Carrying device and detection apparatus

Abstract

This invention discloses a support device, comprising: a base plate; a top plate disposed opposite to the base plate; a drive motor fixed to the base plate with its output end connected to the top plate; and a spring sheet stacked between the base plate and the top plate, adjacent to the drive motor. The spring sheet has opposing first and second fixing regions. The top plate is fixedly connected to the first fixing region, and the base plate is connected to the second fixing region. The orthographic projection positions of the first and second fixing regions on the base plate are different. The support device disclosed in this invention can guide a voice coil motor.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and more particularly to a carrier device and a testing equipment. Background Technology

[0002] In semiconductor testing technologies, such as wafer inspection equipment, a support device is typically required to hold the wafer awaiting inspection. During the inspection process, the support device needs to be controlled to move and rotate the wafer in various spatial directions. Sometimes, the support angle also needs to be adjusted to allow for adjustment of the wafer from different angles. In existing technologies, when the support device uses a voice coil motor to move up and down, it causes the platform holding the sample to shift, resulting in inaccurate inspection results due to wafer position misalignment.

[0003] Therefore, there is an urgent need to provide a solution to address the problem of load-bearing device misalignment caused by the aforementioned voice coil motor. Summary of the Invention

[0004] Therefore, in order to overcome at least some of the defects in the prior art, embodiments of the present invention provide a carrier device and a detection device that can guide the voice coil motor and reduce the deviation of the carrier device.

[0005] Specifically, in one embodiment of the present invention, a supporting device is provided, comprising: a base plate; a top plate disposed opposite to the base plate; a drive motor fixed on the base plate and the output end of the drive motor connected to the top plate; and a spring sheet stacked between the base plate and the top plate and disposed adjacent to the drive motor; the spring sheet having a first fixing region and a second fixing region opposite to each other; the top plate being fixedly connected to the first fixing region, and the base plate being connected to the second fixing region, wherein the first fixing region and the second fixing region are at different orthogonal projection positions on the base plate.

[0006] In one embodiment, there are multiple spring sheets, which are stacked sequentially along the direction from the bottom plate to the top plate.

[0007] In one embodiment, the supporting device further includes: a first upper fixing block, fixed on one side of the top plate adjacent to the plurality of spring sheets and fixedly connected to the first fixing area; and a first lower fixing block, fixed on one side of the bottom plate adjacent to the plurality of spring sheets and fixedly connected to the second fixing area.

[0008] In one embodiment, the supporting device further includes: a second upper fixing block, fixed to the side of the plurality of spring sheets opposite to the first lower fixing block, and spaced apart from the top plate; and a second lower fixing block, fixed to the side of the plurality of spring sheets opposite to the first upper fixing block, and spaced apart from the bottom plate.

[0009] In one embodiment, the first upper fixing block has a first height along the direction from the bottom plate to the top plate; the second upper fixing block has a second height along the direction from the bottom plate to the top plate, the first height being greater than the second height; and a groove is provided on the bottom plate corresponding to the second lower fixing block.

[0010] In one embodiment, a first cutout gap is provided between the first fixed region and the second fixed region.

[0011] In one embodiment, the first fixing region is located on the periphery of the first slotted gap adjacent to the spring sheet; the second fixing region is located on the side of the first slotted gap adjacent to the center of the spring sheet.

[0012] In one embodiment, there are multiple driven motors, which are arranged around the periphery of the spring sheet; the first fixed area is provided with multiple second slots corresponding to the multiple driven motors, and each of the multiple second slots extends along the first fixed area toward the second fixed area and divides the first fixed area into multiple first sub-fixed areas.

[0013] In one embodiment, the supporting device further includes: a suction cup for fixing the top plate on the side opposite to the spring sheet; and a turntable for fixing the bottom plate on the side opposite to the spring sheet, which can drive the bottom plate to rotate.

[0014] Another embodiment of the present invention provides a detection device, including a carrier device as described in any of the foregoing embodiments.

[0015] As can be seen from the above, the above embodiments of the present invention can achieve one or more of the following beneficial effects: by setting a specific connection between the spring sheet and the top plate and the bottom plate, the top plate can only move up and down relative to the bottom plate under the action of the spring sheet when the drive motor drives the top plate to move closer to or further away from the bottom plate, thereby reducing the horizontal deviation and ensuring the accuracy of the bearing device when moving the object to be measured.

