An image sensor glass window dismounting apparatus
Patent Information
- Application Number
- CN202410215513.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-27
- Publication Date
- 2026-09-04
- Estimated Expiration
- 2044-02-27
AI Technical Summary
[0005]因此,本发明要解决的技术问题在于克服现有技术中的利用高温加热拆卸图像传感器玻璃窗的方法对于对温度要求敏感的图像传感器不适用的缺陷,从而提供一种图像传感器玻璃窗拆卸装置
[0021] 1. The image sensor glass window disassembly device provided by the present invention includes: a negative pressure chamber, which has an installation station inside, the installation station being suitable for installing an image sensor, and a limit track installed inside the negative pressure chamber; a disassembly screw, rotatably mounted on the side wall of the negative pressure chamber, the disassembly screw being oriented towards the installation station; a disassembly cutter, slidably mounted on the limit track, the disassembly cutter having a cutter support installed on it, the cutter support being threadedly engaged with the disassembly screw; the rotation of the disassembly screw drives the disassembly cutter to move along the limit track toward or away from the installation station.
Smart Images

Figure CN117863244B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of high-power laser measurement technology, and more specifically to a device for disassembling an image sensor glass window. Background Technology
[0002] The near-field intensity distribution of a high-power laser beam has a significant impact on parameters such as the near-field non-uniformity factor and intensity non-uniformity factor. Since high-power laser systems need to reduce the risk of damage to optical components caused by nonlinear effects during transmission and reduce beam modulation caused by diffraction, high-energy lasers are required to have a uniform near-field intensity distribution to prevent beam deflection and divergence caused by mirror damage, thermal deformation, and non-uniform thermal corona. Therefore, it is necessary to conduct scientific and reasonable measurements of the near-field intensity distribution of the laser beam.
[0003] When using image sensors for direct measurement of laser near-field distribution, interference fringes can occur due to the dustproof glass housing of these sensors, preventing the acquisition of accurate near-field image data. The glass housing of the image sensor needs to be disassembled during near-field measurement. Since these glass housings are typically secured with various adhesives, if the glass breaks during disassembly, glass shards can damage the image sensor. Furthermore, if loose adhesive adheres to the sensor body, it can cause contamination and ultimately lead to sensor failure.
[0004] In existing technologies, to facilitate the disassembly of the sensor's glass window, the sensor is heated to a high temperature of 100℃-180℃, causing the sealant between the sensor body and the glass window to age rapidly. However, some image sensors are sensitive to temperature; under continuous heating conditions exceeding 100℃, the image sensor will be damaged, resulting in malfunction or destruction. Summary of the Invention
[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the method of disassembling the image sensor glass window by heating at high temperature in the prior art is not suitable for image sensors that are sensitive to temperature requirements, and thus provides an image sensor glass window disassembly device.
[0006] To address the aforementioned technical problems, the present invention provides an image sensor glass window disassembly device, comprising:
[0007] The negative pressure chamber has an installation station inside, which is suitable for installing an image sensor. A limit track is installed inside the negative pressure chamber.
[0008] Remove the lead screw and install it on the side wall of the negative pressure chamber, with the lead screw facing the installation position;
[0009] The disassembly tool is installed on the limit rail. A tool support is installed on the disassembly tool, and the tool support is threadedly engaged with the disassembly screw.
[0010] The rotation of the disassembly screw drives the disassembly tool to move along the limit track toward or away from the installation position.
[0011] Optionally, the negative pressure chamber includes an inner cavity and an outer cavity, with an air passage on the wall of the inner cavity and a filter installed at the air passage. The installation station is fixedly installed in the inner cavity.
[0012] Optionally, an air extraction port is provided on the outer cavity, and an air outlet is located on the inner cavity on the side facing the air extraction port.
[0013] Optionally, one side of the cutting head of the disassembly tool is parallel to the sensor glass window of the image sensor, while the other side is tilted towards the sensor glass window.
[0014] Optionally, the cutting edge angle of the disassembly tool shall not exceed 20°.
