A surface magnetron sputtering coating equipment for automobile plastic parts

Abstract

The application provides a car plastic part surface magnetron sputtering coating equipment, and belongs to the technical field of cars, which solves the technical problems that the distance between the upper surface of each position and the magnetron target head cannot be ensured to be the same in the existing magnetron sputtering, and the effect of magnetron sputtering is affected. The car plastic part surface magnetron sputtering coating equipment comprises a box body, two first electric telescopic rods are fixed in the inside of the box body, an installation seat is fixed to the upper end of the first electric telescopic rod, a residue accumulation plate is arranged between the two installation seats, a second electric telescopic rod is fixed to the upper side of the installation frame, a connecting rod is fixed to the upper end of the second electric telescopic rod, a placing table is fixed to the other end of the connecting rod, a magnetron target is arranged at the upper end in the inside of the box body, a plurality of fixed target pipes are fixed to the lower end of the magnetron target, a telescopic target pipe is slidably connected to the lower end of the fixed target pipe, and a first fixed block is fixed to the front side of the fixed target pipe. The application has the advantage of further improving the quality of magnetron sputtering.

Description

Technical Field

[0001] This invention belongs to the field of automotive technology and relates to a magnetron sputtering coating equipment, particularly a magnetron sputtering coating equipment for automotive plastic parts. Background Technology

[0002] Magnetron sputtering coating is a coating technology that uses the coating material as the target cathode and argon ions to bombard the target material to generate cathode sputtering, which sputters the target material atoms onto the workpiece to form a deposition layer. Magnetron sputtering coating equipment is a type of equipment that uses sputtering to perform coating, which can effectively improve the appearance quality of automotive plastic parts and also protect the appearance of automotive plastic parts.

[0003] A search revealed a Chinese patent document disclosing a magnetron sputtering coating device for automotive plastic parts [Application No.: 202223399207.X; Publication No.: CN 218969348 U]. This coating device includes a main body with a sputtering chamber inside. A magnetron target head is positioned at the middle of the upper end of the sputtering chamber, and a sputtering target platform is positioned below the magnetron target head. It also includes a transmission cavity located below the sputtering chamber. A single-threaded transmission rod is rotatably mounted on one side of the transmission cavity. A lifting plate is threadedly connected to the external side of the single-threaded transmission rod. A connecting rod is welded to the middle of the upper end of the lifting plate. One end of the connecting rod penetrates and extends into the interior of the sputtering chamber, and the connecting rod slides within the sputtering chamber. A connecting seat is fixed to the end of the connecting rod inside the sputtering chamber by screws. This magnetron sputtering coating equipment for automotive plastic parts uses rubber clamping blocks to hold and fix the placed automotive plastic parts, effectively preventing the plastic parts from sliding during rotation and ensuring the effect of magnetron sputtering coating.

[0004] Although the magnetron sputtering coating equipment disclosed in this patent can achieve rotational coating, the magnetron target head in the device cannot be adjusted. Since the upper surface of automotive plastic parts has various shapes, it cannot be guaranteed that the distance between each position on the upper surface and the magnetron target head is the same during magnetron sputtering, which affects the effect of magnetron sputtering. Summary of the Invention

[0005] The purpose of this invention is to address the aforementioned problems in existing technologies by proposing a magnetron sputtering coating device for automotive plastic parts. The technical problem this invention aims to solve is: how to further improve the quality of magnetron sputtering.

[0006] The objective of this invention can be achieved through the following technical solutions: A magnetron sputtering coating device for automotive plastic parts includes a housing. Inside the housing are two first electric telescopic rods, each with a mounting frame at its upper end. A slag accumulation plate is placed between the two mounting frames. A second electric telescopic rod is fixed to the upper side of each mounting frame, and a connecting rod is fixed to the upper end of the second electric telescopic rod. The other end of the connecting rod is fixed to a placement platform. A magnetron target is positioned at the upper part of the housing. Several fixed target tubes are fixed to the lower end of the magnetron target. A telescopic target tube is slidably connected to the lower end of each fixed target tube. A first fixing block is fixed to the front side of each fixed target tube. A first spring is fixed to the lower side of the first fixing block. A second fixing block is fixed to the lower end of the first spring and is fixedly connected to the lower end of the telescopic target tube. A positioning mechanism is provided between the front side of the magnetron target and the second fixing block.

