An automatic feeding device for stripping fluid production

Abstract

This invention relates to the field of stripping fluid production technology, and more particularly to an automatic feeding device for stripping fluid production. The device includes a base with symmetrically distributed side plates fixedly connected to its surface. Multiple experimental tanks are provided on the base surface. A support plate is located above the base, and a first holding cylinder is fixedly connected to the top of the support plate. Multiple second holding cylinders are circumferentially distributed on the sides of the first holding cylinder. A second piston is slidably connected inside each of the second holding cylinders. A support rod is fixedly connected to each second piston, and a trapezoidal block is fixedly connected to the top of the support rod. The inclined surface of each trapezoidal block faces the first holding cylinder, and the inclination angle of the inclined surface of each trapezoidal block is different. This invention can automatically feed the main and auxiliary stripping fluid into the experimental tanks without manual feeding, saving manpower. Simultaneously, different dosages of auxiliary fluid can be fed into different experimental tanks, allowing for simultaneous experiments on stripping fluids with different auxiliary fluid ratios, thus improving experimental efficiency.

Description

Technical Field

[0001] This invention relates to the field of stripping fluid production technology, specifically an automatic feeding device for stripping fluid production. Background Technology

[0002] In the manufacturing process of silicon-based materials, a photoresist coating is usually first laid on the surface of materials such as silicon dioxide and copper, and then exposed and developed using an appropriate mask. Depending on the characteristics of the photoresist used, the exposed or unexposed parts of the photoresist are removed, and a photoresist pattern is formed in the required area. Photoresist stripping solution is used to remove the photoresist coated on the microcircuit protection area as a mask. It is a commonly used chemical required for the photoresist chemical cleaning process of silicon-based materials.

[0003] The main component of the stripping solution is mostly composed of toluene and phenol, while the auxiliary component is mostly an emulsifier. When the stripping solution is applied to different photoresist layers, the ratio of toluene and phenol will change. When the ratio of toluene and phenol in the main component of the stripping solution changes, the emulsifier will also change. Therefore, it is necessary to conduct experiments on the stripping solution to determine the optimal ratio.

[0004] In existing technologies, the main liquid is first added to the experimental tank manually, followed by the auxiliary liquid. After mixing, the mixture is tested to determine the cleaning effect on the photoresist coating. However, this manual feeding method requires adding the main liquid and different doses of auxiliary liquid to the experimental tank in sequence, which wastes manpower and reduces the experimental efficiency of the stripping liquid. Summary of the Invention

[0005] The purpose of this invention is to provide an automatic feeding device for the production of stripping fluid, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] An automatic feeding device for producing a stripping fluid includes a base with symmetrically distributed side plates fixedly connected to its surface. Multiple experimental tanks are provided on the base surface. A support plate is positioned above the base and connected to a drive mechanism for horizontal movement of the support plate. A first holding cylinder is fixedly connected to the top of the support plate and connected to a first outlet pipe. Multiple second holding cylinders are circumferentially distributed on the side of the first holding cylinder, each connected to a second outlet pipe. A second piston is slidably connected inside each of the second holding cylinders, and a support rod is fixedly connected to each second piston. A trapezoidal block is fixedly connected to the top of the support rod. The inclined surfaces of the trapezoidal blocks face the first container, and the inclination angle of each trapezoidal block's inclined surface is different. A rotating rod passes through the top of the first container, and the rotating rod is connected to a first squeezing mechanism, a second squeezing mechanism, and a rotating mechanism. When the lower ends of the first and second liquid outlet pipes move directly above the experimental tank, the rotating mechanism drives the rotating rod to rotate, so that the rotating rod squeezes the liquid inside the first container into the experimental tank through the first squeezing mechanism, and squeezes one of the trapezoidal blocks' inclined surfaces through the second squeezing mechanism, thereby squeezing the liquid inside one of the second container's inclined surfaces into the experimental tank.

[0008] Furthermore: the rotating mechanism includes a gear fixed to the top of the rotating rod, and a toothed plate is fixedly connected to the inner side of the side plate. The toothed plate has multiple sets of teeth with gaps distributed on it. The multiple sets of teeth are located directly above multiple experimental slots, and each set of teeth can make the gear rotate a certain angle.

[0009] Furthermore: the first extrusion mechanism includes a first threaded rod fixed to the lower end of the rotating rod, a threaded sleeve threadedly connected to the lower end of the first threaded rod, a first piston fixedly connected to the bottom of the threaded sleeve, and the first piston slidably connected to the inner wall of the first container.

