Electronic component testing environment humidity continuous control system and method

CN117873199BActive Publication Date: 2026-07-14XIDIAN UNIV

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XIDIAN UNIV
Filing Date
2023-11-27
Publication Date
2026-07-14

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    Figure CN117873199B_ABST
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Abstract

The application discloses a system and method for continuously controlling humidity in an electronic component test environment, and relates to the technical field of electronic component measurement. The system comprises a measurement atmosphere environment device, and an air inlet pipeline and an air outlet pipeline arranged at the inlet and outlet of the measurement atmosphere environment device. A gas source, a first gas flow detection member and a first gas valve are sequentially arranged on the air inlet pipeline along the flow direction of the gas. A pressure detection member, a second gas valve, a second gas flow detection member and a vacuum pump are sequentially arranged on the air outlet pipeline along the flow direction of the gas. The measurement atmosphere environment device comprises a test cavity, a humidity detection member, a fan and a humidifying member arranged in the test cavity. The electronic component to be measured is fixed in the test cavity by a clamp. The application can obtain a humidity environment with a relative humidity in the range of 0-100% and continuous change, and provides a condition for performance research of electronic components.
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Description

Technical Field

[0001] This application relates to the field of electronic component measurement technology, and in particular to a continuous humidity control system and method for testing electronic components. Background Technology

[0002] Electronic components are widely used in industrial and agricultural production and daily life. They mainly include resistors, capacitors, inductors, various sensors, and integrated circuits, covering a very wide range. Some electronic components, such as resistors, capacitors, and integrated circuit chips, are usually packaged to isolate their functional components from the influence of the ambient atmosphere. Other electronic components, such as metal oxide sensors and semiconductor electronic ceramics, require their functional components to be exposed to the ambient atmosphere. Humidity in the ambient atmosphere has a significant impact on their performance. Therefore, in the development of these electronic components and their functional materials, it is necessary to study how their performance changes with ambient humidity. Developing a system or method for continuously controlling the ambient humidity of electronic components is therefore particularly important.

[0003] Currently, there are many methods for controlling environmental humidity, which can be mainly summarized into the following two categories. The first is controlling indoor environmental humidity, represented by conditions such as vegetable greenhouses, industrial production, and residences. Its characteristics include a large target space, relatively low precision requirements, and methods for reducing humidity primarily involve condensing water vapor in the environment, while methods for increasing humidity primarily involve heating, sprinkling, and spraying water, accompanied by ventilation of the external environment. The aim is to ensure that the environmental humidity meets the needs of plant and animal growth, industrial production, and human habitation, with the humidity value fluctuating within an optimal range. The second is controlling the humidity within equipment, such as various storage cabinets, work cabinets, and internal cavities of equipment. The goal is also to ensure that the humidity within the equipment reaches the optimal working state, with relatively higher control precision. Humidity control methods mainly rely on heating and drying, typically using heating ventilation, placing desiccants, and condensation dehumidification. The biggest commonality between these two types of humidity control devices is that the target humidity is usually within a certain range, and the methods mainly involve heating, ventilation, condensation, and drying, which will change the ambient temperature to some extent.

[0004] In scientific research, the performance of certain electronic components is highly sensitive to humidity, and some electronic components are used in special environments such as aerospace and marine applications. This necessitates studying the impact of different humidity environments on the performance of electronic components, and this humidity environment should ideally vary between 0% and 100% relative humidity. Based on this, this application proposes a continuously control system and method for the humidity of the testing environment for electronic components. Summary of the Invention

[0005] The embodiments of this application provide a continuously control system and method for the humidity of the testing environment of electronic components, which can obtain a humidity environment with a relative humidity range of 0~100% and continuously changing, providing conditions for the performance research of electronic components.

[0006] To achieve the above objectives, embodiments of this application provide a continuous humidity control system for testing electronic components, including a measuring atmosphere environment device and an inlet and an outlet pipe disposed at the inlet and outlet of the measuring atmosphere environment device; a gas source, a first gas flow detection element, and a first gas valve are sequentially disposed along the gas flow direction on the inlet pipe; a pressure detection element, a second gas valve, a second gas flow detection element, and a vacuum pump are sequentially disposed along the gas flow direction on the outlet pipe; the measuring atmosphere environment device includes a test chamber and a humidity detection element, a fan, and a humidifier disposed within the test chamber; the electronic component under test is fixed within the test chamber by a clamp.

