Reference device and six-degree-of-freedom adjustment method thereof

Abstract

This application relates to a reference device and its six-degree-of-freedom adjustment method. The reference device includes a base assembly, a reference square mirror, a first direction adjustment assembly, a second direction adjustment assembly, and a third direction adjustment assembly. The first direction adjustment assembly has a first elastic part and a first adjustment part, which can adjust the position of the reference square mirror in a first direction. The second direction adjustment assembly has a second elastic part and a second adjustment part, which can adjust the position of the reference square mirror in a second direction and its deflection angle Rz about a third direction. The third direction adjustment assembly can adjust the deflection angle Rx of the reference square mirror about the first direction, the deflection angle Ry about the second direction, and the distance of the reference square mirror from the connecting surface in the third direction. The reference device of this application can simulate the function of a motion stage and is used for offline and online adjustment of interferometers, leveling and focusing sensors.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a reference device and a method for adjusting its six degrees of freedom. Background Technology

[0002] In the semiconductor field, interferometers and leveling / focusing sensors are used in high-precision semiconductor exposure equipment. Both are mounted on the same base plate. The interferometer measures the six degrees of freedom of the motion stage, while the leveling / focusing sensors measure the Z-axis, deflection angles Rx and Ry of the same motion stage. The assembly and operation of the interferometer and leveling / focusing sensors require extremely high precision, and the motion stage must be precisely adjusted before being integrated into the overall equipment.

[0003] However, before the motion stage was integrated into the complete machine, there was no reference device for adjusting the attitude of the interferometer, leveling and focusing sensors, which made it impossible to adjust the interferometer, leveling and focusing sensors with high precision.

[0004] Therefore, there is an urgent need for a reference device and a six-degree-of-freedom adjustment method to solve the technical problems existing in the prior art to a certain extent. Summary of the Invention

[0005] The purpose of this application is to provide a reference device and a six-degree-of-freedom adjustment method. The reference device can be installed on the test bench and the complete machine to simulate the theoretical position of the motion stage. It can integrate and adjust the interferometer, leveling and focusing sensor without installing the motion stage on the complete machine, which effectively improves the assembly and adjustment efficiency.

[0006] This application provides a reference device, including a base assembly, a reference square mirror, a first direction adjustment assembly, a second direction adjustment assembly, and a third direction adjustment assembly;

[0007] The base has a mounting surface, and the reference square mirror is disposed on the mounting surface;

[0008] The first direction adjustment component has a first elastic part and a first adjustment part. The first elastic part and the first adjustment part are respectively disposed on the end face of the reference square mirror along the first direction. The first elastic part and the first adjustment part can adjust the position of the reference square mirror in the first direction.

[0009] The second direction adjustment component has a second elastic part and a second adjustment part. The second elastic part and the second adjustment part are respectively disposed on the end face of the reference square mirror along the second direction. The second elastic part and the second adjustment part can adjust the position of the reference square mirror in the second direction and the deflection angle Rz around the third direction.

[0010] The third-direction adjustment component extends along the third direction and is used to connect with the component to be connected. The surface where the third-direction adjustment component connects with the component to be connected is the connection surface. The third-direction adjustment component can adjust the deflection angle Rx of the reference square mirror about the first direction, the deflection angle Ry about the second direction, and the distance of the reference square mirror from the connection surface in the third direction.

[0011] In the above technical solution, the first direction, the second direction, and the third direction can form a spatial rectangular coordinate system, where the first direction is the X-axis, the second direction is the Y-axis, and the third direction is the Z-axis.

[0012] In the above technical solution, the base assembly further includes a support frame and a support column;

[0013] The support frame is triangular, and the surface of the support frame facing the component to be connected is the mounting surface;

[0014] The support column is provided in three parts, which are respectively located at the corners of the support frame and extend toward the part to be connected. The line connecting two of the support columns is parallel to the first direction, and the end faces of the two support columns facing the part to be connected are provided with positioning pins.

[0015] In the above technical solution, both the first elastic part and the second elastic part are elastic members, and both the first adjusting part and the second adjusting part are adjusting members;

[0016] The elastic component includes a limiting rod, a first spring, and a first mounting block. The limiting rod passes through the first mounting block and has a limiting plate at one end near the reference square mirror. A first nut is threaded onto the other end away from the reference square mirror. The first spring is sleeved on the limiting rod, with one end abutting against the limiting plate and the other end abutting against the first mounting block. Adjusting the length by which the first nut is screwed into the limiting rod can change the compression length of the first spring, causing the first spring to generate different elastic forces, thereby changing the compression force of the elastic component on the reference square mirror.

