Ultrasonic drive device and robotic system

Abstract

The present application relates to an ultrasonic drive device and a robot system, and provides an ultrasonic drive device capable of efficiently discharging wear powder and capable of stable driving. The ultrasonic drive device includes a vibration body having a vibration element, and a protrusion provided on the vibration body and configured to transmit a driving force to a driven portion, the protrusion having a hole that is open at a contact portion with the driven portion and communicates with a non-contact portion.

Description

Technical Field

[0001] This invention relates to an ultrasonic drive device and a robot system equipped with the ultrasonic drive device. Background Technology

[0002] An ultrasonic driving device is known, which has multiple piezoelectric elements and drives a vibrating body made of an elastic body to generate elliptical vibration.

[0003] For example, Patent Document 1 discloses an ultrasonic driving device in which the contact surface of the protrusion in contact with the driven body has an uneven shape. According to this document, by making the contact surface of the protrusion with the elastic body or the moving part uneven, even if the contact surface of the protrusion with the elastic body or the moving part is worn, the worn powder will not be trapped in the pressing part. In addition, there are also records of uneven shapes being formed by slits provided parallel to the width direction of the plate and at predetermined intervals.

[0004] Japanese Patent Application Publication No. 6-169582

[0005] However, in the ultrasonic driving device of Patent Document 1, there may be abrasive powder between the protrusion and the driven surface, which may cause the driving to become unstable. Summary of the Invention

[0006] One type of ultrasonic driving device according to this application includes: a vibrating body having a vibrating element; and a protrusion disposed on the vibrating body to transmit a driving force to a driven portion, the protrusion having a hole that opens at a contact portion with the driven portion and communicates with a non-contact portion.

[0007] One type of robot system disclosed in this application comprises: a mobile stage driven by an ultrasonic drive device having a vibrating element; and a tool mounted on the mobile stage. Attached Figure Description

[0008] Figure 1 This is a top view showing an outline of the ultrasonic driving device according to Embodiment 1.

[0009] Figure 2 This is a 3D diagram of an ultrasonic drive device.

[0010] Figure 3 This is a top view of a piezoelectric actuator.

[0011] Figure 4 It is a diagram of the motion pattern when the vibrating body is driven.

[0012] Figure 5 This is a diagram showing the formation of wear powder when the protrusion of the comparative example is driven for a specified length.

[0013] Figure 6 This is a diagram showing the formation of wear powder when the convex part of the comparative example is used for micro-movement in a narrow area.

[0014] Figure 7 yes Figure 6 A magnified view of its movement trajectory.

[0015] Figure 8 This is a front view of the protrusion in Embodiment 1.

[0016] Figure 9 yes Figure 8 A cross-sectional view of section bb.

[0017] Figure 10 This is the rear view of the convex part.

[0018] Figure 11 This is a diagram showing the morphology of wear powder generated when micro-movement occurs in a narrow space via a protrusion.

[0019] Figure 12 This is a cross-sectional view of the protrusion involved in Embodiment 2.

[0020] Figure 13 This is the rear view of the convex part.

[0021] Figure 14 This is a front view of the protrusion involved in Embodiment 3.

[0022] Figure 15 This is a cross-sectional view of the convex part.

[0023] Figure 16 This is the rear view of the convex part.

[0024] Figure 17 This is a diagram showing the formation of wear powder when the protrusion of embodiment 3 is used for micro-movement in a narrow area.

[0025] Figure 18 This is a front view of the protrusion involved in embodiment 4.

[0026] Figure 19 This is a cross-sectional view of the convex part.

[0027] Figure 20 This is a perspective view showing the overall configuration of the robot system involved in Embodiment 5.

[0028] Figure 21 This is a perspective top view showing the general structure of the mobile platform.

[0029] Explanation of reference numerals in the attached figures

[0030] 1-5: Piezoelectric element; 10: Holding part; 11: Contact part; 12-14: Hole; 15, 16: Recess; 18: Non-contact part; 19: Bottom; 20: Vibrating body; 21a, 21b: Support arm; 24-26: Notch; 27: Center line; 28: Piezoelectric actuator; 38: Screw hole; 41, 42: Leaf spring; 44a, 44b: Parallel spring; 45: Force application part; 48: Substrate; 50: Fixing part; 71-74: Protrusion; 90: Protrusion of comparative example; 91: Contact part; 92: Repeating part; 93: Repeating part; 98: Abrasive powder; 99: Abrasive powder; 10 0: Ultrasonic drive device; 160: Driven body; 200: Robot; 210: Base; 220: Robotic arm; 221-226: Arm; 300: Moving stage; 310: Base; 320: Worktable; 320a: Worktable a; 320b: Worktable b; 330: Moving mechanism θ; 330a: Moving mechanism a; 330b: Moving mechanism b; 400: Tool; 410: Inkjet head; 411: Ink ejection orifice; 500: Robot system; 700: Fixed component; 900: Robot control device; d1: Length; d2: Length; J1-J6: Joint. Detailed Implementation

[0031] Implementation Method 1

[0032] Overview of ultrasonic drive device

[0033] Figure 1 This is a top view showing an outline of the ultrasonic driving device according to Embodiment 1. Figure 2 This is a 3D diagram of an ultrasonic drive device. First, using... Figure 1 , Figure 2 The general structure of the ultrasonic drive device 100 will be described.

