Optical path adjustable laser

CN117871520BActive Publication Date: 2026-10-27SHENZHEN IMAGE TECH CO LTD
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Patent Information

Application Number
CN202410026644.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-01-05
Publication Date
2026-10-27
Estimated Expiration
2044-01-05

AI Technical Summary

Technical Problem

[0004]发明提供一种光路可调的激光器,以解决现有技术中的光激光器多存在结构光路不可调节的问题

Benefits of technology

[0017]本发明相较于现有技术,其有益效果为:本发明的光路可调的激光器通过第一镜片装置的激光聚焦设计,激光光束可以精确地聚焦在样品上。通过扩束镜、第一反射镜组、振镜等光学元件的组合,能够有效地调节激光束的焦点位置和大小,实现对样品的精确照射。 通过第二镜片装置的成像光路设计,成像透镜接收样品反射的激光光束和照明光,并将它们投影到CCD相机上。第一反射镜组和振镜的之间的光路可调节,允许调整激光光束的传输路径和角度,以便聚焦于样品上。这种灵活调节能够满足不同实验需求,使激光器适用于多种应用;第一反射镜和第二反射镜的设置,可以实现对出射角度的精细化调整,二级调整,调整精度高,可以提供清晰的成像效果。

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Abstract

The application provides a light path adjustable laser, which comprises a base, a laser source, a first mirror device, an imaging light source and a second mirror device. The light path adjustable laser of the application can accurately focus the laser beam on the sample through the laser focusing design of the first mirror device. Through the combination of optical elements such as beam expander, first mirror group and galvanometer, the focal point position and size of the laser beam can be effectively adjusted to realize the accurate irradiation of the sample. The light path between the first mirror group and the galvanometer can be adjusted to adjust the transmission path and angle of the laser beam so as to focus on the sample. This flexible adjustment can meet different experimental requirements, so that the laser is suitable for various applications; the setting of the first mirror and the second mirror can realize the fine adjustment of the exit angle, the secondary adjustment, the high adjustment precision and the clear imaging effect.
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Description

Technical Field

[0001] The invention relates to the field of optical equipment, and in particular to a laser with an adjustable optical path. Background Technology

[0002] A laser detector is a device developed using the principle of laser scanning detection. It mainly consists of a laser scanning transmitter, which is composed of an optical-mechanical scanner and a scanning optical system, and a laser scanning receiver, which is composed of a receiving optical system and a photoelectric conversion electronic system.

[0003] Existing laser detectors are often fixed at specific positions and angles, with non-adjustable optical paths. Detectors with fixed focal points may not be able to adapt to the detection of lasers requiring different focal sizes or wavelength ranges, which may lead to inaccurate measurement results. Therefore, there is a need to provide a laser with an adjustable optical path to solve the above-mentioned technical problems. Summary of the Invention

[0004] The invention provides a laser with an adjustable optical path to solve the problem that most existing optical lasers have an unadjustable structural optical path.

[0005] To solve the above-mentioned technical problems, the technical solution of the invention is: a laser with an adjustable optical path, comprising: Base A laser source is disposed on the base, and the laser source emits laser light of a specified wavelength; A first lens device is disposed on the base, and the first lens device focuses the laser onto the sample to form a laser optical path; An imaging light source is disposed on the base, and the imaging light source is used to emit illumination light to illuminate the sample, forming an illumination light path; The second lens device is disposed on the base. The second lens device enters the laser light reflected by the sample and the illumination light into the CCD camera, thus forming an imaging optical path. The first lens device includes a beam expander, a first reflecting mirror group, a galvanometer, a second reflecting mirror group, a dichroic mirror, and an objective lens arranged in sequence. The laser beam passes through the beam expander, the first reflecting mirror group, the galvanometer, the second reflecting mirror group, the dichroic mirror, and the objective lens in sequence to form the laser beam path. The second lens device includes an objective lens, a dichroic mirror, and an imaging lens arranged in sequence. The laser light reflected by the sample and the illumination light pass through the objective lens, the dichroic mirror, and the imaging lens in sequence to form the imaging optical path. The first reflector group includes: A first reflecting mirror is adjustablely connected to the base, and the first reflecting mirror is located at one end of the beam expander; and The second reflector is adjustablely connected to the base and is located on one side of the beam expander. The first reflector reflects the laser beam that has passed through the beam expander to the second reflector, and the second reflector reflects the laser beam to the galvanometer.

[0006] In this invention, the first reflector includes: The first reflecting mirror is used to reflect the laser beam; A first adjustment bracket is connected to the first reflective lens, and the first adjustment bracket is provided with a first connection hole; and A first base is disposed on the base, and a first screw hole is provided on the first base. The first adjustment frame is connected to the first screw hole by a first screw passing through the first connecting hole. The first adjustment frame and the first base are connected by screws, and the first adjustment frame and the first base are adjustable relative to each other. The first reflecting mirror in the first reflector can be rotated and adjusted, so that the angle at which the first reflector reflects the laser beam is adjustable.

[0007] In this invention, the base is provided with a plurality of first mounting holes, and the first base is adjustablely connected to the plurality of first mounting holes.

