A cleaning device based on PTFE and a method for manufacturing the same

Abstract

The application relates to the technical field of cleaning appliances, and discloses a cleaning device based on PTFE and a preparation method thereof, which comprises a polytetrafluoroethylene body, a convex disc, screw holes and water flow channel holes. The polytetrafluoroethylene body is a prism, the top and / or bottom of the polytetrafluoroethylene body is provided with the convex disc, the polytetrafluoroethylene body and the convex disc are coaxial with a central axis, the water flow channel holes comprise transverse surface flow channel holes and a central flow channel hole, the central flow channel hole is arranged at the center of the prism and penetrates through the upper and lower surfaces of the polytetrafluoroethylene body, the transverse surface flow channel holes are arranged in the interior of the prism, each of the transverse surface flow channel holes penetrates through the side wall of the corresponding polytetrafluoroethylene body, the transverse surface flow channel holes and the central flow channel hole are in communication with each other, and the screw holes are arranged at the positions where the water flow channel holes are in contact with the outer surface of the polytetrafluoroethylene body. The polytetrafluoroethylene is adopted in combination with a processing technology to solve the burr phenomenon caused by drilling and improve the hydrophobic properties of the surface.

Description

Technical Field

[0001] This invention relates to the field of cleaning equipment technology, specifically to a PTFE-based cleaning device and its preparation method. Background Technology

[0002] With the booming development of the integrated circuit industry, the amount of wafers used is also increasing dramatically. Chemical cleaning of wafers is a crucial step in the entire chip manufacturing process. Because the wafer processing requires extremely high cleanliness, all media that come into contact with the wafer can potentially contaminate it. The quality of wafer cleaning has a direct impact on device performance, which greatly affects the timeliness of integrated circuit manufacturing. In wafer cleaning, a distributor is needed to distribute the cleaning solution. However, this distributor also needs to have better hydrophobicity and stronger corrosion resistance.

[0003] Polytetrafluoroethylene (PTFE) has excellent corrosion resistance and is chemically inert. It can withstand the erosion of most corrosive chemicals, acids, alkalis, and organic solvents, such as concentrated nitric acid, concentrated hydrochloric acid, concentrated sulfuric acid, concentrated phosphoric acid, concentrated hydrofluoric acid, and any concentrated alkali.

[0004] Distributor cooling devices typically use built-in pipes for cooling water (liquid) to circulate within. This requires smooth water flow, and hydrophobic surfaces are highly effective in facilitating this flow. Therefore, enhancing the hydrophobicity of cooling devices is crucial to prevent cooling water from wetting them and causing moisture buildup that obstructs water flow after prolonged use, significantly impacting the cooling of objects such as wafers and substrates.

[0005] Therefore, wafer cleaning requires further improvement. Summary of the Invention

[0006] This invention utilizes a new material, polytetrafluoroethylene (PTFE), to rationally design water flow channel holes. Combined with improvements in processing technology, it enables a processing technology that integrates guide hole-paraffin-laser through-hole-cooling-final product. This solves the problem of burrs caused by drilling, avoids the impact of burrs in later use, and improves the hydrophobic properties of the surface.

[0007] A PTFE-based cleaning device includes: a PTFE body, a convex disc, a threaded hole, and a water channel hole. The PTFE body is a prism, and the convex disc is provided at the top and / or bottom of the PTFE body. The PTFE body and the convex disc are aligned with a central axis. The water channel hole includes transverse flow channel holes and a central flow channel hole. The central flow channel hole is located at the central axis of the prism and penetrates both the upper and lower surfaces of the PTFE body. The transverse flow channel holes are located inside the prism, and each of the transverse flow channel holes penetrates the corresponding sidewall of the PTFE body. The transverse flow channel holes and the central flow channel hole are interconnected. The threaded hole is provided at the contact point between the water channel hole and the outer surface of the PTFE body, and the diameter of the threaded hole is larger than the diameter of the water channel hole.

[0008] Furthermore, the convex disk is selected as a circular convex disk.

[0009] Furthermore, the PTFE body is a regular prism.

