A plating method and device for surface protection of power fittings
Patent Information
- Application Number
- CN202410193208.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2023-10-07
- Filing Date
- 2024-02-21
- Publication Date
- 2026-10-27
- Estimated Expiration
- 2044-02-21
AI Technical Summary
由于电力金具可能需要频繁的维护和更换,维护成本可能会占用大量资源和资金
采用电弧离子镀和磁控溅射的结合,包括CrSiN/ZrN或CrW/CrN材料的交替沉积,缓解膜层应力,提高了电力金具的抗腐蚀性能,有助于在恶劣环境中长期稳定运行,多靶同时沉积和闭合磁场设计提高了镀层效率,闭合磁场可以向工件前方延伸,又可以向周边延伸。提高镀膜空间的等离子体密度,膜层粒子的整体能量高,有利于镀制优异的薄膜材料,同时增加灯丝辅助,发射电子,有效提高了磁控溅射离化率,使得整个过程更加高效。
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Figure CN117987774B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of coating technology, and more specifically, relates to a coating method and apparatus for surface protection of power fittings. Background Technology
[0002] When it comes to surface protection of electrical fittings, traditional technologies and methods face a series of challenges. These challenges include the need to improve surface protection performance, enhance abrasion resistance, improve corrosion resistance, increase process efficiency, and ensure quality.
[0003] Traditional methods of protecting electrical fittings often fail to provide sufficient surface protection, leaving them vulnerable to damage from external environmental factors such as corrosion, abrasion, and chemical attack. This can lead to performance degradation and shortened lifespan. In certain specialized operating environments, electrical fittings require superior abrasion resistance to withstand friction and wear. Traditional surface treatments often fail to provide adequate abrasion resistance, resulting in premature failure. In environments containing chemically corrosive substances, the corrosion resistance of electrical fitting surfaces is crucial. Traditional methods may not provide sufficient corrosion resistance, leading to corrosion and damage. Traditional coating and treatment methods can be inefficient, requiring longer processing times and more human resources. This increases production costs and reduces work efficiency. Since electrical fittings may require frequent maintenance and replacement, maintenance costs can consume significant resources and funds.
[0004] To address the aforementioned issues, the integrated application of modern composite coating technology and magnetron sputtering technology, along with innovative designs involving simultaneous multi-target deposition and closed magnetic fields, aims to solve these problems and provide superior surface protection, wear resistance, corrosion resistance, and efficient processing to meet the needs of power fittings in various operating environments. These technological advancements will help improve the performance, reliability, and economy of power fittings, reduce maintenance costs, and extend their service life.
[0005] In view of this, the present invention is proposed. Summary of the Invention
[0006] To solve the above-mentioned technical problems, the basic concept of the technical solution adopted by the present invention is as follows: A coating method for surface protection of electrical fittings, comprising the following steps: S1. Cleaning treatment of the surface of power fittings; S2. Place the cleaned power fittings into the coating chamber, set the positions of the power fittings, the arc ion plating source and the magnetron sputtering source, and set the electrode layout of the magnetron sputtering source to create a closed magnetic field. S3. Controlling the chromium target coating and cooperating with the filament to assist in electron emission, a uniform chromium layer is formed on the surface of the power fittings; S4. An arc ion source controls a chromium-silicon target or a chromium-tungsten target, and a magnetron sputtering source controls a zirconium target or a chromium target. With the introduction of nitrogen gas, a mixed alternating layer of CrSiN / ZrN is formed by alternating deposition through the arc ion source and the magnetron sputtering source, and finally the CrSiN deposited by the arc ion source is used as the top layer. Alternatively, a mixed alternating layer of CrW / CrN is formed by alternating deposition through the arc ion source and the magnetron sputtering source, and finally the CrW deposited by the arc ion source is used as the top layer.
[0007] As a further solution, the surface cleaning treatment of the power fittings includes the following steps: S1.1 Remove large particles of dirt and impurities from the surface of electrical fittings by brushing; S1.2 Select an acidic cleaning solvent with a pH value between 1 and 3, including sulfuric acid, hydrochloric acid and nitric acid, and soak for 15-60 minutes to remove oxides from the surface of electrical fittings; S1.3 Rinse the deoxidized electrical fittings with pure water until the acidic cleaning solvent is completely removed; S1.4 After rinsing, soak the electrical fittings in deionized water for 5-30 minutes to remove residual particles and small particulate matter; S1.5. Dry the electrical fittings in a vacuum oven at 50-100℃ until completely dry.