[0034] The ultrasonic drive device 100 of this embodiment is a piezoelectric drive type motor that moves a prism-shaped driven body 160 extending in the Y-axis direction by pressing it with the protrusion 71 of the vibrator 20. It should be noted that, due to... Figure 1 This is an explanatory diagram of the basic structure, illustrating the driving configuration of an ultrasonic drive device 100. However, in actual use, it is often configured with multiple ultrasonic drive devices 100 connected along the extension direction of the driven body 160 to increase the driving force. Furthermore, the driven body 160 can be a driven section or a disc-shaped rotor. In the case of a rotor, the rotor is driven to rotate by arranging ultrasonic drive devices 100 along its circumference.

[0035] The ultrasonic drive device 100 consists of a piezoelectric actuator 28, a force-applying part 45, a fixing part 50, etc.

[0036] The piezoelectric actuator 28 comprises a vibrating body 20 having a piezoelectric element that serves as a vibration source, a holding portion 10 for holding the vibrating body 20, etc. The vibrating body 20 is rectangular in shape, with its long side direction designated as the X-axis and its short side direction designated as the Y-axis. Furthermore, the thickness direction of the vibrating body 20 is designated as the Z-axis. A protrusion 71, which transmits driving force to the driven body 160, is provided on the short side of the vibrating body 20 in the negative X direction. Details of the piezoelectric actuator 28 will be described later.

[0037] The force-applying part 45 consists of a pair of parallel springs 44a and 44b arranged vertically above and below the piezoelectric actuator 28 in the thickness direction. Figure 2 )constitute.

[0038] like Figure 1 As shown, one end of the parallel spring 44a is integrated with the fixing part 50, while the other end of the parallel spring 44a is connected to the holding part 10 of the piezoelectric actuator 28.

[0039] Leaf springs 41 and 42, extending in the positive Y-axis direction, are mounted on parallel spring 44a and apply force to piezoelectric actuator 28 in the direction that presses protrusion 71 against driven body 160. Leaf spring 41 consists of multiple leaf springs mounted on the rear end side of vibrating body 20, and leaf spring 42 consists of multiple leaf springs mounted on the front end side of vibrating body 20. It should be noted that the parallel spring 44b mounted on the back side of piezoelectric actuator 28 has the same configuration as parallel spring 44a.

[0040] like Figure 2 As shown, the parallel springs 44a and 44b are configured to clamp the piezoelectric actuator 28 from above and below. As a result, the piezoelectric actuator 28 is forced in the negative X direction by the parallel springs 44a and 44b, and the protrusion 71 is pressed against the driven body 160.

[0041] The fixing part 50 is composed of a base material 48 and parallel springs 44a and 44b. In the fixing part 50, parallel springs 44a and 44b are overlapped on the base material 48, which serves as a base, and integrated together. Then, they are fixed to the assembly part (not shown) by screws through two screw holes 38. In addition, at the end of the piezoelectric actuator 28 on the side opposite to the fixing part 50, parallel springs 44a and 44b are overlapped on the holding part 10 and integrated together.

[0042] Return to Figure 1 .

[0043] The ultrasonic drive device 100 configured in this way applies a rotational force based on the bending motion of the vibrator 20 while the driven body 160 is pressed down by the restoring force of multiple leaf springs 41 and 42 through the protrusion 71. It should be noted that the vibration direction of the protrusion 71 when the vibrator 20 is driven is the direction along the extension direction of the Y-axis. The direction along the extension direction of the Y-axis is also called the positive / negative Y direction.

[0044] Overview of piezoelectric actuators

[0045] Figure 3 This is a top view of a piezoelectric actuator.

[0046] like Figure 3 As shown, the holding part 10 is generally rectangular in shape, and a silicon substrate is used as a preferred example. It should be noted that in the preferred example, the force-applying part 45 and the fixing part 50 also use a silicon substrate, but it is not limited to this. It can be made of any material with equivalent physical properties, for example, metal can also be used.

