一种基于微波谐振腔的大气压低温等离子体射流诊断装置
By using a diagnostic device based on a microwave resonant cavity and utilizing the frequency and Q-value variations of the TE111 mode, the stability and instability issues of plasma electron density diagnosis were resolved, enabling comprehensive diagnosis of plasma electron density.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HARBIN INST OF TECH
- Filing Date
- 2024-01-03
- Publication Date
- 2026-07-17
AI Technical Summary
Existing plasma electron density diagnostic methods cannot effectively diagnose electron density distribution under stable and unstable discharge conditions, especially in free space where external factors have a significant impact.
A diagnostic device based on a microwave resonant cavity is used. By installing radiating and receiving antennas at both ends of a hollow metal cylinder, a closed cylindrical resonant cavity is formed. The changes in the frequency and Q value of the TE111 mode are recorded by a detector. Combined with perturbation theory and the expression of plasma dielectric constant, the plasma electron density can be diagnosed.
It can accurately diagnose plasma electron density under stable and unstable discharge conditions, and can also diagnose the electron density distribution of atmospheric pressure cryogenic plasma jets, thus improving the accuracy and comprehensiveness of the diagnosis.
Smart Images
Figure CN117835513B_ABST