Light reflecting device, light guiding device, and light scanning device

Abstract

A light reflecting device (20) of the present application includes a reflecting member (42) having a planar reflecting surface. The reflecting surface reflects incident light. The reflecting member (42) simultaneously performs revolution and rotation. The revolution direction of the reflecting member is the same as the rotation direction. The revolution angular velocity of the reflecting member is twice the rotation angular velocity.

Description

[0001] This application is a divisional application of patent application No. 202080026865.9, filed on March 31, 2020, entitled "Light Reflection Device, Light Guiding Device and Light Scanning Device". Technical Field

[0002] The present invention relates to a light reflecting device that deflects and reflects incident light. Background Technology

[0003] In the past, the technique of scanning light from a light source along a straight scanning line has been widely used in laser processing equipment and image forming equipment. Patent documents 1 and 2 disclose the apparatus included in such an apparatus.

[0004] Patent Document 1 discloses a mirror rotation device comprising a light projection means and a light reflection means. The light projection means includes a mirror rotation device having multiple planar mirrors arranged in a regular polygonal configuration. Light incident from a predetermined direction is reflected by one of the planar mirrors in the rotating mirror rotation device, which emits light while moving at a constant speed. The light reflection means reflects the light emitted from the light projection means through multiple reflective parts, guiding the light to an arbitrary irradiated point on a predetermined scanning line.

[0005] Patent Document 2 describes a multi-faceted mirror rotation device that includes a light projection means and a light reflection means. The light projection means has a multi-faceted mirror, and light incident from a predetermined direction is reflected by the reflective surfaces of each side of the regular polygon of the rotating multi-faceted mirror. The multi-faceted mirror emits light while moving at a constant speed at an angle. The light reflection means reflects the light emitted from the light projection means through multiple reflective parts, guiding the light to any illuminated point on a predetermined scanning line.

[0006] Regarding the mirror rotation device in Patent Document 1, in a light projection method that only has a mirror rotation device, the reflection position of light on each planar mirror of the mirror rotation device changes with the rotation of the mirror rotation device, thereby causing scanning distortion and other issues. Furthermore, regarding the multifaceted mirror rotation device in Patent Document 2, in a light projection method that only has a multifaceted mirror rotation device, the reflection position of light on the reflecting surfaces of each side of the regular polygon of the multifaceted mirror changes with the rotation of the multifaceted mirror, thereby causing scanning distortion and other issues.

[0007] Therefore, the mirror rotation device in Patent Document 1 includes a reciprocating motion mechanism that sequentially moves the plane mirror back and forth, and suppresses changes in the reflection position of light by moving the plane mirror back and forth. Furthermore, the multifaceted mirror rotation device in Patent Document 2 includes a support member capable of rotatably supporting the multifaceted mirror, and a reciprocating motion mechanism that moves the support member back and forth, and suppresses changes in the reflection position of light by moving the multifaceted mirror and the support member back and forth together.

[0008] Furthermore, as described above, there is also a device equipped with a galvano mirror, which has a configuration that allows a movable part to swing back and forth, and the movable part includes a mirror. In this device, by adjusting the swing speed while swinging the movable part of the galvano mirror, it is possible to prevent changes in the position of light reflection.

[0009] [Existing technical documents]

[0010] [Patent Literature]

[0011] Patent Document 1: Japanese Patent Application Publication No. 2018-105903

[0012] Patent Document 2: Japanese Patent Application Publication No. 2018-97055 Summary of the Invention

[0013] The technical problem that the invention aims to solve

[0014] In the mirror rotation device of Patent Document 1 and the multifaceted mirror rotation device of Patent Document 2, although the change in the reflection position of light can be suppressed, it cannot be completely prevented. In addition, in the device equipped with a galvanometer mirror, in order to prevent the change in the reflection position of light, it is necessary to accelerate or decelerate the movable part of the galvanometer mirror when it swings. Therefore, the scanning area scanned by the device becomes narrower, and the processable range of the irradiated object is reduced.

[0015] Therefore, the object of the present invention is to prevent changes in the reflection position of light in a device that deflects light incident from a predetermined direction, without reducing the processable range of the irradiated object.

[0016] Technical solutions used to solve the problem

[0017] As described above, the problem that this invention aims to solve is now explained. The means used to solve this problem and their effects are described below.

[0018] According to a first aspect of the present invention, a light reflecting device with the following structure is provided. That is, the light reflecting device includes a reflecting member having a planar reflecting surface that reflects incident light, and simultaneously rotates and revolves. The rotation direction of the reflecting member is the same as its revolution direction. The revolution angular velocity of the reflecting member is equal to twice its rotation angular velocity.

[0019] According to a second aspect of the present invention, a light scanning device with the following structure is provided. That is, the light scanning device includes a rotating mirror, a driving device, and an illumination device. The driving device rotates the rotating mirror. The illumination device illuminates light toward the rotating mirror. The rotating mirror includes a first regular polygonal cone and a second regular polygonal cone. The second regular polygonal cone has its axis aligned with the axis of the first regular polygonal cone and is disposed opposite to the first regular polygonal cone. Each side of the first and second regular polygonal cones is a planar light-reflecting surface. The number of sides of the regular polygons on the first base surface of the first regular polygonal cone and the second base surface of the second regular polygonal cone are equal. Both the first and second base surfaces are perpendicular to the axis. The first and second regular polygonal cones are arranged such that the phase of the regular polygon on the first base surface coincides with the phase of the regular polygon on the second base surface, and they rotate integrally with each other about the axis as the rotation axis via the driving device. The base angle when the first regular polygonal cone is cut by a plane including the axis and passing through the midpoint of one side of the regular polygon on the first base surface is α°. The base angle of the second regular polygonal cone when cut by a plane including the axis and passing through the midpoint of one side of the regular polygon of the second base is (90-α)°. The distance between the first base and the second base is equal to the sum of the distance between the midpoint of one side of the regular polygon of the first base and the axis of rotation multiplied by tanα, and the distance between the midpoint of one side of the regular polygon of the second base and the axis of rotation multiplied by tan(90-α). The irradiation device illuminates light at a position intersecting the axis of rotation of the rotating mirror.

[0020] Therefore, since the reflection position of the light relative to the incident light becomes constant on the reflecting component, changes in the reflection position of the light can be prevented. Thus, distortion during scanning can be prevented.

