Sputtering target welding apparatus and method

Abstract

The application relates to a welding processing method of a rotary sputtering target material, in particular to a sputtering target material welding processing device and method, which comprises a coaxially arranged elastic outer die and rigid inner die, a tubular die cavity containing to-be-formed powder is formed between the elastic outer die and the rigid inner die, a shrinkage die, an isostatic pressing die and a rigid support die are arranged on the outer side wall of the elastic outer die in sequence and coaxially arranged with the elastic outer die, the shrinkage die, the isostatic pressing die and the rigid support die are arranged on the outer side wall of the elastic outer die in sequence and coaxially arranged with the elastic outer die, the rigid support die is used for supporting the elastic outer die when filling the forming material, the shrinkage die is used for limiting and supporting the elastic outer die during isostatic pressing, the isostatic pressing die is used for applying isostatic pressure to the elastic outer die, the isostatic pressing die limits the uniform shrinkage of the shrinkage die, supplements the rigidity of the shrinkage die and maintains the regularity of the shape of the rotary sputtering target material.

Description

Technical Field

[0001] This invention relates to the technical field of welding processing methods for rotating sputtering targets, specifically to a welding processing equipment and method for sputtering targets. Background Technology

[0002] A rotating sputtering target is a device used in the sputtering deposition process, designed to deposit thin films with high efficiency and uniformity in a vacuum environment. Compared to traditional planar targets, rotating targets offer several unique advantages.

[0003] In a spinning sputtering coating system, the target is cylindrical rather than flat and rotates continuously during sputtering. This allows the ion source to continuously bombard a large surface area of ​​the target, increasing the utilization rate of the sputtered material, and because the material is deposited from a more uniform source, the deposited film is also more uniform.

[0004] In the process of spin sputtering target forming, powder metallurgy is a commonly used forming method. Powder metallurgy refers to pressing material powder under high pressure and then sintering it at a specific temperature to form a dense cylinder.

[0005] Regarding the formation of rotating sputtering targets using powder metallurgy, the 725 Research Institute of China Shipbuilding Industry Corporation applied for an invention patent with application number 201810236095.5 on March 21, 2018 (hereinafter referred to as Comparative Literature 1). This patent discloses an isostatic pressing mold for rotating targets, including an elastic outer mold, a rigid inner mold, and end plugs. The rigid inner mold is disposed in the inner cavity of the elastic outer mold. End plugs are respectively provided at both ends of the tubular mold cavity between the elastic outer mold and the rigid inner mold. A plastic transition layer is provided between the side of the end plug facing the tubular mold cavity and the powder to be formed, which can be radially compressed together with the powder to be formed along with the elastic outer mold as it shrinks and deforms. The side of the plastic transition layer that contacts the end plug is a conical concave surface, and a conical protrusion that mates with the conical concave surface is provided on the end plug. The problems of flared deformation and uneven density are solved by the plastic transition layer; the rigid support sleeve and positioning device make the powder filling more uniform; the combination of arc-shaped metal clamp and flexible layer ensures that the elastic clamping device always tightly wraps the tubular blank, making the tubular blank regular in shape, uniform in wall thickness and high in dimensional accuracy. This not only facilitates the sintering of high-performance target materials, but also reduces the amount of subsequent turning, increases material utilization and reduces production costs.

[0006] In addition, Pioneer Thin Film Materials Co., Ltd. applied for an invention patent with application number 202210969566.X on August 12, 2022 (hereinafter referred to as comparative document 2), which specifically discloses a rotating target forming mold and a rotating target forming method. The rotating target forming mold includes an elastic outer cylinder, and a rigid mold core is provided inside the elastic outer cylinder. A first elastic sealing component is provided at the top of the rigid mold core, and a second elastic sealing component is provided at the bottom of the rigid mold core. The first elastic sealing component and the second sealing component have the same structure. A switching mechanism is provided on the elastic outer cylinder.

[0007] Although both of the above invention patents provide a molding die for processing rotating sputtering targets, for the first document mentioned above, after the molding powder for the rotating sputtering target is filled, the outer rigid support sleeve needs to be disassembled and replaced with an elastic clamping device. During the isostatic pressing process, the elastic outer mold is kept contracted to maintain the regularity of the rotating sputtering target shape. The whole process is very cumbersome.

[0008] Regarding the aforementioned document 2, although disassembly and replacement are not required, the sliding support mechanism cannot retract during the isostatic pressing process to maintain the limiting support of the elastic outer mold, making it difficult to ensure the regularity of the rotating sputtering target shape.

