Production line processing fluid temperature control device and temperature control method

Abstract

This invention discloses a temperature control device and method for processing fluid in a production line. The temperature control device includes a first chamber for pre-storing processing fluid, a second chamber located within the first chamber, a first heat exchanger located within the first chamber, a bidirectional pump, a first control valve connected between the second port of the bidirectional pump and the inlet of the first heat exchanger, a second control valve connected between the second port of the bidirectional pump and the first chamber, a temperature difference detection device for detecting the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber, a control device, and a circulation device. The circulation device is used to introduce the processing fluid from the processing chamber into the second chamber for temperature adjustment and to guide the temperature-adjusted processing fluid back from the second chamber to the processing chamber. In forward rotation mode, the bidirectional pump draws fluid from its first port and discharges it from its second port. In reverse rotation mode, the bidirectional pump draws fluid from its second port and discharges it from its first port. The control device is configured to control the switching between forward and reverse rotation modes when the bidirectional pump is operating.

Description

Technical Field

[0001] This invention relates to the field of processing fluid circulation temperature control, and particularly to a processing fluid temperature control device and method for production lines. Background Technology

[0002] In some production lines, the processing fluid needs to be maintained within a suitable temperature range. Therefore, temperature control is necessary. If the processing fluid temperature is below the appropriate range, it needs to be heated; if it is above the appropriate range, it needs to be cooled. For example, in an electrolyte plasma polishing production line, the polishing fluid needs to be maintained within a suitable temperature range. Electrolyte plasma technology is a green and efficient processing technology that uses a low-concentration salt solution as the polishing fluid (i.e., processing fluid) to process the workpiece. Powered by electricity, it utilizes the characteristic that plasma discharge preferentially occurs at sharp, protruding parts to remove material from the protruding areas of the metal surface, thus achieving precision polishing of the metal parts. During processing, the temperature of the polishing fluid is crucial, and the suitable process temperature range is small. The workpiece releases a large amount of heat during processing, causing the polishing fluid temperature to rise beyond the process temperature, resulting in a decrease in workpiece polishing quality. Simply cooling the polishing fluid may cause excessive temperature drop and uneven temperature distribution, further reducing workpiece polishing quality and even leading to arc discharge damage. Therefore, during the processing, it is necessary to closely monitor the temperature of the polishing slurry and cool and maintain it in a timely manner to ensure that the temperature of the polishing slurry is kept within the appropriate process temperature range, thereby ensuring the continuity and reliability of the production line. Summary of the Invention

[0003] The purpose of this invention is to provide a temperature control device and method for processing fluid in a production line that can conveniently and effectively adjust the temperature of the processing fluid.

[0004] The first aspect of this invention discloses a processing fluid temperature control device for a production line, comprising a first chamber for pre-storing the processing fluid, a second chamber disposed within the first chamber, a first heat exchanger disposed within the first chamber and having its outlet connected to the second chamber, a bidirectional pump having its first port and second port respectively connected to the inlets of the second chamber and the first heat exchanger, a first control valve connected between the second port of the bidirectional pump and the inlet of the first heat exchanger for controlling whether the second port of the bidirectional pump and the inlet of the first heat exchanger are connected, a second control valve connected between the second port of the bidirectional pump and the first chamber for controlling whether the second port of the bidirectional pump and the first chamber are connected, and a temperature difference detection device for detecting the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber. The system includes a control device connected to the temperature difference detection device and the first and second control valves, and a circulation device for connecting the second chamber and the processing chamber of the production line. The circulation device is used to introduce the processing fluid in the processing chamber into the second chamber for temperature adjustment and to guide the temperature-adjusted processing fluid from the second chamber back into the processing chamber. The bidirectional pump has a forward rotation mode and a reverse rotation mode. In the forward rotation mode, the bidirectional pump draws fluid from its first port and discharges it from its second port. In the reverse rotation mode, the bidirectional pump draws fluid from its second port and discharges it from its first port. The control device is configured to control the opening and closing of the first and second control valves and to control the switching between the forward and reverse rotation modes when the bidirectional pump is working, based on the detection result of the temperature difference detection device.