[0047] The vibrating body 20 is a rectangular section within the holding portion 10, and piezoelectric elements 1 to 5, serving as driving vibration elements, are disposed on its surface side. Specifically, the vibrating body 20 is divided into a roughly rectangular shape by three notches 24 to 26 provided in the roughly rectangular holding portion 10. It is connected to the holding portion 10 by a pair of support arms 21a and 21b located approximately at the center of the long side of the rectangle. Furthermore, a line segment extending in the positive Y direction through the support arms 21a and 21b is designated as the centerline 27.

[0048] Rectangular piezoelectric elements 1 and 2 are arranged along one long side of the vibrating body 20. Piezoelectric elements 1 and 2 are arranged symmetrically with respect to the center line 27.

[0049] Similarly, rectangular piezoelectric elements 3 and 4 are arranged along the other long side of the vibrator 20. The piezoelectric elements 3 and 4 are arranged symmetrically with respect to the center line 27.

[0050] Furthermore, a rectangular piezoelectric element 5, whose length connects piezoelectric element 1 and piezoelectric element 2, is provided at the center of the vibrating body 20. In other words, the vibrating body 20 has piezoelectric elements 1 to 5 as vibrating elements.

[0051] exist Figure 3 Although not shown in the diagram, electrodes for supplying drive signals to the piezoelectric elements 1-5 are provided on their upper surfaces, along with wiring. The same wiring is electrically connected to piezoelectric elements 1 and 4 located diagonally opposite each other in the vibrator 20. Similarly, the same wiring is also electrically connected to piezoelectric elements 2 and 3 located diagonally opposite each other.

[0052] The wiring, different from that described above, is connected to piezoelectric element 5. It should be noted that a general-purpose wiring is provided on the lower side of piezoelectric elements 1-5. In a preferred embodiment, the general-purpose wiring is connected to ground potential.

[0053] Figure 4 This is a diagram illustrating an example of the motion pattern of a vibrating body during driving, and... Figure 3 Correspondingly, firstly, the AC drive signal supplied to piezoelectric elements 1 and 4 is designated as the first drive signal. Secondly, a second drive signal with a phase 180 degrees different from the first drive signal is supplied to piezoelectric elements 2 and 3. Then, a third drive signal with a phase different from both the first and second drive signals is supplied to piezoelectric element 5. For example, a signal with a phase 90 degrees different from the first drive signal is supplied as the third drive signal.

[0054] By supplying the aforementioned drive signals to piezoelectric elements 1 to 5 respectively, such as Figure 4 As shown, the vibrating body 20 performs stretching vibration in the long side direction and bending vibration in the short side direction. In other words, the piezoelectric elements 1 to 5 vibrate in-plane on the surface of the substrate. Then, these vibrations are combined, for example, the tip of the protrusion 71 performs an elliptical motion that traces an elliptical orbit counterclockwise, as indicated by the arrow. Through such elliptical motion of the protrusion 71, the driven body 160 moves in the positive Y direction. In other words, the protrusion 71 is disposed on the vibrating body 20 and transmits driving force to the driven body 160. It should be noted that the driving method is not limited to the first to third driving signals described above, and any driving method that allows the tip of the protrusion 71 to perform elliptical motion is acceptable.

[0055] Furthermore, by periodically repeating clockwise and counterclockwise elliptical motions, the driven body 160 can also be made to perform alternating micro-movements in the positive and negative Y directions, thereby achieving high-speed micro-motion within a narrow range of motion. This micro-motion can be used, for example, as a moving stage in a robotic system that assembles an inkjet printhead onto a robot's arm and prints onto an object. Specifically, the moving stage can correct deviations from the printing trajectory. It should be noted that details of the moving stage will be described later.

[0056] Alternatively, the vibrator 20 may be constructed by stacking multiple silicon substrates. For example, it may include another silicon substrate having piezoelectric elements 1 to 5, and this silicon substrate may be attached to... Figure 3 The vibrator 20 is constructed from two silicon substrates on its back side. Preferably, each piezoelectric element 1 to 5 is disposed on both the front and back sides of the vibrator on which the two silicon substrates are stacked. This not only increases the driving force but also counteracts warping caused by bending of the piezoelectric elements within the stacked vibrator. Alternatively, multiple vibrators composed of two stacked substrates can also be stacked.

[0057] The composition and technical issues of the protrusions in the comparative example

[0058] Figure 5 This diagram illustrates the generation pattern of wear powder when the protrusion of the comparative example is driven for a specified length. Figure 6 This diagram illustrates the formation of abrasive powder when the protrusion of the comparative example is used for micro-movement in a narrow section. Figure 7 yes Figure 6 A magnified view of its movement trajectory.

[0059] First of all, Figure 5 The vibrator 20 shown is equipped with a comparative example protrusion 90. The protrusion 90 is a hemispherical projection made of alumina. The dimensions of the protrusion 90 are, for example, approximately... It should be noted that this is not the only one.