[0007] The working principle of this invention is as follows: During operation, the automotive plastic part is placed on the placement platform and fixed using the fixing components on the platform. Then, the mounting frame is raised by the first electric telescopic rod, which in turn raises the automotive plastic part through the placement seat, bringing the upper surface of the automotive plastic part into contact with the telescopic target tube. This compresses the corresponding telescopic target tube, causing its lower end to conform to the shape of the upper surface of the automotive plastic part. The telescopic target tube is then positioned using a positioning mechanism. Finally, the automotive plastic part is lowered by the first electric rod, ensuring a suitable distance between the automotive plastic part and the lower end of the telescopic target tube. Magnetron sputtering is then performed. This structure ensures that every position on the upper surface of the automotive plastic part is at the same distance from the magnetron target head, improving the magnetron sputtering effect.

[0008] The positioning mechanism includes a support rod, which is fixed to the front side of the magnetic target. A vertical rod is fixed to the other end of the support rod, and a third electric telescopic rod is fixed to the rear side of the vertical rod. A friction block is fixed to the other end of the third electric telescopic rod, and a friction plate that cooperates with the friction block is fixed on the second fixed block.

[0009] With the above structure, during operation, before adjustment, the friction block separates from the friction plate. Under the action of the first spring, the telescopic target tube extends automatically. When the automotive plastic part is adjusted to the designated position, the friction block is moved by the third electric telescopic rod, so that the friction block contacts the friction plate, thereby achieving the positioning of the telescopic target tube.

[0010] A valve plate is rotatably connected to the inner wall of the fixed target tube. A drive shaft is fixed to one end of the valve plate. The drive shaft extends out of the fixed target tube and is fixed with a drive gear.

[0011] With the above structure, during operation, the drive gears can be rotated sequentially from both ends to the middle according to the width of the plastic part. This causes the drive gears to rotate the valve plate, sealing off the unused fixed target tube, thereby reducing energy waste and ensuring the quality of magnetron sputtering.

[0012] Two support blocks are fixed to the rear side of the magnetic target, and a bidirectional threaded rod is fixed between the two support blocks. Moving blocks are threaded to the two threaded parts of the bidirectional threaded rod, and a toothed plate is fixed to the lower end of the moving blocks. A first motor is fixed on one of the support blocks, and the output shaft end of the first motor is fixedly connected to the bidirectional threaded rod.

[0013] With the above structure, during operation, the first motor drives the bidirectional threaded rod to rotate, which in turn drives the two moving blocks to move relative to each other, closing the corresponding fixed target tube. When it is necessary to open, the first motor reverses, causing the two moving blocks to move in opposite directions, which in turn drives the drive gear to reverse. The system is highly automated and simple and convenient to operate.

[0014] A cleaning mechanism is provided on the lower side of the mounting frame. A second motor is fixed inside the mounting frame. The output shaft of the second motor is fixedly connected to the slag plate. A transfer seat is fixed at the lower end of the box. A transfer cavity is opened inside the transfer seat. A slag inlet communicating with the inside of the box is opened at the upper end of the transfer cavity. A slag discharge pipe is fixed at the lower end of the transfer cavity. A sealing component is provided inside the slag inlet.

[0015] With the above structure, during operation, magnetron sputtering coating will generate slag on the slag collection plate. Every so often, the second motor can rotate the slag collection plate 180°, moving the slag to the bottom of the plate, where it can be cleaned by a cleaning mechanism. This process does not affect the sputtering coating operation above. The cleaned slag enters the transfer chamber through the slag inlet, and after the inlet is sealed by a sealing component, the slag is discharged through the slag discharge pipe. After complete discharge, the transfer chamber is evacuated. This structure allows for slag cleaning without stopping the machine and prevents the vacuum state inside the chamber from returning to atmospheric conditions, making cleaning convenient and reducing labor and time costs.

