Automatic control method and system for reducing wire breakage color difference

Abstract

The application discloses a kind of automatic control method and system of reducing wire breakage color difference, including the following steps: obtaining wire winding layer number m, and obtaining the deflection period Tm of take-up and pay-off stage according to wire winding layer number m, the deflection amount P1 of pay-off cabin diamond wire to pay-off wheel and the deflection amount P2 of take-up cabin diamond wire to take-up wheel;Based on the deflection period Tm and deflection amount P1, the servo motor of pay-off wheel is controlled to move in Y axis direction;Based on the deflection period Tm and deflection amount P2, the servo motor of take-up wheel is controlled to move in Y axis direction;If in the process of take-up and pay-off, diamond wire breaks and recovers take-up and pay-off, then the broken wire automatic control step is executed.The application is used to solve the technical problem that the existing diamond wire take-up and pay-off method is prone to diamond wire breakage, which leads to increased silicon wafer color difference, so as to reduce the probability of diamond wire breakage, to effectively reduce the purpose of silicon wafer color difference.

Description

Technical Field

[0001] This invention relates to the field of diamond wire cutting technology, specifically to an automatic control method and system for take-up and untake-up reels to reduce color difference in broken wires. Background Technology

[0002] Working principle of the slicing machine: The slicing machine is divided into a feeding chamber, a take-up chamber, and a processing chamber. The processing chamber has a left main roller, a right main roller, and a lower main roller. The main rollers have many sets of wire grooves. The diamond wire is laid in a right-hand spiral pattern by staggering the wires on different main roller grooves. The forward and reverse rotation of the feeding and take-up reels achieves forward and reverse cutting of the silicon rod. The diamond wire on the feeding and take-up reels is redirected by wire guide rollers, achieving a closed-loop connection with the wire mesh on the main rollers.

[0003] Currently, existing wire guide rollers in the industry are mounted on ball bearings, and these rollers guide the diamond wire winding from the take-up and unwinding reels. The wire winding device, containing the guide rollers, uses the principle of gravity balance to ensure that the diamond wire passing through the V-groove of the guide roller is perpendicular to the fully loaded take-up and unwinding reels. Friction with the V-groove of the guide roller accelerates or decelerates it, causing it to move synchronously with the bearing at the same angular velocity. During this process, such as... Figure 1 As shown, as the amount of diamond wire on the take-up and pay-off spool increases or decreases compared to the initial state, the diamond wire on the take-up and pay-off spool is no longer perpendicular to the take-up and pay-off spool. At the same time, the diamond wire no longer coincides with the V-groove of the wire guide wheel. It will be biased towards a certain inclined side of the V-groove and exert a force on the inclined side of the V-groove.

[0004] When the amount of diamond wire on the take-up and release spool decreases or increases, the wire guide wheel in the take-up and release compartment will be worn unevenly by the offset diamond wire, which will accelerate the wear rate between the diamond wire and the wire guide wheel, and thus greatly shorten the service life of the wire guide wheel. At the same time, the increased mechanical stress damage to the diamond wire will greatly increase the risk of diamond wire breakage.

[0005] After a diamond wire breaks, it is usually welded back together and then used directly for cutting. However, during the cutting process, the presence of the weld joint reduces the breaking tension of the diamond wire, leading to changes in the cutting process parameters. Differences in the diameter of the weld joint and changes in process parameters can cause differences in the surface roughness and cutting marks of the silicon wafer, thereby increasing the color difference of the silicon wafer. Summary of the Invention

[0006] To overcome the shortcomings of existing technologies, this invention provides an automatic control method and system for take-up and unwrap reels to reduce color difference caused by broken diamond wires. This method addresses the technical problem that existing diamond wire take-up and unwrap methods are prone to diamond wire breakage, leading to increased color difference in silicon wafers. By reducing the probability of diamond wire breakage, this invention effectively reduces color difference in silicon wafers.

[0007] To solve the above problems, the technical solution adopted by the present invention is as follows:

[0008] An automatic control method for reducing color difference in broken yarn reels includes the following steps:

[0009] Obtain the number of winding layers m on the spool, and obtain the deflection period Tm during the take-up and unwinding stages based on the number of winding layers m on the spool;

[0010] The deflection P1 of the diamond wire in the pay-off chamber relative to the pay-off wheel is obtained based on the number of layers m of the wire winding on the spool.

[0011] The deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel is obtained based on the number of winding layers m of the reel.

[0012] The servo motor of the wire feeding wheel is controlled to move in the Y-axis direction based on the deflection period Tm and the deflection amount P1.

[0013] The servo motor of the take-up reel is controlled to move in the Y-axis direction based on the deflection period Tm and the deflection amount P2.

[0014] If a diamond wire breaks during the take-up and undo process and the take-up and undo process is resumed, the automatic wire breakage control procedure will be executed.

[0015] The automatic disconnection control steps include:

[0016] Obtain the deflection period Tmp during the take-up and release phase after the take-up and release are restored, and the deflection P1 of the diamond wire in the release chamber relative to the release reel. p The deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel. p ;

[0017] Based on the deflection period Tmp and the deflection amount P1 p The servo motor controls the movement of the wire feeding reel in the Y-axis direction;

[0018] Based on the deflection period Tmp and the deflection amount P2 p The servo motor controls the movement of the take-up reel in the Y-axis direction.

[0019] In a preferred embodiment of the present invention, obtaining the deflection period Tm includes:

[0020] The number of cycles N to wait for the first change in the diameter of the spool is obtained based on the number of winding layers m of the spool.

[0021] Acquire the deflection of the servo motor of the wire reel during the wire feeding and take-up stages;

[0022] When the servo motor of the reel deflects during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T1m is obtained according to the number of cycles N.