[0060] Figure 5 The diagram illustrates the generation of abrasive powder when a driven body 160 is repeatedly moved within a length d1 by a vibrating body 20 having a protrusion 90. The length d1 is, for example, a length of several millimeters to several centimeters.

[0061] Figure 5 The lower section shows the driven body 160 viewed from the positive X direction as seen in the upper section from the P-view, showing the movement trajectory of the contact portion 91 at the front end of the protrusion 90. The contact portion 91 is the abutment portion that contacts the protrusion 90 with the driven body 160 during driving.

[0062] like Figure 5 As shown in the lower section, the movement trajectory of the contact portion 91 becomes an elongated circle along the length d1. Here, abrasive powder 98 generated due to the reciprocating movement is produced along the outer periphery of the elongated circle.

[0063] Figure 6 The diagram illustrates the generation of abrasive powder when a driven body 160 is repeatedly moved within a length d2 by a vibrating body 20 having a protrusion 90. The length d2 is, for example, a length from several μm to several hundred μm. It should be noted that this type of drive, which performs reciprocating movement in a narrow space of less than 1 mm, is also called narrow-space micro-motion.

[0064] Figure 7 yes Figure 6 An enlarged view of the movement trajectory of the contact part 91. (See image below.) Figure 7 As shown, during the narrow-section micro-motion, the contact portion 91 is always in contact with the driven body 160, resulting in a repeating portion 92. Therefore, during the narrow-section micro-motion, in addition to the wear powder 98 generated along the outer periphery of the elongated circle, wear powder 99 is also generated and remains at the repeating portion 92.

[0065] The wear powder 99 generated at the contact portion 91 is constantly squeezed and rubbed by the contact portion 91. If the wear powder 99 cannot be discharged from the contact portion 91, it becomes a factor affecting the frictional driving force. For example, the wear powder 99 may deteriorate due to frictional heat or pressure, causing fluctuations in friction, or it may be worn into a mirror-like surface, leading to a decrease in friction, potentially affecting the driving force and positional accuracy. Furthermore, in the case where a slit groove is provided in the contact portion as in Patent Document 1, when the groove is filled, wear powder may remain between the protrusion and the driven surface, causing the drive to become unstable.

[0066] The structure of the protrusion in this embodiment

[0067] Figure 8 This is a front view of the protrusion in Embodiment 1. Figure 9 yes Figure 8 A cross-sectional view of section bb. Figure 10 This is the rear view of the convex part.

[0068] Here, use Figures 8-10 The structure of the protrusion 71 in this embodiment will be described.

[0069] Figure 8 This is a top view of the protrusion 71 viewed from the negative X side (the driven body 160 side), and its outline is circular. (See image below.) Figure 9 As shown, the protrusion 71 is hemispherical in the side view. That is, in the preferred embodiment, the protrusion 71 is a hemispherical protrusion.

[0070] like Figure 8 As shown, a contact portion 11 is formed on the top of the protrusion 71, and a hole 12 is provided in the center thereon. The contact portion 11 is formed in a circular shape concentric with the hole 12.

[0071] like Figure 9 As shown, the contact portion 11 is a flat area that abuts against the driven body 160. It should be noted that... Figure 8 , Figure 9 For ease of explanation, the accompanying drawing is shown with a contact portion 11, but if... Figure 9 As shown by the dashed line, the initial state of the protrusion 71 can also be a hemispherical shape formed by continuous arcs. Even with this configuration, as the driven body 160 is driven, the top of the protrusion 71 will wear down to form a contact portion 11. In addition, in the protrusion 71, the portion including the side surface other than the contact portion 11 is referred to as the non-contact portion 18.

[0072] like Figure 9 As shown, the hole 12 extends from the contact portion 11 toward the bottom 19 of the protrusion 71. Figure 10As shown, a groove, or recess, 15 is provided at the bottom 19 of the protrusion 71, extending along the Y-axis. In other words, the recess 15 is arranged along the vibration direction of the protrusion 71. The hole 12 communicates with the recess 15. Both ends of the recess 15 open into the non-contact portion 18 on the side of the protrusion 71.

[0073] In other words, the protrusion 71 has a hole 12 that opens at the contact portion 11 with the driven body 160 and communicates with the non-contact portion 18. Furthermore, the protrusion 71 also has a recess 15 that connects to the hole 12 and extends in a straight line. Additionally, the recess 15 opens at the non-contact portion 18 of the driven body 160.