[0015] Optionally, the installation station is positioned downwards, and the image sensor is adapted to be installed upside down on the installation station.
[0016] Optionally, the limiting rail includes a rail connector and a rail body. The rail connector is fixedly installed at the installation station, and the rail body is fixedly installed on the rail connector. At least two rail bodies are provided, and the rail bodies are arranged in parallel to each other. The tool support is slidably installed between two adjacent rail bodies, and the disassembly tool and disassembly screw are respectively located on both sides of the rail body.
[0017] Optionally, the disassembly screw extends through the side wall of the negative pressure chamber to the outside of the negative pressure chamber, and a limit block is installed on the disassembly screw, which abuts against the side wall of the negative pressure chamber.
[0018] Optionally, the negative pressure chamber is connected to an air extraction device via an air extraction pipeline, and an air supply branch is provided on the air extraction pipeline, with a shut-off valve installed on the air supply branch.
[0019] Optionally, a filter is installed on the air supply branch upstream of the shut-off valve.
[0020] The technical solution of this invention has the following advantages:
[0021] 1. The image sensor glass window disassembly device provided by the present invention includes: a negative pressure chamber, which has an installation station inside, the installation station being suitable for installing an image sensor, and a limit track installed inside the negative pressure chamber; a disassembly screw, rotatably mounted on the side wall of the negative pressure chamber, the disassembly screw being oriented towards the installation station; a disassembly cutter, slidably mounted on the limit track, the disassembly cutter having a cutter support installed on it, the cutter support being threadedly engaged with the disassembly screw; the rotation of the disassembly screw drives the disassembly cutter to move along the limit track toward or away from the installation station.
[0022] When disassembling the sensor glass window on an image sensor using an image sensor glass window disassembly device, the image sensor is first installed on the mounting station inside the negative pressure chamber. The negative pressure chamber is then sealed, and air is evacuated using an external vacuum device to create a negative pressure space. The tip of the disassembly tool is aligned with the adhesive layer between the sensor body and the sensor glass window. Rotating the disassembly screw moves the tool support and the disassembly tool. Due to the limitation of the limit track, the disassembly tool can only slide linearly back and forth along the limit track and will not rotate with the disassembly screw. The disassembly screw drives the disassembly tool forward slowly, separating the sensor glass window from the sensor body. During the separation process, the slow feed speed of the disassembly tool allows the sensor glass window to separate gradually, preventing adhesive particles from splashing onto the photosensitive target surface due to excessively fast cutting speed or instantaneous rapid separation. Because separation occurs under vacuum conditions, and the cavity pressure between the sensor glass window and the sensor body is higher than the negative pressure in the negative pressure chamber, a reverse airflow is generated at the moment of separation, impacting the adhesive particles and preventing them from falling onto the photosensitive target surface. The image sensor glass window disassembly device disassembles the sensor glass window by controlling mechanical force under negative pressure conditions, and can be implemented within any temperature range required for the operation of the image sensor.
[0023] 2. The image sensor glass window disassembly device provided by this invention includes a negative pressure chamber comprising an inner cavity and an outer cavity, with an air vent on the wall of the inner cavity and a filter installed at the air vent. The installation station is fixedly installed in the inner cavity. By setting up the inner and outer cavities, the image sensor is placed in the inner cavity for operation. During operation, the inner and outer cavities are connected only through the filter, allowing only gas exchange. Particles falling from the inner cavity will not be extracted to the outer cavity, and dust and other impurities in the outer cavity will not be blown into the inner cavity and contaminate the sensor body.
[0024] 3. The image sensor glass window disassembly device provided by this invention has a cutting edge angle of no more than 20°. By using a cutting edge angle of less than 20° to cut into the sensor glass window, and cooperating with the disassembly screw to slowly advance, the bending and cracking of the sensor glass window can be avoided.
