An automated storage and dispatch cabinet for semiconductor products

Abstract

This invention belongs to the field of semiconductor manufacturing auxiliary equipment technology, specifically relating to an automatic storage and dispatch cabinet for semiconductor products, including an automatically controlled cabinet body, a feeding section for placing products, and a discharging section for retrieving products. The feeding section and the discharging section are both located inside the cabinet body. This invention can automatically receive and dispatch product boxes and ensure first-in-first-out, and can automatically adjust humidity and temperature.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing auxiliary equipment technology, specifically relating to an automatic storage and dispatch cabinet for semiconductor products. Background Technology

[0002] A semiconductor molding process is disclosed, applied to the production of semiconductor molded products. Before production, the parts to be manufactured are stored, checked, and issued, allowing for subsequent processing. Semiconductor molding is a mature production process, primarily consisting of: a nitrogen cabinet, an automatic wafer stacker, an injection molding machine, MGP molds, an automatic runner punch, epoxy resin, and the products to be processed. The main working principle is to use the injection molding machine to encapsulate the epoxy resin with the product, primarily to prevent external environmental impact on the product's internal structure.

[0003] However, existing traditional nitrogen cabinets are box-type with compartments, and materials are manually placed, which has the following drawbacks: 1. Traditional nitrogen cabinets use flow meters for nitrogen filling, which cannot guarantee the temperature and humidity of the top and bottom compartments, leading to product oxidation; 2. The cabinet door opens and closes repeatedly, failing to isolate dust particles, easily contaminating products and causing separation; 3. The shelves in traditional nitrogen cabinets are hook-type, posing a risk of detachment, causing products to fall and become unusable; 4. Material handlers must manually place materials into the cabinets, making it difficult to maintain spacing between batches, easily leading to confusion and mixing of materials; 5. [Further issues may arise due to the lack of proper material handling and handling.] 6. Traditional nitrogen cabinets require manual placement of products by material handlers, which cannot guarantee the correct force applied by each person. Excessive force can cause vibration, leading to wire deformation and collapse. 7. Traditional nitrogen cabinets require manual placement of products by material handlers, increasing the risk of contact and potential wire collapse. 8. Traditional nitrogen cabinets require manual removal of products during processing, posing a risk of dropping. 9. Traditional nitrogen cabinets require operators to search for products according to production needs, increasing the risk of wire collapse and mixing. 10. Traditional nitrogen cabinets do not guarantee the first-in, first-out (FIFO) principle. Summary of the Invention

[0004] In view of the above-mentioned shortcomings in the prior art, the present invention provides an automated storage and dispatch cabinet for semiconductor products to solve the above-mentioned problems.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] An automated storage and dispatch cabinet for semiconductor products includes a cabinet body, a feeding section for placing products, and a discharging section for retrieving products. Both the feeding and discharging sections are located within the cabinet body. The cabinet body includes a cabinet frame, an engineering machine computer display screen embedded in the front of the cabinet, an emergency stop switch, a temperature and humidity controller, a push-button switch, and a QR code scanning module. The back of the cabinet contains multiple servo motors g, multiple stepper motor controllers, multiple servo motor drivers, multiple wire harness terminal blocks, a PLC controller, multiple 24V power converters, and an air switch. The cabinet also contains multiple conveyor belts, each equipped with a synchronous belt a, a synchronous pulley a, a bearing a, and a synchronous pulley b. Each bearing a has a bearing stop at its end. Multiple photoelectric sensors are located on one side of each conveyor belt. The servo motors g are rotatably connected to the conveyor belts via the synchronous belts a and bearings a.

[0007] Furthermore, the feeding section includes a lead screw a, two circular guide rails a, lead screw fixing blocks a located at both ends of the lead screw a, a servo motor a corresponding to and connected to the lead screw a and the circular guide rails a, a lead screw stepper motor a, a servo motor b, a servo motor c, a motor coupling a, a lead screw nut a, a linear bearing a, a circular guide rail b, a lead screw b, a bearing b, a limit fixing block a, a linear bearing b, a linear bearing c, a synchronous pulley c, a lead screw c, a lead screw nut b, a lead screw nut fixing block a, a photoelectric switch sensor a, a photoelectric switch sensor b, a synchronous pulley d, a fixing block a, a gripper guard plate a, a fixing block b, a photoelectric switch sensor c, a rubber buffer pad a, a clamping support plate a, a material box detection probe a, a spring a, a probe fixing cover plate a, a photoelectric switch sensor d, a gripper guard plate b, a loading tray a, a rotating shaft a, a bearing c, a synchronous pulley e, a synchronous belt b, and a photoelectric switch sensor A.

