Preparation method of high-performance magnetic code disc material for high-speed electric spindle

Abstract

The application provides a high-performance magnetic code disc material preparation method for a high-speed electric spindle, and belongs to the technical field of magnetic materials. The method comprises the following steps: obtaining a metal substrate, wherein the metal substrate is non-magnetic stainless steel; obtaining a prepared thin film material, wherein the prepared thin film material is FeCoCr thin film material with double transition layers; and performing hierarchical annealing treatment on the prepared thin film material to obtain the high-performance magnetic code disc material for the high-speed electric spindle. Through the design of the Cr / SiO2 / FeCoCr / Ti multilayer film structure, the high-performance magnetic code disc material can be obtained, and the high-performance magnetic code disc material is applied to the high-speed electric spindle of a numerical control machine tool, and has the advantages of high material performance, high-speed resistance, high impact resistance, vibration resistance and the like. The magnetic code disc material preparation method is simple, high in manufacturing efficiency and low in cost.

Description

Technical Field

[0001] This invention relates to the field of magnetic materials technology, and specifically to a method for preparing a high-performance magnetic encoder disk material for high-speed electric spindles. Background Technology

[0002] Position sensors play a crucial role in modern industrial manufacturing, especially angular displacement sensors, which consist of a code disk for recording signals and a sensing chip for reading signals. Based on their detection principles, angular displacement sensors can be classified into angular displacement optical grating sensors, angular displacement magnetic sensors, and angular displacement capacitive sensors. Considering the practical application scenarios of CNC machine tools (such as CNC grinding machines, machining centers, and milling-turning machines), where the electric spindles need to maintain extremely high angular accuracy and stability even at high speeds of thousands or even tens of thousands of revolutions per minute, and given that optical grating sensor code disks are made of optical glass, which is fragile at high speeds and not resistant to oil contamination, this invention provides a method for preparing a magnetic code disk material for a high-speed electric spindle angular displacement magnetic sensor for CNC machine tools.

[0003] Currently, commonly used magnetic encoder materials include ferrite bulk materials, FeCoCr, and CuNiFe. Besides the magnetic properties of the magnetic encoder material, its uniformity and flatness significantly affect the accuracy of angular displacement magnetic sensors and the stability of recorded magnetic signals. Previous patents typically deposited FeCoCr thin films on single-crystal silicon substrates, which is actually unfavorable for installation on CNC machine tool electric spindles, especially for high-speed applications. Single-crystal silicon also suffers from fragility and easy delamination at high speeds. Therefore, improving the flatness and uniformity of magnetic encoder materials to obtain high-performance magnetic encoders that can withstand high-speed application environments and are highly shock and vibration resistant is one of the key research issues in the field of magnetic encoders for CNC machine tool electric spindles. Summary of the Invention

[0004] To address the problems of existing technologies, this application provides a method for preparing high-performance magnetic encoder materials for high-speed electric spindles, which can maximize angular accuracy and stability while ensuring high-speed applications. The technical solution is as follows:

[0005] According to one aspect of this application, a method for preparing a high-performance magnetic encoder disk material for a high-speed electric spindle is provided. The method includes: obtaining a metal substrate, wherein the metal substrate is non-magnetic stainless steel; obtaining a pre-prepared thin film material, wherein the pre-prepared thin film material is a FeCoCr thin film material with a double transition layer; and performing graded annealing on the pre-prepared thin film material to obtain the high-performance magnetic encoder disk material for the high-speed electric spindle.

[0006] Optionally, the prepared thin film material is Cr / SiO2 / FeCoCr / Ti.

[0007] Optionally, the prepared thin film material is a multilayer film, wherein the Cr / SiO2 is a double buffer layer used to improve the flatness and uniformity of the magnetic layer; and the Ti is a protective layer.

[0008] Optionally, obtaining the prepared thin film material specifically includes: sequentially sputtering a Cr target, a SiO2 target, an FeCoCr target, and a Ti target to obtain a FeCoCr thin film material with Cr / SiO2 as a double transition layer.

