A workpiece holder, surface coating equipment, and method for preparing surface coatings.

Abstract

This invention belongs to the field of surface coating equipment, specifically relating to a workpiece support, surface coating equipment, and method for surface coating preparation. The workpiece support includes a base, a transmission seat, a fixed plate, a movable plate, fixed rods, and movable rods. The base includes a bottom plate and a support base, with the fixed plate fixedly mounted on the upper end of the support base. The transmission seat includes a transmission plate and a sliding rod, with the sliding rod flexibly mounted on the base. The movable plate is fixedly mounted on the upper end of the sliding rod, and is located between the fixed plate and the bottom plate. Multiple fixed rods have inwardly facing slots I, and multiple movable rods have inwardly facing slots II. When the transmission seat is raised and lowered, the height of the bottom of the multiple slots II is higher than, lower than, or level with the height of the bottom of the multiple slots I. The entire workpiece support of this invention can rotate horizontally, while the movable rods and fixed rods periodically support the workpiece to be coated, allowing the support position of the workpiece to be coated to continuously change during rotation.

Description

Technical Field

[0001] This invention belongs to the field of surface coating equipment, specifically relating to a workpiece holder, surface coating equipment and method for surface coating preparation. Background Technology

[0002] Graphite trays are components used in metal-organic chemical vapor deposition (CVD) equipment to support and heat single-crystal substrates, serving functions such as load-bearing, heat conduction, and current conduction. Their dimensional accuracy, thermal conductivity, and purity directly affect the quality of the final product. To meet application requirements, chemical vapor deposition (CVD) is commonly used to prepare a coating on the outer surface of high-purity graphite trays.

[0003] Existing technologies for preparing coatings on the outer surface of graphite trays present two main problems: First, the graphite trays must be fixed and supported by fixtures, making it difficult to deposit coatings at the supported locations, thus preventing full coating coverage and affecting the product's lifespan. Second, during the CVD process, the concentration of the deposition atmosphere decreases along the flow direction, leading to a slower coating deposition rate and significant differences in coating thickness at different locations on the graphite tray, affecting the product's thermal conductivity uniformity. Therefore, there is an urgent need to develop a device that can simultaneously fix and support the graphite tray while achieving full coating coverage and resolving the problem of significant coating thickness differences. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a workpiece support, surface coating equipment and method for surface coating preparation that can switch the support points of the workpiece to be coated during continuous rotation.

[0005] This invention provides a workpiece support for surface coating preparation, comprising a base, a transmission seat, a fixed disk, a movable disk, a fixed rod, and a movable rod;

[0006] The base includes a base plate and a support seat disposed on the upper part of the base plate. The base plate is fixedly fixed inside the surface coating equipment in a horizontal rotation. The fixed plate is fixedly disposed on the upper part of the support seat.

[0007] The transmission base includes a transmission plate and a sliding rod disposed on the upper end of the transmission plate. The sliding rod is elliptical and disposed on the base. The movable disc is fixedly disposed on the upper end of the sliding rod, and the movable disc is located between the fixed disc and the base plate.

[0008] The fixed rods are arranged in a surrounding structure with multiple rods. The lower ends of the multiple fixed rods are fixedly installed on the upper end of the fixed plate. The fixed plate is provided with several through holes. The movable rods are arranged in a surrounding structure with multiple rods. The lower ends of the multiple movable rods are fixedly installed on the upper end of the movable plate, and the multiple movable rods pass through the through holes one by one.

[0009] Multiple fixed rods and multiple movable rods are arranged parallel to each other and staggered. Multiple fixed rods are provided with slot I facing inward, and multiple movable rods are provided with slot II facing inward. When the transmission seat is raised and lowered, the height of the bottom of multiple slots II is higher than, lower than or level with the height of the bottom of multiple slots I.

[0010] Furthermore, the base plate is provided with a lifting engagement hole in the middle, and the support base includes multiple columns arranged outside the lifting engagement hole;

[0011] The sliding rod is slidably engaged with the lifting and lowering fitting hole;

[0012] The movable plate is provided with multiple sliding holes for sliding cooperation with the columns.

[0013] Furthermore, at least three of the columns are arranged in a circular array outside the lifting and lowering mating holes.

[0014] Furthermore, at least three fixing rods are provided;

[0015] The movable rod is provided with at least three rods.