[0021] Invention Effects

[0022] According to the present invention, in a light reflection device that deflects light incident from a predetermined direction, the position of light reflection can be prevented from changing. Attached Figure Description

[0023] Figure 1 This is a perspective view showing a laser processing apparatus equipped with the light guide device according to the first embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram illustrating an example of a light guide device having a reflective unit;

[0025] Figure 3 This is a 3D diagram of the reflective unit;

[0026] Figure 4 This is a cross-sectional view of the reflective unit;

[0027] Figure 5 This diagram illustrates the situation where the reflecting component rotates 180° during its 360° revolution around the sun;

[0028] Figure 6 It is a diagram illustrating the situation when incident light is reflected by the reflecting component;

[0029] Figure 7 This is a cross-sectional view of the reflective unit cut off by a plane perpendicular to the axis of revolution of the reflective component;

[0030] Figure 8 It is a diagram illustrating the relationship between the position of the incident light hitting the reflecting component and the angles of revolution and rotation;

[0031] Figure 9 This is a cross-sectional view showing a first modified example of the reflective unit;

[0032] Figure 10 This is a cross-sectional view showing a second modified example of the reflective unit;

[0033] Figure 11 This is a diagram showing the state when the first reflective unit in the light guide device of the second embodiment is in a reflective state;

[0034] Figure 12 It displays the first reflective unit from Figure 11 The state changes to the state through, and the second reflection unit from Figure 11 A diagram showing the state of transitioning from a reflective state to a reflective state; and

[0035] Figure 13 This is a perspective view of the rotating reflector in the third embodiment. Detailed Implementation

[0036] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. First, referring to... Figure 1 The structure of the laser processing apparatus (optical scanning apparatus) 1 equipped with the light guiding device 13 of the first embodiment of the present invention will be described. Figure 1 This is a three-dimensional view of laser processing device 1.

[0037] Figure 1The laser processing apparatus 1 shown can process the workpiece (irradiated object) 200 by irradiating it with laser light while performing optical scanning.

[0038] In this embodiment, the laser processing apparatus 1 is capable of performing non-thermal processing. Non-thermal processing includes, for example, ablation processing. Ablation processing is a process in which a portion of a workpiece 200 is evaporated by irradiating a portion of the workpiece 200 with a laser beam. Furthermore, the laser processing apparatus 1 can also be configured for thermal processing, that is, to process the workpiece 200 by using the heat of the laser beam.

[0039] Workpiece 200 is a plate-shaped component. Workpiece 200 may be made of, for example, CFRP (carbon fiber reinforced plastic). Furthermore, workpiece 200 is not limited to a plate-shaped component; it may also be a block-shaped component. Additionally, workpiece 200 may be made of other materials.

[0040] The laser beam used in the laser processing apparatus 1 can be visible light or an electromagnetic wave with a wavelength band other than visible light. In addition, in this embodiment, not only visible light, but also various electromagnetic waves including those with a wider wavelength band are referred to as "light".

[0041] like Figure 1 As shown, the laser processing apparatus 1 includes a transport unit 11, a laser generator 12, and a light guide device 13.

[0042] The transport unit 11 is capable of transporting the workpiece 200 in a direction approximately orthogonal to the main scanning direction (sub-scanning direction) of the laser processing apparatus 1. Furthermore, laser processing is performed while transporting the workpiece 200 via the transport unit 11.

[0043] In this embodiment, the transport unit 11 is a belt conveyor. Furthermore, the transport unit 11 is not particularly limited; it can also be a roller conveyor or a structure that holds and transports the workpiece 200. Alternatively, the transport unit 11 can be omitted, and the stationary workpiece 200 can be processed by irradiating it with laser light.

[0044] The laser generator 12 is a laser light source capable of generating short-duration pulsed lasers through pulse oscillation. The duration of the pulsed laser is not particularly limited, and can be, for example, a short time interval on the order of nanoseconds, picoseconds, or femtoseconds. Furthermore, the laser generator 12 can also be configured to generate CW lasers through continuous wave oscillation.

[0045] The light guide device 13 guides the laser beam generated by the laser generator 12 onto the workpiece 200. The laser beam guided by the light guide device 13 illuminates a point 202 on a scanning line 201 defined on the surface of the workpiece 200. As will be explained in detail later, the illuminated point 202 on the workpiece 200, illuminated by the laser beam, moves at a substantially constant speed along the linear scanning line 201 by the operation of the light guide device 13. This enables optical scanning.

[0046] Next, refer to Figure 2 The light guide device 13 is described in detail. Figure 2 This is a schematic diagram showing the configuration of the light guide device 13.

[0047] like Figure 2 As shown, the light guide device 13 includes at least one reflective unit (light reflector) 20. In this embodiment, the light guide device 13 includes one reflective unit 20. The reflective unit 20 is disposed inside the housing 17 of the light guide device 13.

[0048] When a laser beam emitted from the laser generator 12 is incident on the workpiece 20, the reflecting unit 20 reflects the laser beam and guides it toward the workpiece 200. In the following description, the laser beam incident on the reflecting unit 20 from the laser generator 12 is also referred to as the incident light. The reflecting unit 20 is arranged at a predetermined distance from the workpiece 200.

[0049] The reflective unit 20 is capable of optical scanning by reflecting and deflecting incident light. Figure 1 as well as Figure 2 The display shows a scanning area 31, which is the area where the workpiece 200 is optically scanned by the reflection unit 20. The scan line 201 is formed by the scanning area 31. The scanning area 31 is scanned by the reflection unit 20.

[0050] Next, refer to Figures 2 to 4 The reflective unit 20 is described in detail. Figure 3 This is a three-dimensional view of the reflective unit 20. Figure 4 This is a cross-sectional view of the reflective unit 20.

[0051] like Figure 2 As shown, the reflective unit 20 includes a support plate (support component) 41, a reflective component 42, a motor 44, a prism 51, and a scanning lens 53.

[0052] The support plate 41 is a circular plate-shaped component and is rotatable relative to the housing 63 described later. The first rotating shaft 61 is rotatably supported on the housing 63. The support plate 41 is fixed to one axial end of the first rotating shaft 61. The output shaft of the motor 44 is connected to the other axial end of the first rotating shaft 61.

[0053] like Figure 4 As shown, the reflective unit 20 includes a housing 63 that houses the drive transmission mechanism of the reflective unit 20. The housing 63 is fixed to... Figure 2 The appropriate location of the housing 17 shown.

[0054] The housing 63 is formed as a hollow cylindrical shape that is open on one axial side. The support plate 41 is arranged to close the open side of the housing 63. The first rotation shaft 61 is arranged to pass through the housing 63.

[0055] The reflective component 42 is formed as a block. The reflective component 42 is rotatable relative to the support plate 41. The second rotation axis 62 is rotatably supported on the support plate 41. The second rotation axis 62 is oriented in a direction parallel to the first rotation axis 61 and is arranged to pass through the support plate 41.

[0056] The reflective component 42 is supported on the support plate 41 across the base 71 and the second rotation axis 62.

[0057] like Figure 3 As shown, the base 71 is formed into a small circular plate shape. (As...) Figure 4 As shown, the base 71 is fixed to one axial end of the second rotating shaft 62. The other axial end of the second rotating shaft 62 is located inside the housing 63.

[0058] The reflective component 42 is fixed to the base 71. Therefore, the reflective component 42 can rotate together with the base 71 and the second rotation axis 62.

