Combustion-type exhaust gas treatment device

Abstract

The application discloses a novel combustion type tail gas treatment device, which comprises two tail gas treatment assemblies arranged side by side, wherein the tail gas treatment assembly comprises a gas passing unit, a combustion unit and a cooling and purifying unit; the gas passing unit comprises a gas passing cavity, a plurality of first tail gas pipes and a plurality of second tail gas pipes; the first tail gas pipes are used for leading into a tail gas source; the second tail gas pipes are used for being communicated with the gas passing cavity of the other tail gas treatment assembly; the combustion unit comprises a combustion cylinder, a heat preservation sleeve and an outer cylinder which are arranged in a sleeved mode; the inner wall surface of the combustion cylinder comprises a metal fiber felt layer; the heat preservation sleeve and the combustion cylinder are designed in such a mode that combustion materials supplied by an external gas source can pass through the heat preservation sleeve and the combustion cylinder and enter a combustion chamber; and the cooling and purifying unit comprises a cooling and purifying channel which is communicated with the outlet end of the combustion chamber and is used for cooling and purifying the tail gas after combustion. The application has the advantages of reasonable structure, good safety, sufficient and uniform combustion and no large open flame.

Description

Technical Field

[0001] This invention relates to the field of test strip testing technology, specifically to a combustion-type exhaust gas treatment device. Background Technology

[0002] In the semiconductor industry, various stages of chip manufacturing generate different types of waste gases. For example, the thermal oxidation process in thin-film deposition produces acidic waste gas containing unreacted halogenated oxidants; CVD processes produce waste gas containing SiH4, SiCl4, SiH2Cl2, PH3, HF, HCl, and NH3; etching processes generate acidic, alkaline, and organic waste gases, as well as some gaseous byproducts (such as H2, NO, and NH3); and doping processes produce acidic waste gas containing phosphine and arsine. These exhaust gases are generally toxic and flammable, and improper handling can lead to serious safety accidents, severe economic losses, and serious environmental pollution.

[0003] Existing semiconductor exhaust gas treatment equipment is classified into several types based on different operating principles, such as combustion-type exhaust gas treatment equipment, plasma-type exhaust gas treatment equipment, and electrically heated exhaust gas treatment equipment. Among these, existing combustion-type exhaust gas treatment equipment uses a high-temperature flame generated by a burner head in the reaction chamber to ensure complete combustion of the exhaust gas. However, this method suffers from uneven and incomplete combustion within the combustion chamber and also results in a large area of ​​open flame, posing a safety hazard. Therefore, this technology requires further development. Summary of the Invention

[0004] This invention discloses a combustion-type exhaust gas treatment device, which solves the technical problems of incomplete and uneven combustion and open flames in existing combustion chamber exhaust gas treatment equipment. It features a reasonable structure, good safety, complete and uniform combustion, and no large-scale open flames. The technical solution adopted is as follows: A combustion-type exhaust gas treatment device includes two exhaust gas treatment components arranged in parallel, wherein the exhaust gas treatment components include: The gas passage unit includes a gas passage chamber, multiple first exhaust pipes, and multiple second exhaust pipes. The first ends of both the first and second exhaust pipes extend into the gas passage chamber. The second end of the first exhaust pipe is connected to an exhaust gas source, and the second end of the second exhaust pipe is connected to the gas passage chamber in another exhaust gas treatment assembly. Preferably, the second end of the second exhaust pipe is connected to the inner cavity of the first exhaust pipe in the other exhaust gas treatment assembly, and the second exhaust pipe is provided with a one-way valve, which allows exhaust gas to flow from the first end to the second end of the second exhaust pipe.

