Resonant high-sensitivity detection acoustic vector hydrophone based on second-order inertial system resonance characteristics and design method and working method thereof

Abstract

This invention belongs to the field of underwater acoustic engineering technology, and discloses a resonant high-sensitivity detection vector hydrophone utilizing the resonant characteristics of a second-order inertial system, along with its design and operating methods. The response of the vector hydrophone is designed using the inherent resonant characteristics of the second-order inertial system. The inherent resonant frequency of the second-order inertial system is used as the operating frequency of the resonant high-sensitivity vector hydrophone, allowing it to operate within a narrow frequency range centered on the inherent resonant frequency of the second-order inertial system, thus achieving a high-sensitivity response. Specifically, the resonant frequency of the second-order inertial system is designed based on the frequency point of the characteristic information to be detected, ensuring that the resonant frequency of the second-order inertial system is the same as the characteristic frequency. By designing the resonant frequency of the second-order system to match the frequency of the characteristic information, the operating frequency of the resonant high-sensitivity vector hydrophone is obtained. Through system damping design, a resonant high-sensitivity detection vector hydrophone with a certain bandwidth and high-sensitivity response characteristics near the predetermined characteristic frequency point is achieved.

Description

Technical Field

[0001] This invention belongs to the field of underwater acoustic engineering technology, specifically relating to a resonant high-sensitivity acoustic vector detection hydrophone that utilizes the resonant characteristics of a second-order inertial system, as well as its design and operation methods. Background Technology

[0002] In the field of sensor technology, the vast majority of sensors to date have been designed using linear sensor design techniques aimed at measurement. Most applications require linear measurements, with a focus on static measurements and high precision. For example, pressure sensors typically employ sensitivity, bandwidth, and three accuracy metrics (including nonlinearity, repeatability, and hysteresis) or five accuracy metrics (including nonlinearity, repeatability, hysteresis, time drift, and temperature drift). Underwater acoustic sensors are no exception; most retain this design philosophy. Evaluation metrics for underwater acoustic sensors using this linear sensing design primarily include bandwidth, intra-band sensitivity and flatness, and response consistency. Because underwater acoustic information contains rich frequency components, its measurement is dynamic. Therefore, greater emphasis is placed on the flatness of the frequency response and whether the measurement is linear, obtaining accurate values ​​of the measured signal through a linear sensor. The design of underwater acoustic sensors also requires linear response characteristics, enabling the acquisition of accurate, linearly correlated measurement values ​​of the measured information, providing accurate and linearly convertible front-end input information for subsequent sonar signal processing.

[0003] With the rapid development of IoT and microelectronics technologies, sensor technology and its application modes have undergone significant changes, and sensor design concepts are also facing innovation and transformation. With the advancement of microelectronics technology, the maturity of micro-integration capabilities has also provided more possibilities for the fusion design of sensors.

[0004] In underwater acoustic applications, the target acoustic signal received by underwater acoustic sensors is very weak due to the presence of background noise in the marine environment. In many cases, it is submerged in the noise. Especially when detecting at a distance, the acoustic signal emitted by the sound source that the underwater acoustic sensor can receive is extremely weak and will definitely be submerged in the background noise. Under such circumstances, there is an urgent need for sensors with high sensitivity detection capabilities.

[0005] Structural resonance, as a physical phenomenon, has played a significant role and achieved remarkable effects in various applications and under specific conditions. Examples include surface acoustic wave (SAW) devices and bulk wave devices. Similarly, in the field of hydrophones, resonance characteristics can be applied to design. However, to date, resonance characteristics are generally used in the design of actively generating sound sources, and are rarely used in the design of passively receiving hydrophones. This is because the receiving end of the hydrophone needs to maintain stable and consistent characteristics over a wide frequency range, and resonant points are usually eliminated or avoided. This patent proposes a high-sensitivity detection vector hydrophone technique based on underwater feature information detection, utilizing the resonance characteristics of a second-order inertial system. This technique enables highly sensitive detection of underwater feature information. Summary of the Invention

[0006] This invention proposes a resonant high-sensitivity acoustic vector hydrophone that utilizes the resonant characteristics of a second-order inertial system to detect vector information only from specific acoustic features.

[0007] This invention also proposes a design method for a resonant high-sensitivity acoustic vector hydrophone that utilizes the resonant characteristics of a second-order inertial system. This method is used to obtain the design parameters of the resonant high-sensitivity acoustic vector hydrophone, acquire the corresponding sensitivity and frequency response performance, and simultaneously realize the resonant sensing and processing of specific underwater sound field vector information.

[0008] This invention also proposes a working method for a resonant high-sensitivity detection acoustic vector hydrophone that utilizes the resonant characteristics of a second-order inertial system, demonstrating how to effectively acquire and detect specific feature information.

[0009] This invention is achieved through the following technical solution:

[0010] A resonant high-sensitivity detection acoustic vector hydrophone is realized by utilizing the resonant characteristics of a second-order inertial system. The resonant high-sensitivity detection acoustic vector hydrophone utilizes the sensitive mode of a second-order inertial system to perform narrowband high-sensitivity resonant sensing only for vector information in specific characteristic acoustic information. It has narrowband high-sensitivity sensing characteristics. When combined with a broadband vector hydrophone to obtain noise background and set thresholds, it can effectively acquire and detect specific characteristic information.

