Arc target rotating push-pull mechanism suitable for vacuum high-temperature environment

Abstract

An arc target rotating push-pull mechanism suitable for vacuum high-temperature environment, comprising a furnace shell assembly, a driving assembly and an arc ignition assembly. The furnace shell assembly comprises an inner enclosure plate, an outer enclosure plate, a through pipe and an arc target assembly. The arc target assembly comprises an arc target auxiliary anode and an arc target material. The driving assembly comprises a mounting seat, a gas cylinder, a connecting block and a bellows arranged between the connecting block and the mounting seat. The arc ignition assembly comprises a push-pull rod, an arc ignition needle, a push-pull slot, a guide block and a limiting column. Compared with the prior art, the driving assembly pushes the arc ignition assembly to move, the distance between the two is controllable, the work is more stable, and the arc ignition needle will not be at risk of melting due to long-time contact. At the same time, by arranging the limiting column and the push-pull slot, the position change of the arc ignition needle is realized. Finally, by arranging the bellows, the driving assembly will not rub against the sealing element and cause rubber aging, avoiding air leakage.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and in particular to an arc target rotation push-pull mechanism suitable for vacuum high-temperature environments. Background Technology

[0002] Arc ion plating technology is a process that uses a controlled electric arc to evaporate the metal on a target surface under vacuum conditions. A high bias voltage is applied to the substrate, causing the evaporated target particles to bombard the substrate at high speed, forming a thin film. Since the arc on the target surface is supplied by a low-voltage, high-current DC power supply, it can only sustain the arc and cannot spontaneously generate one; a separate ignition structure is required to ignite it. During arc ignition, an anode current is applied through an ignition needle, and a cathode current is applied to the target. The ignition needle briefly contacts the target, causing a brief short circuit between the anode and cathode. Then, as the ignition needle leaves the target surface, a breakdown arc occurs in the anode-cathode circuit. A stable low-voltage, high-current output from the arc power supply enables the arc to sustain itself.

[0003] Existing arc-starting needles generally use pneumatic ignition, which involves adding a cylinder behind the needle. The cylinder's back-and-forth movement achieves contact and separation between the needle and the target surface. During the coating process, if the distance between the arc-starting needle and the target surface is too close, the needle tip temperature will continuously rise, and the persistent arc will cause the tip to melt, preventing the coating process from continuing after arc extinguishing. If the distance between the arc-starting needle and the target is too far, the needle tip cannot make contact with the target surface, thus preventing arc initiation.

[0004] In addition, the sealing method between the arc-starting needle and the vacuum chamber is a rubber seal. However, when the arc-starting needle moves back and forth, it inevitably rubs against the rubber, which makes the rubber prone to aging or damage, resulting in air leakage in the vacuum chamber and seriously affecting the coating quality. Summary of the Invention

[0005] In view of this, the present invention provides an arc target rotation push-pull mechanism suitable for vacuum high-temperature environments to solve the above-mentioned technical problems.

[0006] An arc target rotation push-pull mechanism suitable for vacuum high-temperature environments includes a furnace shell assembly, a drive assembly mounted on the furnace shell assembly, and an arc-initiating assembly passing through the furnace shell assembly. The furnace shell assembly includes an inner shroud plate, an outer shroud plate spaced apart from the inner shroud plate, a through-tube mounted on the inner and outer shroud plates, and an arc target assembly passing through both the inner and outer shroud plates. The inner and outer shroud plates are spaced apart. The through-tube passes through both the inner and outer shroud plates. The arc target assembly includes an arc target anode and an arc target material. The drive assembly includes an insulating pad mounted on the outer shroud plate, a mounting base, a cylinder mounted on the mounting base, a connecting block mounted on the cylinder, a bellows between the connecting block and the mounting base, and a sealing ring mounted on the insulating pad. One end of the connecting block is fixed to the drive end of the cylinder, and the other end is fixed to the arc-initiating assembly. Both ends of the bellows are fixed to the mounting base and the connecting block, respectively. The arc-initiating assembly includes a push-pull rod passing through the inner and outer panels, an arc-initiating pin connected to the push-pull rod, a push-pull groove on the push-pull rod, a guide block on the mounting base, and a limiting post on the guide block. One end of the push-pull rod is connected to the connecting block and is rotatable about a central axis. The arc-initiating pin is fixed to the push-pull rod by fasteners and is located at the free end of the push-pull rod away from the inner panel. One end of the limiting post is fixed to the guide block, and the other end is inserted into the push-pull groove.

