Heating device

Abstract

The application provides a heating device, comprising: a reaction space, the reaction space is used for accommodating a sheet material, and the sheet material is used for chemical treatment in the reaction space; a heating cabin, the reaction space is located in the heating cabin; and an electromagnetic assembly, the electromagnetic assembly is arranged outside the heating cabin, and the electromagnetic assembly and the heating cabin are arranged in an insulated mode, wherein the electromagnetic assembly is used for generating a magnetic field after being electrified, the heating cabin is used for heating in response to the magnetic field generated by the electromagnetic assembly, and the reaction space is heated. The heating device provided by the application uses the principle of magnetic heating to heat the reaction space by using the electromagnetic assembly and the heating cabin, the coating on the inner wall of the heating cabin does not hinder the heating of the heating cabin, and the efficiency of the chemical treatment of the sheet material in the reaction space can be improved.

Description

Technical Field

[0001] This application relates to the field of photovoltaic semiconductor processing technology, and in particular to a heating device. Background Technology

[0002] In the semiconductor manufacturing process, some sheet materials typically require chemical processing, such as chemical vapor deposition (CVD), before being applied to related products. This chemical processing of sheet materials usually takes place in a high-temperature, vacuum environment.

[0003] Currently, sheet materials can be chemically treated in a heating furnace. The furnace can include a heating wire and a quartz vacuum chamber. The heating wire can be positioned outside the vacuum chamber and heat it, while the sheet material can be chemically treated inside the chamber. During the chemical treatment, a film is deposited on the inner wall of the vacuum chamber due to the chemical reaction. This film on the vacuum chamber hinders heat transfer and light transmission, resulting in poor efficiency in the chemical treatment of the sheet material. Summary of the Invention

[0004] In view of the above, it is necessary to provide a heating device to solve the above-mentioned defects.

[0005] An embodiment of this application provides a heating device, including: a reaction space for containing sheet material for chemical treatment within the reaction space; a heating chamber for the reaction space located within the heating chamber; and an electromagnetic component disposed outside the heating chamber, wherein the electromagnetic component and the heating chamber are insulated from each other, wherein the electromagnetic component generates a magnetic field when energized, and the heating chamber heats up in response to the magnetic field generated by the electromagnetic component, thereby heating the reaction space.

[0006] Optionally, the electromagnetic assembly includes: multiple electromagnets, each of which is spirally arranged around the outside of the heating chamber, the multiple electromagnets are arranged side by side in the axial direction, and each electromagnet is used to conduct electricity and generate a magnetic field.

[0007] Optionally, each electromagnet includes multiple surrounding parts arranged side by side in the axial direction, and each surrounding part is connected to two adjacent surrounding parts in the axial direction; the electromagnetic assembly also includes multiple connecting plates, each connecting plate is provided with multiple connection points, the multiple connection points are spaced apart in the axial direction of the electromagnet, and the distance between any two adjacent connection points is the same, each connecting plate is connected to the corresponding electromagnet, and each surrounding part is connected to the connecting plate at the corresponding connection point.

[0008] Optionally, at least a portion of the electromagnet has a cooling channel inside, which is used to contain coolant to cool the electromagnet; and / or the heating device also includes a cooling element for blowing air onto at least a portion of the electromagnet to cool it.

[0009] Optionally, the heating device further includes: a heat insulation component, which is disposed inside the electromagnetic component and surrounds the heating chamber. The thickness of the heat insulation component is less than the induction distance between the heating chamber and the electromagnetic component. The heat insulation component is used to prevent the loss of heat generated by the heating chamber.

[0010] Optionally, the heating device further includes: a housing surrounding the electromagnetic component, with an opening at at least one end for communicating with the heating chamber; and a closure detachably connected to the housing for closing the opening.

[0011] Optionally, the outer casing has a first opening at its first end in the length direction. The closure component for closing the first opening includes: a base connected to the first end of the outer casing, the electromagnetic component and the heating chamber being installed on the base, the base being hollow and used to communicate with the heating chamber; and a first end cover detachably or movably connected to the base, the first end cover being used to close the base so as to cooperate with the base to close the first opening.