[0010] Furthermore, the transverse flow channel hole includes a central flow channel hole and an off-center flow channel hole. The central flow channel hole is disposed on the central surface of the PTFE body, and the off-center flow channel hole is disposed above and / or below the central surface of the PTFE body. The central flow channel hole and the central flow channel hole are interconnected.

[0011] Furthermore, the number of transverse flow channel holes is equal to the number of facets of the prism.

[0012] Furthermore, the PTFE body and the convex disk are integrally formed.

[0013] Furthermore, both the threaded hole and the water flow channel hole are made of PTFE body as the inner wall.

[0014] Furthermore, the PTFE body, the cam, the threaded hole, and the water channel hole are integrally formed.

[0015] Furthermore, the threaded hole includes a center surface threaded hole and a side surface threaded hole, the center surface threaded hole being disposed at the center surface flow channel hole, and the side surface threaded hole being disposed at the off-center flow channel hole and the center flow channel hole.

[0016] Furthermore, a method for preparing a PTFE-based cleaning device includes the following specific steps:

[0017] Step 1: Preparing the blank

[0018] Select a round ingot made of PTFE (polytetrafluoroethylene), place it on a cutting machine tool for cutting, and select a cutting saw to cut the round ingot into a round blank of the required specifications and thickness.

[0019] Step 2: Prepare the prism blank

[0020] Select the round blank from step 1 and place it on the table of the cutting machine. Select a straight cutting saw and cut an equilateral prism on the CNC platform of the cutting machine. After cutting out the equilateral prism, mill the side surface of the equilateral prism. Place the equilateral prism on a milling machine for milling, then mill the chamfered edge, and then polish it. Use mechanical polishing technology to mechanically polish the flat surface with an oilstone to prepare a PTFE prism blank.

[0021] Step 3: Make the convex disc

[0022] Select the PTFE prism blank from step 2, place it on the stage of the cutting machine, fix the PTFE prism blank, make circular cuts on the top and bottom of the PTFE prism blank to cut out the convex disk, and mill the convex disk surface of the equilateral prism. Place the equilateral prism into a milling machine for milling, then chamfer it, and then polish it. Use mechanical polishing technology to mechanically polish its flat surface with an oilstone to prepare a PTFE prism blank with a convex disk.

[0023] Step 4: Make circumferential threaded holes

[0024] Select the PTFE prism blank with convex disk from step 3, place it on the stage of the drilling machine, and select a thread hole drill bit to drill thread holes around the convex disk and the side of the PTFE prism blank with convex disk, thus preparing a PTFE prism blank with thread holes.

[0025] Step 5: Make the guide hole

[0026] According to step 4, guide holes are drilled at the center of each edge face of the PTFE prism blank to serve as guide holes for the central surface flow channel, and guide holes are drilled as guide holes for the off-side flow channel, so as to form embedded guide holes that gather at the center of the PTFE body and radiate to each edge face, thus preparing a PTFE prism blank with guide holes.

[0027] Step 6: Make the center guide hole

[0028] Select the PTFE prism blank with the guide hole from step 5, place its top surface on the table of the drilling machine, and place a tooling fixture with a buffer pad on the table. Fix the PTFE prism blank, drill the center guide hole at the center of the cam, start the drill bit, drill along the center line of the PTFE prism blank to the bottom surface of the PTFE prism blank, and obtain the PTFE prism blank to be drilled.

[0029] Step 7: Water flow channel hole

[0030] Select the PTFE prism blank to be drilled from step 6, place it on the platform of the drilling machine, and place a tooling fixture with a buffer pad on the platform to fix the PTFE prism blank to be drilled. Pour paraffin liquid into the guide hole to fill the guide hole, use nitrogen to quickly cool and solidify it, and then use a drill bit with a diameter 0.1-0.15mm larger than the drill bit used to process the guide hole to drill the hole, and drill along the guide hole to prepare a PTFE prism blank with water flow channel holes.

