Two-dimensional linear platform based on outer thread piezoelectric actuator driving and method thereof

Abstract

The application discloses a two-dimensional linear platform driven by an outer thread piezoelectric actuator and a method thereof. The two-dimensional linear platform comprises a carrier plate, a first driving module and a second driving module. The first driving module and the second driving module are of the same structure and each comprises a bottom plate, an actuator, a rolling bearing, a first to second fixed support, a first to second sliding rail, a first to second sliding block and a first to second connecting piece. The actuator comprises a metal base, a driving nut, a first piezoelectric component, a second piezoelectric component, a front beam, a rear beam and a first to second fixed bolt. The application has the advantages of simple and compact structure, high precision, electromagnetic compatibility, power-off self-locking, good versatility, and strong universality. The length of the metal base can be designed according to the required working stroke of the moving platform.

Description

Technical Field

[0001] This invention relates to the field of piezoelectric drive technology, and in particular to a two-dimensional linear platform and method based on an external thread piezoelectric actuator. Background Technology

[0002] The development of the traditional precision electrical equipment manufacturing industry is one of the important factors influencing national economic growth and technological progress. With the rapid development of modern technology and the continuous improvement of technical specifications, traditional electromagnetic motors are gradually failing to meet the evolving technological requirements in fields such as precision optical instruments, precision medical equipment, aerospace, and intelligent robots. These requirements include miniaturization, high integration, high reliability, and multifunctionality. Furthermore, due to the limitations of the electromagnetic motor's principle and structure, it cannot meet the newly proposed requirements for motors such as short size, small weight, thinness, absence of electromagnetic interference, and fast dynamic response. Therefore, countries around the world have begun to explore micromotors that meet these requirements, among which piezoelectric driven motors are a relatively mature technology.

[0003] Piezoelectric actuators utilize the inverse piezoelectric effect of smart materials to force an elastic body to vibrate, and then convert this vibration into macroscopic motion through friction between the stator and mover. Due to their unique working principle, piezoelectric actuators offer advantages such as simple and compact structure, fast response speed, high positioning accuracy, and immunity to electromagnetic interference. Currently, linear piezoelectric actuators have been successfully applied in precision linear motion platforms, automatic focusing devices for cameras, and medical micro-injectors. Among these applications, using piezoelectric actuators in precision linear motion platforms to achieve accurate positioning is currently a hot research topic. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to address the deficiencies mentioned in the background art by proposing a two-dimensional linear platform and method based on an external thread piezoelectric actuator.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A two-dimensional linear platform driven by an external thread piezoelectric actuator includes a carrier plate, a first drive module, and a second drive module. The first drive module and the second drive module have the same structure, each including a base plate, an actuator, a rolling bearing, a first to a second fixed bracket, a first to a second slide rail, a first to a second slider, and a first to a second connecting member; The actuator includes a metal base, a drive nut, a first piezoelectric assembly, a second piezoelectric assembly, a front beam, a rear beam, and first and second fixing bolts; The metal substrate is cylindrical, with an external thread in the middle of its outer wall, such that the outer wall includes a first connecting part, a threaded part, and a second connecting part connected in sequence, with the first connecting part and the second connecting part being symmetrical about the threaded part; the two ends of the metal substrate are respectively provided with a first threaded blind hole and a second threaded blind hole for cooperating with the first fixing bolt and the second fixing bolt; The drive nut is fitted onto the metal substrate and is threadedly connected to the metal substrate. The first piezoelectric component and the second piezoelectric component have the same unit structure, each containing M piezoelectric units stacked sequentially, where M is a natural number greater than or equal to 1; The piezoelectric unit comprises first to fourth dual-zone piezoelectric ceramic sheets stacked sequentially. The first to fourth dual-zone piezoelectric ceramic sheets have the same structure, all of which are annular, with the same outer diameter as the outer diameter of the first connecting part cross section. Both zones are polarized along the thickness direction and the polarization directions are opposite. The polarization boundary lines of the first and second dual-zone piezoelectric ceramic sheets are coplanar and the polarization directions of the same side zone are opposite. The polarization boundary lines of the third and fourth dual-zone piezoelectric ceramic sheets are coplanar and the polarization directions of the same side zone are opposite. The polarization boundary lines of the second and third dual-zone piezoelectric ceramic sheets are perpendicular to each other. The front beam and the rear beam have the same structure. They are both cylinders with the same cross-section as the first connecting part, and both have through holes along the axis. The first fixing bolt passes through the front beam and the first piezoelectric component in sequence and is then threaded into the first threaded blind hole, clamping the first piezoelectric component between the front beam and the metal substrate; the second fixing bolt passes through the rear beam and the second piezoelectric component in sequence and is then threaded into the second threaded blind hole, clamping the second piezoelectric component between the rear beam and the metal substrate; the first piezoelectric component and the second piezoelectric component are symmetrical; The ends of the front beam and the rear beam away from the metal substrate are fixed to the base plate by the first fixed bracket and the second fixed bracket, respectively, so that the metal substrate is parallel to the base plate; The first slide rail is disposed on the base plate between the first fixed bracket and the second fixed bracket, and is parallel to the metal substrate; the first slider is disposed on the first slide rail and can slide freely on the first slide rail; the second slide rail is disposed on the base plate and is parallel to the first slide rail; the second slider is disposed on the second slide rail and can slide freely on the second slide rail. The first connector has a mounting hole for mounting the rolling bearing; the outer ring of the rolling bearing and the first connector are fixedly connected at their mounting holes, and the inner ring is coaxially fixedly connected to the drive nut; the lower end of the first connector is fixedly connected to the first slider. The lower end of the second connector is fixedly connected to the second slider; The upper ends of the first connector and the second connector in the first drive module are respectively fixed to the lower end face of the base plate of the second drive module, and are used to drive the base plate of the second drive module to move along the first slide rail of the first drive module. The first slide rail of the second drive module is perpendicular to the first slide rail of the first drive module. The upper ends of the first connector and the second connector in the second drive module are respectively fixed to the carrier plate and are used to drive the carrier plate to move along the first slide rail of the second drive module.

