Control device and method for alternately switching operating states of two processing devices

Abstract

The application discloses a control device and method for controlling two processing devices to alternately switch operation states. The two processing devices alternately operate to treat waste gas generated in semiconductor processing. Two pipelines respectively deliver the waste gas to the processing devices. Two electric heating units respectively provide heat energy to the pipelines. The control device comprises a man-machine interface controller, a programmable controller and a signal transmission port. The programmable controller controls the timing of each shutoff valve and each electric heating unit, so that each electric heating unit is selectively loaded or unloaded, the power consumption of the electric heating unit in a backup state is reduced, and the overall carbon emission is reduced.

Description

Technical Field

[0001] This invention relates to a treatment device for waste gas generated during semiconductor manufacturing processes, and more particularly to a control device and method for controlling the alternating operation of two treatment devices. Background Technology

[0002] Waste gas generated during semiconductor manufacturing must be treated to meet standards by appropriate waste gas treatment equipment before it can be discharged or reused. The treatment device can be a local scrubber (LSC). A process device performs the semiconductor manufacturing process, and waste gas is generated during the operation of the process device. The treatment device needs to be shut down to remove the substances trapped in the waste gas or to perform equipment maintenance. In order to avoid the shutdown of the treatment device affecting the semiconductor manufacturing process, two treatment devices are configured to correspond to the process device. When one treatment device is shut down to remove the trapped substances or to perform equipment maintenance, the other treatment device is running to treat the waste gas. The treatment devices alternate between operation and shutdown, and the continuous execution of the semiconductor manufacturing process is not limited by the shutdown of each treatment device.

[0003] The two pipelines are connected to the process equipment, and each pipeline is connected to a processing equipment, so that the waste gas generated by the process equipment is transmitted to a processing equipment connected to the selected pipeline.

[0004] Based on the need to transport waste gas with specific substances or properties, each pipeline used for transporting waste gas needs to be maintained within a corresponding temperature range to prevent the components of the waste gas from depositing inside the pipelines and blocking them as the waste gas flows through them. Therefore, two electric heating units are used to provide heat energy to each pipeline. Each electric heating unit includes several electric heating tapes and a temperature control device. Each electric heating tape is arranged sequentially along its configured pipeline. The temperature control device is coupled to each electric heating tape, senses the temperature of each electric heating tape, and controls the current passing through each electric heating tape accordingly based on the sensed temperature, thereby controlling the heat energy generated by each electric heating tape to maintain the temperature of each pipeline.

[0005] For ease of distinction, one of the two processing devices that alternately operate and shut down is defined as the first processing device, and the other processing device is defined as the second processing device. The pipeline connecting the first processing device and the process equipment is defined as the first pipeline, and the electric heating unit configured corresponding to the first pipeline is defined as the first electric heating unit. The pipeline connecting the second processing device and the process equipment is defined as the second pipeline, and the electric heating unit configured corresponding to the second pipeline is defined as the second electric heating unit.

[0006] The first processing equipment, which is in a shutdown state, is switched to an operating state, replacing the second processing equipment, which is in an operating state, to process the waste gas generated by the process equipment. This allows the second processing equipment to be shut down to remove the substances it traps or to perform equipment maintenance. At this time, the waste gas flows to the first processing equipment through the first pipeline and cannot flow through the second pipeline. However, the second electric heating unit still maintains a power supply to its electric heating tape, and the second pipeline maintains a temperature range that meets the requirements for transporting the waste gas. This results in unnecessary consumption of electrical energy and is not conducive to overall carbon emissions. Summary of the Invention

[0007] The main objective of this invention is to provide a control device and method for controlling the alternating operation of two processing devices.

[0008] To achieve the above objectives, the present invention adopts the following technical solution.