[0005] In some embodiments, the temperature difference detection device includes a first temperature sensor located in the first cavity and signal-connected to the control device, and a second temperature sensor located in the second cavity and signal-connected to the control device. The processing fluid temperature control device for the production line further includes a second heat exchanger, a first pump signal-connected to the control device, and an external temperature control device. The second heat exchanger includes a first heat exchange tube, the inlet and outlet of which are respectively connected to the first cavity. The first pump is located between the inlet of the first heat exchange tube and the first cavity. When the first pump is working, it draws the processing fluid in the first cavity and pumps the processing fluid into the first heat exchange tube through the inlet of the first heat exchange tube. The external temperature control device is used to deliver a temperature-regulating fluid to the second heat exchanger to regulate the temperature of the fluid flowing through the first heat exchange tube. The control device is configured to control whether the first pump works based on the detection results of the first temperature sensor and the second temperature sensor.

[0006] In some embodiments, the second heat exchanger further includes a second heat exchange tube for exchanging heat with the first heat exchange tube, and the external temperature control device includes a cooling tower for storing and cooling the temperature-controlled fluid connected to its inlet and the outlet of the second heat exchange tube, and a second pump connected to the control device via a signal connection between the outlet of the cooling tower and the inlet of the second heat exchange tube, the control device being configured to control whether the second pump operates.

[0007] In some embodiments, the device further includes two electric heating rods disposed in the first cavity and signal-connected to the control device, and three electric heating rods disposed in the second cavity and signal-connected to the control device. The control device is configured to control zero or more of the two electric heating rods in the first cavity to operate, and to control zero or more of the three electric heating rods in the second cavity to operate.

[0008] In some embodiments, a liquid level sensor disposed in the second cavity and signal-connected to the control device for detecting the liquid level height of the processing fluid in the second cavity is also included.

[0009] In some embodiments, the device further includes a first stirring device disposed in the first cavity and a second stirring device disposed in the second cavity.

[0010] In some embodiments, a temperature regulating tank and a processing fluid tank disposed within the temperature regulating tank are included. The temperature regulating tank forms the first cavity, and the processing fluid tank forms the second cavity. The tank wall of the processing fluid tank includes an annular heat insulation layer and an annular heat storage layer arranged radially.

[0011] In some embodiments, the annular thermal storage layer is provided with a phase change energy storage material.

[0012] In some embodiments, the processing fluid tank is provided with an overflow port on its wall, the overflow port being used to output the processing fluid in the processing fluid tank to the temperature regulating tank when the liquid level of the processing fluid in the processing fluid tank exceeds the design height.

[0013] In some embodiments, the temperature control device for the processing fluid in the production line is a temperature control device for controlling the temperature of the electrolyte in an electrolyte plasma polishing production line.

[0014] A second aspect of this invention discloses a temperature control method using any of the aforementioned production line processing fluid temperature control devices, comprising:

[0015] When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is greater than a first threshold, it controls the first control valve to open, controls the second control valve to close, and controls the bidirectional pump to work in forward rotation mode.

[0016] When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is less than a first threshold, it controls the first control valve to close, controls the second control valve to open, and controls the bidirectional pump to operate in reverse mode.

[0017] Based on the processing fluid temperature control device for production lines provided by this invention, when the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber detected by the temperature difference detection device is greater than a first threshold, the device controls the first control valve to open, the second control valve to close, and the bidirectional pump to operate in forward rotation mode. This allows the processing fluid in the second chamber to enter the first heat exchanger and exchange heat with the processing fluid in the first chamber through the first heat exchanger, effectively regulating the temperature of the processing fluid in the second chamber using the processing fluid in the first chamber. When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is less than the first threshold, the device controls the first control valve to close, the second control valve to open, and the bidirectional pump to operate in reverse rotation mode. This allows the processing fluid in the first chamber to directly enter the second chamber to regulate the temperature of the processing fluid in the second chamber. The processing fluid temperature control device for production lines of this invention utilizes a bidirectional pump and control valves to achieve different and effective temperature regulation methods based on the temperature difference between the processing fluids in the first and second chambers.