[0011] By utilizing the inherent resonance characteristics of a second-order inertial system, the inherent resonant frequency of the second-order system is used as the operating frequency of the acoustic vector hydrophone. Through the design of the intrinsic frequency points of the second-order system and the design of the structural damping, the narrowband filtering sensing of the sound field information near the predetermined characteristic frequency points and the high-sensitivity resonance response characteristics are achieved.

[0012] In addition to considering the need to meet the conditions of equivalent particle pickup and equal density for sound field vector information detection, the structural design of a resonant high-sensitivity detection vector hydrophone also needs to consider the design of the resonant characteristics of the mounting structure. Furthermore, by coinciding the resonant frequency of the mounting structure with the operating frequency of the vector hydrophone, the structure can achieve the effect of enhancing sensitivity.

[0013] A design method for a high-sensitivity resonant vector acoustic hydrophone utilizing the resonant characteristics of a second-order inertial system, the design method comprising the following steps:

[0014] Step 1: Select the frequency points of the underwater characteristic acoustic information to be detected according to the detection requirements;

[0015] Step 2: Construct a second-order inertial system based on the characteristic information frequency points, and use the second-order inertial system that senses the sound information as a resonator. Use the frequency of the characteristic information to be detected as the resonant frequency of the second-order inertial system, so that the resonant frequency of the second-order inertial system is the same as the characteristic frequency.

[0016] Step 3: Based on the second-order inertial system constructed in Step 2 and the operating frequency of the acoustic vector hydrophone, design the parameters of the acoustic vector hydrophone resonator, including the parameters of the mass element and the elastic element;

[0017] Step 4: Based on the parameter design of the second-order inertial system obtained in Step 3, further design the sensitivity response of the resonant high-sensitivity detection acoustic vector hydrophone;

[0018] Step 5: Damping design. Based on the bandwidth requirements of the acoustic vector hydrophone, design the damping coefficient to meet the bandwidth design requirements.

[0019] A design method for a highly sensitive acoustic vector hydrophone utilizing the resonant characteristics of a second-order inertial system is provided. The specific method for designing the parameters of the acoustic vector hydrophone resonator 5 in step 3 is as follows: The natural frequency expression of the resonator 5, which is composed of a second-order inertial system consisting of a mass element, an elastic element, and damping, is given by...

[0020]

[0021] Where k is the stiffness of the elastic element; m is the mass of the mass element;

[0022] By optimizing the design and selection of parameters for the elastic and mass components of the second-order inertial system, its natural resonant frequency is made consistent with the frequency of the underwater characteristic acoustic information being measured.

[0023] A design method for a resonant high-sensitivity detection acoustic vector hydrophone utilizing the resonant characteristics of a second-order inertial system, wherein step 4, designing the sensitivity response of the resonant high-sensitivity detection acoustic vector hydrophone, specifically includes the following steps.

[0024] Step 4.1: By performing force analysis on the mass components of the second-order system, establish the differential equations of kinematics;

[0025] Step 4.2: Solve the differential equation of kinematics established in Step 4.1, obtain the solution of the equation including the resonant frequency point and the non-resonant point, and obtain the displacement response of the mass element of the second-order system;

[0026] Step 4.3: Based on the displacement response of the second-order system mass element obtained in Step 4.2, design a force-to-electric conversion sensitive detector and obtain the response including and outside the resonant point. Then, obtain the response of the acoustic vector hydrophone through electrical signal extraction and circuit processing.

[0027] Step 4.4: Based on the amplitude response of the acoustic vector hydrophone including the resonant point obtained in Step 4.3, take the point with amplitude attenuation of -3dB to obtain the operating frequency band of the acoustic vector hydrophone;

[0028] Step 4.5: Design the coefficient values ​​of the damping element according to the bandwidth requirements of the hydrophone.

[0029] A design method for a resonant high-sensitivity detection acoustic vector hydrophone utilizing the resonant characteristics of a second-order inertial system is disclosed. Step 5 specifically involves modulating the response and bandwidth of the resonant high-sensitivity detection acoustic vector hydrophone through damping design, thereby suppressing the sharp resonance peak amplitude and widening the frequency band. The damping coefficient of the damping structure is between 0 and 0.7, thereby realizing resonant high-sensitivity detection acoustic vector hydrophones with different response amplitudes and -3dB bandwidth.

[0030] A resonant high-sensitivity acoustic vector hydrophone utilizing the resonant characteristics of a second-order inertial system, comprising a resonator 5, a force-to-electric conversion sensitive detector 6, an information extraction and signal processing circuit board 7, leads 8, an output structure 9, a housing 10, and mounting holes 11;

[0031] The resonator 5 is equipped with a force-to-electric conversion sensitive detector 6. The force-to-electric conversion sensitive detector 6 is connected to the information extraction signal processing circuit board 7 via a lead 8. The information extraction signal processing circuit board 7 is connected to the output structure 9 via a lead 8. The resonator 5 containing the force-to-electric conversion sensitive detector 6, the information extraction signal processing circuit board 7, and the lead 8 are all installed inside the housing 10. The output structure 9 and the housing 10 are installed at the central hole. The housing 10 is provided with a mounting hole 11.

[0032] The resonator 5 includes a mass element 1, an elastic element 2, a damping element 3, and a base housing structure 4;

[0033] The base housing structure 4 is rigidly connected to the housing F.

[0034] A resonant high-sensitivity acoustic vector hydrophone that utilizes the resonant characteristics of a second-order inertial system, wherein the resonator 5 is used to receive the acoustic vector signal at the characteristic frequency point of the underwater information to be detected.