[0012] Optionally, the heating device further includes: a vacuum chamber, which is located inside the heating chamber, or the heating chamber is located inside the vacuum chamber, and the reaction space is located inside the vacuum chamber and connected to the vacuum chamber. The vacuum chamber is used to connect to a vacuum pump, which is used to evacuate the vacuum chamber to achieve vacuuming of the reaction space.

[0013] Optionally, the heating chamber forms multiple heating zones along the axial direction of multiple electromagnets, with each heating zone corresponding to one of the multiple electromagnets. The heating equipment also includes multiple controllers, each controller corresponding to one of the multiple electromagnets. Each controller is connected to the corresponding electromagnet, and each controller is used to output a current of a corresponding frequency to the corresponding electromagnet so that the multiple heating zones are heated separately.

[0014] Optionally, the heating chamber forms multiple heating zones along the axial direction of the multiple electromagnets, with each heating zone corresponding to one of the multiple electromagnets. The heating device also includes at least one controller, each controller being used to connect to the multiple electromagnets, and each controller being used to sequentially output current of a corresponding frequency to the connected electromagnets so that the multiple heating zones are heated sequentially.

[0015] The heating equipment provided in this application uses an electromagnetic component and a heating chamber to heat the reaction space based on the principle of magnetic heat generation, enabling the sheet material to undergo chemical treatment within the reaction space. The coating formed on the inner wall of the heating chamber due to the chemical reaction does not obstruct the magnetic field generated by the electromagnetic component, thus reducing the impact of the coating on the temperature rise of the heating chamber and improving the efficiency of the chemical treatment of the sheet material within the reaction space. Attached Figure Description

[0016] Figure 1 This is a first cross-sectional view of the heating device in an embodiment of this application.

[0017] Figure 2 yes Figure 1 Enlarged view of section II.

[0018] Figure 3 This is a schematic diagram of the structure of the electromagnetic component in the embodiments of this application.

[0019] Figure 4 yes Figure 3 Enlarged view of section IV in the middle.

[0020] Figure 5 This is a schematic diagram of the structure of the electromagnet in the embodiments of this application.

[0021] Figure 6 This is a second cross-sectional view of the heating device in an embodiment of this application.

[0022] Figure 7 This is a first connection diagram of the controller and electromagnet in an embodiment of this application.

[0023] Figure 8 This is a second connection diagram of the controller and electromagnet in an embodiment of this application.

[0024] Explanation of key component symbols: 100. Heating equipment; 200. Carrier; 10. Reaction space; 20. Heating chamber; 30. Vacuum chamber; 40. Electromagnetic assembly; 41. Electromagnet; 411. Surrounding part; 412. Cooling channel; 42. Connecting plate; 421. Connection point; 50. Insulation component; 60. Outer shell; 61. First opening; 62. Second opening; 70. Base; 80. First end cap; 90. Second end cap; 110. Controller. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments.

[0026] The term "multiple" in this application refers to two or more. Furthermore, it should be understood that the terms "first," "second," etc., used in the description of this application are used only for descriptive purposes and should not be construed as indicating or implying relative importance, nor as indicating or implying order.

[0027] In the description of the embodiments in this application, the words "exemplary" or "for example" are used to indicate that they are examples, illustrations, or descriptions. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design options. Specifically, the use of the words "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0028] Please see Figure 1 , Figure 1 This application illustrates a heating device 100 according to an embodiment of the present application. The heating device 100 can contain sheet materials used in semiconductor products and heat the sheet materials. The heated sheet materials can then undergo chemical processing within the heating device 100.

[0029] In the embodiments of this application, the type of sheet material is not specifically limited. For example, the sheet material may be, but is not limited to, silicon wafers, silicon carbide wafers, or wafers.

[0030] In the embodiments of this application, the chemical treatment performed on the sheet material is not specifically limited. For example, the chemical treatment may be, but is not limited to, chemical vapor deposition (CVD) or diffusion processes.

[0031] In embodiments of this application, the heating device 100 includes a reaction space 10. The reaction space 10 is an openable enclosed space. Sheet material and a carrier 200 for supporting the sheet material can enter the reaction space 10 when it is open and are housed within it. After the reaction space 10 is closed, an extraction device (not shown) connected to the heating device 100 can extract air from the reaction space 10 to adjust the gas pressure within it. After the reaction space 10 is closed, an intake device (not shown) connected to the preheating device 100 can supply the gas required for chemical treatment to the reaction space 10, and the heating device 100 can heat the reaction space 10 to achieve chemical treatment of the sheet material.