[0007] Furthermore, the gas source is a gas cylinder; the humidifying element is a piezoelectric ceramic atomizer; both the first gas flow detection element and the second gas flow detection element are gas flow meters; the humidity detection element is a humidity sensor; and the pressure detection element is a pressure gauge.

[0008] Furthermore, it also includes a controller; the controller is communicatively connected to the first gas valve, the second gas valve, the piezoelectric ceramic atomizer, the humidity sensor, and the vacuum pump; the controller is capable of receiving the detection value of the humidity sensor and controlling the switching of the first gas valve, the second gas valve, the piezoelectric ceramic atomizer, and the vacuum pump.

[0009] On the other hand, embodiments of this application also provide a control method based on the above-mentioned continuous humidity control system for testing electronic components, comprising the following steps: S1, measuring the initial relative humidity value RH0 in the atmosphere environment device using a humidity detection device, and measuring the initial pressure P0 in the atmosphere environment device using a pressure detection device; S2, setting the target relative humidity value RH1 in the atmosphere environment device; S3, comparing RH0 and RH1, if RH0 < RH1, then proceeding to step S4; if RH0 > 120%RH1, then proceeding to steps S5 and S6. 6; If RH1 < RH0 < 120%RH1, then proceed to step S6; S4, open the humidifier to increase the humidity value of the test chamber to the first preset value and then close it, then open the vacuum pump until the second measured value P3 = P0 of the pressure detector; S5, open the vacuum pump and the gas cylinder until the first measured value of the humidity detector RH1 < RH2 < 120%RH1; S6, open the vacuum pump to decrease the humidity value of the test chamber to the second preset value and the pressure value to the third preset value and then close it, then open the first gas valve until the third measured value P5 = P0 of the pressure detector.

[0010] Further, step S4 includes the following steps: S41, closing the first gas valve and the second gas valve and turning on the piezoelectric ceramic atomizer and the fan; S42, when the first measured value of the pressure detection element... When the piezoelectric ceramic atomizer is turned off, Ps is the saturated vapor pressure; S43, open the second gas valve and vacuum pump, and adjust the opening of the second gas valve to stabilize the flow rate. When the second measured value P3 of the pressure sensor is P0, close the second gas valve, fan and vacuum pump.

[0011] Further, step S5 includes the following steps: S51, opening the first gas valve, the second gas valve, the fan, the gas cylinder, and the vacuum pump; S52, when the first detection value RH1 < RH2 < 120%RH1 of the humidity detection element, closing the first gas valve, the second gas valve, the fan, the gas cylinder, and the vacuum pump.

[0012] Further, step S6 includes the following steps: S61, when the readings of the pressure and humidity sensors tend to stabilize, open the second gas valve, fan, and vacuum pump;

[0013] S62, When the third measured value of the pressure detection element When the pressure sensor reaches the fourth measured value P5=P0, close the second gas valve, fan and vacuum pump; S63, open the first gas valve until the pressure sensor reaches the fourth measured value P5=P0, then close the first gas valve.

[0014] This application has the following advantages over the prior art:

[0015] This application embodiment obtains a humidity environment with a relative humidity ranging from 0 to 100% and continuously changing by introducing dry gas into the measuring atmosphere environment device and humidifying the measuring atmosphere environment device through a piezoelectric ceramic atomizer. This provides conditions for the performance research of electronic components. Compared with the prior art that uses a humidity sensor alone for detection, this application embodiment avoids the delay phenomenon of humidity sensor by using a pressure gauge and a humidity sensor in combination, thus improving the accuracy of the system. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural diagram of a continuously humidity-controlled system for testing electronic components according to an embodiment of this application;

[0018] Figure 2 This is a flowchart of a method for continuously controlling the humidity of the testing environment for electronic components, as described in this application. Detailed Implementation

[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0021] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation", "connection" and "joining" should be interpreted broadly, for example, as fixed connection, detachable connection, or integral connection; those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0022] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0023] Reference Figure 1This application provides a continuous humidity control system for testing electronic components, including a measuring atmosphere environment device 1, an inlet pipe 2, an exhaust pipe 3, and a controller 4. The inlet pipe 2 is located at the inlet of the measuring atmosphere environment device 1, and the exhaust pipe 3 is located at the outlet of the measuring atmosphere environment device 1. Along the gas flow direction, the inlet pipe 2 is sequentially equipped with a gas source 5, a first gas flow detection element 6, and a first gas valve 7. Along the gas flow direction, the exhaust pipe 3 is sequentially equipped with a pressure detection element 8, a second gas valve 9, a second gas flow detection element 10, and a vacuum pump 11. The measuring atmosphere environment device 1 includes a test chamber 101 and a humidity detection element 12, a fan 13, and a humidifier 14 disposed within the test chamber 101. The electronic component 15 under test is fixed within the test chamber 101 by a clamp.