[0009] A control device for controlling the alternating operation of two processing devices, wherein the two processing devices alternately operate to process waste gas generated in a semiconductor manufacturing process, each processing device being defined as a first processing device and a second processing device, a first pipeline connecting the first processing device and the manufacturing device that generates waste gas, a second pipeline connecting the second processing device and the manufacturing device, the waste gas being selectively transported to the first processing device or the second processing device through either the first pipeline or the second pipeline, a first electric heating unit including a plurality of first electric heating tapes and a first temperature controller, each first electric heating tape being sequentially arranged along the first pipeline and respectively covering the first pipeline, the first temperature controller detecting the temperature of the first pipeline and controlling each first electric heating tape to generate heat energy, a second electric heating unit including a plurality of second electric heating tapes and a second temperature controller, each second electric heating tape being sequentially arranged along the second pipeline and respectively covering the second pipeline, the second temperature controller detecting the temperature of the second pipeline and controlling each second electric heating tape to generate heat energy, a first shut-off valve being disposed at the end of the first pipeline connecting to the manufacturing device, and a second shut-off valve being disposed at the end of the second pipeline connecting to the manufacturing device.

[0010] The control device includes a human-machine interface controller, a programmable controller, and a signal transmission port. The human-machine interface controller is electrically connected to the programmable controller, the programmable controller is electrically connected to the signal transmission port, the signal transmission port is coupled to a first shut-off valve and a second shut-off valve, and a first temperature controller and a second temperature controller are coupled in parallel to the signal transmission port.

[0011] The human-machine interface controller includes a display, a switching circuit, and a microprocessor. The display and the switching circuit are electrically connected to the microprocessor. Based on signals transmitted by the microprocessor, the display shows the temperatures of the first and second pipelines, and the on / off status of the first and second shut-off valves. The switching circuit transmits a first control signal to the microprocessor based on user operations. The microprocessor processes the first control signal and, based on the processing result, transmits a second control signal to a programmable controller. The programmable controller processes the second control signal and, based on the processing result, sequentially controls the first and second shut-off valves, the first temperature controller, and the second temperature controller through signal transmission ports. This allows the first and second heating units to be selected to increase or decrease load, and the first and second shut-off valves to be selected to open or close the connection between the first and second pipelines and the process equipment.

[0012] A method for controlling two processing devices to alternately switch operating states is executed using a control device for controlling two processing devices to alternately switch operating states as described above.

[0013] The method includes the following steps performed sequentially.

[0014] First heating unit load increase: First temperature controller controls the load increase of each first heating tape to increase the heat energy supply to the first pipeline, so that the first pipeline is heated.

[0015] Determine the temperature of the first pipeline: compare whether the temperature of the first pipeline is equal to the set first temperature. The first temperature is the temperature at which the exhaust gas generated by the process equipment does not form a deposition phenomenon and does not block the first pipeline. If the temperature of the first pipeline is lower than the first temperature, the first electric heating unit load increase step is executed again. If the temperature of the first pipeline is equal to the first temperature, the subsequent steps are executed.

[0016] Open the first shut-off valve: Based on the temperature judgment step of the first pipeline, the temperature of the first pipeline is equal to the first temperature, the first shut-off valve is opened, so that the waste gas flows through the first pipeline to the first treatment equipment, and the first electric heating unit and the first treatment equipment enter the operating state.

[0017] Close the second shut-off valve: Based on the temperature judgment step of the first pipeline, if the temperature of the first pipeline is equal to the first temperature, close the second shut-off valve to prevent exhaust gas from entering the second pipeline.

[0018] Second heating unit unload: After the second shut-off valve is closed, the second temperature controller controls the unload of each second heating tape to reduce the heat supply to the second pipeline and cool the second pipeline.

[0019] Determine the temperature of the second pipeline: compare whether the temperature of the second pipeline is equal to the set second temperature. If the second temperature is lower than the first temperature, the second heating unit unload step is executed again. If the temperature of the second pipeline is equal to the second temperature, the second heating unit and the second processing equipment enter the standby state.

[0020] The main effects and advantages of this invention are that by controlling the first or second electric heating unit to switch to standby mode to reduce load, the power consumption of the first or second electric heating tape is reduced, thereby reducing overall carbon emissions. Attached Figure Description

[0021] Figure 1 This is a system configuration diagram of Embodiment 1 of the present invention.

[0022] Figure 2 This is a partial cross-sectional schematic diagram of the first electric heating tape installed in the first pipeline.

