pressure sensor

Abstract

The pressure sensor comprises a metal shell and an electrical connector extending into the shell, a side wall of the shell is inwardly convex to form a support part for supporting the electrical connector upward, a top part of the shell is inwardly retracted to form a pressing edge for pressing the electrical connector downward, a pressure interface is connected to a lower part of the shell, the pressure interface, the shell and the electrical connector form an installation cavity, a substrate is arranged in the installation cavity, the substrate divides the installation cavity into an upper cavity and a lower cavity, and a first through hole is arranged on the substrate and penetrates the upper and lower sides of the substrate, the lower cavity is connected to the outside of the pressure sensor through a pressure introduction hole arranged on the pressure interface, a pressure chip is sealed to an upper end of the first through hole, and an electronic module assembly is arranged in the upper cavity and electrically connected to the pressure chip and the electrical connection terminal fixed to the electrical connector through a flexible electrical connector.

Description

Technical Field

[0001] This application relates to the field of sensor technology, specifically to a pressure sensor. Background Technology

[0002] In existing technologies, pressure sensors with metal housings, whether using metal diaphragms or semiconductor chips as pressure-sensitive elements, typically also have metal pressure interfaces, which are connected and sealed by welding. For pressure sensors using pressure chips as pressure-sensitive elements, the pressure interfaces and / or housings of these sensors require complex machining on machine tools to meet positioning requirements with other components, such as the pressure sensor disclosed in JP2000074765A. For pressure sensors using metal diaphragms as pressure-sensitive elements, such as US2004007074A1, their pressure interfaces have multiple steps and grooves to achieve stress isolation, positioning, and connection with the container, thus increasing processing costs. Furthermore, electrical connectors and circuit board supports are fixed to the pressure connector by snapping them onto the pressure connector or by the clamping force generated by the riveting part at the upper end of the housing, which is then pressed downwards onto the pressure connector by the pressure ring. This installation method often results in installation stress that can interfere with the measurement of the pressure-sensitive element to some extent. Summary of the Invention

[0003] In view of the shortcomings of the prior art, this application provides a pressure sensor to solve at least one of the above-mentioned defects.

[0004] To achieve the above objectives, this application provides the following technical solution: a pressure sensor, comprising: The metal housing and the electrical connector extending into the housing at the bottom, the side walls of the housing protrude inward to form a support for supporting the electrical connector upward, and the top of the housing tapers inward to form a pressing edge that presses the electrical connector downward. A pressure port is connected to the lower part of the housing; the pressure port, housing, and electrical connector form an installation cavity. The substrate disposed in the mounting cavity divides the mounting cavity into an upper cavity and a lower cavity, and has a first through hole that penetrates the upper and lower sides of the substrate. The lower cavity is connected to the outside of the pressure sensor through a pressure inlet hole provided on the pressure interface. Pressure chip sealed at the upper end of the first via; And an electronic module assembly disposed in the upper cavity, which is electrically connected to the pressure chip and electrically connected to an electrical connection terminal fixed on an electrical connector via a flexible electrical connector.

[0005] The pressure sensor of the present invention does not require additional pressure rings and support components, thus reducing costs and manufacturing complexity, and has no impact on the pressure interface due to installation stress.

[0006] Preferably, the support portion includes at least three point-like support portions spaced apart in the circumferential direction.

[0007] Preferably, the support portion includes a ribbed support portion that extends in a ring shape in the circumferential direction.

[0008] Preferably, the support portion includes at least one point-shaped support portion and at least one rib-shaped support portion distributed at intervals around the perimeter.

[0009] Preferably, the pressure interface includes an integrally connected vertical inner shell, a vertical outer shell, a central connecting plate with its edge connected to the upper end of the inner shell, and an annular plate with its inner edge sealed to the lower end of the inner shell and its outer edge sealed to the lower end of the outer shell, wherein the pressure inlet hole is disposed on the central connecting plate.

[0010] Preferably, the outer shell is extruded with external threads, and a bushing is filled between the inner shell and the outer shell.

[0011] Preferably, the lower end of the shell is welded to the upper end of the outer shell.