[0017] The adjusting component includes a second mounting block, an adjusting column, and a second nut. The adjusting column passes through the second mounting block and extends toward the side wall of the reference square mirror. The second mounting block has an elongated groove that extends along a third direction and penetrates the end face of the second mounting block along the third direction. The second nut is threadedly connected to the adjusting column and is located at the elongated groove. Adjusting the second nut allows the adjusting column to abut against the reference square mirror and reciprocate along the first direction and / or the second direction to adjust the position of the reference square mirror in the first direction and / or the second direction.

[0018] In the above technical solution, the portion of the adjusting column near the reference square mirror has a flexible part;

[0019] The flexible part includes two flexible grooves and a connecting rib connecting the two flexible grooves;

[0020] The flexible part is provided in multiple ways, and the multiple flexible parts are arranged at intervals along the extension direction of the adjusting column, and the connecting ribs of adjacent flexible parts are at 90°.

[0021] In the above technical solution, the flexible groove further includes a first groove body and a second groove body communicating with the first groove body;

[0022] The first groove is semi-circular, and the second groove has a fan-shaped cross-section along the axis of the adjusting column.

[0023] In the above technical solution, the third-party directional adjustment component further includes a positioning rod and a third nut;

[0024] The positioning rod extends along the third direction, and its two ends are set in the circular hole groove of the support column through the third nut. The surface of the positioning rod facing the part to be connected is the connecting surface. Adjusting the third nut can adjust the distance of the connecting surface from the upper surface of the reference square mirror in the third direction.

[0025] In the above technical solution, the third adjustment component further includes a locking rod, a threaded sleeve, a connecting block, and a connecting pin;

[0026] One end of the locking rod passes through the threaded sleeve and is connected to the connecting block via a connecting pin; the other end of the locking rod extends out of the positioning rod; the positioning rod is threadedly connected to the threaded sleeve.

[0027] A boss is provided in the middle of the locking rod, and the outer diameter of the boss is larger than the inner diameter of the threaded sleeve to prevent the locking rod from coming out of the positioning rod and falling off.

[0028] In the above technical solution, the reference device further includes a clamping assembly, which includes a limiting plug, a second spring, a fixing sleeve, and a locking screw.

[0029] The support frame has a mounting hole corresponding to the position of the reference square mirror, and the reference square mirror has a groove corresponding to the position of the mounting hole;

[0030] The limiting plug is bonded to the groove of the reference square mirror. The fixing sleeve has a receiving cavity on the side away from the support frame. The locking screw passes through the fixing sleeve, the support frame and the limiting plug in sequence. The second spring is sleeved on the locking screw and is located in the receiving cavity in a compressed state.

[0031] The second spring in the compressed state has a preset rebound force, which enables the lower surface of the reference square mirror to be attached to the mounting surface of the support frame.

[0032] This application also provides a six-degree-of-freedom adjustment method for a reference device, which, based on the aforementioned reference device, includes the following steps:

[0033] First installation step: Place the support frame on a test platform with a three-coordinate system, and place the first direction adjustment component, the second direction adjustment component, and the third direction adjustment component on the mounting surface of the support frame; adjust the first nut so that the distance between the end of the limiting rod near the reference square mirror and the first mounting block is minimized; adjust the second nut so that the distance between the end of the adjusting column near the reference square mirror and the second mounting block is minimized.

[0034] Second installation step: Use the clamping assembly to attach the lower surface of the reference square mirror to the mounting surface of the support frame;

[0035] Adjustment steps: Adjust the second nut so that the adjusting post abuts against the first sidewall of the reference square mirror; adjust the first nut so that the limiting rod abuts against the second sidewall of the reference square mirror opposite to the first sidewall;

[0036] First measurement step: Use a coordinate measuring machine to measure the positional relationship between the reference square mirror and the positioning pin on the support frame, determine the X-axis, Y-axis and deflection angle Rz of the reference square mirror, and adjust the first adjustment part of the first direction adjustment component and the second adjustment part of the second direction adjustment component according to the difference between the measured data and the theoretical data, so as to adjust the reference square mirror to the theoretical position.

[0037] The second measurement step: Use a coordinate measuring machine to measure the Z-axis dimension from the upper surface of the reference square mirror to the connecting surface of the positioning rod. Based on the difference between this measured data and the theoretical data, adjust the third nut on the positioning rod near the part to be connected to adjust the position of the positioning rod to achieve the theoretical position. After reaching the theoretical position, use the third nut away from the part to be connected to lock the positioning rod. After locking the positioning rod, remeasure. The Z-axis dimension in the remeasured data must meet the accuracy requirements. Then, adjust the height of the positioning rods installed on the three support columns according to this process so that the Z-axis dimension from the connecting surface of each positioning rod to the upper surface of the reference square mirror meets the accuracy requirements.

