A pipe cleaning device

Abstract

The present application relates to chip manufacturing technology field, especially a kind of pipeline cleaning device, including lavage connecting pipe, first connector and second connector are respectively arranged at the both ends of lavage connecting pipe, first exhaust passage and first cleaning passage are arranged in first connector, and first exhaust passage is communicated with lavage connecting pipe;Second exhaust passage and second cleaning passage are arranged in second connector, and second exhaust passage is communicated with lavage connecting pipe;First cleaning passage and second cleaning passage are communicated by cleaning connecting pipe, with the characteristics of lavage inside waste gas pipeline without disassembling pipeline, saving manpower, time, safety.

Description

Technical Field

[0001] This invention relates to the field of chip manufacturing technology, and in particular to a pipeline cleaning device. Background Technology

[0002] In the chip manufacturing process, after the deposition step, the wafer is coated with photoresist, a photosensitive material. The designed circuit pattern is then transferred onto the wafer using photolithography. Further processing, such as etching and ion implantation, further shapes the circuit pattern into components with specific functions, such as transistors. This process is known as photolithography and etching. On the one hand, high-risk, high-concentration chemicals are often used, such as cleaning agents, photoresists, stripping solutions, and other solvents or acidic / alkaline substances. On the other hand, the light source required for photolithography is highly pure. Vacuum chambers are used to purify the light beam, removing gas molecules and other impurities to reduce scattering and absorption. Therefore, byproducts from these chemicals, such as waste chemicals, exhaust gases, and impurities in the light beam, must be discharged through dry pumps (responsible for vacuum pumping) and multiple exhaust pipelines to exhaust gas treatment equipment (such as gas purification equipment and scrubbers), and then discharged into the atmosphere through acid scrubbing towers and acid / alkali exhaust fans.

[0003] Over time, chemical exhaust particles and impurities contained in the light beams accumulate on the walls of the exhaust pipes, gradually blocking the exhaust passages and affecting emission efficiency. Therefore, it is necessary to disassemble and clean the pipes regularly. However, disassembling the exhaust pipes is not only time-consuming and labor-intensive, but the residual exhaust gas and debris on the pipe walls may also have adverse effects on the health of maintenance personnel during the disassembly process.

[0004] Therefore, how to efficiently and safely clean the Pumpingline exhaust pipes used in chip manufacturing has become a problem to be solved. Summary of the Invention

[0005] To address the problem that existing technologies require disassembling exhaust pipes for cleaning equipment such as lithography machines and etching machines, which is not only time-consuming and labor-intensive but also poses health risks during maintenance, this invention provides a pipe cleaning device that can clean the inside of exhaust pipes without disassembling them, saving manpower, time, and ensuring safety.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A pipeline cleaning device includes a flushing connecting pipe with a first connector and a second connector at each end. The first connector has a first exhaust channel and a first cleaning channel, the first exhaust channel being connected to the flushing connecting pipe. The second connector has a second exhaust channel and a second cleaning channel, the second exhaust channel being connected to the flushing connecting pipe. The first and second cleaning channels are connected by a cleaning connecting pipe. A valve is installed in the first cleaning channel.

[0008] Furthermore, the first exhaust channel on the first connector includes a through hole that is staggered and connected vertically; the first cleaning channel includes a side hole and a bottom hole located on the side and bottom surfaces of the first connector, and the side hole and the bottom hole are connected to each other.

[0009] Furthermore, the second connector includes an outer cylinder and an inner cylinder, both of which are open at the bottom. The inner cylinder is located inside the outer cylinder, and a gap is left between the outer wall of the inner cylinder and the inner wall of the outer cylinder. The second exhaust channel passes through the outer cylinder and the inner cylinder, and the second cleaning channel passes through the outer cylinder and communicates with the aforementioned gap. One end of the cleaning connecting pipe is connected to the first cleaning channel, and the other end is connected to the aforementioned gap.

[0010] Furthermore, a water distribution sleeve is installed on the outside of the inner cylinder, and the outer edge of the water distribution sleeve is provided with a flange that extends into the gap between the inner cylinder and the outer cylinder and leaves a gap with the inner wall of the outer cylinder.

[0011] Furthermore, the upper part of the first connector is also connected to an air supply pipe. The inner wall of the air supply pipe is provided with a first air supply hole extending upward, and the bottom of the first air supply hole is provided with a second air supply hole that penetrates the side wall of the air supply pipe and communicates with the first air supply hole.