[0005] The combustion unit includes a combustion cylinder, an insulation sleeve, and an outer cylinder. The combustion cylinder encloses and forms a combustion chamber. The inlet end of the combustion chamber is connected to an air passage chamber. The inner wall of the combustion cylinder includes a metal fiber felt layer. The fibers forming the metal fiber felt layer are coated with a catalyst for catalyzing the combustion of exhaust gas. The insulation sleeve is fitted outside the combustion cylinder to provide insulation. The outer cylinder is fitted outside the insulation sleeve and forms a closed annular air inlet chamber between the outer and outer cylinders. The annular air inlet chamber can be connected to an external air source. The insulation sleeve and the combustion cylinder are designed such that the combustion material supplied by the external air source can pass through the insulation sleeve and the combustion cylinder to enter the combustion chamber. The cooling and purification unit includes a cooling and purification channel connected to the combustion chamber outlet, used to cool and purify the exhaust gas after combustion.

[0006] Based on the above technical solution, the pore size of the metal fiber felt gradually decreases from the outside to the inside in the radial direction. The metal fiber felt is formed by sintering metal fiber filaments and can withstand high temperatures of 800~1450℃.

[0007] Based on the above technical solution, the porosity of the metal fiber felt is 85-95%, and the pore size of the metal fiber felt is 3-20μm.

[0008] Based on the above technical solution, the metal fiber felt layer forms the inner wall of the combustion cylinder, and the fiber felt coated with catalyst is disposed close to the inner wall surface of the combustion cylinder. The catalyst includes at least rare earth metal oxide catalysts for catalyzing the combustion of chlorinated volatile organic compounds.

[0009] Based on the above technical solution, the catalyst includes two or more types and is arranged in sections within the metal fiber felt layer.

[0010] Based on the above technical solutions, multiple catalysts are arranged in sections along the thickness direction in the metal fiber felt layer, and / or multiple catalysts are arranged in sections within an annular surface.

[0011] Based on the above technical solution, the thermal insulation sleeve includes a high-temperature resistant glass wool layer and an iron-chromium-aluminum fiber cloth layer, and the high-temperature resistant glass wool layer and the iron-chromium-aluminum fiber cloth layer are stacked and interleaved.

[0012] Based on the above technical solution, it also includes an ignition unit, wherein the ignition head of the ignition unit and the external gas source are located at the connection point with the annular air intake chamber, and the ignition head of the ignition unit is arranged close to the inner wall of the combustion cylinder.

[0013] Based on the above technical solution, a support cylinder is also included. The support cylinder includes several through holes and is coaxially sleeved outside the insulation sleeve and the combustion cylinder to support the combustion cylinder and the insulation sleeve.

[0014] Based on the above technical solution, the combustion material includes natural gas and air. The external gas source is connected to several air inlet pipes for introducing natural gas and air respectively. The air inlet pipes extend radially into the annular air inlet chamber. The end of the air inlet pipe is closed, and the part of the air inlet pipe extending into the annular air inlet chamber has several circumferentially arranged air holes. The combustion material in the air inlet pipe can enter the annular air inlet chamber through the air holes.

[0015] Beneficial effects This invention is reasonably designed, with two exhaust gas treatment components arranged side by side, and the gas passage chamber of any one exhaust gas treatment component is connected to the gas passage chamber of the other exhaust gas treatment component through multiple second exhaust gas pipes. In this way, if any exhaust gas treatment component malfunctions or its internal pressure rises rapidly, it can promptly release pressure to the other exhaust gas treatment component, ensuring continuous and stable treatment of exhaust gas. At the same time, the arrangement of the second exhaust gas pipes helps to balance the workload of the two exhaust gas treatment components, avoiding the problem of uneven load causing premature replacement of one of the exhaust gas treatment components, and helping to match the service life of the two exhaust gas treatment components.

[0016] This invention is ingeniously designed. The combustion cylinder encloses and forms a combustion chamber. The combustion cylinder includes a metal fiber felt layer. Multiple catalysts can be coated on the metal fibers forming the metal fiber felt and arranged in sections on the metal fiber felt. That is, multiple catalysts can be arranged in sections along the thickness direction in the metal fiber felt layer, or multiple catalysts can be arranged in sections within an annular surface. In this way, when the exhaust gas enters the combustion chamber and diffuses into the metal fiber felt layer, multiple catalysts can catalyze the combustion of corresponding components in the exhaust gas, which is beneficial to improving the exhaust gas purification effect and ensuring complete combustion of the exhaust gas.

