High-temperature furnace with cooling structure

Abstract

The application provides a high-temperature furnace with a cooling structure, and relates to the technical field of polysilicon processing equipment. The high-temperature furnace with the cooling structure comprises a furnace body, a heat preservation cage box, a containing box body and a cooling device. The heat preservation cage box is arranged in the furnace body, and a flow-through cavity is formed between the furnace body and the heat preservation cage box. The heat preservation cage box comprises a box body, a heat preservation door and a first moving driving source. The heat preservation door is connected with a moving end of the first moving driving source. An opening is formed in the side wall of the box body. The first moving driving source drives the heat preservation door to open and close the opening of the box body. The containing box body is arranged in the heat preservation cage box, and polysilicon is placed in the containing box body. The cooling device comprises a circulating fan and a heat exchange assembly. The heat exchange assembly is arranged on the furnace body, and the heat exchange assembly and the furnace body can exchange heat. The circulating fan is used for circulating the airflow in the flow-through cavity and the heat preservation cage box. The application can improve the cooling efficiency of the high-temperature furnace and improve the situation that the heat preservation layer is easily oxidized.

Description

Technical Field

[0001] This application relates to the technical field of polysilicon processing equipment, and in particular to a high-temperature furnace with a cooling structure. Background Technology

[0002] Polycrystalline silicon is widely used in the photovoltaic and semiconductor fields. The environment in which polycrystalline silicon is remelted and grown is generally called the thermal field. The thermal field not only provides a large amount of heat energy for the melting of polycrystalline silicon, but also provides a reasonable temperature gradient during the crystal growth process to obtain polycrystalline silicon crystals that meet the requirements.

[0003] In production, polycrystalline silicon meeting certain purity requirements is loaded into a high-temperature furnace, where it is heated and melted, oriented for crystal growth, heat-treated, and cooled before being unloaded according to process requirements. During the heating stage, the silicon material is heated by power control. When the temperature reaches the temperature-to-power conversion parameter value, the process transitions from heating to melting. After all the silicon material has melted, the crystal growth stage begins. During crystal growth, the furnace door at the bottom of the high-temperature furnace is opened to cool the bottom of the molten silicon, creating a vertical temperature gradient that allows the molten silicon to grow from the solid-liquid surface upwards. After growth, the silicon ingot enters the annealing stage to reduce internal stress. Finally, the ingot is cooled in the cooling section, completing the entire process.

[0004] In related technologies, high-temperature furnaces typically have their doors open for cooling, which results in relatively low cooling efficiency. When the furnace door is open for cooling, external gases enter the high-temperature furnace, and the insulation cage is easily oxidized at high temperatures. This not only severely affects the insulation effect of the high-temperature furnace's thermal field and reduces its service life, but also requires frequent replacement of insulation materials, increasing costs and impacting production. Summary of the Invention

[0005] In order to improve the cooling efficiency of the high-temperature furnace and mitigate the oxidation of the insulation cage, this application provides a high-temperature furnace with a cooling structure.

[0006] This application provides a high-temperature furnace with a cooling structure, employing the following technical solution: A high-temperature furnace with a cooling structure includes: Furnace body; An insulated cage is disposed inside the furnace body, and there is a gap between the insulated cage and the furnace body; the insulated cage includes a box body, an insulated door and a first moving drive source, the insulated door is connected to the moving end of the first moving drive source, and an opening is provided on the side wall of the box body, and the first moving drive source drives the insulated door to open and close the opening of the box body. A receiving box is provided inside the insulated cage, and there is a gap between the receiving box and the insulated cage. The receiving box is used to hold polycrystalline silicon. A cooling device, comprising a circulating fan and a heat exchange component; the heat exchange component is disposed on the furnace body and is capable of exchanging heat with the furnace body; a flow cavity is formed between the furnace body and the insulation cage, and the circulating fan is used to circulate airflow within the flow cavity and the insulation cage.

[0007] By adopting the above technical solution, after the polycrystalline silicon inside the containment box is heated, the first moving drive source is activated. The first moving drive source moves the insulation door, opening the opening on the side wall of the box. Then, the circulating fan is activated, causing airflow to circulate within the flow chamber and the insulation cage. The airflow carries the heat from the containment box to the furnace body, where the heat exchange components exchange heat with the furnace body, thus transferring the heat in a timely manner and accelerating the cooling efficiency inside the furnace. Furthermore, this application does not introduce external gases into the furnace body, reducing the oxidation of the insulation cage by external gases.