[0006] As a further optimization of the two-dimensional linear platform driven by the external thread piezoelectric actuator of the present invention, the driving nut and the inner ring of the rolling bearing are interference-fitted, and a retaining ring is provided between the driving nut and the inner ring of the rolling bearing.

[0007] As a further optimization of the two-dimensional linear platform driven by an external thread piezoelectric actuator in this invention, the rolling bearing is a ceramic bearing.

[0008] As a further optimization of the two-dimensional linear platform driven by the external thread piezoelectric actuator of the present invention, the carrying plate, the base plate of the first driving module, and the base plate of the second driving module are all square, and each has a square through hole in the center to reduce weight.

[0009] As a further optimization of the two-dimensional linear platform driven by the external thread piezoelectric actuator of the present invention, both the first connecting part and the second connecting part are provided with several milled planes evenly distributed in the circumference to facilitate assembly.

[0010] As a further optimization of the two-dimensional linear platform driven by the external thread piezoelectric actuator of the present invention, the metal substrate, the drive nut, the first fixed bracket, and the second fixed bracket are all made of aluminum alloy.

[0011] This invention also discloses a method for operating the two-dimensional linear platform driven by an external thread piezoelectric actuator, comprising the following steps: If it is necessary to drive the platform to move forward along the first slide rail of the first drive module: The metal substrates in the first and second drive modules are grounded. A first signal is applied to the first and second piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the first drive module, and a second signal is applied to the third and fourth piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the first drive module. The first and second signals are sinusoidal voltage signals with a phase difference of π / 2, which causes the particles on the threads of the metal substrate in the first drive module to vibrate at high frequency and micro-amplitude. This, in turn, causes the drive nut of the first drive module to rotate through friction. The first connector of the first drive module moves forward along the first slide rail of the first drive module under the drive of its drive nut, which in turn drives the second drive module and the carrier plate to move forward along the first slide rail of the first drive module. If it is necessary to drive the carrier plate to move in the opposite direction along the first slide rail of the first drive module, the phase difference between the first and second signals can be adjusted to -π / 2. If it is necessary to drive the platform to move forward along the first slide rail of the second drive module: The metal substrates in the first and second drive modules are grounded. A first signal is applied to the first and second piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the second drive module, and a second signal is applied to the third and fourth piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the second drive module. The third and fourth signals are sinusoidal voltage signals with a phase difference of π / 2, which causes the particles on the threads of the metal substrate in the second drive module to vibrate at high frequency and micro-amplitude. This, in turn, causes the drive nut of the second drive module to rotate through friction. The first connector of the second drive module moves forward along the first slide rail of the second drive module under the drive of its drive nut, which in turn causes the carrier plate to move forward along the first slide rail of the second drive module. If it is necessary to drive the carrier plate to move in the opposite direction along the first slide rail of the second drive module, the phase difference between the third and fourth signals can be adjusted to -π / 2.