[0059] The reflective component 42 can rotate (revolve) together with the support plate 41 about the first rotation axis 61, and simultaneously rotate (rotate) about the second rotation axis 62. In the following description, the axis of the first rotation axis 61 will also be referred to as the revolution axis, and the axis of the second rotation axis 62 will be referred to as the rotation axis. Furthermore, the drive mechanism of the reflective component 42 will be described later.

[0060] In this embodiment, three reflective elements 42 are provided. The three reflective elements 42 are disposed on the side of the support plate 41 away from the housing 63.

[0061] like Figure 2 As shown, three reflective elements 42 are arranged on the support plate 41 in a manner that equally divides a circle, with the circle centered on the first rotation axis 61. Specifically, the three reflective elements 42 are arranged at equal intervals (120° intervals) in the circumferential direction of the support plate 41.

[0062] The reflective component 42 reflects light and guides it to the scanning area 31. For example... Figure 4As shown, the reflective component 42 has a first reflective portion 81 and a second reflective portion 82. The first reflective portion 81 and the second reflective portion 82 are arranged in pairs, separated by a second rotation axis 62 (rotation axis).

[0063] Specifically, the reflective component 42 is formed into a rectangular block shape. In this reflective component 42, the first reflective portion 81 is disposed on one of two opposing surfaces separated by the axis of rotation, and the second reflective portion 82 is disposed on the other surface. The first reflective portion 81 and the second reflective portion 82 are formed symmetrically to each other.

[0064] Details will be explained later, but the rotational angular velocity of the support plate 41 is driven in a manner equal to twice the rotational angular velocity of the reflective component 42. Therefore, during the period when the support plate 41 rotates 360°, the reflective component 42 rotates 180°.

[0065] When the reflective component 42 is viewed along the direction of its rotation axis, the first reflective part 81 and the second reflective part 82 are arranged in a manner that they face opposite sides to each other.

[0066] Figure 5 This shows the revolution and rotation of one of the three reflecting elements 42, focusing on that element. To facilitate understanding the orientation of the reflecting element 42, in... Figure 5 In the image, a shading line is added to the edge of the reflective component 42 near the first reflective part 81. Figure 5 In the middle, the direction of revolution and the direction of rotation of the reflecting component 42 are both counterclockwise.

[0067] like Figure 5 As shown, as the support plate 41 rotates 360°, the reflective component 42 rotates 180° in conjunction with it. Therefore, for every 360° revolution, the reflective component 42 rotates 180°, changing the orientation of the first reflective part 81 and the second reflective part 82. In this way, for every 360° rotation of the support plate 41, the surfaces reflecting incident light alternately switch between the first reflective part 81 and the second reflective part 82.

[0068] The first reflective part 81 and the second reflective part 82 each have a first reflective surface 85 and a second reflective surface 86, respectively. Since the first reflective part 81 and the second reflective part 82 have basically the same structure, the following description will use the structure of the first reflective part 81 as an example.

[0069] The following is a detailed description: a V-shaped groove is formed on the reflective component 42, which is designed to open away from the rotation axis. The long side of the groove faces a direction perpendicular to the rotation axis. A first reflective surface 85 and a second reflective surface 86 are formed on the inner wall of the groove. The first reflective part 81 is composed of the first reflective surface 85 and the second reflective surface 86.

[0070] Both the first reflective surface 85 and the second reflective surface 86 are planar. The first reflective surface 85 is inclined relative to a virtual plane perpendicular to the second rotation axis 62. The second reflective surface 86 is also inclined relative to a virtual plane perpendicular to the second rotation axis 62.

[0071] like Figure 6 As shown, the first reflective surface 85 and the second reflective surface 86 are inclined in opposite directions at equal angles θ (specifically 45°) relative to a virtual plane perpendicular to the second rotation axis 62. Therefore, the first reflective surface 85 and the second reflective surface 86 are symmetrically formed with respect to a plane of symmetry 87 perpendicular to the second rotation axis 62. The first reflective surface 85 and the second reflective surface 86 are arranged in a V-shape forming a 90° angle.

[0072] With the aforementioned configuration, the incident light guided towards the light guide device 13 is bent by the prism 51 and then travels along the first optical path L1 toward the direction approaching the reflective unit 20. The first optical path L1 is oriented in a direction orthogonal to the revolution axis of the reflective component 42.

[0073] Three reflective components 42 are driven by a motor 44 to revolve and rotate, moving in a manner that sequentially cuts off the first optical path L1. Therefore, the three reflective components 42 sequentially contact the incident light incident along the first optical path L1 and reflect the light.

[0074] Near the timing point when the revolving reflective component 42 reaches the position closest to the upstream side of the first optical path L1, the first reflective surface 85 of the first reflective part 81 or the second reflective part 82, such as Figure 3 The light is arranged to overlap with the first optical path L1. Therefore, the incident light is reflected by the first reflecting surface 85 and then by the second reflecting surface 86.

[0075] like Figure 4 As shown, when incident light illuminates the reflecting member 42, if the reflecting member 42 revolves and rotates, the directions of the first reflecting surface 85 and the second reflecting surface 86 change continuously. Therefore, the direction of the light emitted from the second reflecting surface 86 is as follows: Figure 3 The hollow arrow in the image shows a smooth change. This allows for the deflection of the emitted light.

[0076] Since the first reflecting surface 85 and the second reflecting surface 86 are configured in a V-shape, the light emitted from the reflecting component 42 is deflected along a plane perpendicular to the axis of rotation as the reflecting component 42 revolves and rotates. This plane is offset relative to the first optical path L1 towards the second rotation axis 62 (in other words, the first rotation axis 61). Therefore, the light reflected by the second reflecting surface 86 can be guided towards the workpiece 200 via the second optical path L2, which is offset relative to the first optical path L1.

[0077] The incident light is incident on the reflecting unit 20 in a direction perpendicular to both its rotation axis and its revolution axis. Furthermore, when the revolution phase of the reflecting component 42 is perfectly aligned with the direction of the incident light, if viewed along the second rotation axis 62, the first reflecting surface 85 and the second reflecting surface 86 are orthogonal to the incident light. Therefore, at this time, the incident light... Figure 3 The light is reflected twice by the reflector 42 in a refracting manner and exits along the second light path L2, which is parallel to and opposite to the direction of the first light path L1.

[0078] Thus, the incident light is deflected by the first reflecting surface 85 and the second reflecting surface 86. Here, as... Figure 6 As shown, consider the mirror image of symmetry plane 87 relative to the first reflecting surface 85, and the mirror image of symmetry plane 87 relative to the second reflecting surface 86. Both mirror images become planes 88 located inside the reflecting component 42. From the viewpoint of optical path length, the case where incident light is deflected and reflected while passing through the first reflecting surface 85 and the second reflecting surface 86 is equivalent to the case where incident light is reflected through plane 88 without being deflected. In this sense, the virtual plane 88 can be said to be a reflective surface in form.