[0008] In this invention, the first adjustment frame includes: A first fixing plate is connected to the first base. The first fixing plate is provided with three sets of connection holes, which are arranged in a triangular pattern. The first movable plate is disposed on one side of the first fixed plate. The first movable plate is provided with mounting holes, and there are three sets of mounting holes. The three sets of mounting holes are positioned one-to-one with the three sets of connecting holes. A first adjusting bolt, one end of which is rotatably connected to the mounting hole, and the other end of which passes through the connecting hole and extends therefrom; A first adjusting nut is located on the side of the first fixed plate away from the first movable plate, and the first adjusting nut is threadedly connected to a first adjusting bolt; and A first driving component is connected to the first fixed plate and the first movable plate, and the first driving component drives the first fixed plate and the first movable plate to move away from each other.

[0009] In this invention, the driving component includes: A first stop bar is connected to the first fixed plate, and the first stop bar is located on the side of the first fixed plate away from the first movable plate; The second stop lever is connected to the first movable plate; and A first elastic element penetrates the first fixed plate, and the two ends of the first elastic element are respectively connected to the first stop and the second stop.

[0010] In this invention, the first movable plate is provided with a first connecting groove with an opening facing the first fixed plate, and one end of the first elastic member is located in the first connecting groove. The first movable plate is provided with a first mounting groove with an opening facing the periphery. The first mounting groove is connected to the first connecting groove. The straight line of the extension direction of the first mounting groove is perpendicular to the straight line of the extension direction of the first connecting groove. The second stop is inserted into the first mounting groove.

[0011] In this invention, a first lens group is provided between the galvanometer and the second reflective lens group. The first lens group maps the dynamically deflected laser beam onto the second reflective lens group proportionally. The first lens group is adjustablely connected to the base.

[0012] In this invention, the first lens group includes: The first lens is located between the galvanometer and the second reflecting lens group. A second base, connected to the base; and The second adjustment bracket is connected to the top of the second base by screws, and the second adjustment bracket is connected to the first lens.

[0013] In this invention, the second adjustment frame includes: The second fixing plate is connected to the second base, and the second fixing plate is provided with a connection hole; The second movable plate is disposed on one side of the second fixed plate. The second movable plate is provided with mounting holes, and the mounting holes are positioned opposite to the connecting holes. A second adjusting bolt, one end of which is rotatably connected to the mounting hole, and the other end of which passes through the connecting hole and extends therefrom; and The second adjusting nut is located on the side of the second fixed plate away from the second movable plate, and the second adjusting nut is threadedly connected to the second adjusting bolt.

[0014] In this invention, a second lens fixing hole is provided on the second movable plate. The second movable plate has adjusting screw holes on its side, and the first lens is fastened to it by adjusting screws. Two sets of adjusting screw holes are provided, with the extension directions of the two sets of adjusting screw holes perpendicular to each other. Each set of adjusting screw holes is connected to the first lens by one of the two sets of adjusting screws. In this invention, the second movable plate also has a third mounting groove, which communicates with the second lens fixing hole. A support column is connected inside the third mounting slot, and the support column is used to abut against the outside of the first lens.

[0015] The third mounting slot is provided in two sets, and the positions of the two sets of mounting slots are respectively opposite to the positions of the two sets of adjusting screw holes.

[0016] In this invention, a third adjustment frame is provided on the base, and a sliding groove is provided on the third adjustment frame; A slider is provided on one side of the CCD camera, the slider is slidably connected to the slide groove, and a fifth screw hole is provided on the slider; The third adjustment frame is also provided with a sixth screw hole. The third adjustment frame passes through the sixth screw hole via a sixth screw and is threadedly connected to the fifth screw hole.

[0017] Compared to existing technologies, the advantages of this invention are as follows: The adjustable laser of this invention, through the laser focusing design of the first lens device, allows the laser beam to be precisely focused onto the sample. By combining optical elements such as a beam expander, a first reflecting mirror group, and a galvanometer, the focal position and size of the laser beam can be effectively adjusted, achieving precise illumination of the sample. Through the imaging optical path design of the second lens device, the imaging lens receives the laser beam reflected from the sample and the illumination light, projecting them onto a CCD camera. The adjustable optical path between the first reflecting mirror group and the galvanometer allows for adjustment of the laser beam's transmission path and angle to ensure focus on the sample. This flexible adjustment can meet different experimental needs, making the laser suitable for various applications. The arrangement of the first and second reflecting mirrors allows for fine-tuning of the emission angle; the two-stage adjustment provides high precision and clear imaging results. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the invention or the prior art, the drawings used in the embodiments are briefly introduced below. The drawings described below are only the corresponding drawings of some embodiments of the present invention.

[0019] Figure 1 This is a top view of a laser with an adjustable optical path, according to a preferred embodiment of the present invention.

[0020] Figure 2 This is a three-dimensional view of a laser with an adjustable optical path, according to a preferred embodiment of the present invention.

[0021] Figure 3 This is a schematic diagram of the overall structure of the first reflecting mirror according to a preferred embodiment of the present invention.

[0022] Figure 4 This is a cross-sectional view of the connection structure between the first movable plate and the first fixed plate according to a preferred embodiment of the present invention.

[0023] Figure 5 This is a bottom view of the first movable plate and the first fixed plate according to a preferred embodiment of the present invention.

[0024] Figure 6 This is a perspective view of the first movable plate structure according to a preferred embodiment of the present invention.