[0018] Other features and advantages of the invention will become clear from the following detailed description of exemplary embodiments of the invention with reference to the accompanying drawings. Attached Figure Description

[0019] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and, together with their description, serve to explain the invention and do not constitute an undue limitation thereof. In the drawings:

[0020] Figure 1 This is a partial structural schematic diagram of a processing fluid temperature control device for a production line according to some embodiments of the present invention;

[0021] Figure 2 This is a partial structural schematic diagram of a processing fluid temperature control device for a production line according to some embodiments of the present invention;

[0022] Figure 3 for Figure 2 A partial cross-sectional view of the structure shown.

[0023] Figure 4 This is a partial structural schematic diagram of a processing fluid temperature control device for a production line according to some embodiments of the present invention. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0026] In the description of this invention, it should be understood that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0027] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0028] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0029] like Figures 1 to 4 As shown, the processing fluid temperature control device for the production line in this embodiment includes a first chamber 11 for pre-storing processing fluid, a second chamber 14 disposed within the first chamber 11, a first heat exchanger 12 disposed within the first chamber 11 whose pipe outlet is connected to the second chamber 14, a bidirectional pump 19 whose first port and second port are respectively connected to the pipe inlets of the second chamber 14 and the first heat exchanger 12, a first control valve 20 connected between the second port of the bidirectional pump 19 and the pipe inlet of the first heat exchanger 12 for controlling whether the second port of the bidirectional pump 19 and the pipe inlet of the first heat exchanger 12 are connected, a second control valve 21 connected between the second port of the bidirectional pump 19 and the first chamber 11 for controlling whether the second port of the bidirectional pump 19 and the first chamber 11 are connected, and a device for detecting the processing fluid in the first chamber 11 and the processing fluid in the second chamber 14. The system includes a temperature difference detection device, a control device connected to the temperature difference detection device and the first control valve 20 and the second control valve 21, and a circulation device for connecting the second chamber 14 and the processing chamber of the production line. The circulation device is used to introduce the processing fluid in the processing chamber into the second chamber 14 for temperature adjustment and to guide the temperature-adjusted processing fluid from the second chamber 14 back into the processing chamber. The bidirectional pump 19 has a forward rotation mode and a reverse rotation mode. In the forward rotation mode, the bidirectional pump 19 draws fluid from its first port and discharges it from its second port. In the reverse rotation mode, the bidirectional pump 19 draws fluid from its second port and discharges it from its first port. The control device is configured to control the opening and closing of the first control valve 20 and the second control valve 21 according to the detection result of the temperature difference detection device, and to control the switching between the forward rotation mode and the reverse rotation mode when the bidirectional pump 19 is working.

[0030] During production on the production line, the first chamber 11 contains the processing fluid, and the second chamber 14 is used to regulate the temperature of the processing fluid in the processing chamber. The processing chamber refers to the cavity in the production line used to store the processing fluid used in real-time operations. For example, in an electrolyte plasma polishing production line, the processing chamber is the cavity for storing the polishing fluid and polishing the workpiece, for example, located in a polishing fluid tank. The second chamber 14 is located inside the first chamber 11, meaning that the second chamber is at least partially surrounded by the first chamber, but it is not required that all parts of the second chamber be completely surrounded by the first chamber. Figure 2 In the embodiment shown, the second cavity is surrounded by the first cavity 11, and the processing fluid overflowing from the second cavity flows into the first cavity.