[0012] Furthermore, the first connector is connected to the connecting pipe via a flange, the outer side of the flange is fixed by a pipe clamp, and a sealing ring is fitted between the flanges.

[0013] Furthermore, the irrigation connection tube is a transparent tube.

[0014] Furthermore, a lighting device is also installed on the irrigation connection pipe.

[0015] The beneficial effects of this invention are as follows:

[0016] 1. When flushing the exhaust gas emission pipeline, close the bottom channel of the exhaust gas emission pipeline, install one end of the second connector of the flushing connection pipe on the upper interface of the exhaust gas emission pipeline, and then inject water, liquid agents, etc. into the lower exhaust gas emission pipeline through the first cleaning channel to neutralize the chemical crystals formed by residual exhaust gas particles on the inner wall of the exhaust gas emission pipeline and rinse the inner pipe wall; after flushing, open the bottom channel of the exhaust gas emission pipeline to discharge the reaction wastewater.

[0017] 2. Connect the first exhaust channel of the first connector to the HV exhaust pipe. To prevent negative pressure from forming in the exhaust pipe and flushing connection pipe during the evacuation process, a make-up air pipe is also connected to the outside of the first connector. During the flushing process, when there is reactive waste gas in the pipeline, the waste gas produced by the reaction is drawn upward by the HV exhaust pipe through the exhaust pipe, the second exhaust channel, and the first exhaust channel, and discharged into the atmosphere after purification. When there is no reactive waste gas in the pipeline, the HV exhaust pipe can also be used to evacuate air and dry the moisture on the inner wall of the exhaust pipe. The existence of the make-up air pipe allows for a sealed connection between the HV exhaust pipe and the make-up air pipe, preventing the HV exhaust pipe from drawing the reactive wastewater upward, thus preventing the reactive wastewater from dripping onto the equipment next to the exhaust pipe, avoiding corrosion of the equipment surface, and preventing wastewater from entering the equipment and causing equipment failure.

[0018] 3. When the interface connected to the exhaust gas emission pipe is not required, the cleaning channel can be closed without affecting the normal downward discharge of exhaust gas from the exhaust gas emission pipe. It has the characteristics of cleaning the inside of the exhaust gas pipe without disassembling the pipe, saving manpower and time, and ensuring good safety.

[0019] 4. To prevent the water and liquid chemicals injected into the exhaust pipe from continuously rising and overflowing from the top of the rinsing connection pipe, a lighting device is installed at the rinsing connection pipe. When the liquid level reaches the inside of the rinsing connection pipe, the staff can close the valve on the first cleaning channel. If the valve malfunctions, the valve core will automatically close after the valve plug is unplugged, thus stopping the rinsing injection, as it uses a self-closing quick-connect male and female connector. It has a dual shut-off function. Attached Figure Description

[0020] Appendix Figure 1 This is a schematic diagram of the overall structure of the irrigation equipment in this invention;

[0021] Appendix Figure 2 This is a cross-sectional view of the rinsing equipment in this invention;

[0022] Appendix Figure 3 This is an exploded structural diagram of the rinsing equipment in this invention;

[0023] Appendix Figure 4 This is an exploded structural diagram of another irrigation device in this invention;

[0024] Appendix Figure 5 This is a structural diagram of the first connector of the irrigation device in this invention;

[0025] Appendix Figure 6 This is a structural diagram of the second connector of the irrigation device in this invention;

[0026] Appendix Figure 7This is a structural diagram of the clamp pipe clamp in this invention;

[0027] Appendix Figure 8 This is a cross-sectional view of the gas supply pipeline.

[0028] In the diagram: 1. Irrigation connecting pipe; 2. First connector; 3. Second connector; 4. First exhaust channel; 5. First cleaning channel; 6. Second exhaust channel; 7. Second cleaning channel; 8. Cleaning connecting pipe; 301. Outer cylinder; 302. Inner cylinder; 303. Gap; 9. Water distribution sleeve; 10. Flanged edge; 201. Through hole; 203. Side hole; 204. Bottom hole; 11. Air supply pipe; 12. First air supply hole; 13. Second air supply hole; 14. Lighting device; 15. Flange; 16. Sealing ring; 17. Valve; 18. Pipe clamp; 19. Flange adapter; 20. Threaded sleeve; 21. Bellows; 22. HV exhaust pipe; 23. Fluorescent component. Detailed Implementation

[0029] The present invention provides a pipeline cleaning device in further detail below with reference to specific embodiments.