[0009] Therefore, in view of the above-mentioned technical solutions, this application aims to propose a method that can maintain the contraction support of the elastic outer mold during isostatic pressing without replacing the rigid support sleeve, thereby simplifying the operation and maintaining the regularity of the shape of the formed rotating sputtering target. Summary of the Invention

[0010] To address the above problems, this invention provides a sputtering target welding processing equipment and method. The equipment comprises a shrinkage mold, an isostatic pressing mold, and a rigid support mold arranged coaxially with the outer wall of an elastic outer mold. The rigid support mold supports the elastic outer mold during filling and molding of the material. During isostatic pressing, the shrinkage mold provides limiting support to the elastic outer mold. The isostatic pressing mold applies isostatic pressure to the elastic outer mold and limits the uniform shrinkage of the shrinkage mold, while also supplementing the rigidity of the shrinkage mold to maintain the regularity of the rotating sputtering target shape.

[0011] To achieve the above objectives, the present invention provides the following technical solution:

[0012] A sputtering target welding processing equipment includes an elastic outer mold and a rigid inner mold arranged coaxially, wherein a tubular mold cavity for accommodating powder to be formed is formed between the elastic outer mold and the rigid inner mold, and the two ends of the tubular mold cavity are sealed by sealing plugs.

[0013] Around the outer wall of the elastic outer mold, a shrinkage mold, an isostatic pressing mold, and a rigid support mold are arranged in sequence and coaxially with the elastic outer mold. The elastic outer mold, shrinkage mold, isostatic pressing mold, and rigid support mold are all placed on a support base.

[0014] The shrink mold is a strip-shaped shrinkable structure, and the shrink mold shrinks coaxially around the elastic outer mold;

[0015] The isostatic mold is arranged around the shrinkage mold. The isostatic mold is an expandable and contractible bladder structure. After the isostatic medium is filled into the isostatic mold and expands, it squeezes the elastic outer mold to shrink.

[0016] The rigid support mold is arranged around the isostatic pressing mold. When the tubular mold cavity is filled with the powder to be formed, the rigid support mold provides rigid support and limit for the elastic outer mold.

[0017] The elastic outer mold is the sleeve of the mold. It shrinks during isostatic pressing to compact the powder. Its material is usually any one of neoprene rubber, polyurethane, silicone rubber, and polyvinyl chloride. The rigid support mold is used to form the center hole of the tubular rotating target. Its material is harder and is usually metal. The Shore hardness of the sealing plug should be greater than 50 degrees. Its material is usually any one of neoprene rubber, polyurethane, silicone rubber, and polyvinyl chloride, which can ensure a good sealing effect.

[0018] As an improvement, the shrink mold includes a belt and a connector;

[0019] The belt is made of any one of titanium alloy, carbon fiber or PEEK material. One end of the belt is fixedly connected to the connector, and the other movable end of the belt passes through the connector.

[0020] The connector is rigidly configured, and a through slot is provided in the middle of the connector, through which the movable end of the belt body passes.

[0021] Titanium alloy, carbon fiber, or PEEK materials are all materials that are both tough and rigid. Therefore, the belt can have the characteristics of bending and shrinking, and can shrink synchronously with the elastic outer mold. At the same time, the belt itself has strong rigidity and will not deform, so it can maintain good support for the elastic outer mold.

[0022] As an improvement, the movable end of the belt is provided with a limiting part that is perpendicular to the movable end.

[0023] The limiting part is used to pull the belt body, causing it to contract, while the connector is used to limit the belt body and maintain its regular loop shape.

[0024] As an improvement, the isostatic pressing mold includes a bladder and a flange;

[0025] The capsule is arranged in an open annular shape, with inlets at both ends of the circumferential opening, and the interior of the capsule is hollow and has a filling cavity for filling isostatic media.

[0026] The flange is provided at the corresponding inlet, the flange is located on the side of the inlet close to the rigid support mold, and the flange connects the inlet and the rigid support mold, and the flange is elastically telescopic.

[0027] The capsule is made of silicone rubber, which has expansion and contraction properties and is resistant to high temperature. After the isostatic medium is filled into the capsule, the capsule will expand and compress the elastic outer mold. The flange is used to pull and open the capsule inlet to facilitate the rapid entry of the isostatic medium.

[0028] As an improvement, the rigid support mold includes a fixed support ring and a movable block;

[0029] The fixing support ring is an open annular shape, and the opening of the fixing support ring is directly opposite the opening of the bladder body;

[0030] The movable block is disposed at the opening of the fixed support ring. The movable block and the fixed support ring are spliced ​​together to form a complete support ring. The movable block is also connected to the flange. The movable block is movably disposed along the movable end of the belt.