[0010] Furthermore: symmetrically distributed sliders are fixedly connected to the side wall of the threaded sleeve, and symmetrically distributed grooves are provided on the inner wall of the first container. The ends of the two sliders are respectively located inside the two grooves and are slidably connected to the grooves.

[0011] Furthermore: the drive mechanism includes motors fixed to the side wall of the side plate and symmetrically distributed, a second threaded rod installed at the output end of the motor, and symmetrically distributed fixing blocks fixedly connected to the side of the support plate, the second threaded rod passing through the fixing blocks and threadedly connected to the fixing blocks.

[0012] Furthermore: the second extrusion mechanism includes a push rod fixed to the outside of the rotating rod, a limiting cylinder is fixedly connected to the top of the first holding cylinder, a plurality of push plates symmetrically distributed inside the limiting cylinder, the push plates are in contact with the inclined surface of the trapezoidal block, and a stop block is fixedly connected to the surface of the push plate, the stop block is in contact with the outer wall of the limiting cylinder.

[0013] Furthermore: a fixed plate is fixedly connected to the top of the second container, and a support rod passes through the inside of the fixed plate. An elastic component is fixedly connected to the top of the fixed plate, and the upper end of the elastic component is fixedly connected to the bottom of the trapezoidal block.

[0014] Compared with the prior art, the beneficial effects of the present invention are: it can automatically add the main liquid and auxiliary liquid of the stripping solution into the experimental tank without manual feeding, saving manpower; at the same time, it can add different doses of auxiliary liquid into different experimental tanks, thereby conducting experiments on stripping solutions with different auxiliary liquid ratios simultaneously, improving experimental efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure in an embodiment of the present invention.

[0016] Figure 2 This is a schematic diagram of the top structure of the support plate in an embodiment of the present invention.

[0017] Figure 3 This is a schematic diagram of the bottom structure of the support plate in an embodiment of the present invention.

[0018] Figure 4 This is a schematic diagram of the internal structure of the first and second holding cylinders in an embodiment of the present invention.

[0019] In the diagram: 1-Base; 2-Side plate; 3-Drive mechanism; 31-Motor; 32-Second threaded rod; 33-Fixing block; 4-Rotating mechanism; 41-Gear; 42-Gear plate; 43-Tooth; 5-First extrusion mechanism; 51-First threaded rod; 52-Slider; 53-Threaded sleeve; 54-First piston; 6-Second extrusion mechanism; 61-Limiting cylinder; 62-Push rod; 63-Push plate; 64-Stop block; 65-Fixing plate; 66-Elastic component; 7-Experimental tank; 8-First container; 9-Second container; 10-Support plate; 11-Trapezoidal block; 12-Rotating rod; 13-First outlet pipe; 14-Second outlet pipe; 15-Second piston; 16-Support rod. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0021] The specific implementation of the present invention will be described in detail below with reference to specific embodiments.

[0022] In one embodiment, see Figure 1 , Figure 2 , Figure 3 and Figure 4An automatic feeding device for producing stripping fluid includes a base 1, with symmetrically distributed side plates 2 fixedly connected to the surface of the base 1. Multiple experimental tanks 7 are provided on the surface of the base 1. A support plate 10 is provided above the base 1, and a driving mechanism 3 is connected to the support plate 10. The driving mechanism 3 drives the support plate 10 to move horizontally. A first holding cylinder 8 is fixedly connected to the top of the support plate 10, and the first holding cylinder 8 is connected to a first outlet pipe 13. Multiple second holding cylinders 9 are circumferentially distributed on the side of the first holding cylinder 8, and each second holding cylinder 9 is connected to a second outlet pipe 14. A second piston 15 is slidably connected inside each of the second holding cylinders 9, and a support rod 16 is fixedly connected to the second piston 15. A trapezoidal block 11 is fixedly connected to the top of the support rod 16. The inclined surface of each trapezoidal block 11 faces the first container 8, and the inclination angle of each trapezoidal block 11 is different. A rotating rod 12 passes through the top of the first container 8. The rotating rod 12 is connected to the first squeezing mechanism 5, the second squeezing mechanism 6, and the rotating mechanism 4. When the lower ends of the first liquid outlet pipe 13 and the second liquid outlet pipe 14 move directly above the experimental tank 7, the rotating mechanism 4 drives the rotating rod 12 to rotate, so that the rotating rod 12 squeezes the liquid inside the first container 8 into the experimental tank 7 through the first squeezing mechanism 5, and squeezes the inclined surface of one of the trapezoidal blocks 11 through the second squeezing mechanism 6, thereby squeezing the liquid inside one of the second container 9 into the experimental tank 7.

