Source cylinder gas supply system and source cylinder gas supply system protection methods

Abstract

This invention relates to a source bottle gas delivery system and a protection method for the source bottle gas delivery system, belonging to the field of semiconductor technology. The source bottle gas delivery system of this invention includes a source bottle, an inlet pipe, and an outlet pipe; the source bottle is used to store materials to be used; the inlet pipe is connected to the source bottle and is equipped with an inlet safety bypass; the outlet pipe is connected to the source bottle and is equipped with an outlet safety bypass; wherein, the release pressure of the inlet safety bypass is greater than the release pressure of the outlet safety bypass. The technical solution disclosed in this invention can solve the problem of bottle explosion accidents caused by excessive pressure in the source bottle due to valve aging and jamming, pipe bending or blockage by foreign objects, or human error in forgetting to open the valve in existing source bottle gas delivery systems.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a source cylinder gas supply system and a method for protecting the source cylinder gas supply system. Background Technology

[0002] In the manufacturing of integrated circuits, high-temperature oxidation furnace tubes are widely used in integrated circuit production lines. A high-temperature oxidation furnace tube is a device that performs diffusion, oxidation, or low-pressure chemical vapor deposition on silicon wafers in a high-temperature environment.

[0003] High-temperature oxidation furnace tubes require multiple gas sources. Among them, dichloroethylene can purify the environment of the high-temperature oxidation furnace tubes. However, dichloroethylene is liquid at room temperature and pressure and cannot be directly introduced into the high-temperature oxidation furnace tubes. Nitrogen gas must be used to carry dichloroethylene vapor into the high-temperature oxidation furnace tubes through the source cylinder gas supply system. When using nitrogen gas to carry dichloroethylene vapor into the high-temperature oxidation furnace tubes through the source cylinder gas supply system, there may be situations such as aging and jamming of valves in the source cylinder gas supply system, bending or blockage of pipelines by foreign objects, or forgetting to open the valves, which may lead to excessive pressure in the source cylinder and cause a cylinder explosion accident. Summary of the Invention

[0004] This invention provides a source cylinder gas delivery system and a protection method for the source cylinder gas delivery system, which can solve the problem of cylinder explosion caused by excessive pressure in the source cylinder due to aging and jamming of valves, bending or blockage of pipelines by foreign objects, or human forgetting to open the valve.

[0005] In a first aspect, embodiments of the present invention provide a source bottle gas delivery system, comprising:

[0006] Source bottles are used to store materials awaiting use.

[0007] An intake pipe is connected to the source bottle, and the intake pipe is equipped with an intake safety bypass; and

[0008] The gas outlet pipeline is connected to the source bottle, and a gas outlet safety bypass is provided on the gas outlet pipeline;

[0009] The venting pressure of the intake safety bypass is greater than that of the outlet safety bypass.

[0010] In one embodiment, the intake manifold includes:

[0011] Intake pipe;

[0012] An intake valve is located on the intake pipe at the end furthest from the source bottle;

[0013] An inlet valve is located on the inlet pipe near the source cylinder at one end; and

[0014] An intake check valve is located between the intake valve and the manual intake valve; wherein, the intake safety bypass is located between the intake valve and the intake check valve.

[0015] In one embodiment, the intake pipe includes a pressure sensor and a flow meter. The pressure sensor is located between the intake check valve and the intake valve, and the flow meter is located on the intake pipe at the end away from the source bottle.

[0016] In one embodiment, the air outlet pipeline includes:

[0017] Air outlet pipe,

[0018] An exhaust valve is located at the end of the exhaust pipe furthest from the source bottle; and

[0019] A hand valve is located on the gas outlet pipe near the source cylinder; wherein, the gas outlet safety bypass is located between the gas outlet valve and the hand valve.

[0020] In one embodiment, the intake safety bypass includes an intake safety pipe and an intake safety valve disposed on the intake safety pipe, wherein the intake safety pipe is connected between the intake valve and the intake check valve.

[0021] In one embodiment, the outlet safety bypass includes an outlet safety pipe and an outlet safety valve disposed on the outlet safety pipe, the outlet safety pipe being connected between the outlet valve and the manual valve; wherein, the pressure resistance of the source bottle is greater than the discharge pressure of the inlet safety valve, and the discharge pressure of the inlet safety valve is greater than the discharge pressure of the outlet safety valve.

[0022] In one embodiment, the source cylinder gas delivery system includes a pressure relief pipe and a pressure relief check valve disposed on the pressure relief pipe, the pressure relief pipe being connected to the inlet safety bypass and the outlet safety bypass.

[0023] Secondly, embodiments of the present invention provide a method for protecting a source cylinder gas delivery system, including:

[0024] Open the air inlet and outlet pipes to supply air;

[0025] If the working pressure of the outlet pipeline reaches the discharge pressure of the outlet safety bypass, then the pressure is discharged through the outlet safety bypass.

[0026] If the working pressure of the intake pipe reaches the release pressure of the intake safety bypass, the pressure is released through the intake safety bypass, wherein the release pressure of the intake safety bypass is greater than the release pressure of the outlet safety bypass.

[0027] In one embodiment, before depressurizing through the outlet safety bypass if the working pressure of the outlet pipeline reaches the release pressure of the outlet safety bypass, the procedure includes: detecting the working pressure of the intake pipeline through a pressure sensor; if the working pressure of the intake pipeline is greater than or equal to the alarm pressure, closing the intake valve and issuing a safety alarm.

[0028] In one embodiment, if the working pressure of the outlet pipeline reaches the discharge pressure of the outlet safety bypass, pressure is released through the outlet safety bypass. Specifically, if the working pressure of the outlet pipeline reaches the discharge pressure of the outlet safety bypass, the outlet safety valve on the outlet safety bypass is opened, and pressure is released through the pressure relief pipeline. If the working pressure of the inlet pipeline reaches the discharge pressure of the inlet safety bypass, pressure is released through the inlet safety bypass. Specifically, if the working pressure of the inlet pipeline reaches the discharge pressure of the inlet safety bypass, the inlet safety valve on the inlet safety bypass is opened, pressure is released through the pressure relief pipeline, and the inlet check valve prevents the backflow of the material to be used in the source bottle.