[0035] The force-to-electric conversion sensitive detector 6 is used to convert mechanical changes into signal changes that can be extracted electrically.

[0036] The information extraction signal processing circuit board 7 is used to amplify and process the signal that is converted by the force-to-electric conversion sensitive detector into a signal that can be extracted electrically.

[0037] The lead wire 8 is used to transmit the information extracted by the force-to-electric conversion sensitive detector 6 to the information extraction signal processing circuit board 7, and to transmit the electrical signal processed by the information extraction signal processing circuit board 7 to the output structure 9.

[0038] The output structure 9 is used to output the information received by the resonant high-sensitivity detection acoustic vector hydrophone.

[0039] The housing 10 ensures the stability of the internal structure of the resonant high-sensitivity detection acoustic vector hydrophone, enabling it to work normally underwater.

[0040] The mounting hole 11 is used to install the suspension system;

[0041] The mass element 1 and the elastic element 2 are selected to make their inherent resonant frequencies consistent with the frequencies of the underwater measured characteristic information by selecting the mass element mass and the elastic element stiffness.

[0042] The damping element 3 is used to modulate the response and bandwidth of the acoustic vector hydrophone, that is, to suppress the amplitude of sharp resonance peaks and broaden the frequency band.

[0043] The base housing structure 4 is used to mount the resonator on the resonant high-sensitivity detection acoustic vector hydrophone.

[0044] A resonant high-sensitivity acoustic vector hydrophone utilizing the resonant characteristics of a second-order inertial system, wherein the force-to-electric conversion sensitive detector 6 includes, but is not limited to, converting mechanical changes (displacement, stress, strain, etc.) into signal changes that can be extracted electrically through piezoelectric sensitive materials, piezoresistive effect, and capacitance conversion methods; the information extraction signal processing circuit board 7 includes, but is not limited to, charge signals, voltage signals, resistance signals, capacitance signals, and other signal forms.

[0045] The information extraction signal processing circuit board 7 is used to extract, narrowband filter, amplify, and output signals of different converted forms.

[0046] A resonant high-sensitivity detection acoustic vector hydrophone is realized by utilizing the resonant characteristics of a second-order inertial system. The acoustic vector hydrophone can be realized through electromechanical structure process design using piezoelectric ceramic as a sensitive element, or it can be designed and realized on a chip using MEMS technology. Multiple high-sensitivity detection acoustic vector hydrophones can be integrated using MEMS integration technology.

[0047] This means that multiple sensitive resonators can be integrated and manufactured simultaneously on the same sensitive chip. When there are multiple resonators, each resonator needs to be equipped with an information extraction signal processing module. Therefore, the electrical signal processing module 7 can be implemented by integrating N independent information extraction signal processing modules to achieve simultaneous acquisition of multiple underwater feature information.

[0048] A working method for a resonant high-sensitivity detection vector hydrophone utilizing the resonant characteristics of a second-order inertial system is provided. Specifically, when there is characteristic acoustic information containing a certain characteristic frequency underwater, if the frequency of the characteristic acoustic information matches the working frequency band of the resonant high-sensitivity detection vector hydrophone, the resonance of the internal resonant system of the resonant high-sensitivity detection vector hydrophone is excited.

[0049] When resonance occurs, the resonant mechanical response of the second-order inertial system is converted into an electrical charge or voltage signal by a force-to-electric conversion sensitive detector. After signal processing, the signal is output, achieving highly sensitive detection of characteristic information.

[0050] The beneficial effects of this invention are:

[0051] This invention utilizes the inherent resonance characteristics of a second-order inertial system. By designing the resonant frequency point of the second-order system and the system damping, a resonant high-sensitivity detection vector hydrophone with a certain bandwidth and high sensitivity response characteristics near a predetermined characteristic frequency point is obtained.

[0052] The resonant high-sensitivity detection vector hydrophone of the present invention can detect underwater acoustic information at specific frequencies, which is completely different from the detection methods used in the industry and has a fast response speed.

[0053] This invention utilizes the resonant characteristics of the mounting structure. By aligning the resonant frequency of the mounting structure with the operating frequency of the vector hydrophone, the structure can achieve a sensitivity enhancement effect.

[0054] This invention is more sensitive, has better detection results, and faster information processing speed, saving a lot of time and resources for subsequent work. Attached Figure Description

[0055] Figure 1 This is a schematic diagram of the resonant high-sensitivity detection vector hydrophone of the present invention.

[0056] Figure 2This is a schematic diagram illustrating the structural principle of the resonator of the present invention.

[0057] Figure 3 This is a schematic diagram of an embodiment of the present invention that uses piezoelectric ceramic elements through electromechanical structure and process design.

[0058] Figure 4 This is a schematic diagram of an embodiment of the present invention designed using MEMS technology and chip process technology.

[0059] Figure 5 This is a schematic diagram of the second-order inertial system model of the present invention.

[0060] Figure 6 This is a schematic diagram of the amplitude-frequency and phase-frequency response characteristics of the second-order inertial system of the present invention, wherein (a) is the amplitude-frequency curve of the second-order system response and (b) is the phase-frequency curve of the second-order system response.

[0061] Figure 7 This is a schematic diagram illustrating the relationship between damping, sensitivity response, and bandwidth of the resonant high-sensitivity detection vector hydrophone of the present invention. Detailed Implementation

[0062] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods are omitted so as not to obscure the description of this application with unnecessary detail.

