A beam spot topography measurement device

Abstract

The application provides a kind of beam spot topography measuring device, comprising: the measuring base made of molybdenum block, the bottom shape of the measuring base is adapted to the internal shape of crucible molten pool;The measuring block made of molybdenum block is detachably connected to the surface of the measuring base;Position mark line is arranged on the surface of the measuring block, the position mark line is provided with multiple, multiple position mark lines are staggered and distributed in the center of the surface of the measuring block to form a rectangular adjustment area for adjusting the position of beam spot.The scheme of the application can stabilize the overall thickness of the measuring base and the measuring block, and is not prone to fluctuation, which can ensure the accuracy of measurement;Meanwhile, the measuring base and the measuring block are high-temperature resistant and stable, and will not cause pollution to the electron gun, crucible molten pool and other equipment;Through the rectangular adjustment area, the accuracy of beam spot position adjustment can be ensured;The measuring block is high-temperature resistant and stable, and the imprint formed by the beam spot in the rectangular adjustment area is stable and not prone to change, which can accurately measure the size of the beam spot in cooperation with the position mark line.

Description

Technical Field

[0001] This invention relates to the fields of electron beam melting and electron beam evaporation technology, and in particular to a beam spot morphology measuring device. Background Technology

[0002] Electron beam melting refers to a method of melting metal in a vacuum environment by converting the kinetic energy of a high-speed electron beam into thermal energy. Vacuum electron beam evaporation coating works by deflecting an electron beam into a molten crucible pool. The metal in the pool is heated and melts, forming atomic vapor that leaves the molten metal pool surface. The evaporated atomic vapor acts on the substrate to form a coating. Both of these vacuum technologies rely on electron beams emitted by an electron gun, with the crucible serving as the material carrier. The compatibility between the crucible and the electron beam directly affects the subsequent melting and evaporation effects. Therefore, the adjustment of the electron beam trajectory position is particularly important during the initial installation and commissioning of the vacuum device.

[0003] The current method for measuring the position of electron beam spot mainly involves adding a material ingot with the same shape as the molten pool into the crucible molten pool, adjusting the spot position parameters under low-power operating conditions, and observing the changes in the spot position on the surface of the material ingot through an observation window.

[0004] This measurement method has the following main problems:

[0005] 1. The material ingot is formed by melting and solidifying a block of material placed in a crucible molten pool. The thickness of the material ingot varies with the weight of the block of material. The thickness of the material ingot is unstable and prone to fluctuation, which directly affects the accuracy of the measurement.

[0006] 2. When adjusting the position of the beam spot, the material ingot will melt locally. After the beam spot position adjustment is completed, the size of the beam spot needs to be measured. In order to facilitate the measurement of the beam spot size, it is necessary to wait for the material ingot to cool and solidify before taking the measurement. However, the solidification process of the material will cause the shape of the mark caused by the beam spot to change, affecting the accuracy of the beam spot size measurement.

[0007] 3. If new equipment is directly adjusted and measured using material ingots, it is easy to cause equipment contamination. Summary of the Invention

[0008] This invention provides a beam spot morphology measurement device. It uses a measuring base and a measuring block made of molybdenum to measure the beam spot morphology. The overall thickness of the measuring base and measuring block is stable and not prone to fluctuations, ensuring measurement accuracy. Simultaneously, the measuring base and measuring block are high-temperature resistant and stable, preventing contamination of equipment such as the electron gun and crucible molten pool. Multiple position marking lines are staggered at the center of the measuring block surface to form a rectangular adjustment area for adjusting the beam spot position, ensuring accurate beam spot position adjustment. The measuring block is high-temperature resistant and stable, and the imprint formed by the beam spot in the rectangular adjustment area is stable and not easily changed. Furthermore, the position marking lines, combined with the position marking lines, allow for accurate measurement of the beam spot size, ensuring the accuracy of beam spot size measurement.

[0009] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows:

[0010] A beam spot morphology measuring device, comprising:

[0011] A measuring base made of molybdenum blocks, the bottom shape of which is adapted to the internal shape of the crucible molten pool;

[0012] A measuring block made of molybdenum is detachably attached to the surface of the measuring base.