[0029] Compared with the prior art, the advantages of the embodiments of the present invention are as follows: by setting an intake safety bypass on the intake pipeline, pressure can be released through the intake safety bypass when the working pressure of the intake pipeline reaches the release pressure of the intake safety bypass; by setting an outlet safety bypass on the outlet pipeline, pressure can be released through the outlet safety bypass when the working pressure of the outlet pipeline reaches the release pressure of the outlet safety bypass; by making the release pressure of the intake safety bypass greater than that of the outlet safety bypass, two-stage pressure relief can be achieved, ensuring that the problem of excessive pressure in the source cylinder causing cylinder explosion accidents caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system. Attached Figure Description

[0030] The invention will now be described in more detail with reference to embodiments and the accompanying drawings.

[0031] Figure 1 This is a schematic diagram of the source bottle gas delivery system provided in an embodiment of the present invention;

[0032] Figure 2 This is a flowchart of a source cylinder gas supply system protection method provided in another embodiment of the present invention.

[0033] Figure label:

[0034] 10. Source bottle;

[0035] 20. Intake pipe; 210. Intake duct; 220. Intake valve; 230. Intake check valve; 240. Manual inlet valve; 250. Pressure sensor; 260. Flow meter;

[0036] 30. Intake safety bypass; 310. Intake safety pipeline; 320. Intake safety valve;

[0037] 40. Gas outlet pipe; 410. Gas outlet pipeline; 420. Gas outlet valve; 430. Hand valve;

[0038] 50. Gas outlet safety bypass; 510. Gas outlet safety pipeline; 520. Gas outlet safety valve;

[0039] 610. Pressure relief pipeline; 620. Pressure relief check valve. Detailed Implementation

[0040] The invention will now be further described with reference to the accompanying drawings.

[0041] In integrated circuit manufacturing, high-temperature oxidation furnace tubes are widely used in current integrated circuit production lines. A high-temperature oxidation furnace tube is a device used for diffusion, oxidation, or low-pressure chemical vapor deposition of silicon wafers in a high-temperature environment. High-temperature oxidation furnace tubes require multiple gas sources. Dichloroethylene plays a role in purifying the furnace environment. Dichloroethylene is liquid at room temperature and pressure and cannot be directly introduced into the high-temperature furnace tube. Nitrogen gas must be used to carry dichloroethylene vapor through a source cylinder gas delivery system before it can enter the high-temperature oxidation furnace tube. During use, abnormalities may occur, such as aging and jamming of valves in the source cylinder gas delivery system, pipe bending or blockage by foreign objects, or human error such as forgetting to open valves. These abnormalities can lead to excessive pressure in the source cylinder, causing cylinder explosions, or backflow of the source liquid, resulting in accidental discharge.

[0042] The existing source cylinder gas delivery system uses a single safety valve system as its safety device. This system can only guarantee a safe pressure relief function when the gas valve fails, but it cannot guarantee a safe pressure relief function when the inlet or outlet valves are blocked. Furthermore, it poses a safety hazard when certain specific faults occur, such as when the pipeline is bent and blocked, the safety valve may activate, causing the source liquid to flow back and creating a safety risk.

[0043] Example 1

[0044] like Figure 1 As shown, this embodiment provides a source bottle gas delivery system, including:

[0045] Source bottle 10 is used to store materials to be used;

[0046] The air intake pipe 20 is connected to the source bottle 10, and the air intake pipe is equipped with an air intake safety bypass 30.

[0047] The outlet pipe 40 is connected to the source bottle 10, and the outlet pipe is equipped with an outlet safety bypass 50.

[0048] Among them, the venting pressure of the intake safety bypass 30 is greater than that of the exhaust safety bypass 50.

[0049] It should be noted that the source bottle 10 can be made of carbon steel, stainless steel, alloy steel, etc., and the material to be used can be dichloroethylene, trichloroethylene, etc. This embodiment does not impose specific restrictions on the material of the source bottle 10 or the specific type of material to be used.

[0050] It should be noted that the intake safety bypass 30 is used to release pressure when the working pressure of the intake pipeline 20 reaches the release pressure of the intake safety bypass 30; the outlet safety bypass 50 is used to release pressure when the working pressure of the outlet pipeline 40 reaches the release pressure of the outlet safety bypass 50. By making the release pressure of the intake safety bypass 30 greater than that of the outlet safety bypass 50, two-stage pressure relief can be achieved. This ensures that the problem of excessive pressure in the source cylinder 10 and cylinder explosion caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system.

[0051] In some embodiments, the intake pipe 20 includes: an intake pipe 210; an intake valve 220 disposed at one end of the intake pipe 210 away from the source bottle 10; an intake manual valve 240 disposed at one end of the intake pipe 210 close to the source bottle 10; and an intake check valve 230 disposed between the intake valve 220 and the intake manual valve 240; wherein, an intake safety bypass 30 is disposed between the intake valve 220 and the intake check valve 230.

[0052] It should be noted that the material of the intake pipe 210 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the intake pipe 210 (e.g. Figure 1 The left end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source, and the other end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source. Figure 1 The right end of the gas cylinder 10 extends into the source cylinder 10 and is below the liquid level of the material to be used in the source cylinder 10, so that the gas source can carry the material to be used stored in the source cylinder 10 through the source cylinder 10. The inlet valve 220 is used to control the opening and closing of the inlet pipe 210. The inlet valve 240 is used to open or close the connection between the source cylinder 10 and the inlet pipe 210. The inlet check valve 230 is used to prevent the material to be used in the source cylinder 10 from flowing back into the inlet pipe 210.

[0053] It should be noted that the intake safety bypass 30 is located between the intake valve 220 and the intake check valve 230. On the one hand, this ensures that the intake safety bypass 30 can depressurize the intake pipe 210. On the other hand, when depressurizing through the intake safety bypass 30, the intake check valve 230 can prevent the material to be used in the source bottle 10 from flowing back into the intake safety bypass 30.