[0032] In one embodiment, the heating device 100 may include a heating chamber 20, a vacuum chamber 30, and an electromagnetic component 40. Both the heating chamber 20 and the vacuum chamber 30 are hollow. The heating chamber 20 is located inside the vacuum chamber 30, with the outer side of the heating chamber 20 spaced apart from the inner side of the vacuum chamber 30. The reaction space 10 is located inside the heating chamber 20. The electromagnetic component 40 is arranged around the outer side of the vacuum chamber 30. When energized, the electromagnetic component 40 generates a magnetic field, and the heating chamber 20 can be heated based on the principle of magnetothermal generation under the influence of the magnetic field generated by the electromagnetic component 40, thereby heating the reaction space 10.

[0033] In the embodiments of this application, the materials of the heating chamber 20 and the vacuum chamber 30 are not specifically limited. For example, the material of the heating chamber 20 may include, but is not limited to, cast iron, carbon steel, stainless steel, graphite, and silicon carbide. The vacuum chamber 30 may be made of metal.

[0034] It is understood that the electromagnetic component 40 and the vacuum chamber 30 are insulated from each other. In the embodiments of this application, the method of insulation is not specifically limited. For example, the electromagnetic component 40 and the vacuum chamber 30 may be spaced apart. As another example, an insulating layer may be provided between the electromagnetic component 40 and the vacuum chamber 30; the material of the insulating layer may be, but is not limited to, rubber, ceramic, etc.

[0035] It is understood that the principle by which the electromagnetic component 40 generates a magnetic field to cause the heating chamber 20 to generate Joule heat is a general physical principle, and the embodiments of this application will not elaborate on this.

[0036] It is understood that the heating chamber 20 is located inside the vacuum chamber 30, therefore the reaction space 10 located inside the heating chamber 20 is also located inside the vacuum chamber 30, and the electromagnetic component 40 surrounding the outside of the vacuum chamber 30 is also surrounding the outside of the heating chamber 20.

[0037] In the embodiments of this application, both the heating chamber 20 and the vacuum chamber 30 are openable chambers. Both the heating chamber 20 and the vacuum chamber 30 have openable and closable doors. When the heating chamber 20 and the vacuum chamber 30 are open, the reaction space 10 is open, and the carrier 200 containing the sheet material can enter the reaction space 10; when the heating chamber 20 and the vacuum chamber 30 are closed, the reaction space 10 is closed, and the sheet material can undergo chemical treatment within the reaction space 10.

[0038] It is understood that the vacuum chamber 30 and the heating chamber 20 can be connected. The evacuation equipment can evacuate the heating chamber 20 by evacuating the vacuum chamber 30, thereby adjusting the gas pressure in the reaction space 10.

[0039] In another embodiment, the heating device 100 may not include a separate vacuum chamber 30. The heating chamber 20 may be connected to a vacuum pump. The vacuum pump can evacuate the heating chamber 20, thereby adjusting the gas pressure within the reaction space 10.

[0040] It is understandable that when the heating device 100 does not include a separate vacuum chamber 30, the vacuum chamber 30 can be integrated into the heating chamber 20, that is, the vacuum chamber 30 and the heating chamber 20 are the same chamber. In this case, the heating chamber 20 can be made of metal.

[0041] It is understandable that the principle of magnetothermal generation is used to raise the temperature of the reaction space 10, ensuring that the temperature of the reaction space 10 meets the temperature requirements for the chemical treatment of sheet materials. The coating formed on the inner wall of the heating chamber 20 due to the chemical reaction does not obstruct the magnetic field, and therefore does not affect the temperature rise of the heating chamber 20. Compared with the related technology's solution of directly heating the vacuum chamber 30 with heating wires, the heating device 100 provided in this application uses the principle of magnetothermal generation to heat the reaction space 10, which can reduce the impact of the decrease in light transmittance and heat transfer caused by the coating on the temperature rise efficiency of the reaction space 10, and can improve the efficiency of chemical treatment of sheet materials.