[0013] Position marking lines are set on the surface of the measuring block. Multiple position marking lines are set, and the multiple position marking lines are staggered at the center of the surface of the measuring block to form a rectangular adjustment area for adjusting the position of the beam spot.

[0014] Optionally, the measuring device further includes:

[0015] A positioning groove is formed on the surface of the measuring base, and the positioning groove has a cross-shaped structure.

[0016] A positioning protrusion is formed on the bottom surface of the measuring block. The positioning protrusion has a cross-shaped structure and is inserted into the positioning groove.

[0017] Optionally, all four ends of the positioning groove penetrate through the outer surface of the measuring base.

[0018] Optionally, the measuring device further includes:

[0019] A first threaded hole is provided on the surface of the measuring base. There are at least two first threaded holes, which are evenly distributed around the circumference with the axis of the measuring base as a reference.

[0020] Optionally, the bottom of the measuring base is formed with a flat portion.

[0021] Optionally, the position marking line is a deep groove structure, and the deep groove structure has a scale line on the side away from the center of the rectangular adjustment area.

[0022] Optionally, the measuring device further includes:

[0023] A marking notch is provided on the outside of the measuring block, and the marking notch is located on the extension line of the rectangular adjustment area formed by the interlacing distribution of multiple position marking lines in the length direction.

[0024] Optionally, the measuring device further includes:

[0025] Two gripping slots are provided, which avoid the marked notch, and the two gripping slots are symmetrically arranged on both sides of the measuring block, so that the upper cross-section of the measuring block has a dovetail structure.

[0026] Optionally, the measuring device further includes:

[0027] The second threaded hole is located on the bottom surface of the gripping groove and penetrates the bottom surface of the measuring block.

[0028] Optionally, two second threaded holes are provided, each located on the bottom surface of one of the two gripping slots, and the two second threaded holes are diagonally distributed with the center of the measuring block as a reference.

[0029] The above-described solution of the present invention has at least the following beneficial effects:

[0030] The above-described solution of the present invention uses a measuring base and measuring block made of molybdenum block to measure beam spot morphology. The overall thickness of the measuring base and measuring block is stable and not prone to fluctuation, ensuring measurement accuracy. At the same time, the measuring base and measuring block are heat-resistant and stable, and will not cause contamination to equipment such as electron guns and crucible molten pools. Multiple position marking lines are staggered at the center of the surface of the measuring block to form a rectangular adjustment area for adjusting the beam spot position, which ensures the accuracy of beam spot position adjustment. The measuring block is heat-resistant and stable, and the imprint formed by the beam spot in the rectangular adjustment area is stable and not prone to change. In addition, the position marking lines can accurately measure the size of the beam spot, ensuring the accuracy of beam spot size measurement. Attached Figure Description

[0031] Figure 1 This is a three-dimensional structural schematic diagram of the beam spot morphology measuring device provided in an embodiment of the present invention;

[0032] Figure 2 This is a three-dimensional structural schematic diagram of the measuring base in the beam spot morphology measuring device provided in an embodiment of the present invention;

[0033] Figure 3 This is a three-dimensional structural diagram of the measuring base in the beam spot morphology measuring device provided in an embodiment of the present invention, viewed from an elevation angle.

[0034] Figure 4 This is a top view of the measuring block in the beam spot morphology measuring device provided in an embodiment of the present invention;

[0035] Figure 5 This is a right view of the measuring block in the beam spot morphology measuring device provided in an embodiment of the present invention;

[0036] Figure 6 This is a bottom view of the measuring block in the beam spot morphology measuring device provided in an embodiment of the present invention;

[0037] Figure 7 This is an application and installation diagram of the beam spot morphology measurement device provided in an embodiment of the present invention. Figure 1 ;

[0038] Figure 8 This is an application and installation diagram of the beam spot morphology measurement device provided in an embodiment of the present invention. Figure 2 .