[0012] Preferably, a first seal is provided between the pressure edge and the electrical connector. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the pressure sensor according to the first preferred embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the pressure sensor according to the second preferred embodiment of the present invention; Figure 3 A flowchart illustrating a method for manufacturing a pressure sensor according to a second preferred embodiment of the present invention; Explanation of reference numerals in the attached drawings: 01, thin metal sheet; 100, mounting cavity; 10, pressure port; 11a, point support; 11b, pressure edge; 11c, ribbed support; 11, main housing; 12a, external thread; 12, outer shell; 13, support connecting plate; 14, inner shell; 15, ring plate; 16a, pressure inlet hole; 16, center connection; 1, housing; 20, radial clearance; 2, bushing; 30, welding part; 31, positioning part; 3a, first through hole; 3, base plate; 40, pressure... 41. Power chip; 42. Circuit board; 43. Window; 44. Conditioning element; 45. Other electronic components; 46. Flexible electrical connector; 47. Electronic module assembly; 50a. Inner end; 50. Electrical connection terminal; 51. Support flange; 5a. First stepped surface; 5b. Atmospheric vent; 5. Electrical connector; 60. Second sealing ring; 61. First part; 62. Second part; 6a. Internal thread; 6b. Second stepped surface; 6c. Third stepped surface; 6. Relay connector; 7. First seal. Detailed Implementation

[0014] The technical solution of this application will now be clearly and completely described with reference to the accompanying drawings. The following embodiments are exemplary and are only used to explain this application, and should not be construed as limiting this application. In the following description, the same reference numerals are used to denote the same or equivalent elements, and repeated descriptions are omitted.

[0015] In the description of this application, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this application and to simplify the description, and are not intended to indicate or imply that the equipment or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0016] Furthermore, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0017] It should also be further understood that the term "and / or" as used in this application specification and the corresponding claims refers to any combination of one or more of the listed items and all possible combinations.

[0018] like Figure 1 As shown. The pressure sensor of the first preferred embodiment of the present invention includes a housing 1, a pressure interface 10, an electrical connector 5, an electronic module assembly 4, a pressure chip 40, and a substrate 3. The housing 1 is made of a metal material. The electrical connector 5 is made of an insulating material, with its lower end extending into the housing 1. The sidewalls of the housing 1 protrude inward to form a support portion for upward support of the electrical connector 5. The top of the housing 1 tapers inward to form a downward-facing pressing edge 11b that presses against the electrical connector 5. For example, the lower part of the electrical connector 5 can form an upward-facing first stepped surface 5a, with the pressing edge 11b pressing downward against the first stepped surface 5a. More preferably, a first sealing element 7 can be provided between the first stepped surface 5a and the pressing edge 11b to improve their sealing performance. The support portion can be as follows... Figure 1As shown, the device includes at least three point-like support portions 11a spaced apart circumferentially. These point-like support portions 11a can be formed by stamping the sidewall of the housing 1 inwards. By using support portions formed by stamping the sidewall of the housing 1, the pressure ring in the prior art can be omitted, resulting in lower cost. More preferably, the bottom of the electrical connector 5 protrudes downwards to form a supporting flange 51. The downward contact point between the supporting flange 51 and the point-like support portions 11a forms a recessed positioning portion (not shown) that mates with the point-like support portions 11a, thereby achieving circumferential positioning.

[0019] The pressure port 10 includes an integrally connected vertical inner shell 14, a vertical outer shell 12, a central connecting plate 16 with its edge connected to the upper end of the inner shell 14, and an annular plate 15 with its inner edge sealed to the lower end of the inner shell 14 and its outer edge sealed to the lower end of the outer shell 12. A pressure inlet hole 16a is provided on the central connecting plate 16. The inner edge of a support connecting plate 13 is integrally connected to the upper end of the outer shell 12, and its outer edge is integrally connected to the lower end of the housing 1. The inner side of the support connecting plate 13 preferably has a horizontal connecting area to facilitate connection with the base plate 3, or the support connecting plate 13 extends horizontally. The pressure port 10, the housing 1, and the electrical connector 5 form a mounting cavity 100.