[0031] The rigid support mold is made of rigid metal material. The fixed support ring and the movable block are spliced ​​together to form the rigid support mold. When the rigid support mold limits and supports the elastic outer mold, the isostatic pressing mold is squeezed into a flat shape. The rigid support mold, the isostatic pressing mold, the shrinking mold and the elastic outer mold completely overlap.

[0032] As an improvement, a medium cylinder is sleeved on the outside of the rigid support mold, and a medium cavity is formed between the medium cylinder and the rigid support mold. The medium cavity is used to fill the isostatic medium.

[0033] The medium cylinder is made of rigid metal material and is wrapped around the outside of the rigid support mold to form a sealed medium cavity, preventing leakage of isostatic medium.

[0034] As an improvement, the movable block is provided with a through medium inlet hole, and the connection position between the flange and the movable block is located at the middle position of the medium inlet hole.

[0035] The movable block can detach from the fixed support ring, allowing the flange to be pulled through the notch on the fixed support ring, thereby opening the inlet on the previously flattened bladder. The flange also has a certain degree of elasticity, so it is not afraid of being pulled and broken.

[0036] Furthermore, the medium inlet hole opened on the movable block allows the isostatic medium to quickly enter the bladder through the medium inlet hole.

[0037] As an improvement, a covering block is provided on the other side of the movable block opposite to the flange, which covers the limiting part, and a guide rod is provided on the covering block facing the medium cylinder. A tension spring is sleeved on the guide rod, and the two ends of the spring are fixedly connected to the medium cylinder and the movable block, respectively.

[0038] A strip plate is provided on the outer wall of the medium cylinder, and a positioning hole is provided on the strip plate. A positioning plate is provided on the other end of the guide rod opposite the covering block. A limiting hole is provided on the positioning plate to cooperate with the positioning hole. When the positioning hole and the limiting hole coincide, a limiting screw is passed through.

[0039] The covering block moves synchronously with the movable block to pull the limiting part, so that the shrink mold shrinks quickly and keeps in sync with the shrinkage of the elastic outer mold. The movement of the movable block is powered by the tension of the stretched spring. When the elastic outer mold is not subjected to isostatic pressure shrinkage, the spring cannot pull the shrink mold to shrink through the covering block.

[0040] As an improvement, the bottom of the rigid inner mold is integrally connected to the material tray, and the rigid inner mold is provided with a lifting mechanism that drives the rigid inner mold to rise. The lifting mechanism includes a lifting shaft, a lead screw nut and a rotating handwheel.

[0041] The lifting shaft is vertically arranged, and the end of the lifting shaft is threaded.

[0042] The lead screw nut is rotatably mounted on the support base via a bearing, and the lead screw nut is configured to engage with the threaded connection.

[0043] The rotating handwheel is sleeved on the outside of the lead screw nut, and the rotating handwheel drives the lead screw nut to rotate.

[0044] Furthermore, this application also provides a processing method based on the above-described sputtering target welding processing equipment, comprising the following steps:

[0045] Step 1: Filling. Initially, the bottom sealing plug has sealed the bottom opening of the tubular mold cavity. Molding powder for forming the rotating sputtering target is filled into the tubular mold cavity, and mechanical vibration is performed during the filling process.

[0046] Step 2: Isostatic pressing. After filling, seal the top opening of the tubular mold cavity with a sealing plug and place the equipment inside the isostatic pressing equipment. Then, pull out the limit screws inserted on the strip plate to release the locking of the positioning hole and the limit hole. The spring component drives the movable block to disengage from the fixed support ring. Simultaneously, the inlet of the bladder is opened by the movable block and the flange. After the isostatic medium in the isostatic pressing equipment enters the filling cavity, it enters the bladder through the medium inlet hole and the inlet, causing the bladder to expand. This isostatic pressing treatment is applied to the molding powder in the tubular mold cavity, so that the elastic outer mold is uniformly compressed and shrinks.

[0047] During the shrinkage of the elastic outer mold, the spring element pulls the movable end of the belt through the covering block, so that the belt continuously shrinks synchronously with the elastic outer mold, and the shrinkage mold provides circumferential limiting support for the elastic outer mold.

[0048] Step 3: Sintering and welding treatment. After the isostatic pressing treatment is completed, the forming powder in the tubular mold cavity is sintered and welded to obtain the formed rotating sputtering target.

[0049] Step 4: Unloading. After the sintering and welding process is completed and the sputtering target material is cooled, the isostatic medium inside the capsule is extracted, the capsule shrinks, the guide rod is pushed synchronously, the movable block is reset, the pull on the belt is released, so that the shrinking mold and the elastic outer mold are reset, the sealing plug at the top of the tubular mold cavity is removed, the rotating handwheel is turned, and through the engagement of the thread on the lifting shaft and the lead screw nut, the rigid inner mold and the material tray are lifted. After the top of the rotating sputtering target material is exposed, the rotating sputtering target material is extracted from the tubular mold cavity.