[0008] Furthermore, the discharge section includes a lead screw d, two circular guide rails c, lead screw fixing blocks b located at both ends of the lead screw d, a servo motor d corresponding to and connected to the lead screw d and the circular guide rails c, a lead screw stepper motor b, a servo motor e, a servo motor f, a motor coupling b, a lead screw nut c, a linear bearing d, a circular guide rail d, a lead screw e, a bearing d, a limit fixing block b, a linear bearing e, a linear bearing f, a bearing e, a synchronous pulley f, a lead screw f, a lead screw nut d, a photoelectric switch sensor e, a photoelectric switch sensor f, a synchronous belt c, a lead screw fixing block, a fixing block c, a gripper guard plate c, a photoelectric switch sensor g, a rubber buffer pad b, a material box detection probe b, a spring b, a probe fixing cover b, a photoelectric switch sensor h, a gripper guard plate d, a loading tray b, a rotary drawer b, a bearing f, a synchronous pulley g, a synchronous belt d, and a photoelectric switch sensor B.

[0009] Furthermore, the cabinet body is equipped with multiple cabinet doors that rotate accordingly, and each cabinet door is equipped with an electromagnetic lock and a safety door magnetic switch.

[0010] Furthermore, the feeding section and the discharging section are symmetrically distributed on both sides of the cabinet interior, and the conveyor belts are all located between the feeding section and the discharging section.

[0011] Furthermore, the top of the cabinet is equipped with a three-color status light to indicate the operating status of the work cabinet.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] 1. This invention enables automatic product receiving and dispatching, eliminating the need for personnel to manually place or remove products, thus preventing vibrations or accidental touches caused by human placement and effectively reducing problems such as product drops and fraying.

[0014] 2. This invention has an automatic temperature and humidity control function, which can better ensure the storage conditions of the product and greatly improve the quality of the product;

[0015] 3. This invention has an automatic temperature and humidity control function, which automatically adjusts the nitrogen flow rate when environmental conditions are met, thus saving costs;

[0016] 4. This invention can automatically place products according to batch, ensuring that products are processed in whole batches, thus avoiding the need for multiple machine modifications due to batch disorder and the resulting impact on efficiency;

[0017] 5. This invention features a fully sealed structure design, which can prevent dust particles from the environment from entering and affecting product quality;

[0018] 6. This invention can automatically identify and transport products via conveyor belt, ensuring first-in, first-out (FIFO) and preventing products from expiring due to prolonged stagnation in the cabinet. Attached Figure Description

[0019] Figure 1 This is a front view of an embodiment of an automated storage and dispatch cabinet for semiconductor products according to the present invention;

[0020] Figure 2 This is a rear view of an embodiment of an automated storage and dispatch cabinet for semiconductor products according to the present invention;

[0021] Figure 3 This is an exploded view (top view) of an embodiment of an automated storage and dispatch cabinet for semiconductor products according to the present invention;

[0022] Figure 4 This is a three-dimensional structural diagram of the feeding section in an embodiment of an automated storage and dispatch cabinet for semiconductor products according to the present invention;

[0023] Figure 5 This is an exploded view of the feeding section in an embodiment of an automated storage and dispatch cabinet for semiconductor products according to the present invention;

[0024] Figure 6 This is a three-dimensional structural diagram of the discharge section in an embodiment of an automated storage and dispatch cabinet for semiconductor products according to the present invention;

[0025] Figure 7 This is an exploded view of the discharge section in an embodiment of an automated storage and dispatch cabinet for semiconductor products according to the present invention.

