A sample stage for a focused ion beam dual beam system

Abstract

The application belongs to the technical field of ion beam cutting equipment, and particularly relates to a sample bearing table for a focused ion beam double-beam system, which comprises a sample table, four sample grooves arranged symmetrically about the center of the sample table and used for bearing samples, and a plurality of sample raw materials can be placed in the sample grooves through the plurality of sample grooves arranged on the surface of the sample table. After the sample raw materials are placed, in order to adapt to the multi-angle rotating action in the sample preparation process, the sample raw materials in the sample grooves are tightly pressed by fastening screws, so that effective fixing effect can be provided for the sample raw materials in the sample preparation process, the sample raw materials can be rotated at multiple angles, and the sample raw materials will not be separated from the sample table due to gravity. Since the sample table can simultaneously bear a plurality of sample raw materials, the number of vacuum breaking of the equipment can be reduced, the influence on the vacuum environment of the equipment can be reduced, and the imaging quality in the sample preparation process can be improved.

Description

Technical Field

[0001] This invention belongs to the technical field of ion beam cutting equipment, specifically a sample support stage for a focused ion beam dual-beam system. Background Technology

[0002] Focused ion beam (FIB) technology is a micro-cutting instrument that uses an electric lens to focus an ion beam into an extremely small size. It has long been an important sample preparation method in the field of materials science, and an increasing number of material samples require the use of this instrument. Currently, commercially available ion beams use liquid-phase metal ion sources, with gallium (Ga) as the metal source. In a typical ion beam microscope, the external electric field (suppressor) and the liquid-phase metal ion source allow liquid gallium to form a fine tip. The negative electric field (extractor) then pulls the gallium ion beam from this tip. Under normal operating voltage, the tip current density is approximately 1 angstrom × 10-1. -8 Amp / cm2, focused by an electric lens, the size of the ion beam is determined by a series of varying apertures, and then refocused onto the sample surface, using physical collision to cut the sample.

[0003] Whether preparing samples for transmission electron microscopy (TEM) or atomic probe microscopy (APM), the key issue remains: "how to place the material into the ion beam terminal to achieve sample preparation on the sample surface." In general, ordinary conductive adhesives are sufficient to meet the sample fixation requirements. Conductive adhesives are a type of adhesive that possesses both conductive and adhesive properties; they can connect multiple conductive materials together, creating an electrical pathway between the connected materials.

[0004] However, the following problems exist when conducting research on sample preparation using focused ion beams:

[0005] 1. The bonding strength of conductive adhesive is affected by factors such as the surface smoothness and contact area of ​​the sample material, and cannot meet the bonding requirements of small needle tip sample materials.

[0006] 2. The sample stage should be able to carry multiple sample materials or sample material devices in one feeding to minimize the number of vacuum breaks in the equipment and improve work efficiency.

[0007] 3. Sample material is placed into the equipment. During the sample preparation process, the sample material needs to be rotated at multiple angles. During this process, the sample material itself will be affected by gravity. Relying solely on conductive adhesive will greatly increase the risk of the sample material falling off.

[0008] 4. The sample stage should be able to hold multiple types of sample materials, so that one sample stage can solve most sample preparation problems.

[0009] Therefore, the present invention provides a sample stage for a focused ion beam dual-beam system. Summary of the Invention

[0010] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0011] The technical solution adopted by this invention to solve its technical problem is: a sample support stage for a focused ion beam dual-beam system, comprising:

[0012] Sample stage;

[0013] Four sample slots are located at the center of the sample stage to hold the sample, and the four sample slots are arranged symmetrically about the center of the sample stage.

[0014] Four screw slots are provided on the side wall of the sample stage, and each of the four screw slots is connected to the corresponding sample slot.

[0015] The fastening screw is threaded into the screw slot, and the tightening direction of the fastening screw is perpendicular to the direction of the sample slot.

[0016] The outer edge of the sample stage is also provided with a second external thread for screwing the sample stage thread into the sample stage base.

[0017] Preferably, the fastening screw consists of a cone head, a connecting rod, and a guide plate; the cone head extends out of the screw slot, and the connecting rod is fixed to the cone head and the guide plate; the guide plate faces the sample slot; and a ramp is provided at the connection between the connecting rod and the cone head and the guide plate.