[0012] The beneficial effects of this invention are as follows: 1. This invention fully utilizes the structural characteristics of the lead screw nut, using a metal substrate as the excitation component, which is easy to clamp, making the piezoelectric driven precision linear platform simple and compact in structure. The fine thread of the metal substrate and the drive nut ensures that the moving platform can transmit with high precision and achieve accurate positioning. Due to the uniqueness of the piezoelectric drive principle, it has the advantages of fast response speed, power failure self-locking, and strong anti-electromagnetic interference capability. 2. The length of the metal substrate can be designed according to the required working stroke of the mobile platform, making it highly versatile. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2This is an exploded structural diagram of the first fixed bracket, the second fixed bracket, the actuator, and the first connecting member in this invention. Figure 3 This is a schematic diagram of the polarization direction of the first piezoelectric component in this invention; Figure 4 This is a schematic diagram of the voltage applied when driving the actuator in this invention; Figure 5 This is a simulation diagram of the actuator working in this invention.

[0014] In the figure, 1-carrying plate, 2-second connector of the second drive module, 3-second slider of the second drive module, 4-second slide rail of the second drive module, 5-base plate of the second drive module, 6-base plate of the first drive module, 7-first slider of the second drive module, 8-first slide rail of the second drive module, 9-metal substrate, 10-first piezoelectric component, 11-second piezoelectric component, 12-rear beam, 13-first fixing bolt, 14-second fixing bolt, 15-fixing part of the first fixing bracket, 16-disc part of the first fixing bracket, 17-fixing part of the second fixing bracket, 18-disc part of the second fixing bracket, 19-drive nut, 20-rolling bearing, 21-first connector. Implementation

[0015] This invention can be implemented in many different forms and should not be considered limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully express the scope of the invention to those skilled in the art. In the drawings, components are enlarged for clarity.

[0016] It should be understood that although the terms first, second, third, etc., may be used herein to describe various elements, components, and / or parts, these elements, components, and / or parts are not limited by these terms. These terms are merely used to distinguish elements, components, and / or parts from one another. Therefore, the first element, component, and / or part discussed below may be a second element, component, or part without departing from the teachings of this invention.