[0017] In this invention, when the combustion material passes through the combustion cylinder and is ignited near the cylinder, the combustion chamber is uniformly heated circumferentially, rapidly increasing and stabilizing its temperature. This promotes uniform combustion of the exhaust gas as it passes through the combustion chamber, improving treatment efficiency. The combustion cylinder comprises a metal fiber felt, a loosely porous material. As the combustion material passes through the felt, it is repeatedly divided into several streams of airflow. This ensures thorough mixing of the components and, when these streams ignite near the inner wall of the combustion cylinder, the flames from each individual stream are small, preventing large-area open flames and significantly improving safety. Furthermore, the pore size of the metal fiber felt gradually decreases from the outside to the inside in the radial direction. When the combustion material in the annular air intake chamber passes through the metal fiber felt under positive pressure, the flow rate of the combustion material slows down and it collides with the fibers in the fiber felt more and more frequently. That is, the resistance of the combustion material passing through the metal fiber felt gradually increases, causing the combustion material to accumulate near the combustion chamber. In this way, when the combustion material is ignited, it can be fully combusted and heat can be released efficiently to maintain the high temperature of the combustion chamber, which is beneficial to reducing combustion costs. At the same time, it can greatly reduce the "black smoke" produced by incomplete combustion, which is beneficial to maintaining the cleanliness of the combustion chamber.

[0018] In this invention, the combustion chamber is covered with an insulation sleeve, which can be made of layers of glass wool and iron-chromium-aluminum fiber cloth arranged in an alternating manner. This provides good insulation and keeps the temperature inside the annular air intake chamber at the set temperature. It also helps to maintain the structure of the insulation sleeve, improve its service life, and prevent collapse after long-term use. In addition, a support cylinder is included, which is made into the combustion chamber and insulation sleeve like a skeleton, so that the combustion material enters the combustion chamber in a set manner. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present invention. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0020] Figure 1 : A schematic diagram of the structure of the main view of this invention; Figure 2 : Schematic diagram of the connection structure between the first and second exhaust pipes between the two exhaust gas treatment components. Figure 3 : A three-dimensional structural diagram of the exhaust gas treatment component; Figure 4 : A structural schematic diagram of the main view of the exhaust gas treatment component; Figure 5: A cross-sectional structural diagram of the main view of the exhaust gas treatment component; Figure 6 : A cross-sectional structural diagram of the main view of the combustion unit; Figure 7 : A schematic diagram of a structure in which multiple catalysts are arranged along the thickness direction in a metal fiber felt layer; Figure 8 : A schematic diagram of the structure in which the various catalysts described are arranged in sections within an annular surface; Figure 9 : Figure 6 Schematic diagram of the cross-sectional structure along the AA direction; Figure 10 : A schematic diagram of the assembly of the combustion unit and the bypass unit; Figure 11 : Figure 10 Schematic diagram of the cross-sectional structure along the BB direction; Detailed Implementation The following description and accompanying drawings fully illustrate specific embodiments described herein to enable those skilled in the art to practice them. Some embodiments may include or substitute parts and features of other embodiments. The scope of the embodiments herein encompasses the entire scope of the claims and all available equivalents thereof. Throughout this document, the terms “first,” “second,” etc., are used only to distinguish one element from another without requiring or implying any actual relationship or order between the elements. Indeed, a first element can also be referred to as a second element, and vice versa. Furthermore, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a structure, apparatus, or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a structure, apparatus, or device. Without further limitation, an element defined by the phrase “comprising one…” does not exclude the presence of other identical elements in the structure, apparatus, or device that includes said element. The various embodiments described herein are presented in a progressive manner, with each embodiment focusing on its differences from other embodiments; similar or identical parts between embodiments can be referred to interchangeably.