[0016] Furthermore, the bottoms of the card slots I and II are inclined.

[0017] Furthermore, this also includes the top plate;

[0018] The top plate is fixedly connected to multiple fixed rods and slidably connected to multiple movable rods;

[0019] Alternatively, the top plate is fixedly connected to multiple movable rods and slidably connected to multiple fixed rods;

[0020] Alternatively, the top plate is slidably connected to multiple movable rods and simultaneously slidably connected to multiple fixed rods.

[0021] Furthermore, when the top plate is fixedly connected to multiple fixing rods, the top plate and the fixing rods are detachably connected;

[0022] When the top plate is fixedly connected to multiple movable rods, the top plate and the movable rods are detachably connected.

[0023] Furthermore, multiple slots I are provided along the axial direction of the fixing rod;

[0024] Multiple slots II are provided along the axial direction of the movable rod.

[0025] The present invention also provides a surface coating apparatus, including a coating cavity, a driving mechanism, and the aforementioned workpiece support for surface coating preparation disposed within the coating cavity;

[0026] A coating mechanism is provided inside the coating cavity;

[0027] The base plate is horizontally rotatably disposed within the coating cavity;

[0028] The drive mechanism drives the transmission plate to rotate and move up and down.

[0029] The present invention also provides a surface coating method using the above-described surface coating equipment, comprising the following steps:

[0030] S1. Place the workpiece to be coated between multiple fixed rods and multiple movable rods, and overlap it on multiple slots I;

[0031] S2. Activate the coating mechanism. The drive mechanism drives the transmission plate to rotate and periodically rise and fall. When the drive plate rises, multiple movable rods rise synchronously, and multiple slots II lift the workpiece to be coated, allowing the workpiece to be coated to disengage from multiple slots I. When the drive plate falls, multiple movable rods fall synchronously, and multiple slots II disengage from the workpiece to be coated, allowing the workpiece to be coated to be supported by multiple slots I.

[0032] The beneficial effects of this invention are that the workpiece support for surface coating preparation provided by this invention can rotate horizontally, while the movable disk and movable rod can reciprocate and lift on the basis of rotation. Thus, the movable rod and fixed rod periodically support the workpiece to be coated, so that the support position of the workpiece to be coated can continuously change in the rotating state, thereby achieving full coverage of the surface coating of the workpiece to be coated, improving the uniformity of the surface coating, and solving the problem that the support part of the conventional workpiece to be coated cannot be coated.

[0033] In addition, the structural design of the workpiece support allows the workpiece to be coated to be installed directly above multiple movable rods and multiple fixed rods, which simplifies the installation of the workpiece. Moreover, the entire structure is supported by the base, and the drive mechanism only needs to drive the transmission seat to drive the entire workpiece support to rotate at the same time. In addition, it can also drive the movable plate and movable rod to lift and lower separately, making the structure of the drive component simple and easy to install. Attached Figure Description

[0034] Appendix Figure 1 This is a front view of the active disk in the lower position in this invention;

[0035] Appendix Figure 2 This is a front view of the active disk in the upper position in this invention;

[0036] Appendix Figure 3 This is a front view of the transmission seat in this invention;

[0037] Appendix Figure 4 This is a top view of the transmission seat in this invention;

[0038] Appendix Figure 5This is a schematic diagram of the base structure in this invention;

[0039] Appendix Figure 6 This is a top view of the movable disc in this invention;

[0040] Appendix Figure 7 This is a top view of the fixed disk in this invention;

[0041] Appendix Figure 8 This is a schematic diagram of the movable rod in this invention;

[0042] Appendix Figure 9 This is a schematic diagram of the structure of the fixing rod in this invention;

[0043] Appendix Figure 10 This is a top view of the top plate in this invention.