[0039] The annotations in the attached figures are explained as follows:

[0040] 1. Measuring base; 2. Measuring block; 3. Positioning groove; 4. First threaded hole; 5. Flat part; 6. Second threaded hole; 7. Position marking line; 8. Gripping groove; 9. Marking notch; 10. Positioning protrusion; 11. Crucible molten pool. Detailed Implementation

[0041] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0042] like Figures 1-6 As shown, an embodiment of the present invention provides a beam spot morphology measurement device, comprising:

[0043] The measuring base 1 is made of molybdenum block, and the bottom shape of the measuring base 1 is adapted to the internal shape of the crucible molten pool 11;

[0044] The measuring block 2, made of molybdenum, is detachably connected to the surface of the measuring base 1.

[0045] Position marking lines 7 are set on the surface of measuring block 2. There are multiple position marking lines 7, which are staggered at the center of the surface of measuring block 2 to form a rectangular adjustment area for adjusting the position of the beam spot.

[0046] In this embodiment, during the installation and commissioning phase of the vacuum melting equipment, when it is necessary to adjust the beam spot position between the electron beam and the crucible, the measuring base 1 is placed inside the crucible molten pool 11, and the measuring block 2 is installed on the surface of the measuring base 1, so that the length direction of the rectangular adjustment area formed by the staggered distribution of multiple position marking lines 7 at the center of the surface of the measuring block 2 corresponds to the emission direction of the electron beam; during commissioning, the parameters of the electron gun are adjusted to adjust the position of the electron beam spot, so that the beam spot accurately enters the rectangular adjustment area, thereby achieving beam spot position adjustment. After the beam spot position adjustment is completed, the beam spot will form an imprint inside the rectangular adjustment area. The measuring block 2 is removed, and the size of the imprint inside the rectangular adjustment area is measured through the position marking lines 7, thereby obtaining the position and morphology parameters of the beam spot;

[0047] It should be noted that, in this embodiment, considering availability and cost, molybdenum blocks are selected to make the measuring base 1 and measuring block 2. If availability and cost are not considered, the measuring base 1 and measuring block 2 can be made of other high-temperature resistant materials.

[0048] It should be noted that the bottom of the measuring base 1 in this embodiment has an arc-shaped structure that is adapted to the crucible molten pool 11. In actual application, the shape of the bottom of the measuring base 1 is adapted to the internal shape of the crucible molten pool 11, so as to meet the beam spot measurement requirements of different devices.

[0049] Beam spot morphology is measured using a measuring base 1 and measuring block 2 made of molybdenum blocks. The overall thickness of the measuring base 1 and measuring block 2 is stable and not prone to fluctuations, ensuring measurement accuracy. Simultaneously, the measuring base 1 and measuring block 2 are heat-resistant and stable, compatible with different types of electron guns, and will not cause contamination to the electron gun, crucible molten pool 11, or other equipment. Multiple position marking lines 7 are staggered at the center of the surface of the measuring block 2 to form a rectangular adjustment area for adjusting the beam spot position, ensuring accurate beam spot position adjustment. The measuring block 2 is heat-resistant and stable, and the imprint formed by the beam spot in the rectangular adjustment area is stable and not easily changed. Combined with the position marking lines 7, the size of the beam spot can be accurately measured, ensuring accurate beam spot size measurement. The measuring base 1 is reusable; only the measuring block 2 needs to be replaced for each measurement, helping to save resources and reduce costs.

[0050] Compared with the original beam spot measurement method, the above-mentioned structure significantly improves the portability, installation and operation, and practicality of the device. It also improves the installation, beam spot adjustment, beam spot position reading and reuse, ensuring that the beam spot position adjustment between the electron beam and the crucible can be carried out conveniently, quickly and reliably during the installation and commissioning stage of vacuum melting equipment.

[0051] like Figure 2 and Figure 6As shown, in an optional embodiment of the present invention, the measuring device further includes:

[0052] Positioning groove 3 is formed on the surface of measuring base 1, and positioning groove 3 has a cross-shaped structure;

[0053] The positioning protrusion 10 is formed on the bottom surface of the measuring block 2. The positioning protrusion 10 has a cross-shaped structure and is inserted into the positioning groove 3.