[0021] The terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" used in this document to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings. They are used solely for the convenience of describing the document and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. In the description herein, unless otherwise specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to mechanical or electrical connections, or internal connections between two elements; they can be direct connections or indirect connections through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances.

[0022] In this document, unless otherwise stated, the term "multiple" means two or more.

[0023] In this article, the character " / " indicates that the objects before and after it are in an "or" relationship. For example, A / B means: A or B.

[0024] In this article, the term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0025] like Figures 1-11 The combustion-type exhaust gas treatment device shown includes a housing 300 and two exhaust gas treatment components arranged side by side, wherein the two exhaust gas treatment components are respectively disposed in two independent chambers of the housing, and each exhaust gas treatment component includes: The unit includes an air-passing unit 7, a combustion unit 6, a cooling and purification unit, and a liquid-gas separator 1.

[0026] In this embodiment, the gas passage unit 7 includes a gas passage chamber 71, three first exhaust pipes 72, and three second exhaust pipes. The first ends of the first exhaust pipes 72 and the second exhaust pipes 73 all extend into the gas passage chamber 71 and are evenly spaced circumferentially. Specifically, the first ends of the three first exhaust pipes 72 and the three second exhaust pipes 73 vertically downwards through the top surface of the gas passage chamber 71, and the ports of the first ends of the first exhaust pipes and the second exhaust pipes 73 are close to the top of the combustion chamber 64. Figure 10 and 11 As shown, when the exhaust gas to be treated is discharged through the first exhaust pipe 72, the flow rate slows down instantly and spreads in the combustion chamber in a roughly annular shape. The annular structure of the combustion cylinder 61 matches the exhaust gas diffusion area in the combustion chamber, which is conducive to the uniform and complete combustion of the exhaust gas to achieve the purification effect.

[0027] like Figure 2 and 3As shown, the second ends of the three first exhaust pipes 72 are all connected to the exhaust gas source, and the second end of the second exhaust pipe 73 is connected to the gas passage chamber 71 in another exhaust gas treatment assembly. Specifically, the second end of the second exhaust pipe 73 is connected to the inner cavity of the first exhaust pipe 72 in another exhaust gas treatment assembly, and a one-way valve is provided on the second exhaust pipe 73. When the internal pressure of the exhaust gas treatment assembly rises due to a malfunction, the one-way valve allows the exhaust gas to flow from the first end to the second end of the second exhaust pipe 73, so as to avoid a serious accident caused by an explosion.

[0028] Combustion unit 6, such as Figure 6 As shown, the device includes a combustion cylinder 61, an insulation sleeve 62, and an outer cylinder 63. The combustion cylinder 61 encloses a combustion chamber 64, and the inlet end of the combustion chamber 64 is connected to the gas passage chamber 71. The inner wall of the combustion cylinder 61 includes a metal fiber felt layer, which forms the inner wall of the combustion cylinder. Some or all of the fibers forming the metal fiber felt layer are coated with a catalyst for catalytic combustion of exhaust gas, and the fiber felt coated with the catalyst is positioned close to the inner wall of the combustion cylinder 61. In this embodiment, the catalyst is a rare earth metal oxide catalyst used to catalyze the combustion of chlorinated volatile organic compounds, such as the catalyst in the patent application with application number CN201510378257.5 entitled "Catalyst and Preparation Method for Low-Temperature Catalytic Combustion of Chlorinated Volatile Organic Compounds".