[0020] The substrate 3 is disposed within the mounting cavity 100, dividing the mounting cavity 100 vertically into an upper cavity and a lower cavity. A first through-hole 3a is formed on the substrate 3, penetrating both the upper and lower sides. For example, the substrate 3 can be circular, and its edges are sealed by adhesive bonding or welding to a horizontal connecting area around the support connecting plate 13. The lower cavity is connected to the outside of the pressure sensor through a pressure inlet hole 16a provided on the pressure interface 10.

[0021] The pressure chip 40 blocks the upper end of the first through-hole 3a. The electronic module assembly 4 is disposed in the upper cavity and is electrically connected to the pressure chip 40 and electrically connected to an external device via a flexible electrical connector 45 and an electrical connection terminal fixed to an electrical connector 5. For example, the electrical connector 5 is fixed with a plurality of electrical connection terminals 50. The inner end 50a of the electrical connection terminal 50 extends inward into the upper cavity and forms an electrical connection with the end of the flexible electrical connector 45 away from the electronic module assembly 4. The outer end of the electrical connection terminal 50 is located in a thin shell portion (not marked) formed on the electrical connection terminal 50 for mechanical connection with an external device. Exemplarily, the electronic module assembly 4 includes a circuit board 41 with its lower side attached to the upper surface of the substrate 3, a conditioning element 43 disposed on the upper surface of the circuit board 41, and other electronic components 44. The circuit board 41 can be a ceramic circuit board, on which a window 42 communicating with the first through-hole 3a can be opened. The pressure chip 40 is sealed and plugged at the upper end of the window 42, and can be electrically connected to the circuit board 41 through leads, etc. In some other embodiments, the pressure chip 40 can be bonded to the upper surface of the substrate 3, located inside the window 42 and electrically connected to the circuit board 41. The substrate 31 can be made of a material with a low coefficient of thermal expansion, such as metal or ceramic. In some other embodiments, preferably, the electrical connector 5 can also be provided with an atmospheric communication hole 5b to connect the upper cavity with the atmosphere and thus measure the pressure of the medium relative to the atmosphere. One outer end of the atmospheric communication hole 5b extends from the inside of the thin shell, thereby relying on external equipment to form a certain masking effect on the atmospheric communication hole 5b.

[0022] Preferably, the substrate 31 is made of metal and is welded to the housing 1. For example, the inner side of the supporting connecting plate 13 may have at least one horizontal connecting area, and the lower surface of the substrate 3 is fitted and sealed to the horizontal connecting area of ​​the supporting connecting plate 13. The pressure interface 10 can be machined from a block material as in the prior art. More preferably, the housing 1 and the pressure interface 10 are made of a thin metal sheet 01 (see...). Figure 3 It is made by stamping in one piece, and the specific manufacturing method can be found below.

[0023] In some other embodiments, preferably, the lower part of the outer shell 12 is extruded with an external thread 12a. At the same time, in order to facilitate the production of the external thread 12a and improve the rigidity of the pressure interface 10, a bushing 2 can be filled between the inner shell 14 and the outer shell 12.

[0024] Please see Figure 2Based on the first embodiment, the pressure sensor of the second preferred embodiment of the present invention can be further supplemented with a tubular relay connector 6. The upper end of the relay connector 6 is provided with an internal thread 6a that mates with the external thread 12a. More preferably, the relay connector 6 is composed of a first part 61 and a second part 62, with the inner diameter of the first part 61 being larger than the inner diameter of the second part 62, and the outer diameter of the first part 61 being larger than the outer diameter of the second part 62, thereby forming a downward-facing second stepped surface 6b and an upward-facing third stepped surface 6c at the connection. The second stepped surface 6b can be stopped upward by the ring plate 15. A second sealing ring 60 can be fitted at the second stepped surface 6b to prevent leakage of the medium when the second part 62 is connected to a container containing the medium to be measured to introduce the pressure medium to be measured.

[0025] Based on the first embodiment, the support portion of the pressure sensor in the second preferred embodiment may include a ribbed support portion 11c extending circumferentially into an annular shape, or may include at least one point-like support portion 11a and at least one ribbed support portion 11c spaced apart circumferentially, thereby providing upward support for the electrical connector 5. The ribbed support portion 11a may be formed by stamping, and the annular ribbed support portion 11c may be formed by roll forming.