[0030] like Figure 1 , 2 As shown in Figures 1 and 3, a pipe cleaning device includes a rinsing connecting pipe 1. The two ends of the rinsing connecting pipe 1 are respectively provided with a first connector 2 and a second connector 3. The first connector 2 is provided with a first exhaust channel 4 and a first cleaning channel 5, and the first exhaust channel 4 is connected to the rinsing connecting pipe 1. The second connector 3 is provided with a second exhaust channel 6 and a second cleaning channel 7, and the second exhaust channel 6 is connected to the rinsing connecting pipe 1. The first cleaning channel 5 and the second cleaning channel 7 are connected by a cleaning connecting pipe 8.

[0031] One end of the second connector of this device is installed on the interface of the exhaust pipe. The first exhaust channel 4 of the first connector 2 is connected to the HV exhaust pipe 22, and the first cleaning channel 5 is connected to the rinsing connection pipe 1. The HV exhaust pipe 22 is usually composed of a vacuum pump, an exhaust pipe, a filter, etc. It can extract the gas inside the lithography machine and filter out the harmful substances in it through the filter, and finally discharge the clean gas into the external environment.

[0032] Specifically, the flushing connection pipe 1 is made of acrylic material. An integrally formed flange 15 is provided at both ends of the first connector 2, and a flange adapter 19 is installed on the flushing connection pipe 1. A sealing ring 16 is fitted between the flange 15 at the end of the first connector 2 and the flange adapter 19. The flange 15 at the end of the first connector 2 and the flange adapter 19 are fixed to the outside by a pipe clamp 18. The flange adapter 19 is threaded into the inside of the flushing connection pipe 1.

[0033] In other embodiments, the flange adapter 19 can also be installed inside the irrigation connection pipe 1 via a threaded sleeve 20. The threaded sleeve 20 has an internal thread that matches the external thread at one end of the flange adapter 19. The inner wall of the end of the irrigation connection pipe 1 has a mounting base that matches the size of the threaded sleeve 20. The threaded sleeve 20 is attached to the end of the irrigation connection pipe 1 by interference fit or bonding.

[0034] In other embodiments, a flange 15 can be provided at the end of the irrigation connecting pipe 1, and a sealing ring 16 can be installed between it and the flange 15 of the first connector 2 before it is fixed with a pipe clamp 18. The second connector 3 is connected to the bottom of the irrigation cleaning pipe by threads.

[0035] The second connector 3 is threaded to the inner wall of the flushing connection pipe 1, or installed at the bottom of the flushing connection pipe 1 by means of bonding, interference fit, etc. A flange adapter 19 is installed at the bottom of the flushing connection pipe 1. Specifically, the upper part of the flange adapter 19 is provided with threads that mate with the bottom of the flushing connection pipe 1, and the lower part is provided with a flange. The flange 15 here is connected to the flange on the upper part of the bellows 21 through the clamp 18. The lower flange of the bellows 21 is connected to the interface of the exhaust gas discharge pipe through the clamp 18.

[0036] During flushing, the bottom of the exhaust gas discharge pipe is closed. Water and liquid chemicals are injected into the first cleaning channel 5. The water and liquid chemicals are connected to the second cleaning channel 7 at the bottom of the flushing connecting pipe 1 through the cleaning connecting pipe 8. The water and liquid chemicals flow out through the second cleaning channel 7, thereby neutralizing and flushing the crystals formed by residual chemical waste gas particles inside the exhaust gas discharge pipe wall at the bottom of the flushing connecting pipe 1. After flushing, the bottom channel of the exhaust gas discharge pipe is opened to discharge the reaction wastewater.

[0037] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 8 As shown, the gas supply pipe 11 has an upwardly extending first gas supply hole 12 inside its pipe wall, and a second gas supply hole 13 is provided at the bottom of the first gas supply hole 12, which penetrates the side wall of the gas supply pipe 11 and communicates with the first gas supply hole 12.

[0038] Specifically, in this embodiment, there are four first air inlet holes 12 and four second air inlet holes 13, which are evenly distributed on the outer wall of the air inlet pipe 11. When using this device, the pipe of the HV exhaust pipe 22 can be sleeved on the top of the air inlet pipe 11, with the second air inlet hole 13 exposed and connected to the clean air source, so that the pipe of the HV exhaust pipe 22 is connected to the first exhaust channel 4, the flushing connecting pipe 1, the second exhaust channel 6, and the exhaust gas discharge pipe at the bottom of the flushing connecting pipe 1.