[0017] like Figure 1 As shown, the present invention discloses a two-dimensional linear platform driven by an external thread piezoelectric actuator, comprising a carrier plate, a first driving module, and a second driving module; The first drive module and the second drive module have the same structure, each including a base plate, an actuator, a rolling bearing, a first to a second fixed bracket, a first to a second slide rail, a first to a second slider, and a first to a second connecting member; like Figure 2 As shown, the actuator includes a metal base, a drive nut, a first piezoelectric assembly, a second piezoelectric assembly, a front beam, a rear beam, and first to second fixing bolts; The metal substrate is cylindrical, with an external thread in the middle of its outer wall, such that the outer wall includes a first connecting part, a threaded part, and a second connecting part connected in sequence, with the first connecting part and the second connecting part being symmetrical about the threaded part; the two ends of the metal substrate are respectively provided with a first threaded blind hole and a second threaded blind hole for cooperating with the first fixing bolt and the second fixing bolt; The drive nut is fitted onto the metal substrate and is threadedly connected to the metal substrate. The first piezoelectric component and the second piezoelectric component have the same unit structure, each containing M piezoelectric units stacked sequentially, where M is a natural number greater than or equal to 1; The piezoelectric unit comprises first to fourth dual-zone piezoelectric ceramic sheets stacked sequentially. The first to fourth dual-zone piezoelectric ceramic sheets have the same structure, all of which are annular, with the same outer diameter as the outer diameter of the first connecting part cross section. Both zones are polarized along the thickness direction and the polarization directions are opposite. The polarization boundaries of the first and second dual-zone piezoelectric ceramic sheets are coplanar, and the polarization directions of the zones on the same side are opposite. The polarization boundaries of the third and fourth dual-zone piezoelectric ceramic sheets are coplanar, and the polarization directions of the zones on the same side are opposite. The polarization boundaries of the second and third dual-zone piezoelectric ceramic sheets are perpendicular to each other. Figure 3 As shown; The front beam and the rear beam have the same structure. They are both cylinders with the same cross-section as the first connecting part, and both have through holes along the axis. The first fixing bolt passes through the front beam and the first piezoelectric component in sequence and is then threaded into the first threaded blind hole, clamping the first piezoelectric component between the front beam and the metal substrate; the second fixing bolt passes through the rear beam and the second piezoelectric component in sequence and is then threaded into the second threaded blind hole, clamping the second piezoelectric component between the rear beam and the metal substrate; the first piezoelectric component and the second piezoelectric component are symmetrical; The ends of the front beam and the rear beam away from the metal substrate are fixed to the base plate by the first fixed bracket and the second fixed bracket, respectively, so that the metal substrate is parallel to the base plate; The first slide rail is disposed on the base plate between the first fixed bracket and the second fixed bracket, and is parallel to the metal substrate; the first slider is disposed on the first slide rail and can slide freely on the first slide rail; the second slide rail is disposed on the base plate and is parallel to the first slide rail; the second slider is disposed on the second slide rail and can slide freely on the second slide rail. The first connector has a mounting hole for mounting the rolling bearing; the outer ring of the rolling bearing and the first connector are fixedly connected at their mounting holes, and the inner ring is coaxially fixedly connected to the drive nut; the lower end of the first connector is fixedly connected to the first slider. The lower end of the second connector is fixedly connected to the second slider; The upper ends of the first connector and the second connector in the first drive module are respectively fixed to the lower end face of the base plate of the second drive module, and are used to drive the base plate of the second drive module to move along the first slide rail of the first drive module. The first slide rail of the second drive module is perpendicular to the first slide rail of the first drive module. The upper ends of the first connector and the second connector in the second drive module are respectively fixed to the carrier plate and are used to drive the carrier plate to move along the first slide rail of the second drive module.

[0018] When the drive nut and the inner ring of the rolling bearing are coaxially fixed, an interference fit can be used, and a retaining spring is provided between the drive nut and the inner ring of the rolling bearing; the rolling bearing is preferably a ceramic bearing; the base plate of the carrying plate, the base plate of the first drive module, and the base plate of the second drive module are preferably square, and each has a square through hole in the center to reduce weight.

[0019] Both the first and second connecting parts are uniformly provided with several milled surfaces in the circumferential direction to facilitate assembly. For ease of assembly, both the first and second fixed brackets can be disassembled into two parts: a disc part and a fixed part. The disc part is coaxially fixed to the actuator, and the fixed part is fixed to the base plate. At the same time, the disc part and the fixed part are fixed with bolts. In specific operation, the disc part of the first fixed bracket and the front beam can even be integrally formed, and the disc part of the second fixed bracket and the rear beam can be integrally formed. In addition, for ease of assembly, the first connecting part can also be disassembled into two parts at its mounting hole.

[0020] The metal substrate, drive nut, first fixed bracket, and second fixed bracket are all made of aluminum alloy.