[0023] Figure 3 This is a partial cross-sectional schematic diagram of the second electric heating tape installed in the second pipeline.

[0024] Figure 4 This is a schematic diagram of the circuit architecture of the control device according to Embodiment 1 of the present invention.

[0025] Figure 5 This is a flowchart of the method according to Embodiment 1 of the present invention.

[0026] Figure 6 This is a line graph (I) showing the temperature change of the first pipeline according to Embodiment 1 of the present invention.

[0027] Figure 7 This is a line graph (I) showing the temperature change of the second pipeline in Embodiment 1 of the present invention.

[0028] Figure 8 This is a line graph (II) showing the temperature change of the first pipeline in Embodiment 1 of the present invention.

[0029] Figure 9 This is a line graph (II) showing the temperature change of the second pipeline in Embodiment 1 of the present invention.

[0030] Figure 10 This is a schematic diagram of the circuit architecture of the control device in Embodiment 2 of the present invention.

[0031] Figure 11 This is a schematic diagram of the circuit architecture of the control device in Embodiment 3 of the present invention. Detailed Implementation

[0032] Please refer to the figures shown, which are embodiments of the control device and method for controlling the alternating operation states of the two processing devices according to the present invention. However, these embodiments are for illustrative purposes only and are not limited to this structure in the patent application.

[0033] like Figures 1 to 4 As shown, two processing devices operate alternately to process the waste gas generated during the semiconductor manufacturing process. Each processing device is defined as a first processing device 11 and a second processing device 12. A first pipeline 13 connects the first processing device 11 and the process equipment 90 that generates the waste gas. A second pipeline 14 connects the second processing device 12 and the process equipment 90. The waste gas is selectively transported to the first processing device 11 or the second processing device 12 via either the first pipeline 13 or the second pipeline 14. A first electric heating unit 15 includes several first electric heating tapes 152 and a first temperature controller 154. Each first electric heating tape 152 is sequentially arranged along the first pipeline 13 and respectively covers the first pipeline 13. A first temperature controller 154 detects the temperature of the first pipeline 13 and controls each of the first heating tapes 152 to generate heat energy based on the detected temperature. A second heating unit 16 includes several second heating tapes 162 and a second temperature controller 164. Each of the second heating tapes 162 is arranged sequentially along the second pipeline 14 and covers the second pipeline 14 respectively. The second temperature controller 164 detects the temperature of the second pipeline 14 and controls each of the second heating tapes 162 to generate heat energy based on the detected temperature. A first shut-off valve 17 is provided at the end of the first pipeline 13 that connects to the process equipment 90, and a second shut-off valve 18 is provided at the end of the second pipeline 14 that connects to the process equipment 90.

[0034] The first heating unit 15 and the second heating unit 16 are existing technologies familiar to those skilled in the art, and their specific configurations will not be described in detail.

[0035] The control device 20 for controlling the alternating operation of the first processing device 11 and the second processing device 12 includes a human-machine interface controller 30, a programmable controller 40, and a signal transmission port 50. The human-machine interface controller 30 is electrically connected to the programmable controller 40, the programmable controller 40 is electrically connected to the signal transmission port 50, the signal transmission port 50 is coupled to the first shut-off valve 17 and the second shut-off valve 18, and the first temperature controller 154 and the second temperature controller 164 are coupled in parallel to the signal transmission port 50.

[0036] The human-machine interface controller 30 includes a display 32, a switching circuit 34, and a microprocessor 36. The display 32 and the switching circuit 34 are electrically connected to the microprocessor 36. Based on signals from the microprocessor 36, the display 32 displays the temperatures of the first pipeline 13 and the second pipeline 14, and the on / off status of the first shut-off valve 17 and the second shut-off valve 18. The switching circuit 34 transmits a first control signal to the microprocessor 36 based on user operations. The microprocessor 36 processes the first control signal and, based on the processing result, adjusts the switching circuit accordingly. The programmable controller 40 transmits a second control signal. The programmable controller 40 processes the second control signal and, based on the processing result, controls the first shut-off valve 17, the second shut-off valve 18, the first temperature controller 154, and the second temperature controller 164 in sequence through the signal transmission port 50. This allows the first heating unit 15 and the second heating unit 16 to select to increase or decrease the load, and the first shut-off valve 17 and the second shut-off valve 18 to select to open or shut off the connection between the first pipeline 13 and the second pipeline 14 and the process equipment 90.