[0031] Step 8: Laser-guided hole

[0032] Select the PTFE prism blank with water channel holes from step 7, and irradiate the water channel holes with a laser. Set the laser energy and irradiation time to complete the laser through-hole irradiation of the PTFE prism blank.

[0033] Step 9: Cooling and deburring

[0034] Select the PTFE prism blank from step 8, rapidly cool it, and after cooling to room temperature, inject acetone solution into the water channel holes to rinse the water channel holes, then inject ethanol for rinsing, and finally inject pure water for rinsing. Use a hot air blower to dry the water channel holes with hot air to prepare a PTFE cleaning device.

[0035] Step 10: Detection

[0036] The PTFE cleaning device from step 9 was selected, and its water channel morphology and hydrophobicity were tested.

[0037] Furthermore, the specifications and dimensions of the drill bit are selected according to the required processing dimensions.

[0038] Beneficial effects

[0039] This invention utilizes a novel material, polytetrafluoroethylene (PTFE), for the rational design of water flow channel holes. Combined with improvements in processing technology, it enables a processing technique encompassing guide holes, paraffin wax, laser-guided holes, cooling, and the final product. This process creates octagonal prisms and their water flow channel holes, allowing for water diversion or convergence. The central flow channel hole and the central surface flow channel holes contribute to this diversion or convergence function. Since the device primarily transports water, it's crucial to maximize water flow. Simple drilling produces a hole wall roughness of approximately 30 μm. Laser-guided hole irradiation eliminates burrs and compensates for damage caused by drilling, preventing water transport issues due to burrs or damage during later use. Femtosecond laser irradiation further enhances the surface's hydrophobic properties, achieving a hydrophobic angle of 140°, resulting in smooth, burr-free surfaces in the drilled water flow channel holes. This technology can be widely applied to deburring applications. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of a PTFE-based cleaning device according to the present invention.

[0041] Figure 2 This is a front cross-sectional view of a PTFE-based cleaning device according to the present invention.

[0042] Figure 3 This is another cross-sectional structural diagram of a PTFE-based cleaning device according to the present invention.

[0043] Figure 4 This is a cross-sectional structural diagram of a PTFE-based cleaning device according to the present invention.

[0044] Figure 5 This is a process flow diagram of the preparation of a PTFE-based cleaning device according to the present invention.

[0045] Figure 6 This is a SEM image of the water channel holes in a PTFE-based cleaning device according to the present invention.

[0046] Figure 7 This is a microscopic SEM image of the water channel holes in a PTFE-based cleaning device according to the present invention.

[0047] Figure 8 This is a hydrophobic measurement diagram of a PTFE-based cleaning device according to the present invention.

[0048] Figure descriptions: 01, PTFE body; 02, threaded hole; 03, center surface flow channel hole; 04, center flow channel hole; 05, off-center flow channel hole. Detailed Implementation

[0049] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0050] In this invention, "multiple" refers to two or more. "And / or": describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. The character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0051] See Figures 1-4 A cleaning device based on PTFE, the cleaning device includes: PTFE body 01, cam, threaded hole 02 and water channel hole, PTFE body 01 is a regular octagonal prism, and cam is a circular cam.

[0052] The PTFE body 01 has protruding plates at both its top and bottom, which are integrally formed with the PTFE body 01, constituting the device blank. The PTFE body 01 and the protruding plates are aligned with their central axes, and the device blank is symmetrically arranged around its central surface. The water flow channel includes transverse flow channel holes and a central flow channel hole 04. The number of transverse flow channel holes is equal to the number of facets of the prism. A central flow channel hole 04 is located at the central axis of the prism (PTFE body 01) and penetrates both the top and bottom surfaces of the PTFE body 01. The protruding plates have threaded holes, and the central flow channel hole 04 corresponds to a threaded hole. Interconnected; wherein, the transverse flow channel hole includes a central flow channel hole 03 and an off-center flow channel hole 05. The central flow channel hole 03 is disposed on the inner central surface of the PTFE body 01, and the off-center flow channel hole 05 is disposed above and / or below the central surface of the PTFE body 01. Each hole of the central flow channel hole 03 penetrates the side wall of the corresponding PTFE body 01, and the central flow channel hole 03 converges from the side wall to the center. The central flow channel hole 03 and the central flow channel hole 04 are interconnected. Threaded holes 02 are provided at the contact points between the water flow channel hole and the outer surface of the corresponding PTFE body 01 and the cam, respectively. The diameter of the threaded hole 02 is larger than the diameter of the water flow channel hole.