[0025] 4. The image sensor glass window disassembly device provided by this invention has an installation station facing downwards, and the image sensor is suitable for inverted installation at the installation station. When the sensor glass window is disassembled, the generated adhesive particles and the sensor glass window itself can automatically fall off under the action of gravity, preventing the adhesive particles from falling onto the photosensitive target surface of the sensor body and ensuring that the sensor body is not damaged after disassembly. Attached Figure Description
[0026] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0027] Figure 1 This is a schematic diagram of the structure of the image sensor glass window disassembly device provided in an embodiment of the present invention.
[0028] Figure 2 This is a schematic diagram illustrating the structure of an image sensor and a disassembly tool working together in an embodiment of the present invention.
[0029] Explanation of reference numerals in the attached drawings: 1. Vacuum pump; 2. Shut-off valve; 3. Filter; 4. Support base; 5. Outer cavity; 6. Filter plate; 7. Inner cavity; 8. Lead screw bracket; 9. Control wheel; 10. Disassembly lead screw; 11. Matching nut; 12. Tool holder; 13. Disassembly tool; 14. Mounting plate; 15. Rail connector; 16. Rail body; 17. Sensor body; 18. Sensor glass window. Detailed Implementation
[0030] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0031] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0032] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0033] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0034] Example 1
[0035] Figure 1 and Figure 2 The image sensor glass window disassembly device provided in this embodiment includes a negative pressure chamber, a disassembly screw 10, and a disassembly cutter 13. In this embodiment, a vacuum pump 1, which serves as an air extraction component, is connected to the negative pressure chamber. In some other embodiments, only an air extraction port may be provided on the negative pressure chamber, and an external pump body may be connected to extract air to maintain negative pressure in the negative pressure chamber during operation.
[0036] An installation station is provided inside the negative pressure chamber, suitable for installing an image sensor. A limiting rail is installed inside the negative pressure chamber. A disassembly screw 10 is rotatably mounted on the side wall of the negative pressure chamber, facing the installation station. A disassembly tool 13 is slidably mounted on the limiting rail. A tool support is installed on the disassembly tool 13, which includes a tool holder 12 for mounting the disassembly tool 13 and a mating nut 11 for threaded engagement with the disassembly screw 10. The tool holder 12 and the mating nut 11 are fixedly connected. The disassembly tool 13 can be detachably mounted on the tool holder 12 by means of snap-fit or threaded connection, facilitating replacement of the disassembly tool 13. Rotation of the disassembly screw 10 drives the disassembly tool 13 to move along the limiting rail toward or away from the installation station.
[0037] The negative pressure chamber includes an inner cavity 7 and an outer cavity 5, which are separated by an inner and outer shell. The inner cavity 7 has an air vent on its wall, and a filter element is installed at the air vent. The filter element is fixedly installed inside the inner cavity 7. The outer cavity 5 has an air extraction port, and the air vent is located on the side of the inner cavity 7 facing the air extraction port. Specifically, the air vent is on the left side of the inner cavity 7, and the left side plate of the inner cavity 7 serves as a filter element (filter sheet 6), which is securely connected to the inner cavity 7. The inner cavity 7 is fixedly installed inside the right side wall of the outer cavity 5 using bolts. The left side wall of the outer cavity 5 is a left side plate that can be detachably installed with the outer cavity 5. In this embodiment, the left side plate is fixed to the outer cavity 5 using bolts during installation. The air extraction port is located on the left side plate.
[0038] A vacuum pump 1, serving as the suction device, is connected to the suction port of the outer cavity 5 via a suction pipe. A supply pipe is provided on the suction pipe, and a shut-off valve 2 is installed on the supply pipe to control its opening and closing. To prevent large dust particles from the external air from entering the negative pressure chamber through the supply pipe and damaging the photosensitive target surface on the sensor body 17, a filter 3 is installed on the supply pipe upstream of the shut-off valve 2 to filter out large particulate impurities from the air entering the supply pipe.