[0009] Optionally, the step of performing graded annealing on the prepared thin film material to obtain the high-performance magnetic encoder disk material for the high-speed electric spindle specifically includes: performing a first isothermal annealing on the prepared thin film for a first time; and reducing the temperature to a second isothermal annealing for a second time.

[0010] Optionally, the method further includes placing the prepared thin film in a vacuum environment with a background vacuum level of less than 5*10⁻⁶. -5 The environment described in Pa is a vacuum annealing furnace.

[0011] Optionally, the high-performance magnetic encoder material for the high-speed electric spindle is a FeCoCr thin film with a double buffer layer.

[0012] The beneficial effects of the technical solution provided by this invention include at least the following:

[0013] This invention provides a method for fabricating high-performance magnetic encoder disk materials for high-speed electric spindles. Utilizing a proposed double-buffered layer structure, the method ensures the flatness and uniformity of the magnetic layer. When the surface roughness is less than 1 nm, the magnetic layer does not delaminate. This method achieves a significantly lower surface roughness compared to direct deposition on a polished substrate (micrometer-level roughness), resulting in higher-quality magnetic encoder disk materials. This invention enables FeCoCr magnetic encoder disk films to possess high flatness and uniformity, meeting the practical application requirements of encoder disks in high-speed electric spindles, while also maintaining lower costs. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a flowchart of a method for preparing a high-performance magnetic encoder disk material for a high-speed electric spindle, provided by an embodiment of the present invention. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0017] Considering that in the actual application scenarios of CNC machine tools (such as CNC grinding machines, machining centers, turning and milling composite machines, etc.), their electric spindles still need to maintain extremely high angular accuracy and stability in high-speed application environments of thousands or even tens of thousands of revolutions per minute, and the grating sensor code disk is made of optical glass, which is fragile at high speeds and is not resistant to oil stains, this invention provides a method for preparing magnetic code disk material for high-speed electric spindle angular displacement magnetic sensors of CNC machine tools.

[0018] This application provides a method for preparing a high-performance magnetic encoder material for a high-speed electric spindle, the method comprising:

[0019] S101, Obtain a metal substrate, wherein the metal substrate is non-magnetic stainless steel.

[0020] S102, Obtain the prepared thin film material, wherein the prepared thin film material is a FeCoCr thin film material with a double transition layer.

[0021] Specifically, the prepared thin film material.

[0022] Specifically, the prepared thin film material is a multilayer film, wherein the Cr / SiO2 is a double buffer layer used to improve the flatness and uniformity of the magnetic layer; and the Ti is a protective layer.

[0023] Specifically, obtaining the prepared thin film material includes: sequentially sputtering a Cr target, a SiO2 target, an FeCoCr target, and a Ti target to obtain a FeCoCr thin film material with Cr / SiO2 as a double transition layer.

[0024] S103, the prepared thin film material is subjected to graded annealing to obtain the high-performance magnetic encoder disk material for high-speed electric spindle.

[0025] Specifically, the prepared thin film material is subjected to graded annealing to obtain the high-performance magnetic encoder disk material for high-speed electric spindles, which specifically includes: annealing the prepared thin film at a first isothermal temperature for a first time; and lowering the temperature to a second isothermal temperature for a second time.

[0026] In some embodiments, the first constant temperature is 700 degrees Celsius, the second constant temperature is 630 degrees Celsius, and the first time and the second time are both 30 minutes.

[0027] In some embodiments, the first constant temperature is 800 degrees Celsius, the second constant temperature is 580 degrees Celsius, and the first time and the second time are both 20 minutes.

[0028] It can be determined that anything that can achieve the first constant temperature, second constant temperature, first time, and second time of this application is within the protection scope of this application, and the description herein is not intended to limit this application.

[0029] Specifically, the prepared thin film is placed in a vacuum environment with a background vacuum level of less than 5*10. -5 The environment described in Pa is a vacuum annealing furnace.