[0008] As a further option, the chromium layer thickness on the surface of the power fitting is 8-20 μm.
[0009] As a further embodiment, the electrode layout of the closed magnetic field includes: installing a strong magnetic material N(S) inside a planar unbalanced magnetron sputtering target, and the magnetic pole shoe connected to the strong magnetic material is a weak magnetic material S(N). In adjacent unbalanced magnetron sputtering targets, the N and S magnetic polarities of the strong magnet materials are arranged in opposite directions. The magnetic field lines between adjacent magnetic fields are interconnected, forming a closed magnetic field, and the power fittings are located at the center of the closed magnetic field.
[0010] As a further option, the magnetron sputtering employs simultaneous deposition on multiple targets.
[0011] As a further solution, a plating device for surface protection of power fittings uses a plating method for surface protection of power fittings as described above, comprising: Main frame; Two side frames; The side frame is located on one side of the main frame and is sealed and fitted together; The main frame and the side frames fitted together on both sides form a coating chamber; Several planar dual-target sputtering magnetrons and several planar dual-target ion plating magnetrons; The planar dual-target sputtering magnetrons are uniformly distributed on the inner wall of the coating chamber to form a uniform closed magnetic field. Several filaments; The filament is located between two corresponding planar dual-target sputtering magnetrons and is used to emit electrons to assist in coating. Opening; The opening is located on one side of the main frame and is used for communication with the coating chamber.
[0012] As a further embodiment, the planar dual-target ion plating control and opening are uniformly distributed around the inner wall of the plating chamber.
[0013] As a further embodiment, both sides of the planar dual-target sputtering magnetron are provided with magnetic field extension plates for uniformly expanding the magnetic field range.
[0014] As a further embodiment, the inner wall of the main frame is rotatably equipped with a rotating frame for placing electrical fittings.
[0015] Beneficial effects: The combination of arc ion plating and magnetron sputtering, including the alternating deposition of CrSiN / ZrN or CrW / CrN materials, alleviates film stress and improves the corrosion resistance of power fittings, contributing to long-term stable operation in harsh environments. Simultaneous multi-target deposition and a closed magnetic field design enhance coating efficiency; the closed magnetic field can extend forward and outward from the workpiece. Increased plasma density in the coating space results in high overall particle energy, which is beneficial for depositing superior thin film materials. Furthermore, the addition of filament assistance and electron emission effectively improves the ionization rate of magnetron sputtering, making the entire process more efficient.
[0016] The specific embodiments of the present invention will now be described in further detail with reference to the accompanying drawings. Attached Figure Description
[0017] In the attached diagram: Figure 1 This is a flowchart of the coating method of the present invention; Figure 2 This is a three-dimensional structural schematic diagram of the coating device of the present invention; Figure 3 This is a top view of the cross-sectional structure of the coating device of the present invention; Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A in the middle.
[0018] In the diagram: 1. Main frame; 2. Side frame; 3. Planar dual-target sputtering magnetron; 4. Rotating frame; 5. Filament; 6. Opening; 7. Magnetic field extension plate; 8. Planar dual-target ion plating control. Detailed Implementation
[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. The following embodiments are used to illustrate the present invention.
[0020] like Figures 1 to 4 As shown, a coating method for surface protection of electrical fittings includes the following steps: S1. Cleaning treatment of the surface of power fittings; S2. Place the cleaned power fittings into the coating chamber, set the positions of the power fittings, the arc ion plating source and the magnetron sputtering source, and set the electrode layout of the magnetron sputtering source to create a closed magnetic field. S3. Controlling the chromium target coating and cooperating with the filament 5 to assist in electron emission, a uniform chromium layer is formed on the surface of the power fittings; S4. An arc ion source controls a chromium-silicon target or a chromium-tungsten target, and a magnetron sputtering source controls a zirconium target or a chromium target. With the introduction of nitrogen gas, a mixed alternating layer of CrSiN / ZrN is formed by alternating deposition through the arc ion source and the magnetron sputtering source, and finally the CrSiN deposited by the arc ion source is used as the top layer. Alternatively, a mixed alternating layer of CrW / CrN is formed by alternating deposition through the arc ion source and the magnetron sputtering source, and finally the CrW deposited by the arc ion source is used as the top layer. S5. Conduct quality inspection on the composite coating of power fittings.