[0039] The limiting track in this embodiment includes a track connecting seat 15 and a track body 16. The track connecting seat 15 is fixedly installed on the installation station, and the track body 16 is fixedly installed on the track connecting seat 15. In this embodiment, two track bodies 16 are provided, arranged parallel to each other. A tool support is slidably installed between two adjacent track bodies 16. A disassembly tool 13 and a disassembly screw 10 are respectively located on both sides of the track body 16. In some other embodiments, multiple track bodies 16 can also be arranged in parallel, with a disassembly tool 13 between every two adjacent track bodies 16. Simultaneously, multiple image sensors are installed side-by-side on the installation station, with each disassembly tool 13 corresponding to one image sensor. Multiple disassembly tools 13 can be installed on the same tool support or on different tool supports. Each tool support is threadedly engaged with one disassembly screw 10. By installing multiple image sensors, multiple image sensors can be disassembled simultaneously or separately after a single negative pressure draw, thereby improving disassembly efficiency.
[0040] The disassembly screw 10 extends through the side wall of the negative pressure chamber to the outside of the negative pressure chamber. A limiting block is installed on the disassembly screw 10, and the limiting block abuts against the side wall of the negative pressure chamber. Specifically, the disassembly screw 10 is disposed through the right side plate of the outer cavity 5, and a screw support 8 is fixedly installed on the outside of the right side plate of the outer cavity 5. The disassembly screw 10 and the screw support 8 are rotatably engaged. Two limiting blocks are provided on the disassembly screw 10; one limiting block abuts against the outside of the right side plate of the outer cavity 5, and the other limiting block abuts against the side of the screw support 8 facing the outer cavity 5. Through the abutment and engagement of the two limiting blocks with the outer cavity 5 and the screw support 8, the disassembly screw 10 can only rotate and cannot slide axially.
[0041] To prevent adhesive particles generated during disassembly from falling onto the photosensitive target surface of the sensor body 17, the mounting station in this embodiment is positioned downwards, and the image sensor is suitable for inverted installation on the mounting station. The mounting station is a mounting plate 14 fixed in the inner cavity 7 by bolts, with the sensor glass window 18 of the image sensor mounted downwards on the mounting plate 14. The image sensor is temporarily fixed to the mounting plate 14 by snap-fit, threaded connection, or adhesive. After the image sensor is installed, the tip of the disassembly tool 13 is aligned with the glass adhesive layer between the sensor body 17 and the sensor glass window 18. One side of the tip of the disassembly tool 13 is parallel to the sensor glass window 18 of the image sensor, and the other side is inclined towards the sensor glass window 18, with the tip angle of the disassembly tool 13 not exceeding 20°. In this embodiment, the tip of the disassembly tool 13 is set at 20°. If the sensor glass window 18 is found to be prone to breakage or chipping during disassembly, a disassembly tool 13 with a smaller tip angle can be selected.
[0042] Vacuum pump 1 is connected to shut-off valve 2 and outer cavity 5 via a three-way pipe consisting of an extraction pipe and an delivery branch. Vacuum pump 1 is threadedly or face-sealed to the extraction port on the left side wall of outer cavity 5, maintaining communication with the internal space on the right side of outer cavity 5. Shut-off valve 2 is threadedly sealed to filter 3. The left side wall of outer cavity 5 is sealed and fastened to the body of outer cavity 5. To improve the overall stability of the device, a support base 4 is installed below outer cavity 5 by bonding or welding. The right side plate of outer cavity 5 is detachable from outer cavity 5. The right side plate is fastened to lead screw bracket 8 by bolts. To facilitate operation of the disassembly lead screw 10, a control wheel 9 is fastened to the right side of disassembly lead screw 10. Rotating the control wheel 9 drives the disassembly lead screw 10 to rotate. The mating nut 11 is fastened to the tool holder 12, and the disassembly tool 13 is also fastened to the tool holder 12. The tool holder 12 and the limiting rail slide relative to each other axially. When the disassembly screw 10 rotates, the connected parts move axially along the disassembly screw 10 with the mating nut 11. The mounting plate 14 is fastened to the right side plate of the outer cavity 5 by bolts. The rail connecting seat 15 is fixedly connected to the mounting plate 14 and the rail body 16. The image sensor is fixed to the mounting plate 14 by a quick-release clamp or by other detachable fixed connections. The filter 6 on the left side of the inner cavity 7 is fastened to the inner cavity 7. The inner cavity 7 and the right side plate of the outer cavity 5 are separate parts, fixedly connected by bolts, and can be freely assembled and disassembled.
