Hole site precision measuring jig and manufacturing method, detection and correction compensation method
By designing a hole position accuracy measuring fixture and a detection, correction, and compensation method, the problem of difficulty in monitoring the consistency between micro-holes and the hole plate was solved, realizing efficient measurement and correction of hole position accuracy of laser drilling rigs and improving hole position accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HUIZHOU KING BROTHER CIRCUIT TECH
- Filing Date
- 2023-12-28
- Publication Date
- 2026-08-04
AI Technical Summary
During the production of the packaging substrate, it is difficult to accurately monitor the consistency between the micro-holes and the hole disk, which leads to inaccurate measurement of the hole position accuracy by the laser drilling machine and makes it difficult to confirm the offset direction.
Design a hole position accuracy measuring fixture, which adopts a transparent or semi-transparent fixture body with photosensitive color-changing properties, and is equipped with a positioning disk and an icon unit, including a reference icon and an offset icon. The icon combination is formed by laser drilling, and the accuracy is detected and corrected by a hole position detection machine and a 100x lens.
It improves the measurement accuracy of hole position precision of laser drilling machine, reduces measurement error, ensures accurate positioning of hole position offset direction and value, and realizes high-precision hole position correction compensation.
Smart Images
Figure CN117906496B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the technical field of hole position accuracy testing, specifically to a hole position accuracy measuring fixture and its manufacturing method, as well as a testing and calibration compensation method. Background Technology
[0002] In the production of packaging substrates, the consistency between microvias and their pads is a critical indicator; it typically refers to the consistency between laser-engaged microvias and inner layer pads, and between laser-engaged microvias and outer layer pads. Microvias include laser-engaged X-type vias and blind vias, with a minimum aperture / pad value of 50μm / 100μm. During production, misalignment between the microvia and its pad center can easily occur, potentially leading to open circuits or short circuits due to hole breakage.
[0003] During the production process, it is necessary to monitor the hole position accuracy of laser drilling machines. Traditionally, a PCB board is used as a fixture to measure the hole position accuracy. However, since the laser micro-holes produced by laser drilling machines are mostly blind holes, it is difficult to obtain the dimensions of the micro-holes on the PCB board. Furthermore, due to the inherent structural limitations of the PCB board, the hole shape of the micro-holes on the PCB is unstable, leading to inaccurate hole position accuracy measurements. Secondly, the hole position accuracy measurement values are also inaccurate due to the influence of measuring instrument errors; moreover, it is difficult to determine the direction of deviation. Summary of the Invention
[0004] Therefore, it is necessary to provide a measuring fixture for hole position accuracy, a manufacturing method, and a method for testing and calibration compensation.
[0005] A measuring fixture for hole position accuracy is characterized by: comprising a fixture body, wherein the fixture body is a transparent or semi-transparent part with photosensitive color-changing properties, and the fixture body is provided with a positioning disk for determining a coordinate system; the fixture body is provided with an icon unit, the icon unit being composed of a combination of icons arranged together, the icon combination including a reference icon, the center of which is aligned with the center of the laser drilled hole to be detected, and a plurality of offset icons arranged in a ring around the reference icon, the number of offset icons corresponding to the number of ring holes to be detected in the laser drilled hole; after the reference icon of the icon combination is aligned with the center hole of the laser drilled hole to be detected, there is a positional offset between the offset icons of the icon combination and the ring holes of the laser drilled hole to be detected, and the offset direction and offset value of the offset icons of the icon combination in the icon unit on the fixture body are not completely the same.
[0006] In one embodiment, the icon set has 4N offset icons, where 1≤N≤5 and N is an integer, and the offset icons are equidistantly distributed outside the base icon.
[0007] In one embodiment, the offset value between the center of the offset icon and the center of the annular hole of the laser drill hole to be detected is 10μm-25μm. The offset icon is offset along the straight line formed by the center of the reference icon and the center of the offset icon, and is simultaneously offset towards the reference icon or simultaneously offset away from the reference icon.
[0008] In one embodiment, the radius of the baseline icon of the icon combination is equal to the radius of the center hole of the laser drill hole to be detected plus an offset value, and the radius of the offset icon is equal to the radius of the annular hole of the laser drill hole to be detected plus an offset value.
[0009] In one embodiment, the fixture is marked with an offset direction and an offset value, and the different offset directions of the offset icons in the icon unit are arranged alternately.