[0038] The third measurement step is to test and verify whether the deflection angles Rx and Ry of the plane formed by the connecting surfaces of the three positioning rods and the upper surface of the reference square mirror meet the requirements. If they meet the requirements, the six-degree-of-freedom adjustment of the reference square mirror is completed. If they do not meet the requirements, they need to be readjusted.

[0039] Compared with the prior art, the beneficial effects of this application are as follows:

[0040] This application provides a reference device, including a base assembly, a reference square mirror, a first direction adjustment assembly, a second direction adjustment assembly, and a third direction adjustment assembly;

[0041] The base has a mounting surface, and the reference square mirror is disposed on the mounting surface;

[0042] The first direction adjustment component has a first elastic part and a first adjustment part. The first elastic part and the first adjustment part are respectively disposed on the end face of the reference square mirror along the first direction. The first elastic part and the first adjustment part can adjust the position of the reference square mirror in the first direction.

[0043] The second direction adjustment component has a second elastic part and a second adjustment part. The second elastic part and the second adjustment part are respectively disposed on the end face of the reference square mirror along the second direction. The second elastic part and the second adjustment part can adjust the position of the reference square mirror in the second direction and the deflection angle Rz around the third direction.

[0044] The third-direction adjustment component extends along the third direction and is used to connect with the component to be connected. The surface where the third-direction adjustment component connects with the component to be connected is the connection surface. The third-direction adjustment component can adjust the deflection angle Rx of the reference square mirror about the first direction, the deflection angle Ry about the second direction, and the distance of the reference square mirror from the connection surface in the third direction.

[0045] In summary, the reference device of this application can be installed on a test bench and a complete machine (the test bench and complete machine are the aforementioned connecting parts) to simulate the theoretical position of the motion stage. It integrates and adjusts the interferometer, leveling and focusing sensors without requiring the motion stage to be installed on the complete machine, effectively improving assembly and adjustment efficiency. Specifically, the position of the reference square mirror in the first direction, the position in the second direction, and the distance from the connecting surface in the third direction are achieved through a first direction adjustment component, a second direction adjustment component, and a third direction adjustment component, ensuring high positional accuracy. This enables the reference square mirror to simulate the motion stage, and is used for offline and online adjustment of the interferometer, leveling and focusing sensors.

[0046] This application also provides a six-degree-of-freedom adjustment method for a reference device. Based on the aforementioned reference device, the reference device is simulated as a motion table according to the six-degree-of-freedom adjustment method for the reference device, and is used for offline and online adjustment of the interferometer, leveling and focusing sensors. Attached Figure Description

[0047] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0048] Figure 1 This is a schematic diagram of the reference device provided in Embodiment 1 of this application;

[0049] Figure 2 This is a schematic diagram of the base assembly in the reference device provided in Embodiment 1 of this application;

[0050] Figure 3 This is a schematic diagram of the structure of the adjusting component in the reference device provided in Embodiment 1 of this application;

[0051] Figure 4 This is a schematic diagram of the structure of the elastic member in the reference device provided in Embodiment 1 of this application;

[0052] Figure 5 This is a schematic diagram of the clamping assembly in the reference device provided in Embodiment 1 of this application;

[0053] Figure 6 This is a schematic diagram of the structure of the third-direction adjustment component in the reference device provided in Embodiment 1 of this application.

[0054] Figure label: 1 - Reference square mirror;

[0055] 2-Base; 21-Support frame; 211a-First support column; 211b-Second support column; 211c-Third support column; 22-Positioning pin; 23-Padded block;

[0056] 3-First adjusting part; 31-Second mounting block; 32-Adjusting column; 33-Second nut; 34-Long groove; 35-Flexible groove; 36-Connecting rib; 37-Flexible part; 38-First groove body; 39-Second groove body;

[0057] 4-First elastic part; 41-Limiting rod; 42-First spring; 43-First mounting block; 44-First nut; 45-First limiting hole; 46-Limiting plate; 47-Second limiting hole; 48-First section; 49-Second section;

[0058] 5-Second Adjustment Section;

[0059] 51-Limit plug; 52-Fixing sleeve; 53-Second spring; 54-Locking screw;

[0060] 6-Third-party directional adjustment component; 61-Positioning rod; 62-Third nut; 63-Connecting block; 64-Connecting pin; 65-Locking rod; 66-Threaded sleeve; 67-Boss;

[0061] 7-Mounting surface; 8-Connecting surface; 9-Round hole groove; 10-Mounting hole; 11-Second elastic part. Detailed Implementation

[0062] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0063] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0064] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0065] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0066] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0067] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0068] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0069] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0070] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0071] Example 1

[0072] The following is combined Figures 1-6 A reference device provided in this embodiment is described in detail.