[0030] Specifically, the high-performance magnetic encoder material for the high-speed electric spindle is a FeCoCr thin film with a double buffer layer.

[0031] This invention provides a method for preparing high-performance magnetic encoder disk materials for high-speed electric spindles. Utilizing a proposed double-buffered layer structure, the method ensures the flatness and uniformity of the magnetic layer. When the surface roughness is less than 1 nm, the magnetic layer does not delaminate. This method achieves a lower surface roughness compared to direct deposition on a polished substrate (micrometer-level roughness), resulting in higher-quality magnetic encoder disk materials. This invention enables FeCoCr magnetic encoder disk films to possess high flatness and uniformity, meeting the practical application requirements of encoder disks in high-speed electric spindles, while also maintaining lower costs.

[0032] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0033] The use of terms such as "an embodiment," "an embodiment," "an exemplary embodiment," and "some embodiments" in the specification indicates that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments (whether explicitly described or not) should be within the knowledge of those skilled in the art.

[0034] It should be understood that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. A and B can be singular or plural. Additionally, the character " / " in this article generally indicates an "or" relationship between the preceding and following related objects, but it can also represent an "and / or" relationship. Please refer to the context for a more accurate understanding.

[0035] In this invention, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refer to any combination of these items, including any combination of a single item or a plurality of items. For example, at least one of a, b, or c can represent: a, b, c, ab, ac, bc, or abc, where a, b, and c can be a single item or multiple items.

[0036] It should be understood that, in various embodiments of the present invention, the order of the above-mentioned process numbers does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0037] In the several embodiments provided by this invention, it should be understood that the disclosed devices, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another device, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between devices or units may be electrical, mechanical, or other forms.

[0038] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0039] In addition, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0040] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this invention, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0041] This invention encompasses any substitutions, modifications, equivalent methods, and solutions made within the spirit and scope of this invention. To provide the public with a thorough understanding of this invention, specific details are described in detail in the following preferred embodiments; however, those skilled in the art will fully understand the invention even without these details. Furthermore, to avoid unnecessary misunderstanding of the essence of this invention, well-known methods, processes, procedures, components, and circuits are not described in detail.

[0042] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for preparing a high-performance magnetic encoder disk material for a high-speed electric spindle, characterized in that, The method includes: A metal substrate is obtained, wherein the metal substrate is non-magnetic stainless steel; A pre-prepared thin film material is obtained, wherein the pre-prepared thin film material is Cr / SiO2 / FeCoCr / Ti; The obtained prepared thin film material specifically includes: Cr target, SiO2 target, FeCoCr target and Ti target were sputtered sequentially to obtain FeCoCr thin film material with Cr / SiO2 as double transition layer; The prepared thin film material is a multilayer film, wherein the Cr / SiO2 is a double buffer layer used to improve the flatness and uniformity of the magnetic layer; and the Ti is a protective layer. The prepared thin film material is subjected to graded annealing to obtain the high-performance magnetic encoder disk material for high-speed electric spindles.

2. The method for preparing high-performance magnetic encoder disk material for high-speed electric spindles according to claim 1, characterized in that, The step of performing graded annealing on the prepared thin film material to obtain the high-performance magnetic encoder disk material for high-speed electric spindles specifically includes: The prepared thin film is subjected to a first isothermal annealing for a first time. Lower the temperature to the second isothermal annealing time.

3. The method for preparing high-performance magnetic encoder disk material for high-speed electric spindles according to claim 2, characterized in that, The method further includes placing the prepared thin film in a vacuum with a background vacuum of less than 5*10. -5 The environment described in Pa is a vacuum annealing furnace.

4. The method for preparing high-performance magnetic encoder disk material for high-speed electric spindles according to claim 1, characterized in that, The high-performance magnetic encoder material used in the high-speed electric spindle is a FeCoCr thin film with a double buffer layer.

Images