[0010] The method for manufacturing a measuring fixture for hole position accuracy is characterized by: S1. A laser drilling tape document for designing a testing fixture. The laser drilling tape document includes multiple reference units, each reference unit including a central hole. Multiple annular holes are evenly distributed around the central hole, with the central hole as the center. There are 4N annular holes, where 1 ≤ N ≤ 5, and N is an integer. The annular holes are equidistantly distributed outside the central hole. The reference units are arranged to fill the entire document size. The document size is the size of the laser machine platform. S2. Design the graphic file of the testing fixture, and form an icon based on the position of the center hole and the annular hole of the laser drill tape file. At this time, the center hole position forms a reference icon. The annular hole outside the reference icon is offset along the offset direction and offset value to form an offset icon. At this time, the radius of the reference icon = the radius of the center hole of the laser drill hole to be tested + the offset value. The radius of the offset icon = the radius of the annular hole of the laser drill hole to be tested + the offset value. S3. Image transfer: Take the photosensitive film, expose, develop, fix and dry the image file obtained in step S2, and transfer the icon combination to the photosensitive film to obtain the measuring fixture for hole position accuracy.
[0011] In one embodiment, the design method of the reference unit in step S1 is as follows: S11. First, set a center hole, then draw a ring with the center of the center hole as the center. The width of the ring is 0.05mm-0.1mm, and the diameter is 3mm≤5mm. S12. Convert the ring from a line format to a hole format; S13. Adjust the hole spacing to ensure that the final 4N annular holes form a reference unit, where 1≤N≤5 and N is an integer. The required number of holes is met by adjusting the diameter of the annulus in step S11.
[0012] In one embodiment, the formula for calculating the hole spacing is: Spacing = circumference of the ring / number of holes required = πd / number of holes.
[0013] In one embodiment, in step S1, a positioning hole is provided on each of the four sides of the laser drilling tape file to determine the coordinate system. In step S2, a positioning disk is also provided on each of the four sides of the graphic file of the detection fixture. The positioning holes in step S1 and the positioning disks in step S2 are in the same position.
[0014] A method for detecting hole position accuracy, characterized in that: S81. Obtain the jig body that has completed the graphic transfer; S82. Laser drilling: Perform laser drilling according to the designed laser drill strip. S83. Precision detection: Group the positions of icons with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and simultaneously scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained from the laser drilling with the above tool numbers to determine the hole position offset value. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the actual offset value and actual offset direction of the laser drilling.
[0015] In one embodiment, it also includes S84. Re-inspection: When the offset value is less than or equal to the preset threshold, use a 100x magnifying glass to check the icon combination at the four corners of the fixture with the preset offset value being the preset threshold. When it is found that the center hole of the laser drill hole is contained within the position of the reference icon, the hole position accuracy is deemed to be qualified. When the offset value is greater than the preset threshold, a 100x magnifying glass is used to check the tool number corresponding to the offset value of the four corners of the fixture that is close to the minimum offset value found in step S83, to confirm whether the minimum offset value and offset direction are acceptable; if not, hole position accuracy correction compensation is required, and then the test is repeated.
[0016] In one embodiment, the preset threshold is 10 μm.
[0017] A method for correcting and compensating for hole position accuracy, characterized in that, S91. Obtain the jig body that has completed the graphic transfer; S92. Laser drilling: Perform laser drilling according to the designed laser drill strip. S93. Confirm the offset direction and offset value. Group the icon positions with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained by laser drilling with the above tool numbers to make hole position offset values. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the offset direction and offset value of the laser drilling. S94. Offset compensation: Calculate the offset values in the X and Y directions based on the offset values and offset directions obtained in step S93, and then perform laser machine table compensation.
[0018] In one embodiment, the detection method further includes: S95. Repeat step S93 to reconfirm the offset direction and offset value. If the offset value between the reference icon of the icon combination and the center hole of the laser drilling is less than the preset threshold, the hole position accuracy correction and compensation is completed. If the offset between the reference icon of the icon combination and the center hole of the laser drill hole is greater than or equal to a preset threshold, then repeat step S94 to perform offset compensation, and then repeat step S95 until the offset between the reference icon of the icon combination and the center hole of the laser drill hole is less than the preset threshold, thus completing the hole position accuracy correction compensation.
[0019] In one embodiment, the preset threshold is 10 μm.
[0020] In one embodiment, the diameter of the laser-drilled hole is 50μm-60μm.
[0021] The beneficial effects of the aforementioned measuring fixture and manufacturing method, as well as the detection and correction compensation method for hole position accuracy, are as follows: The fixture body is made of transparent or semi-transparent parts, which are light-transmitting and facilitate initial visual inspection; at the same time, it has good rigidity, is easy to operate and is not easily deformed, greatly avoiding measurement errors; the combination of icons on the fixture body allows for visual inspection or confirmation of the laser drilling offset value and offset direction during inspection using a hole position detection machine; based on the laser drilling offset value and offset direction, the laser drilling machine can be adjusted to achieve higher hole position accuracy. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the structure of the measuring fixture for hole position accuracy of the present invention; Figure 2 for Figure 1 Middle section diagram; Figure 3 for Figure 1 A diagram illustrating icon combinations with different offset values; Figure 4This is a schematic diagram showing the comparison process between laser drilling and the fixture body in the hole position accuracy detection and correction compensation method of the present invention; Figure 5 This is a schematic diagram showing the comparison process between laser drilling and the fixture body in the hole position accuracy detection and correction compensation method of the present invention. Detailed Implementation
[0023] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
[0024] It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediary component present. Conversely, when a component is said to be "directly" connected to another component, there is no intermediary component.