[0073] This application provides a reference device that can serve as an adjustment reference for interferometers, leveling and focusing sensors in the semiconductor field, improving the efficiency of offline and system-wide adjustment. The reference device includes a base assembly, a reference square mirror 1, a first direction adjustment assembly, a second direction adjustment assembly, and a third direction adjustment assembly 6.

[0074] Specifically, the base assembly has a mounting surface 7, which has multiple mounting positions, and the reference square mirror 1 is disposed in one of the mounting positions on the mounting surface 7.

[0075] Specifically, the first direction adjustment assembly has a first elastic part 4 and a first adjustment part 3. The first elastic part 4 and the first adjustment part 3 are respectively disposed on the end face of the reference square mirror 1 along the first direction (X-axis), and combined with Figure 1 As shown, the first elastic part 4 is disposed on the first side wall of the reference square mirror 1, and the first adjustment part 3 is disposed on the second side wall opposite to the first side wall; the first elastic part 4 and the first adjustment part 3 can adjust the position of the reference square mirror 1 in the first direction, that is, the reference square mirror 1 can be moved in the first direction by means of the first elastic part 4 and the first adjustment part 3.

[0076] The first elastic part 4 and the first adjustment part 3 are respectively disposed at both ends of the reference square mirror 1 along the first direction. The first adjustment part 3 adjusts the position of the reference square mirror 1 in the first direction, and the first elastic part 4 is used to press the reference square mirror 1 to ensure that the position of the reference square mirror 1 in the first direction remains unchanged after the adjustment part 3 is adjusted.

[0077] Specifically, the second direction adjustment assembly has a second elastic part 11 and a second adjustment part 5. The second elastic part 11 and the second adjustment part 5 are respectively disposed on the end face of the reference square mirror 1 along the second direction (Y-axis), and combined with Figure 1 As shown, the second elastic part 11 is disposed on the third side wall of the reference square mirror (the third side wall is adjacent to the first side wall), and the second adjustment part 5 is disposed on the fourth side wall opposite to the third side wall; the second elastic part 11 and the second adjustment part 5 can adjust the position of the reference square mirror in the second direction and the deflection angle Rz around the third direction (Z axis);

[0078] The aforementioned second elastic part 11 and second adjustment part 5 are respectively disposed at both ends of the reference square mirror 1 along the second direction; preferably, there are two second adjustment parts 5, which are arranged at intervals along the first direction. The two second adjustment parts 5 work together to adjust the position of the reference square mirror 1 in the second direction and the deflection angle Rz around the third direction. At this time, the second elastic part 11 presses the reference square mirror 1 to ensure that the position and deflection angle Rz of the reference square mirror 1 in the second direction remain unchanged after the adjustment by the second adjustment part 5.

[0079] Specifically, the third-direction adjustment component 6 extends along the third direction and is used to connect with the part to be connected. The surface of the third-direction adjustment component 6 connected with the part to be connected is the connecting surface 8. The third-direction adjustment component 6 can adjust the deflection angle Rx of the reference square mirror 1 around the first direction, the deflection angle Ry around the second direction, and the distance between the upper surface of the reference square mirror 1 and the connecting surface 8 in the third direction, i.e., the Z direction.

[0080] In summary, the reference device of this application can be installed on a test bench and a complete machine (the test bench and complete machine are the aforementioned connecting parts) to simulate the theoretical position of the motion stage. It integrates and adjusts the interferometer, leveling and focusing sensors without requiring the motion stage to be installed on the complete machine, effectively improving assembly and adjustment efficiency. Specifically, the position of the reference square mirror 1 in the first direction, the position in the second direction, and the distance from the connecting surface 8 in the third direction are achieved through the first direction adjustment component, the second direction adjustment component, and the third direction adjustment component 6, ensuring high positional accuracy. This enables the reference square mirror 1 to simulate the motion stage, used for offline and online adjustment of the interferometer, leveling and focusing sensors.

[0081] It is worth noting that the reference square mirror 1 can be made of different materials and in different shapes to be suitable for special equipment in different fields, depending on functional requirements. In addition, the processing accuracy and resolution of the reference square mirror 1 and other parts can be flexibly determined and adjusted according to theoretical accuracy requirements. Some processed parts can also be replaced with standard parts, which has broad application prospects.

[0082] In this embodiment, combined with Figure 1 As shown, the first direction, the second direction, and the third direction can form a spatial rectangular coordinate system, with the first direction as the X-axis, the second direction as the Y-axis, and the third direction as the Z-axis.

[0083] In this embodiment, combined with Figure 1 and Figure 2 As shown, the base assembly includes a support frame 21 and a support column.