[0042] Please refer to the following: Figures 2 to 5 In some embodiments, the electromagnetic component 40 may include a plurality of electromagnets 41. The plurality of electromagnets 41 may be arranged side-by-side along the length of the heating device 100. Each electromagnet 41 is helical, and the helical axis of each electromagnet 41 coincides with the length of the heating device 100. Each electromagnet 41 is arranged around the outside of the vacuum chamber 30, meaning that the vacuum chamber 30 and the heating chamber 20 located within the vacuum chamber 30 are both located within the space enclosed by the plurality of electromagnets 41. Each helical electromagnet 41 includes a plurality of surrounding portions 411, and each surrounding portion 411 can form a ring from a axial perspective of the electromagnet 41. Each surrounding portion 411 can be integrally fixedly connected to two adjacent surrounding portions 411.

[0043] The electromagnetic component 40 may further include multiple connecting plates 42. Each electromagnet 41 may correspond to at least one connecting plate 42. Each connecting plate 42 may be fixedly connected to its corresponding electromagnet 41. The multiple connecting plates 42 are spaced apart along the length of the heating device 100. Each connecting plate 42 has multiple connection points 421, which are spaced apart along the length of the heating device 100. The spacing between any two adjacent connection points 421 is equal. The multiple connection points 421 on each connecting plate 42 correspond one-to-one with the multiple surrounding portions 411 in an electromagnet 41, and each surrounding portion 411 may be fixedly connected to its corresponding connection point 421 to achieve a fixed connection between the electromagnet 41 and the corresponding connecting plate 42.

[0044] It is understood that the length direction of the vacuum chamber 30 and the heating chamber 20 is the same as the length direction of the heating device 100. For example... Figure 1As shown, the X direction and its opposite direction can be the length direction of the heating device 100.

[0045] In the embodiments of this application, no specific limitation is made on the fixing method during fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, bolt fixing, welding fixing, etc.

[0046] It is understandable that the connection between the connecting plate 42 and the electromagnet 41 can improve the stability of the spiral structure of the electromagnet 41 and allow the multiple surrounding portions 411 to maintain a spacing. The electromagnet 41 generates heat when energized, and the spacing of the surrounding portions 411 in the electromagnet 41 can increase the heat dissipation space of each surrounding portion 411, thereby improving the heat dissipation performance of the electromagnetic assembly 40.

[0047] In some cases, at least a portion of the electromagnet 41 may be a solid metal wire. The heating device 100 may also include a cooling element (not shown) that can blow air onto at least a portion of the electromagnet 41 to cool it down by means of air cooling.

[0048] In the embodiments of this application, the type of cooling component is not specifically limited. For example, the cooling component may be, but is not limited to, a fan, a blower, etc.

[0049] In other cases, cooling channels 412 are formed within at least part of the electromagnet 41. Figure 6 (As shown in the figure). Each cooling channel 412 can contain coolant, and each electromagnet 41 with a cooling channel 412 can be connected to a coolant circulation device (not shown) other than the heating device 100. The coolant circulation device can drive coolant to flow in the cooling channel 412, thereby cooling the electromagnet 41 by liquid cooling.

[0050] In other cases, the heating device 100 can simultaneously cool and reduce the temperature of multiple electromagnets 41 using both air cooling and liquid cooling methods.

[0051] It is understandable that the cooling measures for the electromagnet 41 can reduce the operating temperature of the electromagnet 41 when it is energized, thereby improving the service life of the electromagnet 41.

[0052] In the embodiments of this application, the material of the electromagnet 41 is not specifically limited. For example, the material of the electromagnet 41 can be, but is not limited to, a copper alloy.

[0053] It is understood that when there are multiple connecting plates 42, each connecting plate 42 can correspond to one electromagnet 41, and each electromagnet 41 can correspond to multiple connecting plates 42. When there are multiple connecting plates 42 corresponding to each electromagnet 41, multiple connecting plates 42 can be arranged around the electromagnet 41, and multiple connecting plates 42 corresponding to the same electromagnet 41 can be spaced apart in the helical direction of the electromagnet 41.

[0054] In other embodiments, the number of connecting plates 42 can be at least one. Multiple electromagnets 41 can be fixedly connected to the same connecting plate 42. The number of connection points 421 on the connecting plate 42 can be equal to the sum of the number of surrounding portions 411 of the multiple electromagnets 41. Each surrounding portion 411 is fixedly connected to a corresponding connection point 421 on the connecting plate 42.