[0007] Furthermore, the arc target assembly is disposed through the inner and outer panels and is exposed via a flange on the side of the inner panel away from the outer panel.

[0008] Furthermore, the insulating pad is fixed to the end of the tube by fasteners and is located on the side of the outer plate away from the inner plate.

[0009] Furthermore, the sealing ring is located between the through tube and the insulating pad.

[0010] Furthermore, the cylinder is fixed on the mounting base, and the driving direction is toward the direction away from the outer plate.

[0011] Furthermore, the other end of the push-pull rod passes through the inner and outer panels and extends toward a free end away from the inner panel.

[0012] Furthermore, the push-pull groove is provided on the body of the push-pull rod, the groove direction is the radial direction of the push-pull rod, and the length direction of the push-pull groove is along the surface of the push-pull rod and inclined at 15~45° to the axial direction of the push-pull rod.

[0013] Compared with existing technologies, the arc target rotation push-pull mechanism for vacuum high-temperature environments provided by this invention uses a drive assembly to move the arc-igniting assembly, allowing the arc-igniting needle to move closer to the arc target assembly when ignition is needed and further away when ignition is not needed. This controllable distance ensures more stable operation and eliminates the risk of the arc-igniting needle melting due to prolonged contact. Simultaneously, the limiting post and push-pull groove allow the push rod to rotate during movement, thereby changing the position of the arc-igniting needle. Finally, the bellows prevents the drive assembly from rubbing against the seals and causing rubber aging, avoiding the risk of air leakage in vacuum operating environments. Attached Figure Description

[0014] Figure 1 This invention provides a structural schematic diagram of an arc target rotation push-pull mechanism suitable for vacuum high-temperature environments.

[0015] Figure 2 for Figure 1 A schematic diagram of the drive assembly and arc-initiating assembly of an arc target rotary push-pull mechanism suitable for vacuum high-temperature environments. Detailed Implementation

[0016] The following provides a more detailed description of specific embodiments of the present invention. It should be understood that the description of the embodiments of the present invention herein is not intended to limit the scope of protection of the present invention.

[0017] like Figures 1 to 2 The diagram shows a structural schematic of the arc target rotation push-pull mechanism suitable for vacuum high-temperature environments provided by the present invention. The arc target rotation push-pull mechanism for vacuum high-temperature environments includes a furnace shell assembly 10, a drive assembly 20 disposed on the furnace shell assembly 10, and an arc-initiating assembly 30 passing through the furnace shell assembly 10. It is conceivable that the arc target rotation push-pull mechanism for vacuum high-temperature environments also includes other functional modules, such as an automatic control system, a power supply system, etc., which are technologies well known to those skilled in the art and will not be described in detail here.

[0018] The furnace shell assembly 10 is the sidewall of an arc ion plating device, with one side being a vacuum environment and the other side being a natural environment. The furnace shell assembly 10 includes an inner shroud 11, an outer shroud 12 spaced apart from the inner shroud 11, a through-tube 13 disposed on the inner shroud 11 and the outer shroud 12, and an arc target assembly 14 disposed through the inner shroud 11 and the outer shroud 12.