[0074] like Figure 10 As shown, the width W of the recess 15 is greater than the diameter of the hole 12. The width W is the length of the recess 15 in the positive Z-axis direction, which is orthogonal to the positive X-direction of the hole 12 and the positive Y-direction of the recess 15. In other words, in directions orthogonal to the directions of the hole 12 and the recess 15, respectively, the width W of the recess 15 is greater than the diameter of the hole 12.

[0075] In a preferred embodiment, the protrusion 71 is made of hemispherical alumina. It should be noted that this is not a limitation; other hard ceramics or hard metals may also be used, such as zirconium oxide or stainless steel.

[0076] The dimensions of the protrusion 71 are, for example, approximately The protrusion height is approximately 0.5 mm. In this case, the diameter of the hole 12 is set to approximately 100 μm, and the width W of the recess 15 is set to approximately 300 μm. It should be noted that this is not a limitation; the dimensions of the protrusion 71, the diameter of the hole 12, and the width W of the recess 15 can be appropriately set according to the driving conditions such as the material, mass, and driving length of the driven body 160.

[0077] It should be noted that, in the above description, the shape of the protrusion 71 is described as hemispherical, but it is not limited to this. It can be any shape where the contact portion 11 is smaller than the bottom 19, such as a frustum or trapezoid. Alternatively, the front end of a cylinder or prism may have the shape of the protrusion 71.

[0078] The generation pattern of wear powder from the protrusion in this embodiment

[0079] Figure 11 This diagram illustrates the formation of wear powder during micro-movement at a narrow section via the protrusion of this embodiment. Figure 7 Correspondingly.

[0080] Figure 11This diagram illustrates the generation pattern of abrasive powder when a driven body 160 is repeatedly moved within a length d2 by a vibrating body 20 having a protrusion 71 as described in this embodiment. Figure 7 Correspondingly. For example, Figure 11 As shown, according to the protrusion 71, since the contact portion 11 has a hole 12, during the narrow-section micro-movement, the wear powder 99 in the portion with the hole 12 enters into the hole 12, thus not hindering the drive. Furthermore, above and below the movement trajectory of the hole 12, there are repetitive portions 93 where the contact portion 11 always contacts the driven body 160. Although wear powder 99 is generated, in reality, most of the wear powder 99 enters into the hole 12 with the narrow-section micro-movement. The wear powder 99 that enters the hole 12 is discharged sequentially from the opening to the periphery of the non-contact portion 18 via the recess 15.

[0081] In other words, unlike existing ultrasonic drive devices where wear particles may exist between the protrusion and the driven surface, causing the drive to become unstable, the ultrasonic drive device 100 with the protrusion 71 of this embodiment can efficiently discharge wear particles 99 from the hole 12, thus enabling stable drive even when performing micro-movements in narrow spaces.

[0082] Furthermore, even with the hole 12 provided at the top of the protrusion 71, the strength of the protrusion 71 is hardly compromised, allowing it to function as a protrusion. In other words, by providing the hole 12 at the top of the protrusion 71, the function of discharging abrasive powder 99 can be ensured without compromising the strength of the protrusion 71.

[0083] As described above, the ultrasonic driving device 100 according to this embodiment can achieve the following effects.

[0084] The ultrasonic driving device 100 includes: a vibrating body 20 having piezoelectric elements 1 to 5; and a protrusion 71 disposed on the vibrating body 20 to transmit driving force to the driven body 160. The protrusion 71 has a hole 12 that opens at a contact portion 11 with the driven body 160 and communicates with a non-contact portion 18.

[0085] Accordingly, the protrusion 71 has a hole 12 that opens at the contact portion 11 and communicates with the non-contact portion 18. Thus, unlike conventional ultrasonic drive devices where abrasive powder may exist between the protrusion and the driven surface, causing unstable drive, the ultrasonic drive device 100 with the protrusion 71 of this embodiment can efficiently discharge abrasive powder 99 from the hole 12 and can perform stable drive.

[0086] Therefore, an ultrasonic drive device 100 is provided that can efficiently discharge abrasive powder and provide stable driving.

[0087] In addition, the protrusion 71 also has a recess 15 that is connected to the hole 12 and extends in a straight line, and the recess 15 opens at the non-contact portion 18 of the driven body 160.

[0088] Accordingly, since the abrasive powder 99 entering the hole 12 is discharged sequentially from the opening to the periphery of the non-contact portion 18 via the recess 15, the blockage of the hole 12 caused by the abrasive powder 99 can be prevented.

[0089] In addition, the recess 15 is arranged along the vibration direction of the protrusion 71.

[0090] Accordingly, since the abrasive powder 99 moves in the vibration direction in the recess 15, the abrasive powder 99 can be effectively delivered to the openings at both ends of the recess 15.

[0091] Furthermore, in directions orthogonal to the direction in which the hole 12 extends and the direction in which the recess 15 extends, the width W of the recess 15 is greater than the diameter of the hole 12.