[0079] Plane 88 is explained from another perspective. In the following description, the optical path from the incident light being reflected by the first reflecting surface 85 to being reflected by the second reflecting surface 86 is called the intermediate optical path L3. The bisection point of the intermediate optical path L3 is located on the plane of symmetry 87.

[0080] like Figure 6 As shown by the dashed line, consider the case where the first optical path L1 of the incident light is extended by protruding into the interior of the reflecting member 42 from the first reflecting surface 85. The point 77 at the front end of the extension line 76 of the first optical path L1 of the incident light, which is extended by half the length D1 of the intermediate optical path L3, is located on the plane 88.

[0081] Similarly, consider the case where the second optical path L2 of the incident light is extended by protruding into the interior of the reflecting member 42 from the second reflecting surface 86. The point 79 at the front end of the extension line 78 of the second optical path L2 of the incident light, which is half the length D1 of the intermediate optical path L3, lies on the plane 88.

[0082] Figure 6 This indicates that the direction of the second optical path L2 is in the center of the deflection angle range. However, regardless of the direction in which the incident light is deflected by the reflecting component 42, the leading ends of the extension lines 76 and 78 are always located on the plane 88.

[0083] This plane 88 also serves as a reference plane for the symmetrical arrangement of the first reflective part 81 and the second reflective part 82. Therefore, although in Figure 6The plane 88 is shown in relation to the first reflector 81, but the plane 88 is shared by both the first reflector 81 and the second reflector 82. Furthermore, in this embodiment, the rotation axis of the reflecting member 42 (in other words, the axis of the second rotation axis 62) is arranged in a manner that includes it within the plane 88.

[0084] Therefore, the incident light is deflected by the first reflective portion 81 and the second reflective portion 82 of the reflective member 42, which is essentially the same as the incident light is deflected by placing the reflective surface on the surface or back of the zero-thickness plane 88 that rotates and revolves together with the reflective member 42. Figure 2 The relationship between the reflective component 42, which shows the rotation and revolution, and the plane 88.

[0085] The prism 51 is composed of suitable optical elements. The prism 51 is disposed upstream of the reflective component 42 on the first optical path L1. Through this prism 51, laser light from the laser generator 12 can be guided to the reflective component 42.

[0086] The scanning lens 53 is a freeform lens, such as a known fθ lens. The scanning lens 53 is positioned between the reflecting member 42 and the scanning area 31. This scanning lens 53 allows the focal length to remain constant in both the central and peripheral portions of the scanning range.

[0087] Motor 44 generates a driving force to cause the reflector 42 to revolve and rotate. This driving force is transmitted via the output shaft of motor 44 to a planetary gear set, causing the support plate 41 and the reflector 42 to rotate. Furthermore, in this embodiment, motor 44 is an electric motor, but is not limited thereto.

[0088] Next, refer to Figure 4 as well as Figure 7 The drive mechanism used to rotate the support plate 41 and the reflective component 42 will be described. Figure 7 This is a cross-sectional view of the reflective unit 20 cut off by a plane perpendicular to the revolution axis.

[0089] like Figure 4 As shown, the center of the support plate 41 is fixed to one axial end of the first rotating shaft 61. The output shaft of the motor 44 is connected to the other axial end of the first rotating shaft 61.

[0090] Furthermore, a second rotating shaft 62 is disposed radially outward from the center of the support plate 41. The second rotating shaft 62 is rotatably supported on the support plate 41. One axial end of the second rotating shaft 62 is disposed outside the housing 63 and fixed to the base 71. The other axial end of the second rotating shaft 62 is disposed inside the housing 63.

[0091] like Figure 7 As shown, planetary gear 91 is fixed inside housing 63 to second rotating shaft 62. Planetary gear 91 meshes with sun gear 92 disposed around first rotating shaft 61 via intermediate gear 93. Sun gear 92 is fixed to housing 63. Intermediate gear 93 is rotatably supported on support plate 41.

[0092] Therefore, when the drive motor 44 is activated, the driving force of the motor 44 is transmitted to the first rotating shaft 61, causing the support plate 41 to rotate. Through the rotation of the support plate 41, the shafts of the intermediate gear 93 and the planetary gear 91 (the second rotating shaft 62) move around the sun gear 92. At this time, the intermediate gear 93, which meshes with the sun gear 92, rotates, and the planetary gear 91, which meshes with the intermediate gear 93, also rotates. Thus, the reflecting component 42, which is fixed to the planetary gear 91 across the second rotating shaft 62, simultaneously revolves and rotates.

[0093] The sun gear 92 is fixed to the housing 63. An intermediate gear 93 separates the planetary gear 91 from the sun gear 92. Therefore, the rotation direction of the planetary gear carrier, i.e., the support plate 41, is the same as the rotation direction of the second rotating shaft 62 (reflecting member 42). Furthermore, the number of teeth on the planetary gear 91 is twice the number of teeth on the sun gear 92. Consequently, the revolution angular velocity of the reflecting member 42 is equal to twice its rotation angular velocity.

[0094] Next, refer to Figure 8 The relationship between the revolution angular velocity and the rotation angular velocity of the reflecting component 42 is explained in detail.

[0095] exist Figure 8 In the diagram, the trajectory of the second rotation axis 62 as it rotates with the support plate 41 is shown as a revolution circle 101. The center of the revolution circle 101 is located at the intersection of the X-axis and Y-axis, which extend in mutually perpendicular directions (origin O). The origin O corresponds to the revolution axis of the reflecting member 42. As described above, it can be considered that the deflection of light on the reflecting member 42 is substantially the same as the deflection produced by light reflection through the plane 88. Therefore, in Figure 8 In the diagram, the reflective component 42 is represented by a straight line on the equivalent virtual reflective surface, namely plane 88.

[0096] The axis of rotation of the reflecting component 42 is located at any point on the revolution circle 101. Here, consider the state where the axis of rotation of the reflecting component 42 is located at point P, and the direction of the reflecting surface of the reflecting component 42 is perpendicular to the X-axis. In this case, light incident at the origin O along the X-axis is reflected at point P by the reflecting component 42. When... Figure 8 In this way, when performing two-dimensional observation, the light path of the reflected light is consistent with the light path of the incident light.

[0097] Assuming that with the rotation of the support plate 41, the position of the rotation axis of the reflecting component 42 changes by an angle θ and moves from point P to point Q. Consider the relationship between the rotation angle of the reflecting component 42 and its revolution angle, so that the point on the reflecting component 42 where the incident light hits does not change from point P even after the revolution.

[0098] In order for the incident light to be reflected at point P even when the rotation axis of the reflecting component 42 is located at point Q, the orientation of the reflecting component 42 must be consistent with the direction of the straight line drawn from point Q to point P.

[0099] Assume that the midpoint of the line connecting point P and point Q is M. Additionally, imagine a line passing through point Q and extending parallel to the Y-axis, and let N be the intersection of this line and the X-axis.

