A microwave signal generating device

Abstract

The application discloses a microwave signal generation device, comprising: a microwave resonant cavity, a superconducting quantum interference device chain and a magnetic flux control unit; wherein the superconducting quantum interference device chain is located in the microwave resonant cavity, the microwave resonant cavity is used for generating a microwave signal with a preset base frequency, the magnetic flux control unit is at a first preset distance from the superconducting quantum interference device chain, is used for acting a generated magnetic field on the superconducting quantum interference device chain, and controls the magnetic flux passing through the superconducting quantum interference device chain, so that the microwave signal generated in the microwave resonant cavity is output in a preset form; wherein the superconducting quantum interference device chain is composed of more than one superconducting quantum interference device; the preset form includes a pulse form or a continuous form. The microwave signal generation device realizes the generation of the microwave signal through a simple circuit structure, and provides technical support for the expansion of a quantum computing system.

Description

Technical Field

[0001] This article relates to, but is not limited to, signal processing technology, and in particular to a microwave signal generating device. Background Technology

[0002] A cryogenic microwave signal source is a microwave signal generating device that operates at low temperatures. Cryogenic microwave signal sources have important applications in many fields; for example, high-stability, low-phase-noise frequency sources based on high-quality-factor superconducting microwave resonators at low temperatures can be used in measurement and control, guidance, communication, and precise positioning. Cryogenic microwave signal sources assembled in dilution refrigerators can directly provide microwave drive for superconducting or semiconductor quantum chips, potentially solving thermal load and wiring problems in large-scale quantum computers based on superconducting circuits or semiconductor quantum structures, and promoting the expansion of quantum computing system scale.

[0003] Currently, there are two main methods for generating controllable cryogenic microwave signals: 1. Generating ultrafast pulses based on superconducting single-flux quantum circuits, followed by filtering and shaping to produce cryogenic microwave signals; 2. Based on the DC Josephson effect, achieving cryogenic microwave signals by applying a DC bias voltage across the Josephson junction. The first method cannot directly generate cryogenic microwave signals, requiring additional signal processing; moreover, the single-flux quantum circuit structure is complex, and the design and fabrication of related devices present significant challenges. The second method can only generate continuous signals, and the generated cryogenic microwave signals have poor phase stability. Furthermore, using cryogenic semiconductor integrated circuits can also achieve phase and amplitude modulation of the input local oscillator to generate specific cryogenic microwave signals, but cryogenic semiconductor integrated circuits inevitably suffer from heat generation, placing additional demands on the cooling power of the cryogenic system.

[0004] In summary, the generation of low-temperature microwave signals in related technologies suffers from problems such as complex circuit structure, high design difficulty, poor stability, or heat generation. How to obtain stable low-temperature pulse signals has become a problem that needs to be solved. Summary of the Invention

[0005] The following is an overview of the subject matter described in detail herein. This overview is not intended to limit the scope of the claims.

[0006] This invention provides a microwave signal generating device that can generate stable low-temperature pulse signals through a simple circuit structure.

[0007] This invention provides a microwave signal generating device, comprising: a microwave resonant cavity 1, a superconducting quantum interference device chain 2, and a magnetic flux control unit chain 3; wherein,

[0008] A superconducting quantum interference device chain 2 is installed inside the microwave resonant cavity 1 to provide the fundamental frequency for generating microwave signals;

[0009] The magnetic flux control unit 3 is at a first preset distance from the superconducting quantum interference device chain 2, and is used to apply the generated magnetic field to the superconducting quantum interference device chain 2 and control the magnetic flux of the superconducting quantum interference device chain 2 so that the microwave signal generated in the microwave resonant cavity 1 is output in a preset form;

[0010] The superconducting quantum interference device chain 2 consists of one or more superconducting quantum interference devices; the preset form includes: pulse form or continuous form.

[0011] In one exemplary embodiment, the microwave signal generating device further includes a signal exporting unit 4 for exporting the microwave signal.

[0012] In one exemplary instance, the superconducting quantum interference device chain 2 is one of the following structures:

[0013] It consists of one of the aforementioned superconducting quantum interference devices;

[0014] It consists of two or more superconducting quantum interference devices connected in series;

[0015] It consists of two or more superconducting quantum interference devices connected in parallel;

[0016] It consists of three or more superconducting quantum interference devices connected in a pre-defined series and parallel configuration.

[0017] In one exemplary instance, the microwave resonant cavity 1 includes a coplanar microwave resonant cavity consisting of a central conductor 1-1 and a ground layer 1-2, wherein the central conductor 1-1 is connected to the superconducting quantum interference device chain 2.

[0018] In one exemplary instance, the materials of the central conductor 1-1 and the grounding layer 1-2 are superconducting materials.