[0016] The sealing assembly includes a first cavity formed in the transfer seat, a fourth electric telescopic rod fixed inside the first cavity, and a sealing plate fixed to the telescopic end of the fourth electric telescopic rod, the sealing plate extending into the slag inlet.

[0017] Using the above mechanism, the sealing plate is moved left and right by the fourth electric telescopic rod to achieve the closing and opening of the slag inlet.

[0018] The slag accumulation plate has a second cavity at both its left and right ends. A fifth electric telescopic rod is fixed inside the second cavity. An insert block is fixed at the telescopic end of the fifth electric telescopic rod. An insertion hole that mates with the insert block is provided on the mounting frame.

[0019] With the above structure, when the slag plate needs to be flipped, the fifth electric telescopic rod drives the insert block to disengage from the insertion hole. After the rotation is completed, the fifth electric telescopic rod drives the insert block to insert into the insertion hole, ensuring the stability of the slag plate and thus improving the effect of magnetron sputtering.

[0020] The cleaning mechanism includes a movable base, which is fixed to the lower side of the mounting frame. A third motor is fixed to the end of the movable base, and a threaded moving rod is fixed to the output shaft end of the third motor. A connecting block is threaded onto the threaded moving rod, and a cleaning seat is fixed between the two connecting blocks. A cleaning scraper is provided on the cleaning seat.

[0021] The cleaning seat has a third cavity inside, and a fourth motor is fixed inside the third cavity. A turntable is fixed to the output shaft end of the fourth motor. A drive rod is rotatably connected to the front outer circumference of the turntable. A connecting seat is rotatably connected to the other end of the drive rod. The connecting seat is connected to the cleaning scraper through a buffer mechanism.

[0022] Using the above mechanism, after the slag plate flips over, the third motor drives the threaded moving rod to rotate, causing the connecting block to move the cleaning seat. At the same time, the fourth motor is turned on, and the fourth motor turntable rotates, causing the cleaning scraper to move back and forth while vibrating slightly, thus improving the cleaning effect on the slag plate.

[0023] The buffer mechanism includes a limiting seat, which is slidably connected in the third cavity. A mounting plate is fixed on the limiting seat and fixedly connected to the cleaning scraper. A fourth cavity is opened inside the limiting seat. A connecting seat extends into the fourth cavity and a sliding plate is fixed thereon. A third spring is fixed between the sliding plate and the fourth cavity.

[0024] With the above structure, when encountering a relatively sturdy cleaning scraper, the third spring can be used to provide a mitigating effect, preventing the cleaning scraper from being damaged due to excessive impact and ensuring the normal use of the device.

[0025] Compared with existing technologies, this magnetron sputtering coating equipment for automotive plastic parts has the following advantages: 1. During operation, the automotive plastic part is placed on the placement table and secured using the fixing components on the placement table. Then, the mounting frame is raised by the first electric telescopic rod, which in turn raises the automotive plastic part through the placement seat, bringing the upper surface of the automotive plastic part into contact with the telescopic target tube. The telescopic target tube is then compressed, causing its lower end to conform to the shape of the upper surface of the automotive plastic part. The telescopic target tube is then positioned using a positioning mechanism. Finally, the automotive plastic part is lowered by the first electric rod, ensuring a suitable distance between the automotive plastic part and the lower end of the telescopic target tube before magnetron sputtering coating is applied. This structure ensures that every position on the upper surface of the automotive plastic part is at the same distance from the magnetron target head, improving the magnetron sputtering effect.