[0084] Specifically, the support frame 21 is triangular and the surface of the support frame 21 facing the part to be connected is the mounting surface 7.

[0085] Specifically, there are three support columns, namely the first support column 211a, the second support column 211b, and the third support column 211c. The first support column 211a, the second support column 211b, and the third support column 211c are respectively located at the corners of the support frame 21 and all extend toward the part to be connected.

[0086] Furthermore, the line connecting the first support column 211a and the second support column 211b is parallel to the first direction. Positioning pins 22 are provided on the end faces of the first support column 211a and the second support column 211b facing the part to be connected. The positioning pins 22 ensure the positioning and resetting of the entire six-degree-of-freedom adjustment structure of the reference square mirror 1 during assembly and disassembly. Even further, the positioning pins 22 and the support frame 21 are interference-fitted to reduce installation errors on the entire machine.

[0087] Specifically, a pad 23 is provided on the side wall of the support frame 21 away from the reference square mirror 1. The pad 23 is used to support the support frame 21 and can also play a vibration reduction role to avoid excessive vibration during the transportation of the entire reference device, which could cause the position of the reference square mirror 1 to change. Preferably, the pad 23 is made of vibration damping material.

[0088] In this embodiment, both the first elastic part 4 and the second elastic part 11 are elastic members, and both the first adjusting part 3 and the second adjusting part 5 are adjusting members. Figure 1 and Figure 4As shown, the elastic component includes a limiting rod 41, a first spring 42, and a first mounting block 43. Specifically, the limiting rod 41 passes through the first mounting block 43 and has a limiting plate 46 at one end near the reference square mirror 1, and a first nut 44 is threaded onto the other end away from the reference square mirror 1; the first spring 42 is sleeved on the limiting rod 41, with one end abutting against the limiting plate 46 and the other end abutting against the first mounting block 43.

[0089] More specifically, in combination Figure 4 As shown, the first mounting block 43 has a first limiting hole 45 and a second limiting hole 47 connected to the first limiting hole 45 along its axial direction. The first limiting hole 45 is close to the limiting plate 46, and the second limiting hole 47 is close to the first nut 44. The diameter of the first limiting hole 45 is larger than the diameter of the second limiting hole 47, so that the first limiting hole 45 and the second limiting hole 47 together form a stepped hole with a step.

[0090] More specifically, in combination Figure 4 The limiting rod 41 includes a first section 48 and a second section 49 connected to the first section 48. The diameter of the second section 49 is smaller than the diameter of the first section 48, and the diameter of the first section 48 is smaller than the diameter of the second limiting hole 47. The first spring 42 is sleeved on the first section 48, and one end of it abuts against the limiting plate 46, and the other end abuts against the step.

[0091] In actual use, adjusting the length of the first nut 44 screwed into the limiting rod 41 can change the clamping length of the first spring 42, so that the first spring 42 generates different elastic forces, thereby changing the clamping force of the elastic component on the reference square mirror 1.

[0092] Specifically, in combination Figure 1 and Figure 3 As shown, the adjusting component includes a second mounting block 31, an adjusting column 32, and a second nut 33; the adjusting column 32 passes through the second mounting block 31 and extends toward the side wall of the reference square mirror 1; the second mounting block 31 has an elongated groove 34 that extends along a third direction and penetrates the end face of the second mounting block along the third direction; the second nut 33 is threadedly connected to the adjusting column 32 and is located at the elongated groove 34.

[0093] More specifically, the second nut 33 is provided with adjustment holes spaced apart along its circumferential direction, into which a slender pin or a small screw can be inserted to finely rotate the second nut 33.

[0094] In actual use: the second nut 33 is rotated by using a slender pin or a small screw to change the extension length of the adjusting column 32, thereby achieving high-precision position adjustment of the reference square mirror 1 in the X, Y and deflection angle Rz directions.

[0095] In summary, the elastic component of the first direction adjustment component is located opposite the adjustment component of the first direction adjustment component, and the elastic component of the second direction adjustment component is located opposite the adjustment component of the second direction adjustment component. In this way, when adjusting in the X, Y and deflection angle Rz directions, and after adjustment, the elastic component can apply a clamping force to the reference square mirror 1, and work together with the adjustment component to achieve high-precision position adjustment of the reference square mirror 1 in the X, Y and deflection angle Rz directions.

[0096] In this embodiment, combined with Figure 3 As shown, when the adjustment post 32 abuts against the side wall of the reference square mirror 1, in order to prevent the adjustment post 32 from scratching or damaging the reference square mirror 1, a flexible part 37 is provided in the part of the adjustment post 32 near the reference square mirror 1. This flexible part 37 can provide a flexible space. When the adjustment post 32 abuts against the side wall of the reference square mirror 1, the slight deformation of the adjustment post 32 will be absorbed by the flexible space, thereby preventing the adjustment post 32 from scratching or damaging the reference square mirror 1.

