一种紫外光催化辅助抛光氮化镓单晶装置及抛光方法
By using environmentally friendly polishing fluid and 360-degree ultraviolet light irradiation combined with a stirring device, the problems of inhomogeneity and environmental pollution in ultraviolet photocatalytic polishing of gallium nitride single crystals have been solved, achieving a highly efficient and environmentally friendly polishing effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANDONG UNIV
- Filing Date
- 2024-02-21
- Publication Date
- 2026-07-17
AI Technical Summary
When using ultraviolet light to catalyze and polish gallium nitride single crystals, the irradiation area is uneven, the oxidation effect is poor, and the polishing solution has a complex composition that can easily cause environmental pollution and human harm.
An environmentally friendly polishing slurry composed of small-particle silica sol, hydrogen peroxide solution, photocatalyst, dispersant and pH adjuster, combined with 360-degree ultraviolet irradiation and stirring device, improves the uniformity and fluidity of the polishing slurry and enhances the photocatalytic oxidation effect.
It improves polishing efficiency, reduces environmental pollution and harm to human health, enhances the removal rate and uniformity of polishing slurry, and improves the polishing quality of gallium nitride single crystals.
Smart Images
Figure CN118024131B_ABST