[0026] 2. The valve plate and other structures are designed so that the drive gears can be rotated sequentially from both ends to the middle according to the width of the plastic parts. This causes the drive gears to rotate the valve plate, sealing off the unused fixed target tubes, thereby reducing energy waste and ensuring the quality of magnetron sputtering.

[0027] 3. The design of the transfer seat and other structures allows for the generation of slag on the slag plate during magnetron sputtering coating. Periodically, a second motor rotates the slag plate 180°, moving the slag to the bottom for cleaning. This process does not interfere with the sputtering coating operation above. The cleaned slag enters the transfer chamber through the slag inlet, is sealed by a sealing component, and then discharged through a slag discharge pipe. After complete discharge, the transfer chamber is evacuated. This design eliminates the need to stop the machine during slag cleaning and prevents the vacuum inside the chamber from returning to atmospheric pressure, simplifying cleaning and reducing labor and time costs.

[0028] 4. The cleaning seat and other structures are designed so that after the slag plate flips over, the third motor drives the threaded moving rod to rotate, which causes the connecting block to move the cleaning seat. At the same time, the fourth motor is turned on, and the fourth motor turntable rotates, which causes the cleaning scraper to move back and forth while vibrating slightly, thus improving the cleaning effect on the slag plate.

[0029] 5. The inclusion of a third spring and other structural features allows for the mitigation of movement when encountering a sturdy cleaning scraper, preventing excessive impact and damage to the scraper, thus ensuring the normal operation of the device. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of the present invention.

[0031] Figure 2 This is a schematic diagram of the telescopic target tube in this invention.

[0032] Figure 3 This is a side view of the magnetized target in this invention.

[0033] Figure 4 This is a front view of the magnetized target in this invention.

[0034] Figure 5 This is a schematic diagram of the placement platform in this invention.

[0035] Figure 6 This is a schematic diagram of the cleaning seat in this invention.

[0036] Figure 7 This is a schematic diagram of the driving part in this invention.

[0037] Figure 8 yes Figure 5 A magnified view of a portion of point A in the middle.

[0038] In the diagram, 1. Box body; 2. Magnetically controlled target; 3. Placement platform; 4. Mounting frame; 5. Second electric telescopic rod; 6. Connecting rod; 7. Transfer seat; 8. Transfer chamber; 9. Slag inlet; 10. Fourth electric telescopic rod; 11. Sealing plate; 12. Slag discharge pipe; 13. First electric telescopic rod; 14. Slag accumulation plate; 15. Vertical rod; 16. Friction block; 17. Fixed target tube; 18. Telescopic target tube; 19. Third electric telescopic rod; 20. Support rod; 21. Second fixed block; 22. First spring; 23. First fixed block; 24. Friction plate; 5. Drive shaft; 26. Drive gear; 27. First motor; 28. Mounting block; 29. ​​Bidirectional threaded rod; 30. Moving block; 31. Toothed plate; 32. Cleaning scraper; 33. Mounting plate; 34. Limit seat; 35. Turntable; 36. Drive rod; 37. Connecting seat; 38. Slide plate; 39. Third spring; 40. Moving seat; 41. Third motor; 42. Connecting block; 43. Threaded moving rod; 44. Insertion hole; 45. Second cavity; 46. Fifth electric telescopic rod; 47. Insertion block; 48. Cleaning mechanism; 49. Cleaning seat. Detailed Implementation

[0039] The following are specific embodiments of the present invention, which are described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0040] like Figures 1-8 As shown, this magnetron sputtering coating equipment for automotive plastic parts includes a housing 1. Inside the housing 1, two first electric telescopic rods 13 are fixed. The upper end of the first electric telescopic rods 13 is fixed with a mounting frame 4. A slag accumulation plate 14 is provided between the two mounting frames 4. A second electric telescopic rod 5 is fixed to the upper side of the mounting frame 4. A connecting rod 6 is fixed to the upper end of the second electric telescopic rod 5. The other end of the connecting rod 6 is fixed with a placement platform 3. A magnetron target 2 is provided at the upper end of the housing 1. Several fixed target tubes 17 are fixed to the lower end of the magnetron target 2. A telescopic target tube 18 is slidably connected to the lower end of the fixed target tube 17. A first fixing block 23 is fixed to the front side of the fixed target tube 17. A first spring 22 is fixed to the lower side of the first fixing block 23. A second fixing block 21 is fixed to the lower end of the first spring 22. The second fixing block 21 is fixedly connected to the lower end of the telescopic target tube 18. A positioning mechanism is provided between the front side of the magnetron target 2 and the second fixing block 21.