[0097] Specifically, the flexible part 37 includes two flexible grooves 35 and a connecting rib 36 connecting the two flexible grooves 35, wherein the two flexible grooves 35 can provide the aforementioned flexible space.

[0098] Specifically, multiple flexible parts 37 are provided, and the multiple flexible parts 37 are arranged at intervals along the extension direction of the adjusting column 32, and the connecting ribs 36 of adjacent flexible parts 37 are at 90°.

[0099] More specifically, the flexible groove 35 includes a first groove 38 and a second groove 39 connected to the first groove 38; the first groove 38 is semi-circular, and the cross-section of the second groove 39 along the axial direction of the adjusting column 32 is fan-shaped.

[0100] In this embodiment, combined with Figure 1 and Figure 6 As shown, the third-party directional adjustment component 6 includes a positioning rod 61 and a third nut 62.

[0101] Specifically, the positioning rod 61 extends along the third direction, and its two ends are set in the circular hole groove 9 of the support column through the third nut 62; the top surface of the positioning rod 61 facing the part to be connected is precision machined into a connecting surface 8, which serves as the connecting surface 8 for mounting the reference device to the whole machine; the third nut 62 is provided with adjustment holes spaced apart along its circumference, and the adjustment holes can be used to insert slender pins or small screws to finely rotate the third nut 62. Rotating the third nut 62 can adjust the distance of the connecting surface 8 from the upper surface of the reference square mirror 1 in the third direction.

[0102] More specifically, the third adjusting assembly also includes a locking rod 65, a threaded sleeve 66, a connecting block 63, and a connecting pin 64. One end of the locking rod 65 passes through the threaded sleeve 66 and is connected to the connecting block 63 via the connecting pin 64, while the other end of the locking rod 65 extends out of the positioning rod 61; the positioning rod 61 is threadedly connected to the threaded sleeve 66. A boss 67 is provided in the middle of the locking rod 65, and the outer diameter of the boss 67 is larger than the inner diameter of the threaded sleeve 66 to prevent the locking rod 65 from dislodging from the positioning rod 61 and falling out.

[0103] In this embodiment, combined with Figure 5 As shown, the reference device also includes a clamping assembly, which includes a limit plug 51, a second spring 53, a fixing sleeve 52, and a locking screw 54.

[0104] Specifically, the support frame 21 has a mounting hole 10 corresponding to the position of the reference square mirror 1, and the reference square mirror 1 has a groove corresponding to the position of the mounting hole 10. The limiting plug 51 is bonded to the groove of the reference square mirror 1, and the fixing sleeve 52 has a receiving cavity on the side away from the support frame 21. The locking screw 54 passes through the fixing sleeve 52 and the support frame 21 in sequence and is connected to the limiting plug 51. The second spring 53 is sleeved on the locking screw 54 and is located in the receiving cavity in a compressed state.

[0105] More specifically, the second spring 53 in the compressed state has a preset rebound force, which enables the lower surface of the reference square mirror 1 to be attached to the mounting surface 7 of the support frame 21.

[0106] Furthermore, the outer diameter of the fixing sleeve 52 is smaller than the diameter of the mounting hole 10 corresponding to the support frame 21. In this way, the reference square mirror 1 is roughly positioned by the fixing sleeve 52, without restricting the adjustment of the reference square mirror 1 in the X, Y and deflection angle Rz directions.

[0107] It is worth noting that since the elastic component also achieves the follow-up movement when adjusting in the X, Y and deflection angle Rz directions by generating a rebound force through the compression spring (first spring 42), the rebound force of the clamping component cannot be too large and needs to be strictly calculated. If the rebound force is large, the frictional force f between the lower surface of the reference square mirror 1 and the mounting surface 7 of the support frame 21 will be large. If the frictional force f is greater than the elastic force of the elastic component, the elastic component will not be able to follow up, affecting the adjustment of the reference square mirror 1 in the X, Y and deflection angle Rz directions.

[0108] Example 2

[0109] This embodiment provides a six-degree-of-freedom adjustment method for a reference device, which, based on the aforementioned reference device, includes the following steps:

[0110] First installation step 100: Place the support frame on a test platform with a three-coordinate system, and install the first direction adjustment component, the second direction adjustment component, and the third direction adjustment component on the mounting surface of the support frame; adjust the first nut so that the distance of the end of the limiting rod near the reference square mirror protruding from the first mounting block is minimized; adjust the second nut so that the distance of the end of the adjusting column near the reference square mirror protruding from the second mounting block is minimized.