[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0026] like Figure 1 , Figure 2 , Figure 3 As shown, a measuring fixture for hole position accuracy is characterized by: a fixture body 10, wherein the fixture body is a transparent or semi-transparent part with photosensitive color-changing properties, and the fixture body is provided with a positioning disk 20 for determining the coordinate system; the fixture body is provided with an icon unit, the icon unit being composed of a combination of several icons, the icon combination including a reference icon, and a plurality of offset icons distributed in a ring around the reference icon, the number of offset icons corresponding to the number of annular holes to be detected by laser drilling, after the reference icon of the icon combination is aligned with the center hole of the laser drilling hole to be detected, there is a positional offset between the offset icons of the icon combination and the annular hole of the laser drilling hole to be detected, and the offset direction and offset value of the offset icons of the icon combination in the icon unit on the fixture body are not completely the same.
[0027] At this point, the offset icon is formed by offsetting the position of the laser-drilled annular hole. Therefore, in order to ensure the accuracy of measuring the position of the laser-drilled hole, multiple offset icons are provided. Specifically, in order to make the offset icons symmetrically distributed outside the reference icon, in this embodiment, there are 4N offset icons in the icon combination, where N is an integer from 1 to 5. The offset icons are evenly distributed outside the reference icon. In this way, there are offset icons in all directions of the reference icon. When comparing the offset icons of the icon combination with the laser-drilled hole later, the offset direction of the laser-drilled hole can be better determined. Specifically, in this embodiment, N is 4, and there are 16 offset icons, which are evenly arranged on the circumference.
[0028] For the offset icon relative to the annular hole, the offset value between the center of the offset icon and the center of the annular hole of the laser drill hole to be detected is 10μm-25μm. The offset icon is offset along the straight line formed by the center of the reference icon and the center of the offset icon, and is simultaneously offset towards the reference icon or simultaneously offset away from the reference icon. Specifically, the offset values are 10μm, 15μm, 20μm, and 25μm. At this time, multiple sets of icon combinations with different offset values are set on the photosensitive film. In subsequent comparisons, one of the icon combinations can be selected as needed, thereby improving the efficiency of comparison.
[0029] At this time, the icon unit is composed of several icon combinations. Specifically, there are several icon combinations on the fixture body. At this time, the offset direction and offset value of the offset icons of the icon combinations are not exactly the same. In this way, several icon combinations can be combined to obtain multiple icon combinations.
[0030] like Figure 1 and Figure 2As shown, when the offset values are set to 10μm, 15μm, 20μm, and 25μm, four icon combinations are arranged horizontally with offset values of 10μm, 15μm, 20μm, and 25μm respectively. The first row consists of four icon combinations offset away from the center of the reference icon, with offset values of 10μm, 15μm, 20μm, and 25μm respectively. The second row consists of four icon combinations offset closer to the center of the reference icon, with offset values of 10μm, 15μm, 20μm, and 25μm respectively. Then, the four icon combinations in the first and second rows are arrayed to fill the entire fixture. In this way, icon combinations with different offset directions and values can be quickly found at various positions on the fixture. Of course, other arrangements can also be used, such as setting the offset value to more specific values (10μm, 12μm, 14μm, 16μm, etc.), or arranging the offset direction horizontally alternately.
[0031] To quickly obtain the offset direction and value, the fixture is marked with the offset direction and value, and the offset icons in the icon unit are arranged alternately according to different offset directions. After marking the offset direction and value, the offset direction and value corresponding to the offset icon can be quickly determined. Alternating the offset icons with different offset directions in the icon unit allows for quick selection of icon combinations corresponding to different offset directions and values during comparison.
[0032] In one embodiment, the radius of the baseline icon of the icon combination is equal to the radius of the center hole of the laser drill hole to be detected plus an offset value, and the radius of the offset icon is equal to the radius of the annular hole of the laser drill hole to be detected plus an offset value.
[0033] At this point, the size of the reference icon and the offset icon is set based on the offset value. This ensures that during subsequent hole position accuracy detection and correction compensation, not too many offset icons will be aligned with the annular hole (inner sleeve) at the same time, thereby improving the detection accuracy.
[0034] If the diameter of the annular hole and the central hole is 60μm (radius is 30μm) and the offset value is 10μm, then the diameter of the offset icon and the reference icon is 80μm.