[0016] Other aspects and features of the invention will become apparent from the following detailed description with reference to the accompanying drawings. However, it should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of the invention. It should also be understood that, unless otherwise indicated, the drawings are not necessarily drawn to scale; they are merely intended to conceptually illustrate the structures and processes described herein. Attached Figure Description

[0017] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0018] Figure 1This is a schematic diagram of the structure of a detection device provided in one embodiment of the present invention.

[0019] Figure 2 This is a schematic diagram of the overall structure of a support device provided in one embodiment of the present invention.

[0020] Figure 3 for Figure 2 The structural diagram of the support device shown is not included, but the suction cup is not shown.

[0021] Figure 4 for Figure 2 An exploded structural diagram of a portion of the supporting device shown.

[0022] Figure 5 This is a schematic diagram of the structure of the spring sheet in a bearing device provided in one embodiment of the present invention.

[0023] [Explanation of Labels in the Attached Image]

[0024] 200: Testing equipment; 100: Bearing device; 10: Base plate; 11: Groove; 20: Top plate; 30: Drive motor; 40: Spring plate; 41: First fixed area; 411: First sub-fixed area; 42: Second fixed area; 43: First cutout gap; 44: Second cutout gap; 51: First upper fixed block; 52: First lower fixed block; 53: Second upper fixed block; 54: Second lower fixed block; 60: Suction cup; 70: Turntable. Detailed Implementation

[0025] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0026] To enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0027] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0028] It should also be noted that the division of multiple embodiments in this invention is only for the convenience of description and should not constitute a special limitation. Features in various embodiments can be combined and referenced in each other without contradiction.

[0029] like Figure 1 As shown, one embodiment of the present invention provides an inspection device 200, including a carrier device 100. The inspection device 200 may be, for example, a wafer inspection device for inspecting wafers, and the carrier device 100 is used to carry the wafer during the inspection process. See specifically... Figure 2 and Figure 3 The supporting device 100 includes, for example, a base plate 10, a top plate 20, a drive motor 30, a spring plate 40, a suction cup 60, and a turntable 70.

[0030] Specifically, the top plate 20 and the bottom plate 10 are arranged opposite to each other. A drive motor 30 is fixed to the bottom plate 10, and its output is connected to the top plate 20. A spring plate 40 is stacked between the bottom plate 10 and the top plate 20, and is positioned adjacent to the drive motor 30. The spring plate 40 has opposing first fixing regions 41 and second fixing regions 42. The top plate 20 is fixedly connected to the first fixing region 41. The bottom plate 10 is fixedly connected to the second fixing region 42. The first fixing region 41 and the second fixing region 42 have different orthographic projection positions on the bottom plate 10. A suction cup 60 is fixed, for example, to the side of the top plate 20 opposite to the spring plate 40, for adsorbing wafers (i.e., the object to be tested). A turntable 70 is fixed to the side of the bottom plate 10 opposite to the spring plate 40 and can drive the bottom plate 10 to rotate.

[0031] For example, if the direction from the base plate 10 to the top plate 20 is considered the vertical direction (or the Z-axis direction), and the direction parallel to the base plate 10 or the top plate 20 is considered the horizontal plane (or the XY plane), then the support device 100 consists of the base plate 10, spring plate 40, top plate 20, and suction cup 60 stacked sequentially from bottom to top on the turntable 70. The drive motor 30 is positioned at the same level as the spring plate 40. The support device 100 also includes, for example, a lifting assembly for lifting the wafer. The lifting assembly includes a cylinder and a lifting pin connected to the cylinder. Taking wafer inspection as an example, during the inspection process, when it is necessary to position the wafer onto the support device 100, for example, the lifting pin initially extends beyond the surface of the suction cup 60 away from the top plate 20. After the wafer is placed on the lifting pin, the cylinder drives the lifting pin to descend below the surface of the suction cup 60 away from the top plate 20, causing the wafer to contact the suction cup 60 and be attracted by it. Since the suction cup 60 is fixedly connected to the top plate 20, the wafer can be moved up and down by driving the top plate 20 in the Z-axis direction via the drive motor 30. The wafer can be rotated horizontally by controlling the base plate 10 to rotate in the XY plane via the turntable 70. Of course, the inspection device 200 may also include a horizontal movement mechanism for controlling the movement of the entire support device 100 in the X-axis or Y-axis direction. This allows for movement and rotation of the wafer in multiple spatial directions. When it is necessary to transfer the wafer from the suction cup 60, a cylinder, for example, drives a lifting pin to extend from the through-hole on the suction cup 60 toward the side of the suction cup 20 away from the top plate 20, lifting the wafer so that it is no longer in contact with the suction cup 60, at which point the wafer can be removed. The lifting pin is used to contact the wafer's end face with a novel material that easily adheres to the wafer, allowing the wafer to be transferred more stably onto the suction cup 60.