[0019] In one exemplary instance, the signal output unit 4 is located at a second preset distance from the center conductor 1-1.

[0020] In one exemplary instance, the signal deriving unit 4 is a coplanar waveguide structure.

[0021] In one exemplary instance, the magnetic flux control unit 3 controls the magnetic flux to undergo a transformation rate greater than a preset transformation rate threshold.

[0022] In one exemplary instance, the magnetic flux control unit 3 includes: a current source 3-1 and a current path 3-2;

[0023] The current source 3-1 is used to output a current with a predetermined rate of change greater than a preset rate of change threshold, and to adjust the form of the output current according to a preset form. The form of the output current is used to control the output microwave signal to be in pulse form or continuous form.

[0024] The current path 3-2 is used to generate a magnetic field acting on the superconducting quantum interference device chain 2 based on the current output by the current source 3-1, so as to control the magnetic flux through the superconducting quantum interference device chain 2.

[0025] In one exemplary instance, the magnetic flux control unit controls the magnetic flux of the superconducting quantum interference device chain 2, including:

[0026] A step-form magnetic flux is applied to the superconducting quantum interference device chain 2 to output a microwave signal in the form of a pulse;

[0027] The energy of the pulsed microwave signal is determined by the rate of change of the magnetic flux, the phase of the pulsed microwave signal is determined by the initial magnetic flux intensity of the step signal, and the frequency of the pulsed microwave signal is determined by the final magnetic flux intensity of the step signal.

[0028] In one exemplary instance, the magnetic flux control unit controls the magnetic flux of the superconducting quantum interference device chain 2, including:

[0029] A pulsed magnetic flux is applied to the superconducting quantum interference device chain 2 to output a continuous microwave signal.

[0030] The technical solution of this application includes: a microwave resonant cavity, a superconducting quantum interference device (SQUID) chain, and a magnetic flux control unit. The SQUID chain is located within the microwave resonant cavity, which generates a microwave signal with a preset fundamental frequency. The magnetic flux control unit is located at a first preset distance from the SQUID chain and is used to apply the generated magnetic field to the SQUID chain and control the magnetic flux passing through the SQUID chain, so that the microwave signal generated within the microwave resonant cavity is output in a preset form. The SQUID chain consists of one or more superconducting quantum interference devices (SQUIDs). The preset form includes a pulsed form or a continuous form. This invention achieves microwave signal generation through a simplified circuit structure, providing technical support for the scaling up of quantum computing systems.

[0031] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the description, claims, and drawings. Attached Figure Description

[0032] The accompanying drawings are provided to further understand the technical solutions of the present invention and constitute a part of the specification. They are used together with the embodiments of this application to explain the technical solutions of the present invention and do not constitute a limitation on the technical solutions of the present invention.

[0033] Figure 1 This is a flowchart of a microwave signal generating device according to an embodiment of the present invention;

[0034] Figure 2 This is a circuit diagram of the microwave signal generating device according to an embodiment of the present invention;

[0035] Figure 3 A schematic diagram illustrating the application of a step-type current signal in an embodiment of the present invention;

[0036] Figure 4 A schematic diagram illustrating the application of a pulse-type current signal in an embodiment of the present invention;

[0037] Figure 5 This is a schematic diagram of the waveform of a single microwave signal pulse in the time domain according to an embodiment of the present invention;

[0038] Figure 6 This is a graph showing the relationship between the Fourier transform spectrum of the microwave signal and the final value of the current in an embodiment of the present invention.

[0039] Figure 7 This is a schematic diagram illustrating the intensity variation of the microwave signal in the implementation of this invention;

[0040] Figure 8 This is a schematic diagram of the phase change of the microwave signal according to an embodiment of the present invention;

[0041] Figure 9 This is a schematic diagram of the phase change of another microwave signal according to an embodiment of the present invention. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that, unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

[0043] The steps illustrated in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases the steps shown or described may be performed in a different order than that presented here.

[0044] Figure 1 This is a flowchart of a microwave signal generating device according to an embodiment of the present invention, as shown below. Figure 1 As shown, it includes: a microwave resonant cavity 1, a superconducting quantum interference device chain 2, and a magnetic flux control unit 3; wherein,

[0045] A superconducting quantum interference device chain 2 is installed inside the microwave resonant cavity 1 to provide a microwave signal that generates a preset fundamental frequency;

[0046] The magnetic flux control unit 3 is at a first preset distance from the superconducting quantum interference device chain 2, and is used to apply the generated magnetic field to the superconducting quantum interference device chain 2 and control the magnetic flux of the superconducting quantum interference device chain 2 so that the microwave signal generated in the microwave resonant cavity 1 is output in a preset form;

[0047] Among them, the superconducting quantum interference device chain 2 consists of one or more superconducting quantum interference devices; the preset form includes: pulse form or continuous form.