[0031] like Figure 2 and Figure 4 As shown, a first heat exchanger 12 is disposed in a first chamber. The pipe outlet of the first heat exchanger 12 is connected to a second chamber 14. The first port and second port of the bidirectional pump are respectively connected to the second chamber and the pipe inlet of the first heat exchanger 12. Thus, when the processing fluid is introduced into the pipe inlet of the first heat exchanger 12 through the first port of the bidirectional pump, the processing fluid exchanges heat with the processing fluid in the first chamber 11 located outside the first heat exchanger 12 and is then transported back to the second chamber 14 from the pipe outlet of the first heat exchanger 12. The bidirectional pump includes bidirectional gear pumps, bidirectional hydraulic pumps, bidirectional screw pumps, etc., which can operate in both forward and reverse directions. The second port of the bidirectional pump 19 is also connected to the first chamber through a second control valve 21. In the embodiment shown in the figure, the first port of the bidirectional pump 19 is also connected to the second chamber through a third control valve 22.

[0032] This embodiment utilizes the processing fluid in the first chamber to regulate the temperature of the processing fluid in the second chamber. In most cases, the processing fluid used in the production line generates heat, requiring the production line's processing fluid temperature control device to circulate and cool it. At this time, the processing fluid pre-stored in the first chamber is at a lower temperature. When the processing fluid in the production line's processing chamber generates a higher temperature during production, it enters the second chamber. The processing fluid in the first chamber is then used to cool the high-temperature processing fluid in the second chamber. The cooled processing fluid is then returned to the production line for further processing. In a few rare cases, the processing fluid in the production line needs to be heated after processing. In this case, a higher-temperature processing fluid can be stored in the first chamber to regulate the temperature of the processing fluid entering the second chamber from the production line's processing chamber. In this embodiment, during the temperature adjustment of the processing fluid in the production line, when the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is greater than a first threshold, the bidirectional pump 19 is put into forward rotation mode, and the first control valve 20 and the third control valve 22 are opened, while the second control valve 21 is closed. The first port of the bidirectional pump 19 draws in the processing fluid from the second chamber 14 and delivers it to the first heat exchanger. After exchanging heat with the processing fluid in the first chamber in the first heat exchanger, the processing fluid is delivered back to the second chamber and then continues to be circulated and drawn into the first heat exchanger for heat exchange. When the temperature of the processing fluid in the second chamber is adjusted to a suitable temperature range, the processing fluid in the second chamber is delivered to the production line for production. When the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is large, using the first heat exchanger for heat exchange can make the temperature regulation of the processing fluid in the second chamber stable and effective, avoiding large temperature fluctuations. Large fluctuations may cause over-temperature regulation and waste of energy, making temperature regulation more continuous and effective. When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is less than a first threshold, it is difficult to achieve a good temperature regulation effect by exchanging heat between the processing fluids in the first and second chambers through the first heat exchanger. In this case, the bidirectional pump 19 is put into reverse mode, and the second control valve 21 and the third control valve 22 are opened, while the first control valve 20 is closed. The second port of the bidirectional pump 19 draws processing fluid from the first chamber 11 and delivers it to the second chamber to directly mix and regulate the temperature. Since the second chamber is located within the first chamber, any overflowing processing fluid entering the second chamber will flow back into the first chamber and be drawn back into the second chamber by the bidirectional pump, circulating and regulating the temperature to produce a good temperature regulation effect. The first threshold can be set based on engineering experience or thermodynamic theory derivation.

[0033] In this embodiment, the production line processing fluid temperature control device controls the opening of the first control valve 20, the closing of the second control valve 21, and the operation of the bidirectional pump 19 in forward rotation mode when the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber 11 and the processing fluid in the second chamber 14 is greater than a first threshold. This allows the processing fluid in the second chamber 14 to enter the first heat exchanger 12 and exchange heat with the processing fluid in the first chamber 11, effectively regulating the temperature of the processing fluid in the second chamber 14 using the processing fluid in the first chamber 11. When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber 11 and the processing fluid in the second chamber 14 is less than the first threshold, it controls the closing of the first control valve 20, the opening of the second control valve 21, and the operation of the bidirectional pump 19 in reverse rotation mode, allowing the processing fluid in the first chamber 11 to directly enter the second chamber 14 to regulate the temperature of the processing fluid in the second chamber 14. The production line processing fluid temperature control device of this invention utilizes the bidirectional pump 19 and control valves to select a suitable and effective temperature regulation method based on the temperature difference between the processing fluids in the first chamber 11 and the second chamber 14.