[0032] The drive motor 30 is, for example, a voice coil motor. Due to the inherent characteristics of voice coil motors, they are prone to horizontal displacement during operation. Therefore, if the top plate 20 is directly moved up and down by the voice coil motor, the top plate 20 will also shift horizontally, causing the wafer fixed on the suction cup 60 to shift in the XY plane. If this displacement problem is not addressed, it will result in significant errors in the data obtained during wafer inspection. In this embodiment, a spring sheet 40 is provided. The top plate 20 is fixedly connected to the first fixed area 41, and the bottom plate 10 is fixedly connected to the second fixed area 42. The first fixed area 41 and the second fixed area 42 have different orthographic projection positions on the bottom plate 10. For example, it can be understood that the first fixed area 41 and the second fixed area 42 are a certain distance apart in the XY plane. For example, the spring sheet 40 is... Figure 4 or Figure 5When the spring sheet is circular, the first fixing area 41 can be near the periphery of the spring sheet 40, while the second fixing area 42 can be near the center of the spring sheet 40. Conversely, the first fixing area 41 can be near the center of the spring sheet 40, and the second fixing area 42 can be near the periphery. Alternatively, the first fixing area 41 can be on the left side of the spring sheet 40, and the second fixing area 42 on the right side, and so on. Through the above-described connection design between the spring sheet 40 and the top plate 20 and the bottom plate 10, for example, when the drive motor 30 drives the top plate 20 to move upward, the first fixing area 41 of the spring sheet 40 tilts upward with the top plate 20; or when the drive motor 30 drives the top plate 20 to move downward, the first fixing area 41 of the spring sheet 40 bends downward with the top plate 20, and the second fixing area 42 is fixed to the bottom plate 10. Due to the characteristics of the spring sheet 40, the top plate 20 will not move in the XY plane. Therefore, achieving positioning of the top plate 20 can reduce the offset of the voice coil motor and reduce errors.

[0033] In one embodiment, for example, refer to Figure 5 To ensure the positioning effect of the spring sheet 40 and facilitate deformation in the Z-axis direction, a first slotted gap 43 is formed between the first fixing region 41 and the second fixing region 42 on the spring sheet 40. For example, the first fixing region 41 is located on the periphery side of the first slotted gap 43 adjacent to the periphery of the spring sheet 40. The second fixing region 42 is located on the center side of the first slotted gap 43 adjacent to the center of the spring sheet 40. Simply put, for example, the spring sheet 40 is... Figure 5 The circle shown has a first fixed region 41, for example, the outer ring of the spring sheet 40, and a second fixed region 42, which is the inner ring of the spring sheet 40.

[0034] In one embodiment, the number of drive motors 30 is, for example, multiple, and the multiple drive motors 30 are arranged around the periphery of the spring plate 40. For example, see reference. Figure 4 There are three drive motors 30 distributed at a 120-degree angle around the spring plate 40. The multiple drive motors 30 can work synchronously or asynchronously. For example, when working synchronously, the top plate 20 is moved up and down as a whole. For example, when only one drive motor 30 is working, the top plate 20 is at a certain angle, which can realize the measurement of different angles of the object to be measured.

[0035] Furthermore, the first fixed region 41 is provided with a plurality of second slotted gaps 44 corresponding one-to-one with the plurality of drive motors 30. Each of the plurality of second slotted gaps 44 extends along the first fixed region 41 toward the second fixed region 42, dividing the first fixed region 41 into a plurality of first sub-fixed regions 411. For example... Figure 4 and Figure 5As shown, three second slotted gaps 44 are provided on the first fixed area 41, each corresponding to one of the three drive motors 30. Each second slotted gap 44 is arranged radially along the spring sheet 40. The multiple second slotted gaps 44 divide the first fixed area 41 into three first sub-fixed areas 411. For example, each first sub-fixed area 411 forms a first slotted gap 43 with the second fixed area 42, and the second slotted gaps 44 and the first slotted gaps 43 are, for example, not connected. (Refer to...) Figure 5 Three first slotted gaps 43 are formed on the spring sheet 40 corresponding to the three first sub-fixed areas 411. The arrangement of the second slotted gaps 44 provides more space for the spring sheet 40 to move when the top plate 20 is driven by multiple drive motors 30 to achieve different angles of movement. Figure 5 As shown, a third slotted gap is also provided on the second fixed area 42, and the third slotted gap is connected to the end of the second slotted gap 44 near the second fixed area 42.