[0021] This invention also discloses a method for operating the two-dimensional linear platform driven by an external thread piezoelectric actuator, comprising the following steps: If it is necessary to drive the platform to move forward along the first slide rail of the first drive module: The metal substrates in the first and second driving modules are grounded. A first signal is applied to the first and second piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the first driving module, and a second signal is applied to the third and fourth piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the first driving module. The first and second signals are sinusoidal voltage signals with a phase difference of π / 2. Figure 4 As shown, this causes the particles on the metal substrate threads in the first drive module to undergo high-frequency micro-amplitude vibration, such as... Figure 5As shown, the driving nut of the first driving module rotates due to friction; the first connecting piece of the first driving module moves forward along the first slide rail of the first driving module under the drive of its driving nut, driving the second driving module and thus driving the carrier plate to move forward along the first slide rail of the first driving module. If it is necessary to drive the carrier plate to move in the opposite direction along the first slide rail of the first drive module, the phase difference between the first and second signals can be adjusted to -π / 2. If it is necessary to drive the platform to move forward along the first slide rail of the second drive module: The metal substrates in the first and second drive modules are grounded. A first signal is applied to the first and second piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the second drive module, and a second signal is applied to the third and fourth piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the second drive module. The third and fourth signals are sinusoidal voltage signals with a phase difference of π / 2, which causes the particles on the threads of the metal substrate in the second drive module to vibrate at high frequency and micro-amplitude. This, in turn, causes the drive nut of the second drive module to rotate through friction. The first connector of the second drive module moves forward along the first slide rail of the second drive module under the drive of its drive nut, which in turn causes the carrier plate to move forward along the first slide rail of the second drive module. If it is necessary to drive the carrier plate to move in the opposite direction along the first slide rail of the second drive module, the phase difference between the third and fourth signals can be adjusted to -π / 2.

[0022] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless defined as herein.

[0023] There are many specific ways to implement this invention. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of this invention, and these improvements should also be considered within the scope of protection of this invention.

Claims

1. A two-dimensional linear platform driven by an external thread piezoelectric actuator, characterized in that, It includes a carrier board, a first drive module, and a second drive module; The first drive module and the second drive module have the same structure, each including a base plate, an actuator, a rolling bearing, a first to a second fixed bracket, a first to a second slide rail, a first to a second slider, and a first to a second connecting member; The actuator includes a metal base, a drive nut, a first piezoelectric assembly, a second piezoelectric assembly, a front beam, a rear beam, and first and second fixing bolts; The metal substrate is cylindrical, with an external thread in the middle of its outer wall, such that the outer wall includes a first connecting part, a threaded part, and a second connecting part connected in sequence, with the first connecting part and the second connecting part being symmetrical about the threaded part; the two ends of the metal substrate are respectively provided with a first threaded blind hole and a second threaded blind hole for cooperating with the first fixing bolt and the second fixing bolt; The drive nut is fitted onto the metal substrate and is threadedly connected to the metal substrate. The first piezoelectric component and the second piezoelectric component have the same unit structure, each containing M piezoelectric units stacked sequentially, where M is a natural number greater than or equal to 1; The piezoelectric unit comprises first to fourth dual-zone piezoelectric ceramic sheets stacked sequentially. The first to fourth dual-zone piezoelectric ceramic sheets have the same structure, all of which are annular, with the same outer diameter as the outer diameter of the first connecting part cross section. Both zones are polarized along the thickness direction and the polarization directions are opposite. The polarization boundary lines of the first and second dual-zone piezoelectric ceramic sheets are coplanar and the polarization directions of the same side zone are opposite. The polarization boundary lines of the third and fourth dual-zone piezoelectric ceramic sheets are coplanar and the polarization directions of the same side zone are opposite. The polarization boundary lines of the second and third dual-zone piezoelectric ceramic sheets are perpendicular to each other. The front beam and the rear beam have the same structure. They are both cylinders with the same cross-section as the first connecting part, and both have through holes along the axis. The first fixing bolt passes through the front beam and the first piezoelectric component in sequence and is then threaded into the first threaded blind hole, clamping the first piezoelectric component between the front beam and the metal substrate; the second fixing bolt passes through the rear beam and the second piezoelectric component in sequence and is then threaded into the second threaded blind hole, clamping the second piezoelectric component between the rear beam and the metal substrate; the first piezoelectric component and the second piezoelectric component are symmetrical; The ends of the front beam and the rear beam away from the metal substrate are fixed to the base plate by the first fixed bracket and the second fixed bracket, respectively, so that the metal substrate is parallel to the base plate; The first slide rail is disposed on the base plate between the first fixed bracket and the second fixed bracket, and is parallel to the metal substrate; the first slider is disposed on the first slide rail and can slide freely on the first slide rail; the second slide rail is disposed on the base plate and is parallel to the first slide rail; the second slider is disposed on the second slide rail and can slide freely on the second slide rail. The first connector has mounting holes for mounting the rolling bearing; the outer ring of the rolling bearing and the first connector are fixedly connected at their mounting holes, and the inner ring is coaxially fixedly connected to the drive nut; the lower end of the first connector is fixedly connected to the first slider. The lower end of the second connector is fixedly connected to the second slider; The upper ends of the first connector and the second connector in the first drive module are respectively fixed to the lower end face of the base plate of the second drive module, and are used to drive the base plate of the second drive module to move along the first slide rail of the first drive module. The first slide rail of the second drive module is perpendicular to the first slide rail of the first drive module. The upper ends of the first connector and the second connector in the second drive module are respectively fixed to the carrier plate and are used to drive the carrier plate to move along the first slide rail of the second drive module.