[0092] Accordingly, the abrasive powder 99 inside the hole 12 can be easily discharged into the recess 15, which is wider than the hole 12, thereby preventing the hole 12 from becoming blocked.

[0093] Implementation Method 2

[0094] Composition of different protrusions - 1

[0095] Figure 12 This is a cross-sectional view of the protrusion involved in Embodiment 2, and... Figure 9 Correspondingly. Figure 13 This is the rear view of the convex part, and... Figure 10 Correspondingly.

[0096] In the above embodiment, the hole 12 provided in the protrusion 71 was described as a straight cylindrical through hole, but it is not limited to this configuration. Any through hole is acceptable, and for example, the upper and lower hole diameters may be different. Hereinafter, the same reference numerals will be used to mark the same parts as in the above embodiment, and repeated descriptions will be omitted.

[0097] like Figure 12 As shown, in the hole 13 of the protrusion 72 provided in this embodiment, the diameter on the side of the recess 15 is larger than the diameter on the side of the contact portion 11. The hole 13 is a frustoconical hole, and its diameter gradually increases from the contact portion 11 toward the recess 15. Furthermore, the top view of the protrusion 72 and... Figure 8 The same as described in Embodiment 1, except for the shape of the hole 13. In other words, the diameter of the hole 13 gradually increases in the direction from the contact portion 11 toward the vibrator 20.

[0098] As described above, the ultrasonic drive device 100 equipped with the protrusion 72 of this embodiment can achieve the following effects in addition to the effects of the above embodiment.

[0099] The diameter of the hole 13 gradually increases in the direction from the contact portion 11 toward the vibrator 20.

[0100] Accordingly, the abrasive powder 99 entering the hole 13 can be easily discharged to the wider recess 15 side, thereby preventing the hole 13 from becoming clogged. This further improves the discharge efficiency of the abrasive powder 99.

[0101] Therefore, an ultrasonic drive device 100 is provided that can efficiently discharge abrasive powder and provide stable driving.

[0102] Implementation Method 3

[0103] Composition of different protrusions - 2

[0104] Figure 14 This is the front view of the protrusion involved in Embodiment 3, and... Figure 8 Correspondingly. Figure 15 This is a cross-sectional view of the convex part, and... Figure 9 Correspondingly. Figure 16 This is the rear view of the convex part, and... Figure 10 Correspondingly.

[0105] In the above embodiment, the hole 12 provided in the protrusion 71 is described as a circular hole, but it is not limited to this configuration. It can be a through hole, for example, it can also be an elliptical hole. Hereinafter, the same reference numerals are used to mark the same parts as in the above embodiment, and repeated descriptions are omitted.

[0106] like Figure 14 As shown, the hole 14 provided in the protrusion 73 of this embodiment is an ellipse with a major axis in the positive Z direction. Figure 16 As shown, the major axis of the hole 14 is its length contained within the width W of the recess 15, and the minor axis is along the vibration direction of the protrusion 73. Apart from the shape of the hole 14, it is the same as described in Embodiment 1. In other words, in a top view from the contact portion 11 toward the vibrator 20, the hole 14 is an elliptical shape with a minor axis along the vibration direction of the protrusion 73.

[0107] It should be noted that the planar shape of the hole 14 can also be an elongated ellipse. Alternatively, the diameter of the hole 14 in the minor axis direction can gradually increase from the contact portion 11 toward the bottom 19.

[0108] Figure 17 This diagram illustrates the formation of wear powder during micro-movement at a narrow section via the protrusion of this embodiment. Figure 11 , Figure 7 Correspondingly.

[0109] like Figure 17As shown, when a vibrating body 20 with the protrusion 73 of this embodiment performs fine-motion in a narrow section, since the major axis of the elliptical hole 14 is in the direction of the major axis, there is no repetitive contact where the contact portion 11 always contacts the driven body 160. Therefore, during fine-motion, the wear powder 99 overlapping with the hole 14 enters the hole 14 and is discharged. In other words, by making the hole 14 elliptical, it is possible to eliminate the problem of wear powder 99 overlapping with the hole 14. Figure 11 The repeated part 93 is generated in the middle.

[0110] As described above, the ultrasonic drive device 100 equipped with the protrusion 73 of this embodiment can achieve the following effects in addition to the effects of the above embodiment.

[0111] In a top view from the contact portion 11 toward the vibrator 20, the hole 14 is an elliptical shape with a minor axis along the vibration direction of the protrusion 73.

[0112] Therefore, by setting hole 14 as an ellipse, it is possible to eliminate the... Figure 11 The repeating section 93 generated in the process can further improve the discharge efficiency of wear powder 99.