[0034] In some embodiments, such as Figure 1 , Figure 2 and Figure 4As shown, the temperature difference detection device includes a first temperature sensor 27 located in the first chamber 11 and connected to the control device via signal, and a second temperature sensor 23 located in the second chamber 14 and connected to the control device via signal. The processing fluid temperature control device for the production line also includes a second heat exchanger 8, a first pump 2 connected to the control device via signal, and an external temperature control device. The second heat exchanger 8 includes a first heat exchange tube, the inlet and outlet of which are respectively connected to the first chamber 11. The first pump 2 is located between the inlet of the first heat exchange tube and the first chamber 11. When the first pump 2 is working, it draws the processing fluid from the first chamber 11 and pumps the processing fluid into the first heat exchange tube through the inlet of the first heat exchange tube. The external temperature control device is used to deliver a temperature-regulating fluid to the second heat exchanger 8 to regulate the temperature of the fluid flowing through the first heat exchange tube. The control device is configured to control whether the first pump 2 is working based on the detection results of the first temperature sensor 27 and the second temperature sensor 23. When adjusting the temperature of the processing fluid in the production line, for example, when the polishing fluid needs to be cooled in the electrolyte plasma polishing production line, the temperature of the polishing fluid (i.e., the processing fluid) pre-stored in the first chamber is low at the beginning. At this time, the temperature difference detection device detects that the temperature difference between the first chamber and the second chamber is greater than the first threshold. At this time, the bidirectional pump is in forward rotation mode and heat is exchanged using the first heat exchanger. As heat exchange continues, the temperature of the polishing fluid in the first chamber gradually increases. When the temperature difference detection device detects that the temperature difference between the first and second chambers is less than the first threshold and the first temperature sensor 27 detects that the temperature of the polishing fluid in the first chamber is still less than the lower limit of the suitable temperature range for the polishing fluid during operation of the production line, the control device controls the bidirectional pump to switch to reverse mode, directly sending the polishing fluid in the first chamber into the second chamber for mixing and heat exchange. As the mixing and heat exchange continues, when the temperature of the polishing fluid in the first chamber rises to the suitable temperature range for the polishing fluid, the polishing fluid in the first chamber can no longer adjust the temperature of the polishing fluid in the second chamber. At this time, the first pump 2 is turned on to transport the polishing fluid in the first chamber to the first heat exchange tube of the second heat exchanger. The polishing fluid in the first heat exchange tube is cooled by the external temperature control device and then transported back to the first chamber. The polishing fluid that returns to the first chamber can continue to cool the polishing fluid in the second chamber. In an embodiment where the processing fluid in the first chamber heats the processing fluid in the second chamber, when the temperature of the processing fluid in the first chamber drops to within the appropriate temperature range of the processing fluid in the production line, the processing fluid in the first heat exchange tube is heated using an external temperature control device and then returned to the first chamber via the ninth control valve 31. In the embodiment shown in the figure, a fourth control valve 3 is provided between the first pump 2 and the first heat exchange tube, and an eighth control valve 28 is provided between the first pump 2 and the first chamber.

[0035] In some embodiments, such as Figure 1As shown, the second heat exchanger 8 also includes a second heat exchange tube for exchanging heat with the first heat exchange tube. The external temperature control device includes a cooling tower 10 for storing and cooling the temperature-regulating fluid, connected to the inlet of the second heat exchange tube and the outlet of the second heat exchange tube; and a second pump 9 connected to the control device via a signal connection between the outlet of the cooling tower 10 and the inlet of the second heat exchange tube. The control device is configured to control whether the second pump 9 operates. In the embodiment shown, a fourth control valve 7 is also provided between the second pump 9 and the second heat exchange tube. The cooling and temperature-regulating fluid is cooling water. After entering the second heat exchange tube, the cooling water cools the processing fluid located in the first heat exchange tube, then enters the cooling tower for further cooling, and then continues to enter the second heat exchange tube for heat exchange.