[0041] During operation, the automotive plastic part is placed on the placement platform 3 and fixed using the fixing components on the placement platform 3. Then, the mounting frame 4 is raised by the first electric telescopic rod 13, which in turn raises the automotive plastic part through the placement seat, so that the upper surface of the automotive plastic part contacts the telescopic target tube 18 and compresses the corresponding telescopic target tube 18, making the lower end of the telescopic target tube 18 conform to the shape of the upper surface of the automotive plastic part. Then, the telescopic target tube 18 is positioned by the positioning mechanism, and the automotive plastic part is lowered by the first electric rod, so that the lower end of the automotive plastic part and the telescopic target tube 18 are at a suitable distance. Then, magnetron sputtering coating is performed. This structure ensures that the distance between each position on the upper surface of the automotive plastic part and the magnetron target 2 head is the same, improving the magnetron sputtering effect.

[0042] The positioning mechanism includes a support rod 20, which is fixed to the front side of the magnetic target 2. A vertical rod 15 is fixed to the other end of the support rod 20. A third electric telescopic rod 19 is fixed to the rear side of the vertical rod 15. A friction block 16 is fixed to the other end of the third electric telescopic rod 19. A friction plate 24 that cooperates with the friction block 16 is fixed on the second fixed block 21.

[0043] With the above structure, during operation, before adjustment, the friction block 16 is separated from the friction plate 24. Under the action of the first spring 22, the telescopic target tube 18 extends automatically. After the automotive plastic part is adjusted to the designated position, the friction block 16 is moved by the third electric telescopic rod 19, so that the friction block 16 abuts against the friction plate 24, thereby achieving the positioning of the telescopic target tube 18.

[0044] A valve plate is rotatably connected to the inner wall of the fixed target tube 17. A drive shaft 25 is fixed to one end of the valve plate. The drive shaft 25 extends out of the fixed target tube 17 and is fixed with a drive gear 26.

[0045] With the above structure, during operation, the drive gear 26 can be rotated sequentially from both ends to the middle according to the width of the plastic part, so that the drive gear 26 drives the valve plate to rotate, thereby sealing the unused fixed target tube 17, thus reducing energy waste and ensuring the quality of magnetron sputtering.

[0046] Two support blocks 28 are fixed to the rear side of the magnetic target 2. A bidirectional threaded rod 29 is fixed between the two support blocks 28. A moving block 30 is threadedly connected to the two threaded parts of the bidirectional threaded rod 29. A toothed plate 31 is fixed to the lower end of the moving block 30. A first motor 27 is fixed on one of the support blocks 28. The output shaft end of the first motor 27 is fixedly connected to the bidirectional threaded rod 29.

[0047] With the above structure, during operation, the first motor 27 drives the bidirectional threaded rod 29 to rotate, and the bidirectional threaded rod 29 drives the two moving blocks 30 to move relative to each other, closing the corresponding fixed target tube 17. When it is necessary to open, the first motor 27 reverses, causing the two moving blocks 30 to move in opposite directions, which in turn drives the drive gear 26 to reverse. The system has a high degree of automation and is simple and convenient to operate.

[0048] A cleaning mechanism 48 is provided on the lower side of the mounting frame 4. A second motor is fixed inside the mounting frame 4. The output shaft end of the second motor is fixedly connected to the slag plate 14. A transfer seat 7 is fixed at the lower end of the box body 1. A transfer cavity 8 is opened inside the transfer seat 7. A slag inlet 9 communicating with the inside of the box body 1 is opened at the upper end of the transfer cavity 8. A slag discharge pipe 12 is fixed at the lower end of the transfer cavity 8. A sealing component is provided inside the slag inlet 9.