[0035] The method for manufacturing a measuring fixture for hole position accuracy is characterized by: S1. A laser drilling tape document for designing a testing fixture. The laser drilling tape document includes multiple reference units, each reference unit including a central hole. Multiple annular holes are evenly distributed around the central hole, with the central hole as the center. There are 4N annular holes, where 1 ≤ N ≤ 5, and N is an integer. The annular holes are equidistantly distributed outside the central hole. The reference units are arranged to fill the entire document size. The document size is the size of the laser machine platform. S2. Design the graphic file of the testing fixture, and form an icon based on the position of the center hole and the annular hole of the laser drill tape file. At this time, the center hole position forms a reference icon. The annular hole outside the reference icon is offset along the offset direction and offset value to form an offset icon. At this time, the radius of the reference icon = the radius of the center hole of the laser drill hole to be tested + the offset value. The radius of the offset icon = the radius of the annular hole of the laser drill hole to be tested + the offset value. S3. Image transfer: Take the photosensitive film, expose, develop, fix and dry the image file obtained in step S2, and transfer the icon combination to the photosensitive film.
[0036] In one embodiment, the design method of the reference unit in step S1 is as follows: S11. First, set a center hole, then draw a ring with the center of the center hole as the center. The width of the ring is 0.05mm-0.1mm, and the diameter is 3mm≤5mm. S12. Convert the ring from a line format to a hole format; S13. Adjust the hole spacing to ensure that the final 4N annular holes form a reference unit, where 1≤N≤5 and N is an integer. The required number of holes is met by adjusting the diameter of the annulus in step S11.
[0037] In one embodiment, in step S1, a positioning hole is provided on each of the four sides of the laser drilling tape file to determine the coordinate system. In step S2, a positioning disk is also provided on each of the four sides of the graphic file of the detection fixture. The positioning holes in step S1 and the positioning disks in step S2 are in the same position.
[0038] In one embodiment, the formula for calculating the hole spacing is: Spacing = circumference of the ring / number of holes required = πd / number of holes.
[0039] A method for detecting hole position accuracy, characterized in that: S81. Obtain the jig body that has completed the graphic transfer; S82. Laser drilling: Perform laser drilling according to the designed laser drill strip. S83. Precision detection: Group the positions of icons with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and simultaneously scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained from the laser drilling with the above tool numbers to determine the hole position offset value. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the actual offset value and actual offset direction of the laser drilling.
[0040] In one embodiment, it also includes S84. Re-inspection: When the offset value is less than or equal to the preset threshold, use a 100x magnifying glass to check the icon combination at the four corners of the fixture with the preset offset value being the preset threshold. When it is found that the center hole of the laser drill hole is contained within the position of the reference icon, the hole position accuracy is deemed to be qualified. When the offset value is greater than the preset threshold, a 100x magnifying glass is used to check the tool number corresponding to the offset value of the four corners of the fixture that is close to the minimum offset value found in step S83, to confirm whether the minimum offset value and offset direction are acceptable; if not, hole position accuracy correction compensation is required, and then the test is repeated.
[0041] A method for correcting and compensating for hole position accuracy, characterized in that, S91. Obtain the jig body that has completed the graphic transfer; S92. Laser drilling: Perform laser drilling according to the designed laser drill strip. S93. Confirm the offset direction and offset value. Group the icon positions with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained by laser drilling with the above tool numbers to make hole position offset values. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the offset direction and offset value of the laser drilling. S94. Offset compensation: Calculate the offset values in the X and Y directions based on the offset values and offset directions obtained in step S93, and then perform laser machine table compensation.
[0042] In one embodiment, the detection method further includes: S95. Repeat step S93 to reconfirm the offset direction and offset value. If the offset value between the reference icon of the icon combination and the center hole of the laser drilling is less than the preset threshold, the hole position accuracy correction and compensation is completed. If the offset between the reference icon of the icon combination and the center hole of the laser drill hole is greater than or equal to a preset threshold, then repeat step S94 to perform offset compensation, and then repeat step S95 until the offset between the reference icon of the icon combination and the center hole of the laser drill hole is less than the preset threshold, thus completing the hole position accuracy correction compensation.
[0043] The fixture body is a transparent or semi-transparent part with photosensitive color-changing properties. In this embodiment, a photosensitive film is used to facilitate observation of the fixture body by the inspection personnel. The fixture body is made of a structurally stable and non-deformable material, which can avoid interference with the hole position accuracy of the laser drilling machine due to deformation of the fixture body, thus preventing errors in hole position accuracy.