[0063] It should be understood that, when used in this specification and the appended claims, the term "comprising" indicates the presence of the described features, integrals, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0064] It should also be understood that the terminology used in this application specification is for the purpose of describing particular embodiments only and is not intended to limit the application. As used in this application specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0065] The following is in conjunction with the appendix to this application specification. Figure 1-7 The technical solutions in the embodiments of this application are clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0066] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0067] The resonant high-sensitivity detection acoustic vector hydrophone of the present invention utilizes the sensitive mode of a second-order inertial system to perform narrowband high-sensitivity resonant sensing only on vector information in specific characteristic acoustic information. It has narrowband high-sensitivity sensing characteristics. When combined with a broadband vector hydrophone to obtain noise background and set thresholds, it can effectively acquire and detect specific characteristic information.

[0068] By utilizing the inherent resonance characteristics of a second-order inertial system, the inherent resonant frequency of the second-order system is used as the operating frequency of the acoustic vector hydrophone. Through the design of the intrinsic frequency points of the second-order system and the design of the structural damping, the narrowband filtering sensing of the sound field information near the predetermined characteristic frequency points and the high-sensitivity resonance response characteristics are achieved.

[0069] In addition to considering the need to meet the conditions of equivalent vibration pickup and equal density for sound field vector information detection, the structural design of a resonant high-sensitivity detection vector hydrophone also needs to consider the design of the resonant characteristics of the mounting structure. Furthermore, the resonant frequency of the mounting structure can be made to coincide with the operating frequency of the vector hydrophone to achieve the effect of structural sensitivity enhancement.

[0070] Based on the above principles and design ideas, a resonant high-sensitivity acoustic vector hydrophone is designed using the resonant characteristics of a second-order inertial system to achieve narrowband filtering sensing and resonant high-sensitivity response characteristics for sound field information near a predetermined characteristic frequency point.

[0071] Based on the above design concept, a design method for a high-sensitivity resonant vector acoustic hydrophone utilizing the resonant characteristics of a second-order inertial system is provided. The design method includes the following steps:

[0072] Step 1: Select the frequency points of the underwater characteristic acoustic information to be detected according to the detection requirements;

[0073] Step 2: Construct a second-order inertial system based on the characteristic information frequency points, and use the second-order inertial system that senses the sound information as a resonator. Use the frequency of the characteristic information to be detected as the resonant frequency of the second-order inertial system, so that the resonant frequency of the second-order inertial system is the same as the characteristic frequency.

[0074] Step 3: Based on the second-order inertial system constructed in Step 2 and the operating frequency of the acoustic vector hydrophone, design the parameters of the acoustic vector hydrophone resonator, including the parameters of the mass element and the elastic element;

[0075] Step 4: Based on the parameter design of the second-order inertial system obtained in Step 3, further design the sensitivity response of the resonant high-sensitivity detection acoustic vector hydrophone;

[0076] Step 5: Damping design. Based on the bandwidth requirements of the acoustic vector hydrophone, design the damping coefficient to meet the bandwidth design requirements.

[0077] A design method for a highly sensitive resonant vector hydrophone utilizing the resonant characteristics of a second-order inertial system is disclosed. The specific method for designing the parameters of the resonator 5 in step 3 is as follows: The design method for the operating frequency of the high-sensitivity resonant vector hydrophone is as follows: To match the characteristic information frequency, the intrinsic frequency point of the second-order inertial system resonator is designed. The second-order inertial system resonator mainly consists of a base shell structure, a mass element, an elastic element, and a damping element. Its model analysis diagram is shown below. Figure 4 As shown, the resonant frequency of a second-order inertial system is determined by the elastic element and the mass element. By selecting the mass element and the stiffness of the elastic element, the natural resonant frequency of the inertial system can be made consistent with the frequency of the underwater measured characteristic information.

[0078] The natural frequency expression of the resonator 5, which is a second-order inertial system consisting of a mass element, an elastic element, and a damper, is:

[0079]

[0080] Where k is the stiffness of the elastic element, in N / m; and m is the mass of the mass element, in kg.

[0081] By optimizing the design and selection of parameters for the elastic and mass components of the second-order inertial system, its natural resonant frequency is made consistent with the frequency of the underwater characteristic acoustic information being measured.

[0082] A design method for a resonant high-sensitivity detection acoustic vector hydrophone utilizing the resonant characteristics of a second-order inertial system, wherein step 4, designing the sensitivity response of the resonant high-sensitivity detection acoustic vector hydrophone, specifically includes the following steps.

[0083] Step 4.1: By performing force analysis on the mass components of the second-order system, establish the differential equations of kinematics;

[0084] When an external vibration signal is applied, the force on the mass block is analyzed by performing a second-order system analysis and establishing the differential equation of motion.

[0085]

[0086] Step 4.2: Solve the differential equations of motion established in Step 4.1 to obtain solutions that include the resonant frequency and non-resonant frequencies. This yields the stress, strain, or displacement response of the second-order system's mass element, expressed as:

[0087]

[0088]

[0089]

[0090] In the formula, y1 represents the displacement of the mass element under vibration load. The phase difference between the vibration load and the response. The damping ratio;

[0091] This yields the frequency response curve: the amplitude and phase of the second-order system response are both frequency-dependent, and its amplitude-frequency and phase-frequency curves are shown below. Figure 6 As shown in (a) and (b).