[0023] When the servo motor of the reel does not deflect during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T2m is obtained according to the number of cycles N.

[0024] The deflection period Tm includes the deflection period T1m and the deflection period T2m.

[0025] In a preferred embodiment of the present invention, obtaining the number of cycles N includes:

[0026] Obtain the line quantity S1 during the line release acceleration process, the line quantity S2 during the line release uniform speed process, the line quantity S3 during the line release deceleration process, the line quantity S4 during the line take-up acceleration process, the line quantity S5 during the line release uniform speed process, and the line quantity S6 during the line release deceleration process.

[0027] The actual wire consumption L3 after one take-up and release cycle is obtained based on the wire consumption of each process.

[0028] Obtain the amount of wire S7 and the number of wire loops n in the first winding cycle of the wire feeding reel;

[0029] The number of cycles N is obtained based on the number of winding layers m on the spool, the actual amount of wire used L3, the amount of wire released S7, and the number of coils released n.

[0030] In a preferred embodiment of the present invention, when the actual amount of wire used L3 after one winding and unwinding cycle is obtained, it is as shown in Formula 1:

[0031] L3=S1+S2+S3)-(S4+S5+S6) (1);

[0032] When obtaining the number of loops n in the first pay-off cycle of the pay-off reel, it is as shown in Formula 2:

[0033] n = W3 / (d+W4) (2);

[0034] In the formula, W3 is the effective winding width of the take-up and unwinding reels, W4 is the diamond wire winding spacing, and d is the diamond wire diameter;

[0035] When obtaining the amount of wire S7 in the first winding cycle of the wire feeding reel, it is as shown in Formula 3:

[0036]

[0037] In the formula, The diameter of an empty feed reel;

[0038] When the number of cycles N is obtained, it is as shown in Formula 4:

[0039] N = S7 / L3 (4).

[0040] In a preferred embodiment of the present invention, when the deflection period T1m is obtained based on the number of periods N, it is as shown in Formula 5:

[0041] T1m=N*(t1+t2+t3+t4+t5+t6)-(t4+t5+t6) (5);

[0042] When the deflection period T2m is obtained based on the number of periods N, it is as shown in Formula 6:

[0043] T2m=N*(t1+t2+t3+t4+t5+t6) (6);

[0044] In the formula, t1 is the acceleration time of the unwinding process, t2 is the uniform speed time of the unwinding process, t3 is the deceleration time of the unwinding process, t4 is the acceleration time of the winding process, t5 is the uniform speed time of the winding process, and t6 is the deceleration time of the winding process. The time parameters of the unwinding and winding process include: t1, t2, t3, t4, t5, and t6.

[0045] In a preferred embodiment of the present invention, when the deflection amount P1 is obtained, it is as shown in Formula 7:

[0046] P1 = m * d (7);

[0047] When the deflection amount P2 is obtained, it is as shown in Formula 8:

[0048]

[0049] In the formula, d is the diameter of the diamond wire; The diameter of an empty feed reel. The diameter of an empty take-up reel.

[0050] In a preferred embodiment of the present invention, obtaining the deflection period Tmp includes:

[0051] Obtain the amount of wire wound per cycle on the pay-off reel and the actual amount of wire used in the process L3 when the pay-off and take-up reels break. p ;

[0052] Based on the amount of wire wound per cycle of the feed reel and the actual amount of wire used in the process L3 p The period Np of the waiting angle offset is obtained;

[0053] The deflection period Tmp is obtained based on the period Np.

[0054] The amount of wire wound per cycle on the pay-off reel is obtained as shown in Formula 9:

[0055]

[0056] In the formula, n is the number of loops cast in the first casting cycle of the casting reel. W3 is the diameter of the empty pay-off reel, W4 is the effective winding width of the take-up and pay-off reels, W4 is the diamond wire winding spacing, and d is the diamond wire diameter.

[0057] In obtaining the actual process line quantity L3 p At that time, as shown in Formula 10:

[0058] L3 p =1 / 2*a*(t1*t1-t4*t4+t3*t3-t6*t6+2t3*t1-2t6*t4)-[(Q1*W1.1+Tz*S1+R1*W2.1+Tz*S1R1)+(Q2*W1.2+Tz*S2+R2*W2.2+Tz*S2)....(+Q p *W1.p+Tz*S p +R p *W2. p +Tz*S p )](10);

[0059] In the formula, p is the number of times the diamond wire breaks within the processing cycle of the pay-off wheel; W1.1, W1.2…W1. p The outer diameter variation of the take-up / untake-off amount on the take-up reel; W2.1, W2.2…W2. p The amount of wire taken in and out varies with the outer diameter of the wire feeding reel; Q1, Q2...Q p R1, R2...R p Tz is the number of rotations of the take-up reel after the wire breakage; t1 is the acceleration time during the wire feeding process; t3 is the deceleration time during the wire feeding process; t4 is the acceleration time during the take-up process; and t6 is the deceleration time during the take-up process.

[0060] When the period Np of the waiting angle offset is obtained, it is as shown in Formula 11:

[0061] Np = Amount of yarn wound per cycle by the pay-off reel / L3 p (11).

[0062] In a preferred embodiment of the present invention, when obtaining the deflection period Tmp based on the period Np, the following steps are included:

[0063] Acquire the deflection of the servo motor of the wire reel during the wire feeding and take-up stages;

[0064] When the servo motors of the reel deflect during both the pay-off and take-up phases, the time parameters of the pay-off and take-up processes are acquired, and the deflection period T1mp is obtained based on the period Np, as shown in Formula 12:

[0065] T1mp=Np*[(t1+t2+t3+t4+t5+t6)]-(t4+t5+t6) (12);

[0066] When the servo motor of the reel does not deflect during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up processes are acquired, and the deflection period T2mp is obtained based on the period Np, as shown in Formula 13:

[0067] T2mp=Np*[(t1+t2+t3+t4+t5+t6)] (13);

[0068] In the formula, t2 is the uniform speed time during the unwinding process, and t5 is the uniform speed time during the winding process.