[0111] Second installation step 200: Use the clamping assembly to attach the lower surface of the reference square mirror to the mounting surface of the support frame;

[0112] Adjustment step 300: Adjust the second nut so that the adjusting post abuts against the first side wall of the reference square mirror; adjust the first nut so that the limiting rod abuts against the second side wall of the reference square mirror opposite to the first side wall;

[0113] First measurement step 400: Use a coordinate measuring machine to measure the positional relationship between the reference square mirror and the positioning pin on the support frame, determine the X-axis, Y-axis and deflection angle Rz of the reference square mirror, and adjust the first adjustment part of the first direction adjustment component and the second adjustment part of the second direction adjustment component according to the difference between the measured data and the theoretical data, so as to adjust the reference square mirror to the theoretical position.

[0114] Second measurement step 500: Use a coordinate measuring machine to measure the Z-axis dimension from the upper surface of the reference square mirror to the connecting surface of the positioning rod. Adjust the third nut on the positioning rod near the part to be connected based on the difference between this measured data and the theoretical data to adjust the position of the positioning rod to reach the theoretical position. After reaching the theoretical position, use the third nut away from the part to be connected to lock the positioning rod. After locking the positioning rod, remeasure. The Z-axis dimension in the remeasured data must meet the accuracy requirements. Then, adjust the height of the positioning rods installed on the three support columns according to this process so that the Z-axis dimension from the connecting surface of each positioning rod to the upper surface of the reference square mirror meets the accuracy requirements.

[0115] Third measurement step 600: Test and verify whether the deflection angles Rx and Ry of the plane formed by the connecting surfaces of the three positioning rods and the upper surface of the reference square mirror meet the requirements. If they meet the requirements, the six-degree-of-freedom adjustment of the reference square mirror is completed. If they do not meet the requirements, they need to be readjusted.

[0116] In summary, based on the six-degree-of-freedom adjustment method of the reference device, the reference device is simulated as a motion stage for offline and online adjustment of the interferometer, leveling and focusing sensors.

[0117] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them; although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the present application.

[0118] The scope of the technical solutions in each embodiment of the application.

Claims

1. A fiducial device, characterized by, It includes a base assembly, a reference square mirror, a first direction adjustment assembly, a second direction adjustment assembly, and a third direction adjustment assembly; The base assembly has a mounting surface, and the reference square mirror is disposed on the mounting surface; The first direction adjustment component has a first elastic part and a first adjustment part. The first elastic part and the first adjustment part are respectively disposed on the end face of the reference square mirror along the first direction. The first elastic part and the first adjustment part can adjust the position of the reference square mirror in the first direction. The second direction adjustment component has a second elastic part and a second adjustment part. The second elastic part and the second adjustment part are respectively disposed on the end face of the reference square mirror along the second direction. The second elastic part and the second adjustment part can adjust the position of the reference square mirror in the second direction and the deflection angle Rz around the third direction. The third-direction adjustment component extends along the third direction and is used to connect with the component to be connected. The surface of the third-direction adjustment component connected with the component to be connected is the connection surface. The third-direction adjustment component can adjust the deflection angle Rx of the reference square mirror about the first direction, the deflection angle Ry about the second direction, and the distance of the reference square mirror from the connection surface in the third direction. The first direction, the second direction, and the third direction can form a spatial rectangular coordinate system, with the first direction being the X-axis, the second direction being the Y-axis, and the third direction being the Z-axis. The base assembly includes a support frame and support columns; The support frame is triangular, and the surface of the support frame facing the component to be connected is the mounting surface; The support column is provided in three parts. The three support columns are respectively located at the corners of the support frame and all extend toward the part to be connected. The line connecting two of the support columns is parallel to the first direction and the end faces of the two support columns facing the part to be connected are provided with positioning pins. Both the first elastic part and the second elastic part are elastic components, and both the first adjusting part and the second adjusting part are adjusting components; The elastic component includes a limiting rod, a first spring, and a first mounting block. The limiting rod passes through the first mounting block and has a limiting plate at one end near the reference square mirror. A first nut is threaded onto the other end away from the reference square mirror. The first spring is sleeved on the limiting rod, with one end abutting against the limiting plate and the other end abutting against the first mounting block. Adjusting the length by which the first nut is screwed into the limiting rod can change the compression length of the first spring, causing the first spring to generate different elastic forces, thereby changing the compression force of the elastic component on the reference square mirror. The adjusting component includes a second mounting block, an adjusting column, and a second nut. The adjusting column passes through the second mounting block and extends toward the side wall of the reference square mirror. The second mounting block has an elongated groove that extends along a third direction and penetrates the end face of the second mounting block along the third direction. The second nut is threadedly connected to the adjusting column and is located at the elongated groove. Adjusting the second nut allows the adjusting column to abut against the reference square mirror and reciprocate along the first direction and / or the second direction to adjust the position of the reference square mirror in the first direction and / or the second direction.