[0050] The beneficial effects of this invention are as follows:

[0051] (1) The present invention has a shrinkage mold, an isostatic pressing mold and a rigid support mold arranged coaxially with the outer wall of the elastic outer mold. The rigid support mold supports the elastic outer mold when filling the molding material, while the shrinkage mold limits and supports the elastic outer mold during isostatic pressing. The isostatic pressing mold is used to apply isostatic pressure to the elastic outer mold, and the isostatic pressing mold limits the uniform shrinkage of the shrinkage mold and supplements the rigidity of the shrinkage mold to maintain the regularity of the shape of the rotating sputtering target. This makes the operation more convenient when switching from molding powder filling to isostatic pressing.

[0052] (2) The present invention splits the rigid support mold into a fixed support ring and a movable block. By moving the movable block, the inlet of the isostatic mold is opened, which facilitates the rapid entry of the isostatic medium. This allows the isostatic mold to expand rapidly and form uniform pressure on the elastic outer mold, thereby further improving the density and strength of the rotating sputtering target.

[0053] (3) The present invention moves the movable block to pull the limiting part on the shrinking mold, so that the shrinking mold is always in a state of being contracted and stressed. Once the elastic outer mold contracts, the shrinking mold will follow and contract synchronously, and the isostatic mold will also expand synchronously and rapidly. The three work together to further improve the density and strength of the rotating sputtering target, while maintaining the regularity of the overall shape of the rotating sputtering target.

[0054] In summary, the present invention has the advantages of forming regular shapes of rotating sputtering targets and simple operation, and is especially suitable for the field of sintering and welding forming processing technology of rotating sputtering targets. Attached Figure Description

[0055] Figure 1 This is a front view schematic diagram of the welding processing equipment of the present invention;

[0056] Figure 2 This is a front view of the welding process of the present invention. Figure 1 ;

[0057] Figure 3 This is a top view of the structure of the present invention;

[0058] Figure 4 This is a top view of the movable block structure of the present invention;

[0059] Figure 5 This is a partial structural diagram of the medium cylinder of the present invention;

[0060] Figure 6 This is a schematic cross-sectional view of the movable block structure of the present invention;

[0061] Figure 7 This is a side view of the active block structure of the present invention;

[0062] Figure 8 This is a schematic cross-sectional view of the isostatic pressing mold in the filled state of the present invention;

[0063] Figure 9 This is a schematic diagram of the three-dimensional structure of the shrink mold of the present invention;

[0064] Figure 10 This is a partial cross-sectional view of the shrink mold structure of the present invention;

[0065] Figure 11 This is a schematic diagram of the three-dimensional structure of the medium cylinder of the present invention;

[0066] Figure 12 This is a front view of the welding process of the present invention. Figure 2 ;

[0067] Figure 13 This is a schematic diagram of the method flow of the present invention.

[0068] In the diagram: 1. Elastic outer mold, 10. Tubular mold cavity, 11. Sealing plug, 12. Support seat, 2. Rigid inner mold, 21. Material tray, 3. Shrink mold, 31. Belt body, 311. Limiting part, 32. Connector, 321. Bayonet, 4. Isostatic pressing mold, 41. Bag body, 411. Inlet, 412. Filling cavity, 42. Flanged edge, 5. Rigid support mold, 51. Fixed support ring, 52. Movable block, 521. Medium inlet hole, 522. Covering block, 523. Guide rod, 524. Spring component, 525. Positioning plate, 526. Limiting hole, 6. Medium cylinder, 60. Medium cavity, 61. Strip plate, 611. Positioning hole, 7. Lifting mechanism, 71. Lifting shaft, 711. Thread, 72. Screw nut, 73. Rotary handwheel. Detailed Implementation

[0069] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0070] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0071] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0072] Example 1:

[0073] like Figures 1 to 11 As shown, a sputtering target welding processing equipment includes an elastic outer mold 1 and a rigid inner mold 2 arranged coaxially. A tubular mold cavity 10 for accommodating the powder to be formed is formed between the elastic outer mold 1 and the rigid inner mold 2. The two ends of the tubular mold cavity 10 are sealed by sealing plugs 11.

[0074] Around the outer side wall of the elastic outer mold 1, a shrinkage mold 3, an isostatic pressing mold 4, and a rigid support mold 5 are arranged in sequence and coaxially with the elastic outer mold 1. The elastic outer mold 1, the shrinkage mold 3, the isostatic pressing mold 4, and the rigid support mold 5 are all placed on the support base 12.