[0055] In some embodiments, the heating device 100 may further include a heat insulation element 50. The heat insulation element 50 is located inside the electromagnetic component 40 and surrounds the vacuum chamber 30. The heat insulation element 50 can prevent heat loss from the inside of the electromagnetic component 40, thereby improving the utilization rate of the heat generated by the heating chamber 20.

[0056] In the embodiments of this application, the type of insulation element 50 is not specifically limited. For example, the insulation element 50 may be, but is not limited to, a flexible insulation blanket, and the material of the insulation blanket may be aluminum silicate.

[0057] It is understood that the insulation component 50 can be spaced apart from the outside of the vacuum chamber 30 or it can be attached to the outside of the vacuum chamber 30. The embodiments of this application do not limit this.

[0058] It is understood that after the electromagnetic component 40 is energized and generates a magnetic field, the heating chamber 20 must maintain a distance from the electromagnetic component 40 greater than or equal to a preset sensing distance in order for the heating chamber 20 to sense the magnetic field generated by the electromagnetic component 40 and generate heat. The sensing distance between the heating chamber 20 and the electromagnetic component 40 can be obtained experimentally or calculated from the rated parameters of the heating chamber 20 and the electromagnetic component 40. The embodiments of this application do not limit this.

[0059] When the heating chamber 20 is located inside the vacuum chamber 30, and the insulation component 50 is located between the vacuum chamber 30 and the electromagnetic component 40, the sum of the thickness of the insulation component 50, the thickness of the vacuum chamber 30, and the distance between the vacuum chamber 30 and the heating chamber 20 is less than the sensing distance of the heating chamber 20 to the electromagnetic component 40.

[0060] When the heating device 100 does not include a separate vacuum chamber 30, and the insulation component 50 is located between the heating chamber 20 and the electromagnetic component 40, the thickness of the insulation component 50 is less than the sensing distance of the heating chamber 20 to the electromagnetic component 40.

[0061] In another embodiment, the vacuum chamber 30 may be located within the heating chamber 20, with the inner side of the heating chamber 20 spaced apart from the outer side of the vacuum chamber 30. The reaction space 10 is located within the vacuum chamber 30. The electromagnetic assembly 40 is arranged around the heating chamber 20. The heat insulation component 50 is located on the outer side of the heating chamber 20 and is arranged around the heating chamber 20.

[0062] It is understood that the vacuum chamber 30 is located inside the heating chamber 20, therefore the reaction space 10 located inside the vacuum chamber 30 is also located inside the heating chamber 20, and the electromagnetic components 40 surrounding the outside of the heating chamber 20 also surround the outside of the vacuum chamber 30.

[0063] It is understood that when the reaction space 10 is located inside the vacuum chamber 30, and the vacuum chamber 30 is located inside the heating chamber 20, the pumping device can evacuate the vacuum chamber 30 to adjust the gas pressure of the reaction space 10, and the gas inlet device can input the gas required for chemical treatment into the vacuum chamber 30. The pumping device and the gas inlet device may not be connected to the heating chamber 20.

[0064] It is understandable that when the vacuum chamber 30 is located inside the heating chamber 20, and the insulation component 50 is located between the heating chamber 20 and the electromagnetic component 40, the thickness of the insulation component 50 is less than the sensing distance of the heating chamber 20 to the electromagnetic component 40.

[0065] In some embodiments, the heating device 100 may further include a housing 60 and closures. The housing 60 may be disposed around the outside of the electromagnetic component 40. The length direction of the housing 60 is the same as the length direction of the heating device 100. The housing 60 has an opening at at least one end in the length direction. The number of closures is equal to the number of openings. The closures are used to close the openings on the housing 60.

[0066] It is understood that the carrier 200 carrying the sheet material can enter the heating device 100 through the opening on the outer shell 60, and enter the reaction space 10 when the vacuum chamber 30 and the heating chamber 20 are opened. When the chemical treatment of the sheet material is carried out, the sealing member can close the opening on the outer shell 60, thereby reducing the influence of external factors on the chemical treatment.

[0067] It is understood that the outer casing 60 and the electromagnetic component 40 can be spaced apart. When the outer casing 60 is made of a material with magnetic and electrical conductivity, the distance between the outer casing 60 and the electromagnetic component 40 can be greater than or equal to 20 centimeters.