[0039] On the one hand, during the rinsing process, the water and liquid agents used for rinsing react chemically with the residues on the pipe wall, generating excess reactive gas. This reactive gas can be promptly extracted upwards through the HV exhaust pipe and purified by waste gas treatment equipment before being discharged into the atmosphere. When there is no or only a small amount of reactive gas, in order to prevent negative pressure from forming inside the pipe during the extraction process, clean air is also introduced into the HV exhaust pipe 22 through the air inlet in this embodiment. On the other hand, after rinsing is completed, the inside of the waste gas discharge pipe is wet. After rinsing, it is necessary to continue extracting air upwards using the HV exhaust pipe to dry the moisture on the pipe wall. At the same time, the first air inlet 12 and the second air inlet 13 continue to supply air to the HV exhaust pipe. The presence of the gas supply pipe 11 allows for a sealed connection between the HV exhaust pipe 22 and the gas supply pipe 11, preventing the HV exhaust pipe 22 from drawing the reaction wastewater upwards. This avoids the reaction wastewater dripping onto the equipment next to the exhaust pipe, preventing corrosion of the equipment surface, and preventing wastewater from entering the equipment and causing malfunctions.

[0040] like Figure 5 As shown, the first exhaust channel 4 on the first connector includes a through hole 201 that is staggered vertically and interconnected; the first cleaning channel 5 includes a side hole 203 and a bottom hole 204 located on the side and bottom surfaces of the first connector 2, respectively, and the side hole 203 and the bottom hole 204 are interconnected. In this embodiment, the side hole 203 on the first cleaning channel 5 is used to install a valve 17 for flushing the exhaust gas emission pipeline. Water, liquid agents, or high-cleanliness air can be injected into the cleaning pipeline of the flushing connector 1 through the valve 17. When it is not necessary to clean the exhaust gas emission pipeline, the valve 17 can be closed to prevent exhaust gas from flowing back in.

[0041] Valve 17 is threaded onto side hole 203 for easy installation and replacement. Bottom hole 204 is used to connect to cleaning pipe 8. In this embodiment, a pipe fitting is used to connect bottom hole 204 to cleaning pipe 8; the upper part of the pipe fitting is threaded into the bottom hole 204, and the lower part is fitted and fixed to the upper end of cleaning pipe 8 through external ridges. In this embodiment, valve 17 adopts a self-closing quick-connect male and female connector, specifically, but not limited to, a Parette push-pull carbon steel high-pressure quick connector. When the liquid level reaches the inside of the irrigation connection pipe, the operator can close the valve on the first cleaning channel 5 to stop irrigation; if the valve malfunctions, because the valve adopts a self-closing quick-connect male and female connector, after the valve plug is unplugged, the male valve core at the irrigation end automatically closes, thus stopping the irrigation; it has a dual shut-off function.

[0042] like Figure 2 , Figure 6As shown, the second connector 3 includes an outer cylinder 301 and an inner cylinder 302, both open at the bottom. The inner cylinder 302 is located inside the outer cylinder 301, and a gap 303 is left between the outer wall of the inner cylinder 302 and the inner wall of the outer cylinder 301. One end of the cleaning pipe 8 is connected to the first cleaning channel 5, and the other end is connected to the gap 303. The second exhaust channel 6 runs through the outer cylinder 301 and the inner cylinder 302 and is used to pass reaction waste gas. The second cleaning channel 7 runs through the outer cylinder 301, and one end of the second cleaning channel 7 is connected to the cleaning pipe 8, and the other end is connected to the gap 303. This allows water and liquid reagents used for rinsing to flush the inner wall of the waste gas exhaust pipe at the bottom of the rinsing connector 1 along the side wall of the inner cylinder 302 and the gap 303. Water flows out from the outer wall of the inner cylinder 302, which can also reduce the backflow phenomenon caused by the upper HV exhaust pipe.

[0043] A water distribution sleeve 9 is installed on the outside of the inner cylinder 302. The outer edge of the water distribution sleeve 9 is provided with a flange 10 that extends into the gap 303 between the inner cylinder 302 and the outer cylinder 301 and leaves a gap with the inner wall of the outer cylinder 301. Water and liquid agent flowing downward from the second cleaning channel 7 flow out along the outer wall of the inner cylinder 302 and impact the flange 10 of the water distribution sleeve 9, so that the water and liquid agent can be evenly flushed downward along the edge of the flange 10.