[0008] Optionally, the insulated cage box further includes: Insulation board; The second moving drive source is disposed on the furnace body. The moving end of the second moving drive source is connected to the insulation plate. The top and bottom of the insulation cage are provided with openings. The second moving drive source is used to drive the insulation plate to open and close the openings of the insulation cage.

[0009] By adopting the above technical solution, the second moving drive source is activated, which drives the insulation plate to move, opening the openings at the top and bottom of the insulation cage. After the gas between the furnace body and the insulation cage enters the insulation cage, it can flow back into the circulation cavity from the opening, forming a gas circulation flow and accelerating the cooling speed.

[0010] Optionally, the circulating fan includes: Fan blades, the fan blades being disposed between the furnace body and the insulation cage; A drive source is disposed on the outer wall of the furnace body, and the output end of the drive source is connected to the fan blade. The drive source is used to drive the fan blade to rotate.

[0011] By adopting the above technical solution, when the drive source is started, it can drive the fan blades to rotate, thereby allowing gas to enter the insulation cage from the flow chamber and achieve heat exchange. The drive source is located on the outer wall of the furnace body, which reduces the impact of the high temperature inside the furnace body on the drive source.

[0012] Optionally, the insulated cage also includes a slide rail, which is connected to the furnace body and the box body respectively. The insulated door is slidably connected to the slide rail, and the fan blade is connected to the slide rail.

[0013] By adopting the above technical solution, the slide rail can guide the movement of the insulation. Since the fan is set on the slide rail, the slide rail can also provide support for the fan, making it easy to install the fan between the furnace body and the insulation cage.

[0014] Optionally, the heat exchange assembly includes a water pipe and a cooling chamber, the cooling chamber being connected to the furnace body, and the water pipe communicating with the cooling chamber.

[0015] By adopting the above technical solution, cooling medium is injected into the cooling chamber through a water pipe, and the cooling medium cools the furnace body, thereby improving cooling efficiency.

[0016] Optionally, the high-temperature furnace with a cooling structure also includes a heating structure, which is disposed between the insulated cage and the receiving box, and is used to heat the receiving box; multiple sets of heating structures are provided, and the heating structures are respectively located on the periphery of the receiving box; The heating structure includes: Connector block; A connecting pipe, which is connected to the furnace body and the connecting block respectively; A heating rod, which is connected to the connecting block.

[0017] By adopting the above technical solution, the connecting pipe can provide support for the connecting block, and the connecting block can provide support for the heating rod. When the heating rod is activated, it heats the housing, causing the polycrystalline silicon within the housing to melt.

[0018] Optionally, the connecting block has a manifold cavity, and the connecting pipe communicates with the manifold cavity; the heating rod has a cooling pipe, and the cooling pipe communicates with the manifold cavity.

[0019] By adopting the above technical solution, the heating rod is first stopped, and then a heat-conducting medium is introduced into the connecting pipe. The heat-conducting medium flows sequentially into the manifold of the connecting block and into the cooling pipe, while the cooling medium carries away the heat from the heating rod. The gas flowing inside the insulation cage can transfer heat to the cooling pipe, and the cooling medium promptly carries away the heat from the insulation cage, thereby improving the cooling efficiency.

[0020] Optionally, the connecting pipe is connected to the cooling chamber, and the connecting block is connected to a water outlet pipe.

[0021] By employing the aforementioned technical solution, after the heating rod heats the housing, the heating rod and cooling pipe reach a high temperature. Directly introducing the cooling medium into these components can easily damage them, affecting their service life. In this application, when the cooling medium enters the cooling pipe from the cooling chamber, the cooling chamber first transfers heat to the cooling medium, i.e., the cooling medium is preheated by the cooling chamber. Subsequently, when the cooling medium enters the cooling pipe, the temperature difference between the cooling medium and the heating rod is relatively small, reducing the likelihood of damage to the cooling pipe and heating rod upon initial contact with the cooling medium.

[0022] Optionally, the furnace body includes a furnace shell and a furnace door, the cooling chambers are located inside the furnace shell and the furnace door respectively, and a connecting hose connects the furnace shell and the furnace door, the connecting hose being connected to the cooling chamber located inside the furnace door.