2. The two-dimensional linear platform driven by an external thread piezoelectric actuator according to claim 1, characterized in that, The drive nut and the inner ring of the rolling bearing are interference-fitted, and a retaining ring is provided between the drive nut and the inner ring of the rolling bearing.

3. The two-dimensional linear platform driven by an external thread piezoelectric actuator according to claim 1, characterized in that, The rolling bearing is a ceramic bearing.

4. The two-dimensional linear platform driven by an external thread piezoelectric actuator according to claim 1, characterized in that, The carrier plate, the base plate of the first drive module, and the base plate of the second drive module are all square, and each has a square through hole in the center to reduce weight.

5. The two-dimensional linear platform driven by an external thread piezoelectric actuator according to claim 1, characterized in that, Both the first connecting part and the second connecting part are provided with several milled planes evenly distributed around the circumference to facilitate assembly.

6. The two-dimensional linear platform driven by an external thread piezoelectric actuator according to claim 1, characterized in that, The metal substrate, drive nut, first fixed bracket, and second fixed bracket are all made of aluminum alloy.

7. The working method of the two-dimensional linear platform driven by the external thread piezoelectric actuator as described in claim 1, characterized in that, Includes the following steps: If it is necessary to drive the platform to move forward along the first slide rail of the first drive module: The metal substrates in the first and second drive modules are grounded. A first signal is applied to the first and second piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the first drive module, and a second signal is applied to the third and fourth piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the first drive module. The first and second signals are sinusoidal voltage signals with a phase difference of π / 2, which causes the particles on the threads of the metal substrate in the first drive module to vibrate at high frequency and micro-amplitude. This, in turn, causes the drive nut of the first drive module to rotate through friction. The first connector of the first drive module moves forward along the first slide rail of the first drive module under the drive of its drive nut, which in turn drives the second drive module and the carrier plate to move forward along the first slide rail of the first drive module. If it is necessary to drive the carrier plate to move in the opposite direction along the first slide rail of the first drive module, the phase difference between the first and second signals can be adjusted to -π / 2. If it is necessary to drive the platform to move forward along the first slide rail of the second drive module: The metal substrates in the first and second drive modules are grounded. A first signal is applied to the first and second piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the second drive module, and a second signal is applied to the third and fourth piezoelectric ceramic sheets of each piezoelectric unit in the first and second piezoelectric components of the second drive module. The third and fourth signals are sinusoidal voltage signals with a phase difference of π / 2, which causes the particles on the threads of the metal substrate in the second drive module to vibrate at high frequency and micro-amplitude. This, in turn, causes the drive nut of the second drive module to rotate through friction. The first connector of the second drive module moves forward along the first slide rail of the second drive module under the drive of its drive nut, which in turn causes the carrier plate to move forward along the first slide rail of the second drive module. If it is necessary to drive the carrier plate to move in the opposite direction along the first slide rail of the second drive module, the phase difference between the third and fourth signals can be adjusted to -π / 2.

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