[0044] In this embodiment, as Figure 2 As shown, the water distribution sleeve 9 can be threaded to the inner cylinder 302. The rinsing connection pipe 1 is a transparent pipe, specifically made of acrylic material, to facilitate observation of the liquid level inside the rinsing connection pipe 1 by the staff. When the cleaning wastewater enters the rinsing connection pipe 1, it will affect the rinsing effect. The staff can connect the exhaust gas discharge pipe to the exhaust gas treatment equipment to discharge the wastewater in a timely manner, thereby lowering the liquid level.

[0045] like Figure 4 As shown, to facilitate observation of the liquid level in dim lighting conditions, an illumination device 14 is also installed on the rinsing connection tube 1. The illumination device 14 can be a light-emitting diode or a light strip, which is attached or embedded in the outer wall of the rinsing connection tube 1. In other embodiments, a fluorescent element 23 is fitted onto the cleaning connection tube 8.

[0046] The photolithography process requires a very high purity light source. A vacuum chamber is used to remove gas molecules and other impurities from the beam during beam purification, reducing scattering and absorption. This equipment can also flush this type of exhaust pipe. The flushing process uses ultra-clean air to rinse and clean the exhaust pipes used by the photolithography machine downwards through the first cleaning pipe, cleaning connecting pipe 8, and the second cleaning pipe.

Claims

1. A pipe cleaning device, characterized in that, The system includes a flushing connection pipe (1), with a first connector (2) and a second connector (3) at each end. The first connector (2) has a first exhaust channel (4) and a first cleaning channel (5), which are connected to the flushing connection pipe (1). The second connector (3) has a second exhaust channel (6) and a second cleaning channel (7), which are connected to the flushing connection pipe (1). The first cleaning channel (5) and the second cleaning channel (7) are connected by a cleaning connection pipe (8). The first cleaning channel (5) is equipped with a... The valve (17) and the second connector (3) include an outer cylinder (301) and an inner cylinder (302) with open bottoms. The inner cylinder (302) is located inside the outer cylinder (301) and a gap (303) is left between the outer wall of the inner cylinder (302) and the inner wall of the outer cylinder (301). The second exhaust channel (6) passes through the outer cylinder (301) and the inner cylinder (302). The second cleaning channel (7) passes through the outer cylinder (301) and communicates with the gap (303). One end of the cleaning pipe (8) is connected to the first cleaning channel (5) and the other end is connected to the gap (303).

2. The pipeline cleaning device as described in claim 1, characterized in that, A water distribution sleeve (9) is installed on the outside of the inner cylinder (302). The outer edge of the water distribution sleeve (9) is provided with a flange (10) that extends into the gap (303) between the inner cylinder (302) and the outer cylinder (301) and leaves a gap with the inner wall of the outer cylinder (301).

3. The pipeline cleaning device as described in claim 1 or 2, characterized in that, The first exhaust channel (4) on the first connector includes a through hole (201) that is staggered and connected; the first cleaning channel (5) includes a side hole (203) and a bottom hole (204) located on the side and bottom of the first connector (2), and the side hole (203) and the bottom hole (204) are connected to each other.

4. The pipeline cleaning device as described in claim 1 or 2, characterized in that, The upper part of the first connector (2) is also connected to a gas supply pipe (11).

5. The pipeline cleaning device as described in claim 3, characterized in that, The upper part of the first connector (2) is also connected to a gas supply pipe (11).

6. The pipeline cleaning device as described in claim 4, characterized in that, The gas supply pipe (11) has an upwardly extending first gas supply hole (12) inside its pipe wall, and a second gas supply hole (13) is provided at the bottom of the first gas supply hole (12) that penetrates the side wall of the gas supply pipe (11) and communicates with the first gas supply hole (12).

7. The pipe cleaning device as claimed in claim 5, characterized in that, The gas supply pipe (11) has an upwardly extending first gas supply hole (12) inside its pipe wall, and a second gas supply hole (13) penetrating the side wall of the gas supply pipe (11) is provided at the bottom of the first gas supply hole (12).

8. The pipe cleaning device as described in claim 1, 2, 5 or 7, characterized in that, The irrigation connection tube (1) is a transparent tube.

9. The pipeline cleaning device as described in claim 2, characterized in that, A lighting device (14) is also installed on the irrigation connection pipe (1).

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