[0029] Given the complex composition of exhaust gases, which include not only chlorinated volatile organic compounds but also other harmful waste gases, such as acidic waste gas containing unreacted halogenated oxidants generated in the thermal oxidation process of thin film deposition in semiconductor manufacturing, waste gas containing SiH4, SiCl4, SiH2Cl2, PH3, HF, HCl, NH3, etc. generated in CVD processes, and acid, alkali, and organic waste gases generated in etching processes, as well as some gaseous byproducts such as H2, NO, and NH3, in other embodiments of the present invention, other types of exhaust gas combustion catalysts can be adaptively added according to the different waste gases emitted in the production process. Specifically, multiple catalysts are arranged in sections within the metal fiber felt layer, such as... Figure 7 As shown; or multiple catalysts are arranged in sections within an annular surface, such as Figure 8 As shown, in other embodiments of the present invention, in the case of multiple catalysts, the multiple catalysts can be arranged in sections along the thickness direction in the metal fiber felt layer, while also being arranged in sections within the same annular surface; wherein the catalyst for catalytic tail gas combustion and the process of coating the catalyst onto the metal fiber filaments are prior art, and will not be described in detail here.

[0030] In this embodiment, the metal fiber felt is made by sintering tungsten alloy metal fiber filaments. The preparation process of the metal fiber felt is existing technology and will not be described in detail here. In this embodiment, the porosity of the metal fiber felt is 85~95%, and the pore size of the metal fiber felt is 3~20μm. It can withstand high temperatures of 800~1450℃, and the pore size of the metal fiber felt gradually decreases from the outside to the inside in the radial direction.

[0031] like Figure 6 As shown, the insulation sleeve 62 is fitted over the combustion cylinder 61 to provide insulation. In this embodiment, the insulation sleeve 62 includes a high-temperature resistant glass wool layer and an iron-chromium-aluminum fiber cloth layer. The high-temperature resistant glass wool layer and the iron-chromium-aluminum fiber cloth layer are stacked and interleaved, making the insulation sleeve 62 resistant to high temperatures and with good insulation performance. On the one hand, this avoids the situation of low structural strength and easy collapse in the case of a single glass surface layer. On the other hand, the iron-chromium-aluminum fiber cloth layer can effectively enhance the structural strength of the insulation sleeve 62 without affecting the passage of the combustion material. The high-temperature resistant glass wool and the iron-chromium-aluminum fiber cloth are both existing technologies and will not be described in detail here.

[0032] The outer cylinder 63 is fitted over the insulation sleeve 62, forming a sealed annular air inlet chamber 65 between them. The annular air inlet chamber 65 can be connected to an external air source. In this embodiment, the external air source includes at least natural gas and air components, such as... Figure 6 and 9 As shown, both the insulation sleeve 62 and the combustion cylinder 61 have a porous structure, so that the combustion material supplied by the external gas source can pass through the insulation sleeve 62 and the combustion cylinder 61 into the combustion chamber 64.

[0033] In this invention, the design of the porosity and pore size of the combustion cylinder 61 causes the combustion material to be repeatedly divided into several airflows as it passes through the metal fiber felt. This ensures thorough mixing of the components of the combustion material and, when these airflows are ignited near the inner wall of the combustion cylinder, the flames formed by each individual combustion material are relatively small, preventing large-area open flames and greatly improving safety. Furthermore, the pore size of the metal fiber felt gradually decreases radially from the outside to the inside. When the combustion material in the annular air inlet cavity passes through the metal fiber felt under positive pressure, the flow rate of the combustion material slows down and it collides with the fibers in the fiber felt more and more frequently. That is, the resistance to the combustion material's passage through the metal fiber felt gradually increases, causing it to move in a tortuous and winding manner. Figure 9 As shown, the flow rate of the combustion material is minimized at the point where the metal fiber felt is close to the combustion chamber, and it is enriched at this point. In this way, when the combustion material is ignited, the fuel material can be stably and continuously supplied, and the combustion material can be fully burned to efficiently release heat to maintain the high temperature state of the combustion chamber. This helps to reduce combustion costs and greatly reduces the "black smoke" produced by incomplete combustion, which helps to maintain the cleanliness of the combustion chamber.