[0054] In some embodiments, the intake pipe 20 includes a pressure sensor 250 and a flow meter 260. The pressure sensor 250 is located between the intake check valve 230 and the intake valve 220, and the flow meter 260 is located on the intake pipe 210 at the end away from the source bottle 10.

[0055] It should be noted that the pressure sensor 250 can detect the working pressure in the air intake pipe 210, and the flow meter 260 is used to detect the flow rate of the gas or liquid flowing through the air intake pipe 210. The amount of mixed gas introduced into the high-temperature oxidation furnace can be calculated by the flow meter 260, which facilitates the monitoring of the flow rate of the source cylinder gas supply system and the amount of mixed gas introduced into the high-temperature oxidation furnace.

[0056] In some embodiments, the venting line 40 includes: a venting pipe 410, a venting valve 420 disposed at one end of the venting pipe 410 away from the source bottle 10; and a hand valve 430 disposed at one end of the venting pipe 410 close to the source bottle 10; wherein, a venting safety bypass 50 is disposed between the venting valve 420 and the hand valve 430.

[0057] It should be noted that the material of the air outlet pipe 410 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the air outlet pipe 410 (e.g. Figure 1 The left end of the pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube, and the other end of the outlet pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube. Figure 1 The right end of the gas cylinder 10 extends into the source bottle 10 and is above the liquid level of the material to be used in the source bottle 10, so that the gas that enters the source bottle 10 through the gas inlet pipe 210 and mixes the gas source with the material to be used in the source bottle 10 can be delivered to the equipment through the gas outlet pipe 410. The gas outlet valve 420 is used to control the opening and closing of the gas outlet pipe 410, and the gas outlet valve 430 is used to open or close the connection between the source bottle 10 and the gas outlet pipe 410.

[0058] It should be noted that the outlet safety bypass 50 is located between the outlet valve 420 and the outlet valve 430. When the working pressure of the outlet pipe 410 is greater than the discharge pressure of the outlet safety bypass 50 due to blockage of the outlet pipe 410 or failure of the outlet valve 420, the pressure can be released through the outlet safety bypass 50.

[0059] It should be noted that the inlet valve 220 and outlet valve 420 can be electric valves. The source cylinder gas delivery system includes a controller, which is connected to the inlet valve 220, outlet valve 420, flow meter 260, and pressure sensor 250. The controller can set the alarm pressure P1 of the pressure sensor 250. When the working pressure of the inlet pipe 210 exceeds the alarm pressure P1, the controller closes the inlet valve 220 and flow meter 260 and issues a safety alarm, which can be an audible alarm or a visual alarm. The alarm pressure P1 is less than the relief pressure of the outlet safety bypass 50, thus serving as a warning before danger occurs.

[0060] In some embodiments, the intake safety bypass 30 includes an intake safety pipe 310 and an intake safety valve 320 disposed on the intake safety pipe 310, wherein the intake safety pipe 310 is connected between the intake valve 220 and the intake check valve 230.

[0061] In summary, compared with the prior art, the advantages of the embodiments of the present invention are as follows: by setting an intake safety bypass 30 on the intake pipe 20, pressure can be released through the intake safety bypass 30 when the working pressure of the intake pipe 20 reaches the release pressure of the intake safety bypass 30; by setting an outlet safety bypass 50 on the outlet pipe 40, pressure can be released through the outlet safety bypass 50 when the working pressure of the outlet pipe 40 reaches the release pressure of the outlet safety bypass 50; by making the release pressure of the intake safety bypass 30 greater than the release pressure of the outlet safety bypass 50, two-stage pressure relief can be achieved, ensuring that the problem of excessive pressure in the source cylinder 10 and causing cylinder explosion accidents caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system.

[0062] Example 2

[0063] like Figure 1 As shown, this embodiment provides a source bottle gas delivery system, including:

[0064] Source bottle 10 is used to store materials to be used;

[0065] The air intake pipe 20 is connected to the source bottle 10, and the air intake pipe is equipped with an air intake safety bypass 30.

[0066] The outlet pipe 40 is connected to the source bottle 10, and the outlet pipe is equipped with an outlet safety bypass 50.

[0067] Among them, the venting pressure of the intake safety bypass 30 is greater than that of the exhaust safety bypass 50.

[0068] It should be noted that the source bottle 10 can be made of carbon steel, stainless steel, alloy steel, etc., and the material to be used can be dichloroethylene, trichloroethylene, etc. This embodiment does not impose specific restrictions on the material of the source bottle 10 or the specific type of material to be used.

[0069] It should be noted that the intake safety bypass 30 is used to release pressure when the working pressure of the intake pipeline 20 reaches the release pressure of the intake safety bypass 30; the outlet safety bypass 50 is used to release pressure when the working pressure of the outlet pipeline 40 reaches the release pressure of the outlet safety bypass 50. By making the release pressure of the intake safety bypass 30 greater than that of the outlet safety bypass 50, two-stage pressure relief can be achieved. This ensures that the problem of excessive pressure in the source cylinder 10 and cylinder explosion caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system.

[0070] In some embodiments, the intake pipe 20 includes: an intake pipe 210; an intake valve 220 disposed at one end of the intake pipe 210 away from the source bottle 10; an intake manual valve 240 disposed at one end of the intake pipe 210 close to the source bottle 10; and an intake check valve 230 disposed between the intake valve 220 and the intake manual valve 240; wherein, an intake safety bypass 30 is disposed between the intake valve 220 and the intake check valve 230.

[0071] It should be noted that the material of the intake pipe 210 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the intake pipe 210 (e.g. Figure 1 The left end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source, and the other end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source. Figure 1 The right end of the gas cylinder 10 extends into the source cylinder 10 and is below the liquid level of the material to be used in the source cylinder 10, so that the gas source can carry the material to be used stored in the source cylinder 10 through the source cylinder 10. The inlet valve 220 is used to control the opening and closing of the inlet pipe 210. The inlet valve 240 is used to open or close the connection between the source cylinder 10 and the inlet pipe 210. The inlet check valve 230 is used to prevent the material to be used in the source cylinder 10 from flowing back into the inlet pipe 210.