[0075] The shrink mold 3 is a strip-shaped shrinkable structure, and the shrink mold 3 shrinks coaxially around the elastic outer mold 1;

[0076] The isostatic mold 4 is arranged around the shrinkage mold 3. The isostatic mold 4 is an expandable and shrinkable bladder structure. After the isostatic medium is filled into the isostatic mold 4 and expands, it squeezes the elastic outer mold 1 to shrink.

[0077] The rigid support mold 5 is arranged around the isostatic pressing mold 4. When the tubular mold cavity 10 is filled with the powder to be formed, the rigid support mold 5 provides rigid support and limit for the elastic outer mold 1.

[0078] Compared with the prior art mentioned in the background document, when filling the molding powder, this application uses a rigid support mold 5 to support the elastic outer mold 1, so that the molding powder filled into the tubular mold cavity 10 can be continuously vibrated and densified by a mechanical vibration device. When performing isostatic pressing, the processing equipment of this application does not need to be disassembled and replaced like in the prior art document. When performing isostatic pressing, the shrinkage mold 3 will replace the rigid support mold 5 to provide support for the elastic outer mold 1, thus ensuring the stability of the shape of the elastic outer mold 1.

[0079] Compared with the prior art reference 2, when isostatic pressing is performed after the molding powder filling is completed, the shrinkage mold 3 will shrink synchronously with the isostatic pressing shrinkage of the elastic outer mold 1, thus maintaining the regular and stable overall shape of the elastic outer mold 1 and preventing local bulging of the elastic outer mold.

[0080] Specifically, the shrink mold 3 includes a belt body 31 and a connector 32;

[0081] The belt body 31 is made of any one of titanium alloy, carbon fiber or PEEK material. One end of the belt body 31 is fixedly connected to the connector 32, and the other movable end of the belt body 31 passes through the connector 32.

[0082] The connector 32 is rigidly configured, and a through slot 321 is provided in the middle of the connector 32. The movable end of the belt 31 is provided through the slot 321, and a limiting part 311 is provided at the movable end of the belt 31 perpendicular to the movable end.

[0083] The movable end of the belt body 31 passes through the latch 321 on the connector 32 and forms a circle around the elastic outer mold 1 to support the elastic outer mold 1. At the same time, the movable end of the belt body 31 can be pulled out through the latch 321 to reduce the circle around the elastic outer mold 1. The limiting part 311 is used to pull out the belt body 31.

[0084] Furthermore, the isostatic pressing mold 4 includes a bladder 41 and a flange 42;

[0085] The bladder 41 is arranged in an open annular shape, with inlets 411 at both ends of the circumferential opening of the bladder 41, and the interior of the bladder 41 is hollow and has a filling cavity 412 for filling isostatic media.

[0086] The flange 42 is disposed at the corresponding inlet 411. The flange 42 is located on the side of the inlet 411 close to the rigid support mold 5, and the flange 42 connects the inlet 411 and the rigid support mold 5. The flange 42 is elastically telescopic.

[0087] The capsule 41 is made of silicone rubber with elastic expansion properties and high temperature resistance. After being filled with an isostatic medium, the capsule 41 can expand rapidly. After expansion, the capsule 41 will hug the shrink mold 3. The capsule 41 performs isostatic compression on the elastic outer mold 1. At the same time, the expansion of the capsule 41 can also ensure the roundness of the entire shrink mold 3, ensuring the regularity of the shape of the shrink mold 3.

[0088] Furthermore, the rigid support mold 5 includes a fixed support ring 51 and a movable block 52;

[0089] The fixing support ring 51 is an open annular arrangement, and the opening of the fixing support ring 51 is directly opposite the opening of the bladder body 41.

[0090] The movable block 52 is disposed at the opening of the fixed support ring 51. The movable block 52 and the fixed support ring 51 are spliced ​​together to form a complete support ring. The movable block 52 is connected to the flange 42. The movable block 52 is movably disposed along the movable end of the belt body 31.

[0091] A medium cylinder 6 is sleeved on the outside of the rigid support mold 5, and a medium cavity 60 is formed between the medium cylinder 6 and the rigid support mold 5.

[0092] The movable block 52 has a through medium inlet hole 521, and the connection position between the flange 42 and the movable block 52 is located at the middle position of the medium inlet hole 521.

[0093] On the other side of the movable block 52 opposite to the flange 42, there is a covering block 522 that covers the limiting part 311. A guide rod 523 is passed through the covering block 522 toward the medium cylinder 6. A tension spring 524 is sleeved on the guide rod 523. The two ends of the spring 524 are fixedly connected to the medium cylinder 6 and the movable block 52, respectively.