[0023] By adopting the above technical solution, the cooling medium enters the cooling chamber located inside the furnace door through a connecting hose from the cooling chamber located inside the furnace shell, so that the cooling medium can exchange heat with the entire furnace body.

[0024] Optionally, a bottom-side cooling assembly is provided on the bottom side of the housing, the bottom-side cooling assembly comprising: A cooling plate, which is connected to the bottom side of the housing; A guide tube is provided, which is connected to a cooling plate and a cooling chamber respectively. The cooling plate has a cavity inside, and the guide tube is connected to the cavity of the cooling plate.

[0025] By adopting the above technical solution, a cooling medium is introduced into the guide tube, and the cooling medium enters the cavity of the cooling plate, thereby cooling the bottom side of the housing, so that the bottom side of the housing has a larger cooling capacity, forming a temperature gradient from bottom to top, which is conducive to crystal growth.

[0026] In summary, this application includes at least one of the following beneficial effects: 1. The first moving drive source moves the insulation door to open the opening on the side wall of the box. The second moving drive source moves the insulation plate to open the opening of the box. Then the circulating fan is started, so that the airflow circulates in the flow chamber and the insulation cage. The airflow carries the heat contained in the box to the furnace body. The heat exchange components exchange heat with the furnace body, thereby transferring the heat in time, thus accelerating the cooling efficiency inside the furnace body and reducing the oxidation of the insulation cage by the gas outside the furnace body. 2. The cooling medium enters the manifold of the connecting block from the connecting pipe, and then enters the cooling pipe from the manifold, so as to cool the periphery of the housing and improve the cooling efficiency. 3. The cooling medium enters the cavity of the cooling plate through the conductive support pipe, which can cool the bottom side of the housing and form a temperature gradient from bottom to top, which is conducive to crystal growth. Attached Figure Description

[0027] Figure 1 This is a cross-sectional structural diagram of a high-temperature furnace with a cooling structure according to Embodiment 1 of this application; Figure 2 This is a schematic diagram of the heating structure and the housing in Embodiment 1 of this application; Figure 3 This is a cross-sectional structural diagram of a high-temperature furnace with a cooling structure according to Embodiment 2 of this application; Figure 4 This is a cross-sectional schematic diagram of the heating structure and the housing in Embodiment 2 of this application; Figure 5 yes Figure 4 A magnified structural diagram of part A in the middle.

[0028] Explanation of reference numerals in the attached drawings: 1. Furnace body; 11. Furnace shell; 111. Flow chamber; 12. Furnace door; 2. Insulated cage; 21. Box body; 22. Insulated door; 23. Insulated board; 24. First moving drive source; 25. Slide rail; 26. Second moving drive source; 3. Receiving box; 4. Heating structure; 41. Connecting block; 42. Heating rod; 43. Connecting pipe; 5. Cooling device; 51. Circulating fan; 511. Fan blade; 512. Drive source; 52. Heat exchange component; 521. Water pipe; 522. Cooling chamber; 53. Bottom cooling component; 531. Guide support pipe; 532. Cooling plate; 533. Discharge pipe; 54. Connecting flexible hose; 55. Cooling pipe; 56. Water outlet pipe. Detailed Implementation

[0029] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0030] Example 1: Embodiment 1 of this application provides a high-temperature furnace with a cooling structure.

[0031] refer to Figure 1 The high-temperature furnace with a cooling structure includes a furnace body 1, which includes a furnace shell 11 and a furnace door 12. The furnace shell 11 has openings and closing openings at the top and bottom, and the furnace door 12 seals the openings and closing openings at the top and bottom of the furnace shell 11 respectively.

[0032] refer to Figure 1A heat-insulating cage 2 is installed inside the furnace body 1, with a gap between the heat-insulating cage 2 and the furnace body 1, forming a flow cavity 111 between them. The heat-insulating cage 2 includes a box body 21, a heat-insulating door 22, a slide rail 25, and a first moving drive source 24. The box body 21 is installed inside the furnace body 1, and openings are provided on opposite side walls of the box body 21. The heat-insulating door 22 can seal the openings of the box body 21. The slide rail 25 is horizontally arranged and is fixedly connected to both the furnace shell 11 and the box body 21. The heat-insulating door 22 is slidably connected to the slide rail 25, and the slide rail 25 guides the movement of the heat-insulating door 22. The first moving drive source 24 is specifically a hydraulic cylinder. The body of the first moving drive source 24 is fixedly connected to the outer wall of the furnace shell 11, and the moving end of the first moving drive source 24 passes through the furnace shell 11 and is fixedly connected to the heat-insulating door 22. When the first moving drive source 24 is activated, the insulation door 22 can open and close the opening of the box 21.