[0069] In a preferred embodiment of the present invention, after obtaining the deflection amount P1 p and the deflection amount P2 p At that time, including:

[0070] The deflection amount P1 is obtained based on the period Np. p As shown in Formula 14:

[0071] P1 p = *Np*d (14);

[0072] The deflection amount P2 is obtained based on the period Np. p As shown in Formula 15:

[0073]

[0074] In the formula, The diameter of an empty take-up reel.

[0075] An automatic control system for reducing color difference in broken yarn reels includes:

[0076] Deflection period acquisition unit: used to acquire the number of winding layers m of the spool, and to obtain the deflection period Tm of the winding and unwinding stages based on the number of winding layers m of the spool;

[0077] The wire deflection acquisition unit is used to obtain the deflection P1 of the diamond wire in the wire feeding chamber relative to the wire feeding wheel based on the number of wire layers m of the wire spool.

[0078] Take-up deflection acquisition unit: used to obtain the deflection P2 of the diamond wire in the take-up chamber relative to the take-up reel based on the number of winding layers m of the reel;

[0079] The wire feeding control unit controls the servo motor of the wire feeding wheel to move in the Y-axis direction based on the deflection period Tm and the deflection amount P1.

[0080] Take-up control unit: Based on the deflection period Tm and the deflection amount P2, controls the servo motor of the take-up reel to move in the Y-axis direction;

[0081] If a diamond wire breaks during the take-up and release process and the take-up and release are resumed, the deflection period acquisition unit is further configured to: acquire the deflection period Tmp during the take-up and release phase after the take-up and release are resumed; and the release deflection amount acquisition unit is further configured to: acquire the deflection amount P1 of the diamond wire in the release chamber relative to the release reel. p The take-up deflection acquisition unit is further configured to: acquire the deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel. p ;

[0082] The wire feeding control unit is further configured to: based on the deflection period Tmp and the deflection amount P1 p The servo motor controls the movement of the wire feeding reel in the Y-axis direction;

[0083] The take-up control unit is further configured to: determine the deflection period Tmp and the deflection amount P2 based on... p The servo motor controls the movement of the take-up reel in the Y-axis direction.

[0084] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0085] (1) This invention achieves automatic logic control of the servo motor of the take-up and unwinding reel during operation, enabling the reel's Y-axis coordinates to be automatically adjusted so that its maximum wire diameter surface is perpendicularly tangent to the groove of the wire guide wheel. Under this condition, because the wire guide wheel is in a self-balancing state, the conical surface of the wire guide wheel groove will hardly rub against the diamond wire. Without external mechanical stress, the breakage rate of the diamond wire will be greatly reduced, ultimately reducing the color difference of the produced silicon wafers;

[0086] (2) The present invention achieves dynamic automatic control of the take-up and untake-up reels by means of a servo motor, thereby reducing the breakage rate of diamond wire, reducing the color difference of silicon wafers, and improving the yield of silicon wafers.

[0087] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0088] Figure 1 This is a schematic diagram of the diamond wire offset process described in the background art of this invention;

[0089] Figure 2This is a flowchart illustrating the automatic control method for reducing color difference in broken threads using take-up and unwinding reels provided by the present invention.

[0090] Figure 3 This is a structural schematic diagram illustrating the take-up / unwind reel control process according to an embodiment of the present invention.

[0091] The following are the reference numerals: 1. Take-up / delivery reel bearing housing; 2. Take-up / delivery reel; 3. Slide rail mechanism; 4. Cable guide wheel. Detailed Implementation

[0092] The automatic control method for reducing color difference in thread breakage using take-up and unwinding reels provided by this invention, such as... Figure 2 As shown, it includes the following steps:

[0093] Step S1: Obtain the number of winding layers m on the spool, and obtain the deflection period Tm during the take-up and unwinding stages based on the number of winding layers m on the spool;

[0094] Step S2: Obtain the deflection P1 of the diamond wire in the pay-off chamber relative to the pay-off wheel based on the number of layers m of wire winding on the spool;

[0095] Step S3: Obtain the deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel based on the number of layers m of the wire winding on the reel;

[0096] Step S4: Based on the deflection period Tm and the deflection amount P1, control the servo motor of the wire feeding wheel to move in the Y-axis direction;

[0097] Step S5: Based on the deflection period Tm and deflection amount P2, control the servo motor of the take-up reel to move in the Y-axis direction;

[0098] Step S6: If a diamond wire breaks during the winding and unwinding process and the winding and unwinding process is resumed, then the automatic wire breakage control step is executed.

[0099] The automatic disconnection control steps include:

[0100] Obtain the deflection period Tmp and the deflection P1 of the diamond wire in the pay-off compartment relative to the pay-off reel during the take-up and pay-off phase after the take-up and pay-off are restored. p The deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel. p ;

[0101] Based on the deflection period Tmp and the deflection amount P1 p The servo motor controls the movement of the wire feeding reel in the Y-axis direction;

[0102] Based on the deflection period Tmp and the deflection amount P2 p The servo motor controls the movement of the take-up reel in the Y-axis direction.

[0103] Specifically, the Y-axis is a direction that is perpendicular to the rotation axis of the take-up and untake-down reels in the horizontal plane, and the Y-axis is parallel to the slide rail mechanism 3.

[0104] In step S1 above, when obtaining the deflection period Tm, the following steps are included:

[0105] The number of cycles N to wait for the first change in the diameter of the spool is obtained based on the number of winding layers m of the spool.