[0019] The inner shroud 11 and outer shroud 12 are spaced apart to allow coolant to flow within them for cooling. The through-tube 13 passes through both the inner shroud 11 and outer shroud 12, serving as a channel for the arc-starting assembly 30. The arc target assembly 14 passes through both the inner shroud 11 and outer shroud 12, and is exposed via a flange on the side of the inner shroud 11 away from the outer shroud 12. It includes an arc target anode and an arc target material. This is a common technique widely used in vacuum coating technology and should be well known to those skilled in the art; therefore, its structure and function will not be described in detail here.

[0020] The drive assembly 20 includes an insulating pad 21 disposed on the outer plate 12, a mounting base 22 disposed on the insulating pad 21, a cylinder 23 disposed on the mounting base 22, a connecting block 24 disposed on the cylinder 23, a bellows 25 fixed between the connecting block 24 and the mounting base 22, and a sealing ring 26 disposed on the insulating pad 21.

[0021] The insulating pad 21 is fixed to the end of the through-tube 13 by fasteners and is located on the side of the outer plate 12 away from the inner plate 11, to seal the gap between the mounting base 22 and the through-tube 13 and prevent it from affecting the vacuum working environment. The mounting base 22 is fixed to the insulating pad 21 by fasteners to serve as a base for fixing and supporting the drive assembly 20. The cylinder 23 is fixed to the mounting base 22 and drives in a direction away from the outer plate 12 to provide driving force for the movement of the arc-starting assembly 30. One end of the connecting block 24 is fixed to the driving end of the cylinder 23 and the other end is fixed to the arc-starting assembly 30 to provide linkage. The bellows 25 is made of stainless steel and its two ends are fixed to the mounting base 22 and the connecting block 24 by welding, respectively, to protect the arc-starting assembly 30. The sealing ring 26 is located between the through-tube 13 and the insulating pad 21 to seal the gap at the connection and prevent it from affecting the vacuum environment.

[0022] The arc-initiating assembly 30 includes a push-pull rod 31 passing through the inner plate 11 and the outer plate 12, an arc-initiating pin 32 connected to the push-pull rod 31, a push-pull groove 33 provided on the push-pull rod 31, a guide block 34 provided on the mounting base 22, and a limiting post 35 provided on the guide block 34.

[0023] One end of the push-pull rod 31 is connected to the connecting block 24 and can rotate about the central axis. The other end passes through the inner plate 11 and the outer plate 12 and extends towards the free end away from the inner plate 11, so as to perform push-pull movement under the drive of the cylinder 23. The arc-initiating needle 32 is fixed to the push-pull rod 31 by fasteners. It is an L-shaped rod structure and is located on the free end of the push-pull rod 31 away from the inner plate 11, so as to ignite the target surface after being energized. The push-pull groove 33 is provided on the rod body of the push-pull rod 31. The groove direction is radial to the push-pull rod 31, and the length direction of the push-pull groove 33 is along the surface of the push-pull rod 31 and inclined at 15~45° to the axial direction of the push-pull rod 31. The guide block 34 is fixed to the mounting base 22 by fasteners and passes through the insulating pad 21 to fix the limiting post 35. One end of the limiting post 35 is fixed to the guide block 34, and the other end is inserted into the push-pull groove 33. It can be imagined that when the cylinder 22 drives the push-pull rod 31 to perform a push-pull movement, the limiting post 35 will move from one end of the push-pull groove 33 to the other end. At this time, since the push-pull groove 33 is inclined axially, the push-pull rod 31 will rotate, thereby driving the arc-initiating needle 32 to rotate.

[0024] In use, the arc-initiating needle 32, which needs to be ignited, is close to the arc target assembly 14 and located directly above the arc target assembly 14. After ignition is completed, the cylinder 23 drives the push-pull rod 31 to move and rotates under the action of the limiting post 35 and the push-pull groove 33, so that the free end of the arc-initiating needle 32 is away from the arc target assembly 14 and is located outside the arc target assembly 14.