[0068] In the first scenario, the heating device 100 can be a vertical device, with its length direction being vertical. The outer casing 60 has a first opening 61 at its first end in the length direction. The closing members for closing the first opening 61 include a base 70 and a first end cap 80.

[0069] The base 70 is fixedly installed at the first end of the outer casing 60. The vacuum chamber 30, heating chamber 20, and electromagnetic component 40 are all fixedly connected to the base 70. The base 70 is hollow. A through slot is provided in the base 70, which extends along the length of the heating device 100, and the base 70 communicates with the first opening 61 through the through slot. The first end cover 80 is movably or detachably connected to the base 70. The first end cover 80 can close the through slot in the base 70.

[0070] It is understood that a movable connection can be, but is not limited to, a hinge. A detachable connection can be, but is not limited to, a snap-fit ​​or threaded connection. By being movably or detachably connected to the base 70, the first end cap 80 can be opened and closed on the base 70, thereby opening and closing the through slot in the base 70 and the first opening 61 of the outer casing 60. That is, the base 70 and the first end cap 80 can cooperate to close the first opening 61.

[0071] It is understood that when each connecting plate 42 in the electromagnetic component 40 is connected to an electromagnet 41, multiple connecting plates 42 can be fixedly connected through the connecting plates 42, and the connecting plate 42 closest to the base 70 can be fixedly connected to the base 70, thereby realizing the fixed connection between the electromagnetic component 40 and the base 70.

[0072] When each connecting plate 42 in the electromagnetic assembly 40 is connected to multiple electromagnets 41, the first end of the connecting plate 42 in the length direction can be fixedly connected to the base 70, thereby realizing the fixed connection between the electromagnetic assembly 40 and the base 70.

[0073] It is understandable that the insulation component 50 can be supported on the base 70, thereby achieving relative fixation between the insulation base and the base 70, the electromagnetic component 40, the vacuum chamber 30 and the heating chamber 20.

[0074] It is understood that openings may be provided at the first end of the heating chamber 20 and the first end of the vacuum chamber 30. In some cases, the first end of the heating chamber 20 and the first end of the vacuum chamber 30 may be fixedly connected or integrally connected, and a closed door may be provided at the opening of the first end of the heating chamber 20 and the vacuum chamber 30. The reaction space 10 can be opened or closed by opening and closing the closed door. When the closed door is open and the first end cover 80 is open, the carrier 200 loaded with sheet material can enter the reaction space 10 through the through slot in the base 70 and the first opening 61.

[0075] In other cases, both the heating chamber 20 and the vacuum chamber 30 have unobstructed openings at their first ends, and these openings are located within the first opening 61. The first ends of the heating chamber 20 and the vacuum chamber 30 are fixedly connected to the base 70. Thus, the heating chamber 20 and the vacuum chamber 30 are in communication, and both are in communication with the through slots in the base 70. When the first end cover 80 is closed, the heating chamber 20 and the vacuum chamber 30 can be sealed, thereby sealing the reaction space 10. When the first end cover 80 is open, the carrier 200 loaded with sheet material can enter the reaction space 10 through the through slots in the base 70.

[0076] For example, when the heating device 100 is a vertical device, the first end of the heating device 100 can be the bottom end of the heating device 100. For example... Figure 1 As shown, the first end of the heating device 100 can be the end opposite to the X-direction arrow.

[0077] In some embodiments, a second opening 62 may be formed at the second end of the housing 60. A closure for closing the second opening 62 may include a second end cap 90. The second end cap 90 is attached to the second end of the housing 60. The second end cap 90 can close the second opening 62.

[0078] It is understood that during the assembly of the heating equipment 100, at least some components of the heating chamber 20, vacuum chamber 30, electromagnetic component 40, and insulation component 50 can enter the outer casing 60 through the second opening 62. After the installation of the heating chamber 20, vacuum chamber 30, electromagnetic component 40, and insulation component 50 within the outer casing 60 is completed, the operator can close the second opening 62 through the second end cap 90, thereby reducing the impact of external factors on the chemical processing within the reaction space 10.

[0079] In the embodiments of this application, the connection relationship between the second end cap 90 and the outer casing 60 is not specifically limited. For example, the second end cap 90 may be fixedly connected to the second end of the outer casing 60 in the longitudinal direction. Alternatively, the second end cap 90 may be detachably or movably connected to the second end of the outer casing 60 in the longitudinal direction.