[0034] It also includes a support cylinder 66. In this embodiment, the support cylinder 66 is made of stainless steel and has several evenly arranged through holes (not shown). The support cylinder 66 is sleeved outside the heat insulation sleeve 62 to support the combustion cylinder 61 and the heat insulation sleeve 62. The combustion cylinder 61 and the heat insulation sleeve 62 are coaxially held inside the support cylinder 66.

[0035] In this embodiment, the outlet of the external gas source is connected to an inlet pipe 69, the end of which extends into an annular inlet chamber 65. The end of the inlet pipe 69 is closed, and the portion of the inlet pipe 69 extending into the annular inlet chamber 65 has several circumferentially arranged air holes. The combustion material inside the inlet pipe 69 can enter the annular inlet chamber 65 through these air holes. Furthermore, the portion of the inlet pipe 69 extending outside the annular inlet chamber 65 is connected to a corrugated pipe section 610, facilitating connection to adjacent pipes and preventing airflow vibration from being transmitted to the burner. In other embodiments of the invention, there are multiple inlet pipes 69, and these multiple inlet pipes 69 are evenly arranged circumferentially around the annular inlet chamber 65. The inlet of the external gas source is connected to several branch pipes, each equipped with a solenoid valve and a flow meter to control the flow rate. The various component gases in the combustion material enter the inlet pipe 69 through their respective branch pipes.

[0036] like Figure 6 As shown, it also includes a first temperature sensor 68, which is electrically connected to an external controller for monitoring the temperature within the annular intake chamber 65. This embodiment also includes a second temperature sensor, which uses non-contact measurement to monitor the temperature within the combustion chamber 64. More specifically, a location near the center of the combustion chamber 64 can be selected as the monitoring point. The first temperature sensor 68 and the second temperature sensor are existing technologies and will not be described in detail here.

[0037] It also includes an ignition unit 67, the ignition head of the ignition unit 67 and the external air source are connected to the annular air intake chamber 65 at the corresponding positions, and the ignition head of the ignition unit 67 is arranged close to the inner wall of the combustion cylinder 61. Specifically, the ignition unit 67 is located in the combustion chamber 61 and is located outward close to the inner wall of the combustion cylinder 61 to ignite the combustion material, or the ignition unit is located in the metal fiber felt and is located inward close to the inner wall of the combustion cylinder 61 to ignite the combustion material.

[0038] In this embodiment, the operation of the combustion unit includes: Monitor the temperature a1 of the annular air intake chamber; When the temperature value of a1 is lower than the set value A1, it is ensured that the combustion material will not spontaneously combust when it enters the annular air intake chamber 65. Then, the external controller controls the air source to supply combustion material into the annular air intake chamber 65, and at the same time, the combustion material is ignited at the inner wall of the combustion chamber 64. When the combustion material at the first location is ignited, it will quickly ignite the combustion material near the inner wall of the metal fiber felt, thus forming an annular combustion area. After the combustion material has burned and passed through a set time period B, the second temperature sensor monitors the temperature a2 at the center of the combustion chamber 64; When the temperature value of a2 is lower or higher than the set value A2, the external controller controls the adjustment of the proportion of each component in the combustion material. In this embodiment, the external controller can adjust the proportion of natural gas and air in the combustion material through a solenoid valve. Repeat the aforementioned steps multiple times until the combustion material is burned and the set time period B has elapsed. When the temperature a2 at the center of the combustion chamber 64 is within the set temperature range, the external controller stops adjusting the proportion of each component in the combustion material.

[0039] Then, the external controller controls the exhaust gas to diffuse into the combustion chamber 64 through several exhaust pipes 72.

[0040] The cooling and purification unit includes a cooling and purification channel connected to the outlet end of the combustion chamber 64, which is used to cool and purify the exhaust gas after combustion; specifically, the cooling and purification unit includes a first pipe section 5, a water tank 3 and a second pipe section 4 arranged sequentially along the airflow direction.