[0072] It should be noted that the intake safety bypass 30 is located between the intake valve 220 and the intake check valve 230. On the one hand, this ensures that the intake safety bypass 30 can depressurize the intake pipe 210. On the other hand, when depressurizing through the intake safety bypass 30, the intake check valve 230 can prevent the material to be used in the source bottle 10 from flowing back into the intake safety bypass 30.

[0073] In some embodiments, the intake pipe 20 includes a pressure sensor 250 and a flow meter 260. The pressure sensor 250 is located between the intake check valve 230 and the intake valve 220, and the flow meter 260 is located on the intake pipe 210 at the end away from the source bottle 10.

[0074] It should be noted that the pressure sensor 250 can detect the working pressure in the air intake pipe 210, and the flow meter 260 is used to detect the flow rate of the gas or liquid flowing through the air intake pipe 210. The amount of mixed gas introduced into the high-temperature oxidation furnace can be calculated by the flow meter 260, which facilitates the monitoring of the flow rate of the source cylinder gas supply system and the amount of mixed gas introduced into the high-temperature oxidation furnace.

[0075] In some embodiments, the venting line 40 includes: a venting pipe 410, a venting valve 420 disposed at one end of the venting pipe 410 away from the source bottle 10; and a hand valve 430 disposed at one end of the venting pipe 410 close to the source bottle 10; wherein, a venting safety bypass 50 is disposed between the venting valve 420 and the hand valve 430.

[0076] It should be noted that the material of the air outlet pipe 410 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the air outlet pipe 410 (e.g. Figure 1 The left end of the pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube, and the other end of the outlet pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube. Figure 1 The right end of the gas cylinder 10 extends into the source bottle 10 and is above the liquid level of the material to be used in the source bottle 10, so that the gas that enters the source bottle 10 through the gas inlet pipe 210 and mixes the gas source with the material to be used in the source bottle 10 can be delivered to the equipment through the gas outlet pipe 410. The gas outlet valve 420 is used to control the opening and closing of the gas outlet pipe 410, and the gas outlet valve 430 is used to open or close the connection between the source bottle 10 and the gas outlet pipe 410.

[0077] It should be noted that the outlet safety bypass 50 is located between the outlet valve 420 and the outlet valve 430. When the working pressure of the outlet pipe 410 is greater than the discharge pressure of the outlet safety bypass 50 due to blockage of the outlet pipe 410 or failure of the outlet valve 420, the pressure can be released through the outlet safety bypass 50.

[0078] It should be noted that the inlet valve 220 and outlet valve 420 can be electric valves. The source cylinder gas delivery system includes a controller, which is connected to the inlet valve 220, outlet valve 420, flow meter 260, and pressure sensor 250. The controller can set the alarm pressure P1 of the pressure sensor 250. When the working pressure of the inlet pipe 210 exceeds the alarm pressure P1, the controller closes the inlet valve 220 and flow meter 260 and issues a safety alarm, which can be an audible alarm or a visual alarm. The alarm pressure P1 is less than the relief pressure of the outlet safety bypass 50, thus serving as a warning before danger occurs.

[0079] In some embodiments, the intake safety bypass 30 includes an intake safety pipe 310 and an intake safety valve 320 disposed on the intake safety pipe 310, wherein the intake safety pipe 310 is connected between the intake valve 220 and the intake check valve 230.

[0080] In some embodiments, the exhaust safety bypass 50 includes an exhaust safety pipe 510 and an exhaust safety valve 520 disposed on the exhaust safety pipe 510. The exhaust safety pipe 510 is connected between the exhaust valve 420 and the manual valve 430. The pressure resistance value P0 of the source bottle 10 is greater than the discharge pressure P2 of the inlet safety valve 320, and the discharge pressure P2 of the inlet safety valve 320 is greater than the discharge pressure P3 of the exhaust safety valve 520.

[0081] It should be noted that the intake safety valve 320 provides a safety pressure relief function for the intake safety bypass 30, and the outlet safety valve 520 provides a safety pressure relief function for the outlet safety bypass 50. By setting the alarm pressure P1 of the pressure sensor 250, the amount of gas supplied to the source cylinder gas delivery system can be adjusted and the working pressure of the source cylinder gas delivery system can be reduced without pressure relief through the intake safety bypass 30 and the outlet safety bypass 50. If the working pressure of the outlet pipe 410 increases due to a malfunction of the outlet valve 420 or a blockage of the outlet pipe 410, the outlet pipe 410 can be depressurized through the outlet safety bypass 50. If the working pressure of the intake pipe 210 increases due to a malfunction of the intake valve 240 or a blockage of the intake pipe 210, the intake safety bypass 30 can be used to depressurize the pipe.

[0082] It should be noted that in actual use, the alarm pressure P1 of pressure sensor 250 can be equal to the discharge pressure P2 / 2 of inlet safety valve 320, the discharge pressure P2 of inlet safety valve 320 can be equal to the pressure resistance value P0 of source bottle 10 * 3 / 4, and the discharge pressure P3 of outlet safety valve 520 can be equal to (alarm pressure P1 of pressure sensor 250 + discharge pressure P of inlet safety valve 320) / 2. The specific proportional relationship of the values ​​can be adjusted according to actual needs.

[0083] In summary, compared with the prior art, the advantages of the embodiments of the present invention are as follows: by setting an intake safety bypass 30 on the intake pipe 20, pressure can be released through the intake safety bypass 30 when the working pressure of the intake pipe 20 reaches the release pressure of the intake safety bypass 30; by setting an outlet safety bypass 50 on the outlet pipe 40, pressure can be released through the outlet safety bypass 50 when the working pressure of the outlet pipe 40 reaches the release pressure of the outlet safety bypass 50; by making the release pressure of the intake safety bypass 30 greater than the release pressure of the outlet safety bypass 50, two-stage pressure relief can be achieved, ensuring that the problem of excessive pressure in the source cylinder 10 and causing cylinder explosion accidents caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system.