2. The fiducial device of claim 1, wherein, The portion of the adjustment column near the reference square mirror has a flexible section; The flexible part includes two flexible grooves and a connecting rib connecting the two flexible grooves; The flexible part is provided in multiple ways, and the multiple flexible parts are arranged at intervals along the extension direction of the adjusting column, and the connecting ribs of adjacent flexible parts are at 90°.

3. The fiducial device of claim 2, wherein, The flexible groove includes a first groove body and a second groove body communicating with the first groove body; The first groove is semi-circular, and the second groove has a fan-shaped cross-section along the axis of the adjusting column.

4. The fiducial device of claim 1, wherein, The third-party directional adjustment component includes a positioning rod and a third nut; The positioning rod extends along the third direction, and its two ends are set in the circular hole groove of the support column through the third nut. The surface of the positioning rod facing the part to be connected is the connecting surface. Adjusting the third nut can adjust the distance of the connecting surface from the upper surface of the reference square mirror in the third direction.

5. The fiducial device of claim 4, wherein, The third-party directional adjustment assembly also includes a locking rod, a threaded sleeve, a connecting block, and a connecting pin; One end of the locking rod passes through the threaded sleeve and is connected to the connecting block via a connecting pin; the other end of the locking rod extends out of the positioning rod; the positioning rod is threadedly connected to the threaded sleeve. A boss is provided in the middle of the locking rod, and the outer diameter of the boss is larger than the inner diameter of the threaded sleeve to prevent the locking rod from coming out of the positioning rod and falling off.

6. The fiducial device of claim 5, wherein, The reference device also includes a clamping assembly, which includes a limiting plug, a second spring, a fixing sleeve, and a locking screw. The support frame has a mounting hole corresponding to the position of the reference square mirror, and the reference square mirror has a groove corresponding to the position of the mounting hole; The limiting plug is bonded to the groove of the reference square mirror. The fixing sleeve has a receiving cavity on the side away from the support frame. The locking screw passes through the fixing sleeve, the support frame and the limiting plug in sequence. The second spring is sleeved on the locking screw and is located in the receiving cavity in a compressed state. The second spring in the compressed state has a preset rebound force, which enables the lower surface of the reference square mirror to be attached to the mounting surface of the support frame.

7. A method of six degrees of freedom adjustment of a fiducial device based on the fiducial device of claim 6, characterized in that, Includes the following steps: First installation step: Place the support frame on a test platform with a three-coordinate system, and install the first direction adjustment component, the second direction adjustment component, and the third direction adjustment component on the mounting surface of the support frame; adjust the first nut so that the distance of the end of the limiting rod near the reference square mirror protruding from the first mounting block is minimized; Adjust the second nut so that the distance by which the end of the adjusting post closest to the reference square mirror protrudes from the second mounting block is minimized; Second installation step: Use the clamping assembly to attach the lower surface of the reference square mirror to the mounting surface of the support frame; Adjustment steps: Adjust the second nut so that the adjusting post abuts against the first sidewall of the reference square mirror; adjust the first nut so that the limiting rod abuts against the second sidewall of the reference square mirror opposite to the first sidewall; First measurement step: Use a coordinate measuring machine to measure the positional relationship between the reference square mirror and the positioning pin on the support frame, determine the X-axis, Y-axis and deflection angle Rz of the reference square mirror, and adjust the first adjustment part of the first direction adjustment component and the second adjustment part of the second direction adjustment component according to the difference between the measured data and the theoretical data, so as to adjust the reference square mirror to the theoretical position. The second measurement step: Use a coordinate measuring machine to measure the Z-axis dimension from the upper surface of the reference square mirror to the connecting surface of the positioning rod. Based on the difference between this measured data and the theoretical data, adjust the third nut on the positioning rod near the part to be connected to adjust the position of the positioning rod to reach the theoretical position. After reaching the theoretical position, use the third nut away from the part to be connected to lock the positioning rod. After locking the positioning rod, remeasure. The Z-axis dimension in the remeasured data must meet the accuracy requirements. Then, adjust the height of the positioning rods installed on the three support columns according to this process so that the Z-axis dimension from the connecting surface of each positioning rod to the upper surface of the reference square mirror meets the accuracy requirements. The third measurement step is to test and verify whether the deflection angles Rx and Ry of the plane formed by the connecting surfaces of the three positioning rods and the upper surface of the reference square mirror meet the requirements. If they meet the requirements, the six-degree-of-freedom adjustment of the reference square mirror is completed. If they do not meet the requirements, they need to be readjusted.

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