[0044] In the diagram, 1-transmission seat; 11-transmission plate; 12-sliding rod; 121-first threaded hole; 2-base; 21-base plate; 211-lifting mating hole; 22-column; 221-second threaded hole; 3-movable disc; 31-sliding hole; 32-third threaded hole; 33-fourth threaded hole; 4-fixed disc; 41-through hole; 42-fifth threaded hole; 43-sixth threaded hole; 5-movable rod; 51-slot II; 52-first screw; 53-first slide rod; 6-fixed rod; 61-slot I; 62-second screw; 63-second slide rod; 7-top plate; 71-sliding hole; 8-workpiece to be coated. Detailed Implementation

[0045] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0046] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0047] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0048] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection, an electrical connection, a physical connection, or a wireless communication connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two elements or the interaction between two elements, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0049] Furthermore, the technical solutions of the various embodiments of the present invention can be combined with each other, but only if they are feasible for those skilled in the art. If the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0050] As attached Figure 1 - Appendix Figure 10 As shown, the present invention provides a workpiece support for surface coating preparation, including a base 2, a transmission seat 1, a fixed disk 4, a movable disk 3, a fixed rod 6, and a movable rod 5;

[0051] The base 2 includes a base plate 21 and a support seat disposed on the upper end of the base plate 21. The base plate 21 is fixedly fixed in the surface coating equipment in a horizontal rotation. The fixed plate 4 is fixedly disposed on the upper end of the support seat.

[0052] The transmission base 1 includes a transmission plate 11 and a sliding rod 12 disposed on the upper end of the transmission plate 11. The sliding rod 12 is elliptical and sloping on the base 2, meaning that the sliding rod 12 can only slide up and down along the base 2 and cannot rotate axially relative to it. Therefore, when the transmission plate 11 rotates, the sliding rod 12 will drive the base 2 to rotate. The movable disk 3 is fixedly disposed on the upper end of the sliding rod 12, and the movable disk 3 is located between the fixed disk 4 and the base plate 21. When the sliding rod 12 moves up and down, the movable disk 3 moves up and down between the fixed disk 4 and the base plate 21.

[0053] Multiple fixed rods 6 are arranged in an enclosing structure. The multiple fixed rods 6 are parallel to each other and not on the same plane. The lower ends of the multiple fixed rods 6 are fixed to the upper end of the fixed disk 4. The multiple fixed rods 6 rotate with the fixed disk 4. The fixed disk 4 is provided with several through holes 41. Multiple movable rods 5 are arranged in an enclosing structure. The multiple movable rods 5 are parallel to each other and not on the same plane. The lower ends of the multiple movable rods 5 are fixed to the upper end of the movable disk 3. The multiple movable rods 5 move up and down and rotate with the movable disk 3. The multiple movable rods 5 pass through the through holes 41 one by one. When the multiple movable rods 5 move up and down, the multiple movable rods 5 slide within the through holes 41.

[0054] Multiple fixed rods 6 and multiple movable rods 5 are arranged parallel to each other and staggered. The fixed rods 6 have inward-facing slots I 61, and the movable rods 5 have inward-facing slots II 51. The multiple slots I 61 are located on a single plane and are used to support the workpiece 8 to be coated. The multiple slots II 51 are also located on a single plane and are also used to support the workpiece 8 to be coated. The multiple slots I 61 can horizontally engage the workpiece 8 to be coated. Specifically, when the workpiece 8 to be coated is a circular plate, the multiple fixed rods 6 and multiple movable rods 5 are arranged in a circular array. When the workpiece 8 to be coated is another irregularly shaped plate, the multiple fixed rods 6 and... The arrangement of the multiple movable rods 5 is consistent with the cross-sectional shape of the workpiece 8 to be coated. When the transmission seat 1 is raised or lowered, the height of the bottom of the multiple slots II 51 is higher than, lower than or level with the height of the bottom of the multiple slots I 61. That is, when the transmission seat 1 rises, the height of the bottom of the multiple slots II 51 is higher than the bottom of the multiple slots I 61. At this time, the workpiece 8 to be coated is supported on the multiple slots II 51 and separated from the multiple slots I 61. When the transmission seat 1 is lowered, the height of the bottom of the multiple slots II 51 is lower than the bottom of the multiple slots I 61. At this time, the workpiece 8 to be coated is supported on the multiple slots I 61 and separated from the multiple slots II 51.

[0055] The workpiece support for surface coating preparation provided by this invention allows the entire workpiece support to rotate horizontally. Simultaneously, the movable disk 3 and the movable rod 5 can reciprocate and lift while rotating. In turn, the movable rod 5 and the fixed rod 6 periodically support the workpiece 8 to be coated, so that the support position of the workpiece 8 to be coated can continuously change while rotating. This achieves full coverage of the surface coating of the workpiece 8, improves the uniformity of the surface coating, and solves the problem that the support part of the conventional workpiece 8 cannot be coated.