[0021] Among them, as attached Figure 1 As shown, the first scheme of step S4 is to control a chromium-silicon target with an arc ion source and a zirconium target with a magnetron sputtering source, and with the introduction of nitrogen gas, to sequentially and alternately deposit a mixed alternating layer of CrSiN / ZrN through the arc ion source and the magnetron sputtering source, and finally use the CrSiN deposited by the arc ion source as the top layer; the second scheme of step S4 is to control a chromium-tungsten target with an arc ion source and a chromium target with a magnetron sputtering source, and with the introduction of nitrogen gas, to sequentially and alternately deposit a mixed alternating layer of CrW-CrN through the arc ion source and the magnetron sputtering source, and finally use the CrW deposited by the arc ion source as the top layer.
[0022] Chromium-silicon targets and chromium-tungsten targets are specifically alloy targets, with the silicon content in chromium-silicon targets being 1-10% and the tungsten content in chromium-tungsten targets being 1-10%.
[0023] By employing advanced methods such as composite coating technology and ion plating, superior surface protection is achieved for power fittings, effectively resisting damage from external factors. The application of composite coatings significantly enhances the wear resistance of power fittings, extends their service life, and reduces maintenance costs caused by wear. The use of arc ion plating and magnetron sputtering, including alternating deposition of CrSiN / ZrN or CrW / CrN materials, improves the corrosion resistance of power fittings, contributing to long-term stable operation in corrosive environments. The innovative design of simultaneous multi-target deposition and a closed magnetic field improves coating efficiency, making the entire process more efficient and reducing production time and costs. Final quality inspection ensures the uniformity and consistency of the composite coating, guaranteeing the reliability of the final product. By improving the performance and durability of power fittings, maintenance costs are reduced, minimizing the resources and funds required for frequent maintenance and replacement.
[0024] The surface cleaning process for electrical fittings includes the following steps: S1.1 Remove large particles of dirt and impurities from the surface of electrical fittings by brushing; S1.2 Select an acidic cleaning solvent with a pH value between 1 and 3, including sulfuric acid, hydrochloric acid and nitric acid, and soak for 15-60 minutes to remove oxides from the surface of electrical fittings; S1.3 Rinse the deoxidized electrical fittings with pure water until the acidic cleaning solvent is completely removed; S1.4 After rinsing, soak the electrical fittings in deionized water for 5-30 minutes to remove residual particles and small particulate matter; S1.5. Dry the electrical fittings in a vacuum oven at 50-100℃ until completely dry.
[0025] Cleaning removes dirt, grease, and other impurities from the surface, ensuring the hardware surface is clean. This helps improve the adhesion of subsequent coatings, ensuring the coating adheres firmly to the hardware surface and is less prone to peeling or flaking. Cleaning removes surface unevenness and oxides, ensuring the coating is evenly distributed on the hardware surface. This helps avoid defects or uneven areas in the coating, improving coating consistency and quality. Cleaning increases the energy of the hardware surface, making it easier for it to interact with subsequent coating materials, thus improving coating adhesion and bonding. Cleaning reduces defects in the coating, such as bubbles, cracks, or foreign matter. This helps improve coating quality, reducing imperfections and potential problems that could damage the hardware. By keeping the hardware surface clean and smooth, cleaning reduces damage from corrosion, wear, and other factors, thus extending the hardware's service life. Cleaning helps remove oxides from the hardware surface, reducing the hardware's susceptibility to corrosion and increasing its resistance to corrosion in harsh environments.
[0026] The thickness of the chromium layer on the surface of power fittings is 8-20 μm.
[0027] The electrode layout of the closed magnetic field includes: installing a strong magnetic material N(S) inside a planar unbalanced magnetron sputtering target, and the magnetic pole shoe connected to the strong magnetic material is a weak magnetic material S(N). In adjacent unbalanced magnetron sputtering targets, the N and S magnetic polarities of the strong magnet materials are arranged in opposite directions. The magnetic field lines between adjacent magnetic fields are interconnected, forming a closed magnetic field, and the power fittings are located at the center of the closed magnetic field.
[0028] A configuration of strong magnetic materials and magnetic pole shoes is used within a non-equilibrium magnetron sputtering target, with adjacent magnetron sputtering targets arranged in opposite polarities. This creates a closed magnetic field that interconnects the magnetic field lines, forming a specific type of magnetic field.