[0106] Acquire the deflection of the servo motor of the wire reel during the wire feeding and take-up stages;

[0107] When the servo motor of the reel deflects during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T1m is obtained according to the number of cycles N.

[0108] When the servo motor of the reel does not deflect during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T2m is obtained according to the number of cycles N.

[0109] The deflection period Tm includes the deflection period T1m and the deflection period T2m.

[0110] Furthermore, when obtaining the number of cycles N, it includes:

[0111] Obtain the line quantity S1 during the line release acceleration process, the line quantity S2 during the line release uniform speed process, the line quantity S3 during the line release deceleration process, the line quantity S4 during the line take-up acceleration process, the line quantity S5 during the line release uniform speed process, and the line quantity S6 during the line release deceleration process.

[0112] The actual wire consumption L3 after one take-up and release cycle is obtained based on the wire consumption of each process.

[0113] Obtain the amount of wire S7 and the number of wire turns n in the first winding cycle of the wire feeding reel;

[0114] The number of cycles N is obtained based on the number of winding layers m on the spool, the actual amount of wire used L3, the amount of wire released S7, and the number of coils released n.

[0115] Furthermore, when obtaining the actual amount of wire used L3 after one winding and unwinding cycle, as shown in Formula 1:

[0116] L3=S1+S2+S3)-(S4+S5+S6) (1);

[0117] When obtaining the number of loops n in the first pay-off cycle of the pay-off reel, it is as shown in Formula 2:

[0118] n = W3 / (d+W4) (2);

[0119] In the formula, W3 is the effective winding width of the take-up and unwinding reels, W4 is the diamond wire winding spacing, and d is the diamond wire diameter;

[0120] When obtaining the amount of wire S7 in the first winding cycle of the wire feeding wheel, it is as shown in Formula 3:

[0121]

[0122] In the formula, The diameter of an empty feed reel;

[0123] When the number of cycles N is obtained, it is as shown in Formula 4:

[0124] N = S7 / L3 (4).

[0125] Furthermore, when the deflection period T1m is obtained based on the number of periods N, it is as shown in Formula 5:

[0126] T1m=N*(t1+t2+t3+t4+t5+t6)-(t4+t5+t6) (5);

[0127] When the deflection period T2m is obtained based on the number of periods N, it is as shown in Formula 6:

[0128] T2m=N*(t1+t2+t3+t4+t5+t6) (6);

[0129] In the formula, t1 is the acceleration time of the unwinding process, t2 is the uniform speed time of the unwinding process, t3 is the deceleration time of the unwinding process, t4 is the acceleration time of the winding process, t5 is the uniform speed time of the winding process, and t6 is the deceleration time of the winding process. The time parameters of the unwinding and winding process include: t1, t2, t3, t4, t5, and t6.

[0130] In step S2 above, when the deflection amount P1 is obtained, it is as shown in Formula 7:

[0131] P1 = m * d (7);

[0132] In step S3 above, when the deflection amount P2 is obtained, it is as shown in Formula 8:

[0133]

[0134] In the formula, d is the diameter of the diamond wire; The diameter of an empty feed reel. The diameter of an empty take-up reel.

[0135] In step S6 above, when obtaining the deflection period Tmp, the following is included:

[0136] Obtain the amount of wire wound per cycle on the pay-off reel and the actual amount of wire used in the process L3 when the pay-off and take-up reels break. p ;

[0137] Based on the amount of wire wound per cycle of the pay-off reel and the actual amount of wire used in the process, L3 p The period Np of the waiting angle offset is obtained;

[0138] The deflection period Tmp is obtained based on the period Np;

[0139] The amount of wire wound per cycle on the pay-off reel is obtained as shown in Formula 9:

[0140]

[0141] In the formula, n is the number of loops cast in the first casting cycle of the casting reel. W3 is the diameter of the empty pay-off reel, W4 is the effective winding width of the take-up and pay-off reels, W4 is the diamond wire winding spacing, and d is the diamond wire diameter.

[0142] In obtaining the actual amount of production line used in the process L3 p At that time, as shown in Formula 10:

[0143] L3 p =1 / 2*a*(t1*t1-t4*t4+t3*t3-t6*t6+2t3*t1-2t6*t4)-[(Q1*W1.1+Tz*S1+R1*W2.1+Tz*S1R1)+(Q2*W1.2+Tz*S2+R2*W2.2+Tz*S2)....(+Q p *W1.p+Tz*S p +R p *W2. p +Tz*S p )](10);

[0144] In the formula, p is the number of times the diamond wire breaks within the processing cycle of the pay-off wheel; W1.1, W1.2…W1. p The outer diameter variation of the take-up / untake-off amount on the take-up reel; W2.1, W2.2…W2. p The amount of wire taken in and out varies with the outer diameter of the wire feeding reel; Q1, Q2...Q p R1, R2...R p Tz is the number of rotations of the take-up reel after the wire breakage; t1 is the acceleration time during the wire feeding process; t3 is the deceleration time during the wire feeding process; t4 is the acceleration time during the take-up process; and t6 is the deceleration time during the take-up process.

[0145] When the period Np of the waiting angle offset is obtained, it is as shown in Formula 11:

[0146] Np = Amount of yarn wound per cycle by the pay-off reel / L3 p (11).