[0084] Example 3

[0085] like Figure 1 As shown, this embodiment provides a source bottle gas delivery system, including:

[0086] Source bottle 10 is used to store materials to be used;

[0087] The air intake pipe 20 is connected to the source bottle 10, and the air intake pipe is equipped with an air intake safety bypass 30.

[0088] The outlet pipe 40 is connected to the source bottle 10, and the outlet pipe is equipped with an outlet safety bypass 50.

[0089] Among them, the venting pressure of the intake safety bypass 30 is greater than that of the exhaust safety bypass 50.

[0090] It should be noted that the source bottle 10 can be made of carbon steel, stainless steel, alloy steel, etc., and the material to be used can be dichloroethylene, trichloroethylene, etc. This embodiment does not impose specific restrictions on the material of the source bottle 10 or the specific type of material to be used.

[0091] It should be noted that the intake safety bypass 30 is used to release pressure when the working pressure of the intake pipeline 20 reaches the release pressure of the intake safety bypass 30; the outlet safety bypass 50 is used to release pressure when the working pressure of the outlet pipeline 40 reaches the release pressure of the outlet safety bypass 50. By making the release pressure of the intake safety bypass 30 greater than that of the outlet safety bypass 50, two-stage pressure relief can be achieved. This ensures that the problem of excessive pressure in the source cylinder 10 and cylinder explosion caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system.

[0092] In some embodiments, the intake pipe 20 includes: an intake pipe 210; an intake valve 220 disposed at one end of the intake pipe 210 away from the source bottle 10; an intake manual valve 240 disposed at one end of the intake pipe 210 close to the source bottle 10; and an intake check valve 230 disposed between the intake valve 220 and the intake manual valve 240; wherein, an intake safety bypass 30 is disposed between the intake valve 220 and the intake check valve 230.

[0093] It should be noted that the material of the intake pipe 210 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the intake pipe 210 (e.g. Figure 1 The left end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source, and the other end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source. Figure 1 The right end of the gas cylinder 10 extends into the source cylinder 10 and is below the liquid level of the material to be used in the source cylinder 10, so that the gas source can carry the material to be used stored in the source cylinder 10 through the source cylinder 10. The inlet valve 220 is used to control the opening and closing of the inlet pipe 210. The inlet valve 240 is used to open or close the connection between the source cylinder 10 and the inlet pipe 210. The inlet check valve 230 is used to prevent the material to be used in the source cylinder 10 from flowing back into the inlet pipe 210.

[0094] It should be noted that the intake safety bypass 30 is located between the intake valve 220 and the intake check valve 230. On the one hand, this ensures that the intake safety bypass 30 can depressurize the intake pipe 210. On the other hand, when depressurizing through the intake safety bypass 30, the intake check valve 230 can prevent the material to be used in the source bottle 10 from flowing back into the intake safety bypass 30.

[0095] In some embodiments, the intake pipe 20 includes a pressure sensor 250 and a flow meter 260. The pressure sensor 250 is located between the intake check valve 230 and the intake valve 220, and the flow meter 260 is located on the intake pipe 210 at the end away from the source bottle 10.

[0096] It should be noted that the pressure sensor 250 can detect the working pressure in the air intake pipe 210, and the flow meter 260 is used to detect the flow rate of the gas or liquid flowing through the air intake pipe 210. The amount of mixed gas introduced into the high-temperature oxidation furnace can be calculated by the flow meter 260, which facilitates the monitoring of the flow rate of the source cylinder gas supply system and the amount of mixed gas introduced into the high-temperature oxidation furnace.

[0097] In some embodiments, the venting line 40 includes: a venting pipe 410, a venting valve 420 disposed at one end of the venting pipe 410 away from the source bottle 10; and a hand valve 430 disposed at one end of the venting pipe 410 close to the source bottle 10; wherein, a venting safety bypass 50 is disposed between the venting valve 420 and the hand valve 430.

[0098] It should be noted that the material of the air outlet pipe 410 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the air outlet pipe 410 (e.g. Figure 1 The left end of the pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube, and the other end of the outlet pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube. Figure 1 The right end of the gas cylinder 10 extends into the source bottle 10 and is above the liquid level of the material to be used in the source bottle 10, so that the gas that enters the source bottle 10 through the gas inlet pipe 210 and mixes the gas source with the material to be used in the source bottle 10 can be delivered to the equipment through the gas outlet pipe 410. The gas outlet valve 420 is used to control the opening and closing of the gas outlet pipe 410, and the gas outlet valve 430 is used to open or close the connection between the source bottle 10 and the gas outlet pipe 410.

[0099] It should be noted that the outlet safety bypass 50 is located between the outlet valve 420 and the outlet valve 430. When the working pressure of the outlet pipe 410 is greater than the discharge pressure of the outlet safety bypass 50 due to blockage of the outlet pipe 410 or failure of the outlet valve 420, the pressure can be released through the outlet safety bypass 50.

[0100] It should be noted that the inlet valve 220 and outlet valve 420 can be electric valves. The source cylinder gas delivery system includes a controller, which is connected to the inlet valve 220, outlet valve 420, flow meter 260, and pressure sensor 250. The controller can set the alarm pressure P1 of the pressure sensor 250. When the working pressure of the inlet pipe 210 exceeds the alarm pressure P1, the controller closes the inlet valve 220 and flow meter 260 and issues a safety alarm, which can be an audible alarm or a visual alarm. The alarm pressure P1 is less than the relief pressure of the outlet safety bypass 50, thus serving as a warning before danger occurs.

[0101] In some embodiments, the intake safety bypass 30 includes an intake safety pipe 310 and an intake safety valve 320 disposed on the intake safety pipe 310, wherein the intake safety pipe 310 is connected between the intake valve 220 and the intake check valve 230.