[0054] In this embodiment, the positioning protrusion 10 and the positioning groove 3 are inserted and engaged to realize the detachable connection of the measuring block 2 on the surface of the measuring base 1. The installation and disassembly of the measuring block 2 are simple and convenient, which helps to simplify the measurement operation and improve the ease of use of the device.

[0055] like Figure 2 As shown, in an optional embodiment of the present invention, all four ends of the positioning groove 3 penetrate through the outer surface of the measuring base 1.

[0056] In this embodiment, the positioning groove 3 with the above structure, together with the positioning protrusion 10, can stably fix the measuring block 2 on the surface of the measuring base 1, while improving the heat dissipation between the measuring block 2 and the measuring base 1, and avoiding high temperature adhesion between the measuring block 2 and the measuring base 1; at the same time, it can reduce the processing difficulty of the positioning groove 3, ensure the processing yield of the measuring base 1, and avoid waste.

[0057] like Figure 2 As shown, in an optional embodiment of the present invention, the measuring device further includes:

[0058] The first threaded hole 4 is provided on the surface of the measuring base 1. There are at least two first threaded holes 4, which are evenly distributed around the circumference with the axis of the measuring base 1 as the reference.

[0059] In this embodiment, if an operational error causes the measuring base 1 to heat up abnormally during the measurement process, and the measuring base 1 deforms due to high temperature, making it difficult to remove the measuring base 1 from the crucible molten pool 11, a bolt is screwed into the first threaded hole 4. The bolt facilitates the pulling of the measuring base 1 out of the crucible molten pool 11, thus making it easier to remove the measuring base 1.

[0060] like Figure 3 As shown, in an optional embodiment of the present invention, the bottom of the measuring base 1 is formed with a flat portion 5.

[0061] In this embodiment, by providing a flat portion 5 at the bottom of the measuring base 1, the stability of the measuring base 1 inside the crucible molten pool 11 is ensured, while the contact area between the measuring base 1 and the crucible molten pool 11 is reduced, thereby reducing the occurrence of deformation of the measuring base 1 at high temperature and the phenomenon of the measuring base 1 being stuck between the measuring base 1 and the crucible molten pool 11, making it difficult to remove the measuring base 1.

[0062] In an optional embodiment of the present invention, the position marking line 7 is a deep groove structure, and a scale line is provided on the side of the deep groove structure away from the center of the rectangular adjustment area.

[0063] In this embodiment, by setting the position mark line 7 as a deep groove structure and setting the scale line on the side of the deep groove structure away from the center of the rectangular adjustment area, it is possible to avoid damage to the scale line by the electron beam spot, and ensure that the size measurement of the mark formed by the beam spot inside the rectangular adjustment area on the surface of the measuring block 2 is performed by the scale line in the subsequent measurement.

[0064] In this process, a deep groove structure is machined on the surface of the measuring block 2 by milling, and scale lines are machined on the bottom surface of the deep groove structure by laser.

[0065] like Figure 4 As shown, in an optional embodiment of the present invention, the measuring device further includes:

[0066] Marking notch 9 is set on the outside of measuring block 2, and marking notch 9 is located on the extension line of the rectangular adjustment area formed by the interlacing distribution of multiple position marking lines 7.

[0067] In this embodiment, by setting a marker notch 9, and the marker notch 9 being located on the extension line of the length direction of the rectangular adjustment area, during the early stage of debugging, when installing the measuring block 2, the marker notch 9 is aligned with the emission direction of the electron beam, thereby realizing that the length direction of the rectangular adjustment area corresponds to the emission direction of the electron beam. This ensures that when the electron beam spot parameters are adjusted, the beam spot can accurately enter the interior of the rectangular adjustment area, ensuring accurate beam spot position adjustment and accurate subsequent beam spot imprint size measurement.

[0068] like Figure 5 As shown, in an optional embodiment of the present invention, the measuring device further includes:

[0069] There are two gripping slots 8. The gripping slots 8 avoid the marking notch 9, and the two gripping slots 8 are symmetrically arranged on both sides of the measuring block 2, so that the cross-section of the upper part of the measuring block 2 has a dovetail structure.