[0147] Furthermore, when obtaining the deflection period Tmp based on the period Np, the following is included:

[0148] Acquire the deflection of the servo motor of the wire reel during the wire feeding and take-up stages;

[0149] When the servo motors of the wire reel deflect during both the pay-off and take-up phases, the time parameters of the pay-off and take-up processes are acquired, and the deflection period T1mp is obtained based on the period Np, as shown in Formula 12:

[0150] T1mp=Np*[(t1+t2+t3+t4+t5+t6)]-(t4+t5+t6) (12);

[0151] When the servo motor of the reel does not deflect during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up processes are acquired, and the deflection period T2mp is obtained based on the period Np, as shown in Formula 13:

[0152] T2mp=Np*[(t1+t2+t3+t4+t5+t6)] (13);

[0153] In the formula, t2 is the uniform speed time during the unwinding process, and t5 is the uniform speed time during the winding process.

[0154] In step S6 above, after obtaining the deflection amount P1 p and deflection P2 p At that time, including:

[0155] Based on the period Np, the deflection P1 is obtained. p As shown in Formula 14:

[0156] P1 p = *Np*d (14);

[0157] Based on the period Np, the deflection P2 is obtained. p As shown in Formula 15:

[0158]

[0159] In the formula, The diameter of an empty take-up reel.

[0160] The automatic control system for reducing color difference in wire breakage by the present invention includes: a deflection cycle acquisition unit, a wire release deflection acquisition unit, a wire take-up deflection acquisition unit, a wire release control unit, and a wire take-up control unit.

[0161] Deflection period acquisition unit: used to acquire the number of winding layers m on the spool, and to obtain the deflection period Tm during the take-up and unwinding stages based on the number of winding layers m on the spool.

[0162] The wire deflection acquisition unit is used to obtain the deflection P1 of the diamond wire in the wire feeding chamber relative to the wire feeding wheel based on the number of wire layers m on the wire spool.

[0163] Take-up deflection acquisition unit: used to obtain the deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel based on the number of layers m of wire wound on the reel.

[0164] The wire feeding control unit controls the movement of the wire feeding wheel's servo motor in the Y-axis direction based on the deflection period Tm and deflection amount P1.

[0165] Take-up control unit: Based on the deflection period Tm and deflection amount P2, the servo motor of the take-up reel is controlled to move in the Y-axis direction.

[0166] If the diamond wire breaks during the winding and unwinding process and the winding and unwinding are resumed;

[0167] The deflection period acquisition unit is also used to: acquire the deflection period Tmp during the take-up and take-up phase after the take-up and take-up phase has been restored;

[0168] The wire deflection acquisition unit is also used to: acquire the deflection P1 of the diamond wire in the wire-feeding chamber relative to the wire-feeding reel. p ;

[0169] The take-up deflection acquisition unit is also used to: acquire the deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel. p ;

[0170] The wire feeding control unit is also used to: determine the deflection period Tmp and the deflection amount P1 p The servo motor controls the movement of the wire feeding reel in the Y-axis direction;

[0171] The take-up control unit is also used to: determine the deflection period Tmp and the deflection amount P2. p The servo motor controls the movement of the take-up reel in the Y-axis direction.

[0172] The following embodiments are further illustrations of the present invention, but the scope of the present invention is not limited thereto.

[0173] like Figure 3As shown, the take-up / delivery reel bearing housing 1 and the take-up / delivery reel 2 are mounted as a whole on a slide rail mechanism 3 controlled by a precision servo motor. Based on real-time acquired parameters, the reel and bearing housing are controlled to move bidirectionally along the Y-axis. This ensures that the groove of the guide wheel 4 is perpendicular to the horizontal plane and tangent to the outer diameter of the take-up / delivery reel 2, preventing friction between the diamond wire and the conical surface of the guide wheel 4, thus reducing the breakage rate of the diamond wire. Throughout the control process, the moving speed and cycle of the take-up / delivery reel 2 are calculated based on the amount of wire used, the diameter of the take-up / delivery reel 2, the diameter of the diamond wire, and various process parameters.

[0174] In the initial state before the slicing machine is started, the bottom of the V-shaped groove of the wire guide wheel 4 is perpendicular to the horizontal plane and tangent to the take-up / feed-out wheel 2. During the wire feeding process, the outer diameter of the feed wheel gradually decreases, and the wire guide wheel 4, driven by the diamond wire, gradually begins to rotate around the shaft. During this process, because the feed wheel is designed to rotate at a high frequency with alternating speeds; taking each cycle as an example, the amount of wire fed is greater than the amount of wire taken in. During this process, the wheel gradually increases its rotation angle in a positive direction through alternating oscillation, and the diamond wire does work against the gravity exerted on it by the wire guide wheel 4. During this process, the diamond wire is subjected to radial shear stress, and the tension that the diamond wire can withstand gradually decreases.

[0175] During the take-up process, the outer diameter of the take-up reel gradually increases, and the guide wheel 4, driven by the diamond wire, gradually begins to rotate around the shaft. During this process, due to the high-frequency alternating speed rotation of the take-up reel in the process design; taking each cycle as an example, the amount of wire unloaded is greater than the amount of wire taken up, the reel gradually increases its rotation angle in a reverse oscillating manner, and the diamond wire does work against the gravity exerted on it by the guide wheel 4. During this process, the diamond wire is subjected to radial shear stress, and the tension it can withstand gradually decreases.