[0049] With the above structure, during operation, the magnetron sputtering coating process will generate slag on the slag plate 14. Every once in a while, the second motor can rotate the slag plate 14 180° to move the slag to the bottom of the slag plate 14, and then the cleaning mechanism 48 will clean it. At the same time, it will not affect the sputtering coating process above. The cleaned slag enters the transfer chamber 8 through the slag inlet 9. After the slag inlet 9 is sealed by the sealing component, the slag is discharged through the slag discharge pipe 12. After complete discharge, the transfer chamber 8 can be evacuated. This structure allows the machine to be cleaned without stopping, and it will not allow the vacuum state in the chamber 1 to return to atmospheric state. Cleaning is convenient and reduces labor and time costs.

[0050] The sealing assembly includes a first cavity formed in the transfer seat 7, a fourth electric telescopic rod 10 fixed inside the first cavity, and a sealing plate 11 fixed to the telescopic end of the fourth electric telescopic rod 10, the sealing plate 11 extending into the slag inlet 9.

[0051] Using the above mechanism, the sealing plate 11 is moved left and right by the fourth electric telescopic rod 10 to achieve the closing and opening of the slag inlet 9.

[0052] The slag plate 14 has a second cavity 45 at both its left and right ends. A fifth electric telescopic rod 46 is fixed inside the second cavity 45. A plug 47 is fixed at the telescopic end of the fifth electric telescopic rod 46. A plug hole 44 that mates with the plug 47 is provided on the mounting frame 4.

[0053] With the above structure, when the slag plate 14 needs to be flipped, the fifth electric telescopic rod 46 drives the insert block 47 to disengage from the insertion hole 44. After the rotation is completed, the fifth electric telescopic rod 46 drives the insert block 47 to insert into the insertion hole 44, ensuring the stability of the slag plate 14 and thus improving the effect of magnetron sputtering.

[0054] The cleaning mechanism 48 includes a movable seat 40, which is fixed to the lower side of the mounting frame 4. A third motor 41 is fixed to the end of the movable seat 40. A threaded moving rod 43 is fixed to the output shaft end of the third motor 41. A connecting block 42 is threadedly connected to the threaded moving rod 43. A cleaning seat 49 is fixed between the two connecting blocks 42. A cleaning scraper 32 is provided on the cleaning seat 49.

[0055] The cleaning seat 49 has a third cavity inside, and a fourth motor is fixed inside the third cavity. A turntable 35 is fixed to the output shaft end of the fourth motor. A drive rod 36 is rotatably connected to the front outer periphery of the turntable 35. A connecting seat 37 is rotatably connected to the other end of the drive rod 36. The connecting seat 37 is connected to the cleaning scraper 32 through a buffer mechanism.

[0056] Using the above mechanism, after the slag plate 14 is flipped, the third motor 41 drives the threaded moving rod 43 to rotate, which causes the connecting block 42 to move the cleaning seat 49. At the same time, the fourth motor is turned on, and the fourth motor turntable 35 rotates, which causes the cleaning scraper 32 to move back and forth while vibrating slightly, thus improving the cleaning effect on the slag plate 14.

[0057] The buffer mechanism includes a limiting seat 34, which is slidably connected in the third cavity. A mounting plate 33 is fixed on the limiting seat 34 and is fixedly connected to the cleaning scraper 32. A fourth cavity is opened inside the limiting seat 34. A connecting seat 37 extends into the fourth cavity and a sliding plate 38 is fixed therein. A third spring 39 is fixed between the sliding plate 38 and the fourth cavity.

[0058] With the above structure, when encountering a relatively firm cleaning scraper 32, the third spring 39 can be used to provide a mitigating effect, preventing the cleaning scraper 32 from being damaged due to excessive impact, and ensuring the normal use of the device.