[0036] In one embodiment, the number of spring sheets 40 is, for example, multiple, and the multiple spring sheets 40 are stacked sequentially along the direction from the bottom plate 10 to the top plate 20. The multiple spring sheets 40 have, for example, identical structures. The first perforated gaps 43 of the multiple spring sheets 40 are aligned to form a first perforated groove extending along the direction from the bottom plate 10 to the top plate 20. The second perforated gaps 44 of the multiple spring sheets 40 are also aligned to form multiple second perforated grooves along the direction from the bottom plate 10 to the top plate 20. The stacked arrangement of multiple spring sheets 40 can reduce the horizontal offset of the top plate 20 to a greater extent.

[0037] In one embodiment, the supporting device 100 may further include, for example, a first upper fixing block 51 and a first lower fixing block 52. The first upper fixing block 51 is fixed to one side of the top plate 20 adjacent to the plurality of spring sheets 40 and is fixedly connected to a first fixing region 41. The first lower fixing block 52 is fixed to one side of the bottom plate 10 adjacent to the plurality of spring sheets 40 and is fixedly connected to a second fixing region 42. Figure 4 As shown, the first upper fixing block 51 is disposed corresponding to the outer ring portion of the spring sheet 40, and the first lower fixing block 52 is disposed corresponding to the inner ring portion of the spring sheet 40. As described in the previous embodiment, a first slotted gap 43 is provided between the first fixing region 41 and the second fixing region 42. The first upper fixing block 51 is located on the side of the first slotted gap 43 adjacent to the periphery of the spring sheet 40, and the first lower fixing block 52 is located on the side of the first slotted gap 43 adjacent to the center of the spring sheet 40. Alternatively, as mentioned in the previous embodiment, multiple second slotted gaps 44 divide the first fixing region 41 into three first sub-fixing regions 411. For example, one first upper fixing block 51 is disposed for each first sub-fixing region 411, and each first upper fixing block 51 corresponds to one first lower fixing block 52. Figure 4As shown, three first upper fixing blocks 51 and three first lower fixing blocks 52 are respectively provided for the three first sub-fixing regions 4111. For example, multiple screw holes are provided on the first fixing region 41 and the second fixing region 42, for example, the first upper fixing blocks 51 and the first lower fixing blocks 52 are locked to the spring sheet 40 by screws.

[0038] More specifically, it also includes, for example, a second upper fixing block 53 and a second lower fixing block 54. The second upper fixing block 53 is fixed to the first side of the plurality of spring pieces 40 away from the first lower fixing block 52 and is spaced apart from the top plate 20. The second lower fixing block 54 is fixed to the side of the plurality of spring pieces 40 away from the first upper fixing block 51 and is spaced apart from the bottom plate 10. Thus, the first upper fixing block 51 and the second lower fixing block 54 are arranged in a one-to-one correspondence. The first upper fixing block 51 and the second lower fixing block 54 clamp the first fixing area 41 of the spring pieces 40 and are fixed to the top plate 20. The second lower fixing block 54 is not fixed to the bottom plate 10, but in some cases, the side of the second lower fixing block 54 adjacent to the bottom plate 10 can contact the bottom plate 10. The first lower fixing block 52 and the second upper fixing block 53 are arranged in a one-to-one correspondence. The first lower fixing block 52 and the second upper fixing block 53 clamp the second fixing area 42 of the spring sheet 40 and fix it to the base plate 10. The second upper fixing block 53 is not fixed to the top plate 20, but in some cases, the side of the second upper fixing block 53 adjacent to the top plate 20 can contact the top plate 20.

[0039] In one embodiment, the first upper fixing block 51 has a first height along the direction from the bottom plate 10 to the top plate 20. The second upper fixing block 53 has a second height along the direction from the bottom plate 10 to the top plate 20. The first height is greater than the second height. A groove 11 is provided on the bottom plate 10 corresponding to the second lower fixing block 54. This provides more room for the spring piece 40 to move.