[0056] In addition, the structural design of the workpiece support allows the workpiece 8 to be coated to be installed directly above multiple movable rods 5 and multiple fixed rods 6, which simplifies the installation of the workpiece 8. Moreover, the entire structure is supported by the base 2, and the drive mechanism only needs to drive the transmission seat 1 to drive the entire workpiece support to rotate at the same time. In addition, it can also drive the movable plate 3 and movable rods 5 to lift and lower separately, making the structure of the drive component simple and easy to install.

[0057] In one embodiment, the base plate 21 is provided with a lifting engagement hole 211 in the middle, and the support base includes a plurality of columns 22 disposed outside the lifting engagement hole 211. The columns 22 are disposed outside the lifting engagement hole 211 to prevent the columns 22 from blocking the movement of the sliding rod 12.

[0058] The sliding rod 12 is slidably engaged with the lifting engagement hole 211. The cross-sections of the lifting engagement hole 211 and the sliding rod 12 are not circular, preferably rectangular. The lifting engagement hole 211 is slightly larger than the sliding rod 12 to enable the sliding rod 12 to slide up and down along the lifting engagement hole 211.

[0059] The movable plate 3 is provided with multiple sliding holes 31 that are slidably engaged with the columns 22, thereby enabling the movable plate 3 to be fixedly connected to the sliding rod 12 and to slide up and down between the base plate 21 and the fixed plate 4.

[0060] In one embodiment, at least three of the columns 22 are arranged in a circular array outside the lifting mating hole 211, preferably four in a rectangular array, which not only improves the connection strength between the fixed plate 4 and the support base, but also improves the sliding guidance and sliding stability of the movable plate 3.

[0061] In one embodiment, at least three fixed rods 6 are provided, thereby improving the support stability of the multiple slots I 61 for a plate-shaped workpiece 8 to be coated; at least three movable rods 5 are provided, thereby improving the support stability of the multiple slots II 51 for a plate-shaped workpiece 8 to be coated. In this embodiment, when the workpiece 8 to be coated is a circular plate, at least three fixed rods 6 and at least three movable rods 5 are arranged in a circular array.

[0062] In one embodiment, the bottom of the slots I 61 and II 51 is inclined, thereby reducing the contact area between the workpiece 8 to be coated and the slots I 61 and II 51, further improving the uniformity of the surface coating of the workpiece 8 to be coated, and also adapting to small-range dimensional errors of the workpiece 8 to be coated.

[0063] In one embodiment, a top plate 7 is also included;

[0064] The top plate 7 is fixedly connected to multiple fixed rods 6 and slidably connected to multiple movable rods 5. Preferably, the top plate 7 is detachably connected to the fixed rods 6, which facilitates the disassembly of the top plate 7. In this embodiment, the concealed installation stability of the top plate 7 can be improved.

[0065] Alternatively, the top plate 7 is fixedly connected to multiple movable rods 5 and slidably connected to multiple fixed rods 6. Preferably, the top plate 7 is detachably connected to the movable rods 5, which facilitates the disassembly of the top plate 7. In this embodiment, the concealed installation stability of the top plate 7 can be improved.

[0066] Alternatively, the top plate 7 can be slidably connected to multiple movable rods 5 and simultaneously slidably connected to multiple fixed rods 6. In this case, the top plate 7 can be directly removed upwards, greatly improving the efficiency of disassembly and assembly.

[0067] In this embodiment, by setting the top plate 7, the structural stability of the upper ends of the fixed rod 6 and the movable rod 5 can be improved, so that when the workpiece 8 to be coated is supported, the multiple fixed rods 6 and the multiple movable rods 5 can always be parallel to each other, and the workpiece 8 to be coated will not push the fixed rods 6 and the movable rods 5 apart.

[0068] In one embodiment, multiple slots I 61 are provided along the axial direction of the fixed rod 6; multiple slots II 51 are provided along the axial direction of the movable rod 5. This allows multiple workpieces 8 to be coated to be installed at once, and the simultaneous rotation and switching of support positions of these multiple workpieces 8 ensures a consistent coating effect.

[0069] The present invention also provides a surface coating apparatus, including a coating chamber, a driving mechanism, and a workpiece support for surface coating preparation as described above, disposed within the coating chamber;

[0070] The coating cavity is equipped with a coating mechanism for coating the workpiece 8 to be coated, which can be a vapor deposition device.