[0025] Figure 7 This is a schematic diagram showing the usage state of the first movable plate and the first fixed plate according to a preferred embodiment of the present invention.

[0026] Figure 8 This is a cross-sectional view of the overall structure of a preferred embodiment of the present invention.

[0027] Figure 9 This is a cross-sectional view of the connection structure between the first movable plate and the first fixed plate according to the second embodiment of the present invention.

[0028] Figure 10 This is a schematic cross-sectional view of the structure according to the third embodiment of the present invention.

[0029] Figure 11 This is a side view of the first movable plate according to the third embodiment of the present invention.

[0030] Figure 12 This is a schematic diagram of the overall structure of the first lens according to a preferred embodiment of the present invention.

[0031] Figure 13 This is a cross-sectional view of the second movable plate according to a preferred embodiment of the present invention.

[0032] Reference numerals: 1. First reflector group; 1a. First reflector; 1b. Second reflector; 11. First base; 12. First fixing plate; 121. First end; 1211. First connecting hole; 1212. Second connecting hole; 1213. Second screw hole; 122. Second end; 1221. Third connecting hole; 1222. Third screw hole; 123. Second groove; 13. First movable plate; 131. Mounting hole; 132. First connecting groove; 133. First mounting groove; 134. First lens fixing hole; 135. First screw hole; 136. Limiting protrusion; 137. First groove; 138. First bolt; 14. First reflecting lens; 15. First adjusting bolt; 16. First adjusting nut; 17. Drive assembly; 171. First stop bar; 172. Second stop bar; 173. First elastic element; 221. First receiving slot; 231. Second receiving slot; 271. First magnet; 272. Second magnet; 331. First arc-shaped gasket; 332. Second arc-shaped gasket; 333. Second elastic element; 336. Third stop bar; 2. Beam expander; 3. Base; 31. Third adjustment frame; 32. Slider; 33. Sixth screw; 4. Galvanometer; 5. Second reflecting mirror group; 5a. Third reflecting mirror; 5b. Fourth reflecting mirror; 6. First lens group; 6a. First lens; 6b. Second lens; 611. First lens piece; 612. Second adjusting bolt; 613. Second fixing plate; 614. Second movable plate; 6141. Second lens fixing hole; 6142. Adjusting screw; 6143. Third mounting slot; 6144. Support column; 7. Dichroic mirror; 8. Objective lens; 9. Imaging lens; A. Laser source; B. Imaging light source; C. CCD camera. Detailed Implementation

[0033] The technical solutions of the embodiments of the invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the invention, and not all of them. Based on the embodiments of the invention, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of the invention.

[0034] The directional terms mentioned in the invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "side", "top" and "bottom", are only for reference to the orientation of the accompanying drawings. The directional terms used are for the purpose of explaining and understanding the invention, and not for limiting the invention.

[0035] The terms "first" and "second" in the invention terminology are for descriptive purposes only and should not be construed as indicating or implying relative importance, nor as a restriction on the order of events.

[0036] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] The following is a preferred embodiment of an optically tunable laser that can solve the above-mentioned technical problems provided by the present invention.

[0038] Please refer to Figure 1 and Figure 2 ,in Figure 1 This is a top view of a laser with an adjustable optical path, according to a preferred embodiment of the present invention. Figure 2 This is a three-dimensional view of a laser with an adjustable optical path, according to a preferred embodiment of the present invention.

[0039] In the diagram, units with similar structures are represented by the same labels.

[0040] The invention provides an optically tunable laser, comprising a base 3, a laser source A, a first lens device, an imaging light source B, and a second lens device. The laser source A is disposed on the base 3 and emits laser light of a specified wavelength. The first lens device is disposed on the base 3 and focuses the laser light onto a sample, forming a laser optical path. The imaging light source B is disposed on the base 3 and emits illumination light to irradiate the sample, forming an illumination optical path. The second lens device is disposed on the base 3 and directs the laser light reflected from the sample and the illumination light into a CCD camera C, constituting an imaging optical path.

[0041] The first lens device includes a beam expander 2, a first reflecting mirror group 1, a galvanometer 4, a second reflecting mirror group 5, a dichroic mirror 7, and an objective lens 8 arranged in sequence. The laser beam passes through the beam expander 2, the first reflecting mirror group 1, the galvanometer 4, the second reflecting mirror group 5, the dichroic mirror 7, and the objective lens 8 in sequence, forming the laser beam path.

[0042] The second lens device includes an objective lens 8, a dichroic mirror 7, and an imaging lens 9 arranged in sequence. The laser light reflected from the sample and the illumination light pass through the objective lens 8, the dichroic mirror 7, and the imaging lens 9 in sequence to form an imaging optical path.

[0043] The first reflector group 1 includes a first reflector 1a and a second reflector 1b. The first reflector 1a is adjustablely connected to the base 3 and is located at one end of the beam expander 2. The first reflector 1a reflects the laser beam that has passed through the beam expander 2 to the second reflector 1b. The second reflector 1b is located on one side of the beam expander 2. The second reflector 1b is adjustablely connected to the base 3 and reflects the laser beam to the galvanometer 4.