[0059] The working principle of this invention is as follows: During operation, the automotive plastic part is placed on the placement platform 3 and fixed using the fixing components on the placement platform 3. Then, the first electric telescopic rod 13 drives the mounting frame 4 to rise, thereby driving the automotive plastic part to rise through the placement seat, so that the upper surface of the automotive plastic part contacts the telescopic target tube 18, compressing the corresponding telescopic target tube 18, so that the lower end of the telescopic target tube 18 adapts to the shape of the upper surface of the automotive plastic part. The third electric telescopic rod 19 drives the friction block 16 to move, so that the friction block 16 abuts against the friction plate 24, thereby positioning the telescopic target tube 18. At the same time, according to the width of the automotive plastic part, the first motor 27 drives the bidirectional threaded rod 29 to rotate, and the bidirectional threaded rod 29 drives the two moving blocks 30 to move relative to each other, closing the corresponding fixed target tube 17. Then, the first electric rod drives the automotive plastic part to descend, so that the automotive plastic part and the lower end of the telescopic target tube 18 are at a suitable distance, and then the magnetron sputtering coating is applied. This structure ensures that the distance between each position on the upper surface of the automotive plastic part and the magnetron target 2 is the same, improving the magnetron sputtering effect. Every so often, the second motor can rotate the slag plate 14 180°, moving the slag material to the bottom of the slag plate 14. Then, the third motor 41 drives the threaded moving rod 43 to rotate, causing the connecting block 42 to move the cleaning seat 49. At the same time, the fourth motor is turned on, and the fourth motor turntable 35 rotates, causing the cleaning scraper 32 to move back and forth while vibrating slightly, improving the cleaning effect on the slag plate 14 without affecting the sputtering coating operation above. The cleaned slag material enters the transfer chamber 8 through the slag inlet 9. After the slag inlet 9 is sealed by the sealing component, the slag material is discharged through the slag discharge pipe 12. After complete discharge, the transfer chamber 8 is evacuated. This structure allows the machine to be cleaned without stopping, and it also prevents the vacuum state inside the chamber 1 from returning to atmospheric state, making cleaning convenient and reducing labor and time costs.

[0060] In summary, the design of structures such as the telescopic target tube 18 and the fixed target tube 17 enhances the effect of magnetron sputtering.

[0061] The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which this invention pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of the invention or exceeding the scope defined by the appended claims.

Claims

1. A magnetron sputtering coating equipment for automotive plastic parts, comprising a housing (1), characterized in that, The box (1) has two first electric telescopic rods (13) fixed inside. The upper end of the first electric telescopic rod (13) is fixed with a mounting frame (4). A slag collection plate (14) is set between the two mounting frames (4). The upper side of the mounting frame (4) is fixed with a second electric telescopic rod (5). The upper end of the second electric telescopic rod (5) is fixed with a connecting rod (6). The other end of the connecting rod (6) is fixed with a placement platform (3). The upper end of the box (1) is provided with a magnetic target (2). The lower end of the magnetic target (2) is fixed with several fixed target tubes (17). The lower end of the fixed target tubes (17) is slidably connected with a telescopic target tube (18). The front side of the fixed target tube (17) is fixed with a first fixing block (23). A first spring (22) is fixed to the lower side of the block (23), and a second fixing block (21) is fixed to the lower end of the first spring (22). The second fixing block (21) is fixedly connected to the lower end of the telescopic target tube (18). A positioning mechanism is provided between the front side of the magnetic target (2) and the second fixing block (21). The positioning mechanism includes a support rod (20). The support rod (20) is fixed to the front side of the magnetic target (2). A vertical rod (15) is fixed to the other end of the support rod (20). A third electric telescopic rod (19) is fixed to the rear side of the vertical rod (15). A friction block (16) is fixed to the other end of the third electric telescopic rod (19). A friction plate (24) that cooperates with the friction block (16) is fixed on the second fixing block (21).