[0023] In this embodiment, when experimenting with the stripping fluid, the main stripping fluid is placed inside the first container 8, and the auxiliary stripping fluid is placed inside the second container 9. The main stripping fluid can be a mixture of toluene and phenol, and the auxiliary stripping fluid can be an emulsifier, thereby determining the optimal amount of emulsifier. The drive mechanism 3 drives the support plate 10 to move horizontally. When the lower ends of the first outlet pipe 13 and the second outlet pipe 14 move directly above one of the experimental tanks 7, the rotation mechanism 4 drives the rotating rod 12 to rotate. The rotating rod 12, on the one hand, passes through... The first extrusion mechanism 5 extrudes the main stripping liquid inside the first container 8 into the experimental tank 7. Simultaneously, the second extrusion mechanism 6 extrudes the inclined surface of the trapezoidal block 11. The trapezoidal block 11, via the support rod 16, drives the second piston 15 downwards, causing the auxiliary liquid inside the second container 9 to enter the experimental tank 7 through the second outlet pipe 14, thus achieving automatic feeding. Similarly, when the drive mechanism 3 moves the support plate 10 above another experimental tank 7, the rotation mechanism 4 drives the rotating rod 12 to rotate, and the first extrusion mechanism 5 extrudes the main stripping liquid inside the first container 8 into the experimental tank 7. The main stripping fluid inside the first container 8 is squeezed into another experimental tank 7. The second squeezing mechanism 6 squeezes another trapezoidal block 11, causing the auxiliary stripping fluid inside the second container 9 to also enter the experimental tank 7. Due to the different inclination angles of the trapezoidal block 11, the degree of squeezing by the second squeezing mechanism 6 on the trapezoidal block 11 is also different. Therefore, the downward movement of the second piston 15 driven by the support rod 16 is also different. This results in the same dosage of the main stripping fluid entering the experimental tank 7, but different contents of the auxiliary stripping fluid, thus... This allows staff to conduct experiments on stripping solutions with different auxiliary liquid ratios simultaneously, improving experimental efficiency. To facilitate the main stripping solution entering the first container 8 and the auxiliary stripping solution entering the second container 9, inlet pipes are connected to the side walls of the first container 8 and the second container 9. A solenoid valve is installed inside the inlet pipe. When conducting experiments on the stripping solution, the solenoid valve is opened. Under the action of the solenoid valve, the main stripping solution enters the first container 8 through the inlet pipe, and the auxiliary stripping solution enters the second container 9 through the inlet pipe.

[0024] Please see Figure 1 The rotating mechanism 4 includes a gear 41 fixed to the top of the rotating rod 12. A toothed plate 42 is fixedly connected to the inner side of the side plate 2. The toothed plate 42 is provided with multiple sets of teeth 43 with gap distribution. The multiple sets of teeth 43 are located directly above multiple experimental slots 7, and each set of teeth 43 can make the gear 41 rotate a certain angle.

[0025] When the drive mechanism 3 moves the lower ends of the first outlet pipe 13 and the second outlet pipe 14 to directly above the experimental tank 7, the gear 41 at the upper end of the rotating rod 12 will mesh with one set of teeth 43 on the tooth plate 42. The meshing of the teeth 43 with the gear 41 drives the rotating rod 12 to rotate, thereby triggering the operation of the first extrusion mechanism 5 and the second extrusion mechanism 6, thus achieving automatic feeding. No manual feeding is required, saving manpower and improving the experimental efficiency of the stripping liquid. The number of teeth 43 in each set is the same, so that the rotation amplitude of the rotating rod 12 is the same, ensuring that the dosage of the main stripping liquid entering the experimental tank 7 each time is the same.

[0026] Please see Figure 4 The first extrusion mechanism 5 includes a first threaded rod 51 fixed to the lower end of the rotating rod 12, a threaded sleeve 53 threadedly connected to the lower end of the first threaded rod 51, a first piston 54 fixedly connected to the bottom of the threaded sleeve 53, and the first piston 54 slidably connected to the inner wall of the first container 8.