[0041] like Figure 3 As shown, the first pipe section 5 is located near the combustion unit 6 and is used to cool and purify the exhaust gas after combustion. Specifically, the first pipe section 5 includes a first outer pipe 51 and a first inner pipe 52 nested together. The first outer pipe 51 and the first inner pipe 52 are coaxial with the combustion chamber 64. The first outer pipe 51 is fixedly connected upward to the combustion cylinder 61, and the inner cavity of the first outer pipe 51 communicates with the combustion chamber 64. The first inner pipe 52 communicates downward with the inner cavity of the water tank 3. The first outer pipe 51 and the first inner pipe 52 enclose each other to form a bottom. The first cooling chamber is closed at one end and its upper end is connected to the inner cavity of the first inner tube 52. In this embodiment, the first cooling chamber is connected to two first water inlet pipes 100, which are symmetrically arranged. In addition, the first water inlet pipes 100 are arranged near the bottom of the first cooling chamber, and the first water inlet pipes 100 are designed such that the cooling water enters the first cooling chamber tangentially and spirals up along the inner wall of the first outer tube 51. The cooling water accumulates from bottom to top in the cooling chamber and flows into the first inner tube 52.

[0042] like Figure 3 and 5 As shown, the first inner tube 52 extends outward to form a first extension section, which extends to the outside of the first outer tube 51. The first extension section is fixed to the top surface of the water tank 3. In addition, the side wall of the first extension section is provided with three water spray holes 200 in the circumferential direction. The axis of each water spray hole 200 extends inward and downward. The sprayed cooling water cools the exhaust gas after combustion on the one hand, and adsorbs and settles the particulate matter therein on the other hand.

[0043] like Figure 5As shown, the water tank 3 is used to hold water and is connected to the inner cavity of the first pipe section 5 and the second pipe section 4 respectively. The second pipe section 4 is arranged side by side with the first pipe section 5 on the same side for cooling and purifying the exhaust gas after combustion, making the structure more compact.

[0044] The second pipe section 4 includes a through hollow cavity, which connects downwards to the water tank 3 and upwards to the exhaust outlet. The hollow cavity is equipped with several perforated plates 41, such as... Figure 4 and 5 As shown, the perforated plate 41 overlaps the protrusion on the inner wall of the hollow cavity. Several perforated plates 41 are arranged axially at intervals, dividing the hollow cavity into several sub-chambers 42. Adjacent perforated plates 41 are arranged with a phase difference so that the through holes on adjacent perforated plates 41 are staggered, preventing exhaust gas from "passing through the hollow cavity without obstruction". like Figure 5 As shown, an atomizer 2 is installed in a sub-chamber 42 located in the middle section. There are four atomizers 2 arranged circumferentially. The atomizer 2 is existing technology and will not be described in detail here. The atomizer 2 can spray water mist into the sub-chamber 42 to cool and purify the exhaust gas after combustion. like Figure 5 As shown, the other three sub-chambers 42 can contain a number of condensation adsorption balls. The condensation adsorption balls are loose and porous and can be made of activated carbon blocks, or Hackett packing, Raschig ring packing or Pall ring packing. In addition, the sub-chambers 42 containing the condensation adsorption balls can also be equipped with spray holes to facilitate the replenishment of cooling water into the sub-chambers.

[0045] In addition, a water pump is included, which is used to circulate water between the tank 3, the first pipe section 5 and the second pipe section 4, which helps to save water and reduce production costs.

[0046] It also includes a liquid-gas separator 1, which includes a separator housing 11. A plurality of baffles 12 are fixedly mounted on the inner wall of the separator housing 11. The ends of the baffles 12 extend inward and downward past the centerline of the separator housing 11. The flow path formed between the baffles 12 is meandering. Figure 5 As shown, this allows the liquid-gas mixture to collide with the baffle 12 multiple times as it travels upward through the flow path, thereby improving the gas-liquid separation effect.

