一种基于差层滑移策略的电容式应变传感器及其制备方法

The capacitive strain sensor designed using the differential layer slip strategy solves the problems of low sensitivity and hysteresis in capacitive sensors, realizing a capacitive strain sensor with high sensitivity and high linearity and ultra-fast response time.

CN118009870BActive Publication Date: 2026-07-17HARBIN INST OF TECH

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HARBIN INST OF TECH
Filing Date
2024-02-05
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing capacitive strain sensors have low sensitivity, which cannot meet the requirements of wide linear range and high sensitivity. They also suffer from hysteresis and nonlinear response problems.

Method used

A capacitive strain sensor was designed using a differential layer slip strategy. By combining two rigid substrates and staggered high and low stiffness elastomers and electrode layers with a solid electrolyte layer, a locally enhanced electric field distribution and heterogeneous substrate deformation were formed, breaking through the theoretical limit of capacitive sensor sensitivity.

Benefits of technology

The sensor achieves ultra-high sensitivity (GF=9.1×106) and ultra-high linearity (R2=0.9997) across the entire range, with almost no hysteresis and an ultra-fast response time (17 milliseconds).

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Abstract

一种基于差层滑移策略的电容式应变传感器及其制备方法,属于传感器制备领域。所述电容式应变传感器包括两层硬质基底,所述两层硬质基底之间依次设有电极层、固态电解质层、电极层,其中一个电极层的位置与另外两层错开设置,上层硬质基底的上侧和下层硬质基底的下侧设有高刚度弹性体和低刚度弹性体,且上下两侧的高低刚度弹性体错开设置,低刚度弹性体与电极层同侧设置。本发明相对于现有技术的有益效果为:该电容式应变传感器在整个传感范围内表现出超高的灵敏度(GF=9.1×106)和超高的线性度(R2=0.9997),同时几乎没有滞后,并具有超快的响应时间(17毫秒)。
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