[0024] Specifically, the gas source 5 is a gas cylinder storing dry gas. The humidifying element 14 is a piezoelectric ceramic atomizer. The first gas flow detection element 6 and the second gas flow detection element 10 are both gas flow meters. The humidity detection element 12 is a humidity sensor. The pressure detection element 8 is a pressure gauge.

[0025] The controller 4 is communicatively connected to the first gas valve 7, the second gas valve 9, the piezoelectric ceramic atomizer, the humidity sensor, and the vacuum pump 11. The controller 4 can receive the detection value from the humidity sensor and control the opening and closing of the first gas valve 7, the second gas valve 9, the piezoelectric ceramic atomizer, and the vacuum pump 11. Therefore, by using the pressure gauge and humidity sensor in conjunction, the delays and errors that might be caused by a single humidity sensor can be avoided.

[0026] On the other hand, refer to Figure 2 The embodiments of this application also provide a control method based on the above-mentioned continuous humidity control system for electronic component testing environment, including the following steps:

[0027] S1. Measure the initial relative humidity RH0 within the atmosphere environment device 1 using a humidity sensor, and measure the initial pressure P0 within the atmosphere environment device 1 using a pressure gauge. The initial pressure P0 is generally standard atmospheric pressure.

[0028] S2. Set the target relative humidity value RH1 within the measuring atmosphere environment device 1.

[0029] S3. Compare RH0 and RH1. If RH0 < RH1, proceed to step S4. If RH0 > 120%RH1, proceed to steps S5 and S6. If RH1 < RH0 < 120%RH1, proceed to step S6.

[0030] S4. Open the piezoelectric ceramic atomizer to increase the humidity value in the test chamber 101 to the first preset value and then close it. Then, open the vacuum pump 11 until the second measured value P3 of the pressure gauge = P0. This step can increase both the humidity and the pressure first and then reduce the pressure, avoiding the delay or error that is likely to occur when only adjusting the humidity and detecting it through the humidity sensor.

[0031] S41. Close the first gas valve 7 and the second gas valve 9 and open the piezoelectric ceramic atomizer and the fan 13.

[0032] S42. Monitor the pressure in the measurement atmosphere environment device 1 through the pressure gauge. When the first measured value of the pressure gauge (Ps is the saturated vapor pressure), close the piezoelectric ceramic atomizer. At this time, the humidity value in the test chamber 101 is the first preset value.

[0033] S43. Open the second gas valve 9 and the vacuum pump 11. Observe the gas flow rate through the second gas flow detector 10 and adjust the opening degree of the second gas valve 9 to make the flow rate stable. When the second measured value P3 of the pressure gauge = P0, close the second gas valve 9, the fan 13, and the vacuum pump 11. At this time, the relative humidity value in the measurement atmosphere environment device 1 is the target relative humidity value RH1, which can be calibrated through the humidity sensor.

[0034] S5. Open the vacuum pump 11 and the gas cylinder until the first detected value RH1 of the humidity detector 12 < RH2 < 120%RH1.

[0035] S51. Open the first gas valve 7, the second gas valve 9, the fan 13, the gas cylinder, and the vacuum pump 11, and at the same time measure the relative humidity value RH2 in the measurement atmosphere environment device 1 through the humidity detector 12.

[0036] S52. When the first detected value RH1 of the humidity detector 12 < RH2 < 120%RH1, close the first gas valve 7, the second gas valve 9, the fan 13, the gas cylinder, and the vacuum pump 11. It should be noted that if the initial relative humidity value RH0 is slightly greater than the target relative humidity value RH1 (RH1 < RH0 < 120%RH1), then the relative humidity value RH2 in the measurement atmosphere environment device 1 can be recorded through the humidity detector 12. Steps S51 and S52 are preprocessing steps. This step reduces both the pressure and the humidity at the same time, avoiding the situation of excessive gas that may occur when only introducing dry gas to reduce the humidity, and reducing the safety hazard.

[0037] S6. Turn on vacuum pump 11 to lower the humidity value of test chamber 101 to the second preset value, and close it after the pressure value reaches the third preset value. Then open the first gas valve 7 until the third measured value of the pressure gauge P5=P0. This step is a precision processing step. First, the pressure is reduced to decrease water vapor, and then dry gas is introduced to increase the pressure and reduce humidity.

