一种线性蒸发源装置
By incorporating heating wires and nozzles into the linear evaporation source device, the problem of uneven evaporation caused by inconsistent crucible heating rates was solved, achieving uniform distribution of evaporation materials and improving production efficiency.
CN117845170BActive Publication Date: 2026-07-17SHENZHEN INST OF ADVANCED TECH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENZHEN INST OF ADVANCED TECH
- Filing Date
- 2023-11-28
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Existing linear evaporation source devices have inconsistent crucible heating rates during heating or cooling, resulting in uneven evaporation thickness, which increases sample defect rate and production cost.
Method used
A linear evaporation source device is designed. By setting a heating wire between the upper and lower support components, the first and second nozzles are used to spray the evaporation material, achieving uniform distribution of the evaporation material. The upper and lower parts are detachable, making it easy to replace the crucible and adjust the evaporation rate.
Benefits of technology
This improved the uniformity and efficiency of the vapor deposition process, saved on raw material and equipment costs, and increased production efficiency.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN117845170B_ABST
Abstract
本发明提出一种线性蒸发源装置，具体涉及于蒸镀设备技术领域,所述线性蒸发源装置包括加热装置本体和加热丝，其中：所述加热装置本体包括上承载件和管壁，所述上承载件顶部设有多个连通孔，所述连通孔包括多个第一连通孔和多个第二连通孔，所述连通孔顶部一侧设有多个喷嘴，所述喷嘴包括多个第一喷嘴和多个第二喷嘴，所述第一喷嘴、所述第二喷嘴分别位于所述第一连通孔顶部、所述第二连通孔顶部并与所述上承载件固定连接；所述加热丝横向设置于所述上承载件和所述下承载件之间，所述下承载件和所述加热丝之间还设有坩埚，本发明通过改变蒸发源和加热丝的位置，并调整坩埚的分布使各个坩埚的加热速率保持一致，提高了镀膜时的均匀程度。
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