[0029] The formation of a closed magnetic field helps increase the plasma density in the coating space, allowing particles in the coating to be deposited more uniformly on the surface of the power fittings. This helps ensure coating uniformity and reduces uneven areas within the coating. The design of the closed magnetic field also improves coating quality, as a uniform plasma density contributes to the formation of a more consistent coating, reducing defects. Furthermore, the closed magnetic field helps improve the efficiency of the magnetron sputtering process, thereby reducing energy and material waste and lowering production costs. Magnetron sputtering employs simultaneous deposition of multiple targets.
[0030] A plating device for surface protection of electrical fittings, comprising: Main frame 1; Two side frames 2; The side frame 2 is located on one side of the main frame 1 and is sealed and fitted together; The main frame 1 and the side frames 2 that are fitted together on both sides form a coating chamber; Several planar dual-target sputtering magnetrons 3 and several planar dual-target ion plating magnetrons 8; The planar dual-target sputtering magnetron 3 is uniformly distributed on the inner wall of the coating chamber to form a uniform closed magnetic field. Several filaments 5; The filament 5 is located between two corresponding planar dual-target sputtering magnetrons 3 and is used to emit electrons to assist in coating. Opening 6; The opening 6 is located on one side of the main frame 1 and is used for communication with the coating chamber.
[0031] Opening 6 can control the internal air pressure, allowing it to extract gas and create a vacuum environment.
[0032] The planar dual-target ion plating control 8 and the opening 6 are evenly distributed around the inner wall of the coating chamber.
[0033] In this embodiment, three planar dual-target ion plating controllers 8 are provided, one of which is positioned opposite to the opening, and the other two are distributed on both sides of the opening and the ion plating controller opposite to the opening; four planar dual-target sputtering magnetrons 3 are provided, and any one of the planar dual-target ion plating controllers 8 is located between the planar dual-target sputtering magnetrons 3.
[0034] Both sides of the planar dual-target sputtering magnetron 3 are provided with magnetic field extension plates 7 for uniformly expanding the magnetic field range.
[0035] By employing a magnetic field extension plate 7, the magnetic force of the planar dual-target sputtering magnetron 3 can be uniformly dispersed through it, forming a relatively balanced closed magnetic field under the uniform distribution of multiple planar dual-target sputtering magnetrons 3.
[0036] The inner wall of the main frame 1 is rotatably equipped with a rotating frame 4 for placing electrical fittings.
[0037] Working principle: Step 1: Cleaning treatment of electrical fittings surface 1.1. Prepare electrical fittings, ensuring that the surface is free of large particles of dirt and impurities.
[0038] 1.2. Soak the surface of electrical fittings in an acidic cleaning solvent (such as sulfuric acid, hydrochloric acid, or nitric acid) with a pH of 2 for 30 minutes to remove oxides.
[0039] 1.3. Rinse the electrical fittings until the acidic cleaning solvent is completely removed, and then rinse with purified water.
[0040] 1.4. Soak electrical fittings in deionized water for 15 minutes to remove residual microparticles and particulate matter.
[0041] 1.5. Place the electrical fittings in a vacuum oven and dry them completely at 80°C.
[0042] Step 2: Formation of the chromium layer 2.1. Place the cleaned electrical fittings into the coating chamber.
[0043] 2.2. Start the planar dual-target sputtering magnetron to ensure that the chromium target material is uniformly sputtered onto the surface of the power fittings. The filament assists in electron emission during this step.
[0044] 2.3. Ensure that a chromium layer is formed on the surface of the electrical fittings, with a thickness between 8 and 20 micrometers.
[0045] Step 3: Creating a Closed Magnetic Field 3.1. Adjust the position of the power fittings and the electrode layout of the planar dual-target sputtering magnetron and planar dual-target ion plating to ensure that the power fittings are located at the center of the closed magnetic field on the surface of the rotating frame.
[0046] 3.2. Install a strong magnetic material N(S) inside a planar unbalanced magnetron sputtering target, and connect the magnetic pole shoes to the strong magnetic material to ensure that the magnetic field lines are cross-linked to form a closed magnetic field.
[0047] 3.3. Ensure that the N and S magnetic polarities of the strong magnetic materials on adjacent unbalanced magnetron sputtering targets are aligned in opposite directions to further enhance the closed magnetic field.