[0026] The reference numerals in the accompanying drawings include:

[0027] 1. Servo motor (a), 2. Lead screw stepper motor (a), 3. Servo motor (b), 4. Servo motor (c), 5. Lead screw fixing block (a), 6. Motor coupling (a), 7. Lead screw nut (a), 8. Circular guide rail (a), 9. Lead screw (a), 10. Linear bearing (a), 11. Circular guide rail (b), 12. Lead screw (b), 13. Bearing (b), 14. Limit fixing block (a), 15. Linear bearing (b), 17. Linear bearing (c), 18. Synchronous pulley (c), 19. Lead screw (c), 20. Lead screw nut (b), 21. Lead screw nut fixing block (a), 22. Photoelectric switch sensor (a), 23. Photoelectric switch sensor (b), 24. Synchronous pulley (d), 25. Fixing block (a), 26. 27. Gripper guard plate (a), 28. Fixing block (b), 29. Photoelectric switch sensor (c), 30. Material box (a), 31. Rubber buffer pad (a), 32. Gripper detection probe (a), 33. Spring (a), 34. Probe fixing cover plate (a), 35. Photoelectric switch sensor (d), 36. Gripper guard plate (b), 37. Loading tray (a), 38. Rotary shaft (a), 39. Bearing (c), 40. Synchronous pulley (e), 41. Synchronous belt (b), 42. Photoelectric switch sensor (a), 43. Servo motor (d), 44. Lead screw stepper motor (b), 45. Servo motor (e), 46. Servo motor (f), 47. Lead screw fixing block (b), 48. Motor coupling b. 49 Lead screw nut c. 50 Circular guide rail c. 51 Lead screw d. 52 Linear bearing d. 53 Circular guide rail d. 54 Lead screw e. 55 Bearing d. 56 Limiting block b. 57 Linear bearing e. 58 Linear bearing f. 59 Bearing e. 60 Synchronous pulley f. 61 Lead screw f. 62 Lead screw nut d. 63 Photoelectric switch sensor e. 64 Photoelectric switch sensor f. 65 Synchronous belt c. 66 Lead screw fixing block c. 67 Fixing block c. 68 Clamp guard plate c. 69 Photoelectric switch sensor g. 70 Material box b. 71 Rebar buffer pad b. 72 Material box detection Probe b, 73 Spring b, 74 Probe fixing cover b, 75 Photoelectric switch sensor h, 76 Gripper guard d, 77 Loading tray b, 78 Rotary drawer b, 79 Bearing f, 80 Synchronous pulley g, 81 Synchronous belt d, 82 Photoelectric switch sensor B, 83 Cabinet, 84 Engineering machine computer display screen, 85 Three-color status light, 86 Emergency stop switch, 87 Temperature and humidity controller, 88 Push button switch, 89 QR code scanning module, 92 Servo motor g, 93 Stepper motor controller, 94 Servo motor driver, 95 Cable terminal block, 96 PLC controller, 97 24V power converter, 98 Air switch, 99 Synchronous pulley a, 100 Synchronous belt a, 101 Bearing stop, 102 Bearing a, 103 Photoelectric sensor, 104 Electromagnetic lock, 105 Safety door magnetic switch, 106 Synchronous pulley b, 107 Conveyor belt. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present invention, the technical solution of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0029] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some parts in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0030] Example:

[0031] like Figures 1-7As shown, an automated storage and dispatch cabinet for semiconductor products according to the present invention includes a cabinet body, a feeding section for placing products, and a discharging section for retrieving products. Both the feeding and discharging sections are located within the cabinet body. The cabinet body includes a cabinet (83), an engineering machine computer display screen (84), an emergency stop switch (86), a temperature and humidity controller (87), a push-button switch (88), and a QR code scanning module (89) embedded on the front of the cabinet (83). The back of the cabinet (83) houses multiple servo motors (92), multiple stepper motor controllers (93), and multiple servo motor drivers (94). The cabinet contains multiple 95 wire strip terminal blocks, a 96 PLC controller, multiple 97 24V power converters, and a 98 air switch. The cabinet also houses multiple 107 conveyor belts, each equipped with a 100 synchronous belt a, a 99 synchronous pulley a, a 102 bearing a, and a 106 synchronous pulley b. Each 102 bearing a has a 101 bearing stop at its end. Multiple 103 photoelectric sensors are located on one side of each 107 conveyor belt. A 92 servo motor g is connected to the 107 conveyor belts via the 100 synchronous belt a and the 102 bearing a for feeding. The component includes a 9-lead screw a, two 8-circular guide rails a, 5-lead screw fixing blocks a located at both ends of the 9-lead screw a, a 1 servo motor a, a 2 lead screw stepper motor a, a 3 servo motor b, a 4 servo motor c, a 6 motor coupling a, a 7 lead screw nut a, a 10 linear bearing a, a 11 circular guide rail b, a 12 lead screw b, a 13 bearing b, a 14 limit fixing block a, a 15 linear bearing b, a 17 linear bearing c, an 18 synchronous pulley c, a 19 lead screw c, a 20 lead screw nut b, and a 21 lead screw. Nut fixing block a, 22 photoelectric switch sensor a, 23 photoelectric switch sensor b, 24 synchronous pulley d, 25 fixing block a, 26 gripper guard plate a, 27 fixing block b, 28 photoelectric switch sensor c, 30 rubber buffer pad a, 31 clamping support plate a, 32 material box detection probe a, 33 spring a, 34 probe fixing cover plate a, 35 photoelectric switch sensor d, 36 gripper guard plate b, 37 loading tray a, 38 rotating shaft a, 39 bearing c, 40 synchronous pulley e, 41 synchronous belt b, and 42 photoelectric switch sensor A.The discharge section includes a 51 lead screw d, two 50 circular guide rails c, 47 lead screw fixing blocks b located at both ends of the 51 lead screw d, a 43 servo motor d, a 44 lead screw stepper motor b, a 45 servo motor e, a 46 servo motor f, a 48 motor coupling b, a 49 lead screw nut c, a 52 linear bearing d, a 53 circular guide rail d, a 54 lead screw e, a 55 bearing d, a 56 limit fixing block b, a 57 linear bearing e, a 58 linear bearing f, a 59 bearing e, a 60 synchronous pulley f, a 61 lead screw f, a 62 lead screw nut d, a 63 photoelectric switch sensor e, a 64 photoelectric switch sensor f, a 65 synchronous belt c, a 66 lead screw fixing block, and a 67 fixed... The components include: fixed block c, gripper guard plate c, photoelectric switch sensor g, tendon buffer pad b, material box detection probe b, spring b, probe fixing cover b, photoelectric switch sensor h, gripper guard plate d, loading pallet b, rotary drawer b, bearing f, synchronous pulley g, synchronous belt d, and photoelectric switch sensor B. The cabinet body has multiple doors that rotate accordingly. Each door is equipped with an electromagnetic lock (104) and a safety door magnetic switch (105). The feeding and discharging sections are symmetrically distributed on both sides of the cabinet body. The conveyor belts (107) are located between the feeding and discharging sections. The top of the cabinet body (83) also has a three-color status light (85) to indicate the operating status of the work cabinet. The specific operating steps for using the automated product storage and dispatch cabinet are as follows: 1. The material handler scans the process card QR code using the 89 QR code scanning module, and the system automatically identifies product and material information; 2. After the system identifies the product and material information, the electromagnetic lock 104 in the feeding section releases, and the safety door opens; 3. The product material box is placed into the loading tray a 37 in the feeding section; 4. After the product material box is placed, the safety door is closed; 5. The material handler presses the start switch; 6. The servo motor b starts working, driving the rotating shaft a 38 via the synchronous pulley d 24 and the synchronous belt. 41. Synchronous belt b moves product 29, material box a, towards 26, gripper guard plate a; VII. When product 29, material box a, triggers photoelectric switch sensor A (42), servo motor b (3) stops working; VIII. Servo motor c (4) starts working, driving clamping support plate a (31) towards product 29, material box a, via synchronous pulley c (18), synchronous belt, lead screw c (19), and lead screw nut fixing block a (21); IX. When the elastic buffer pad a (30) presses