[0018] Preferably, the sample stage includes a top cover and a base; the top cover and the base are threaded together; the inner side of the top cover is provided with an internal thread; the surface of the base is provided with concentrically arranged pedestals, and the outer edge of the pedestals is provided with a first external thread; the internal thread and the first external thread are engaged; the surface of the base is provided with a limiting groove, and a limiting rod is movably connected in the limiting groove; the top of the limiting rod is slidably engaged with the bottom surface of the top cover, and the bottom of the limiting rod is slidably engaged with a fastening screw.

[0019] Preferably, a third spring is also sleeved on the outside of the limiting rod, and the third spring is located in the limiting groove.

[0020] Preferably, the bottom of the top cover is provided with an arc-shaped groove, and the depth of one end of the groove is greater than the depth of the other end of the groove, and the two ends of the groove are smoothly transitioned; the limiting rod is slidably connected in the groove.

[0021] Preferably, the connecting rod has a movable groove at one end facing the sample slot, and the movable groove passes through the guide plate; a first abutting rod is slidably connected in the movable groove, and a first spring is fixed between the first abutting rod and the guide plate, with the first spring sleeved on the first abutting rod.

[0022] Preferably, a through hole is provided at the center of the sample stage along the direction of the screw groove, and a third abutment rod is slidably connected in the through hole; four through holes and four third abutment rods are provided; the third abutment rods are arranged coaxially with the fastening screws and are respectively arranged at both ends of the sample groove.

[0023] Preferably, the bottom of the sample stage is provided with an arc groove, and a through hole parallel to the sample groove is provided at the center of the arc groove; a second abutment rod is connected through the through hole, and a second spring is sleeved on the second abutment rod; the two ends of the second spring are respectively connected to the arc groove and the second abutment rod; the opposite ends of the four third abutment rods are provided with inclined surfaces, and the top of the second abutment rod slides in cooperation with the inclined surfaces on the third abutment rods.

[0024] Preferably, the top of the second abutment rod is threaded with a six-headed screw, and the six-headed screw is slidably connected in the through hole.

[0025] Preferably, the sample stage and fastening screws are made of hard copper alloy, and the side wall of the sample groove is provided with serrations for anti-slip after the sample is fixed.

[0026] The beneficial effects of this invention are as follows:

[0027] 1. The sample stage for a focused ion beam dual-beam system described in this invention can accommodate multiple sample materials by setting multiple sample slots on the sample stage surface. After the sample materials are placed, fastening screws are used to hold the sample materials in the sample slots in place to accommodate multi-angle rotation during sample preparation. This provides an effective fixation effect for the sample materials during sample preparation, allowing them to rotate at multiple angles without detaching from the sample stage due to gravity. Since the sample stage can simultaneously support multiple sample materials, it reduces the number of times the vacuum is broken in the equipment, minimizes the impact on the equipment's vacuum environment, and improves the imaging quality during sample preparation.

[0028] 2. The sample carrier stage for a focused ion beam dual-beam system described in this invention, by setting the fastening screw as a cone head, connecting rod and guide plate, eliminates the need to immediately screw in the fastening screw after the sample material is placed in the sample tank. Instead, the entire sample stage can be placed into the sample stage base after the sample material is placed in the sample tank. The cone head contacts the side wall of the sample stage base, causing the cone head to retract inward into the screw groove. At the same time, the connecting rod and guide plate retract inward. The guide plate, which is retracted in the screw groove, presses against the sample material in the sample tank, thereby fixing the sample material.

[0029] 3. The sample carrier stage for a focused ion beam dual-beam system described in this invention has a limiting groove with a through screw groove on the base, and a limiting plate is movably connected in the limiting groove. When the top cover and the base are threaded together, the limiting rod can be squeezed, and the bottom of the limiting rod can squeeze the cone head, so that the cone head continues to move towards the sample tank. This causes the cone head to drive the connecting rod and the guide plate to continue to move towards the sample tank, thereby further squeezing the sample material and ensuring that the sample material is fully pressed against the sample tank.