[0070] In this embodiment, the gripping slot 8 is provided to facilitate the gripping of the measuring block 2, thereby facilitating the installation and removal of the measuring block 2.

[0071] like Figure 4 and Figure 6 As shown, in an optional embodiment of the present invention, the measuring device further includes:

[0072] The second threaded hole 6 is located on the bottom surface of the gripping groove 8 and penetrates the bottom surface of the measuring block 2.

[0073] In this embodiment, if an operational error causes the positioning protrusion 10 on the bottom surface of the measuring block 2 to deform, resulting in the measuring block 2 and the measuring base 1 becoming stuck together, the bolt is screwed into the second threaded hole 6 so that the end of the bolt abuts against the surface of the measuring base 1. The bolt is then screwed in, and the reaction force is used to lift the measuring block 2 from the surface of the measuring base 1, thereby separating the measuring block 2 from the measuring base 1.

[0074] like Figure 4 and Figure 6 As shown, in an optional embodiment of the present invention, two second threaded holes 6 are provided, and the two second threaded holes 6 are respectively provided on the bottom surface of the two gripping grooves 8, and the two second threaded holes 6 are diagonally distributed with the center of the measuring block 2 as the reference.

[0075] In this embodiment, by arranging the second threaded hole 6 through the above-mentioned structure, the measuring block 2 can be subjected to uniform force, ensuring that the measuring block 2 can be successfully separated from the measuring base 1.

[0076] The process of using the beam spot morphology measurement device:

[0077] S1. Place the measuring base 1 inside the crucible molten pool 11, ensuring that the measuring base 1 is in full contact with the inner wall of the crucible molten pool 11, such as... Figure 7 As shown;

[0078] S2. The measuring block 2 is gripped by the gripping slot 8, aligning the positioning protrusion 10 with the positioning slot 3. The measuring block 2 is then placed on the surface of the measuring base 1. The measuring block 2 is positioned and fixed on the surface of the measuring base 1 by the interlocking action of the positioning protrusion 10 and the positioning slot 3. Figure 8 As shown;

[0079] S3. Rotate the measuring block 2 so that the measuring block 2 and the measuring base 1 rotate inside the crucible molten pool 11 until the marked notch 9 corresponds to the emission direction of the electron beam, so that the length direction of the rectangular adjustment area corresponds to the emission direction of the electron beam.

[0080] S4. Adjust the parameters of the electron gun to ensure that the electron beam spot accurately enters the rectangular adjustment area, thereby achieving beam spot position adjustment.

[0081] S5. After completing the beam spot position adjustment, the measuring block 2 is picked up by the gripping slot 8 to remove the measuring block 2. The size of the imprint inside the rectangular adjustment area is measured by the position mark line 7 on the surface of the measuring block 2, thereby obtaining the beam spot morphology parameters.

[0082] When the measuring block 2 and the measuring base 1 stick together due to deformation, screw the bolt into the second threaded hole 6 so that the end of the bolt contacts the surface of the measuring base 1. Continue to screw the bolt and use the reaction force to lift the measuring block 2 from the surface of the measuring base 1, thereby separating the measuring block 2 from the measuring base 1.

[0083] S6. After obtaining the position and morphology parameters of the beam spot, screw a bolt into the first threaded hole 4 and use the bolt to remove the measuring base 1 from the inside of the crucible molten pool 11, thus completing the removal of the measuring base 1 and finally completing the morphology measurement of the beam spot.

[0084] The entire device is significantly improved in terms of structural convenience, versatility, and reliability compared to the original beam spot measurement method; it ensures that the beam spot position between the electron beam and the crucible can be adjusted conveniently, quickly, and reliably during the installation and commissioning phase of the vacuum melting equipment.