against the product, the pressure of the material box detection probe (32) compresses spring a (33), triggering photoelectric switch sensor d (35), and servo motor c (4) stops working; X. Servo motor a (1) starts working, driving the entire feeding gripper section towards the designated cabinet compartment (83) via motor coupling a (6), lead screw a (9), lead screw nut a (7), and lead screw fixing block a (5); XI. After the feeding gripper section transports product 29, material box a, to the designated cabinet compartment (83), the lead screw stepper motor a (2) starts rotating.The 19 lead screw c, 15 linear bearing b, and 25 fixed block a feeding section 37 loading pallet a press down the telescopic stop at the feed point of the 83 cabinet 107 conveyor belt; XII. The 4 servo motor c starts working, driving the 31 clamping support plate a to move in the opposite direction to the product 29 material box a through the 18 synchronous pulley c, synchronous belt, 19 lead screw c, and 21 lead screw nut fixed block a; XIII. The 31 clamping support plate a, 30 elastic buffer pad a, and 32 material box detection probe a disengage from the material box, the 35 photoelectric switch sensor d is detrimental, and the 4 servo motor c stops working after the 31 clamping support plate a reaches the set height; XIV. The 3 servo motor b starts working, driving the 38 rotating shaft a and 41 synchronous belt b through the 24 synchronous pulley d and synchronous belt to transport the product 29 material box a to the 83 cabinet 107. 15. Simultaneously, servo motor g (92) operates, conveying product 29 (material box a) to the discharge section via synchronous pulley b (106) and conveyor belt (107); 16. When conveyor belt 107 moves product 29 (material box a) to the empty position of the layer, it triggers photoelectric sensor 103 at that position, after which servo motor g (92) stops working; 17. The storage action of product 29 (material box a) for this batch is completed; 18. The operator scans the equipment's QR code using QR code scanning module (89); 19. The computer of the automatic product storage and dispatch cabinet calculates the layer where the earliest product to be processed is placed; 20. Servo motor d (43) of the discharge section starts working, driving the entire discharge gripper section to move towards the designated layer of cabinet (83) via motor coupling b (48), lead screw d (51), lead screw nut c (49), and lead screw fixing block (66). 21. After the discharge gripper reaches the designated compartment 83, the 77 loading pallet b of the discharge section presses down the telescopic stop at the discharge point of the 107 conveyor belt inside the 83 compartment. 22. Servo motor g starts working, conveying the product box to the discharge gripper via synchronous pulley b (106) and conveyor belt 107. Simultaneously, servo motor e starts working, driving the 78 rotating drawer b and synchronous belt d (65) to convey product box b towards gripper guard plate c (68) via synchronous pulley and synchronous belt c. After product box b triggers photoelectric switch sensor B (82), servo motor e stops working. 23. Servo motor f starts working. The clamping support plate moves towards product 70 (material box b) via the synchronous pulley, synchronous belt c (65), lead screw f (61), lead screw nut d (62), and lead screw nut fixing block; Twenty-four, when the elastic buffer pad b (71) presses against the product material box, the material box detection probe b (72) compresses the spring b (73), triggering the photoelectric switch sensor h (75), and the servo motor f (46) stops working; Twenty-five, the lead screw stepper motor b (44) controls the lead screw to rotate, driving the fixing block c (67) to move backward away from the telescopic stop post at the conveyor belt outlet of cabinet 107 (83), triggering the photoelectric switch sensor g (69), and the lead screw stepper motor b (44) stops working; Twenty-six, the servo motor d (43) starts working.The entire discharge gripper section moves towards the discharge set position via motor coupling b (48), lead screw d (51), lead screw nut c (49), and lead screw fixing block (66); Twenty-seven, after the discharge gripper section reaches the set position, servo motor d (43) stops working; Twenty-eight, servo motor f (46) starts working, driving the clamping support plate to move in the opposite direction to product box b (70) via synchronous pulley, synchronous belt c (65), lead screw f (61), lead screw nut d (62), and lead screw nut fixing block; Twenty-nine, the clamping support plate, elastic buffer pad b (71), and box detection probe b disengage from the box, photoelectric switch sensor h (75) de-triggers, and servo motor f (46) stops working after the clamping support plate reaches the set height; Thirtieth, the electromagnetic lock 104 of the discharge section releases, the safety door opens, and the operator takes out the product box to be processed; Thirty-one, the product distribution action is completed; Thirty-two, the above actions are repeated for storing and distributing new products to be processed.