[0030] 4. The sample support stage for a focused ion beam dual-beam system described in this invention involves screwing a top cover onto a base and inserting a limiting rod into one end of a sliding groove. The sliding groove effectively limits the position of the limiting rod. As the top cover rotates, the limiting rod moves from one end of the sliding groove to the other. Since the depth of one end of the sliding groove is greater than the depth of the other end, and the limiting rod is initially located at the deeper end of the sliding groove, as the sliding groove displaces relative to the limiting rod, the limiting rod is gradually compressed downwards with the change in the depth of the sliding groove. This allows the bottom of the limiting rod to compress the cone head towards the sample groove, thereby achieving a further compression effect on the sample material and improving the fixation of the sample material. Attached Figure Description

[0031] The invention will now be further described with reference to the accompanying drawings.

[0032] Figure 1 This is a perspective view of Embodiment 1 of the present invention;

[0033] Figure 2 This is a partial perspective view of Embodiment 1 of the present invention;

[0034] Figure 3 This is a top view of Embodiment 2 of the present invention;

[0035] Figure 4 yes Figure 3 A cross-sectional view of position AA;

[0036] Figure 5 This is a perspective view of the top cover in Embodiment 2 of the present invention;

[0037] Figure 6 This is a side view of the base in Embodiment 2 of the present invention;

[0038] Figure 7 yes Figure 6 A cross-sectional view at BB;

[0039] Figure 8 This is a perspective view of the fastening screw in Embodiment 2 of the present invention;

[0040] Figure 9 This is a diagram showing the connection between the third abutting rod and the second abutting rod in Embodiment 2 of the present invention;

[0041] In the picture:

[0042] 1. Sample stage;

[0043] 11. Top cover; 111. Slide groove; 112. Internal thread;

[0044] 12. Base; 121. Platform; 122. First external thread; 123. Second external thread; 124. Through hole; 125. Arc groove; 126. Limiting groove; 127. Through hole;

[0045] 2. Fastening screw; 21. Conical head; 22. Connecting rod; 23. Guide plate; 24. Movable groove;

[0046] 3. Sample well; 4. Screw well;

[0047] 5. First abutment rod; 51. First spring;

[0048] 6. Second abutment rod; 61. Second spring; 62. Hexagonal screw;

[0049] 7. Third abutment rod; 71. Inclined surface;

[0050] 8. Limiting rod; 81. Third spring. Detailed Implementation

[0051] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0052] Example 1:

[0053] like Figures 1 to 2 As shown in the embodiment of the present invention, a sample stage for a focused ion beam dual-beam system includes:

[0054] Sample stage 1;

[0055] Four sample slots 3 are located at the center of the sample stage 1 to hold the sample, and the four sample slots 3 are arranged symmetrically about the center of the sample stage 1.

[0056] Four screw slots 4 are formed on the side wall of the sample stage 1, and the four screw slots 4 are respectively connected to the corresponding sample slots 3.

[0057] The fastening screw 2 is threaded into the screw groove 4, and the tightening direction of the fastening screw 2 is perpendicular to the direction of the sample groove 3.

[0058] The outer edge of the sample stage 1 is also provided with a second external thread 123, which is used to screw the sample stage 1 into the sample stage base.

[0059] In the sample preparation process, to address the issues of low adaptability and limited fixation effect of conductive adhesive, and the fact that the current sample stage 1 can only hold one sample material, requiring multiple placement steps when preparing multiple samples, which affects the vacuum environment of the equipment and thus impacts the imaging effect of the samples, the sample carrier stage provided by this invention, in use, can accommodate multiple sample materials by setting multiple sample slots 3 on the surface of the sample stage 1. After the sample material is placed, in order to accommodate the multi-angle rotation during the sample preparation process, fastening screws 2 are used to clamp the sample material in the sample slots 3, thereby providing an effective fixation effect for the sample during the sample preparation process, allowing the sample material to rotate at multiple angles without detaching from the sample stage 1 due to gravity.

[0060] In one embodiment of the present invention, the sample stage 1 has a diameter of 28 mm and a height of 5.5 mm; the sample stage 1 is used to load needle-tip samples with a diameter of less than 3.2 mm.