[0094] A strip plate 61 is provided on the outer wall of the medium cylinder 6. A positioning hole 611 is provided on the strip plate 61. A positioning plate 525 is provided on the other end of the guide rod 523 opposite to the covering block 522. A limiting hole 526 is provided on the positioning plate 525 to cooperate with the positioning hole 611. When the positioning hole 611 and the limiting hole 526 coincide, a limiting screw 527 is passed through.

[0095] Initially, the elastic outer mold 1, shrinkage mold 3, isostatic pressing mold 4, and rigid support mold 5 are sequentially fitted together. The limiting screw 527 is inserted into the positioning hole 611 and the limiting hole 526. The movable block 52 and the fixed support ring 51 are spliced ​​together to form a complete rigid support mold 5. The isostatic pressing mold 4 is compressed into a flat shape. After the molding powder is filled into the tubular mold cavity 10, the molding powder can be continuously compacted by mechanical vibration through the rigid support mold 5. After the molding powder is compacted, the sealing plug 11 is plugged into the top opening of the tubular mold cavity 10 to make the tubular mold cavity 10 sealed. Then, isostatic pressing is performed.

[0096] During isostatic pressing, the limit screw 527 is first pulled out, causing the movable block 52 to be driven by the restoring force of the spring 524 to detach from the fixed support ring 51. During the detachment of the movable block 52, the inlet 411 of the bladder 41 is opened by the connection of the flange 42, allowing the isostatic medium to enter. Then, the equipment in the isostatic press is filled with the isostatic medium. The isostatic medium continuously enters the bladder 41 through the medium inlet 521 on the movable block 52, causing the bladder 41 to expand and apply isostatic pressing treatment to the elastic outer mold 1. As the isostatic pressure increases, the elastic outer mold 1 is continuously squeezed and contracted. Under the action of the restoring force of the spring 524, the shrinking mold 3 is also continuously pulled and contracted, achieving the purpose of covering the elastic outer mold for support.

[0097] It should be emphasized that the number of movable blocks 52 in this application is not limited to one, and the number of openings on the bladder 41 of the isostatic pressing mold 4 is not limited to one. The number and position of the openings of the bladder 41 are set in correspondence with the number and position of the movable blocks 52. In order to ensure the isostatic pressing pressure of the isostatic pressing mold 4 on the elastic outer mold 1, the number of movable blocks 52 can be adjusted according to the actual design.

[0098] Example 2:

[0099] Referring to Example 1, the differences between this embodiment and Example 1 are described below:

[0100] like Figure 12 As shown, the bottom of the rigid inner mold 2 is integrally connected to the material tray 21. The rigid inner mold 2 is provided with a lifting mechanism 7 that drives the rigid inner mold 2 to lift. The lifting mechanism 7 includes a lifting shaft 71, a lead screw nut 72 and a rotating handwheel 73.

[0101] The lifting shaft 71 is vertically arranged, and the end of the lifting shaft 71 is provided with a thread 711;

[0102] The lead screw nut 72 is rotatably mounted on the support base 12 via a bearing, and the lead screw nut 72 is configured to cooperate with the thread 711.

[0103] The rotating handwheel 73 is sleeved on the outside of the lead screw nut 72, and the rotating handwheel 73 drives the lead screw nut 72 to rotate.

[0104] It should be noted that after the sintering and welding of the molded powder is completed, the molded rotating sputtering target is cooled and discharged after the isostatic medium is discharged, causing the movable block 52 to reset. Then the shrinkage mold 3 is reset, releasing the limiting support of the elastic outer mold 1, allowing the elastic outer mold 1 to detach from the molded rotating sputtering target. After that, the sealing plug 11 at the top of the tubular mold cavity 10 is removed. By rotating the rotating handwheel 73, the screw nut 72 is rotated. After the screw nut 72 is rotated, the lifting shaft 71 is continuously raised, driving the material tray 21 to rise. The material tray 21 carries the molded rotating sputtering target and is raised. After being raised to a certain height, it is convenient to grab the rotating sputtering target and pull it out of the tubular mold cavity 10.

[0105] Example 3:

[0106] like Figure 13 As shown, referring to Embodiments 1 and 2, this embodiment describes a processing method based on the sputtering target welding equipment described in Embodiment 1, including the following steps:

[0107] Step 1: Filling. Initially, the bottom sealing plug 11 has completed the sealing of the bottom opening of the tubular mold cavity 10. Molding powder for molding rotating sputtering targets is filled into the tubular mold cavity 10, and mechanical vibration is performed during the filling process.