[0027] As the rotating rod 12 rotates, it drives the first threaded rod 51 to rotate. The first threaded rod 51 drives the first piston 54 to move downward through the threaded connection with the threaded sleeve 53, thereby squeezing the main liquid inside the first holding cylinder 8 into the experimental tank 7 through the first liquid outlet pipe 13. Furthermore, the rotation amplitude of the rotating rod 12 is consistent each time, so that the downward movement amplitude of the first piston 54 is the same, ensuring that the dosage of the stripping liquid main liquid entering the experimental tank 7 is the same each time.

[0028] Please see Figure 4 The threaded sleeve 53 has symmetrically distributed sliders 52 fixedly connected to its side wall, and the inner wall of the first holding cylinder 8 has symmetrically distributed grooves. The ends of the two sliders 52 are respectively located inside the two grooves and are slidably connected to the grooves.

[0029] The slide groove, through the slider 52, acts as a limit for the threaded sleeve 53, ensuring the stability of the threaded sleeve 53 during its up-and-down movement.

[0030] Please see Figure 1 The driving mechanism 3 includes a motor 31 fixed on the side wall of the side plate 2 and symmetrically distributed. A second threaded rod 32 is installed at the output end of the motor 31. A fixed block 33 symmetrically distributed is fixedly connected to the side of the support plate 10. The second threaded rod 32 passes through the fixed block 33 and is threadedly connected to the fixed block 33.

[0031] During the stripping fluid experiment, the motor 31 drives the second threaded rod 32 to rotate. The second threaded rod 32 drives the support plate 10 to move horizontally through the threaded connection with the fixed block 33, so that the main stripping fluid and the auxiliary fluid can enter the different experimental tanks 7 in sequence, thereby conducting synchronous experiments on stripping fluids with different contents of auxiliary fluid, which effectively improves the experimental efficiency of the stripping fluid.

[0032] Please see Figure 2 The second extrusion mechanism 6 includes a push rod 62 fixed outside the rotating rod 12. A limiting cylinder 61 is fixedly connected to the top of the first holding cylinder 8. Multiple push plates 63 are symmetrically distributed inside the limiting cylinder 61. The push plates 63 are in contact with the inclined surface of the trapezoidal block 11. A stop block 64 is fixedly connected to the surface of the push plate 63. The stop block 64 is in contact with the outer wall of the limiting cylinder 61.

[0033] As the rotating rod 12 rotates, it sequentially presses the push plate 63 through the push rod 62, causing the push plate 63 to press the inclined surface of the trapezoidal block 11. The trapezoidal block 11 drives the second piston 15 to move downward through the support rod 16, so that the stripping liquid auxiliary liquid inside different second holding cylinders 9 can enter different experimental tanks 7 without manual feeding, effectively improving the experimental efficiency of the stripping liquid. The stop block 64 can limit the push plate 63, ensuring the stability of the push plate 63.

[0034] Please see Figure 2 The top of the second container 9 is fixedly connected to a fixing plate 65, and the support rod 16 passes through the inside of the fixing plate 65. The top of the fixing plate 65 is fixedly connected to an elastic component 66, and the upper end of the elastic component 66 is fixedly connected to the bottom of the trapezoidal block 11.

[0035] The elastic component 66 can apply an elastic support force to the trapezoidal block 11. When the second pressing mechanism 6 stops pressing the trapezoidal block 11, the trapezoidal block 11 can be reset. The elastic component 66 can be a spring. The fixing plate 65 plays a limiting role on the second piston 15, thereby ensuring the initial position of each trapezoidal block 11.