[0044] Through the laser focusing design of the first lens device, the laser beam can be precisely focused onto the sample. The combination of optical elements such as the beam expander 2, the first reflecting mirror group 1, and the galvanometer 4 allows for effective adjustment of the laser beam's focal position and size, achieving precise illumination of the sample. Through the imaging optical path design of the second lens device, the imaging lens 9 receives the laser beam reflected from the sample and the illumination light, projecting them onto the CCD camera C. The optical path between the first reflecting mirror group 1 and the galvanometer 4 is adjustable, allowing for adjustment of the laser beam's transmission path and angle to ensure focus on the sample. This flexible adjustment can meet different experimental needs, making the laser suitable for various applications. The arrangement of the first reflecting mirror 1a and the second reflecting mirror 1b allows for fine-tuning of the emission angle; this two-stage adjustment provides high precision and clear imaging, enabling users to observe and analyze sample details and features.

[0045] The following is a detailed description of the other structures of the tunable laser in this embodiment: Combination Figure 3 and Figure 4 The structure of the first reflecting mirror 1a in this embodiment will be described in detail below: In this embodiment, the first reflector 1a includes a first base 11, a first adjustment frame, and a first reflective lens 14. The first reflective lens 14 is used to reflect a laser beam. The first adjustment frame is connected to the first reflective lens 14 and has a connection hole. The first base 11 is mounted on the base 3 and has a first screw hole. The first adjustment frame is connected to the first screw hole by a first screw passing through the first connection hole. The first adjustment frame and the first base 11 are connected by the first screw, and the first adjustment frame and the first base are adjustable relative to each other. The first reflective lens 14 in the first reflector 1a can be rotated and adjusted, so that the angle at which the first reflector 1a reflects the laser beam is adjustable.

[0046] The base 3 is provided with several first mounting holes, and the first base 11 is adjustablely connected to the several first mounting holes. The first reflector 1a is adjustable in its mounting position on the first base 11 and the base 3, which improves the practicality of the laser with adjustable optical path.

[0047] The first adjustment frame includes a first fixed plate 12, a first movable plate 13, a first adjusting bolt 15, a first adjusting nut 16, and a drive assembly 17. The first fixed plate 12 is connected to the first base 11. The first fixed plate 12 is provided with three sets of connecting holes arranged in a triangular pattern. The first movable plate 13 is disposed opposite to the first fixed plate 12. The first movable plate 13 is provided with three sets of mounting holes 131, which are positioned one-to-one with the three sets of connecting holes. The first reflecting lens 14 is connected to the first movable plate 13 and is used to adjust light. The first fixed plate 12 and the first movable plate 13 are provided with a first adjusting bolt 15, a first adjusting nut 16 and a drive assembly 17. One end of the first adjusting bolt 15 is rotatably connected to the mounting hole 131, and the other end of the first adjusting bolt 15 passes through the connecting hole and extends outward. The first adjusting nut 16 is located on the side of the first fixed plate 12 away from the first movable plate 13, and the first adjusting nut 16 is threadedly connected to the first adjusting bolt 15. The drive assembly 17 is connected to the first fixed plate 12 and the first movable plate 13, and the drive assembly 17 drives the first fixed plate 12 and the first movable plate 13 to move away from each other.

[0048] In this embodiment, the first reflecting mirror 1a, through the one-to-one correspondence of three sets of positions on the first fixed plate 12 and the first movable plate 13 with the mounting holes 131, along with the design of the first adjusting bolt 15 and the first adjusting nut 16, enables flexible adjustment of the lens module. Rotation of the first adjusting bolt 15 changes the position and angle of the first movable plate 13 driving the first reflecting mirror 14, thereby adjusting the light. The fixing of the first adjusting bolt 15 and the first adjusting nut 16 through the connecting holes and mounting holes 131 ensures the stability of the assembly and reduces positional displacement caused by vibration or external forces. The design of the drive assembly 17 allows the first fixed plate 12 and the first movable plate 13 to be relatively far apart, thus enabling adjustment of the lens module. This driving method provides high driving efficiency, making the adjustment process faster and more precise; in practical applications, it can meet the needs of lens adjustment and provide good optical performance.

[0049] The first reflecting mirror 1a in this embodiment is described in detail below: Combination Figure 4 , Figure 5 and Figure 6 In this embodiment, the drive assembly 17 includes a first stop 171, a second stop 172, and a first elastic member 173. The first stop 171 is connected to the first fixed plate 12 and is located on the side of the first fixed plate 12 away from the first movable plate 13. The second stop 172 is connected to the first movable plate 13. The first elastic member 173 passes through the first fixed plate 12, and its two ends are respectively connected to the first stop 171 and the second stop 172.

[0050] The structure of the first movable plate 13 in this embodiment will be described as follows: Combination Figure 4 , Figure 5 and Figure 8 The first movable plate 13 is provided with a first connecting groove 132 with an opening facing the first fixed plate 12, and one end of the first elastic member 173 is located in the first connecting groove 132. The first movable plate 13 is provided with a first mounting groove 133 with an opening facing the periphery, and the first mounting groove 133 communicates with the first connecting groove 132. The straight line of the extension direction of the first mounting groove 133 is perpendicular to the straight line of the extension direction of the first connecting groove 132. The second stop 172 is inserted into the first mounting groove 133. This structural design facilitates the assembly of the first elastic member 173.

[0051] Furthermore, in this embodiment, a second groove 123 is provided on the side of the first fixed plate 12 away from the first movable plate 13, and the first stop rod 171 is embedded in the second groove 123. The second groove 123 defines the position of the first stop rod 171, thereby improving the stability of the connection between the first fixed plate 12 and the first elastic member 173.