[0071] The base plate 21 is horizontally rotatably disposed within the coating cavity to support the entire workpiece support and to carry the entire workpiece support to rotate.

[0072] The driving mechanism drives the transmission plate 11 to rotate and rise. The driving mechanism can be a linear motion mechanism and a rotary motor set at the output end of the linear motion mechanism. The body of the linear motion mechanism is fixedly set on the coating cavity, and the rotary motor is connected to the transmission plate 11. In use, the linear motion mechanism drives the transmission plate 11 to rise and fall periodically, and the rotary motor drives the transmission plate 11 to rotate at a constant speed.

[0073] The present invention also provides a surface coating method using the above-described surface coating equipment, comprising the following steps:

[0074] S1. Place the workpiece 8 to be coated between multiple fixed rods 6 and multiple movable rods 5, and overlap it on multiple slots I 61. At this time, the workpiece 8 to be coated only contacts the bottom of the multiple slots I 61.

[0075] S2. The coating mechanism is activated. The drive mechanism drives the transmission plate 11 to rotate and periodically rise and fall. When the drive plate 11 rises, multiple movable rods 5 rise simultaneously, and multiple slots II 51 lift the workpiece 8 to be coated. The workpiece 8 is disengaged from the multiple slots I 61. At this time, the workpiece 8 only contacts the bottom of the multiple slots II 51, and the support range is small. When the drive plate 11 falls, multiple movable rods 5 fall simultaneously, and multiple slots II 51 disengage from the workpiece 8. The workpiece 8 is then supported by the multiple slots I 61. At this time, the workpiece 8 only contacts the bottom of the multiple slots I 61. In this way, during the weather deposition coating process, the continuous rotation of the workpiece 8 ensures the uniformity of the coating, and the periodic switching of the support points between the workpiece 8 and the workpiece support further ensures the uniformity of the entire outer surface of the workpiece 8.

[0076] The present invention also provides a specific embodiment:

[0077] The assembly diagram of the lifting and rotating device in this embodiment is as follows: Figure 1 As shown, the upper surface of the sliding rod 12 and the central area of ​​the movable disk 3 are respectively provided with four first threaded holes 121 and four fourth threaded holes 33, which are connected and fixed by screws; the base 2 is provided with four columns 22, which can move up and down through the sliding holes 31 of the movable disk 3. The upper surface of the columns 22 and the central area of ​​the fixed disk 4 are respectively provided with four second threaded holes 221 and sixth threaded holes 43, which are connected and fixed by screws; three third threaded holes 32 are evenly arranged on the outer edge of the movable disk 3, and three movable rods 5 are fixed to the third threaded holes 32 by first screws 52; the outer edge of the fixed disk 4 has three fifth threaded holes 42 and three through holes 41. Three fixed rods 6 are fixed to the fifth threaded hole 42 by the second screw 62, and three movable rods 5 can move up and down through the corresponding through hole 41; the outer edge of the top plate 7 is provided with six sliding holes 71, the first sliding rod 53 at the upper end of the movable rod 5 can move up and down through the sliding hole 71, and the second sliding rod 63 at the upper end of the fixed rod 6 can move up and down through the sliding hole 71; the movable rod 5 and the fixed rod 6 are each provided with two slots II 51 and slot I 61. After assembly, all slots II 51 and slot I 61 face the central axis of the device, and the slots II 51 on the movable rod 5 are on the same horizontal plane, and the slots I 61 on the fixed rod 6 are on the same horizontal plane.

[0078] The above description is merely an embodiment and does not constitute any limitation on the present invention. Any person skilled in the art can make many possible variations, modifications, or alterations to the technical solutions of the present invention without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention, without departing from the scope of the present invention, should fall within the protection scope of the present invention.