[0036] In some embodiments, the processing fluid temperature control device for the production line further includes two electric heating rods connected to the control device in the first chamber 11 and three electric heating rods connected to the control device in the second chamber 14. The control device is configured to control the operation of one or more of the two electric heating rods in the first chamber 11 and to control the operation of one or more of the three electric heating rods in the second chamber 14. In the embodiment shown in the figure, the two electric heating rods include two first electric heating rods 18 in the first chamber, and the three electric heating rods in the second chamber 14 include three second electric heating rods 17. In this embodiment, due to the electric heating rods, the heating of the processing fluid in the first and second chambers can be independently controlled. Therefore, in this embodiment, when the processing fluid in the production line needs to reach a suitable temperature before it can start working, the processing fluid can be pre-stored in the second chamber, and then heated by the second electric heating rods 17. After being heated to a suitable temperature, it is sent into the processing chamber for production. For example, when the processing fluid production starts and needs to reach a temperature of T0, the processing fluid is first added to both the first and second chambers. Then, the processing fluid in the second chamber is heated using the second electric heating rod 17, while the processing fluid in the first chamber is not heated to prepare for subsequent cooling and temperature control. When heating the processing fluid in the second chamber, all three electric heating rods 17 are initially turned on. When the processing fluid in the second chamber reaches a temperature close to T0 (T1), one of the second electric heating rods is turned off. When the processing fluid in the second chamber continues to be heated to a temperature even closer to T0 (T2), another second electric heating rod is turned off. Once the processing fluid in the second chamber reaches T0, all the second electric heating rods are turned off, and the processing fluid is then transported to the processing chamber for production.

[0037] In some embodiments, the circulation device includes a third pump 30, a fifth control valve 29 connected between the third pump 30 and the second chamber, and a sixth control valve 26 connected between the machining chamber and the second chamber. The third pump is used to draw the temperature-controlled machining fluid in the second chamber into the machining chamber, and the machining fluid in the machining chamber enters the second chamber through the sixth control valve 26.

[0038] In some embodiments, the processing fluid temperature control device for the production line further includes a level sensor located in the second chamber 14 and connected to the control device for detecting the liquid level of the processing fluid in the second chamber 14. The level sensor in the second chamber can be positioned 20mm above the second electric heating rod to indicate the liquid level and prevent damage caused by dry burning of the heating rod. In some embodiments, a level sensor is also provided in the first chamber.

[0039] In some embodiments, the processing fluid temperature control device for the production line further includes a first stirring device 25 disposed in the first chamber 11 and a second stirring device 24 disposed in the second chamber 14. The first stirring device 25 and the second stirring device 24 include stirrers for stirring the processing fluid, which can make the temperature of the processing fluid in the first chamber and the second chamber more uniform.

[0040] In some embodiments, the processing fluid temperature control device for the production line includes a temperature control device 1. The temperature control device 1 includes a temperature regulating tank and a processing fluid tank disposed within the temperature regulating tank. The temperature regulating tank forms a first cavity 11, and the processing fluid tank forms a second cavity 14. The tank wall of the processing fluid tank includes a radially arranged annular heat insulation layer 15 and an annular heat storage layer 16. In such cases... Figure 3 In the illustrated embodiment, the annular insulation layer 15 is located radially inside the annular heat storage layer 16. In some embodiments, the annular heat storage layer 16 is provided with a phase change energy storage material. In the embodiment shown, the annular insulation layer 15 is filled with insulating cotton, and the annular heat storage layer 16 is filled with a phase change energy storage material, such as Na2SO4·10H2O or MgCl2·6H2O. When the temperature of the phase change energy storage material reaches the phase change point, it will continuously absorb or release heat, while the temperature remains constant at the phase change point. The phase change energy storage material can utilize the heat absorption or release during phase change to achieve heat storage and utilization. During temperature control, the annular insulation layer 15 and the annular heat storage layer 16 can block direct heat exchange between the temperature regulating tank and the processing liquid tank. At the same time, as the temperature in the temperature regulating tank rises and reaches the phase change point of the phase change energy storage material inside the heat storage layer, the heat storage material continuously absorbs heat, and the temperature remains constant for a period of time, achieving the purpose of heat storage and slowing down the temperature rise rate of the temperature regulating tank. When the production line finishes processing, the temperature regulating tank cools down naturally. Due to the presence of the annular heat insulation layer 15 and the annular heat storage layer 16, the temperature of the processing liquid tank drops more slowly and the heat preservation effect is better. When the next shift starts heating, the heating can be completed more quickly, improving equipment efficiency and saving electric heating power.