[0033] refer to Figure 1 The insulated cage box 2 also includes an insulation board 23. The top and bottom of the box body 21 are provided with openings, and the insulation board 23 can seal the openings of the box body 21. The insulation board 23 and the furnace door 12 are fixedly connected by rods. When the furnace door 12 is moved, it can drive the insulation board 23 to move, thereby opening the furnace body 1 and the insulated cage box 2 simultaneously.

[0034] refer to Figure 1 and Figure 2 The insulated cage 2 contains a housing 3, which is used to hold polycrystalline silicon. A guide pipe 531 and a cooling plate 532 are located on the bottom side of the housing 3. The cooling plate 532 is fixedly connected to the bottom side of the housing 3. One end of the guide pipe 531 is fixedly connected to the cooling plate 532, and the other end of the guide pipe 531 passes through the insulation plate 23 and is fixedly connected to the furnace door 12. The guide pipe 531 and the cooling plate 532 provide support for the housing 3. When the furnace door 12 at the bottom of the furnace body 1 is moved downwards, the housing 3 is moved downwards, thus removing the housing 3 from the furnace body 1.

[0035] refer to Figure 1 and Figure 2A heating structure 4 is provided between the insulated cage 2 and the housing 3. The heating structure 4 includes a connecting block 41, a heating rod 42, and a connecting pipe 43. One end of the connecting pipe 43 is fixedly connected to the furnace body 1, and the other end of the connecting pipe 43 passes through the insulated cage 2 and is fixedly connected to the connecting block 41. Multiple connecting blocks 41 are spaced apart, and the heating rod 42 is fixedly connected to the adjacent connecting block 41. In this embodiment, six sets of heating structures 4 are provided. The heating structures 4 are located around the periphery of the housing 3, and the six sets of heating structures 4 correspond one-to-one with the six faces of the housing 3. The heating structures 4 on the front, top, and rear sides can move together with the furnace door 12 on the top of the furnace body 1, the heating structure 4 on the lower side can move together with the furnace door 12 at the bottom of the furnace body 1, and the heating structures 4 on the left and right sides do not move.

[0036] The implementation principle of a high-temperature furnace with a cooling structure in Embodiment 1 of this application is as follows: The heating structure 4 is activated to heat the containing box 3. After heating is complete, the first moving drive source 24 is activated, causing the insulation door 22 to open the opening on the side wall of the box 21, thereby improving the heat exchange efficiency between the insulation box 2 and the flow cavity 111. After cooling is complete, the furnace door 12 at the top of the furnace body 1 is moved upwards, and the furnace door 12 at the bottom of the furnace body 1 is moved downwards to facilitate the removal of the containing box 3.

[0037] Example 2: Embodiment 2 of this application provides a high-temperature furnace with a cooling structure.

[0038] refer to Figure 3 The difference between Embodiment 2 and Embodiment 1 is that the high-temperature furnace with a cooling structure is further equipped with a cooling device 5. The cooling device 5 includes a circulating fan 51, which includes fan blades 511 and a drive source 512. The fan blades 511 are mounted on the slide rail 25. The drive source 512 is specifically a motor. The body of the drive source 512 is fixedly connected to the outer wall of the furnace shell 11, and the output end of the drive source 512 passes through the furnace shell 11 and connects to the fan blades 511. When the drive source 512 is started, it can drive the fan blades 511 to rotate, allowing the gas in the flow chamber 111 to enter the insulation cage 2. In this embodiment, multiple sets of circulating fans 51 are provided, and the circulating fans 51 are located at the four corners of the furnace shell 11.

[0039] refer to Figure 3 A second moving drive source 26 is provided on the furnace door 12. The second moving drive source 26 is specifically a hydraulic cylinder. The body of the second moving drive source 26 is fixedly connected to the furnace door 12. The moving end of the second moving drive source 26 passes through the furnace door 12 and is fixedly connected to the insulation plate 23.