[0176] To eliminate or reduce the skewing phenomenon caused by the increase or decrease in the diameter of the take-up / delivery reel 2 during the operation of the slicer, which leads to friction with the wire guide reel 4, a take-up / delivery reel system controlled by a servo motor is designed to control the movement of the take-up / delivery reel 2 and its bearing housing in the Y-axis direction. The relevant control parameters are calculated by combining the number of rotations of the take-up / delivery reel 2 and the amount of diamond wire used monitored by the PLC program, and then output to ensure that the wire groove of the wire guide reel 4 always coincides with the diamond wire throughout the entire working cycle, and the extension line of the wire groove is tangent to the reel. The control logic is as follows:

[0177] Let the diameter of the cable guide wheel 4 be D;

[0178] The diameter of the empty feed reel is

[0179] The diameter of the empty take-up reel is

[0180] The change in the outer diameter of the take-up / delivery amount on the take-up reel is W1;

[0181] The change in the outer diameter of the pay-off reel is W2;

[0182] The process feed rate is L1;

[0183] The process take-up amount is L2;

[0184] In a periodic process, the linear velocity during the wire feeding acceleration process is S1;

[0185] Linear quantity S2 during the uniform speed of wire laying;

[0186] Line quantity S3 during the deceleration process of wire laying;

[0187] The acceleration or deceleration is a constant value a;

[0188] The acceleration time for the wire feeding process is t1;

[0189] The uniform speed time during the wire laying process is t2;

[0190] The deceleration time during the wire laying process is t3;

[0191] In a cycle process, the amount of wire taken up during the acceleration process is S4;

[0192] Line quantity S5 during the uniform speed of wire laying;

[0193] Line quantity S6 during the deceleration process of wire laying;

[0194] The acceleration or deceleration is a constant value a;

[0195] The acceleration time for the take-up process is t4;

[0196] The uniform speed time during the take-up process is t5;

[0197] The deceleration time during the take-up process is t6;

[0198] The maximum speed is V1;

[0199] The diameter of the diamond wire is d;

[0200] The spacing between the diamond wire windings is W4;

[0201] The effective winding width of the take-up and pay-off reels is W3;

[0202] The detection and adjustment cycle is T;

[0203] The detection adjustment frequency is f = 1 / T;

[0204] Then we have:

[0205] S1 = 1 / 2 * a * t1 * t1;

[0206] S2 = a * t1 * t2;

[0207] S3 = t3*a*t1 - 1 / 2*a*t3*t3;

[0208] S4 = 1 / 2 * a * t4 * t4;

[0209] S5 = a * t4 * t5;

[0210] S6 = t6 * a * t4 - 1 / 2 * a * t6 * t6;

[0211] During the take-up / unwinding process of the take-up / unwinding reel 2, the diameter does not change constantly. Only after one winding cycle, when the diamond wire overlaps for the first time, will the winding diameter increase or decrease.

[0212] Taking the installation of a new pay-off reel as an example;

[0213] The amount of wire fed in the first winding cycle of the feed reel is S7;

[0214] The number of loops in the first feeding cycle of the feeding reel is n;

[0215] n = W3 / (d+W4);

[0216]

[0217] After one take-up and release cycle, the actual amount of wire used is L3.

[0218] L3 = L1 - L2

[0219] = (S1+S2+S3)-(S4+S5+S6)

[0220] =(1 / 2*a*t1*t1+a*t1*t2+t3*a*t1-1 / 2*a*t3*t3)-(1 / 2*a*t4*t4+a*t4*t5+t6*a*t4-1 / 2*a*t6*t6)

[0221] =1 / 2*a*(t1*t1-t4*t4)+a*(t3*t1-t6*t4)+1 / 2*a*(t3*t3-t6*t6)

[0222] =1 / 2*a*(t1*t1-t4*t4+t3*t3-t6*t6+2t3*t1-2t6*t4)

[0223] The number of waiting cycles for the first change in the diameter of the spool is N;

[0224]

[0225]

[0226] During the take-up and unwinding phases of the N*m-th cycle, the servo motor will exhibit oscillating rotation in both directions. The number of winding layers on the spool is m.

[0227] When deflection occurs during both the release and retraction phases, the deflection period is T1m.

[0228]

[0229] When no deflection occurs during the release and take-up phases, the deflection period is T2m;

[0230]

[0231] The deflection of the diamond wire in the wire feeding chamber relative to the wire feeding reel is P1;

[0232] P1=m*d

[0233] The adjustment amount per cycle is d.

[0234] The deflection of the diamond wire in the take-up compartment relative to the take-up reel is P2;

[0235]

[0236] In the actual process of taking in and taking out diamond wire, the abnormal phenomenon of diamond wire breakage may occur. At this time, part of the diamond wire is lost. This part of the diamond wire is not wound on the pay-off wheel or take-up wheel. Therefore, when the abnormality of wire breakage occurs, the actual offset of the wire guide wheel 4 is less than the theoretical offset.

[0237] Let P be the number of times the diamond wire breaks during the processing cycle of the pay-off wheel;

[0238] When a wire breaks, the amount of wire used is displayed as Y1, Y2...Y p ;

[0239] The change in the outer diameter of the take-up and untake-off reel is W1. .1 W1.2…W1. p ;

[0240] The amount of wire taken in and out varies with the outer diameter of the wire feeding reel as W2.1, W2.2...W2. p ;

[0241] After the wire breakage, the number of rotations of the feed wheel is Q1, Q2...Q p ;

[0242] After the wire breaks, the take-up reel rotates R1, R2...R p ;

[0243] The number of rotations of the main roller after the thread breaks is S1, S2…S p ;

[0244] The diameter of the main roller is Tz;

[0245] The number of rotations of the main roller during each breakage process is K;

[0246] During this period, the line loss due to the disconnection is U. p ;

[0247] U p =Q1*W1.1+Tz*S1+R1*W2.1+Tz*S1R1+Q2*W1.2+Tz*S2+R2*W2.2+Tz*S2....+Q p *W1. p +Tz*S p +R p *W2. p +Tz*S p

[0248] In summary:

[0249]

[0250]

[0251] The amount of process line L3 = 1 / 2 * a * (t1 * t1 - t4 * t4 + t3 * t3 - t6 * t6 + 2t3 * t1 - 2t6 * t4)

[0252] Actual amount of thread used in the process after the take-up / delivery reel 2 breaks:

[0253] L3 p =1 / 2*a*(t1*t1-t4*t4+t3*t3-t6*t6+2t3*t1-2t6*t4)-[(Q1*W1.1+Tz*S1+R1*W2.1+Tz*S1R1)+(Q2*W1.2+Tz*S2+R2*W2.2+Tz*S2)....(+Q p *W1. p +Tz*S p +R p *W2. p +Tz*S p )]

[0254] The adjustment amount of the pay-off reel is Wp, and its waiting period for angular deviation is Np;

[0255]

[0256] When deviation occurs during both the release and take-up phases, the deflection period is T1mp;

[0257]

[0258]

[0259] When no deviation occurs during the release and take-up phases, the deflection period is T2mp;

[0260]

[0261] The offset of the diamond wire in the wire-laying chamber relative to the wire-laying reel is P1. p ;

[0262]

[0263] The number of winding layers on the spool is the number of adjustments made by the spool servo motor. Therefore, the offset of the diamond wire in the take-up compartment relative to the take-up spool during the m-th adjustment is P2. p ;

[0264]

[0265] During the operation of the slicing machine, the diameter of the take-up and pay-off reels 2 changes periodically with their periodic rotation. The servo motors controlling the movement of the take-up and pay-off reels move along the positive and negative Y-axis according to the design values ​​mentioned above. This ensures that the wire groove of the wire guide wheel 4 is perpendicular to the horizontal plane and tangent to the wire wheel, preventing the diamond wire from rubbing against the V-shaped wire groove conical surface, reducing stress damage to the diamond wire, lowering the breakage rate, and thus reducing the increase in silicon wafer color difference caused by wire bonding after wire breakage.

[0266] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. An automatic control method for take-up and undo reels to reduce color difference due to broken threads, characterized in that, Includes the following steps: Obtain the number of winding layers m on the spool, and obtain the deflection period Tm during the take-up and unwinding stages based on the number of winding layers m on the spool; The deflection P1 of the diamond wire in the pay-off chamber relative to the pay-off wheel is obtained based on the number of layers m of the wire winding on the spool. The deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel is obtained based on the number of winding layers m of the reel. The servo motor of the wire feeding wheel is controlled to move in the Y-axis direction based on the deflection period Tm and the deflection amount P1. The servo motor of the take-up reel is controlled to move in the Y-axis direction based on the deflection period Tm and the deflection amount P2; wherein, the Y-axis is a direction that is perpendicular to the rotation axis of the take-up and untake-up reel in the horizontal direction. If a diamond wire breaks during the take-up and undo process and the take-up and undo process is resumed, the automatic wire breakage control procedure will be executed. The automatic disconnection control steps include: Obtain the deflection period Tmp during the take-up and release phase after the take-up and release are restored, and the deflection P1 of the diamond wire in the release chamber relative to the release reel. p The deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel. p ; Based on the deflection period Tmp and the deflection amount P1 p The servo motor controls the movement of the wire feeding reel in the Y-axis direction; Based on the deflection period Tmp and the deflection amount P2 p The servo motor controls the take-up reel to move in the Y-axis direction; When obtaining the deflection period Tm, the following is included: The number of cycles N to wait for the first change in the diameter of the spool is obtained based on the number of winding layers m of the spool. Acquire the deflection of the servo motor of the wire reel during the wire feeding and take-up stages; When the servo motor of the reel deflects during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T1m is obtained according to the number of cycles N. When the servo motor of the reel does not deflect during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T2m is obtained according to the number of cycles N. Wherein, the deflection period Tm includes: the deflection period T1m and the deflection period T2m; When the deflection amount P1 is obtained, it is as shown in Formula 7: P1=m×d(7; When the deflection amount P2 is obtained, it is as shown in Formula 8: P2=m×d×Ø1 / Ø2(8; In the formula, d is the diameter of the diamond wire; Ø1 is the diameter of the empty feed spool, and Ø2 is the diameter of the empty take-up spool.

2. The automatic control method for reducing color difference in thread breakage of take-up and unwinding reels according to claim 1, characterized in that, When obtaining the number of cycles N, the following steps are included: Obtain the line quantity S1 during the line release acceleration process, the line quantity S2 during the line release uniform speed process, the line quantity S3 during the line release deceleration process, the line quantity S4 during the line take-up acceleration process, the line quantity S5 during the line take-up uniform speed process, and the line quantity S6 during the line take-up deceleration process. The actual wire consumption L3 after one take-up and release cycle is obtained based on the wire consumption of each process. Obtain the amount of wire S7 and the number of wire loops n in the first winding cycle of the wire feeding reel; The number of cycles N is obtained based on the number of winding layers m on the spool, the actual amount of wire used L3, the amount of wire released S7, and the number of coils released n.

3. The automatic control method for reducing color difference in thread breakage of take-up and unwinding reels according to claim 2, characterized in that, When the actual amount of wire used, L3, is obtained after one winding and unwinding cycle, it is as shown in Formula 1: L3=(S1+S2+S3)-(S4+S5+S6)(1); When obtaining the number of loops n in the first pay-off cycle of the pay-off reel, it is as shown in Formula 2: n = W3 / (d+W4) (2); In the formula, W3 is the effective winding width of the take-up and unwinding reels, W4 is the diamond wire winding spacing, and d is the diamond wire diameter; When obtaining the amount of wire S7 in the first winding cycle of the wire feeding reel, it is as shown in Formula 3: S7=n×(Ø1+m×d)×π(3); In the formula, Ø1 is the diameter of the empty feed reel; When the number of cycles N is obtained, it is as shown in Formula 4: N=S7 / L3(4).