[0044] The fixture body can be made of photosensitive film. Photosensitive film is transparent, facilitating initial visual inspection; it also possesses good rigidity, making it easy to handle and less prone to deformation, greatly minimizing measurement errors. During fixture body fabrication, reference coordinates can be printed onto the fixture body via pattern transfer. The pattern transfer steps are: exposure – development – fixing – drying.
[0045] The jig uses photosensitive film, which produces clear images after exposure. The offset value and direction of the offset icon can be visually confirmed after jig fabrication, achieving efficient and convenient results. Alternatively, the offset value and direction can be measured using instruments.
[0046] Furthermore, the jig body can be a rectangular structure, which facilitates its positioning and fixation on the laser drilling machine. The jig body can also be a square structure or a circular plate, as long as the structure is stable and not easily deformed, it can be used as the jig body.
[0047] Furthermore, four positioning discs are set at the four corners of the fixture body to determine the coordinate system. Different numbers of positioning discs can also be set according to different shapes of the fixture body.
[0048] Method for manufacturing a measuring fixture for hole position accuracy. S1. A laser drilling tape document for designing a testing fixture. The laser drilling tape document includes multiple reference units, each reference unit including a central hole. Multiple annular holes are evenly distributed around the central hole, with the central hole as the center. There are 4N annular holes, where 1 ≤ N ≤ 5, and N is an integer. The annular holes are equidistantly distributed outside the central hole. The reference units are arranged to fill the entire document size. The document size is the size of the laser machine platform. S2. Design the graphic file of the testing fixture, and form an icon based on the position of the center hole and the annular hole of the laser drill tape file. At this time, the center hole position forms a reference icon. The annular hole outside the reference icon is offset along the offset direction and offset value to form an offset icon. At this time, the radius of the reference icon = the radius of the center hole of the laser drill hole to be tested + the offset value. The radius of the offset icon = the radius of the annular hole of the laser drill hole to be tested + the offset value. S3. Image transfer: Take the photosensitive film, expose, develop, fix and dry the image file obtained in step S2, and transfer the icon combination to the photosensitive film.
[0049] If the diameter of the annular hole and the central hole is 60μm (radius is 30μm) and the offset value is 10μm, then the diameter of the offset icon and the reference icon is 80μm.
[0050] In one embodiment, step S1 includes: In step S1, the design method of the reference unit is as follows: S11. First, set a center hole, then draw a ring with the center of the center hole as the center. The width of the ring is 0.05mm-0.1mm, and the diameter is 3mm≤5mm. S12. Convert the ring from a line format to a hole format; S13. Adjust the hole spacing to ensure that the final 4N annular holes form a reference unit, where 1≤N≤5 and N is an integer. The required number of holes is met by adjusting the diameter of the annulus in step S11.
[0051] At this point, the inspection fixture is based on the laser-drilled hole to be inspected, and is offset from the annular hole to form an offset icon.
[0052] In this embodiment, the offset icons of the icon set are offset based on the design data of the laser drilling tape. Therefore, it can ensure the correspondence between the offset icons and the annular holes of the laser drilling in the design data. Furthermore, in this embodiment, the number of offset icons is 4N (N is 4, that is, the number of offset icons is 16). In this way, the offset icons are set around the base icon, and there are multiple offset icons. This means that there are offset icons in all directions of the base icon. The offset icons can be offset along different directions. In the subsequent offset direction confirmation process, the offset direction of the laser drilling can be more accurately confirmed.
[0053] The formula for adjusting the hole spacing is: Spacing = circumference of the ring / number of holes required = πd / number of holes. Specifically, in this embodiment, the ring width in step S11 is 0.08mm, the diameter is 4mm, and N is 4, which means there are 16 holes. Therefore, the spacing is calculated to be 4*3.14 / 16=0.785mm. In step S13, 16 holes are formed on the outside of the central hole, thus forming a reference unit of a central hole and 16 annular holes in step S1.
[0054] At this point, a photosensitive film with icon combinations can be obtained. The photosensitive film has good light transmittance. In step S2, the icon combinations are spread to cover the entire photosensitive film, so that the resulting photosensitive film has icon units formed by multiple icon combinations.
[0055] A method for detecting hole position accuracy, characterized in that: S81. Obtain the jig body that has completed the graphic transfer; S82. Laser drilling: Perform laser drilling according to the designed laser drill strip. S83. Precision detection: Group the positions of icons with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and simultaneously scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained from the laser drilling with the above tool numbers to determine the hole position offset value. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the actual offset value and actual offset direction of the laser drilling.
[0056] A hole position detection machine is used to classify the offset icon and the corresponding reference icon on the fixture into a tool number. This results in multiple tool numbers with different offset directions and values. All tool numbers (i.e., the icon combination formed by the offset direction and offset value corresponding to the offset icon and the corresponding reference icon) are imported into the hole position detection machine. Then, the center hole and the annular hole of the laser drilling are observed with the tool number (the reference icon and offset icon of the icon combination) to determine the comparison result between the two. At this time, the tool number corresponding to the smallest offset value is found, and the offset direction and offset value of the laser drilling can be confirmed.