[0052] The connection between the first reflecting lens 14 and the first movable plate 13 in this embodiment is described in detail: Combination Figure 6 and Figure 7 In this embodiment, a first lens fixing hole 134 is provided at the center of the first movable plate 13, and a first screw hole 135 is provided on the side of the first lens fixing hole 134. The first reflective lens 14 is located in the first lens fixing hole 134. The first movable plate 13 is detachably installed and removed from the first reflective lens 14 by means of a first bolt 138. The first bolt 138 passes through the first screw hole 135 and abuts against the side of the first reflective lens 14. The first reflective lens 14 is detachably connected to the first movable plate 13 by means of the first bolt 138, which facilitates the disassembly and replacement of different first reflective lenses 14 and improves the practicality of the first reflector.

[0053] Furthermore, a limiting protrusion 136 is provided on the side of the first movable plate 13 near the first fixed plate 12. The limiting protrusion 136 extends along the side of the first movable plate 13 and is used to limit the position of the first reflective lens 14, which facilitates the installation of the first reflective lens 14 and improves the stability of the connection between the first reflective lens 14 and the first movable plate 13.

[0054] The other structures of the first reflecting mirror 1a in this embodiment will be described: In this embodiment, the first movable plate 13 is provided with a first groove 137 on the side away from the first fixed plate 12. The first groove 137 is connected to the side of the first lens fixing hole 134. The first groove 137 is used to disassemble the first reflective lens 14 for easy operation.

[0055] In this embodiment, the three sets of connecting holes are a first connecting hole 1211, a second connecting hole 1212, and a third connecting hole 1221. The first fixing plate 12 includes a first end 121 and a second end 122. The first end 121 is located at one end of the first fixing plate 12 and is connected to the first base 11. The first connecting hole 1211 and the second connecting hole 1212 are located at the two ends of the first end 121, respectively. The second end 122 is located at the other end of the first fixing plate 12 and is vertically arranged. The top surfaces of the first end 121 and the second end 122 are connected, and the straight line of the extension direction of the first end 121 is perpendicular to the straight line of the extension direction of the second end 122. The third connecting hole 1221 is located above the second connecting hole 1212. The line connecting the first connecting hole 1211, the second connecting hole 1212, and the third connecting hole 1221 forms a right triangle. The structure of the first fixing plate 12 is simple and easy to manufacture; and the L-shaped structure of the first fixing plate 12 facilitates the assembly of the first reflecting lens 14 and the observation of the adjustment of the first reflecting lens 14.

[0056] Furthermore, the first reflector in this embodiment also includes a mirror base, which is a cylindrical structure for mounting a laser or other lenses. In this embodiment, the mirror base is inserted into the first lens fixing hole 134, extending through and beyond the hole, with its first end 121 located outside the base. The first end 121 also has a second screw hole 1213, located between the second connecting hole 1212 and the third connecting hole 1221. The first end 121 of the first fixing plate 12 has the second screw hole 1213, allowing for the connection and assembly of lenses of other sizes, thus meeting various usage requirements of the first reflector.

[0057] In this embodiment, the second end 122 is provided with a third screw hole 1222, which is adjustablely connected to the first base 11 by bolts. The first fixing plate 12 is adjustablely connected to the third screw hole 1222 with bolts, which facilitates the adjustment of the direction of the first reflecting mirror 14 and improves the practicality of the first reflecting mirror.

[0058] The following provides a second embodiment of the first reflector in this example, which mainly provides a second implementation of the driving component: Combination Figure 9 In this embodiment, the driving component 17 includes a first magnet 271 and a second magnet 272; the first magnet 271 is disposed on the first fixed plate 12; the second magnet 272 is disposed on the first movable plate 13, the first magnet 271 and the second magnet 272 correspond to each other, and the first magnet 271 and the second magnet 272 have the same magnetic poles.

[0059] In this embodiment, the first fixed plate 12 is provided with a first receiving groove 221 on its side, and the first magnet 271 is received in the first receiving groove 221; the first movable plate 13 is provided with a second receiving groove 231 on its side, and the second magnet 272 is received in the second receiving groove 231.

[0060] The following provides a third implementation of the first movable plate in the embodiments: Combination Figure 10 and Figure 11 In this embodiment, a first lens fixing hole 134 is provided at the center of the first movable plate 13, and a first screw hole 135 is provided on the side of the first lens fixing hole 134; the first reflective lens 14 is located in the first lens fixing hole 134, and the first movable plate 13 is detachably installed with the first reflective lens 14 by means of a first bolt 138.

[0061] In this embodiment, a first arc-shaped gasket 331 is provided on the side of the first movable plate 13. The first arc-shaped gasket 331 is located inside the first lens fixing hole 134 and is attached to the periphery of the first reflecting lens 14. The outer side of the first arc-shaped gasket 331 abuts against the first bolt 138. The first arc-shaped gasket 331 increases the contact surface between the first bolt 138 and the first reflecting lens 14, thereby improving the stability of the first reflecting lens 14 fixed by the first bolt 138.

[0062] In this embodiment, the first movable plate 13 is provided with a first groove 137 on the side away from the fixed plate. The first groove 137 is connected to the side of the first lens fixing hole 134. The first groove 137 is used to disassemble the first reflective lens 14 for easy operation.