[0036] Working principle: When conducting experiments on the stripping fluid, the main stripping fluid is placed inside the first container 8, and the auxiliary stripping fluid is placed inside the second container 9. The support plate 10 moves horizontally via the threaded connection between the second threaded rod 32 and the fixed block 33. When the lower ends of the first outlet pipe 13 and the second outlet pipe 14 move directly above the experimental tank 7, the gear 41 meshes with the teeth 43. This meshing of the teeth 43 and gear 41 drives the rotating rod 12 to rotate. The rotating rod 12, on one hand, drives the first threaded rod 51 to rotate. The first threaded rod 51, through its threaded connection with the threaded sleeve 53, drives the first piston 54 to move downwards, thereby squeezing the main fluid inside the first container 8 into the experimental tank 7. On the other hand, the rotating rod 12, through the push rod 62, presses the push plate 63, causing the push plate 63 to press the inclined surface of the trapezoidal block 11. The trapezoidal block 11, through the support rod 16, drives the second piston 15 downwards. The first piston 54, by moving the first outlet pipe 13 and the second outlet pipe 14 to the top of the other experimental tank 7, squeezes the main stripping liquid inside the first container 8 into the other experimental tank 7. The push rod 62 pushes the other push plate 63, and the push plate 63 pushes the other trapezoidal block 11, so that the auxiliary stripping liquid inside the other second container 9 also enters the experimental tank 7. However, due to the different inclination angles of the trapezoidal block 11, the degree of compression of the trapezoidal block 11 by the push plate 63 is also different. Therefore, the downward movement of the second piston 15 driven by the support rod 16 is also different. This makes the dosage of the main stripping liquid entering the experimental tank 7 the same, while the dosage of the auxiliary stripping liquid is different. This allows the staff to conduct experiments on stripping liquids with different auxiliary liquid ratios, thus improving the experimental efficiency.

[0037] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An automatic feeding device for producing stripping fluid, comprising a base, wherein symmetrically distributed side plates are fixedly connected to the surface of the base; characterized in that, The base surface is provided with multiple experimental tanks, and a support plate is provided above the base. The support plate is connected to a driving mechanism, which drives the support plate to move horizontally. A first holding cylinder is fixedly connected to the top of the support plate, and the first holding cylinder is connected to a first liquid outlet pipe. Multiple second holding cylinders are arranged circumferentially on the side of the first holding cylinder, and each second holding cylinder is connected to a second liquid outlet pipe. A second piston is slidably connected inside each of the second holding cylinders, and a support rod is fixedly connected to the second piston. A trapezoidal block is fixedly connected to the top of the support rod. The inclined surface of the trapezoidal block faces the first holding cylinder, and the inclination angle of the inclined surface of each trapezoidal block is different. A rotating rod passes through the top of the first holding cylinder, and the rotating rod is connected to a first squeezing mechanism, a second squeezing mechanism, and the rotating mechanism. When the lower ends of the first and second liquid outlet pipes move directly above the experimental tanks, the rotating mechanism drives the rotating rod to rotate, so that the rotating rod squeezes the liquid inside the first holding cylinder into the experimental tank through the first squeezing mechanism. The rotating rod, through a second extrusion mechanism, extrudes the inclined surface of one of the trapezoidal blocks, thereby extruding the liquid inside one of the second containers into the experimental tank. The rotating mechanism includes a gear fixed to the top of the rotating rod, a toothed plate fixedly connected to the inner side of the side plate, and multiple sets of teeth spaced apart on the toothed plate. These multiple sets of teeth are located directly above multiple experimental tanks, and each set of teeth can rotate the gear by a certain angle. The first extrusion mechanism includes a first threaded rod fixed to the lower end of the rotating rod, a threaded sleeve threadedly connected to the lower end of the first threaded rod, a first piston fixedly connected to the bottom of the threaded sleeve, and the first piston slidingly connected to the inner wall of the first container. The second extrusion mechanism includes a push rod fixed to the outside of the rotating rod, a limiting cylinder fixedly connected to the top of the first container, multiple push plates symmetrically distributed inside the limiting cylinder, the push plates abutting against the inclined surface of the trapezoidal block, and a stop block fixedly connected to the surface of the push plate, the stop block abutting against the outer wall of the limiting cylinder.

2. The automatic feeding device for producing stripping fluid according to claim 1, characterized in that, The threaded sleeve has symmetrically distributed sliders fixedly connected to its side wall, and the inner wall of the first container cylinder has symmetrically distributed grooves. The ends of the two sliders are located inside the two grooves respectively and are slidably connected to the grooves.

3. The automatic feeding device for stripping fluid production according to claim 1, characterized in that, The drive mechanism includes motors fixed to the side wall of the side plate and symmetrically distributed. A second threaded rod is installed at the output end of the motor. A fixed block is fixedly connected to the side of the support plate and symmetrically distributed. The second threaded rod passes through the fixed block and is threadedly connected to the fixed block.

4. The automatic feeding device for stripping fluid production according to claim 1, characterized in that, The top of the second container is fixedly connected to a fixed plate, and a support rod passes through the inside of the fixed plate. An elastic component is fixedly connected to the top of the fixed plate, and the upper end of the elastic component is fixedly connected to the bottom of the trapezoidal block.

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