[0100] Since points P and Q both lie on the circumference of the revolution circle 101, triangle OPQ is an isosceles triangle. Therefore, the angle OPM formed by lines OP and PM is equal to the angle OQM formed by lines OQ and QM. Line OM is orthogonal to line PQ. Furthermore, line OP is orthogonal to line QN.

[0101] If we focus on triangles OQM and NQP, as mentioned above, two angles of a triangle are equal. Therefore, triangle OQM is similar to triangle NQP.

[0102] Therefore, the angle QOM formed by lines QO and OM is equal to the angle PQN formed by lines PQ and QN. The angle QOP formed by lines QO and OP is θ. Thus, angle QOM is θ / 2, and angle PQN is also θ / 2.

[0103] The result shows that if the orbital angular velocity of the reflecting component 42 is twice its rotational angular velocity, the reflecting component 42 will cut off the light path by always contacting the incident light at point P, thus making the length of the light path constant.

[0104] As described above, in this embodiment, the incident light is reflected and deflected by rotating the reflective member 42, which has reflective surfaces 85 and 86. Since the reflective member 42 is driven to rotate at a constant angular velocity and does not undergo reciprocating motion (acceleration and deceleration) like a galvanometer reflector, the narrowing of the scanning area 31, which keeps the moving speed of the irradiated point 202 constant, can be avoided, and the reduction in the processable range of the workpiece 200 due to light factors can be suppressed. Furthermore, by combining the revolution and rotation of the reflective member 42, the variation of the point where the reflective member 42 contacts the incident light can be prevented, and thus, like a galvanometer reflector, the light can be guided to the scanning lens 53 in an ideal state. In this way, a light reflection device that combines the characteristics of a multifaceted mirror (high illumination rate) and a galvanometer reflector (difficulty in variation of the reflection point) can be obtained.

[0105] As explained above, the reflecting unit 20 of this embodiment includes a reflecting member 42, which has planar reflecting surfaces 85 and 86. The reflecting surfaces 85 and 86 reflect incident light. The reflecting member 42 simultaneously revolves and rotates. The direction of the revolution of the reflecting member 42 is the same as the direction of its rotation. The angular velocity of the revolution of the reflecting member 42 is twice the angular velocity of its rotation.

[0106] Therefore, the reflection position of the light relative to the incident light in the reflecting member 42 becomes constant, preventing changes in the reflection position. This reduces scanning distortion. Compared to a galvanometer mirror, deflection can be achieved by rotating the reflecting member 42 rather than by reciprocating movement, making it easier to perform scanning at a constant speed.

[0107] Furthermore, in the reflection unit 20 of this embodiment, the reflecting surfaces 85 and 86 are arranged in pairs, separated by the rotation axis of the reflecting component 42.

[0108] The reflecting component 42 rotates 180° on its axis for every 360° revolution around the sun to change its direction. Therefore, by arranging a pair of reflecting surfaces 85 and 86 with their directions differing by 180° from each other in the reflecting component 42, one of the reflecting surfaces can effectively reflect the light when the reflecting component 42 cuts off the light path of the incident light. Thus, the incident light can be efficiently guided to the workpiece 200.

[0109] Furthermore, the reflective unit 20 of this embodiment includes three reflective components 42. The three reflective components 42 have the same axis of revolution. The three reflective components 42 are arranged in a manner that divides a circle at equal angular intervals, with the axis of revolution as the center of the circle.

[0110] This allows the incident light to be guided to the workpiece 200 more efficiently.

[0111] In addition, the reflection unit 20 of this embodiment is equipped with a planetary gear set, which performs the revolution and rotation of the reflection component 42.

[0112] Thus, the combined action of the revolution and rotation of the reflective component 42 can be achieved with a simple configuration.

[0113] Furthermore, in the reflection unit 20 of this embodiment, such as Figure 3 As shown, the reflecting member 42 reflects light in a manner that deflects along a plane perpendicular to the rotation axis. This plane is offset toward the rotation axis relative to the incident light incident on the reflecting member 42.

[0114] Thus, it is possible to achieve a layout in which the reflected light reflected by the reflective component 42 does not interfere with the optical component, which guides the incident light to the reflective unit 20.

[0115] In this embodiment, a first reflecting surface 85 and a second reflecting surface 86 are formed on the reflecting member 42. The first reflecting surface 85 is formed as a plane inclined relative to a plane perpendicular to the rotation axis of the reflecting member 42. The second reflecting surface 86 is also formed as a plane inclined relative to a plane perpendicular to the rotation axis of the reflecting member 42. The direction in which the first reflecting surface 85 is inclined relative to the plane perpendicular to the rotation axis is opposite to the direction in which the second reflecting surface 86 is inclined relative to the plane perpendicular to the rotation axis. Incident light is reflected by the first reflecting surface 85 and then by the second reflecting surface 86. The first reflecting surface 85 and the second reflecting surface 86 are formed symmetrically with respect to a plane of symmetry 87. The mirror image of the plane of symmetry 87 relative to the first reflecting surface 85 and the mirror image of the plane of symmetry 87 relative to the second reflecting surface 86 are located on the same plane 88. The rotation axis of the reflecting member 42 is included within the mirror plane 88.

[0116] Thus, a simple configuration can be achieved: the reflective member 42 reflects the incident light while deflecting the incident light, and the reflection position of the light relative to the incident light in the reflective member 42 is constant.

[0117] Furthermore, in the light guiding device 13 of this embodiment, the first reflective surface 85 is tilted at an angle θ of 45° relative to the plane perpendicular to the rotation axis. The second reflective surface 86 is tilted at an angle θ of 45° relative to the plane 88 perpendicular to the rotation axis.

[0118] Thus, a simple configuration of the reflective component 42 can be achieved.

[0119] Furthermore, the light guiding device 13 of this embodiment includes the aforementioned reflective unit 20. Incident light is deflected by the reflective unit 20 to scan the workpiece 200.

[0120] This enables scanning with minimal distortion.

[0121] Furthermore, the light guiding device 13 of this embodiment includes a scanning lens 53. The scanning lens 53 is disposed in the optical path from the self-reflecting member 42 to the scanning area 31.

[0122] This allows for a consistent focal length across the entire scanning area. Furthermore, it enables the light to be guided to the scanning lens 53 in an ideal manner.

[0123] Next, a first variation of the drive mechanism for the support plate 41 and the reflective component 42 will be described. In the description of this variation, components that are the same as or similar to those in the described embodiment will be referred to by the same reference numerals in the figures, and their descriptions will be omitted.

[0124] exist Figure 9 In the modified example shown, a ring gear 94 is fixed near the outer periphery of the support plate 41. The ring gear 94 meshes with a drive gear 95 fixed to the output shaft of the motor 44. Other structures are similar. Figure 4 They are basically the same.

[0125] In this modified example, the support plate 41 can also be rotated by the drive of the motor 44 to make the reflective component 42 revolve and rotate.