[0063] In addition, a second arc-shaped pad 332 is provided on the side of the first movable plate 13. The second arc-shaped pad 332 is located on the hole wall of the first lens fixing hole 134. The second arc-shaped pad 332 is opposite to the first arc-shaped pad 331. The second arc-shaped pad 332 is used to support the first reflective lens 14. The second arc-shaped pad 332 avoids wear between the first reflective lens 14 and the hole wall of the first lens fixing hole 134. Preferably, the second arc-shaped pad 332 in this embodiment is made of rubber.

[0064] Furthermore, a second elastic element 333 is provided between the second arc-shaped gasket 332 and the inner wall of the first movable plate 13. The second elastic element 333 elastically compresses the second arc-shaped gasket 332, thereby improving the stability of the connection between the lens and the first movable plate 13.

[0065] In this embodiment, a second connecting groove is provided on the first movable plate 13, a second elastic member 333 is disposed in the second connecting groove, and a second mounting groove is provided on one side of the first movable plate 13. The second mounting groove communicates with the second connecting groove, and a third stop bar 336 is inserted and installed in the second mounting groove. The third stop bar 336 is used to connect and limit the position of the second elastic member 333.

[0066] Combination Figure 1 and Figure 2 The structure of the second reflecting lens group 5 in this embodiment will be described in detail: In this embodiment, the second reflecting mirror group 5 includes a third reflecting mirror 5a and a fourth reflecting mirror 5b. The third reflecting mirror 5a is located in the light-emitting direction of the galvanometer 4, and the fourth reflecting mirror 5b is disposed opposite to the third reflecting mirror 5a. The third reflecting mirror 5a reflects the light beam passing through the galvanometer 4 to the fourth reflecting mirror 5b, and the fourth reflecting mirror 5b reflects the light beam towards the dichroic mirror 7. By setting two reflecting mirrors between the galvanometer 4 and the dichroic mirror 7, the focusing degree of the light beam entering the objective lens is ensured. In this embodiment, the straight line between the third reflecting mirror 5a and the light-emitting direction of the galvanometer 4 is parallel to the straight line between the fourth reflecting mirror 5b and the dichroic mirror 7, resulting in a compact structural layout.

[0067] Furthermore, a first lens group 6 is disposed between the galvanometer 4 and the second reflecting mirror group 5. The first lens group 6 maps the dynamically deflected laser beam onto the second reflecting mirror group 5 proportionally. The first lens group 6 is adjustablely connected to the base 3. The first lens group 6 is disposed in the optical path to focus the laser beam.

[0068] The first lens group 6 includes a first lens 6a and a second lens 6b; wherein the first lens 6a is disposed between the galvanometer 4 and the third reflector 5a. The second lens 6b is disposed between the fourth reflector 5b and the dichroic mirror 7. Both the first lens 6a and the second lens 6b are used to adjust the ratio of the laser beam.

[0069] The following explanation uses the first lens 6a as an example: Combination Figure 12 and 13 In this embodiment, the first lens 6a includes a first lens plate 611, a second base (not shown in the figure), and a second adjustment frame. The first lens plate 611 is located between the galvanometer 4 and the second reflecting lens group 5, and the second base is connected to the base 3. The second adjustment frame is connected to the top of the second base by screws, and the second adjustment frame is connected to the first lens plate. The second adjustment frame is adjustable by rotating the screws and the second base, thereby adjusting the light transmission direction of the first lens plate 611. This allows adjustment of the specific position of the lens group and the incident and exit angles to ensure the focusing degree of the light beam entering the objective lens 8.

[0070] The second adjustment frame includes a second fixed plate 613, a second movable plate 614, a second adjusting bolt 612, and a second adjusting nut. The second fixed plate 613 is connected to the second base and has a fixing hole. The second movable plate 614 is positioned opposite the second fixed plate 613 and has a second mounting hole, which is opposite to the fixing hole. One end of the second adjusting bolt 612 is rotatably connected to the second mounting hole, and the other end extends through the fixing hole. The second adjusting nut is located on the side of the second fixed plate 613 away from the second movable plate 614 and is threadedly connected to the second adjusting bolt 612. By rotating the second adjusting bolt 612, the position and angle of the second movable plate 614 can be changed, thereby adjusting the optical components. This flexibility allows the second adjustment frame to meet different experimental needs or the adjustment of optical systems. The connection between the second fixed plate 613 and the second base, as well as the design of the second adjusting bolt 612 and the second adjusting nut, increase the stability of the structure. A stable second adjustment frame can fix the position of the optical components, reduce adjustment errors caused by positional offsets, and provide more reliable experimental results. The threaded connection between the second adjusting bolt 612 and the second adjusting nut provides fine-tuning capability, enabling precise adjustment of the optical components. This adjustment allows for accurate control of the position and angle of the optical components to meet the requirements of different experiments or measurements.

[0071] The second movable plate 614 is provided with a second lens fixing hole 6141, and an adjustment screw hole is provided on the side of the second movable plate 614. The first lens 611 is fastened by the adjustment screw 6142, and the second movable plate 614 is detachably installed with the first lens by the adjustment screw 6142.