[0057] To ensure the accuracy of the hole position, this embodiment also includes... S84. Re-inspection: When the offset value is less than or equal to the preset threshold, use a 100x magnifying glass to check the icon combination at the four corners of the fixture with the preset offset value being the preset threshold. When it is found that the center hole of the laser drill hole is contained within the position of the reference icon, the hole position accuracy is deemed to be qualified. When the offset value is greater than the preset threshold, a 100x magnifying glass is used to check the tool number corresponding to the offset value of the four corners of the fixture that is close to the minimum offset value found in step S83, to confirm whether the minimum offset value and offset direction are acceptable; if not, hole position accuracy correction compensation is required, and then the test is repeated.
[0058] The re-inspection is conducted manually to further confirm the hole position accuracy of the laser drilling machine.
[0059] Hole position accuracy testing is mainly used to test the drilling accuracy of laser drilling equipment. In the actual production process, measuring fixtures can be used to test the hole position accuracy of laser drilling equipment. Once the required processing accuracy of the product is achieved, no correction or compensation is required, and normal production can proceed.
[0060] At this point, the preset threshold of 10μm is set to 10μm, which is the same as the minimum value of the offset. In this way, it can be used to detect laser drilling machines with an offset value of 10μm during the production process. Of course, the preset threshold can also be set to 15μm or 20μm according to the actual processing accuracy requirements.
[0061] A method for correcting and compensating for hole position accuracy, characterized in that, S91. Obtain the jig body that has completed the graphic transfer; S92. Laser drilling: Perform laser drilling according to the designed laser drill strip. S93. Confirm the offset direction and offset value. Group the icon positions with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained by laser drilling with the above tool numbers to make hole position offset values. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the offset direction and offset value of the laser drilling. S94. Offset compensation: Calculate the offset values in the X and Y directions based on the offset values and offset directions obtained in step S93, and then perform laser machine table compensation.
[0062] In one embodiment, the detection method further includes: S95. Repeat step S93 to reconfirm the offset direction and offset value. If the offset value between the reference icon of the icon combination and the center hole of the laser drilling is less than the preset threshold, the hole position accuracy correction and compensation is completed. If the offset between the reference icon of the icon combination and the center hole of the laser drill hole is greater than or equal to a preset threshold, then repeat step S94 to perform offset compensation, and then repeat step S95 until the offset between the reference icon of the icon combination and the center hole of the laser drill hole is less than the preset threshold, thus completing the hole position accuracy correction compensation.
[0063] At this time, the preset threshold is 10μm.
[0064] The diameter of the laser-drilled hole is 60μm. At the same time, the diameter of the reference icon and the diameter of the offset icon are larger than the diameter of the laser-drilled hole, which makes it easy to observe the concentricity and offset of the laser-drilled hole with the diameter of the reference icon and the offset icon.
[0065] In step S94, the preset threshold is an offset value less than or equal to 10 μm, meaning that the actual hole position of the laser drill (referring to the center hole and the annular hole of the laser drill) is determined. Figure 4 and Figure 5 The icon combination of the dotted-line hole (represented by the hole in the middle) and the icon of the jig body (referring to the base icon and offset icon on the jig body) and the jig body icon (referring to the base icon and offset icon on the jig body). Figure 4 and Figure 5 When making comparisons (using solid lines in the middle) (e.g.) Figure 4 and Figure 5 As shown), you can first compare the offset icons with larger offset values (e.g., 25μm), and then compare them with the offset icons with smaller offset values (e.g., 10μm). If the reference icon with an offset value of 25μm is consistent with the inner sleeve of the center hole (e.g., ...), then the offset icon with a larger offset value is compared with the inner sleeve of the center hole. Figure 5 If the situation shown indicates that the processing accuracy meets the 25μm requirement, and production requirements are met, the laser drilling machine does not need adjustment. If higher accuracy is required, the icon combination with an offset value of 20μm can be observed. If it still shows... Figure 5 If the reference icon aligns with the inner sleeve of the center hole, it indicates that the machining accuracy meets the 20μm requirement. Further confirmation of the offset value and direction is needed to determine if production requirements are met. If the icon combination shows an offset value of 15μm, it will appear as follows... Figure 4 The reference icon is offset from the center hole, and one of the offset icons is related to the inner sleeve of the annular hole. Figure 4 If the middle arrow indicates that the machining accuracy does not meet the 15μm requirement, then the actual offset direction and value of the laser drill can be determined to adjust the laser drilling. This gradually reduces the actual hole position deviation, thereby improving the hole position accuracy. After comparing the deviation with the minimum offset value, it can be ensured that the hole position deviation is less than the minimum offset value, thus improving the hole position accuracy.