[0102] In some embodiments, the exhaust safety bypass 50 includes an exhaust safety pipe 510 and an exhaust safety valve 520 disposed on the exhaust safety pipe 510. The exhaust safety pipe 510 is connected between the exhaust valve 420 and the manual valve 430. The pressure resistance value P0 of the source bottle 10 is greater than the discharge pressure P2 of the inlet safety valve 320, and the discharge pressure P2 of the inlet safety valve 320 is greater than the discharge pressure P3 of the exhaust safety valve 520.

[0103] It should be noted that the intake safety valve 320 provides a safety pressure relief function for the intake safety bypass 30, and the outlet safety valve 520 provides a safety pressure relief function for the outlet safety bypass 50. By setting the alarm pressure P1 of the pressure sensor 250, the amount of gas supplied to the source cylinder gas delivery system can be adjusted and the working pressure of the source cylinder gas delivery system can be reduced without pressure relief through the intake safety bypass 30 and the outlet safety bypass 50. If the working pressure of the outlet pipe 410 increases due to a malfunction of the outlet valve 420 or a blockage of the outlet pipe 410, the outlet pipe 410 can be depressurized through the outlet safety bypass 50. If the working pressure of the intake pipe 210 increases due to a malfunction of the intake valve 240 or a blockage of the intake pipe 210, the intake safety bypass 30 can be used to depressurize the pipe.

[0104] It should be noted that in actual use, the alarm pressure P1 of pressure sensor 250 can be equal to the discharge pressure P2 / 2 of inlet safety valve 320, the discharge pressure P2 of inlet safety valve 320 can be equal to the pressure resistance value P0 of source bottle 10 * 3 / 4, and the discharge pressure P3 of outlet safety valve 520 can be equal to (alarm pressure P1 of pressure sensor 250 + discharge pressure P of inlet safety valve 320) / 2. The specific proportional relationship of the values ​​can be adjusted according to actual needs.

[0105] In some embodiments, the source cylinder gas delivery system includes a pressure relief pipe 610 and a pressure relief check valve 620 disposed on the pressure relief pipe 610. The pressure relief pipe 610 is connected to the inlet safety bypass 30 and the outlet safety bypass 50.

[0106] It should be noted that one end of the pressure relief pipe 610 is connected to the inlet safety pipe 310 and the outlet safety pipe 510, and the other end of the pressure relief pipe 610 is connected to the pressure relief device. This can reduce the length of the pressure relief pipe 610 and save materials. The pressure relief check valve 620 can further prevent the material to be used in the source bottle 10 from flowing back into the pressure relief device.

[0107] In summary, compared with the prior art, the advantages of the embodiments of the present invention are as follows: by setting an intake safety bypass 30 on the intake pipe 20, pressure can be released through the intake safety bypass 30 when the working pressure of the intake pipe 20 reaches the release pressure of the intake safety bypass 30; by setting an outlet safety bypass 50 on the outlet pipe 40, pressure can be released through the outlet safety bypass 50 when the working pressure of the outlet pipe 40 reaches the release pressure of the outlet safety bypass 50; by making the release pressure of the intake safety bypass 30 greater than the release pressure of the outlet safety bypass 50, two-stage pressure relief can be achieved, ensuring that the problem of excessive pressure in the source cylinder 10 and causing cylinder explosion accidents caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system.

[0108] Example 4

[0109] like Figure 2 As shown, this embodiment provides a method for protecting a source cylinder gas delivery system, including:

[0110] S101: Open the intake pipe 20 and the exhaust pipe 40 to supply air;

[0111] It should be noted that, in order to supply gas through the source bottle gas supply system, the inlet pipe 20 and the outlet pipe 40 must be opened first. The source bottle gas supply system includes: a source bottle 10, used to store materials to be used; an inlet pipe 20, connected to the source bottle 10, with an inlet safety bypass 30 on the inlet pipe; and an outlet pipe 40, connected to the source bottle 10, with an outlet safety bypass 50 on the outlet pipe. The release pressure of the inlet safety bypass 30 is greater than the release pressure of the outlet safety bypass 50.

[0112] It should be noted that the source bottle 10 can be made of carbon steel, stainless steel, alloy steel, etc., and the material to be used can be dichloroethylene, trichloroethylene, etc. This embodiment does not impose specific restrictions on the material of the source bottle 10 or the specific type of the material to be used.

[0113] It should be noted that the intake safety bypass 30 is used to release pressure through the intake safety bypass 30 when the working pressure of the intake pipeline 20 reaches the release pressure of the intake safety bypass 30; the outlet safety bypass 50 is used to release pressure through the outlet safety bypass 50 when the working pressure of the outlet pipeline 40 reaches the release pressure of the outlet safety bypass 50. By making the release pressure of the intake safety bypass 30 greater than the release pressure of the outlet safety bypass 50, two-stage pressure relief can be achieved, ensuring that the problem of excessive pressure in the source cylinder 10 and causing cylinder explosion accidents caused by valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in the existing source cylinder gas delivery system is solved, thereby improving the safety of the source cylinder gas delivery system.

[0114] It should be noted that the air intake pipeline 20 includes: an air intake pipe 210; an air intake valve 220 located at the end of the air intake pipe 210 away from the source bottle 10; a manual air intake valve 240 located at the end of the air intake pipe 210 close to the source bottle 10; and an air intake check valve 230 located between the air intake valve 220 and the manual air intake valve 240; wherein, the air intake safety bypass 30 is located between the air intake valve 220 and the air intake check valve 230.

[0115] It should be noted that the material of the intake pipe 210 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the intake pipe 210 (e.g. Figure 1 The left end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source, and the other end of the inlet pipe 210 is connected to a gas source, such as a nitrogen gas source. Figure 1 The right end of the gas cylinder 10 extends into the source cylinder 10 and is below the liquid level of the material to be used in the source cylinder 10, so that the gas source can carry the material to be used stored in the source cylinder 10 through the source cylinder 10. The inlet valve 220 is used to control the opening and closing of the inlet pipe 210. The inlet valve 240 is used to open or close the connection between the source cylinder 10 and the inlet pipe 210. The inlet check valve 230 is used to prevent the material to be used in the source cylinder 10 from flowing back into the inlet pipe 210.