[0053] The PTFE body 01, the cam, the threaded hole 02, and the water channel hole are integrated into one piece.

[0054] Among them, the threaded hole 02 includes a center surface threaded hole and a side surface threaded hole. The center surface threaded hole is set at the center surface flow channel hole 03, and the side surface threaded hole is set at the off-side flow channel hole 05 and the center flow channel hole 04. That is, both ends of the water flow channel hole are provided with threaded holes.

[0055] Among them, see Figure 5 As shown, a method for preparing a PTFE-based cleaning device includes the following steps:

[0056] Step 1: Preparing the blank

[0057] Select a round ingot made of PTFE (polytetrafluoroethylene), place it on a cutting machine tool for cutting, and select a cutting saw to cut the round ingot into a round blank of the required specifications and thickness.

[0058] Step 2: Prepare the prism blank

[0059] Select the round blank from step 1 and place it on the table of the cutting machine. Select the straight cutting saw, set the octagonal deformation processing path on the CNC platform of the cutting machine, and perform equilateral prism cutting. After cutting out the octagonal prism, mill the side surface of the equilateral prism. Place the equilateral prism on a milling machine for milling, then mill the chamfered edges, and then polish it. Use mechanical polishing technology to mechanically polish the flat surface with an oilstone to prepare the PTFE prism blank.

[0060] Step 3: Make the convex disc

[0061] Select the PTFE prism blank from step 2, place it on the stage of the cutting machine, fix the PTFE prism blank, make circular cuts on the top and bottom of the PTFE prism blank to cut out the convex disk, and mill the convex disk surface of the equilateral prism. Place the equilateral prism into a milling machine for milling, then chamfer it, and then polish it. Use mechanical polishing technology to mechanically polish its flat surface with an oilstone to prepare a PTFE prism blank with a convex disk.

[0062] Step 4: Make circumferential threaded holes

[0063] Select the PTFE prism blank with a cam from step 3, place it on the table of the drilling machine, and select a thread hole drill bit to drill thread holes around the cam and side of the PTFE prism blank with a cam to obtain thread holes of the required specifications, thus preparing a PTFE prism blank with thread holes. These thread holes are used for threaded connection of external pipelines.

[0064] Step 5: Make the guide hole

[0065] According to step 4, guide holes are drilled at the center of each facet of the PTFE prism blank and inside the threaded hole to serve as guide holes for the flow channel holes on the center face. Guide holes are then drilled as guide holes for the flow channel holes on the off-face face to form embedded guide holes that are gathered at the center of the PTFE body 01 and radiate to each facet, thus preparing a PTFE prism blank with guide holes.

[0066] Step 6: Make the center guide hole

[0067] Select the PTFE prism blank with the guide hole from step 5, place its top surface on the table of the drilling machine, and place a tooling fixture with a buffer pad on the table. Fix the PTFE prism blank, drill the center guide hole at the center of the cam, start the drill bit, drill along the center line of the PTFE prism blank to the bottom surface of the PTFE prism blank, and obtain the PTFE prism blank to be drilled.

[0068] Step 7: Water flow channel hole

[0069] Select the PTFE prism blank to be drilled from step 6, place it on the stage of the drilling machine, and place a tooling fixture with a buffer pad on the stage to fix the PTFE prism blank to be drilled. Pour paraffin liquid into the guide hole to fill the guide hole, and use nitrogen to quickly cool and solidify it. Then use a drill bit with a diameter 0.1mm-0.15mm larger than the drill bit used to process the guide hole to drill the hole, and drill along the guide hole to prepare a PTFE prism blank with water flow channel holes.