[0040] First, the first moving drive source 24 drives the insulation door 22 to move, so as to open the opening on the side wall of the box 21. Then, the second moving drive source 26 drives the insulation plate 23 to move, so as to open the openings at the top and bottom of the box 21. Then, the circulating fan 51 is started. The circulating fan 51 causes the gas in the circulation chamber 111 to enter the box 21 from the opening. The gas inside the box 21 flows back to the circulation chamber 111 from the opening, forming a gas circulation flow.

[0041] refer to Figure 3 The cooling device 5 includes a heat exchange component 52, which includes a water pipe 521 and a cooling chamber 522. The furnace wall of the furnace body 1 is hollow, and the cooling chamber 522 is located inside the furnace wall of the furnace body 1. In this embodiment, both the furnace shell 11 and the furnace door 12 have cooling chambers 522. In other embodiments of this application, the cooling chamber 522 can also be fixedly connected to the outer wall of the furnace body 1. The water pipe 521 communicates with the cooling chamber 522, and cooling medium is introduced into the cooling chamber 522 through the water pipe 521 to cool the furnace body 1.

[0042] refer to Figure 3 A connecting hose 54 is provided on the furnace body 1, which connects the cooling chamber 522 located in the furnace shell 11 and the cooling chamber 522 located in the furnace door 12, allowing the cooling medium to enter the cooling chamber 522 inside the furnace door 12 from the cooling chamber 522 inside the furnace shell 11. The connecting hose 54 has a certain length to accommodate the movement of the furnace door 12.

[0043] refer to Figure 3 and Figure 5 The connecting block 41 has a manifold inside, and the connecting pipe 43 is connected to both the manifold and the cooling chamber 522 inside the furnace door 12. A cooling pipe 55 is inserted and fixedly connected inside the heating rod 42. The cooling pipe 55 is connected to the manifold of the connecting block 41, allowing the cooling medium to flow from the cooling chamber 522 through the connecting pipe 43 into the manifold of the connecting block 41, and then from the manifold into the cooling pipe 55. A water outlet pipe 56 is fixedly connected to the connecting block 41, and the water outlet pipe 56 is connected to the manifold of the connecting block 41. The water outlet pipe 56 passes through the insulation plate 23 and the furnace door 12, allowing the cooling medium to be discharged from the water outlet pipe 56 after cooling the cooling pipe 55. After the heating rod 42 stops heating, cooling medium is introduced into the cooling pipe 55, which cools the periphery of the housing 3.

[0044] refer to Figure 3 and Figure 4The cooling plate 532 has an internal cavity. One end of the connecting pipe 531 communicates with the cavity in the cooling plate 532, and the other end communicates with the cooling chamber 522 inside the furnace door 12 at the bottom of the furnace body 1. The cooling plate 532 is connected to a discharge pipe 533, which passes through the insulation plate 23 and the furnace door 12. The cooling medium enters the cavity of the cooling plate 532 from the cooling chamber 522 through the connecting pipe 531, and then exits from the discharge pipe 533. The cooling plate 532 can cool the bottom side of the housing 3, forming a temperature gradient from bottom to top, which is beneficial for crystal formation. In this embodiment, since the insulation plate 23 will move, the insulation plate 23 slides in conjunction with the connecting pipe 43, the connecting pipe 531, the discharge pipe 533, and the water outlet pipe 56.

[0045] The implementation principle of a high-temperature furnace with a cooling structure in Embodiment 2 of this application is as follows: A first moving drive source 24 moves the insulation door 22 to open the opening of the box 21, and a second moving drive source 26 moves the insulation plate 23 to open the opening of the box 21. Then, the circulating fan 51 is started, causing the gas to circulate in the flow chamber 111 and the insulation cage 2. Cooling medium is introduced into the cooling chamber 522. A portion of the cooling medium enters the manifold of the connecting block 41, and then enters the cooling pipe 55 from the manifold of the connecting block 41. After cooling the periphery of the receiving box 3, the cooling medium is discharged from the outlet pipe 56. Another portion of the cooling medium enters the cavity of the cooling plate 532 from the guide support pipe 531, thereby cooling the bottom of the receiving box 3. Finally, the cooling medium is discharged from the discharge pipe 533.