[0061] Specific usage steps:

[0062] First, multiple different types of sample materials are placed sequentially in different sample slots 3. Then, the fastening screws 2 are screwed in one by one by hand, so that the fastening screws 2 gradually approach and press against the sample materials in the sample slots 3, thereby pressing the sample materials against the sample stage 1. When all sample materials are fixed on the sample stage 1, the sample stage 1 is screwed into the sample stage base by hand using the second external thread 123, thus completing the support of multiple sample materials. When preparing multiple samples, since the sample stage 1 can support multiple sample materials at the same time, it can reduce the number of times the vacuum is broken in the equipment, reduce the impact on the vacuum environment of the equipment, and improve the imaging quality during the sample preparation process. Secondly, the screw slots 4 perpendicular to the sample slots 3 are used to fix the sample materials by screwing in the fastening screws 2. Compared with the existing conductive adhesive bonding of sample materials, the fixation effect of sample materials is better.

[0063] like Figures 3 to 4 , Figure 8 As shown, the fastening screw 2 consists of a cone head 21, a connecting rod 22, and a guide plate 23; the cone head 21 extends out of the screw groove 4, and the connecting rod 22 is fixed to the cone head 21 and the guide plate 23; the guide plate 23 faces the sample groove 3; a ramp is provided at the connection between the connecting rod 22 and the cone head 21 and the guide plate 23.

[0064] Since the sample stage 1 needs to be repeatedly operated after carrying multiple sample materials and then fixed by multiple fastening screws 2, which affects the sample preparation efficiency to a certain extent, the fastening screw 2 provided by the present invention can also be composed of a cone head 21, a connecting rod 22 and a guide plate 23. In specific use, it is not necessary to screw the fastening screw 2 in immediately after the sample material is placed in the sample slot 3. Instead, the sample stage 1 can be placed directly into the sample stage base after the sample material is placed in the sample slot 3. The cone head 21 contacts the side wall of the sample stage base, causing the cone head 21 to retract inward into the screw slot 4. At the same time, the connecting rod 22 and the guide plate 23 retract inward. The guide plate 23, which is retracted in the screw slot 4, presses against the sample material in the sample slot 3, thereby fixing the sample material.

[0065] It is worth noting that the sample stage base is provided with a groove that matches the sample stage 1, and the side wall of the groove is provided with a thread that matches the second external thread 123. After the sample stage base is placed in the groove, the sample stage 1 can be manually rotated to tighten the sample stage 1 with the sample stage base thread.

[0066] like Figures 3 to 4 As shown, the sample stage 1 includes a top cover 11 and a base 12; the top cover 11 and the base 12 are threaded together; the inner side of the top cover 11 is provided with an internal thread 112; the surface of the base 12 is provided with a concentrically arranged platform 121, and the outer edge of the platform 121 is provided with a first external thread 122; the internal thread 112 and the first external thread 122 are engaged; the surface of the base 12 is provided with a limiting groove 126, and a limiting rod 8 is movably connected in the limiting groove 126; the top of the limiting rod 8 is slidably engaged with the bottom surface of the top cover 11, and the bottom of the limiting rod 8 is slidably engaged with the fastening screw 2.

[0067] Since the displacement stroke of the connecting rod 22 and the guide plate 23 driven by the compression of the cone 21 after the sample stage 1 is placed in the sample stage base is limited, the fixing effect on the sample material is limited. In order to compensate for the fixing effect on the sample material and make the sample material fully pressed, the sample stage 1 provided by the present invention is divided into a top cover 11 and a base 12, and a limiting groove 126 with a through screw groove 4 is opened on the base 12. At the same time, a limiting plate is movably connected in the limiting groove 126. When the top cover 11 and the base 12 are threadedly engaged, the limiting rod 8 can be squeezed, and the bottom of the limiting rod 8 can be used to squeeze the cone 21, so that the cone 21 continues to move towards the sample groove 3. This causes the cone 21 to drive the connecting rod 22 and the guide plate 23 to continue to move towards the sample groove 3, thereby further squeezing the sample material and making the sample material fully pressed in the sample groove 3.