[0025] Compared with existing technologies, the arc target rotation push-pull mechanism for vacuum high-temperature environments provided by this invention uses the drive component 20 to drive the arc ignition component 30, allowing the arc ignition needle 32 to move closer to the arc target component 14 when ignition is needed and further away from the arc target component 14 when ignition is not needed. This controllable distance ensures more stable operation and eliminates the risk of the arc ignition needle 32 melting due to prolonged contact. Simultaneously, the limiting post 35 and push-pull groove 33 cause the push rod 31 to rotate during movement, thereby changing the position of the arc ignition needle 32. Finally, the bellows 25 prevents the drive component 20 from rubbing against the seals and causing rubber aging, avoiding the risk of air leakage in vacuum operating environments.

[0026] The above are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions or improvements within the spirit of the present invention are covered within the scope of the claims of the present invention.

Claims

1. An arc target rotation push-pull mechanism suitable for vacuum high-temperature environments, characterized in that: The arc target rotation push-pull mechanism suitable for vacuum high-temperature environments includes a furnace shell assembly, a drive assembly mounted on the furnace shell assembly, and an arc-initiating assembly passing through the furnace shell assembly. The furnace shell assembly includes an inner cladding plate, an outer cladding plate spaced apart from the inner cladding plate, a through-tube mounted on the inner and outer cladding plates, and an arc target assembly passing through both the inner and outer cladding plates. The inner and outer cladding plates are spaced apart, and the through-tube passes through both. The arc target assembly includes an arc target anode and an arc target material. The drive assembly includes an insulating pad mounted on the outer cladding plate, a mounting base, a cylinder mounted on the mounting base, a connecting block mounted on the cylinder, and a corrugated plate between the connecting block and the mounting base. The tube and a sealing ring disposed on the insulating pad, one end of the connecting block is fixed to the drive end of the cylinder and the other end is fixed to the arc-initiating assembly, both ends of the bellows are respectively fixed to the mounting base and the connecting block, the arc-initiating assembly includes a push-pull rod passing through the inner and outer plates, an arc-initiating pin connected to the push-pull rod, a push-pull groove disposed on the push-pull rod, a guide block disposed on the mounting base, and a limiting post disposed on the guide block, one end of the push-pull rod is connected to the connecting block and can rotate about the central axis, the arc-initiating pin is fixed to the push-pull rod by fasteners and is located on the free end of the push-pull rod away from the inner plate, one end of the limiting post is fixed to the guide block and the other end is inserted into the push-pull groove.

2. The arc target rotation push-pull mechanism suitable for vacuum high-temperature environments as described in claim 1, characterized in that: The arc target assembly is disposed through the inner and outer panels and is exposed via a flange on the side of the inner panel away from the outer panel.

3. The arc target rotation push-pull mechanism suitable for vacuum high-temperature environments as described in claim 1, characterized in that: The insulating pad is fixed to the end of the tube by fasteners and is located on the side of the outer plate away from the inner plate.

4. The arc target rotation push-pull mechanism suitable for vacuum high-temperature environments as described in claim 3, characterized in that: The sealing ring is located between the through tube and the insulating pad.

5. The arc target rotation push-pull mechanism suitable for vacuum high-temperature environments as described in claim 1, characterized in that: The cylinder is fixed on the mounting base and is driven in a direction away from the outer plate.

6. The arc target rotation push-pull mechanism suitable for vacuum high-temperature environments as described in claim 1, characterized in that: The other end of the push-pull rod passes through the inner and outer panels and extends toward a free end away from the inner panel.

7. The arc target rotation push-pull mechanism suitable for vacuum high-temperature environments as described in claim 1, characterized in that: The push-pull groove is provided on the body of the push-pull rod, the groove direction is the radial direction of the push-pull rod, and the length direction of the push-pull groove is along the surface of the push-pull rod and inclined at 15~45° with the axial direction of the push-pull rod.

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