[0116] It should be noted that the intake safety bypass 30 is located between the intake valve 220 and the intake check valve 230. On the one hand, this ensures that the intake safety bypass 30 can depressurize the intake pipe 210. On the other hand, when depressurizing through the intake safety bypass 30, the intake check valve 230 can prevent the material to be used in the source bottle 10 from flowing back into the intake safety bypass 30.

[0117] It should be noted that the intake pipe 20 includes a pressure sensor 250 and a flow meter 260. The pressure sensor 250 is located between the intake check valve 230 and the intake valve 220, and the flow meter 260 is located on the intake pipe 210 at the end away from the source bottle 10.

[0118] It should be noted that the pressure sensor 250 can detect the working pressure in the air intake pipe 210, and the flow meter 260 is used to detect the flow rate of the gas or liquid flowing through the air intake pipe 210. The amount of mixed gas introduced into the high-temperature oxidation furnace can be calculated by the flow meter 260, which facilitates the monitoring of the flow rate of the source cylinder gas supply system and the amount of mixed gas introduced into the high-temperature oxidation furnace.

[0119] S102: If the working pressure of the outlet pipeline 40 reaches the discharge pressure of the outlet safety bypass 50, then the pressure is discharged through the outlet safety bypass 50.

[0120] It should be noted that the gas outlet pipeline 40 includes: a gas outlet pipe 410, a gas outlet valve 420, which is located at the end of the gas outlet pipe 410 away from the source bottle 10; and a manual valve 430, which is located at the end of the gas outlet pipe 410 close to the source bottle 10; wherein, the gas outlet safety bypass 50 is located between the gas outlet valve 420 and the manual valve 430.

[0121] It should be noted that the material of the air outlet pipe 410 can be carbon steel, stainless steel, alloy steel, plastic, etc., and one end of the air outlet pipe 410 (e.g. Figure 1 The left end of the pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube, and the other end of the outlet pipe 410 is connected to the equipment being used, such as a high-temperature oxidation furnace tube. Figure 1The right end of the gas cylinder 10 extends into the source bottle 10 and is above the liquid level of the material to be used in the source bottle 10, so that the gas that enters the source bottle 10 through the gas inlet pipe 210 and mixes the gas source with the material to be used in the source bottle 10 can be delivered to the equipment through the gas outlet pipe 410. The gas outlet valve 420 is used to control the opening and closing of the gas outlet pipe 410, and the gas outlet valve 430 is used to open or close the connection between the source bottle 10 and the gas outlet pipe 410.

[0122] It should be noted that the outlet safety bypass 50 is located between the outlet valve 420 and the outlet valve 430. When the working pressure of the outlet pipe 410 is greater than the discharge pressure of the outlet safety bypass 50 due to blockage of the outlet pipe 410 or failure of the outlet valve 420, the pressure can be released through the outlet safety bypass 50.

[0123] In some embodiments, before depressurizing through the outlet safety bypass 50 if the working pressure of the outlet pipeline 40 reaches the release pressure of the outlet safety bypass 50, the procedure includes: detecting the working pressure of the inlet pipeline 20 through the pressure sensor 250; if the working pressure of the inlet pipeline 20 is greater than or equal to the alarm pressure, closing the inlet valve 220 and issuing a safety alarm.

[0124] It should be noted that the inlet valve 220 and outlet valve 420 can be electric valves. The source cylinder gas delivery system includes a controller, which is connected to the inlet valve 220, outlet valve 420, flow meter 260, and pressure sensor 250. The controller can set the alarm pressure P1 of the pressure sensor 250. When the working pressure of the inlet pipe 210 exceeds the alarm pressure P1, the controller closes the inlet valve 220 and flow meter 260 and issues a safety alarm, which can be an audible alarm or a visual alarm. The alarm pressure P1 is less than the relief pressure of the outlet safety bypass 50, thus serving as a warning before danger occurs.

[0125] It should be noted that the intake safety bypass 30 includes an intake safety pipe 310 and an intake safety valve 320 disposed on the intake safety pipe 310. The intake safety pipe 310 is connected between the intake valve 220 and the intake check valve 230.

[0126] It should be noted that the outlet safety bypass 50 includes an outlet safety pipe 510 and an outlet safety valve 520 disposed on the outlet safety pipe 510. The outlet safety pipe 510 is connected between the outlet valve 420 and the outlet valve 430. The pressure resistance value P0 of the source bottle 10 is greater than the discharge pressure P2 of the inlet safety valve 320, and the discharge pressure P2 of the inlet safety valve 320 is greater than the discharge pressure P3 of the outlet safety valve 520.

[0127] It should be noted that the intake safety valve 320 provides a safety pressure relief function for the intake safety bypass 30, and the outlet safety valve 520 provides a safety pressure relief function for the outlet safety bypass 50. By setting the alarm pressure P1 of the pressure sensor 250, the amount of gas supplied to the source cylinder gas delivery system can be adjusted and the working pressure of the source cylinder gas delivery system can be reduced without pressure relief through the intake safety bypass 30 and the outlet safety bypass 50. If the working pressure of the outlet pipe 410 increases due to a malfunction of the outlet valve 420 or a blockage of the outlet pipe 410, the outlet pipe 410 can be depressurized through the outlet safety bypass 50. If the working pressure of the intake pipe 210 increases due to a malfunction of the intake valve 240 or a blockage of the intake pipe 210, the intake safety bypass 30 can be used to depressurize the pipe.

[0128] It should be noted that in actual use, the alarm pressure P1 of pressure sensor 250 can be equal to the discharge pressure P2 / 2 of inlet safety valve 320, the discharge pressure P2 of inlet safety valve 320 can be equal to the pressure resistance value P0 of source bottle 10 * 3 / 4, and the discharge pressure P3 of outlet safety valve 520 can be equal to (alarm pressure P1 of pressure sensor 250 + discharge pressure P of inlet safety valve 320) / 2. The specific proportional relationship of the values ​​can be adjusted according to actual needs.