[0072] Furthermore, two sets of adjusting screw holes are provided, with the extension directions of the two sets of adjusting screw holes perpendicular to each other. The two sets of adjusting screw holes are connected to the first lens 611 through two sets of adjusting screws 6142. In this embodiment, the connection between the two sets of adjusting screw holes and the first lens 611 through the adjusting screws 6142 enables the replacement of first lens 611 of different sizes, as well as the longitudinal or lateral offset of the first lens 611, thereby improving the practicality of the first lens group 6 structure.

[0073] Furthermore, in this embodiment, the second movable plate 614 is also provided with a third mounting groove 6143, which communicates with the second lens fixing hole 6141. A support column 6144 is connected within the third mounting groove 6143, and the support column 6144 is used to abut against the outer side of the first lens. The support column 6144 improves the stability of the connection between the second movable plate 614 and the first lens 611. In this embodiment, the support column 6144 is preferably made of rubber, which can reduce wear on the connection between the first lens 611 and the second movable plate 614, and the structure is highly practical. Through the design of the third mounting groove 6143 and the support column 6144, the connection stability between the second movable plate 614 and the first lens 611 can be improved. The support column 6144 abuts against the outer side of the first lens 611, which can increase the contact area and tightness between the two, and reduce loosening or displacement caused by vibration and movement. This can ensure the stability of the position and angle of the lens assembly and improve the performance and stability of the optical system.

[0074] Preferably, in this embodiment, the third mounting slot 6143 is provided in two sets, and the positions of the two sets of mounting slots are respectively opposite to the positions of the two sets of adjusting screw holes.

[0075] In this embodiment, the second movable plate 614 is provided with a third mounting slot 6143 and connected to a support column 6144, which has the following advantages: By setting two sets of mounting slots corresponding to the positions of the adjusting screw holes, more selectivity and flexibility can be provided to adapt to the installation requirements of different lens assemblies. This design makes the second adjustment frame more practical and can meet the requirements of different experiments and applications.

[0076] Combination Figure 2 In this embodiment, the position of the CCD camera C is adjustable.

[0077] In this embodiment, a third adjustment frame 31 is provided on the base 3, and a sliding groove is provided on the third adjustment frame 31; a slider 32 is provided on one side of the CCD camera C, the slider 32 is slidably connected to the sliding groove, and a fifth screw hole is provided on the slider 32; a sixth screw hole is also provided on the third adjustment frame 31, and the third adjustment frame 31 passes through the sixth screw hole through the sixth screw 33 and is threadedly connected to the fifth screw hole.

[0078] In this embodiment, the position of the CCD camera C is adjustable to adapt to different experimental or observational needs. The third adjustment bracket 31 and its connection to the base 3, as well as the threaded connection between the sixth screw 33 and the fifth screw hole, can fix the position of the CCD camera C, preventing positional shifts caused by vibration or movement. This ensures the stability of the CCD camera C's position, improving the quality and stability of image acquisition. By rotating the sixth screw 33, the position of the CCD camera C can be finely adjusted, enabling precise adjustment of the CCD camera C's position. This adjustment accuracy meets the requirements for precise control of image acquisition parameters, improving the quality of image acquisition and the reliability of the system.

[0079] The working principle of the invention: 1. Laser emission: Laser source A is located on base 3 and emits laser light of a specified wavelength.

[0080] 2. Laser Optical Path: The first lens assembly includes a beam expander 2, a first reflecting mirror group 1, a galvanometer 4, a second reflecting mirror group 5, a dichroic mirror 7, and an objective lens 8. The laser beam passes through these optical elements sequentially, forming the laser optical path. The first mirror group focuses the laser beam, the beam expander 2 controls the beam expansion angle, and the first reflecting mirror group reflects the laser beam passing through the beam expander 2 onto the galvanometer 4.

[0081] 3. Imaging Optical Path: The imaging light source B emits illumination light that shines onto the sample, forming the illumination optical path. The laser light reflected from the sample and the illumination light pass through the second lens device, including the objective lens 8, the dichroic mirror 7, and the imaging lens 9, forming the imaging optical path. The objective lens 8 is used to magnify the laser light reflected from the sample, the dichroic mirror 7 is used to separate the laser light and the illumination light, and the imaging lens 9 is used to focus the image reflected from the sample onto the CCD camera C.

[0082] This completes the operation of the laser with adjustable optical path according to this preferred embodiment.

[0083] The invention utilizes a carefully designed combination of optical elements from the first and second mirror devices to achieve laser focusing, beam expansion, and reflection, as well as imaging of reflected light from the sample, thereby improving the optical performance and imaging quality of the laser. Adjusting the connection between the first and second mirrors and the base 3 allows for flexible adjustment of the laser's optical path, enabling the laser to adapt to different experimental or observational needs and achieve precise laser control and imaging.

[0084] The design of objective lens 8 and imaging lens 9 enables high-resolution laser imaging of sample reflections. This is crucial for experiments requiring the observation of fine structures or precise measurements. Since the beam aperture increases with the propagation distance, a lens group is needed to focus the laser beam along the optical path. Because the lens group is designed based on the optical path propagation distance, its specific position and incident / exit angles can be adjusted to ensure the degree of focusing of the beam entering objective lens 8.

[0085] In summary, although the invention has been disclosed above with reference to preferred embodiments, the above preferred embodiments are not intended to limit the invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of protection of the invention shall be determined by the scope defined in the claims.

