一种几何相位光学元件的制备方法

By processing nanopore structures in sections on the substrate and adjusting the scanning direction of the laser beam, the problems of low transmittance and strong polarization dependence of existing geometric phase optical elements have been solved, and geometric phase optical elements with high transmittance and low polarization dependence have been fabricated.

CN118023736BActive Publication Date: 2026-07-17SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY +1

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY
Filing Date
2024-03-01
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing geometric phase optical elements have low transmittance and are polarization-dependent, making it difficult to meet the requirements for efficient optical field phase and polarization state control.

Method used

A femtosecond laser processing system is used to process nanopore structures at a preset depth in the substrate by partitioning the substrate. The scanning direction of the laser beam is adjusted so that the fast axis direction of the nanopore structure is less than the preset angle with the scanning direction, thus forming a hierarchical geometric phase optical element.

Benefits of technology

It significantly improves the transmittance of geometric phase optical elements, reduces the polarization dependence of transmittance, and achieves efficient control of optical field phase and polarization state.

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Abstract

本申请公开了一种几何相位光学元件的制备方法,涉及光学元件技术领域。本申请的几何相位光学元件的制备方法,包括将基体放置于飞秒激光加工系统上;飞秒激光加工系统沿第一扫描方向扫描基体预设深度的第一区域,以在预设深度处形成第一纳米孔结构,再沿第二扫描方向扫描基体预设深度的第二区域,以在预设深度处形成第二纳米孔结构,完成预设深度处纳米孔结构的加工,第一纳米孔结构以及第二纳米孔结构的快轴方向与其扫描方向的夹角均小于预设夹角;在基体的多个预设深度处分别加工纳米孔结构以形成几何相位光学元件。本申请提供的几何相位光学元件的制备方法,能够提高几何相位光学元件的透射率,并降低透射率的偏振依赖性。
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