[0068] Specific usage steps:

[0069] When the sample material is placed in the sample tank 3 and the base 12 is manually placed into the sample stage base, the sample stage base squeezes the cone 21, causing the cone 21, connecting rod 22, and guide plate 23 to move towards the sample tank 3. This achieves initial compression of the sample in the sample tank 3, thus initially fixing the sample material. At this time, the cone 21 retracts into the screw slot 4, and due to the slope between the cone 21 and the connecting rod 22, the limiting rod 8 can be squeezed upward. Then, the bottom of the limiting rod 8 falls on the inclined wall of the cone 21. Subsequently, the top cover 11 is screwed onto the surface of the base 12 by hand. The rotating top cover 11 gradually squeezes the limiting rod 8 downward. At this time, the bottom of the limiting rod 8 will gradually squeeze the cone 21 towards the sample tank 3, causing the connecting rod 22 and guide plate 23 to further press against the sample material towards the sample tank 3.

[0070] like Figure 4 As shown, a third spring 81 is also sleeved on the outside of the limiting rod 8, and the third spring 81 is located in the limiting groove 126.

[0071] Since the limiting rod 8 will move in the limiting groove 126 when it slides with the cone 21, connecting rod 22 and guide plate 23, in order to keep the bottom of the limiting rod 8 in contact with the cone 21, connecting rod 22 or guide plate 23, in one embodiment of the present invention, a third spring 81 is sleeved on the limiting rod 8. When the limiting rod 8 produces axial displacement, the third spring 81 can be used to keep the bottom of the limiting rod 8 always in contact with the surface of the cone 21, connecting rod 22 or guide plate 23.

[0072] like Figure 5 As shown, the bottom of the top cover 11 is also provided with an arc-shaped sliding groove 111, and the depth of one end of the sliding groove 111 is greater than the depth of the other end of the sliding groove 111, and the two ends of the sliding groove 111 are smoothly transitioned; the limiting rod 8 is slidably connected in the sliding groove 111.

[0073] When the cone head 21 is compressed and retracts into the screw groove 4, the limiting rod 8 will contact the cone head 21 and displace. At this time, the top cover 11 is screwed onto the base 12, and the bottom surface of the top cover 11 and the top of the limiting rod 8 will compress each other, thereby driving the limiting rod 8 to move downward along the axial direction and compressing the cone head 21. In one embodiment of the present invention, when the top cover 11 is screwed onto the base 12, the limiting rod 8 is inserted into one end of the slide groove 111. The slide groove 111 can limit the limiting rod 8. Then, when the top cover 11 rotates... When in motion, the limiting rod 8 moves from one end of the slide groove 111 to the other end. Since the depth of one end of the slide groove 111 is greater than the depth of the other end, and the limiting rod 8 is initially located at the deeper end of the slide groove 111, when the slide groove 111 is displaced relative to the limiting rod 8, the limiting rod 8 will be gradually squeezed downward as the depth of the slide groove 111 changes. This allows the bottom of the limiting rod 8 to squeeze the cone 21 towards the sample groove 3, thereby achieving a further squeezing effect on the sample material and a better fixation effect on the sample material.

[0074] like Figures 3 to 4 , Figures 6 to 7 As shown, the connecting rod 22 is provided with a movable groove 24 at one end facing the sample groove 3, and the movable groove 24 passes through the guide plate 23; a first abutting rod 5 is slidably connected in the movable groove 24, and a first spring 51 is fixed between the first abutting rod 5 and the guide plate 23, and the first spring 51 is sleeved on the first abutting rod 5.

[0075] Since the length of the fastening screw 2 is fixed, the same displacement stroke may cause excessive pressure on the sample material or failure to contact the sample material, resulting in inconsistent fixing effect of the sample material. The connecting rod 22 provided by the present invention is provided with a movable groove 24 at its end, and a first abutting rod 5 is provided in the movable groove 24. When the connecting rod 22 is displaced, it can drive the first abutting rod 5 to contact the sample, thereby using the connecting rod 22 to squeeze the first spring 51, so that the first spring 51 exerts a force on the first abutting rod 5, and using this force to indirectly press the sample material, avoiding excessive pressure on the sample material or failure to contact the sample material.