[0043] When disassembling the sensor glass window 18 of the image sensor using the image sensor glass window disassembly device, firstly, the vacuum pump 1 is started, the shut-off valve 2 is closed, and air is pumped from the inner cavity 7 and the outer cavity 5 to create a negative pressure environment. The relative air pressure in the inner cavity 7 and the outer cavity 5 is controlled to be maintained between 90 kPa and 100 kPa. Then, the control wheel 9 is rotated to make the disassembly screw 10 rotate, which drives the mating nut 11, the tool holder 12, and the disassembly tool 13 to move linearly along the limit track. The cutting head of the disassembly tool 13 cuts between the sensor body 17 and the sensor glass window 18, causing the sensor glass window 18 to slowly separate from the sensor body 17. The cutting speed of the disassembly tool 13 is controlled to be maintained at 0.1 to 0.2 mm / s by slowly rotating the control wheel 9 until the sensor glass window 18 is completely separated from the sensor body 17. Finally, open the shut-off valve 2 to allow outside airflow to enter the inner cavity 7 and outer cavity 5 through the filter 3 until the air pressure in the inner cavity 7 and outer cavity 5 returns to the ambient atmospheric pressure. Then, sequentially remove the right side plate and related fastening parts of the outer cavity 5, the inner cavity 7 and related fastening parts, and remove the sensor body 17 from the sensor glass window 18. Observe the surface cleanliness under a microscope to complete the disassembly of one image sensor glass window 18. In the next disassembly of the image sensor glass window 18, connect the image sensor to the inner cavity 7 and outer cavity 5 in reverse order, then proceed to the evacuation step for the next disassembly.
[0044] By controlling the cutting speed and vacuum pressure of the disassembly tool 13, and simultaneously installing the image sensor upside down on the installation surface, it is possible to prevent adhesive particles from falling onto the photosensitive target surface, thus avoiding the problem of adhesive particles contaminating the target surface due to mechanical force. Under negative pressure, with a set relative pressure of approximately 95 kPa, the cutting head cuts into the space between the sensor glass window 18 and the sensor body 17 at a speed of 0.1–0.2 mm / s along the direction of the glass adhesive layer, separating the sensor glass window 18 from the sensor body 17. During the separation process, due to the slow feed speed, the sensor glass window 18 separates gradually, preventing adhesive particles from splashing onto the photosensitive target surface due to excessively fast cutting speed or instantaneous rapid separation. Because the separation is carried out under vacuum conditions, the cavity pressure formed between the sensor glass window 18 and the sensor body 17 is higher than the external gas pressure. Therefore, at the moment of separation of the sensor glass window 18, a reverse airflow is generated, impacting the adhesive particles and causing them to move outward from the sensor body 17. Simultaneously, with the inverted installation, the sensor glass window 18 and the adhesive particles move downward under their own gravity, preventing the adhesive particles from falling onto the photosensitive target surface of the sensor body 17.
[0045] By controlling the cutting edge angle of the disassembly tool 13, the glass window is prevented from breaking during disassembly. During the single-sided cutting of the sensor glass window 18 into the sensor body 17, the sensor glass window 18 experiences a slight bend due to the unilateral mechanical force. When the cutting edge angle of the disassembly tool 13 is sufficiently small, the sensor glass window 18 overcomes its adhesion to the sensor body 17, achieving a break-free separation. This prevents glass fragments from contaminating the sensor target surface. The image sensor glass window disassembly device provided in this embodiment enables the disassembly of the image sensor glass window 18 at room temperature, making it suitable for temperature-sensitive image sensors. By controlling the negative pressure conditions and the cutting speed of 0.1–0.2 mm / s, as well as the inverted installation of the image sensor, adhesive particles are prevented from contaminating the target surface. Using a cutting edge angle of less than 20 degrees to cut into the glass adhesive layer prevents the sensor glass window 18 from bending and cracking.