Claims

1. A laser with an adjustable optical path, characterized in that, include: Base A laser source is disposed on the base, and the laser source emits laser light of a specified wavelength; A first lens device is disposed on the base, and the first lens device focuses the laser onto the sample to form a laser optical path; An imaging light source is disposed on the base, and the imaging light source is used to emit illumination light to illuminate the sample, forming an illumination light path; The second lens device is disposed on the base. The second lens device enters the laser light reflected by the sample and the illumination light into the CCD camera, thus forming an imaging optical path. The first lens device includes a beam expander, a first reflecting mirror group, a galvanometer, a second reflecting mirror group, a dichroic mirror, and an objective lens arranged in sequence. The laser beam passes through the beam expander, the first reflecting mirror group, the galvanometer, the second reflecting mirror group, the dichroic mirror, and the objective lens in sequence to form the laser beam path. The second lens device includes an objective lens, a dichroic mirror, and an imaging lens arranged in sequence. The laser light reflected by the sample and the illumination light pass through the objective lens, the dichroic mirror, and the imaging lens in sequence to form the imaging optical path. The first reflector group includes: A first reflecting mirror is adjustablely connected to the base, and the first reflecting mirror is located at one end of the beam expander; and The second reflector is adjustablely connected to the base and is located on one side of the beam expander. The first reflector reflects the laser beam that has passed through the beam expander to the second reflector, and the second reflector reflects the laser beam to the galvanometer. A first lens group is disposed between the galvanometer and the second reflective mirror group. The first lens group maps the dynamically deflected laser beam onto the second reflective mirror group proportionally. The first lens group is adjustablely connected to the base. The optical path between the first reflective mirror group and the galvanometer is adjustable, allowing adjustment of the transmission path and angle of the laser beam so as to focus it on the sample.

2. The optically tunable laser according to claim 1, characterized in that, The first reflector includes: The first reflecting mirror is used to reflect the laser beam; A first adjustment bracket is connected to the first reflective lens, and the first adjustment bracket is provided with a first connection hole; and A first base is disposed on the base, and a first screw hole is provided on the first base. The first adjustment bracket is connected to the first screw hole by a first screw passing through the first connecting hole.

3. The optically tunable laser according to claim 2, characterized in that, The base is provided with a plurality of first mounting holes, and the first base is adjustablely connected to the plurality of first mounting holes.

4. The optically tunable laser according to claim 2, characterized in that, The first adjustment frame includes: A first fixing plate is connected to the first base. The first fixing plate is provided with three sets of connection holes, which are arranged in a triangular pattern. The first movable plate is disposed on one side of the first fixed plate. The first movable plate is provided with mounting holes, and there are three sets of mounting holes. The three sets of mounting holes are positioned one-to-one with the three sets of connecting holes. A first adjusting bolt, one end of which is rotatably connected to the mounting hole, and the other end of which passes through the connecting hole and extends therefrom; A first adjusting nut is located on the side of the first fixed plate away from the first movable plate, and the first adjusting nut is threadedly connected to a first adjusting bolt; and A first driving component is connected to the first fixed plate and the first movable plate, and the first driving component drives the first fixed plate and the first movable plate to move away from each other.

5. The optically tunable laser according to claim 4, characterized in that, The driving component includes: A first stop bar is connected to the first fixed plate, and the first stop bar is located on the side of the first fixed plate away from the first movable plate; The second stop lever is connected to the first movable plate; and A first elastic element penetrates the first fixed plate, and the two ends of the first elastic element are respectively connected to the first stop and the second stop.

6. The optically tunable laser according to claim 5, characterized in that, The first movable plate is provided with a first connecting groove with an opening facing the first fixed plate, and one end of the first elastic member is located in the first connecting groove. The first movable plate is provided with a first mounting groove with an opening facing the periphery. The first mounting groove is connected to the first connecting groove. The straight line of the extension direction of the first mounting groove is perpendicular to the straight line of the extension direction of the first connecting groove. The second stop is inserted into the first mounting groove.

7. The optically tunable laser according to claim 6, characterized in that, The first lens group includes: The first lens is located between the galvanometer and the second reflecting lens group. A second base, connected to the base; and The second adjustment bracket is connected to the top of the second base by screws, and the second adjustment bracket is connected to the first lens.

8. The optically tunable laser according to claim 7, characterized in that, The second adjustment frame includes: The second fixing plate is connected to the second base, and the second fixing plate is provided with a connection hole; The second movable plate is disposed on one side of the second fixed plate. The second movable plate is provided with mounting holes, and the mounting holes are positioned opposite to the connecting holes. A second adjusting bolt, one end of which is rotatably connected to the mounting hole, and the other end of which passes through the connecting hole and extends therefrom; and The second adjusting nut is located on the side of the second fixed plate away from the second movable plate, and the second adjusting nut is threadedly connected to the second adjusting bolt.

9. The optically tunable laser according to claim 8, characterized in that, The second movable plate is provided with a second lens fixing hole. The second movable plate has an adjustment screw hole on its side, and the first lens is fastened to it by an adjustment screw. There are two sets of adjustment screw holes, and the lines extending from the two sets of adjustment screw holes are perpendicular to each other. The two sets of adjustment screw holes are respectively connected to the first lens by the two sets of adjustment screws.

Citation Information

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