[0040] It should be noted that the above description only illustrates part of the structure of the bearing device 100 provided in the embodiments of the present invention, but the embodiments of the present invention are not limited thereto. For example, multiple guide springs are also provided on the base plate 10, for example... Figure 4 Each drive motor 30 shown has a guide spring on both sides, with the other end of each guide spring abutting against the top plate 20. The guide springs also assist in positioning the top plate 20. The base plate 10 may also be equipped with multiple sensors to sense the operating status of the support device 100. These sensors can be configured similarly to conventional wafer inspection devices, and will not be described in detail in this embodiment.

[0041] The above embodiments of the present invention have the following beneficial effects: by setting a specific connection between the spring plate 40 and the top plate 20 and the bottom plate 10, the top plate 20 can only move up and down relative to the bottom plate 10 under the action of the spring plate 40 when the drive motor 30 drives the top plate 20 to approach or move away from the bottom plate 10, thereby reducing the deviation in the horizontal direction and ensuring the accuracy of the bearing device when moving the object to be measured.

[0042] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A load bearing device (100) characterized by, include: Base plate (10); The top plate (20) is disposed opposite to the bottom plate (10); A drive motor (30) is fixed on the base plate (10) and the output end of the drive motor (30) is connected to the top plate (20). A spring sheet (40) is stacked between the base plate (10) and the top plate (20) and is disposed adjacent to the drive motor (30); the spring sheet (40) has a first fixed area (41) and a second fixed area (42) opposite to each other; the top plate (20) is fixedly connected to the first fixed area (41), and the base plate (10) is connected to the second fixed area (42); the first fixed area (41) and the second fixed area (42) are not at the same orthographic projection position on the base plate (10).

2. The load bearing device (100) according to claim 1, characterized in that The number of spring sheets (40) is multiple, and the multiple spring sheets (40) are stacked sequentially along the direction from the bottom plate (10) to the top plate (20).

3. The load bearing device (100) of claim 2, wherein, Also includes: The first upper fixing block (51) is fixed on the top plate (20) on one side adjacent to the plurality of spring sheets (40) and is fixedly connected to the first fixing area (41); The first lower fixing block (52) is fixed on the base plate (10) on one side adjacent to the plurality of spring sheets (40) and is fixedly connected to the second fixing area (42).

4. The bearing device (100) as described in claim 3, characterized in that, Also includes: The second upper fixing block (53) is fixed to the side of the plurality of spring sheets (40) away from the first lower fixing block (52) and is spaced apart from the top plate (20); The second lower fixing block (54) is fixed to the side of the plurality of spring plates (40) away from the first upper fixing block (51) and is spaced apart from the base plate (10).

5. The bearing device (100) as described in claim 4, characterized in that, The first upper fixing block (51) has a first height along the direction from the bottom plate (10) to the top plate (20); the second upper fixing block (53) has a second height along the direction from the bottom plate (10) to the top plate (20), the first height being greater than the second height; a groove (11) is provided on the bottom plate (10) corresponding to the second lower fixing block (54).

6. The bearing device (100) as described in claim 1, characterized in that, A first cutout gap (43) is provided between the first fixed area (41) and the second fixed area (42).

7. The bearing device (100) as described in claim 6, characterized in that, The first fixing area (41) is located on the periphery of the first cutout gap (43) adjacent to the spring sheet (40); the second fixing area (42) is located on the side of the first cutout gap (43) adjacent to the center of the spring sheet (40).

8. The bearing device (100) as described in claim 7, characterized in that, The number of driven motors (30) is multiple, and the multiple driven motors (30) are arranged around the periphery of the spring sheet (40); the first fixed area (41) is provided with multiple second slots (44) corresponding one-to-one with the multiple driven motors (30), and each of the multiple second slots (44) extends along the first fixed area (41) toward the direction close to the second fixed area (42) and divides the first fixed area (41) into multiple first sub-fixed areas (411).

9. The bearing device (100) as claimed in claim 1, characterized in that, Also includes: A suction cup (60) is used to fix the top plate (20) on the side opposite to the spring sheet (40); The turntable (70) is fixed on the side of the base plate (10) away from the spring sheet (40) and can drive the base plate (10) to rotate.

10. A testing device (200), characterized in that, Includes the support device (100) as described in any one of claims 1 to 9.

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