[0037] The programmable controller 40 transmits signals to the first shut-off valve 17, the second shut-off valve 18, the first temperature controller 154, and the second temperature controller 164 respectively through the signal transmission port 50, causing the first shut-off valve 17, the second shut-off valve 18, the first temperature controller 154, and the second temperature controller 164 to operate respectively. The first temperature controller 154 and the second temperature controller 164 transmit signals to the programmable controller 40 and the human-machine interface controller 30 respectively through the signal transmission port 50. The human-machine interface controller 30 can then display the temperature of the first pipeline 13 and the second pipeline 14, providing users with convenient monitoring of the first pipeline 13 and the second pipeline 14.

[0038] The first processing device 11 can be switched to an operating state as needed to replace the second processing device 12 in processing waste gas, and the second processing device 12 in the operating state can be switched to a shutdown state to remove the substances trapped in the process of the second processing device 12 in processing waste gas or to perform equipment maintenance. After the aforementioned removal of trapped substances or equipment maintenance is completed, the second processing device 12 can be switched to a standby state. When the first processing device 11 needs to remove the aforementioned substances or to perform equipment maintenance, the second processing device 12 is switched to an operating state, and the first processing device 11 enters a shutdown state. The first processing device 11 and the second processing device 12 alternately switch operating states, so that the process equipment 90 can continue to operate and execute the semiconductor process.

[0039] By operating the human-machine interface controller 30, the user can control the first shut-off valve 17, the second shut-off valve 18, the first temperature controller 154, and the second temperature controller 164 in sequence through the programmable controller 40, so that the first electric heating unit 15 and the second electric heating unit 16 are increased or decreased respectively, and the first shut-off valve 17 and the second shut-off valve 18 open or shut off the connection between the first pipeline 13 and the second pipeline 14 and the process equipment 90 respectively, so as to meet the need for the first processing equipment 11 and the second processing equipment 12 to alternately switch operating states.

[0040] When the first processing device 11 or the second processing device 12 is switched to shutdown, the programmable controller 40 controls the corresponding first electric heating unit 15 or the second electric heating unit 16 to reduce the load, thereby reducing the power consumption of each first electric heating tape 152 or each second electric heating tape 162. The control device 20 can reduce the overall carbon emissions.

[0041] like Figures 5 to 9 As shown, the method for switching between alternating operating states of the first processing device 11 and the second processing device 12, executed by the control device 20, includes the following steps performed sequentially.

[0042] First heating unit load increase: Programmable controller 40 transmits a signal to first heating unit 15, and first temperature controller 154 controls each first heating tape 152 to increase the load based on the signal, thereby increasing the heat energy supply to first pipeline 13 and raising the temperature of first pipeline 13; controlling each first heating tape 152 to increase the load means increasing the power supplied to each first heating tape 152, thereby raising the temperature of each first heating tape 152.

[0043] Determine the temperature of the first pipeline: Compare whether the temperature of the first pipeline 13 is equal to the set first temperature T1. The first temperature T1 is the temperature at which the exhaust gas does not form a deposition phenomenon and does not block the first pipeline 13. The specific temperature value of the first temperature T1 is determined based on the nature and composition of the exhaust gas flowing through the first pipeline 13. If the temperature of the first pipeline 13 is lower than the first temperature T1, the first electric heating unit 15 load-up step is executed again. If the temperature of the first pipeline 13 is equal to the first temperature T1, the subsequent steps are executed.