[0066] Scan the laser-drilled fixture. The fixture has a central hole and annular hole for the laser drilling. It also has multiple icon units formed by combining various icons. Observe whether the center of the central hole coincides with the offset center of the icon unit from the reference center. If they coincide (e.g....), then... Figure 5 The arrow indicates that the solid holes represent the offset and reference icons, while the dashed holes represent the center and annular holes. This means the center of the laser-drilled hole is aligned with the center of the reference icon in the icon set, and the offset value is small, within the set range. If the center of the laser-drilled hole does not coincide with the center of the reference icon in the icon set, then observe the alignment of the annular hole with the offset icon in the icon set and determine the one with the highest alignment. Figure 4 (As indicated by the middle arrow), the center of one of the annular holes in the laser drilling is closest to the center of the offset icon in the icon combination. Based on the corresponding offset icon, confirm the offset direction and value of the laser drilling. Then, adjust the position of the laser drill according to the offset direction and value, that is, adjust the position of the laser drill to increase the accuracy of the laser drilling. After adjustment, perform laser drilling again and confirm the offset direction and value again. If the center of the center hole of the laser drilling is still not aligned with the center of the reference icon of the icon combination, determine the offset direction and value and adjust the position of the laser drill again until the offset value between the reference icon of the icon combination and the center hole of the laser drilling is less than a preset threshold, thereby improving the hole position accuracy of the laser drilling.
[0067] A hole position detection machine is used to classify the offset icons and corresponding reference icons on the fixture into a single tool number. This results in multiple tool numbers with different offset directions and values. All tool numbers (i.e., the icon combination formed by the offset icon's corresponding offset direction and value, and the corresponding reference icon) are imported into the hole position detection machine. Then, the center hole and annular hole of the laser drill are compared with the tool number (the reference icon and offset icon combination). The tool number with the smallest offset value is then used to confirm the actual offset direction and value of the laser drill. Compared to manual observation, this method can more quickly and accurately determine the actual offset direction and value of the laser drill, allowing for corresponding adjustments.
[0068] Since the offset icons are evenly distributed outside the base icons, the position of the offset icons in each icon combination can be determined. Therefore, after determining that one of the offset icons is aligned with the inner ring, the offset values in the X and Y directions can be calculated, which facilitates compensation by the laser drilling machine.
[0069] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0070] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.
Claims
1. A measuring fixture for hole position accuracy, characterized in that: The fixture includes a jig body, which is a transparent or semi-transparent part with photosensitive color-changing properties. The jig body has a positioning disk for determining the coordinate system. The jig body also includes an icon unit, which is composed of several icons arranged in combination. Each icon combination includes a reference icon, the center of which is aligned with the center of the laser-drilled hole to be inspected. Multiple offset icons are arranged in a ring around the reference icon. The icon combination contains 4N offset icons, where 1 ≤ N ≤ 5, and N is an integer. The offset icons are equidistantly distributed outside the reference icon and offset along the straight line formed by the center of the reference icon and the center of the offset icons, synchronously moving closer to the reference icon. The icons are offset in direction, or synchronously offset away from the reference icon. The number of offset icons corresponds to the number of annular holes to be detected by the laser drilling. After the reference icon of the icon combination is aligned with the center hole of the laser drilling, there is a positional offset between the offset icons of the icon combination and the annular holes of the laser drilling. The offset direction and offset value of the offset icons in the icon unit on the fixture body are not completely the same. The fixture body is marked with the offset direction and offset value. The different offset directions of the offset icons in the icon unit are arranged alternately. The radius of the reference icon of the icon combination = the radius of the center hole of the laser drilling to be detected + the offset value. The radius of the offset icon = the radius of the annular hole of the laser drilling to be detected + the offset value.
2. The measuring fixture for hole position accuracy according to claim 1, characterized in that: The offset value between the center of the offset icon and the center of the annular hole of the laser drill hole to be detected is 10μm-25μm.
3. A method for manufacturing the hole position accuracy measuring fixture according to any one of claims 1-2, characterized in that: Includes the following steps: S1. Design a laser drilling tape document for measuring fixtures. The laser drilling tape document includes multiple reference units. Each reference unit includes a central hole and multiple annular holes evenly distributed around the central hole. There are 4N annular holes, where 1≤N≤5 and N is an integer. The annular holes are evenly distributed outside the central hole and are arranged with the above reference units as the reference to fill the entire document size. The document size is the size of the laser machine platform. S2. Design the graphic file of the measuring fixture, and form an icon based on the position of the center hole and the annular hole of the laser drill tape file. At this time, the center hole position forms a reference icon. The annular hole outside the reference icon is offset along the offset direction and offset value to form an offset icon. At this time, the radius of the reference icon = the radius of the center hole of the laser drill hole to be detected + the offset value. The radius of the offset icon = the radius of the annular hole of the laser drill hole to be detected + the offset value. S3. Image transfer: Take the photosensitive film, expose, develop, fix and dry the image file obtained in step S2, and transfer the icon combination to the photosensitive film to obtain the measuring fixture for hole position accuracy.