[0113] Therefore, an ultrasonic drive device 100 is provided that can efficiently discharge abrasive powder and provide stable driving.

[0114] Implementation Method 4

[0115] Composition of different protrusions - 3

[0116] Figure 18 This is the front view of the protrusion involved in embodiment 4, and... Figure 8 Correspondingly. Figure 19 This is a cross-sectional view of the convex part, and... Figure 9 Correspondingly.

[0117] In the above embodiment, the case where the recess 15 is provided at the bottom 19 of the protrusion 71 has been described, but this configuration is not limited. It can be provided in such a way that it opens into the non-contact portion 18, for example, it can also be a hole provided on the side of the protrusion 71. Hereinafter, the same reference numerals will be used to mark the same parts as in the above embodiment, and repeated descriptions will be omitted.

[0118] like Figure 19 As shown, the recess 16 provided in the protrusion 74 of this embodiment is a through hole provided on the side of the protrusion 74. The recess 16 is configured to be parallel to the bottom 19 of the protrusion 74 and to penetrate the side of the protrusion 74. When viewed from the side, the recess 16 is a circular hole. In addition, except for the configuration of the recess 16, it is the same as described in Embodiment 1. In other words, the recess 16 is a hole provided in the protrusion 74.

[0119] like Figure 18As shown, the diameter of the hole 12 is set to be contained within the width of the recess 16, and the abrasive powder entering the hole 12 is discharged into the wider recess 16. Then, the abrasive powder in the recess 16 moves in the vibration direction and is discharged from the openings at both ends of the recess 16. It should be noted that the diameter of the hole 12 may also be configured to gradually increase in the direction from the contact portion 11 toward the bottom 19.

[0120] Here, since the bottom 19 of the protrusion 74 in this embodiment does not have a recess, it becomes a flat surface. In a preferred embodiment, adhesive is applied to the flat bottom 19 and it is bonded and fixed to the vibrator 20. When there is a recess in the bottom 19, it is possible that part of the recess will be blocked due to adhesive overflow or the like. When part of the recess is blocked, it will hinder the discharge of abrasive powder. In contrast, according to the protrusion 74 of this embodiment, since no recess is provided in the bottom 19, even when the bottom 19 is applied with adhesive and bonded and fixed to the vibrator 20, it is possible to prevent the recess 16 provided on the side from being blocked by adhesive.

[0121] As described above, the ultrasonic drive device 100 equipped with the protrusion 74 of this embodiment can achieve the following effects in addition to the effects of the above embodiment.

[0122] The recess 16 is a hole provided in the protrusion 74.

[0123] Therefore, even when the bottom 19 is coated with adhesive and bonded to the vibrator 20, the recess 16 on the side can be prevented from being blocked by the adhesive. Thus, the protrusion 74 can be firmly fixed to the vibrator 20 by the adhesive, and wear powder can be discharged efficiently.

[0124] Therefore, an ultrasonic drive device 100 is provided that can efficiently discharge abrasive powder and provide stable driving.

[0125] Implementation Method 5

[0126] Robotic systems

[0127] Figure 20 This is a perspective view showing the overall configuration of the robot system involved in Embodiment 5. Figure 21 This is a perspective top view showing the general structure of the mobile platform.

[0128] Figure 20 The robot system 500 shown in this embodiment includes a movable stage 300 that uses the ultrasonic drive device 100 of each of the above embodiments as a drive source. Hereinafter, the same reference numerals will be used to mark the same parts as in the above embodiments, and repeated descriptions will be omitted.

[0129] Figure 20The robot system 500 shown consists of a robot 200, a robot control device 900 that controls the robot 200 and drives it, and a fixing component 700 that supports and fixes the object Q.

[0130] Robot 200 is a six-axis robot with six drive axes. Robot 200 has a base 210 fixed to the ground, a robotic arm 220 connected to the base 210, and a tool 400 connected to the robotic arm 220 via a moving platform 300.

[0131] The robotic arm 220 is a robotic arm composed of multiple arms 221, 222, 223, 224, 225, and 226 that are rotatably connected, and has six joints J1 to J6. Among them, joints J2, J3, and J5 are bending joints, and joints J1, J4, and J6 are torsional joints. In addition, each of joints J1, J2, J3, J4, J5, and J6 is equipped with a motor M as a drive source and an encoder E for detecting the rotation amount of motor M (rotation angle of the arm).