[0076] Specific usage steps:

[0077] When the cone 21 moves the connecting rod 22 and the guide plate 23 toward the sample groove 3, it can simultaneously move the first abutting rod 5 and the first spring 51 toward the sample groove 3. After a certain displacement, the first abutting rod 5 abuts against the sample material. As the limiting rod 8 squeezes the cone 21, the connecting rod 22 continues to move toward the sample groove 3, causing the first spring 51 to be squeezed and generate greater elastic potential energy, thereby generating a greater force on the first abutting rod 5. This allows the first abutting rod 5 to exert a greater force on the sample. Since the first spring 51 is an elastic medium, it will not excessively press against the sample material. After the first abutting rod 5 contacts the sample material, due to the presence of the first spring 51, the connecting rod 22 can also ensure that the sample material is pressed against it as it continues to move toward the sample groove 3.

[0078] Example 2:

[0079] like Figure 4 , Figure 7 , Figure 9 As shown, a through hole 127 is also provided in the center of the sample stage 1 along the direction of the screw groove 4, and a third abutment rod 7 is slidably connected in the through hole 127; four through holes 127 and four third abutment rods 7 are provided; the third abutment rods 7 are arranged coaxially with the fastening screw 2 and are respectively arranged at both ends of the sample groove 3.

[0080] Since the fastening screw 2 fixes the sample material in one direction, when the fastening screw 2 moves toward the sample groove 3, it can apply a one-way squeezing effect to the sample material, so that the sample material is in close contact with the side wall of the sample groove 3. The radial pressure increases the friction between the sample material and the sample groove 3, so that the sample material can be stably fixed in the sample groove 3. However, the one-way squeezing effect is still limited in fixing the sample material. The sample stage 1 provided by the present invention is also provided with a third abutment rod 7 at its center. In this embodiment, the third abutment rod 7 cooperates with the first abutment rod 5 to apply force to both sides of the sample material, thereby improving the fixing effect of the sample material.

[0081] like Figure 4 , Figure 7 , Figure 9 As shown, the bottom of the sample stage 1 is also provided with an arc groove 125, and the center of the arc groove 125 is provided with a through hole 124 parallel to the sample groove 3; a second abutment rod 6 is connected through the through hole 124, and a second spring 61 is sleeved on the second abutment rod 6; the two ends of the second spring 61 are respectively connected to the arc groove 125 and the second abutment rod 6; the opposite ends of the four third abutment rods 7 are provided with inclined surfaces 71, and the top of the second abutment rod 6 slides in cooperation with the inclined surfaces 71 on the third abutment rod 7.

[0082] When the first abutting rod 5 and the third abutting rod 7 work together to press against both sides of the sample material, in order to enable the third abutting rod 7 to move synchronously towards the sample groove 3 and increase the pressure of the third abutting rod 7 on the sample material, so as to make the sample material fixation effect better, the second abutting rod 6 provided by the present invention is used when the operator places the base 12 in the sample stage base. The second abutting rod 6 located at the bottom of the arc groove 125 is squeezed and displaced axially upward. At this time, the top of the second abutting rod 6 will squeeze the inclined surface 71 of the third abutting rod 7, and cause the four third abutting rods 7 to move towards the sample groove 3. Together with the first abutting rod 5 facing the sample groove 3, pressure can be applied to both sides of the sample material, so as to make the sample material fixation effect better.

[0083] like Figure 4 , Figure 9 As shown, the top of the second abutment rod 6 is threaded with a six-headed screw 62, and the six-headed screw 62 is slidably connected in the through hole 124.

[0084] The second abutment rod 6 is movably connected to the bottom of the arc groove 125. In order to prevent the second abutment rod 6 from detaching from the base 12, in one embodiment of the present invention, a hexagonal screw 62 is threadedly connected to the top of the second abutment rod 6. By using the fixation of the hexagonal screw 62 and the second abutment rod 6, in conjunction with the partition set in the middle of the through hole 124, the hexagonal screw 62 is restricted from detaching from the base 12 from the bottom of the through hole 124, thus preventing the second abutment rod 6 from detaching from the base 12. Correspondingly, when it is necessary to remove the second abutment rod 6, it is only necessary to separate the hexagonal screw 62 from the second abutment rod 6, and then remove the hexagonal screw 62 and the second abutment rod 6 from the top and bottom of the through hole 124 respectively.

[0085] like Figures 1 to 2 As shown, the sample stage 1 and the fastening screw 2 are both made of hard copper alloy, and the sample groove 3 has serrations on its side wall for anti-slip after the sample is fixed.