4. The automatic control method for reducing color difference in thread breakage of take-up and unwinding reels according to claim 3, characterized in that, When the deflection period T1m is obtained based on the number of periods N, it is as shown in Formula 5: T1m=N×(t1+t2+t3+t4+t5+t6)-(t4+t5+t6)(5); When the deflection period T2m is obtained based on the number of periods N, it is as shown in Formula 6: T2m=N×(t1+t2+t3+t4+t5+t6)(6); In the formula, t1 is the acceleration time of the line release process, t2 is the uniform speed time of the line release process, t3 is the deceleration time of the line release process, t4 is the acceleration time of the line take-up process, t5 is the uniform speed time of the line take-up process, and t6 is the deceleration time of the line take-up process. The time parameters for the take-up and release process include: t1, t2, t3, t4, t5, and t6.

5. The automatic control method for reducing color difference in thread breakage of take-up and unwinding reels according to claim 1, characterized in that, When obtaining the deflection period Tmp, the following is included: Obtain the amount of wire wound per cycle on the pay-off reel and the actual amount of wire used in the process L3 when the pay-off and take-up reels break. p ; Based on the amount of wire wound per cycle of the feed reel and the actual amount of wire used in the process L3 p The period Np of the waiting angle offset is obtained; The deflection period Tmp is obtained based on the period Np. The amount of wire wound per cycle on the pay-off reel is obtained as shown in Formula 9: The amount of wire wound per cycle by the wire feeding reel = n × (Ø1 + m × d) × π × W3 / (d + W4) (9); In the formula, n is the number of loops in the first pay-off cycle of the pay-off reel, Ø1 is the diameter of the empty pay-off reel, W3 is the effective winding width of the take-up and pay-off reels, W4 is the diamond wire winding spacing, and d is the diamond wire diameter.

6. The automatic control method for reducing color difference in thread breakage of take-up and unwinding reels according to claim 5, characterized in that, When obtaining the deflection period Tmp based on the period Np, the following steps are included: Acquire the deflection of the servo motor of the wire reel during the wire feeding and take-up stages; When the servo motors of the reel deflect during both the pay-off and take-up phases, the time parameters of the pay-off and take-up processes are acquired, and the deflection period T1mp is obtained based on the period Np, as shown in Formula 12: T1mp=Np×(t1+t2+t3+t4+t5+t6)-(t4+t5+t6)(12); When the servo motor of the reel does not deflect during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up processes are acquired, and the deflection period T2mp is obtained based on the period Np, as shown in Formula 13: T2mp=Np×(t1+t2+t3+t4+t5+t6)(13); In the formula, t2 is the uniform speed time during the unwinding process, and t5 is the uniform speed time during the winding process.

7. The automatic control method for reducing color difference in thread breakage of take-up and unwinding reels according to claim 5, characterized in that, After obtaining the deflection P1 p and the deflection amount P2 p At that time, including: The deflection amount P1 is obtained based on the period Np. p As shown in Formula 14: P1 p =Np×d(14); The deflection amount P2 is obtained based on the period Np. p As shown in Formula 15: P2 p =Np×d×Ø1 / Ø2(15); In the formula, Ø2 is the diameter of the empty take-up reel.

8. An automatic control system for take-up and undo reels to reduce color difference in broken yarn, characterized in that, include: Deflection period acquisition unit: used to acquire the number of winding layers m of the spool, and to obtain the deflection period Tm of the winding and unwinding stages based on the number of winding layers m of the spool; The wire deflection acquisition unit is used to obtain the deflection P1 of the diamond wire in the wire feeding chamber relative to the wire feeding wheel based on the number of wire layers m of the wire spool. Take-up deflection acquisition unit: used to obtain the deflection P2 of the diamond wire in the take-up chamber relative to the take-up reel based on the number of winding layers m of the reel; The wire feeding control unit controls the servo motor of the wire feeding wheel to move in the Y-axis direction based on the deflection period Tm and the deflection amount P1. Take-up control unit: Based on the deflection period Tm and the deflection amount P2, controls the servo motor of the take-up reel to move in the Y-axis direction; wherein, the Y-axis is a direction that is perpendicular to the rotation axis of the take-up and release reels in the horizontal direction; If a diamond wire breaks during the take-up and release process and the take-up and release are resumed, the deflection period acquisition unit is further configured to: acquire the deflection period Tmp during the take-up and release phase after the take-up and release are resumed; and the release deflection amount acquisition unit is further configured to: acquire the deflection amount P1 of the diamond wire in the release chamber relative to the release reel. p The take-up deflection acquisition unit is further configured to: acquire the deflection P2 of the diamond wire in the take-up compartment relative to the take-up reel. p ; The wire feeding control unit is further configured to: based on the deflection period Tmp and the deflection amount P1 p The servo motor controls the movement of the wire feeding reel in the Y-axis direction; The take-up control unit is further configured to: determine the deflection period Tmp and the deflection amount P2 based on... p The servo motor controls the take-up reel to move in the Y-axis direction; When obtaining the deflection period Tm, the following is included: The number of cycles N to wait for the first change in the diameter of the spool is obtained based on the number of winding layers m of the spool. Acquire the deflection of the servo motor of the wire reel during the wire feeding and take-up stages; When the servo motor of the reel deflects during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T1m is obtained according to the number of cycles N. When the servo motor of the reel does not deflect during the wire feeding and take-up stages, the time parameters of the wire feeding and take-up process are obtained, and the deflection period T2m is obtained according to the number of cycles N. Wherein, the deflection period Tm includes: the deflection period T1m and the deflection period T2m; When the deflection amount P1 is obtained, it is as shown in Formula 7: P1=m×d(7; When the deflection amount P2 is obtained, it is as shown in Formula 8: P2=m×d×Ø1 / Ø2(8; In the formula, d is the diameter of the diamond wire; Ø1 is the diameter of the empty feed spool, and Ø2 is the diameter of the empty take-up spool.

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