[0026] refer to Figure 3 Taking the pressure sensor shown in the first embodiment as an example, the manufacturing method of the corresponding pressure sensor of the present invention may include: A thin metal sheet 01 is stamped to form an integrally connected housing 1 and pressure interface 10, and a support portion is formed on the side wall of the housing 1. A bushing 2 is filled between the outer shell 12 and the inner shell 14 of the pressure interface 10, and a radial gap 20 is left between the outer wall of the bushing 2 and the inner wall of the inner shell 14. Then, an external thread 12a is extruded and formed on the outer shell 12. At the same time, the pressure chip 40 is sealed at the upper end of the first through hole 3a. The electronic module assembly 4 is connected to the upper surface of the substrate 3 and then electrically connected to the pressure chip 40 through leads.

[0027] The lower surface of the substrate 3 is sealed and welded to the inner surface of the support connecting plate 13 to form a welded portion 30.

[0028] The lower end of the electrical connector 5 is inserted into the housing 1 and supported on the support.

[0029] A pressure edge 11b is formed at the upper end of the housing 1 by pressing and riveting so that the pressure edge 11b faces downward and abuts against the electrical connector 5.

[0030] The radial dimension of the radial clearance 20 is related to the thread height of the external thread 12a. It is used to provide a certain deformation space for the deformation of the outer shell 12 during the extrusion forming of the external thread 12a, so as to facilitate the forming of the external thread 12a. The welded part 30 can be obtained by welding one side of the support connecting plate 13 inward.

[0031] The scope of this disclosure is not limited by the detailed description, but by the claims and their equivalents, and all variations within the scope of the claims and their equivalents are to be included in this disclosure.

Claims

1. A pressure sensor, characterized in that, include: The metal housing (1) and the electrical connector (5) extending into the housing (1) at the lower end, the side wall of the housing (1) protruding inward to form a support for supporting the electrical connector (5) upward, and the top of the housing (1) contracting inward to form a pressing edge (11b) that presses the electrical connector (5) downward. A pressure port (10) is connected to the lower part of the housing (1). The pressure port (10), the housing (1), and the electrical connector (5) form an installation cavity (100). The substrate (3) disposed in the mounting cavity (100) divides the mounting cavity (100) into an upper cavity and a lower cavity, and has a first through hole (3a) that passes through the upper and lower sides of the substrate (3). The lower cavity is connected to the outside of the pressure sensor through a pressure inlet hole (16a) provided on the pressure interface (10). Pressure chip (40) is used to seal the upper end of the first through hole (3a); The electronic module assembly (4) is disposed in the upper cavity, which is electrically connected to the pressure chip (40) and electrically connected to the electrical connection terminal (50) fixed on the electrical connector (5) via a flexible electrical connector (45).

2. The pressure sensor according to claim 1, characterized in that, The support includes at least three point-like support portions (11a) that are spaced apart in the circumferential direction.

3. The pressure sensor according to claim 1, characterized in that, The support includes a ribbed support (11c) that extends in a ring shape in the circumferential direction.

4. The pressure sensor according to claim 1, characterized in that, The support includes at least one point-shaped support (11a) and at least one rib-shaped support (11c) distributed circumferentially.

5. The pressure sensor according to claim 1, characterized in that, The pressure port (10) includes an integrally connected vertical inner shell (14), a vertical outer shell (12), a central connecting plate (16) with its edge connected to the upper end of the inner shell (14), and an annular plate (15) with its inner edge sealed to the lower end of the inner shell (14) and its outer edge sealed to the lower end of the outer shell (12). The pressure inlet hole (16a) is provided on the central connecting plate (16).

6. The pressure sensor according to claim 1, characterized in that, The outer shell (12) is extruded with external threads (12a), and a bushing (2) is filled between the inner shell (14) and the outer shell (12).

7. The pressure sensor according to claim 1, characterized in that, The lower end of the shell (1) is welded to the upper end of the outer shell (12).

8. The pressure sensor according to claim 1, characterized in that, A first seal (7) is provided between the pressure edge (11b) and the electrical connector (5).

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