[0126] Next, a second variation of the drive mechanism for the support plate 41 and the reflective component 42 will be described. In the description of this variation, components that are the same as or similar to those in the described embodiment will be referred to by the same reference numerals in the figures, and their descriptions will be omitted.

[0127] exist Figure 10 In the variant examples shown, it is also similar to Figure 9 Similarly, a ring gear 94 is fixed near the outer periphery of the support plate 41.

[0128] A second-stage gear 96 is rotatably supported inside the housing 63. The second-stage gear 96 has a major-diameter gear 96a and a minor-diameter gear 96b. The major-diameter gear 96a and the minor-diameter gear 96b rotate integrally with each other. The major-diameter gear 96a meshes with a drive gear 95 fixed to the output shaft of the motor 44. The minor-diameter gear 96b meshes with a ring gear 94.

[0129] Inside the housing 63, a transmission gear 97 is rotatably supported. The transmission gear 97 meshes with the large-diameter gear 96a of the second-stage gear 96.

[0130] Unlike the embodiments described above, the sun gear 92 is rotatably supported on the housing 63. The transmission gear 97 is connected to the sun gear 92 via a transmission shaft 98. The sun gear 92 and the transmission shaft 98 rotate integrally.

[0131] In this variant, the intermediate gear 93 is omitted. The sun gear 92 meshes directly with the planet gear 91 without being separated by the intermediate gear 93.

[0132] With this configuration, when the drive motor 44 is activated, the second-stage gear 96 rotates. As a result, the ring gear 94 is driven by the minor diameter gear 96b, causing the support plate 41 to rotate. Simultaneously, the transmission gear 97 is driven by the major diameter gear 96a, causing the sun gear 92 to rotate.

[0133] The sun gear 92 rotates in the same direction as the support plate 41 with an angular velocity greater than that of the support plate 41. As a result, the planetary gear 91 can rotate in the same direction as the revolution. In addition, by specifying the number of teeth of the second-stage gear 96, etc., according to a known formula, it is possible to form a configuration in which the revolution angular velocity of the reflecting member 42 is twice its rotation angular velocity, and both revolution and rotation occur simultaneously.

[0134] Next, refer to Figure 11 as well as Figure 12 This section describes a second embodiment of the light guide device 13. In this description, components that are the same as or similar to those in the previous embodiment are represented by the same symbols in the figures, and their descriptions are omitted.

[0135] The difference between this embodiment and the first embodiment is that the light guide device 13 has multiple reflective units 20. This embodiment is used, for example, to process a workpiece 200 that is longer in the main scanning direction compared to the first embodiment.

[0136] like Figure 11 as well as Figure 12 As shown, the light guide device 13 includes multiple reflective units 20. In this embodiment, the light guide device 13 is equipped with two reflective units 20. Each reflective unit 20 reflects the laser light incident from the laser generator 12 and guides it to the workpiece 200.

[0137] Two reflective units 20 are arranged in a straight line along the main scanning direction. The arrangement direction of the reflective units 20 is also consistent with the long side direction of the scan line 201. The two reflective units 20 are respectively positioned at approximately the same distance from the scan line 201.

[0138] Hereinafter, regarding the multiple reflecting units 20, the reflecting unit 20 located upstream (closer to the laser generator 12) in the direction of incident light travel can be referred to as the first reflecting unit 21. The reflecting unit 20 located downstream (away from the laser generator 12) in the direction of incident light travel can also be referred to as the second reflecting unit 22.

[0139] Each reflective unit 20 can perform optical scanning by reflecting and deflecting laser light. The area (scanning area) 181 where the workpiece 200 is scanned by the first reflective unit 21 is different from the scanning area 182 of the second reflective unit 22. The two scanning areas 181 and 182 are arranged in a straight line. The scan line 201 is composed of the combination of the two scanning areas 181 and 182.

[0140] Each reflective unit 20 can repeatedly switch between a reflective state in which incident light is reflected and scanned, and a pass-through state in which incident light is not reflected and passes through to the downstream side. When the reflective unit 20 is in the reflective state, the light scans the corresponding scanning area (for example, scanning area 181 in the case of the first reflective unit 21). When the reflective unit 20 is in the pass-through state, the reflective unit 20 does not perform light scanning.

[0141] The timing for each reflective unit 20 to enter the reflective state varies among the multiple reflective units 20. Therefore, by switching the reflective unit 20 that is in the reflective state, multiple scanning areas are scanned respectively.

[0142] In this embodiment, two reflective elements 42 are provided relative to one reflective unit 20. The two reflective elements 42 are respectively arranged on the support plate 41 in a manner that divides 360° equally. Specifically, the two reflective elements 42 are arranged such that one reflective element 42 is offset from the other reflective element 42 by 180° in the circumferential direction of the support plate 41.

[0143] On the support plate 41, two reflective elements 42 are positioned corresponding to opposite sides of a regular polygon (specifically, a regular quadrilateral). Thus, one of the reflective elements 42 has a central angle of 90°. No reflective elements 42 are positioned corresponding to sides other than the opposite sides.

[0144] When the two reflective components 42 move with the rotation of the support plate 41, they alternately switch between a state where the reflective components 42 are in contact with the laser beam and a state where they are not in contact. The laser beam is incident on the reflective unit 20 and travels along the first optical path L1. Figure 11 As shown in the first reflecting unit 21, the state in which either of the two reflecting components 42 comes into contact with the incident light is the reflection state. Figure 12 As shown in the first reflecting unit 21, the state in which neither of the two reflecting components 42 comes into contact with the incident light is the passing state.

[0145] The first optical path L1 is orthogonal to the first rotation axis 61 and the second rotation axis 62. Furthermore, the two reflective elements 42 are configured to be 180° out of phase with each other. Therefore, of the two reflective elements 42 positioned across the first rotation axis 61, only the reflective element 42 located on the upstream side closer to the first optical path L1 comes into contact with the incident light.

[0146] The two reflective units 20 described above constitute the light guiding device 13 of this embodiment by being positioned relative to the incident light entering from the laser generator 12 via a suitable prism 51. In the two reflective units 20, the revolution axis and rotation axis of the reflective member 42 are parallel to each other. Furthermore, the reflective member 42 revolves and rotates in the same direction. The revolution angular velocity of the reflective member 42 is equal to twice its rotation angular velocity.

[0147] Furthermore, each of the reflecting members 42 revolves with an angular velocity equal to that of the reflecting member 42 of the other reflecting unit 20 and in the same orientation, while having a rotational phase offset by a predetermined angle (90° in this embodiment). As a result, the timing at which the reflecting member 42 comes into contact with the incident light can be different between the two reflecting units 20.

[0148] The revolution and rotation of the reflecting components 42 in the multiple reflecting units as described above can be achieved, for example, by controlling the motors (not shown) of the two reflecting units 20 in a synchronous rotation manner. However, for example, the two reflecting units 20 can also be driven by a common motor.