[0048] Step 5: Application of composite coating 5.1. An arc ion source controls a chromium-silicon target or a chromium-tungsten target, and a magnetron sputtering source controls a chromium target or a zirconium target. With the introduction of nitrogen gas, a mixed alternating layer of CrSiN / ZrN is formed by alternating deposition through the arc ion source and the magnetron sputtering source, and finally the CrSiN deposited by the arc ion source is used as the top layer. Alternatively, a mixed alternating layer of CrW / CrN is formed by alternating deposition through the arc ion source and the magnetron sputtering source, and finally the CrW deposited by the arc ion source is used as the top layer.
[0049] Step 6: Quality Inspection 6.1. Conduct quality inspection on the composite coating of power fittings to ensure that the coating is uniform and meets the requirements.
[0050] Quality inspection includes: Thickness measurement: The coating thickness is measured using thickness measuring instruments such as X-ray fluorescence spectrometers, electron beam evaporation spectrometers, or inductively coupled plasma spectrometers. This ensures that the coating thickness is within the specified range to meet design requirements.
[0051] Microscopic observation: Use an optical microscope or scanning electron microscope (SEM) to observe the microstructure and surface quality of the coating surface. This helps to detect any cracks, pores or other inhomogeneities.
[0052] Hardness testing: The hardness of the coating is measured using a hardness testing instrument (such as a Vickers hardness tester or a Rockwell hardness tester). An increase in coating hardness can reflect its wear resistance and corrosion resistance.
[0053] Adhesion testing: Adhesion testing methods (such as scratch testing or peel testing) are used to evaluate the adhesion between the coating and the hardware surface. Poor adhesion may cause the coating to peel or detach.
[0054] Chemical analysis: The chemical composition of the coating is determined using chemical analysis techniques such as X-ray photoelectron spectroscopy or mass spectrometry. This ensures that the coating composition meets specified requirements.
[0055] Corrosion testing: The coating is exposed to a simulated corrosive environment to evaluate its corrosion resistance. This simulates exposure under actual working conditions.
[0056] Friction and wear testing: Friction testing instruments are used to evaluate the friction properties and wear resistance of the coating. This helps determine the coating's performance in real-world applications.
[0057] Optical property testing: The optical properties of the coating, such as transparency or reflectivity, are evaluated using methods such as spectral analysis or transmission electron microscopy.
[0058] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.
Claims
1. A coating method for surface protection of electrical fittings, characterized in that, Including the following methods: S1. Cleaning treatment of the surface of power fittings; S2. Place the cleaned power fittings into the coating chamber, set the positions of the power fittings, the arc ion plating source and the magnetron sputtering source, and set the electrode layout of the magnetron sputtering source to create a closed magnetic field. S3. Control the chromium target coating and cooperate with the filament (5) to assist in the emission of electrons, so as to form a chromium layer of uniform thickness on the surface of the power fittings; S4. An arc ion source controls a chromium-tungsten target, a magnetron sputtering source controls a chromium target, and nitrogen gas is introduced. The arc ion source and the magnetron sputtering source emit and deposit alternately to form a mixed alternating layer of CrW / CrN, and finally the CrW deposited by the arc ion source is used as the surface layer. The magnetron sputtering employs simultaneous deposition on multiple targets. Chromium-tungsten targets are alloy targets, with a tungsten content of 1-10%.
2. The coating method for surface protection of power fittings according to claim 1, characterized in that, The surface cleaning treatment of the power fittings includes the following steps: S1.1 Remove large particles of dirt and impurities from the surface of electrical fittings by brushing; S1.2 Select an acidic cleaning solvent with a pH value between 1 and 3, including sulfuric acid, hydrochloric acid and nitric acid, and soak for 15-60 minutes to remove oxides from the surface of electrical fittings; S1.3 Rinse the deoxidized electrical fittings with pure water until the acidic cleaning solvent is completely removed; S1.4 After rinsing, soak the electrical fittings in deionized water for 5-30 minutes to remove residual particles and small particulate matter; S1.
5. Dry the electrical fittings in a vacuum oven at 50-100℃ until completely dry.
3. The coating method for surface protection of power fittings according to claim 1, characterized in that, The thickness of the chromium layer on the surface of the power fittings is 8-20 μm.
Citation Information
Patent Citations
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