[0080] It is understandable that insulation layers can be provided in the base 70, the first end cover 80, and the second end cover 90. The insulation layers can prevent the loss of heat from the heating device 100.

[0081] Please refer to the following: Figure 6 In the second scenario, the heating device 100 can be a horizontal device. The length direction of the heating device 100 is horizontal. In the horizontal heating device 100, the structure of the closure can be the same as or similar to the structure of the closure located at the first end of the outer shell 60 in the first scenario, or it can be the same as or similar to the structure of the closure located at the second end of the outer shell 60 in the first scenario. For details, please refer to the figure and related text description, which will not be repeated here.

[0082] It is understandable that when the heating device 100 is a horizontal device, multiple heating devices 100 can be stacked in the height direction to reduce the area occupied by multiple heating devices 100 in the processing area.

[0083] It is understandable that the cross-section of the heating chamber 20 and / or vacuum chamber 30 of the horizontal heating device 100 can be racetrack-shaped to avoid overheating caused by magnetic concentration at the right angles of a square chamber. Simultaneously, the racetrack-shaped structure also reduces uneven temperature distribution caused by inconsistent distances between multiple sheet materials and the wall of the heating chamber 20 when sheet materials are inserted horizontally or vertically in the heating device 100. The horizontal heating device 100 is smaller in height than the vertical heating device 100, allowing a single horizontal heating device 100 to accommodate more heat fields and increase the production capacity per unit area.

[0084] Please refer to the following: Figure 7 In some embodiments, the heating chamber 20 forms multiple heating zones arranged side-by-side along its length, with each heating zone corresponding to a plurality of electromagnets 41. Each heating zone can be heated by sensing the magnetic field generated by the corresponding electromagnet 41. The heating device 100 may also include multiple controllers 110. Each controller 110 corresponds to a plurality of electromagnets 41. Each controller 110 is electrically connected to its corresponding electromagnet 41. Each controller 110 can output a current of a corresponding frequency to its corresponding electromagnet 41, thereby causing the electromagnet 41 to generate a magnetic field of a corresponding intensity, allowing the multiple heating zones to be heated separately.

[0085] It is understandable that the structure of the heating chamber 20 may differ along its length, resulting in varying heat generation in different heating zones under the same magnetic field strength. By using different controllers 110 to transmit current to multiple electromagnets 41 arranged side-by-side along the length of the heating chamber 20, the frequency of the current received by each electromagnet 41 can differ, thus inducing different magnetic fields in the multiple heating zones. By outputting current of a specified frequency to each of the multiple electromagnets 41 through multiple controllers 110, the multiple heating zones can generate similar Joule heating, thereby reducing the difference in heat generation along the length of the heating chamber 20 and reducing the temperature differences between different sub-spaces within the reaction space 10. This allows the sheet materials in each sub-space of the reaction space 10 to undergo chemical treatment at the same temperature, improving the consistency of the chemical treatment of the sheet materials.

[0086] Please refer to the following: Figure 8In some embodiments, the number of controllers 110 in the heating device 100 may be less than the number of electromagnets 41. At least some of the controllers 110 may be electrically connected to multiple electromagnets 41. The controllers 110 connected to multiple electromagnets 41 may output currents of corresponding frequencies to the connected multiple electromagnets 41 in sequence, so that the electromagnets 41 connected to the same controller 110 can generate magnetic fields of different intensities, so that multiple heating zones can be heated in sequence.

[0087] It is understood that the controller 110, which is connected to multiple electromagnets 41, can sequentially output current of corresponding frequency to the connected electromagnets 41 within a preset period, and the duration of each current output to any electromagnet 41 remains the same. In this way, the controller 110 can output current of corresponding frequency to multiple electromagnets 41 in each period, so that multiple heating zones can sequentially generate approximately Joule heat.