4. The method for manufacturing the hole position accuracy measuring fixture according to claim 3, characterized in that: In step S1, the steps of the reference unit design method are as follows: S11. First, set a center hole, then draw a ring with the center of the center hole as the center. The width of the ring is 0.05mm-0.1mm, and the diameter is 3mm≤5mm. S12. Convert the ring from a line format to a hole format; S13. Adjust the hole spacing to ensure that the final 4N annular holes form a reference unit, where 1≤N≤5 and N is an integer. The required number of holes is met by adjusting the diameter of the annulus in step S11.
5. The method for manufacturing the hole position accuracy measuring fixture according to claim 4, characterized in that: The formula for calculating the hole spacing is: Spacing = circumference of the ring / number of holes required = πd / number of holes required.
6. The method for manufacturing the hole position accuracy measuring fixture according to claim 3, characterized in that: In step S1, a positioning hole is provided on each of the four sides of the laser drilling tape file to determine the coordinate system. In step S2, a positioning plate is also provided on each of the four sides of the graphic file of the measuring fixture. The positioning holes in step S1 and the positioning plates in step S2 are in the same position.
7. A method for detecting the hole position accuracy of a measuring fixture using the hole position accuracy described in any one of claims 1-2, characterized in that: Includes the following steps: S81. Obtain the jig body that has completed the graphic transfer; S82. Laser drilling: Perform laser drilling according to the designed laser drill strip. S83. Precision detection: Group the positions of icons with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and simultaneously scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained from the laser drilling with the above tool numbers to determine the hole position offset value. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the actual offset value and actual offset direction of the laser drilling.
8. The method for detecting hole position accuracy according to claim 7, characterized in that: It also includes the following steps: S84. Re-inspection: When the offset value is less than or equal to the preset threshold, use a 100x magnifying glass to check the icon combination at the four corners of the fixture with the preset offset value being the preset threshold. When it is found that the center hole of the laser drill hole is contained within the position of the reference icon, the hole position accuracy is deemed to be qualified. When the offset value is greater than the preset threshold, a 100x magnifying glass is used to check the tool number corresponding to the offset value of the four corners of the fixture that is close to the minimum offset value found in step S83, to confirm whether the minimum offset value and offset direction are acceptable; if not, hole position accuracy correction compensation is required, and then the test is repeated.
9. The method for detecting hole position accuracy according to claim 8, characterized in that: The preset threshold is 10μm.
10. A method for correcting and compensating the hole position accuracy of a measuring fixture employing the hole position accuracy described in any one of claims 1-2, characterized in that, Includes the following steps: S91. Obtain the jig body that has completed the graphic transfer; S92. Laser drilling: Perform laser drilling according to the designed laser drill strip. S93. Confirm the offset direction and offset value. Group the icon positions with the same offset direction and offset value in the entire fixture into one tool number; and classify them into multiple tool numbers according to different offset directions and offset values; import all tool numbers into the hole position detection machine, and scan the fixture that has been laser drilled. Compare the positions of the center hole and annular hole obtained by laser drilling with the above tool numbers to make hole position offset values. Check the comparison results of all tool numbers one by one, and find the tool number with the smallest offset value. The offset value and offset direction corresponding to this tool number are the offset direction and offset value of the laser drilling. S94. Offset compensation: Calculate the offset values in the X and Y directions based on the offset values and offset directions obtained in step S93, and then perform laser machine table compensation.
11. The hole position accuracy correction and compensation method according to claim 10, characterized in that: It also includes the following steps: S95. Repeat step S93 to reconfirm the offset direction and offset value. If the offset value between the reference icon of the icon combination and the center hole of the laser drilling is less than the preset threshold, the hole position accuracy correction and compensation is completed. If the offset between the reference icon of the icon combination and the center hole of the laser drill hole is greater than or equal to a preset threshold, then repeat step S94 to perform offset compensation, and then repeat step S95 until the offset between the reference icon of the icon combination and the center hole of the laser drill hole is less than the preset threshold, thus completing the hole position accuracy correction compensation.
12. The hole position accuracy correction and compensation method according to claim 11, characterized in that: The preset threshold is 10μm.
13. The hole position accuracy correction and compensation method according to claim 10, characterized in that: The diameter of the laser-drilled hole is 50μm-60μm.