[0092] Step 4.3: Based on the stress, strain or displacement response of the second-order system mass element obtained in Step 4.2, design a force-to-electric conversion sensitive detector and obtain the response including and outside the resonant point. Then, obtain the response of the acoustic vector hydrophone through electrical signal extraction and circuit processing.

[0093] When ω=ω0, equation (4) simplifies to,

[0094]

[0095] In the formula Given the damping ratio, the amplitude of the system response at the resonant point is inversely proportional to the damping ratio. The phase change of 90° can be obtained using equation (5).

[0096]

[0097] Near the resonance point, equation (3) can be transformed as follows: Let B = ω / ω0, and its amplitude and phase frequency mathematical expressions can be simplified to:

[0098]

[0099] The amplitude of the system response is related to the damping ratio; the smaller the damping ratio, the more drastic the change.

[0100] Step 4.4: Based on the amplitude response of the acoustic vector hydrophone including the resonant point obtained in Step 4.3, take the point with amplitude attenuation of -3dB to obtain the operating frequency band of the acoustic vector hydrophone;

[0101] When ω < ω0, B is a value close to but less than 1. Therefore, the amplitude gradually decreases as the frequency decreases from the resonant point. When the amplitude decreases by -3dB, the -3dB frequency point F can be obtained. -3dB ;

[0102] When ω > ω0, since B is a value slightly greater than 1, the response value starts to decrease from the resonant peak. When the amplitude decreases to -3dB, the +3dB frequency point F can be obtained. +3dB ;

[0103] Use F +3dB Frequency and F -3dB By subtracting the frequencies, the bandwidth of the resonant high-sensitivity vector hydrophone can be obtained.

[0104] Step 4.5: Design the damping element coefficient value according to the bandwidth requirements of the hydrophone;

[0105] The bandwidth of a resonant high-sensitivity vector hydrophone is related to its resonant frequency and damping.

[0106]

[0107] Where f0 is the system's natural resonant frequency.

[0108] A design method for a resonant high-sensitivity detection acoustic vector hydrophone utilizing the resonant characteristics of a second-order inertial system is disclosed. Specifically, step 5 involves modulating the response and bandwidth of the resonant high-sensitivity detection vector hydrophone through damping design. The damping coefficient of the damping structure can suppress sharp resonance peak amplitudes while broadening the bandwidth. The damping coefficient of the damping structure is generally between 0 and 0.7. The smaller the damping coefficient, the larger the response amplitude and the narrower the bandwidth; conversely, the larger the damping coefficient, the smaller the response amplitude and the wider the bandwidth. Therefore, by designing the damping coefficient, resonant high-sensitivity detection acoustic vector hydrophones with different response amplitudes and -3dB bandwidths can be achieved.

[0109] like Figure 7 The vertical axis M represents the sensitivity response, and the horizontal axis represents the frequency. The red and blue sensitivity-frequency response curves are schematic diagrams of the response bandwidth under different damping ratios.

[0110] Based on the above design concept and method, this invention provides a highly sensitive resonant hydrophone for detecting acoustic vectors, utilizing the resonant characteristics of a second-order inertial system. Figure 1-2 As shown, the resonant high-sensitivity detection acoustic vector hydrophone includes a resonator 5, a force-to-electric conversion sensitive detector 6, an information extraction signal processing circuit board 7, a lead wire 8, an output structure 9, a housing 10, and a mounting hole 11;

[0111] The resonator 5 is equipped with a force-to-electric conversion sensitive detector 6. The force-to-electric conversion sensitive detector 6 is connected to the information extraction signal processing circuit board 7 via a lead 8. The information extraction signal processing circuit board 7 is connected to the output structure 9 via a lead 8. The resonator 5 containing the force-to-electric conversion sensitive detector 6, the information extraction signal processing circuit board 7, and the lead 8 are all installed inside the housing 10. The output structure 9 and the housing 10 are installed at the central hole. The housing 10 is provided with a mounting hole 11.

[0112] The resonator 5 includes a mass element 1, an elastic element 2, a damping element 3, and a base housing structure 4;

[0113] The base housing structure 4 is rigidly connected to the housing F.

[0114] The acoustic vector hydrophone specifically includes two structures.

[0115] Specifically, a general structure is provided to obtain a resonant high-sensitivity detection acoustic vector hydrophone capable of detecting specific acoustic information.

[0116] A resonant high-sensitivity acoustic vector hydrophone that utilizes the resonant characteristics of a second-order inertial system, wherein the resonator 5 is used to receive the acoustic vector signal at the characteristic frequency point of the underwater information to be detected.

[0117] The force-to-electric conversion sensitive detector 6 is used to convert mechanical changes into signal changes that can be extracted electrically.

[0118] The information extraction signal processing circuit board 7 is used to amplify and process the signal that is converted by the force-to-electric conversion sensitive detector into a signal that can be extracted electrically.

[0119] The lead wire 8 is used to transmit the information extracted by the force-to-electric conversion sensitive detector 6 to the information extraction signal processing circuit board 7, and to transmit the electrical signal processed by the information extraction signal processing circuit board 7 to the output structure 9.

[0120] The output structure 9 is used to output the information received by the resonant high-sensitivity detection acoustic vector hydrophone.

[0121] The housing 10 ensures the stability of the internal structure of the resonant high-sensitivity detection acoustic vector hydrophone, enabling it to work normally underwater.