[0041] In some embodiments, the wall of the processing fluid tank is provided with an overflow port 13, which is used to output the processing fluid in the processing fluid tank to the temperature control tank when the liquid level of the processing fluid in the processing fluid tank exceeds the design height.

[0042] In some embodiments, the processing fluid temperature control device for the production line is a temperature control device for controlling the temperature of the electrolyte in an electrolyte plasma polishing production line.

[0043] In some embodiments, the control device includes a PLC controller 5 and a frequency converter 6. The bidirectional pump 19, the first pump 2 and / or the second pump 9 are all frequency converter pumps. The PLC controller 5 controls the operating power of the bidirectional pump 19, the first pump 2 and / or the second pump 9 through the frequency converter 6.

[0044] In some embodiments, the control valves described above, such as the first control valve and the second control valve, include on / off valves, such as electromagnetic on / off valves, and the control device signals control the opening or closing of the on / off valves.

[0045] In some embodiments, a temperature control method for processing fluid temperature control devices used in production lines as described above is also disclosed, the temperature control method comprising:

[0046] When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber 11 and the processing fluid in the second chamber 14 is greater than the first threshold, it controls the first control valve 20 to open, controls the second control valve 21 to close, and controls the bidirectional pump 19 to work in forward rotation mode.

[0047] When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber 11 and the processing fluid in the second chamber 14 is less than the first threshold, it controls the first control valve 20 to close, controls the second control valve 21 to open, and controls the bidirectional pump 19 to work in reverse mode.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them; although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications can still be made to the specific implementation of the present invention or equivalent substitutions can be made to some technical features without departing from the spirit of the technical solutions of the present invention, and all such modifications and substitutions should be covered within the scope of the technical solutions claimed in the present invention.

Claims

1. A temperature control device for processing fluid in a production line, characterized in that, The system includes a first chamber for pre-storing processing fluid, a second chamber located within the first chamber, a first heat exchanger located within the first chamber and connected to the second chamber via its pipe outlet, a bidirectional pump whose first and second ports are respectively connected to the pipe inlets of the second chamber and the first heat exchanger, a first control valve connected between the second port of the bidirectional pump and the pipe inlet of the first heat exchanger for controlling whether the second port of the bidirectional pump and the pipe inlet of the first heat exchanger are connected, a second control valve connected between the second port of the bidirectional pump and the first chamber for controlling whether the second port of the bidirectional pump and the first chamber are connected, a temperature difference detection device for detecting the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber, a control device connected to the temperature difference detection device and the first and second control valves via signals, and a circulation device for connecting the second chamber and the processing chamber of the production line. The circulation device is used to introduce the processing fluid from the processing chamber into the second chamber for temperature adjustment and to circulate the temperature-adjusted fluid through the second chamber. The processed fluid is then guided back from the second chamber to the processing chamber. The bidirectional pump has a forward rotation mode and a reverse rotation mode. In the forward rotation mode, the bidirectional pump draws fluid from its first port and discharges it from its second port. In the reverse rotation mode, the bidirectional pump draws fluid from its second port and discharges it from its first port. The control device is configured to control the opening and closing of the first control valve and the second control valve, and to control the switching between the forward rotation mode and the reverse rotation mode of the bidirectional pump, based on the detection result of the temperature difference detection device. When the temperature difference detection device detects that the temperature difference between the processed fluid in the first chamber and the processed fluid in the second chamber is greater than a first threshold, it controls the first control valve to open, controls the second control valve to close, and controls the bidirectional pump to operate in the forward rotation mode. When the temperature difference detection device detects that the temperature difference between the processed fluid in the first chamber and the processed fluid in the second chamber is less than the first threshold, it controls the first control valve to close, controls the second control valve to open, and controls the bidirectional pump to operate in the reverse rotation mode.