[0086] Working principle: First, multiple different types of sample materials are placed in different sample slots 3 in sequence. Then, the fastening screws 2 are screwed in one by one, so that the fastening screws 2 gradually approach and press against the sample materials in the sample slots 3, thereby pressing the sample materials against the sample stage 1. When all the sample materials are fixed on the sample stage 1, the sample stage 1 is screwed into the sample stage base by the second external thread 123, thus completing the support of multiple sample materials. When preparing multiple sample materials, since the sample stage 1 can support multiple sample materials at the same time, it can reduce the number of vacuum breaking operations of the equipment, reduce the impact on the vacuum environment of the equipment, and improve the imaging quality during the sample preparation process. Secondly, the screw slots 4 perpendicular to the sample slots 3 are used to fix the sample materials by screwing in the fastening screws 2. Compared with the existing conductive adhesive bonding of samples, the fixation effect of the sample materials is better.

[0087] Since the sample stage 1 needs to be repeatedly operated after carrying multiple sample materials and then fixed by multiple fastening screws 2, which affects the preparation efficiency of the sample materials to a certain extent, the fastening screw 2 provided by the present invention can also be composed of a cone head 21, a connecting rod 22 and a guide plate 23. In specific use, it is not necessary to screw the fastening screw 2 in immediately after the sample material is placed in the sample slot 3. Instead, the sample stage 1 can be placed directly into the sample stage base after the sample material is placed in the sample slot 3. The cone head 21 contacts the side wall of the sample stage base, causing the cone head 21 to retract inward into the screw slot 4. At the same time, the connecting rod 22 and the guide plate 23 retract inward. The guide plate 23, which is retracted in the screw slot 4, presses against the sample in the sample slot 3, thereby fixing the sample material.

[0088] When the sample material is placed in the sample slot 3 and the base 12 is manually placed into the sample stage base, the sample stage base compresses the cone 21, causing the cone 21, connecting rod 22, and guide plate 23 to move towards the sample slot 3. This achieves initial compression of the sample material in the sample slot 3, thus initially fixing the sample material. At this time, the cone 21 retracts into the screw slot 4, and due to the slope between the cone 21 and the connecting rod 22, the limiting rod 8 can be compressed and displaced upwards. Subsequently, the bottom of the limiting rod 8 rests on the inclined wall of the cone 21. Then, the top cover 11 is manually screwed onto the surface of the base 12. The rotating top cover 11 gradually compresses the limiting rod 8 downwards. At this time, the bottom of the limiting rod 8 gradually compresses the cone 21 towards the sample slot 3, causing the connecting rod 22 and guide plate 23 to further press against the sample material towards the sample slot 3. When the cone 21 is compressed and retracts into the screw slot 4, the limiting rod 8 will contact the cone 21 and... Displacement occurs, and the top cover 11 is screwed onto the base 12. The bottom surface of the top cover 11 and the top of the limiting rod 8 are pressed together, thereby driving the limiting rod 8 to move downward along the axial direction and pressing the cone 21. In one embodiment of the present invention, when the top cover 11 is screwed onto the base 12, the limiting rod 8 is inserted into one end of the slide groove 111. The slide groove 111 can limit the limiting rod 8. Then, when the top cover 11 rotates, the limiting rod 8 moves from one end of the slide groove 111 to the other end. Since the depth of one end of the slide groove 111 is greater than the depth of the other end, and the limiting rod 8 is initially located at the deeper end of the slide groove 111, when the slide groove 111 is displaced relative to the limiting rod 8, the limiting rod 8 will be gradually pressed downward as the depth of the slide groove 111 changes, so that the bottom of the limiting rod 8 can press the cone 21 to move towards the sample groove 3, thereby achieving a further pressing effect on the sample material and a better fixation effect on the sample material.

[0089] Furthermore, when the cone 21 drives the connecting rod 22 and the guide plate 23 to move towards the sample groove 3, it can simultaneously drive the first abutting rod 5 and the first spring 51 to move towards the sample groove 3. After a certain displacement, the first abutting rod 5 abuts against the sample material. As the limiting rod 8 squeezes the cone 21, the connecting rod 22 continues to move towards the sample groove 3, causing the first spring 51 to be squeezed and generate greater elastic potential energy, thereby generating a greater force on the first abutting rod 5. This allows the first abutting rod 5 to exert a greater force on the sample material. Since the first spring 51 is an elastic medium, it will not excessively press against the sample material. After the first abutting rod 5 contacts the sample material, due to the presence of the first spring 51, when the connecting rod 22 continues to move towards the sample groove 3, it can also ensure that the sample material is pressed firmly.