[0122] The mounting hole 11 is used to install the suspension system;

[0123] The mass element 1 and the elastic element 2 are selected to make their inherent resonant frequencies consistent with the frequencies of the underwater measured characteristic information by selecting the mass element mass and the elastic element stiffness.

[0124] The damping element 3 is used to modulate the response and bandwidth of the acoustic vector hydrophone, that is, to suppress the amplitude of sharp resonance peaks and broaden the frequency band.

[0125] The base housing structure 4 is used to mount the resonator on the resonant high-sensitivity detection acoustic vector hydrophone.

[0126] A highly sensitive resonant vector acoustic hydrophone utilizing the resonant characteristics of a second-order inertial system is disclosed. The force-to-electric conversion sensitive detector 6 includes, but is not limited to, methods such as piezoelectric sensitive materials, piezoresistive effect, and capacitance to convert mechanical changes (displacement, stress, strain, etc.) into signal changes that can be electrically extracted. In this embodiment, piezoelectric ceramics and aluminum nitride piezoelectric thin film materials are used to convert the mechanical changes of the sensitive structure into charge signals through the piezoelectric effect. The information extraction signal processing circuit board 7 is responsible for processing the signal forms converted by the force conversion structure into forms that can be electrically extracted, including but not limited to charge signals, voltage signals, resistance signals, capacitance signals, and other signal forms.

[0127] The information extraction signal processing circuit board 7 is used to extract, narrowband filter, amplify, and output signals of different converted forms.

[0128] A resonant high-sensitivity detection acoustic vector hydrophone is realized by utilizing the resonant characteristics of a second-order inertial system. The acoustic vector hydrophone can be realized through electromechanical structure process design using piezoelectric ceramic as a sensitive element, or it can be designed and realized on a chip using MEMS technology. Multiple high-sensitivity detection acoustic vector hydrophones can be integrated using MEMS integration technology.

[0129] This means that multiple sensitive resonators can be integrated and manufactured simultaneously on the same sensitive chip. When there are multiple resonators, each resonator needs to be equipped with an information extraction signal processing module. Therefore, the electrical signal processing module 7 can be implemented by integrating N independent information extraction signal processing modules to achieve simultaneous acquisition of multiple underwater feature information.

[0130] Specifically, this invention provides structural features for detecting acoustic information of a single feature, and can also integrate multiple sensitive resonators and multiple information extraction signal processing modules into a single chip after pairing them, so that a single resonant high-sensitivity acoustic vector hydrophone can simultaneously detect acoustic information of multiple features.

[0131] Based on the above-mentioned structural features, this invention also provides a method for operating a resonant high-sensitivity detection vector hydrophone that utilizes the resonant characteristics of a second-order inertial system. Specifically, when characteristic acoustic information containing a certain characteristic frequency exists underwater, if the frequency of the characteristic acoustic information matches the operating frequency band of the resonant high-sensitivity detection vector hydrophone, the resonance of the internal resonant system of the resonant high-sensitivity detection vector hydrophone is excited. When resonance occurs, the resonant mechanical response of the second-order inertial system is converted into an electrical charge or voltage signal by a force-to-electric conversion sensitive detector, and output after signal processing, thus achieving high-sensitivity detection of the characteristic information.

[0132] Specifically, the working method is described in detail, and the specific implementation process of the resonant high-sensitivity detection vector hydrophone designed using the resonant characteristics of a second-order inertial system is disclosed.

[0133] Example 1

[0134] Based on the resonant high-sensitivity vector hydrophone realized by utilizing the resonant characteristics of a second-order inertial system, the following can be used: Figure 3 The structure shown enables detection of vector information only within specific acoustic features;

[0135] This is achieved through electromechanical structure and process design using piezoelectric ceramic elements, specifically...

[0136] A piezoelectric ceramic elastic element 2 is installed on the base 4 in both directions (or unidirectionally). A force-to-electric conversion sensitive detector 6 is set on the piezoelectric ceramic elastic element 2. A mass element 1 is installed on the base 4 by mounting screws passing through the piezoelectric ceramic elastic element 2 from both sides with a set installation force. The force-to-electric conversion sensitive detector 6 is connected to the information extraction signal processing circuit board 7 through lead wires 8. The information extraction signal processing circuit board 7 is connected to the output structure 9 through lead wires 8. The information extraction signal processing circuit board 7 is installed on the housing 10. The housing 10 is sealed on the base to form a damping cavity 3.

[0137] The housing 10 is provided with mounting holes 11.

[0138] Specifically, the above structure is used to obtain a resonant high-sensitivity detection acoustic vector hydrophone that can detect specific acoustic information. Since the housing 10 is rigidly connected to the base 4, the vibration of the housing 10 causes the base 4 to vibrate. Due to the inertial principle, the mass element 1 remains stationary, and the vibration of the base 4 causes the piezoelectric ceramic elastic element 2 to undergo mechanical changes. The force-to-electric conversion sensitive detector 6 on the piezoelectric ceramic elastic element 2 converts the stress and strain generated by the piezoelectric ceramic elastic element 2 into an electric charge signal, which is transmitted to the information extraction signal processing circuit board 7 through the lead wire 8, and then the result is output through the output structure 9.

[0139] Example 2

[0140] Based on the resonant high-sensitivity vector hydrophone realized by utilizing the resonant characteristics of a second-order inertial system, other methods can also be used, such as... Figure 4 The structure shown enables detection of vector information only within specific acoustic features;

[0141] This is achieved through chip manufacturing process design using MEMS technology, specifically...