[0046] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A high-temperature furnace with a cooling structure, characterized in that, include: Furnace body (1); Insulation cage (2), the insulation cage (2) is disposed inside the furnace body (1), there is a gap between the insulation cage (2) and the furnace body (1), and a flow cavity (111) is formed between the furnace body (1) and the insulation cage (2); the insulation cage (2) includes a box body (21), an insulation door (22) and a first moving drive source (24), the insulation door (22) is connected to the moving end of the first moving drive source (24), the side wall of the box body (21) has an opening, and the first moving drive source (24) drives the insulation door (22) to open and close the opening of the box body (21); Container box (3), the container box (3) is disposed inside the insulation cage (2), there is a gap between the container box (3) and the insulation cage (2), and the container box (3) is used to place polycrystalline silicon. Cooling device (5), the cooling device (5) includes a circulating fan (51) and a heat exchange component (52); the heat exchange component (52) is disposed on the furnace body (1), and the heat exchange component (52) and the furnace body (1) can exchange heat; the circulating fan (51) is used to make the airflow circulate in the flow chamber (111) and the heat preservation cage (2); The heat exchange assembly (52) includes a water pipe (521) and a cooling chamber (522), the cooling chamber (522) being connected to the furnace body (1), and the water pipe (521) being connected to the cooling chamber (522); The high-temperature furnace with a cooling structure also includes a heating structure (4), which is disposed between the heat-insulating cage (2) and the receiving box (3). The heating structure (4) is used to heat the receiving box (3). Multiple sets of heating structures (4) are provided, and the heating structures (4) are respectively located on the periphery of the receiving box (3). The heating structure (4) includes: Connector block (41); Connecting pipe (43), the connecting pipe (43) is connected to the furnace body (1) and the connecting block (41) respectively; Heating rod (42), which is connected to the connecting block (41).

2. A high-temperature furnace with a cooling structure according to claim 1, characterized in that, The heat-insulating cage (2) further includes: a heat-insulating plate (23); a second moving drive source (26), which is disposed on the furnace body (1), and the moving end of the second moving drive source (26) is connected to the heat-insulating plate (23). The top and bottom of the heat-insulating cage (2) are provided with openings, and the second moving drive source (26) is used to drive the heat-insulating plate (23) to open and close the openings of the heat-insulating cage (2).

3. A high-temperature furnace with a cooling structure according to claim 2, characterized in that, The circulating fan (51) includes: a fan blade (511), which is disposed between the furnace body (1) and the insulation cage (2); and a drive source (512), which is disposed on the outer wall of the furnace body (1), and the output end of the drive source (512) is connected to the fan blade (511), and the drive source (512) is used to drive the fan blade (511) to rotate.

4. A high-temperature furnace with a cooling structure according to claim 3, characterized in that, The heat preservation cage (2) also includes a slide rail (25), which is connected to the furnace body (1) and the box body (21) respectively. The heat preservation door (22) is slidably connected to the slide rail (25), and the fan blade (511) is connected to the slide rail (25).

5. A high-temperature furnace with a cooling structure according to claim 1, characterized in that, The connecting block (41) has a manifold cavity, and the connecting pipe (43) is connected to the manifold cavity; the heating rod (42) has a cooling pipe (55), and the cooling pipe (55) is connected to the manifold cavity.

6. A high-temperature furnace with a cooling structure according to claim 5, characterized in that, The connecting pipe (43) is connected to the cooling chamber (522), and the connecting block (41) is connected to the water outlet pipe (56).

7. A high-temperature furnace with a cooling structure according to claim 6, characterized in that, The furnace body (1) includes a furnace shell (11) and a furnace door (12). The cooling chamber (522) is located inside the furnace shell (11) and the furnace door (12) respectively. A connecting hose (54) connects the furnace shell (11) and the furnace door (12). The connecting pipe (43) is connected to the cooling chamber (522) located inside the furnace door (12).

8. A high-temperature furnace with a cooling structure according to claim 1, characterized in that, The bottom side of the housing (3) is provided with a bottom cooling assembly (53), which includes: a cooling plate (532) connected to the bottom side of the housing (3); and a connecting pipe (531) connected to the cooling plate (532) and the cooling chamber (522) respectively. The cooling plate (532) has a cavity inside, and the connecting pipe (531) is connected to the cavity of the cooling plate (532).

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