[0044] Opening the first shut-off valve: Based on the temperature judgment step of the first pipeline, the temperature of the first pipeline 13 is equal to the first temperature T1. The programmable controller 40 sends a signal to the first shut-off valve 17 to control the opening of the first shut-off valve 17, so that the exhaust gas flows through the first pipeline 13 to the first processing equipment 11, and the first electric heating unit 15 and the first processing equipment 11 enter the operating state. After the temperature of the first pipeline 13 rises to the first temperature T1, the programmable controller 40 starts to control the opening of the first shut-off valve 17. Before the first pipeline 13 has risen to the first temperature T1, the first shut-off valve 17 remains in the closed state, and the exhaust gas cannot enter the first pipeline 13, so as to avoid prematurely introducing the exhaust gas into the first pipeline 13, causing the components of the exhaust gas to deposit inside the first pipeline 13 or block the first pipeline 13.

[0045] Close the second shut-off valve: Based on the temperature judgment step of the first pipeline, the temperature of the first pipeline 13 is equal to the first temperature T1, close the second shut-off valve 18 to prevent the exhaust gas from entering the second pipeline 14.

[0046] Second heating unit load reduction: After closing the second shut-off valve 18, the programmable controller 40 transmits a signal to the second heating unit 16, and the second temperature controller 164 controls each second heating tape 162 to reduce the heat energy supply to the second pipeline 14 based on the signal, thereby cooling the second pipeline 14; controlling each second heating tape 162 to reduce the load means reducing the power supplied to each second heating tape 162, thereby lowering the temperature of each second heating tape 162 and reducing the electrical energy consumed by each second heating tape 162.

[0047] In the second electric heating unit unloading step, two unloading modes can be selected to reduce the power supply to each of the second electric heating tapes 162. The first unloading mode is to reduce the current passing through each of the second electric heating tapes 162 while maintaining the current supply to each of the second electric heating tapes 162. The second unloading mode is to stop the power supply to each of the second electric heating tapes 162. Both unloading modes maintain the power supply to the second temperature controller 164, so that the second temperature controller 164 can continue to operate, continue to detect the temperature of the second pipeline 14 and control each of the second electric heating tapes 162. The unloading does not stop the operation of the second electric heating unit 16.

[0048] Determine the temperature of the second pipeline: compare whether the temperature of the second pipeline 14 is equal to the set second temperature T2. The second temperature T2 is lower than the first temperature T1. If the temperature of the second pipeline 14 is higher than the second temperature T2, then the second electric heating unit unload step is executed again. If the temperature of the second pipeline 14 is equal to the second temperature T2, then the second electric heating unit 16 and the second processing device 12 enter the standby state.

[0049] Figures 6 to 9 In the displayed line graph, the horizontal axis represents time, and the vertical axis represents temperature.

[0050] Figure 6 For example, the first pipeline 13 is heated to the first temperature T1 in stages from the second temperature T2, where Ta, Tb and Tc represent the temperatures of different heating stages. The temperature of the first pipeline 13 is sequentially reduced from the first temperature T1 to temperature Ta, temperature Tb and temperature Tc, and then reduced to the second temperature T2.

[0051] Figure 7 For example, the second pipeline 14 is selected to be cooled in stages from the first temperature T1 to the second temperature T2, where Ta, Tb and Tc represent the temperatures of different heating stages. The temperature of the second pipeline 14 is cooled sequentially from the first temperature T1 to temperature Tc, temperature Tb and temperature Ta, and then cooled to the second temperature T2.

[0052] Figure 8 For example, the first pipeline 13 is selected to be continuously heated from the second temperature T2 to the first temperature T1. Figure 9 For example, the second pipeline 14 is selected to continuously cool down from the first temperature T1 to the second temperature T2.

[0053] The backup status is not the same as the shutdown status or the stop operation status. The shutdown status or the stop operation status is only one of the backup statuses.

[0054] After the second electric heating unit 16 is unloaded and enters standby mode, it can choose to continuously supply power to each of the second electric heating tapes 162, so that each of the second electric heating tapes 162 maintains a small amount of heat energy to the second pipeline 14, and the temperature of the second pipeline 14 is maintained at a second temperature T2 higher than room temperature. If an unexpected accident occurs, causing the exhaust gas to be unable to pass through the first pipeline 13 or the first treatment device 11 to be unable to treat the exhaust gas, the second electric heating unit 16 in standby mode can cause the second pipeline 14 to rise from the second temperature T2 higher than room temperature to the first temperature T1 in a short time. The exhaust gas can then flow through the second pipeline 14 to the second treatment device 12, and the second treatment device 12 takes over the treatment of the exhaust gas from the first treatment device 11, reducing the adverse effects that the accident may cause.