[0085] The above description represents the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A beam spot morphology measuring device, characterized in that, include: A measuring base (1) made of molybdenum block, the bottom shape of the measuring base (1) is adapted to the internal shape of the crucible molten pool (11), and the bottom of the measuring base (1) is formed with a flat part (5). A measuring block (2) made of molybdenum is detachably attached to the surface of the measuring base (1); Position marking lines (7) are set on the surface of the measuring block (2). There are multiple position marking lines (7). The multiple position marking lines (7) are staggered at the center of the surface of the measuring block (2) to form a rectangular adjustment area for adjusting the beam spot position. The length direction of the rectangular adjustment area corresponds to the emission direction of the electron beam. A marking notch (9) is provided on the outside of the measuring block (2), and the marking notch (9) is located on the extension line of the length direction of the rectangular adjustment area formed by the staggered distribution of multiple position marking lines (7); The position marking line (7) is a deep groove structure, and a scale line is provided on the side of the deep groove structure away from the center of the rectangular adjustment area; A positioning groove (3) is formed on the surface of the measuring base (1), and the positioning groove (3) has a cross-shaped structure; A positioning protrusion (10) is formed on the bottom surface of the measuring block (2). The positioning protrusion (10) has a cross-shaped structure and is inserted into the positioning groove (3). A first threaded hole (4) is provided on the surface of the measuring base (1); Two gripping slots (8) are provided, and the gripping slots (8) avoid the marking notch (9); The second threaded hole (6) is provided on the bottom surface of the gripping groove (8); The process of using the beam spot morphology measurement device includes: Place the measuring base (1) inside the crucible molten pool (11) so that the measuring base (1) is in full contact with the inner wall of the crucible molten pool (11); The measuring block (2) is gripped by the gripping slot (8), so that the positioning protrusion (10) corresponds to the positioning slot (3), and the measuring block (2) is placed on the surface of the measuring base (1). The measuring block (2) is fixed on the surface of the measuring base (1) by the insertion and cooperation of the positioning protrusion (10) and the positioning slot (3). Rotate the measuring block (2) so that the measuring block (2) and the measuring base (1) rotate inside the crucible molten pool (11) until the marked notch (9) corresponds to the emission direction of the electron beam, so that the length direction of the rectangular adjustment area corresponds to the emission direction of the electron beam; The parameters of the electron gun are adjusted to ensure that the electron beam spot accurately enters the rectangular adjustment area, thereby achieving beam spot position adjustment. After completing the beam spot position adjustment, the measuring block (2) is picked up by the gripping slot (8) to remove the measuring block (2). The size of the mark inside the rectangular adjustment area is measured by the position mark line (7) on the surface of the measuring block (2) to obtain the beam spot morphology parameters. When the measuring block (2) and the measuring base (1) are stuck together, the bolt is screwed into the second threaded hole (6) so that the end of the bolt contacts the surface of the measuring base (1). The bolt is continued to be screwed, and the reaction force is used to lift the measuring block (2) from the surface of the measuring base (1) to separate the measuring block (2) from the measuring base (1). After obtaining the position and morphology parameters of the beam spot, a bolt is screwed into the first threaded hole (4) and the measuring base (1) is pulled out from the crucible molten pool (11) by the bolt, thus completing the removal of the measuring base (1) and finally completing the morphology measurement of the beam spot.

2. The beam spot morphology measuring device according to claim 1, characterized in that, The four ends of the positioning groove (3) all penetrate the outer side of the measuring base (1).

3. The beam spot morphology measuring device according to claim 1, characterized in that, The first threaded hole (4) is provided in at least two parts, and is evenly distributed around the axis of the measuring base (1).

4. The beam spot morphology measuring device according to claim 1, characterized in that, The two gripping slots (8) are symmetrically arranged on both sides of the measuring block (2), so that the upper cross section of the measuring block (2) has a dovetail structure.

5. The beam spot morphology measuring device according to claim 4, characterized in that, The second threaded hole (6) penetrates the bottom surface of the measuring block (2).

6. The beam spot morphology measuring device according to claim 5, characterized in that, There are two second threaded holes (6), which are respectively located on the bottom surface of the two gripping grooves (8) and are diagonally distributed with the center of the measuring block (2) as the reference.

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