[0038] S61. When the readings of the pressure gauge and humidity sensor tend to stabilize, open the second gas valve 9, fan 13 and vacuum pump 11, and at the same time monitor the pressure inside the measuring atmosphere device 1 through the pressure gauge.

[0039] S62. When the pressure gauge reaches its third measured value (third preset value) At this time, the second gas valve 9, fan 13, and vacuum pump 11 are closed. The humidity value of the test chamber 101 at this time is the second preset value.

[0040] S63. Open the first gas valve 7, observe the gas flow rate through the first gas flow detection element 6, adjust the opening of the first gas valve 7 to stabilize the flow rate, and simultaneously monitor the pressure inside the measuring atmosphere device 1 using a pressure gauge. When the fourth measurement value P5 of the pressure gauge equals P0, close the first gas valve 7. At this time, the relative humidity value inside the measuring atmosphere device 1 is the target relative humidity value RH1, which can be calibrated using a humidity sensor.

[0041] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for continuously controlling the humidity of an electronic component testing environment, characterized in that, The testing of electronic components is based on a continuously controllable humidity environment. The control system includes a measuring atmosphere device and inlet and outlet pipes for the measuring atmosphere device. Along the gas flow direction, the inlet pipe is sequentially equipped with a gas source, a first gas flow sensor, and a first gas valve. Along the gas flow direction, the outlet pipe is sequentially equipped with a pressure sensor, a second gas valve, a second gas flow sensor, and a vacuum pump. The measuring atmosphere device includes a test chamber and a humidity sensor, a fan, and a humidifier within the test chamber. The electronic component under test is fixed within the test chamber by a clamp. The control method includes the following steps: S1. Measure the initial relative humidity RH0 in the atmosphere environment device using a humidity detection device, and measure the initial pressure P0 in the atmosphere environment device using a pressure detection device. S2. Set the target relative humidity value RH1 within the measuring atmosphere environment device; S3. Compare RH0 and RH1. If RH0 < RH1, proceed to step S4. If RH0 > 120%RH1, proceed to steps S5 and S6. If RH1 < RH0 < 120%RH1, proceed to step S6. S4. Open the humidifier to increase the humidity value of the test chamber to the first preset value, then close it. Then turn on the vacuum pump until the second measurement value P3 of the pressure detection element is P0. S5. Turn on the vacuum pump and gas cylinder until the first detection value of the humidity sensor is RH1 < RH2 < 120%RH1; S6. Turn on the vacuum pump to reduce the humidity value of the test chamber to the second preset value and the pressure value to the third preset value, then turn it off. Then open the first gas valve until the third measured value P5 of the pressure detection element is P0.

2. The control method according to claim 1, characterized in that, The gas source is a gas cylinder; the humidifying component is a piezoelectric ceramic atomizer; both the first and second gas flow detection components are gas flow meters; the humidity detection component is a humidity sensor; and the pressure detection component is a pressure gauge.

3. The control method according to claim 2, characterized in that, It also includes a controller; the controller is communicatively connected to the first gas valve, the second gas valve, the piezoelectric ceramic atomizer, the humidity sensor, and the vacuum pump; the controller is able to receive the detection value of the humidity sensor and control the switching of the first gas valve, the second gas valve, the piezoelectric ceramic atomizer, and the vacuum pump.

4. The control method according to claim 2, characterized in that, Step S4 includes the following steps: S41. Close the first gas valve and the second gas valve, and turn on the humidifier and fan; S42, When the first measured value of the pressure sensor When the humidifier is turned off, Ps is the saturated vapor pressure. S43. Open the second gas valve and vacuum pump, and adjust the opening of the second gas valve to stabilize the flow rate. When the second measured value P3 of the pressure sensor is P0, close the second gas valve, fan and vacuum pump.

5. The control method according to claim 4, characterized in that, Step S5 includes the following steps: S51. Open the first gas valve, the second gas valve, the fan, the gas cylinder, and the vacuum pump; S52. When the first detection value of the humidity sensor is RH1 < RH2 < 120%RH1, close the first gas valve, the second gas valve, the fan, the gas cylinder and the vacuum pump.

6. The control method according to claim 5, characterized in that, Step S6 includes the following steps: S61. When the readings of the pressure and humidity sensors tend to stabilize, open the second gas valve, fan, and vacuum pump. S62, When the third measured value of the pressure detection element At this time, shut off the second gas valve, fan, and vacuum pump; S63. Open the first gas valve until the fourth measurement value P5 of the pressure detection element is P0, then close the first gas valve.