[0149] Figure 11 This shows the situation where the first reflection unit 21 of the two reflection units 20 is in a reflection state while the second reflection unit 22 is in a pass-through state. Figure 12 The reflective components 42 of each reflective unit 20 are displayed. Figure 11 As a result of the revolution and rotation of the state, the first reflective unit 21 becomes a passing state while the second reflective unit 22 becomes a reflecting state. In this way, the reflective units 20 that perform light scanning can be switched sequentially, and overall light scanning along the scan line 201, which is longer than that in the first embodiment, can be achieved.

[0150] As explained above, in the laser processing apparatus 1 of this embodiment, the reflecting component 42 of the reflecting unit 20 simultaneously revolves and rotates, switching between a reflection state where incident light irradiates the reflecting surface 85 and is reflected, and a passage state where incident light does not irradiate the reflecting surface 85 and passes through. The timing of entering the reflection state differs among the multiple light guiding devices 13. A straight scanning line 201 is composed of a set of scanning areas 181 and 182 corresponding to the multiple light guiding devices 13.

[0151] This enables scanning along long scan lines.

[0152] Next, refer to Figure 13 The diagram illustrates a specially shaped reflective component, namely the rotating reflector 250. In this embodiment, components that are the same as or similar to those in the described embodiment are represented by the same symbols in the figures, and their descriptions are omitted.

[0153] The rotating reflector 250 includes a first regular polygonal cone 251 and a second regular polygonal cone 252. In this embodiment, the two regular polygonal cones 251 and 252 are formed into regular octagonal cones, but are not limited thereto.

[0154] Two regular polygonal pyramids 251 and 252 are arranged opposite each other, with their axes 260 aligned. The two regular polygonal pyramids 251 and 252 are joined together by a central portion 255. Therefore, the two regular polygonal pyramids 251 and 252 are essentially formed into a polygonal frustum shape.

[0155] A drive shaft 259 is mounted on the rotating reflector 250. The rotating reflector 250 is rotated by transmitting the driving force of a drive device (specifically, a motor, not shown in the figure) to the drive shaft 259. The reflecting device that reflects and deflects light consists of the rotating reflector 250 and the drive device. The rotation axis at this time coincides with the axis 260 of the two regular polygonal cones 251 and 252.

[0156] The lateral sides of two regular polygonal cones 251 and 252 are planar light-reflecting surfaces 257. The light-reflecting surfaces 257 are arranged around an axis 260. Each light-reflecting surface 257 is inclined relative to the axis 260.

[0157] The first regular polygonal cone 251 has a first base 261. The second regular polygonal cone 252 has a second base 262. The first base 261 and the second base 262 are regular polygons and are arranged perpendicular to the axis 260.

[0158] In this embodiment, the first regular polygonal cone 251 and the second regular polygonal cone 252 have the same shape. Since the two regular polygonal cones 251 and 252 are regular octagonal cones, both the first base 261 and the second base 262 are regular octagons. Therefore, the regular polygons of the first base 261 and the second base 262 have the same number of sides.

[0159] Two regular polygonal cones 251 and 252 are joined together by a middle section 255 in such a way that the phases of the regular octagons on the two bases 261 and 262 are consistent with each other.

[0160] Figure 13A virtual plane 270 is shown that cuts off the rotating mirror 250. The virtual plane 270 includes an axis 260 and is defined by the midpoints 271 and 272 of one side of a regular octagon passing through the bottom surfaces 261 and 262.

[0161] Assuming the base angle when the virtual plane 270 cuts through the first regular polygonal cone 251 is set as α, and the base angle when the virtual plane 270 cuts through the second regular polygonal cone 252 is set as β, then in the rotating reflector 250 of this embodiment, the relationship α + β = 90° is satisfied. In this embodiment, α = β = 45°, but it is not limited to this. For example, α = 30°, β = 60°, etc., can also be set.

[0162] Furthermore, in this embodiment, when the distance between the first bottom surface 261 and the second bottom surface 262 is set to D2, the distance between the midpoint 271 of one side of the regular polygon of the first bottom surface 261 and the axis 260 is set to D3, and the distance between the midpoint 272 of one side of the regular polygon of the second bottom surface 262 and the axis 260 is set to D4, the relationship D2 = D3 × tanα + D4 × tanβ is satisfied.

[0163] With the above configuration, when considering the contour obtained by cutting the rotating mirror 250 with the virtual plane 270, the straight line 281 corresponding to the light reflecting surface 257 of the first regular polygonal cone 251 and the straight line corresponding to the light reflecting surface 257 of the second regular polygonal cone 252 become mutually perpendicular.

[0164] Furthermore, since the relationship of the aforementioned formula is satisfied between distances D2, D3, and D4, therefore, if... Figure 13 As shown by the dashed line, extending the two lines 281 and 282 will result in their intersection point located at axis 260. This becomes clear by considering the relationship between the two right triangles and tanα and tanβ.

[0165] Incidentally, in the described embodiment Figure 6 In the reflective component 42, its rotation axis is configured such that it is included within a reflective surface in the form of a virtual plane 88, i.e., light. Figure 13 The rotating reflector 250 is constructed by expanding the aforementioned concept into a regular polygonal cone-shaped reflector.

[0166] exist Figure 13 In the rotating reflector 250, consider the case where light is irradiated from the irradiation device toward the light-reflecting surface 257 in a manner intersecting the axis 260. The incident light (e.g., a laser beam) is reflected by the light-reflecting surface 257 of the first regular polygonal cone 251 and then reflected by the light-reflecting surface 257 of the second regular polygonal cone 252 before being emitted.

[0167] Each light-reflecting surface 257 disposed on the side of the rotating reflector 250 can be corresponding to a side of a regular polygon on the bottom surfaces 261 and 262. In the following description, the side of the regular polygon corresponding to the light-reflecting surface 257 that is illuminated by light can also be referred to as the corresponding side.

[0168] Here, we consider a plane 290 with zero thickness, which is configured to include an axis 260 and rotates together with a rotating mirror 250. This plane 290 is arranged parallel to the corresponding side. The case where the incident light is deflected twice by the rotating mirror 250, which has a pair of regular polygonal conical portions, is equivalent to the case where the incident light is deflected once by the plane 290.

[0169] Therefore, the reflection position of the light relative to the incident light on the rotating reflector 250 becomes constant. As a result, it is possible to prevent the reflection position of the light from changing.

[0170] In this embodiment, the configuration is such that the rotating mirror 250 rotates simply via the drive shaft 259, while the shaft 260, which serves as the center of rotation, remains stationary. In this embodiment, since a large rotating device combining revolution and rotation is not required, the configuration can be easily simplified and miniaturized.

[0171] The rotating reflector 250, for example, can be used with the motor 44, housing 17, scanning lens 53, laser generator 12, etc., to form a configuration. Figure 1 The light guiding device 13 and the laser processing apparatus 1 are shown. As described above, in this laser processing apparatus, the reflection position of the light on the rotating mirror 250 is substantially constant. Therefore, by using an fθ lens as the scanning lens 53, the focal point can be scanned at a constant speed on the irradiated point 202. Compared with a galvanometer mirror, since deflection is achieved by the rotation of the rotating mirror 250 rather than by reciprocating motion, it is easier to scan at a constant speed.