2. The processing fluid temperature control device for a production line as described in claim 1, characterized in that, The temperature difference detection device includes a first temperature sensor located in the first cavity and connected to the control device via signal, and a second temperature sensor located in the second cavity and connected to the control device via signal. The processing fluid temperature control device for the production line also includes a second heat exchanger, a first pump connected to the control device via signal, and an external temperature control device. The second heat exchanger includes a first heat exchange tube, the inlet and outlet of which are respectively connected to the first cavity. The first pump is located between the inlet of the first heat exchange tube and the first cavity. When the first pump is working, it draws the processing fluid from the first cavity and pumps the processing fluid through the inlet of the first heat exchange tube into the first heat exchange tube. The external temperature control device is used to deliver a temperature-regulating fluid to the second heat exchanger to regulate the temperature of the fluid flowing through the first heat exchange tube. The control device is configured to control whether the first pump works based on the detection results of the first temperature sensor and the second temperature sensor.

3. The processing fluid temperature control device for a production line as described in claim 2, characterized in that, The second heat exchanger further includes a second heat exchange tube for exchanging heat with the first heat exchange tube. The external temperature control device includes a cooling tower for storing and cooling the temperature-controlled fluid connected to its inlet and the outlet of the second heat exchange tube, and a second pump connected to the control device via a signal connection between the outlet of the cooling tower and the inlet of the second heat exchange tube. The control device is configured to control whether the second pump is operating.

4. The processing fluid temperature control device for a production line as described in claim 1, characterized in that, It also includes two electric heating rods located in the first cavity and connected to the control device via signal, and three electric heating rods located in the second cavity and connected to the control device via signal. The control device is configured to control zero or more of the two electric heating rods in the first cavity to operate, and to control zero or more of the three electric heating rods in the second cavity to operate.

5. The processing fluid temperature control device for a production line as described in claim 4, characterized in that, It also includes a liquid level sensor located in the second cavity and connected to the control device for detecting the liquid level of the processing fluid in the second cavity.

6. The processing fluid temperature control device for a production line as described in claim 4, characterized in that, It also includes a first stirring device disposed in the first cavity and a second stirring device disposed in the second cavity.

7. The processing fluid temperature control device for a production line as described in claim 1, characterized in that, It includes a temperature regulating tank and a processing fluid tank disposed within the temperature regulating tank. The temperature regulating tank forms the first cavity, and the processing fluid tank forms the second cavity. The tank wall of the processing fluid tank includes an annular heat insulation layer and an annular heat storage layer arranged radially.

8. The processing fluid temperature control device for a production line as described in claim 7, characterized in that, The annular thermal storage layer is equipped with phase change energy storage material.

9. The processing fluid temperature control device for a production line as described in claim 7, characterized in that, The processing fluid tank is provided with an overflow port on its wall. The overflow port is used to output the processing fluid in the processing fluid tank to the temperature control tank when the liquid level of the processing fluid in the processing fluid tank exceeds the design height.

10. The processing fluid temperature control device for a production line as described in any one of claims 1 to 9, characterized in that, The temperature control device for the processing fluid in the production line is a temperature control device used to control the temperature of the electrolyte in the electrolyte plasma polishing production line.

11. A temperature control method using a processing fluid temperature control device for a production line as described in any one of claims 1 to 10, characterized in that, include: When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is greater than a first threshold, it controls the first control valve to open, controls the second control valve to close, and controls the bidirectional pump to work in forward rotation mode. When the temperature difference detection device detects that the temperature difference between the processing fluid in the first chamber and the processing fluid in the second chamber is less than a first threshold, it controls the first control valve to close, controls the second control valve to open, and controls the bidirectional pump to operate in reverse mode.

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