[0047] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A combustion-type exhaust gas treatment device, characterized in that, The system includes two exhaust gas treatment components arranged side by side, each of which includes: The gas passing unit (7) includes a gas passing chamber (71), a plurality of first exhaust pipes (72) and a plurality of second exhaust pipes (73). The first ends of the first exhaust pipes (72) and the second exhaust pipes (73) extend into the gas passing chamber (71). The second end of the first exhaust pipes (72) is connected to the exhaust gas source. The second end of the second exhaust pipes (73) is connected to the gas passing chamber (71) in another exhaust gas treatment component. The combustion unit (6) includes a combustion cylinder (61), an insulation sleeve (62), and an outer cylinder (63). The combustion cylinder (61) encloses a combustion chamber (64). The inlet end of the combustion chamber (64) is connected to the gas passage chamber (71). The inner wall of the combustion cylinder (61) includes a metal fiber felt layer. The fibers forming the metal fiber felt layer are coated with a catalyst for catalyzing the combustion of exhaust gas. The insulation sleeve (62) is fitted outside the combustion cylinder (61) to provide insulation. The outer cylinder (63) is fitted outside the insulation sleeve (62) and forms a closed annular air inlet chamber (65) between the outer and outer cylinders. The annular air inlet chamber (65) can be connected to an external gas source. The insulation sleeve (62) and the combustion cylinder (61) are designed such that the combustion material supplied by the external gas source can pass through the insulation sleeve (62) and the combustion cylinder (61) into the combustion chamber (64). The cooling and purification unit includes a cooling and purification channel connected to the outlet end of the combustion chamber (64) for cooling and purifying the exhaust gas after combustion. The pore size of the metal fiber felt gradually decreases from the outside to the inside in the radial direction; The combustion material includes natural gas and air. The external gas source is connected to several air inlet pipes (69) for introducing natural gas and air respectively. The air inlet pipes (69) extend radially into the annular air inlet chamber (65). The end of the air inlet pipes (69) is closed, and the part of the air inlet pipes (69) extending into the annular air inlet chamber (65) is provided with several circumferentially arranged air holes. The combustion material in the air inlet pipes (69) can enter the annular air inlet chamber (65) through the air holes. The metal fiber felt is formed by sintering metal fiber filaments and can withstand high temperatures of 800~1450℃. The porosity of the metal fiber felt is 85-95%, and the pore size of the metal fiber felt is 3-20 μm.

2. The combustion-type exhaust gas treatment device according to claim 1, characterized in that, The metal fiber felt layer forms the inner wall of the combustion cylinder (61), and the fiber felt coated with catalyst is disposed close to the inner wall surface of the combustion cylinder (61). The catalyst includes at least rare earth metal oxide catalysts for catalyzing the combustion of chlorinated volatile organic compounds.

3. The combustion-type exhaust gas treatment device according to claim 2, characterized in that, The catalysts include two or more types and are arranged in sections within the metal fiber felt layer.

4. The combustion-type exhaust gas treatment device according to claim 3, characterized in that, The catalysts described herein are arranged in sections along the thickness direction in a metal fiber felt layer, and / or the catalysts described herein are arranged in sections within an annular surface.

5. The combustion-type exhaust gas treatment device according to claim 3 or 4, characterized in that, The heat insulation sleeve (62) includes a high-temperature resistant glass wool layer and an iron-chromium-aluminum fiber cloth layer, and the high-temperature resistant glass wool layer and the iron-chromium-aluminum fiber cloth layer are stacked and interleaved.

6. The combustion-type exhaust gas treatment device according to claim 5, characterized in that, It also includes an ignition unit (67), the ignition head of the ignition unit (67) and the external gas source are connected to the annular air intake chamber (65) at the corresponding positions, and the ignition head of the ignition unit (67) is arranged close to the inner wall of the combustion cylinder (61).

7. The combustion-type exhaust gas treatment device according to claim 6, characterized in that, It also includes a support cylinder (66), which has several through holes and is coaxially sleeved outside the insulation sleeve (62) and the combustion cylinder, for supporting the combustion cylinder (61) and the insulation sleeve (62).

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