsorption mechanism. If we define the three mutually orthogonal axes as the X-axis, Y-axis, and Z-axis, and the vertical direction as the Z-axis, with Z1 as the downward direction and Z2 as the upward direction, then... The adsorption mechanism comprises: Four first adsorption pads are arranged, when viewed from the Z-axis direction, at positions that overlap with the four interior corners of a rectangular first adsorption area pre-defined on the mounting surface; Four second adsorption pads are arranged, when viewed from the Z-axis direction, at positions that overlap with the four interior corners of the second adsorption region on the mounting surface that contains the first adsorption region inside; Inhalation mechanism; A first air intake path connects the air intake mechanism to the first adsorption pad; The second air intake path connects the air intake mechanism and the second adsorption pad; A connection disconnection mechanism that connects or disconnects the second intake path; as well as A second adsorption pad moving mechanism moves the second adsorption pad between an adsorption position and a retraction position. The adsorption position is the same as the first adsorption pad in the Z-axis direction, and the retraction position is a position that moves upward away from the first adsorption pad. When the first adsorption pad is used to adsorb the medium for transport, with the second adsorption pad positioned in the retracted position and the second suction path disconnected, the suction mechanism is driven to descend, thereby bringing the first adsorption pad into contact with the medium on the mounting surface. When the first and second adsorption pads are used to adsorb the medium for transport, with the second adsorption pad positioned in the adsorption position and the second suction path connected, the suction mechanism is driven to descend, thereby bringing the first and second adsorption pads into contact with the medium on the mounting surface. The adsorption mechanism comprises: a reference frame; a fixed frame supporting the four first adsorption pads; and a movable frame supporting the four second adsorption pads. The fixed frame is connected to the reference frame. The second adsorption pad moving mechanism includes a cylinder connected to the movable frame. The cylinder is mounted on the reference frame and causes the movable frame to rise and fall. When we define the X-axis and Y-axis as two directions that are perpendicular to and orthogonal to the vertical direction, respectively. When viewed from the vertical direction, the first adsorption region has a first side of the first adsorption region that is opposite to each other in the X-axis direction and extends in the Y-axis direction, and a second side of the first adsorption region. When viewed from the vertical direction, the second adsorption region has a first side and a second side that are opposite each other in the X-axis direction and extend in the Y-axis direction. The first adsorption region is located in the center of the second adsorption region. Four first adsorption pads are respectively mounted on the fixed frame via a first position adjustment mechanism. The first position adjustment mechanism includes: a first movement allowing portion, which allows each first adsorption pad to move radially a first distance on the fixed frame from the center of the first adsorption area when viewed from the vertical direction; and a first fixing mechanism, which fixes the first adsorption pad to the fixed frame in a state that prevents radial movement. The four second adsorption pads are respectively mounted on the movable frame via a second position adjustment mechanism. The second position adjustment mechanism includes: a second movement allowing portion that allows each second adsorption pad to move radially a second distance on the movable frame when viewed from the vertical direction; and a second fixing mechanism that fixes the second adsorption pad to the movable frame in a state that prevents radial movement. The second distance is longer than the first distance. The movable frame includes: a base frame; four extended frames having the second movement allowance and extending radially outward from the outer periphery of the base frame; and an extended frame fixing mechanism for fixing each extended frame to the base frame. The extended frame fixing mechanism can change the fixing position of each extended frame in the base frame between a first position and a second position, wherein the second position is offset from the first position in the circumferential direction. The second movement-allowing part allows the second adsorption pad to move radially when the extension frame is fixed in the first position, and allows the second adsorption pad to move in a direction deviating from the radial direction when the extension frame is fixed in the second position.

2. The conveying device according to claim 1, characterized in that, The cylinder is a double-acting cylinder. The second adsorption pad moving mechanism includes a solenoid valve for driving the cylinder. The solenoid valve switches between a first air supply path and a second air supply path. The first air supply path is connected to a first port of the cylinder that applies pressure when the movable frame is lowered, and the second air supply path is connected to a second port of the cylinder that applies pressure when the movable frame is raised. The connection disconnection mechanism includes: a normally closed air gate valve for opening and closing the second intake passage; and a valve-operating air supply passage for supplying operating air to the air gate valve. The valve-operated air supply path is connected to the first air supply path.

3. The conveying device according to claim 1, characterized in that, Viewed from the vertical direction, four third adsorption pads are provided at positions overlapping with the second adsorption area. These four third adsorption pads are respectively disposed between two adjacent second adsorption pads in the circumferential direction. The third adsorption pad is installed on the movable frame and connected to the second air intake path.

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