[0055] The present invention may also select room temperature as the second temperature T2.

[0056] The display 32 can be selected as a touch display. The display 32 displays icons that allow for touch operation of the first heating unit 15 and the second heating unit 16 to increase or decrease the load. The switch circuit 34 is electrically connected to the display 32. The user can operate the switch circuit 34 by touching the icons.

[0057] The control device 20 executes the method of switching between the first processing device 11 and the second processing device 12, and the programmable controller 40 sequentially controls the first heating unit 15 to increase its load, open the first shut-off valve 17, close the second shut-off valve 18, and reduce the load of the second heating unit 16. This can form an effective foolproof mechanism to prevent user error from causing the first heating unit 15, the first shut-off valve 17, the second shut-off valve 18, or the second heating unit 16 to fail to perform the correct action at the correct time.

[0058] like Figure 10 As shown, the main difference between Embodiment 2 and Embodiment 1 is that the control device 20 further includes a power control module 60, wherein the power control module 60 is electrically connected to the signal transmission port 50, and the power control module 60 and the programmable controller 40 are connected in parallel. The power control module 60 has two manual switches 62, each of which controls the power supply of each first heating tape 152 and each second heating tape 162 through the signal transmission port 50, and each manual switch 62 is linked to each other, thereby forming a foolproof mechanism to prevent the user from operating the first heating tape 152 and each second heating tape 162 to increase or decrease the load simultaneously.

[0059] In Embodiment 2, the human-machine interface controller 30 or the power control module 60 can be selected as needed to control the operation of the first heating unit 15 or the second heating unit 16.

[0060] like Figure 11 As shown, the main difference between Embodiment 3 and Embodiment 1 is that the control device 20 further includes a second human-machine interface controller 70, wherein the second human-machine interface controller 70 is connected to the programmable controller 40, and the human-machine interface controller 30 and the second human-machine interface controller 70 are connected in parallel. The second human-machine interface controller 70 and the programmable controller 40 can be connected by wired or wireless means, and the second human-machine interface controller 70 and the programmable controller 40 can also transmit signals to each other via a wireless network. Accordingly, the user can choose to perform remote operation through the second human-machine interface controller 70.

Claims

1. A control device for controlling the alternating operation of two processing devices, wherein the two processing devices alternately operate to process waste gas generated in a semiconductor manufacturing process, each processing device being defined as a first processing device and a second processing device, a first pipeline connecting the first processing device and the manufacturing device that generates waste gas, a second pipeline connecting the second processing device and the manufacturing device, the waste gas being selectively transmitted to the first processing device or the second processing device via the first pipeline or the second pipeline, a first electric heating unit including a plurality of first electric heating tapes and a first temperature controller, each first electric heating tape being sequentially arranged along the first pipeline and respectively covering the first pipeline, the first temperature controller detecting the temperature of the first pipeline and controlling each first electric heating tape to generate heat energy, a second electric heating unit including a plurality of second electric heating tapes and a second temperature controller, each second electric heating tape being sequentially arranged along the second pipeline and respectively covering the second pipeline, the second temperature controller detecting the temperature of the second pipeline and controlling each second electric heating tape to generate heat energy, a first shut-off valve being disposed at the end of the first pipeline connecting to the manufacturing device, and a second shut-off valve being disposed at the end of the second pipeline connecting to the manufacturing device; The control device is characterized in that It includes a human-machine interface controller, a programmable controller and a signal transmission port, wherein the human-machine interface controller is electrically connected to the programmable controller, the programmable controller is electrically connected to the signal transmission port, the signal transmission port is coupled to a first shut-off valve and a second shut-off valve, and a first temperature controller and a second temperature controller are coupled in parallel to the signal transmission port. The human-machine interface controller includes a display, a switching circuit, and a microprocessor. The display and the switching circuit are electrically connected to the microprocessor. The display shows the temperature of the first pipeline and the second pipeline, and the on / off status of the first shut-off valve and the second shut-off valve. The switching circuit transmits a first control signal to the microprocessor. The microprocessor processes the first control signal and transmits a second control signal to a programmable controller. The programmable controller processes the second control signal and controls the first shut-off valve, the second shut-off valve, the first temperature controller, and the second temperature controller in sequence through the signal transmission port. The first heating unit and the second heating unit are selected to increase or decrease load, and the first shut-off valve and the second shut-off valve are selected to open or close the connection status of the first pipeline and the second pipeline with the process equipment, respectively.