[0046] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.
Claims
1. A device for disassembling an image sensor glass window, characterized in that, include: A negative pressure chamber is provided inside, the installation station is suitable for installing an image sensor, and a limit track is installed inside the negative pressure chamber; The disassembly screw (10) is installed on the side wall of the negative pressure chamber, with the disassembly screw (10) facing the installation position; The disassembly tool (13) is slidably mounted on the limiting rail. A tool support is mounted on the disassembly tool (13), and the tool support is threadedly engaged with the disassembly screw (10). The rotation of the disassembly screw (10) drives the disassembly tool (13) to move toward or away from the installation position along the limiting track; Separation is carried out under vacuum conditions. At the same time, the pressure in the cavity formed between the sensor glass window and the sensor body is higher than the pressure in the negative pressure chamber. At the moment of separation between the sensor glass window (18) and the sensor body (17), a reverse airflow is formed to impact the adhesive particles, preventing the adhesive particles from falling into the photosensitive target surface. The negative pressure chamber includes an inner cavity (7) and an outer cavity (5) with inner and outer shells. An air passage is provided on the cavity wall of the inner cavity (7), and a filter is installed at the air passage. The installation station is fixedly installed in the inner cavity (7). The installation station is positioned downwards, and the image sensor is adapted to be installed upside down at the installation station; The limiting track includes a track connecting seat (15) and a track body (16). The track connecting seat (15) is fixedly installed on the installation station. The track body (16) is fixedly installed on the track connecting seat (15). There are at least two track bodies (16). The track bodies (16) are arranged parallel to each other. The tool support is slidably installed between two adjacent track bodies (16). The disassembly tool (13) and the disassembly screw (10) are respectively located on both sides of the track body (16). Multiple track bodies (16) are arranged in parallel. A disassembly tool (13) is set between every two adjacent track bodies (16). At the same time, multiple image sensors are installed side by side at the installation station. Each disassembly tool (13) is set with a corresponding image sensor. Multiple disassembly tools (13) are installed on the same tool support, or multiple disassembly tools (13) are installed on different tool supports. Each tool support is threaded with a disassembly screw (10).
2. The image sensor glass window disassembly device according to claim 1, characterized in that, An air extraction port is provided on the outer cavity (5), and the air outlet is located on the inner cavity (7) on the side facing the air extraction port.
3. The image sensor glass window disassembly device according to claim 1 or 2, characterized in that, The cutting head of the disassembly tool (13) is parallel to the sensor glass window (18) of the image sensor on one side, and tilted towards the sensor glass window (18) on the other side.
4. The image sensor glass window disassembly device according to claim 3, characterized in that, The cutting head angle of the disassembly tool (13) is no greater than 20°.
5. The image sensor glass window disassembly device according to claim 1 or 2, characterized in that, The disassembly screw (10) extends through the side wall of the negative pressure chamber to the outside of the negative pressure chamber. A limiting block is installed on the disassembly screw (10), and the limiting block abuts against the side wall of the negative pressure chamber.
6. The image sensor glass window disassembly device according to claim 1 or 2, characterized in that, The negative pressure chamber is connected to an air extraction device via an air extraction pipeline. An air supply branch is provided on the air extraction pipeline, and a shut-off valve (2) is installed on the air supply branch.
7. The image sensor glass window disassembly device according to claim 6, characterized in that, A filter (3) is installed on the gas supply branch upstream of the shut-off valve (2).
Citation Information
Patent Citations
Image sensor glass shell window dismounting method
CN115229475A
Plate cutting machine for electronic element processing
CN213859595U
Dismounting chucking appliance for image induction module set
CN2855646Y