Claims

1. A workpiece holder for surface coating preparation, characterized in that It includes a base (2), a transmission seat (1), a fixed plate (4), a movable plate (3), a fixed rod (6), and a movable rod (5); The base (2) includes a base plate (21) and a support seat disposed on the upper end of the base plate (21). The base plate (21) is fixed in the surface coating equipment in a horizontal rotation. The fixed plate (4) is fixedly disposed on the upper end of the support seat. The transmission base (1) includes a transmission plate (11) and a sliding rod (12) disposed on the upper end of the transmission plate (11). The sliding rod (12) is raised and lowered on the base (2). The movable disc (3) is fixedly disposed on the upper end of the sliding rod (12), and the movable disc (3) is located between the fixed disc (4) and the base plate (21). The fixed rods (6) are arranged in a surrounding structure with multiple rods. The lower ends of the multiple fixed rods (6) are fixedly arranged on the upper end of the fixed plate (4). The fixed plate (4) is provided with a number of through holes (41). The movable rods (5) are arranged in a surrounding structure with multiple rods. The lower ends of the multiple movable rods (5) are fixedly arranged on the upper end of the movable plate (3), and the multiple movable rods (5) pass through the through holes (41) one by one. Multiple fixed rods (6) and multiple movable rods (5) are arranged parallel to each other and staggered. Multiple fixed rods (6) are provided with slots I (61) facing inward, and multiple movable rods (5) are provided with slots II (51) facing inward. When the transmission seat (1) is raised and lowered, the height of the bottom of multiple slots II (51) is higher than, lower than or level with the height of the bottom of multiple slots I (61). The card slot I (61) is provided with multiple slots along the axial direction of the fixing rod (6); The card slot II (51) is provided in multiple ways along the axial direction of the movable rod (5); The drive mechanism drives the transmission plate (11) to rotate and periodically rise and fall. When the drive transmission plate (11) rises, multiple movable rods (5) rise synchronously, and multiple slots II (51) lift the workpiece (8) to be coated, and the workpiece (8) to be coated is disengaged from multiple slots I (61). When the drive transmission plate (11) falls, multiple movable rods (5) fall synchronously, and multiple slots II (51) disengage from the workpiece (8) to be coated, and the workpiece (8) to be coated is supported by multiple slots I (61). The base plate (21) has a lifting engagement hole (211) in the middle, and the support base includes multiple columns (22) arranged outside the lifting engagement hole (211). The sliding rod (12) is slidably engaged with the lifting and lowering fitting hole (211); The movable plate (3) is provided with multiple sliding holes (31) for sliding cooperation with the columns (22).

2. The workpiece support for surface coating preparation as claimed in claim 1, characterized in that At least three of the columns (22) are arranged in a ring array outside the lifting and fitting hole (211).

3. The workpiece support for surface coating preparation as claimed in claim 1, characterized in that The fixed rod (6) has at least three members; the movable rod (5) has at least three members.

4. The workpiece support for surface coating preparation as recited in claim 1, wherein, The bottom of the slots I (61) and II (51) are inclined.

5. The workpiece support for surface coating preparation as recited in claim 1, wherein, It also includes the top plate (7); The top plate (7) is fixedly connected to multiple fixed rods (6) and slidably connected to multiple movable rods (5); Alternatively, the top plate (7) is fixedly connected to multiple movable rods (5) and slidably connected to multiple fixed rods (6); Alternatively, the top plate (7) is slidably connected to multiple movable rods (5) and simultaneously slidably connected to multiple fixed rods (6).

6. The workpiece support for surface coating preparation as recited in claim 5, wherein, When the top plate (7) is fixedly connected to multiple fixing rods (6), the top plate (7) and the fixing rods (6) are detachably connected; When the top plate (7) is fixedly connected to multiple movable rods (5), the top plate (7) and the movable rods (5) are detachably connected.

7. A surface coating apparatus, characterized in that, It includes a coating cavity, a driving mechanism, and a workpiece support for surface coating preparation as described in any one of claims 1-6 disposed within the coating cavity; A coating mechanism is provided inside the coating cavity; The base plate (21) is horizontally rotatably disposed within the coating cavity; The drive mechanism drives the transmission plate (11) to rotate and rise.

8. A surface coating method, characterized in that, Using the surface coating apparatus as described in claim 7 includes the following steps: S1. Place the workpiece (8) to be coated between multiple fixed rods (6) and multiple movable rods (5), and overlap it on multiple slots I (61); S2. The coating mechanism is activated. The drive mechanism drives the transmission plate (11) to rotate and periodically rise and fall. When the drive transmission plate (11) rises, multiple movable rods (5) rise synchronously, and multiple slots II (51) lift the workpiece (8) to be coated, and the workpiece (8) to be coated is disengaged from multiple slots I (61). When the drive transmission plate (11) falls, multiple movable rods (5) fall synchronously, and multiple slots II (51) disengage from the workpiece (8) to be coated, and the workpiece (8) to be coated is supported by multiple slots I (61).

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