[0142] The resonator 5 and the force-to-electric conversion sensitive detector 6 are fabricated on a silicon-based chip using MEMS manufacturing technology. The fabrication of the resonator A includes the fabrication of a mass element 1 and a cantilever beam elastic structure 2. The resonator A is mounted on a base plate 4, which is mounted on a housing 10, forming a damping cavity 3. The force-to-electric conversion sensitive detector 6 is connected to an information extraction signal processing circuit board 7 via leads 8. The information extraction signal processing circuit board 7 is mounted on the housing 10 and connected to an output structure 9 via leads 8.

[0143] The housing 10 is provided with mounting holes 11.

[0144] Specifically, the above structure is used to obtain a resonant high-sensitivity detection vector hydrophone that can detect specific acoustic information. The vector hydrophone senses the vibration of characteristic acoustic information. Since the shell 10 is rigidly connected to the base 4, the vibration of the shell 10 causes the base 4 to vibrate. Due to the inertial principle, the mass element 1 remains stationary. The undulation of the base 4 causes the cantilever beam elastic structure 2 to undergo mechanical changes. The force-to-electric conversion sensitive detector 6 on the cantilever beam elastic structure 2 converts the stress and strain generated by the cantilever beam elastic structure 2 into charge signals, which are transmitted to the information extraction signal processing circuit board 7 through the lead wire 8, and then the results are output through the output structure 9.

Claims

1. A design method of a resonant high-sensitivity acoustic vector hydrophone realized by using the resonant characteristics of a second-order inertial system, characterized in that, The design method includes the following steps: Step 1: Select the frequency points of the underwater characteristic acoustic information to be detected according to the detection requirements; Step 2: Construct a second-order inertial system based on the characteristic information frequency points, and use the second-order inertial system that senses the sound information as a resonator. Use the frequency of the characteristic information to be detected as the resonant frequency of the second-order inertial system, so that the resonant frequency of the second-order inertial system is the same as the characteristic frequency. Step 3: Based on the second-order inertial system constructed in Step 2 and the operating frequency of the acoustic vector hydrophone, design the parameters of the acoustic vector hydrophone resonator, including the parameters of the mass element and the elastic element; Step 4: Based on the parameter design of the second-order inertial system obtained in Step 3, further design the sensitivity response of the resonant high-sensitivity detection acoustic vector hydrophone; Step 5: Damping design. Based on the bandwidth requirements of the acoustic vector hydrophone, design the damping coefficient to meet the bandwidth design requirements. Step 4, designing the sensitivity response of the resonant high-sensitivity detection acoustic vector hydrophone, specifically includes the following steps. Step 4.1: By performing force analysis on the mass components of the second-order system, establish the differential equations of kinematics; Step 4.2: Solve the differential equation of kinematics established in Step 4.1, obtain the solution of the equation including the resonant frequency point and the non-resonant point, and obtain the displacement response of the mass element of the second-order system; Step 4.3: Based on the displacement response of the second-order system mass element obtained in Step 4.2, design a force-to-electric conversion sensitive detector and obtain the response including and outside the resonant point. Then, obtain the response of the acoustic vector hydrophone through electrical signal extraction and circuit processing. Step 4.4: Based on the amplitude response of the acoustic vector hydrophone including the resonant point obtained in Step 4.3, take the point with amplitude attenuation of -3dB to obtain the operating frequency band of the acoustic vector hydrophone; Step 4.5: Design the coefficient values ​​of the damping element according to the bandwidth requirements of the hydrophone.

2. The design method of a resonant high-sensitivity acoustic vector hydrophone using the second-order inertial system resonant characteristics according to claim 1, characterized in that, The specific method for designing the parameters of the acoustic vector hydrophone resonator (5) in step 3 is as follows: The natural frequency expression of the resonator (5) composed of a second-order inertial system consisting of a mass element, an elastic element, and a damper is: (1) wherein k is the stiffness of the elastic element; m is the mass of the mass element; By optimizing the design and selection of parameters for the elastic and mass components of the second-order inertial system, its natural resonant frequency is made consistent with the frequency of the underwater characteristic acoustic information being measured.

3. The design method of a resonant high-sensitivity acoustic vector hydrophone using the second-order inertial system resonant characteristics according to claim 1, characterized in that, Step 5 specifically involves modulating the response and bandwidth of the resonant high-sensitivity detection acoustic vector hydrophone through damping design, thereby suppressing the sharp resonance peak amplitude and widening the frequency band. The damping coefficient of the damping structure is between 0 and 0.7, thus realizing resonant high-sensitivity detection acoustic vector hydrophones with different response amplitudes and -3dB bandwidth.