[0090] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A sample stage for a focused ion beam dual-beam system, comprising: Sample stage (1); Four sample slots (3) are located at the center of the sample stage (1) to hold the sample, and the four sample slots (3) are arranged symmetrically about the center of the sample stage (1). Four screw slots (4) are provided on the side wall of the sample stage (1), and the four screw slots (4) are respectively connected to the corresponding sample slots (3); The fastening screw (2) is threaded in the screw groove (4), and the tightening direction of the fastening screw (2) is perpendicular to the direction of the sample groove (3); The feature is that: the outer edge of the sample stage (1) is also provided with a second external thread (123) for screwing the sample stage (1) into the sample stage base; The fastening screw (2) consists of a cone head (21), a connecting rod (22), and a guide plate (23); the cone head (21) extends out of the screw groove (4), and the connecting rod (22) is fixed to the cone head (21) and the guide plate (23); the guide plate (23) faces the sample groove (3); a ramp is provided at the connection between the connecting rod (22) and the cone head (21) and the guide plate (23); The sample stage (1) includes a top cover (11) and a base (12); the top cover (11) and the base (12) are threaded together; the inner side of the top cover (11) is provided with an internal thread (112); the surface of the base (12) is provided with a concentrically arranged platform (121), and the outer edge of the platform (121) is provided with a first external thread (122); the internal thread (112) and the first external thread (122) are engaged; the surface of the base (12) is provided with a limiting groove (126), and a limiting rod (8) is movably connected in the limiting groove (126); the top of the limiting rod (8) is slidably engaged with the bottom surface of the top cover (11), and the bottom of the limiting rod (8) is slidably engaged with the fastening screw (2); A third spring (81) is also sleeved on the outside of the limiting rod (8), and the third spring (81) is located in the limiting groove (126); The bottom of the top cover (11) is also provided with an arc-shaped sliding groove (111), and the depth of one end of the sliding groove (111) is greater than the depth of the other end of the sliding groove (111), and the two ends of the sliding groove (111) are smoothly transitioned; the limiting rod (8) is slidably connected in the sliding groove (111); The connecting rod (22) is provided with a movable groove (24) at one end facing the sample groove (3), and the movable groove (24) passes through the guide plate (23); a first abutting rod (5) is slidably connected in the movable groove (24), and a first spring (51) is fixed between the first abutting rod (5) and the guide plate (23), and the first spring (51) is sleeved on the first abutting rod (5).

2. The sample stage for a focused ion beam dual-beam system according to claim 1, characterized in that: The sample stage (1) is provided with a through hole (127) along the direction of the screw groove (4) and a third abutment rod (7) is slidably connected in the through hole (127); four through holes (127) and four third abutment rods (7) are provided; the third abutment rod (7) is arranged coaxially with the fastening screw (2) and is arranged at both ends of the sample groove (3).

3. A sample stage for a focused ion beam dual-beam system according to claim 2, characterized in that: The bottom of the sample stage (1) is provided with an arc groove (125), and the center of the arc groove (125) is provided with a through hole (124) parallel to the sample groove (3); a second abutment rod (6) is connected through the through hole (124), and a second spring (61) is sleeved on the second abutment rod (6); the two ends of the second spring (61) are respectively connected to the arc groove (125) and the second abutment rod (6); the opposite ends of the four third abutment rods (7) are provided with inclined surfaces (71), and the top of the second abutment rod (6) slides in cooperation with the inclined surface (71) on the third abutment rod (7).

4. A sample stage for a focused ion beam dual-beam system according to claim 3, characterized in that: The top of the second abutment rod (6) is threaded with a six-headed screw (62), and the six-headed screw (62) is slidably connected in the through hole (124).

5. A sample stage for a focused ion beam dual-beam system according to claim 1, characterized in that: The sample stage (1) and fastening screws (2) are made of hard copper alloy, and the side wall of the sample groove (3) is provided with serrations for anti-slip after the sample is fixed.

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