[0108] Step 2: Isostatic pressing. After filling, the top opening of the tubular mold cavity 10 is sealed with the sealing plug 11, and the equipment is placed in the isostatic pressing equipment. Then, the limiting screw 527 inserted on the strip plate 61 is pulled out to release the locking of the positioning hole 611 and the limiting hole 526. The spring 524 drives the movable block 52 to disengage from the fixed support ring 51. Simultaneously, the inlet 411 of the bladder 41 is opened by the movable block 52 in cooperation with the flange 42. After the isostatic medium in the isostatic pressing equipment enters the filling cavity 412, it enters the bladder 41 through the medium inlet hole 521 and the inlet 411, causing the bladder 41 to expand and perform isostatic pressing on the molding powder in the tubular mold cavity 10, so that the elastic outer mold 1 is uniformly compressed and contracted.

[0109] During the contraction of the elastic outer mold 1, the spring 524 pulls the movable end of the belt 31 through the covering block 522, so that the belt 31 continuously contracts synchronously with the elastic outer mold 1, and the contraction mold 3 provides circumferential limiting support for the elastic outer mold 1.

[0110] Step 3: Sintering and welding treatment. After the isostatic pressing treatment is completed, the forming powder in the tubular mold cavity 10 is sintered and welded to obtain the formed rotating sputtering target.

[0111] Step 4: Unloading. After the sintering and welding process is completed and the sputtering target material is cooled, the isostatic medium inside the capsule 41 is extracted, the capsule 41 shrinks, the guide rod 523 is pushed synchronously, the movable block 52 is reset, the pull on the belt 31 is released, so that the shrinking mold 3 is reset, the elastic outer mold 1 is reset, the sealing plug 11 at the top of the tubular mold cavity 10 is removed, the rotating handwheel 73 is rotated, and through the engagement of the thread 711 on the lifting shaft 71 and the lead screw nut 72, the rigid inner mold 2 and the material tray 21 are lifted. After the top of the rotating sputtering target material is exposed, the rotating sputtering target material is extracted from the tubular mold cavity 10.

[0112] This application achieves the technical objective of eliminating the need to disassemble and assemble equipment during the filling and isostatic pressing of the molding powder. Furthermore, the elastic outer mold 1 remains in a limiting and supporting state throughout the entire processing, which greatly ensures the regularity of the shape of the molded rotating sputtering target, reduces the difficulty of subsequent processing of the rotating sputtering target, lowers production costs, and avoids waste of molding powder.

[0113] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A sputtering target welding processing device, comprising an elastic outer mold (1) and a rigid inner mold (2) coaxially arranged, characterized in that: The elastic outer mold (1) and the rigid inner mold (2) form a tubular mold cavity (10) for accommodating the powder to be molded, and the two ends of the tubular mold cavity (10) are sealed by sealing plugs (11); Around the outer wall of the elastic outer mold (1), a shrinking mold (3), an isostatic pressing mold (4), and a rigid support mold (5) are arranged in sequence and coaxially with the elastic outer mold (1). The elastic outer mold (1), shrinking mold (3), isostatic pressing mold (4), and rigid support mold (5) are all placed on the support base (12). The shrink mold (3) is a strip-shaped shrinkable structure, and the shrink mold (3) shrinks coaxially around the elastic outer mold (1). The shrink mold (3) includes a strip body (31) and a connector (32). One end of the strip body (31) is fixedly connected to the connector (32), and the other movable end of the strip body (31) passes through the connector (32). The connector (32) is rigidly set, and a through slot (321) is opened in the middle of the connector (32). The movable end of the strip body (31) passes through the slot (321), and the movable end of the strip body (31) is provided with a limiting part (311) that is perpendicular to the movable end. The isostatic mold (4) is arranged around the shrinking mold (3). The isostatic mold (4) is an expandable and shrinkable bladder structure. After the isostatic medium is filled into the isostatic mold (4) and expands, it squeezes the elastic outer mold (1) to shrink. The isostatic mold (4) includes a bladder (41) and a flange (42). The capsule (41) is arranged in an open annular shape. The two ends of the circumferential opening of the capsule (41) are respectively provided with inlets (411), and the interior of the capsule (41) is hollow and has a filling cavity (412) for filling isostatic medium. The flange (42) is provided at the corresponding inlet (411). The flange (42) is located on the side of the inlet (411) close to the rigid support mold (5), and the flange (42) connects the inlet (411) and the rigid support mold (5). The flange (42) is elastically telescopic. The rigid support mold (5) is arranged around the isostatic pressing mold (4). When the tubular mold cavity (10) is filled with the powder to be formed, the rigid support mold (5) provides rigid support and limit for the elastic outer mold (1). The rigid support mold (5) includes a fixed support ring (51) and a movable block (52). The fixing support ring (51) is arranged in an open ring shape, and the opening of the fixing support ring (51) is directly opposite to the opening of the bladder (41). The movable block (52) is disposed at the opening of the fixed support ring (51). The movable block (52) and the fixed support ring (51) are spliced ​​together to form a complete support ring. The movable block (52) is connected to the flange (42). The movable block (52) is movably disposed along the movable end of the belt body (31). The rigid support mold (5) is fitted with a medium cylinder (6), and a medium cavity (60) is formed between the medium cylinder (6) and the rigid support mold (5). The movable block (52) is provided with a covering block (522) on the other side of the flange (42) that covers the limiting part (311), and a guide rod (523) is provided on the covering block (522) facing the medium cylinder (6). A tension spring (524) is sleeved on the guide rod (523), and the two ends of the spring (524) are fixedly connected to the medium cylinder (6) and the movable block (52) respectively. A strip plate (61) is provided on the outer wall of the medium cylinder (6), and a positioning hole (611) is provided on the strip plate (61). A positioning plate (525) is provided on the other end of the guide rod (523) opposite to the covering block (522). A limiting hole (526) is provided on the positioning plate (525) to cooperate with the positioning hole (611). When the positioning hole (611) and the limiting hole (526) coincide, a limiting screw (527) is provided.