4. A resonant high-sensitivity acoustic vector hydrophone implemented using the resonant characteristics of a second-order inertial system, characterized in that, The resonant high-sensitivity detection acoustic vector hydrophone is based on the design method of the resonant high-sensitivity detection acoustic vector hydrophone implemented by the resonant characteristics of a second-order inertial system as described in claim 1. The resonant high-sensitivity detection acoustic vector hydrophone utilizes the sensitive mode of a second-order inertial system to perform narrowband high-sensitivity resonant sensing only for vector information in specific characteristic acoustic information. It has narrowband high-sensitivity sensing characteristics. When combined with a broadband vector hydrophone to obtain noise background and set thresholds, it can effectively acquire and detect specific characteristic information. By utilizing the inherent resonance characteristics of a second-order inertial system, the inherent resonant frequency of the second-order system is used as the operating frequency of the acoustic vector hydrophone. Through the design of the intrinsic frequency points of the second-order system and the design of the structural damping, the narrowband filtering sensing of the sound field information near the predetermined characteristic frequency points and the high-sensitivity resonance response characteristics are achieved. In addition to considering the requirement that the detection of sound field vector information must meet the equivalent density condition of mass point pickup, the structural design of the resonant high-sensitivity detection vector hydrophone also needs to consider the design of the resonant characteristics of the mounting structure. Furthermore, by coinciding the resonant frequency of the mounting structure with the operating frequency of the vector hydrophone, the structure can achieve the effect of enhancing sensitivity.

5. The resonant high-sensitivity acoustic vector hydrophone using the second-order inertial system resonant characteristics according to claim 4, characterized in that, The resonant high-sensitivity detection acoustic vector hydrophone includes a resonator (5), a force-to-electric conversion sensitive detector (6), an information extraction signal processing circuit board (7), leads (8), an output structure (9), a housing (10), and mounting holes (11). The resonator (5) is provided with a force-to-electric conversion sensitive detector (6), which is connected to the information extraction signal processing circuit board (7) via a lead (8). The information extraction signal processing circuit board (7) is connected to the output structure (9) via a lead (8). The resonator (5) containing the force-to-electric conversion sensitive detector (6), the information extraction signal processing circuit board (7) and the lead (8) are all installed in the housing (10). The output structure (9) and the housing (10) are installed at the center hole. The housing (10) is provided with a mounting hole (11). The resonator (5) includes a mass element (1), an elastic element (2), a damping element (3), and a base housing structure (4). The base shell structure (4) is rigidly connected to the shell.

6. The resonant high-sensitivity acoustic vector hydrophone using the second-order inertial system resonant characteristics according to claim 5, characterized in that, The resonator (5) is used to receive the acoustic vector signal of the characteristic frequency point of the underwater information to be detected; The force-to-electric conversion sensitive detector (6) is used to convert mechanical changes into signal changes that can be extracted electrically. The information extraction signal processing circuit board (7) is used to amplify the signal that is converted by the force-to-electric conversion sensitive detector and can be extracted electrically. The lead wire (8) is used to transmit the information extracted by the force-to-electric conversion sensitive detector (6) to the information extraction signal processing circuit board (7) and to transmit the electrical signal processed by the information extraction signal processing circuit board (7) to the output structure (9). The output structure (9) is used to output the information received by the resonant high-sensitivity detection acoustic vector hydrophone. The housing (10) ensures the stability of the internal structure of the resonant high-sensitivity detection acoustic vector hydrophone, enabling it to work normally underwater. The mounting hole (11) is used to install the suspension system; The mass element (1) and the elastic element (2) are selected to make their inherent resonant frequencies consistent with the frequencies of the underwater measured characteristic information by selecting the mass of the mass element and the stiffness of the elastic element; The damping element (3) is used to modulate the response and bandwidth of the acoustic vector hydrophone, that is, to suppress the amplitude of the sharp resonance peak and at the same time broaden the frequency band. The base housing structure (4) is used to mount the resonator on the resonant high-sensitivity detection acoustic vector hydrophone.

7. A high-sensitivity resonant vector acoustic hydrophone utilizing the resonant characteristics of a second-order inertial system, as described in claim 5, is characterized in that... The force-to-electric conversion sensitive detector (6) includes a signal change quantity that can be electrically extracted by converting mechanical changes into a piezoelectric sensitive material, piezoresistive effect and capacitance conversion method; the information extraction signal processing circuit board (7) includes charge signal, voltage signal, resistance signal and capacitance signal; The information extraction signal processing circuit board (7) is used to extract, narrowband filter, amplify, and output signals of different forms after conversion.

8. The resonant high-sensitivity acoustic vector hydrophone using the second-order inertial system resonant characteristics according to claim 5, characterized in that, The aforementioned acoustic vector hydrophone can be implemented through electromechanical structure design using piezoelectric ceramic as a sensitive element, or it can be designed and implemented on a chip using MEMS technology. Furthermore, multiple highly sensitive acoustic vector hydrophones can be integrated using MEMS integration technology. That is, multiple sensitive resonators can be integrated and manufactured on the same sensitive chip at the same time; when there are multiple resonators, each resonator needs to be equipped with an information extraction signal processing module. Therefore, the information extraction signal processing circuit board (7) can be implemented by the integration of N independent information extraction signal processing modules to achieve the simultaneous acquisition of multiple underwater feature information.

9. A method for operating a resonant high-sensitivity detection vector hydrophone using a second-order inertial system resonance characteristic, characterized in that, The working method is based on the resonant high-sensitivity detection vector hydrophone implemented using the resonant characteristics of a second-order inertial system as described in claim 6. Specifically, when there is characteristic acoustic information containing a certain characteristic frequency underwater, if the frequency of the characteristic acoustic information matches the operating frequency band of the resonant high-sensitivity detection vector hydrophone, the resonance of the internal resonant system of the resonant high-sensitivity detection vector hydrophone is excited. When resonance occurs, the resonant mechanical response of the second-order inertial system is converted into an electrical charge or voltage signal by a force-to-electric conversion sensitive detector, and output after signal processing, thus realizing the high-sensitivity detection of the characteristic information.

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