2. The control device for controlling the alternating operation states of the two processing devices as described in claim 1, characterized in that... It also includes a power control module, which is electrically connected to the signal transmission port and is connected in parallel with the programmable controller. The power control module has two manual switches, each of which controls the power supply to each first heating tape and each second heating tape through the signal transmission port.

3. The control device for controlling the alternating operation state of the two processing devices as described in claim 1, characterized in that... The display is a touch screen display, which shows icons indicating whether the first and second heating units are being raised or lowered by touch. The switch circuit is electrically connected to the display.

4. A method for controlling two processing devices to alternately switch operating states, wherein the two processing devices alternately operate to process waste gas generated in a semiconductor manufacturing process, each processing device is defined as a first processing device and a second processing device, a first pipeline connects the first processing device and the manufacturing device that generates waste gas, a second pipeline connects the second processing device and the manufacturing device, the waste gas is selectively transmitted to the first processing device or the second processing device through the first pipeline or the second pipeline, a first electric heating unit includes a plurality of first electric heating tapes and a first temperature controller, each first electric heating tape is sequentially arranged along the first pipeline and respectively covers the first pipeline, the first temperature controller detects the temperature of the first pipeline and controls each first electric heating tape to generate heat energy, a second electric heating unit includes a plurality of second electric heating tapes and a second temperature controller, each second electric heating tape is sequentially arranged along the second pipeline and respectively covers the second pipeline, the second temperature controller detects the temperature of the second pipeline and controls each second electric heating tape to generate heat energy, a first shut-off valve is provided at the end of the first pipeline that connects to the manufacturing device, and a second shut-off valve is provided at the end of the second pipeline that connects to the manufacturing device; The method is performed using a control device as described in claim 1 that controls the alternating operation states of two processing devices; The method is characterized in that This includes the following steps performed sequentially: First heating unit load increase: First temperature controller controls the load increase of each first heating tape to increase the heat energy supply to the first pipeline, so that the first pipeline is heated; Determine the temperature of the first pipeline: compare whether the temperature of the first pipeline is equal to the set first temperature, which is the temperature at which the exhaust gas does not form deposits and does not block the first pipeline; if the temperature of the first pipeline is lower than the first temperature, then execute the first electric heating unit load increase step again; if the temperature of the first pipeline is equal to the first temperature, then continue to execute the subsequent steps. Open the first shut-off valve: Based on the temperature judgment step of the first pipeline, the temperature of the first pipeline is equal to the first temperature, the first shut-off valve is opened, so that the waste gas flows through the first pipeline to the first treatment equipment, and the first electric heating unit and the first treatment equipment enter the operating state. Close the second shut-off valve: Based on the temperature judgment step of the first pipeline, the temperature of the first pipeline is equal to the first temperature, close the second shut-off valve to prevent exhaust gas from entering the second pipeline; Second heating unit unload: After the second shut-off valve is closed, the second temperature controller controls each second heating tape to unload, reducing the heat energy supply to the second pipeline and cooling the second pipeline. Determine the temperature of the second pipeline: Compare whether the temperature of the second pipeline is equal to the set second temperature; if the second temperature is lower than the first temperature. If the temperature of the second pipeline is higher than the second temperature, the second heating unit unload step is executed again. If the temperature of the second pipeline is equal to the second temperature, the second heating unit and the second processing equipment enter standby mode.

5. The method for controlling the alternating operation states of two processing devices as described in claim 4, characterized in that... The second temperature is between the first temperature and room temperature.

6. The method for controlling the alternating operation states of two processing devices as described in claim 4, characterized in that... The second temperature is room temperature.

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