2. The magnetron sputtering coating equipment for automotive plastic parts according to claim 1, characterized in that, A valve plate is rotatably connected to the inner wall of the fixed target tube (17). A drive shaft (25) is fixed at one end of the valve plate. The drive shaft (25) extends out of the fixed target tube (17) and is fixed with a drive gear (26).

3. The magnetron sputtering coating equipment for automotive plastic parts according to claim 2, characterized in that, Two support blocks (28) are fixed on the rear side of the magnetic target (2). A bidirectional threaded rod (29) is fixed between the two support blocks (28). A moving block (30) is threaded on the two threaded parts of the bidirectional threaded rod (29). A toothed plate (31) is fixed at the lower end of the moving block (30). A first motor (27) is fixed on one of the support blocks (28). The output shaft end of the first motor (27) is fixedly connected to the bidirectional threaded rod (29).

4. The magnetron sputtering coating equipment for automotive plastic parts according to claim 1, characterized in that, A cleaning mechanism (48) is provided on the lower side of the mounting frame (4). A second motor is fixed inside the mounting frame (4). The output shaft end of the second motor is fixedly connected to the slag plate (14). A transfer seat (7) is fixed at the lower end of the box (1). A transfer cavity (8) is opened inside the transfer seat (7). A slag inlet (9) communicating with the inside of the box (1) is opened at the upper end of the transfer cavity (8). A slag discharge pipe (12) is fixed at the lower end of the transfer cavity (8). A sealing component is provided inside the slag inlet (9).

5. The magnetron sputtering coating equipment for automotive plastic parts according to claim 4, characterized in that, The sealing assembly includes a first cavity opened in the transfer seat (7), a fourth electric telescopic rod (10) is fixed inside the first cavity, and a sealing plate (11) is fixed at the telescopic end of the fourth electric telescopic rod (10), and the sealing plate (11) extends into the slag inlet (9).

6. The magnetron sputtering coating equipment for automotive plastic parts according to claim 4, characterized in that, The slag plate (14) has a second cavity (45) at both the left and right ends. A fifth electric telescopic rod (46) is fixed inside the second cavity (45). A plug (47) is fixed at the telescopic end of the fifth electric telescopic rod (46). A plug hole (44) that mates with the plug (47) is provided on the mounting frame (4).

7. The magnetron sputtering coating equipment for automotive plastic parts according to claim 4, characterized in that, The cleaning mechanism (48) includes a movable seat (40), which is fixed on the lower side of the mounting frame (4). A third motor (41) is fixed at the end of the movable seat (40). A threaded moving rod (43) is fixed at the output shaft end of the third motor (41). A connecting block (42) is threaded onto the threaded moving rod (43). A cleaning seat (49) is fixed between the two connecting blocks (42). A cleaning scraper (32) is provided on the cleaning seat (49).

8. The magnetron sputtering coating equipment for automotive plastic parts according to claim 7, characterized in that, The cleaning seat (49) has a third cavity inside, and a fourth motor is fixed inside the third cavity. A turntable (35) is fixed to the output shaft end of the fourth motor. A drive rod (36) is rotatably connected to the front outer periphery of the turntable (35). A connecting seat (37) is rotatably connected to the other end of the drive rod (36). The connecting seat (37) is connected to the cleaning scraper (32) through a buffer mechanism.

9. The magnetron sputtering coating equipment for automotive plastic parts according to claim 8, characterized in that, The buffer mechanism includes a limiting seat (34), which is slidably connected in the third cavity. A mounting plate (33) is fixed on the limiting seat (34), and the mounting plate (33) is fixedly connected to the cleaning scraper (32). A fourth cavity is opened inside the limiting seat (34), and a connecting seat (37) extends into the fourth cavity and a sliding plate (38) is fixed thereon. A third spring (39) is fixed between the sliding plate (38) and the fourth cavity.

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