2. The sputtering target welding equipment according to claim 1, characterized in that: The belt (31) is any one of titanium alloy, carbon fiber or PEEK material.

3. The sputtering target welding equipment according to claim 1, characterized in that: The movable block (52) has a through medium inlet hole (521), and the connection position between the flange (42) and the movable block (52) is located in the middle of the medium inlet hole (521).

4. The sputtering target welding equipment according to claim 1, characterized in that: The bottom of the rigid inner mold (2) is integrally connected to the material tray (21). The rigid inner mold (2) is provided with a lifting mechanism (7) to drive the rigid inner mold (2) to lift. The lifting mechanism (7) includes a lifting shaft (71), a screw nut (72) and a rotating handwheel (73). The lifting shaft (71) is vertically arranged, and the end of the lifting shaft (71) is provided with a thread (711). The lead screw nut (72) is rotatably mounted on the support base (12) via a bearing, and the lead screw nut (72) is configured to cooperate with the thread (711); The rotating handwheel (73) is sleeved on the outside of the lead screw nut (72), and the rotating handwheel (73) drives the lead screw nut (72) to rotate.

5. A processing method based on the sputtering target welding processing equipment according to any one of claims 1-4, characterized in that, Includes the following steps: Step 1: Filling. Initially, the bottom sealing plug (11) has completed the sealing of the bottom opening of the tubular mold cavity (10). The tubular mold cavity (10) is filled with molding powder for molding the rotating sputtering target, and mechanical vibration is performed during the filling process. Step 2: Isostatic pressing. After filling, the top opening of the tubular mold cavity (10) is sealed with a sealing plug (11), and the equipment is placed in the isostatic pressing equipment. Then, the limiting screw (527) inserted on the strip plate (61) is pulled out to release the locking of the positioning hole (611) and the limiting hole (526). The spring (524) drives the movable block (52) to disengage from the fixed support ring (51). Simultaneously, the inlet (411) of the bladder (41) is opened by the movable block (52) cooperating with the flange (42). After the isostatic medium in the isostatic pressing equipment enters the filling cavity (412), it enters the bladder (41) through the medium inlet hole (521) and the inlet (411), causing the bladder (41) to expand and perform isostatic pressing on the molding powder in the tubular mold cavity (10), so that the elastic outer mold (1) is uniformly compressed and shrinks. During the contraction of the elastic outer mold (1), the spring (524) pulls the movable end of the belt (31) through the covering block (522), so that the belt (31) continuously contracts synchronously with the elastic outer mold (1), and the contraction mold (3) provides circumferential limiting support for the elastic outer mold (1). Step 3: Sintering and welding treatment. After the isostatic pressing treatment is completed, the forming powder in the tubular mold cavity (10) is sintered and welded to obtain the formed rotating sputtering target. Step 4: Discharge. After the sintering and welding process is completed and the sputtering target material is cooled, the isostatic medium inside the capsule (41) is extracted, the capsule (41) shrinks, the guide rod (523) is pushed synchronously, the movable block (52) is reset, the pull on the belt (31) is released, so that the shrink mold (3) is reset, the elastic outer mold (1) is reset, the sealing plug (11) at the top of the tubular mold cavity (10) is removed, the rotating handwheel (73) is rotated, and the rigid inner mold (2) and the material tray (21) are lifted by the thread (711) on the lifting shaft (71) and the screw nut (72). After the top of the rotating sputtering target material is exposed, the rotating sputtering target material is extracted from the tubular mold cavity (10).

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