[0032] The automated product storage and dispatch cabinet (cabinet 83) uses photoelectric switches and sensors at intervals on each layer to detect the position of product boxes on the conveyor belt (cabinet 107) within the cabinet. A PCL-controlled servo drive controller powers the motors, and a QR code scanning module (cabinet 89) enables automatic system verification. A temperature and humidity control module automatically adjusts the nitrogen flow rate to maintain proper temperature and humidity within the cabinet. All safety doors are equipped with electromagnetic locks (cabinet 104) and magnetic switches to prevent personal injury. Employees scan the equipment's QR code, and the system automatically matches the corresponding product to be processed, prioritizing a first-in, first-out (FIFO) principle.

[0033] The above are merely embodiments of the present invention. Commonly known structures and characteristics of the solutions are not described in detail here. Those skilled in the art are aware of all common technical knowledge in the field prior to the application date or priority date, are aware of all existing technologies in that field, and have the ability to apply conventional experimental methods prior to that date. Those skilled in the art can, based on the guidance provided in this application, improve and implement this solution in combination with their own capabilities. Some typical known structures or methods should not be obstacles for those skilled in the art to implement this application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the structure of the present invention. These should also be considered within the scope of protection of the present invention, and will not affect the effectiveness of the implementation of the present invention or the practicality of the patent.

[0034] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components. In the description of the present invention, it should be understood that if terms such as "upper," "lower," "left," "right," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting the present patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0035] In the description of this invention, unless otherwise explicitly specified and limited, the term "connection" or similar designation indicating a connection between components should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