[0129] S103: If the working pressure of the intake pipe 20 reaches the discharge pressure of the intake safety bypass 30, then the pressure is discharged through the intake safety bypass 30, wherein the discharge pressure of the intake safety bypass 30 is greater than the discharge pressure of the outlet safety bypass 50.

[0130] In some embodiments, if the working pressure of the outlet pipeline 40 reaches the discharge pressure of the outlet safety bypass 50, pressure is released through the outlet safety bypass 50. Specifically, if the working pressure of the outlet pipeline 40 reaches the discharge pressure of the outlet safety bypass 50, the outlet safety valve 520 on the outlet safety bypass 50 is opened, and pressure is released through the pressure relief pipeline 610. If the working pressure of the inlet pipeline 20 reaches the discharge pressure of the inlet safety bypass 30, pressure is released through the inlet safety bypass 30. Specifically, if the working pressure of the inlet pipeline 20 reaches the discharge pressure of the inlet safety bypass 30, the inlet safety valve 320 on the inlet safety bypass 30 is opened, pressure is released through the pressure relief pipeline 610, and the inlet check valve 230 is used to prevent the backflow of the material to be used in the source bottle 10.

[0131] In summary, this embodiment delivers gas by opening the inlet pipe 20 and the outlet pipe 40. If the working pressure of the outlet pipe 40 reaches the discharge pressure of the outlet safety bypass 50, pressure is released through the outlet safety bypass 50. If the working pressure of the inlet pipe 20 reaches the discharge pressure of the inlet safety bypass 30, pressure is released through the inlet safety bypass 30. The discharge pressure of the inlet safety bypass 30 is greater than the discharge pressure of the outlet safety bypass 50, thus achieving two-stage pressure relief. This effectively solves the problem of excessive pressure in the source cylinder 10 causing cylinder explosions due to valve aging and jamming, pipe bending or blockage by foreign objects, or human forgetting to open the valve in existing source cylinder gas delivery systems, thereby improving the safety of the source cylinder gas delivery system.

[0132] Although the invention has been described with reference to preferred embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of the invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A source bottle gas delivery system, characterized in that, include: Source bottles are used to store materials awaiting use. An intake pipe is connected to the source bottle, and an intake safety bypass is provided on the intake pipe; as well as The gas outlet pipeline is connected to the source bottle, and a gas outlet safety bypass is provided on the gas outlet pipeline; Wherein, the venting pressure of the intake safety bypass is greater than the venting pressure of the outlet safety bypass; The intake pipe includes: Intake pipe; An intake valve is located on the intake pipe at the end furthest from the source bottle; An inlet valve is located on the inlet pipe near the source cylinder at one end; and An intake check valve is provided between the intake valve and the manual intake valve; The intake safety bypass is located between the intake valve and the intake check valve; The air outlet pipeline includes: Air outlet pipe, An exhaust valve is located at the end of the exhaust pipe furthest from the source bottle; and A hand valve is located on the gas outlet pipe at one end near the source bottle; The air outlet safety bypass is located between the air outlet valve and the hand valve.

2. The source bottle gas delivery system according to claim 1, characterized in that, The intake pipeline includes a pressure sensor and a flow meter. The pressure sensor is located between the intake check valve and the intake valve, and the flow meter is located on the intake pipeline at the end away from the source bottle.

3. The source bottle gas delivery system according to claim 1, characterized in that, The intake safety bypass includes an intake safety pipe and an intake safety valve disposed on the intake safety pipe, wherein the intake safety pipe is connected between the intake valve and the intake check valve.

4. The source bottle gas delivery system according to claim 3, characterized in that, The air outlet safety bypass includes an air outlet safety pipe and an air outlet safety valve installed on the air outlet safety pipe, wherein the air outlet safety pipe is connected between the air outlet valve and the manual valve; Wherein, the pressure resistance of the source bottle is greater than the discharge pressure of the inlet safety valve, and the discharge pressure of the inlet safety valve is greater than the discharge pressure of the outlet safety valve.

5. The source bottle gas delivery system according to any one of claims 1-4, characterized in that, The source cylinder gas delivery system includes a pressure relief pipe and a pressure relief check valve installed on the pressure relief pipe. The pressure relief pipe is connected to the inlet safety bypass and the outlet safety bypass.

6. A method for protecting a source cylinder gas supply system, employing the source cylinder gas supply system as described in claim 5, characterized in that, include: Open the air inlet and outlet pipes to supply air; If the working pressure of the outlet pipeline reaches the discharge pressure of the outlet safety bypass, then the pressure is discharged through the outlet safety bypass. If the working pressure of the intake pipe reaches the release pressure of the intake safety bypass, the pressure is released through the intake safety bypass, wherein the release pressure of the intake safety bypass is greater than the release pressure of the outlet safety bypass.

7. The source cylinder gas supply system protection method according to claim 6, characterized in that, If the working pressure of the outlet pipeline reaches the discharge pressure of the outlet safety bypass, then before depressurizing through the outlet safety bypass, the following steps are taken: The working pressure of the intake pipe is detected by a pressure sensor; If the working pressure of the intake pipe is greater than or equal to the alarm pressure, the intake valve will be closed and a safety alarm will be issued.

8. The source cylinder gas supply system protection method according to claim 7, characterized in that, If the working pressure of the outlet pipeline reaches the discharge pressure of the outlet safety bypass, then the pressure is discharged through the outlet safety bypass, specifically as follows: If the working pressure of the outlet pipeline reaches the discharge pressure of the outlet safety bypass, then the outlet safety valve on the outlet safety bypass is opened, and the pressure is discharged through the pressure relief pipeline. If the working pressure of the intake pipe reaches the release pressure of the intake safety bypass, then the pressure is released through the intake safety bypass, specifically as follows: If the working pressure of the intake pipeline reaches the release pressure of the intake safety bypass, the intake safety valve on the intake safety bypass is opened, the pressure is released through the pressure relief pipeline, and the backflow of the material to be used in the source bottle is prevented through the intake one-way valve.

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