[0070] Step 8: Laser-guided hole

[0071] Select the PTFE prism blank with water channel holes from step 7, and irradiate the water channel holes with a laser. Set the laser energy and irradiation time to complete the laser through-hole irradiation of the PTFE prism blank. Here, a femtosecond laser is selected with a beam quality factor of 1.2, a wavelength of 800nm, a maximum output power of 4W, and a frequency of 10KHz. The pulse time is selected to be 85 femtoseconds for irradiation, and the irradiation time is selected to be 2 seconds to complete the laser through-hole fabrication.

[0072] Step 9: Cooling and deburring

[0073] Select the PTFE prism blank from step 8, rapidly cool it, and after cooling to room temperature, inject acetone solution into the water channel holes to rinse the water channel holes, then inject ethanol for rinsing, and finally inject pure water for rinsing. Use a hot air blower to dry the water channel holes with hot air to prepare a PTFE cleaning device.

[0074] Step 10: Detection

[0075] The PTFE cleaning device from step 9 was selected, and its water channel morphology and hydrophobicity were tested.

[0076] The specifications and dimensions of the drill bit are selected according to the required processing dimensions. Here, the selected diameters are 50mm and 40mm for the threaded hole, 9.9mm for the guide hole, and 10mm for the water channel hole.

[0077] Inspect the water flow channel holes, see [reference]. Figure 6 As shown, it can be seen that using only laser drilling results in a simple laser-drilled through-hole (Figure A) with an area of ​​spread-out melting on the surface and a multi-wavy shape; using only a drill bit for drilling results in a simple drilled hole (Figure B) with burrs and damage on the surface, which can easily impair its physical properties; if drilling is performed first and then laser drilling is performed (Figure C), the water channel hole is smooth and almost burr-free; for the processed hole that is drilled first and then laser-drilled, microscopic SEM scanning reveals an interwoven network structure on the surface, which is evenly distributed. (See reference...) Figure 7 As shown.

[0078] See Figure 8 As shown, for a machined hole that is first drilled and then laser-drilled, the surface contact angle of the inner wall of the water flow channel hole is measured to be 140° using a contact angle tester.

[0079] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A PTFE-based cleaning device, characterized in that, The cleaning device includes: a PTFE body, a convex disc, a threaded hole, and a water channel hole. The PTFE body is a prism. The convex disc is provided at the top and / or bottom of the PTFE body. The PTFE body and the convex disc are aligned with a central axis. The water channel hole includes a transverse flow channel hole and a central flow channel hole. The central flow channel hole is provided at the central axis of the prism and penetrates both the upper and lower surfaces of the PTFE body. The transverse flow channel hole is provided inside the prism. Each hole of the transverse flow channel hole penetrates the side wall of the corresponding PTFE body. The transverse flow channel hole and the central flow channel hole are interconnected. The threaded hole is provided at the contact point between the water channel hole and the outer surface of the PTFE body. The diameter of the threaded hole is larger than the diameter of the water channel hole. The transverse flow channel hole includes a central flow channel hole and an off-center flow channel hole. The central flow channel hole is disposed on the central surface of the PTFE body, and the off-center flow channel hole is disposed above and / or below the central surface of the PTFE body. The central flow channel hole and the central flow channel hole are interconnected. The threaded hole includes a center surface threaded hole and a side surface threaded hole. The center surface threaded hole is located at the center surface flow channel hole, and the side surface threaded hole is located at the off-center flow channel hole and the center flow channel hole. In this process, a laser is used to irradiate the water channel holes. A femtosecond laser is selected here, with a beam quality factor of 1.2, a wavelength of 800nm, a maximum output power of 4W, and a frequency of 10KHz. The pulse time is selected to be 85 femtoseconds, and the irradiation time is selected to be 2 seconds.

2. The PTFE-based cleaning device according to claim 1, characterized in that, The cam is selected as a circular cam.

3. The PTFE-based cleaning device according to claim 1, characterized in that, The PTFE body is a regular prism.

4. The PTFE-based cleaning device according to claim 1, characterized in that, The number of flow channel holes in the transverse surface is equal to the number of facets of the prism.