Claims

1. A cabinet suitable for automatic storage and delivery of semiconductor products, characterized in that: The system includes a cabinet section, a feeding section for placing products, and a discharging section for retrieving products. Both the feeding and discharging sections are located within the cabinet section. The cabinet section includes a cabinet body, an engineering machine computer display screen embedded in the front of the cabinet, an emergency stop switch, a temperature and humidity controller, a push-button switch, and a QR code scanning module. The back of the cabinet contains multiple servo motors g, multiple stepper motor controllers, multiple servo motor drivers, multiple wire harness terminal blocks, a PLC controller, multiple 24V power converters, and an air switch. The cabinet also contains multiple conveyor belts, each equipped with a synchronous belt a, a synchronous pulley a, a bearing a, and a synchronous pulley b. Each bearing a has a bearing stop at its end. Each conveyor belt has telescopic stop posts at its feeding and discharging ends. Multiple photoelectric sensors are located on one side of each conveyor belt. The servo motor g is rotatably connected to the conveyor belt via the synchronous belt a and the bearing a. The feeding section includes a lead screw a, two circular guide rails a, lead screw fixing blocks a at both ends of the lead screw a, a servo motor a corresponding to and connected to the lead screw a and the circular guide rails a, a lead screw stepper motor a, a servo motor b, a servo motor c, a motor coupling a, a lead screw nut a, a linear bearing a, a circular guide rail b, a lead screw b, a bearing b, a limit fixing block a, a linear bearing b, a linear bearing c, a synchronous pulley c, a lead screw c, a lead screw nut b, a lead screw nut fixing block a, a photoelectric switch sensor a, a photoelectric switch sensor b, a synchronous pulley d, a fixing block a, a gripper guard plate a, a fixing block b, a photoelectric switch sensor c, a rubber buffer pad a, a clamping support plate a, a material box detection probe a, a spring a, a probe fixing cover plate a, a photoelectric switch sensor d, a gripper guard plate b, a loading tray a, a rotating shaft a, a bearing c, a synchronous pulley e, a synchronous belt b, and a photoelectric switch sensor A; The product box is placed on the loading tray a in the feeding section. After the product box is placed, the safety door is closed, and the material handler presses the start switch. The servo motor b starts working, driving the rotating shaft a and the synchronous belt b via the synchronous pulley d and synchronous belt to move the product box towards the gripper guard plate a. When the product box triggers the photoelectric switch sensor A, the servo motor b stops working. The servo motor c drives the clamping support plate a towards the product box via the synchronous pulley c, synchronous belt, lead screw c, and lead screw nut fixing block a. When the elastic buffer pad a presses against the product box, the pressure of the box detection probe a compresses the spring a, triggering the photoelectric switch sensor d, and the servo motor c stops working. The servo motor a drives the entire feeding gripper section towards the designated cabinet compartment via the motor coupling a, lead screw a, lead screw nut a, and lead screw fixing block a. The feeding gripper section transports the product box to the designated compartment. After the cabinet is partitioned, the lead screw stepper motor a starts to rotate, driving the loading pallet a through the lead screw b, linear bearing b, and fixed block a to press down the telescopic stop at the feed point of the cabinet conveyor belt. The servo motor c drives the clamping support plate a to move in the opposite direction to the product box through the synchronous pulley c, synchronous belt, lead screw c, lead screw nut, and fixed block a. The clamping support plate a, the elastic buffer pad a, and the material box detection probe a disengage from the material box, the photoelectric switch sensor d is detrimentalized, and the servo motor c stops working after the clamping support plate a reaches the set height. The servo motor b starts working, driving the rotating shaft a and synchronous belt b through the synchronous pulley d and synchronous belt to convey the product box towards the cabinet conveyor belt. At the same time, the servo motor g works, conveying the product box to the discharge section through the conveyor belt. The conveyor belt conveys the product box to the empty position of this layer, triggering the photoelectric sensor at this position, and then the servo motor g stops working. The discharge section includes a lead screw d, two circular guide rails c, lead screw fixing blocks b located at both ends of the lead screw d, a servo motor d corresponding to and connected to the lead screw d and the circular guide rails c, a lead screw stepper motor b, a servo motor e, a servo motor f, a motor coupling b, a lead screw nut c, a linear bearing d, a circular guide rail d, a lead screw e, a bearing d, a limit fixing block b, a linear bearing e, a linear bearing f, a bearing e, a synchronous pulley f, a lead screw f, a lead screw nut d, a photoelectric switch sensor e, a photoelectric switch sensor f, a synchronous belt c, a lead screw fixing block, a fixing block c, a gripper guard plate c, a photoelectric switch sensor g, a rubber buffer pad b, a material box detection probe b, a spring b, a probe fixing cover b, a photoelectric switch sensor h, a gripper guard plate d, a loading tray b, a rotating shaft b, a bearing f, a synchronous pulley g, a synchronous belt d, and a photoelectric switch sensor B; The servo motor d in the discharge section starts working, driving the entire discharge gripper section towards the designated cabinet compartment via motor coupling b, lead screw d, lead screw nut c, and lead screw fixing block b. Once the discharge gripper section reaches the designated cabinet compartment, the loading pallet b in the discharge section presses down the telescopic stop at the discharge point of the conveyor belt inside the cabinet. The servo motor g starts working, conveying the product box to the discharge gripper via the conveyor belt. Simultaneously, the servo motor e starts working, driving the rotating shaft b and synchronous belt d towards the gripper guard plate c via synchronous pulley and synchronous belt c. After the product box triggers the photoelectric switch sensor B, the servo motor e stops working, and the servo motor f starts working, driving the clamping support plate towards the product box via synchronous pulley, synchronous belt c, lead screw f, lead screw nut d, and lead screw nut fixing block. When the elastic buffer pad b presses against the product box, the pressure probe b of the product box detects pressure... Spring b triggers photoelectric switch sensor h, servo motor f stops working, lead screw stepper motor b controls lead screw e to rotate, driving fixed block c to move backward away from the conveyor belt outlet telescopic stop column of the cabinet. After triggering photoelectric switch sensor g, lead screw stepper motor b stops working, servo motor d starts working, driving the entire discharge gripper part to move towards the discharge set position through motor coupling b, lead screw d, lead screw nut c, and lead screw fixed block b. After the discharge gripper part reaches the set position, servo motor d stops working, servo motor f starts working, driving clamping support plate to move in the opposite direction to the product box through synchronous pulley, synchronous belt c, lead screw f, lead screw nut d, and lead screw nut fixed block. Clamping support plate, elastic buffer pad b, and box detection probe b disengage from the box, photoelectric switch sensor h is detrimentalized, and servo motor f stops working after clamping support plate reaches the set height.

2. A cabinet for automatic storage and delivery of semiconductor products according to claim 1, characterized in that: The cabinet body is equipped with multiple cabinet doors that rotate accordingly, and each cabinet door is equipped with an electromagnetic lock and a safety door magnetic switch.

3. A cabinet for automatic storage and delivery of semiconductor products according to claim 2, characterized in that: The feeding section and the discharging section are symmetrically distributed on both sides of the cabinet interior, and the conveyor belts are located between the feeding section and the discharging section.

4. A cabinet for automatic storage and delivery of semiconductor products according to claim 3, characterized in that: The top of the cabinet is also equipped with a three-color status light to indicate the operating status of the cabinet.

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