[0132] Furthermore, a tool 400 is connected to the front end of the arm 226 via a moving stage 300. That is, the moving stage 300 is held by the arm 226, and the tool 400 is mounted on the moving stage 300. The tool 400 is not particularly limited and can be appropriately set according to the target operation. In this embodiment, a printhead is used, and in particular, an inkjet head 410 is used. The inkjet head 410 has an ink chamber (not shown), a vibrating plate disposed on the wall of the ink chamber, and an ink ejection hole 411 connected to the ink chamber, configured to eject ink from the ink chamber through the ink ejection hole 411 by vibration of the vibrating plate. However, the configuration of the inkjet head 410 is not particularly limited. Furthermore, the printhead is not limited to the inkjet head 410.

[0133] like Figure 21 As shown, the movable stage 300 connecting the inkjet head 410 and the robotic arm 220 has a base 310 connected to the arm 226, a worktable 320 that moves relative to the base 310, and a moving mechanism 330 that moves the worktable 320 relative to the base 310. Figure 21 In this model, the three mutually orthogonal axes are designated as the a-axis, b-axis, and c-axis.

[0134] The worktable 320 has an θ worktable 320θ that can rotate relative to the base 310 about the c-axis, a b worktable 320b that can move relative to the θ worktable 320θ in the direction along the b-axis, and an a worktable 320a that can move relative to the b worktable 320b in the direction along the a-axis. The inkjet head 410 is mounted on the a worktable 320a. The a worktable 320a and b worktable 320b are linearly guided along the a-axis and b-axis directions respectively by linear guides, and can move smoothly and without wobbling in the track direction of the linear guides. It should be noted that the three worktables are stacked in the c-axis direction in the order of θ worktable 320θ, b worktable 320b, and a worktable 320a.

[0135] The moving mechanism 330 includes: an θ moving mechanism 330θ, which moves the θ worktable 320θ relative to the base 310 about the c-axis; a b moving mechanism 330b, which moves the b worktable 320b relative to the θ worktable 320θ in a direction along the b-axis; and an a moving mechanism 330a, which moves the a worktable 320a relative to the b worktable 320b in a direction along the a-axis.

[0136] Furthermore, the θ-moving mechanism 330θ, the b-moving mechanism 330b, and the a-moving mechanism 330a each possess the ultrasonic driving device 100 described in the above embodiment as a driving source. It should be noted that in... Figure 21 The diagram shows one ultrasonic drive device 100 on each workbench, but it can also be configured to have multiple ultrasonic drive devices 100 arranged on each workbench for multiple driving.

[0137] This enables the miniaturization and weight reduction of the mobile station 300. Since direct drive can be achieved without a reducer, further weight reduction and miniaturization are possible.

[0138] In other words, the robot system 500 has a mobile stage 300 driven by an ultrasonic drive 100 with a vibrating element and a tool 400 mounted on the mobile stage 300.

[0139] Furthermore, when the robotic arm 220 is used to print on the object Q, the deviation of the printing path can be corrected by the moving stage 300. Specifically, the inkjet head 410 is slightly moved in the opposite direction to the deviation of the printing path by the moving stage 300 to correct the deviation.

[0140] As described above, the robot system 500 according to this embodiment can achieve the following effects.

[0141] The robot system 500 includes: a mobile stage 300 driven by an ultrasonic drive 100 with a vibrating element; and a tool 400 mounted on the mobile stage 300.

[0142] Accordingly, the robot system 500 includes a mobile stage 300 that uses the ultrasonic drive device 100 of the above embodiments as a drive source. Thus, the mobile stage 300 can perform high-precision and stable drive.

[0143] Therefore, a robot system 500 capable of high-precision and stable drive can be provided.

Claims

1. An ultrasonic driving device, characterized in that, have: A vibrating body having a vibrating element; and The protrusion, disposed on the vibrating body, transmits driving force to the driven part. The protrusion has a hole that opens at the contact portion with the driven portion and communicates with the non-contact portion. The ultrasonic driving device also has a recess that is connected to the hole and extends in a straight line. The recess opens at the non-contact portion of the driven portion.

2. The ultrasonic driving device according to claim 1, characterized in that, The recess is configured along the vibration direction of the protrusion.

3. The ultrasonic driving device according to claim 2, characterized in that, In directions orthogonal to both the direction in which the hole extends and the direction in which the recess extends, the width of the recess is greater than the diameter of the hole.

4. The ultrasonic driving device according to claim 1, characterized in that, The diameter of the hole gradually increases in the direction from the contact portion toward the vibrating body.

5. The ultrasonic driving device according to claim 1, characterized in that, In a top view from the contact portion toward the vibrating body, the hole is an elliptical shape with a minor axis along the vibration direction of the protrusion.

6. The ultrasonic driving device according to claim 1, characterized in that, The recess is a hole provided in the protrusion.

7. A robot system, characterized in that, have: The mobile stage is driven by the ultrasonic driving device according to any one of claims 1 to 6; and The tool is mounted on the mobile station.

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