[0172] As explained above, the laser processing apparatus of this embodiment includes a rotating mirror 250, a motor, and an irradiation device. The motor rotates the rotating mirror 250. The irradiation device irradiates light toward the rotating mirror 250. The rotating mirror 250 includes a first regular polygonal pyramid 251 and a second regular polygonal pyramid 252. The second regular polygonal pyramid 252 is arranged opposite to the first regular polygonal pyramid 251 with its axis 260 aligned with the axis of the first regular polygonal pyramid 251. Each side of the first regular polygonal pyramid 251 and the second regular polygonal pyramid 252 is a planar light-reflecting surface 257. The number of sides of the regular polygons is equal on the first bottom surface 261 of the first regular polygonal pyramid 251 and the second bottom surface 262 of the second regular polygonal pyramid 252. Both the first bottom surface 261 and the second bottom surface 262 are arranged perpendicular to the axis 260. The first regular polygonal cone 251 and the second regular polygonal cone 252 rotate together via a motor about an axis 260, with the phases of the regular polygons of the first base surface 261 and the second base surface 262 coinciding. The base angle of the first regular polygonal cone 251 when cut by a virtual plane 270 including the axis 260 and passing through the midpoint 271 of one side of the regular polygon of the first base surface 261 is α°. The base angle of the second regular polygonal cone 252 when cut by the virtual plane 270 including the axis 260 and passing through the midpoint 272 of one side of the regular polygon of the second base surface 262 is β = (90-α)°. The distance D2 between the first base surface 261 and the second base surface 262 is equal to the sum of the distance D3 (the distance between the midpoint 271 of one side of the regular polygon of the first base surface 261 and the axis 260) multiplied by Tanα, and the distance D4 (the distance between the midpoint of one side of the polygon of the second base surface 262 and the axis 260) multiplied by Tan(90-α). The irradiation device irradiates light in a direction intersecting the axis 260 of the rotating reflector 250.

[0173] As a result, the reflection position of the light on the rotating mirror 250 relative to the incident light becomes constant, preventing the light reflection position from changing with rotation. Therefore, it is possible to reduce scanning distortion.

[0174] In addition, in the light guide device of this embodiment, the bottom angle α is 45°.

[0175] Therefore, the rotating mirror 250 can be made into a simple shape. In addition, a simple optical path layout can be achieved.

[0176] The preferred embodiments and variations of the present invention have been described above, but the configuration can be changed as follows, for example.

[0177] The number of reflective elements 42 on the reflective unit 20 relative to the support plate 41 is not limited to 3 as in the first embodiment, but can be 4 or 5 for example.

[0178] The number of reflective units 20 can be set according to the shape of the object being irradiated, for example, it can be set to 3, 4 or 5, instead of 2 in the second embodiment.

[0179] The first reflective part 81 and the second reflective part 82 of the reflective component 42 can also be realized by using a prism.

[0180] The light scanning device using the light guide device 13 is not limited to the laser processing device 1; for example, it can also be an image forming device.

[0181] In the third embodiment, for example, a regular hexagonal pyramid, a regular nonagonal pyramid, or the like can be used instead of a regular octagonal pyramid as the first regular polygonal pyramid 251 and the second regular polygonal pyramid 252. The dimensions of the first base 261 and the second base 262 can be configured to be different from each other.

[0182] In the rotating reflector 250 of the third embodiment, the portion that does not reflect light can be of a free shape. Figure 13 The first regular polygonal cone 251 and the second regular polygonal cone 252 shown are actually regular polygonal frustums, but any part that reflects light in a regular polygonal cone shape is also included within the regular polygonal cone. The terms "base" and "base angle" do not restrict the direction of the regular polygonal cone. The rotating reflector 250 can use its axis 260 in any direction.

[0183] Clearly, numerous modifications and variations of the present invention can be achieved by following the teachings described herein. Therefore, it should be understood that the present invention can be practiced by methods other than those described in this specification, within the scope of the appended claims.

[0184] Explanation of reference numerals in the attached figures

[0185] 1. Laser processing equipment (optical scanning device)

[0186] 13 Light Guide Devices

[0187] 20 reflective units (light reflection devices)

[0188] 31 Scan Area

[0189] 42 Reflective Components

[0190] 53 Scanning Lens

[0191] 61 First rotation axis (rotation axis of the support plate)

[0192] 62 Second Rotation Axis (Rotation Axis of the Reflecting Component)

[0193] 81 First Reflector (Reflector)

[0194] 82 Second Reflector (Reflector)

[0195] 85 First Reflecting Surface

[0196] 86 Second Reflector

[0197] 200 workpieces (the objects being irradiated)

[0198] 201 scan lines

[0199] 202 Irradiated points

[0200] 250° rotating reflector (reflective component)

[0201] 251 First regular polygonal cone

[0202] 252 Second Regular Polygonal Pyramid

[0203] 257 light-reflecting surface

[0204] 260-axis (rotation axis)

[0205] 261 First bottom surface

[0206] 262 Second bottom surface

[0207] α and β are base angles.

Claims

1. An optical scanning device, characterized in that... have: Rotating reflector; A driving device that rotates the rotating mirror; and An illumination device that illuminates the rotating reflector. The rotating reflector has the following features: First regular polygonal cone; A second regular polygonal pyramid, whose axis is aligned with the axis of the first regular polygonal pyramid, and which is positioned opposite the first regular polygonal pyramid. The first regular polygonal cone and each side of the second regular polygonal cone form a planar light-reflecting surface. On the first base of the first regular polygonal pyramid and the second base of the second regular polygonal pyramid, the number of sides of the regular polygons are equal, and Both the first bottom surface and the second bottom surface are arranged perpendicular to the axis of the first regular polygonal pyramid. The first regular polygonal cone and the second regular polygonal cone are configured such that the phase of the regular polygon on the first base surface is consistent with the phase of the regular polygon on the second base surface, and they rotate together as a unit through the driving device about the axis of the first regular polygonal cone as the axis of rotation. The base angle of the first regular polygonal cone is α° when it is cut by a plane that includes the axis and passes through the midpoint of one side of the regular polygon of the first base. The base angle of the second regular polygonal cone when cut by a plane that includes the axis and passes through the midpoint of one side of the regular polygonal surface of the second base is (90-α)°. The distance between the first base and the second base is equal to the sum of the distance between the midpoint of one side of the regular polygon of the first base and the axis of rotation multiplied by Tanα, and the distance between the midpoint of one side of the polygon of the second base and the axis of rotation multiplied by Tan(90-α). The irradiation device irradiates light toward a position that intersects the rotation axis of the rotating reflector.

2. The optical scanning device according to claim 1, wherein, The base angle α is 45°.

Images