[0088] In the heating device 100 provided in the embodiments of this application, an electromagnetic component 40 is used in conjunction with a heating chamber 20 to heat the reaction space 10 located inside the heating chamber 20 through the principle of magnetothermal generation, thereby enabling the sheet material to undergo chemical treatment within the reaction space 10. The coating formed on the inner wall of the heating chamber 20 or vacuum chamber 30 due to the chemical reaction does not obstruct the magnetic field generated by the electromagnetic component 40 in the heating chamber 20. Therefore, the influence of the coating on the inner wall of the heating chamber 20 or vacuum chamber 30 on the temperature rise of the heating chamber 20 can be reduced. This reduces the possibility of reduced heating efficiency of the reaction space 10 due to the coating affecting light transmission and heat transfer after prolonged use of the heating device 100. This improves the efficiency of chemical treatment of sheet materials.

[0089] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments described above should be considered exemplary and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application.

Claims

1. A heating device, characterized in that, include: A reaction space for containing sheet material for chemical treatment within the reaction space; A heating chamber, wherein the reaction space is located within the heating chamber; An electromagnetic component is disposed on the outside of the heating chamber and fixed relative to the heating chamber. The electromagnetic component and the heating chamber are insulated from each other. The electromagnetic component is used to generate a magnetic field when energized. The heating chamber is used to heat up based on the principle of magnetic heat generation under the action of the magnetic field generated by the electromagnetic component, and to heat up the reaction space. A vacuum chamber is located inside the heating chamber, and the reaction space is located inside the vacuum chamber. The vacuum chamber is connected to a vacuum pumping device, which is used to evacuate the vacuum chamber to achieve a vacuum in the reaction space.

2. The heating device as described in claim 1, characterized in that, The electromagnetic component includes: Multiple electromagnets are arranged in a spiral around the outside of the heating chamber, and the multiple electromagnets are arranged side by side in the axial direction. Each electromagnet is used to conduct electricity and generate a magnetic field.

3. The heating device as described in claim 2, characterized in that, Each of the electromagnets includes a plurality of surrounding portions, which are arranged side by side in the axial direction, and each of the surrounding portions is connected to two adjacent surrounding portions in the axial direction; The electromagnetic component further includes multiple connecting plates, each of which has multiple connection points. The multiple connection points are spaced apart along the axial direction of the electromagnet, and the spacing between any two adjacent connection points is the same. Each connecting plate is connected to the corresponding electromagnet, and each of the surrounding portions is connected to the connecting plate at the corresponding connection point.

4. The heating device as described in claim 2, characterized in that, At least a portion of the electromagnet has a cooling channel inside, the cooling channel being used to contain coolant for cooling the electromagnet; and / or The heating device further includes a cooling element for blowing air onto at least a portion of the electromagnet to cool it down.

5. The heating device as described in claim 1, characterized in that, The heating device also includes: A heat insulation component is disposed inside the electromagnetic component and surrounds the heating chamber. The thickness of the heat insulation component is less than the sensing distance between the heating chamber and the electromagnetic component. The heat insulation component is used to prevent the loss of heat generated by the heating chamber.

6. The heating device as described in claim 1, characterized in that, The heating device also includes: An outer casing is provided surrounding the electromagnetic component, and an opening is provided at at least one end of the outer casing for communication with the heating chamber; A closure element, detachably connected to the housing, for closing the opening.

7. The heating device as described in claim 6, characterized in that, The outer casing has a first opening at its first end in the longitudinal direction, and the closure member for closing the first opening includes: A base is connected to the first end of the outer shell. The electromagnetic component and the heating chamber are both installed on the base. The base is hollow and is used to communicate with the heating chamber. A first end cap, which is detachably or movably connected to the base, is used to close the base so as to cooperate with the base to close the first opening.

8. The heating device as described in claim 2, characterized in that, The heating chamber forms multiple heating zones along the axial direction of the multiple electromagnets, with each heating zone corresponding one-to-one with one of the multiple electromagnets. The heating device further includes: Multiple controllers are provided, each controller corresponding to one of the multiple electromagnets. Each controller is connected to the corresponding electromagnet and is used to output a current of a corresponding frequency to the corresponding electromagnet so that the multiple heating zones are heated respectively.

9. The heating device as described in claim 2, characterized in that, The heating chamber forms multiple heating zones along the axial direction of the multiple electromagnets, with each heating zone corresponding one-to-one with one of the multiple electromagnets. The heating device further includes: At least one controller, each controller being configured to connect to a plurality of electromagnets, and each controller being configured to sequentially output current of a corresponding frequency to the connected electromagnets, so that the plurality of heating zones are sequentially heated.

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