5. A PTFE-based cleaning device according to claim 1, characterized in that, The PTFE body and the cam are integrated into one unit.

6. The PTFE-based cleaning device according to claim 1, characterized in that, Both the threaded holes and the water flow channel holes use PTFE body as the inner wall.

7. A PTFE-based cleaning device according to claim 1, characterized in that, The PTFE body, cam, threaded hole, and water channel hole are integrated into one unit.

8. A method for preparing a PTFE-based cleaning device, characterized in that, The specific steps are as follows: Step 1: Preparing the blank Select a round ingot made of PTFE (polytetrafluoroethylene), place it on a cutting machine tool for cutting, and select a cutting saw to cut the round ingot into a round blank of the required specifications and thickness; Step 2: Prepare the prism blank Select the round blank from step 1 and place it on the table of the cutting machine. Select a straight cutting saw and cut an equilateral prism on the CNC platform of the cutting machine. After cutting out the equilateral prism, mill the side surface of the equilateral prism. Place the equilateral prism on a milling machine for milling, then mill the chamfered edge, and then polish it. Use mechanical polishing technology to mechanically polish the flat surface with an oilstone to prepare a PTFE prism blank. Step 3: Make the convex disc Select the PTFE prism blank from step 2, place it on the stage of the cutting machine, fix the PTFE prism blank, make circular cuts on the top and bottom of the PTFE prism blank to cut out the convex disk, and mill the convex disk surface of the equilateral prism. Place the equilateral prism into a milling machine for milling, then chamfer it, and then polish it. Use mechanical polishing technology to mechanically polish its flat surface with an oilstone to prepare a PTFE prism blank with a convex disk. Step 4: Make circumferential threaded holes Select the PTFE prism blank with convex disk from step 3, place it on the stage of the drilling machine, and select a thread hole drill bit to drill thread holes around the convex disk and the side of the PTFE prism blank with convex disk, thus preparing a PTFE prism blank with thread holes. Step 5: Make the guide hole According to step 4, guide holes are drilled at the center of each edge face of the PTFE prism blank to serve as guide holes for the central surface flow channel, and guide holes are drilled as guide holes for the off-side flow channel, so as to form embedded guide holes that gather at the center of the PTFE body and radiate to each edge face, thus preparing a PTFE prism blank with guide holes. Step 6: Make the center guide hole Select the PTFE prism blank with the guide hole from step 5, place its top surface on the table of the drilling machine, and place a tooling fixture with a buffer pad on the table. Fix the PTFE prism blank, drill the center guide hole at the center of the cam, start the drill bit, drill along the center line of the PTFE prism blank to the bottom surface of the PTFE prism blank, and obtain the PTFE prism blank to be drilled. Step 7: Water flow channel hole Select the PTFE prism blank to be drilled from step 6, place it on the platform of the drilling machine, and place a tooling fixture with a buffer pad on the platform to fix the PTFE prism blank to be drilled. Pour paraffin liquid into the guide hole to fill the guide hole, use nitrogen to quickly cool and solidify it, and then use a drill bit with a diameter 0.1-0.15mm larger than the drill bit used to process the guide hole to drill the hole, and drill along the guide hole to prepare a PTFE prism blank with water flow channel holes. Step 8: Laser-guided hole Select the PTFE prism blank with water channel holes from step 7, and irradiate the water channel holes with a laser. Set the laser energy and irradiation time to complete the laser through-hole irradiation of the PTFE prism blank. Here, a femtosecond laser with a beam quality factor of 1.2, a wavelength of 800nm, a maximum output power of 4W, and a frequency of 10kHz is selected. The irradiation is performed with a pulse duration of 85 femtoseconds and an irradiation time of 2 seconds. Step 9: Cooling and Deburring. Select the PTFE prism blank from Step 8 and cool it rapidly. After cooling to room temperature, inject acetone solution into the water channel holes to rinse the water channel holes, then inject ethanol for rinsing, and finally inject pure water for rinsing. Use a hot air blower to dry the water channel holes with hot air to prepare a PTFE cleaning device.

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