[0048] In one exemplary instance, the preset fundamental frequency of the present invention is the operating frequency of the microwave resonant cavity 1.

[0049] The embodiments of the present invention realize the generation of microwave signals in continuous or pulsed form through a simple circuit structure, providing technical support for the scaling up of quantum computing systems.

[0050] In one exemplary instance, the microwave signal generating device of this embodiment of the invention is located in a low-temperature environment to ensure the normal operation of the superconducting quantum interference device chain and generate a low-temperature pulse signal.

[0051] In this embodiment of the invention, the magnetic field generated by the flux control unit 3 is B. The rapidly changing magnetic field B enables rapid adjustment of the magnetic flux Φ passing through the superconducting quantum interference device (SQID) chain 2. In one exemplary embodiment, the relationship between the magnetic flux Φ and the magnetic field B satisfies φ=∫BdS, where ∫dS represents the integral within the loop area of ​​the SQID chain 2. In another exemplary embodiment, the fundamental frequency f can be adjusted based on the capacitance C and inductance L of the microwave resonant cavity 1. Where L j The inductance represents the superconducting interferometer chain 2. In an exemplary instance, when the resonant cavity is a coplanar microwave resonant cavity consisting of a ground layer and a central conductor, the capacitance C and inductance L of the resonant cavity can be adjusted by adjusting the length of the central conductor, thereby achieving fundamental frequency adjustment.

[0052] In one exemplary embodiment, the microwave resonant cavity 1 of the present invention may include any of the following types of resonant cavities: coplanar microwave resonant cavity, lumped element microwave resonant cavity, and microstrip microwave resonant cavity, etc. In one exemplary embodiment, the microwave resonant cavity 1 of the present invention may also be other resonant cavities that can provide the aforementioned fundamental frequency.

[0053] In this embodiment of the invention, the magnetic flux Φ is equal to the integral of the magnetic field strength B at the position of the superconducting quantum interference device chain 2 over the area of ​​the superconducting quantum interference device chain 2: φ=∫BdS.

[0054] In one exemplary instance, the superconducting quantum interference device chain 2 in this embodiment of the invention has one of the following structures:

[0055] It consists of a superconducting quantum interference device;

[0056] It consists of two or more superconducting quantum interference devices connected in series;

[0057] It consists of two or more superconducting quantum interference devices connected in parallel;

[0058] It consists of three or more superconducting quantum interference devices connected in a pre-defined series and parallel configuration.

[0059] In one exemplary instance, the pre-defined series and parallel connection methods can be analyzed and set by those skilled in the art.

[0060] In one exemplary instance, the superconducting quantum interference device chain 2 of this embodiment is a closed loop of superconducting material containing two Josephson junctions, which is well known to those skilled in the art; the Josephson junction includes two superconducting layers and an intermediate insulating layer.

[0061] The embodiments of the present invention realize the generation of microwave signals through a simple circuit structure, providing technical support for the scaling up of quantum computing systems.

[0062] In one exemplary embodiment, the microwave resonant cavity 1 of the present invention includes a coplanar microwave resonant cavity composed of a central conductor 1-1 and a ground layer 1-2, wherein the central conductor 1-1 is connected to the superconducting quantum interference device chain 2.

[0063] In one exemplary embodiment of the invention, the materials of the center conductor 1-1 and the ground layer 1-2 are superconducting materials. The use of superconducting materials for the center conductor 1-1 and the ground layer 1-2 improves the efficiency of microwave signal generation.

[0064] In one exemplary embodiment, the microwave signal generating apparatus of the present invention further includes a signal exporting unit 4 for exporting microwave signals.

[0065] In one exemplary instance, the signal extraction unit 4 in this embodiment of the invention may also be other elements or structures capable of microwave signal extraction, such as a coplanar waveguide structure or a coaxial cable.

[0066] In one exemplary instance, the signal output unit 4 of this embodiment of the invention is located at a second preset distance from the center conductor 1-1.

[0067] In one exemplary embodiment of the present invention, the second preset distance is determined based on the required duration of the pulsed microwave signal and can be obtained through numerical simulation. The distance between the signal extraction unit 4 and the central conductor 1-1 determines the coupling strength between them, and the specific value can be obtained through numerical simulation. The coupling strength between the signal extraction unit 4 and the central conductor 1-1 determines the time required for the microwave photons generated in the microwave resonant cavity 1 to exit from the signal extraction unit 4 in pulse form.

[0068] In one exemplary embodiment, the length of the center conductor 1-1 is set according to the wavelength of the microwave signal to be output. The length of the center conductor 1-1 is a half-integer multiple of the microwave signal wavelength, for example, 1 / 2 or 3 / 2 times. The specific multiple can be determined according to the capacitance L and inductance C of the microwave resonant cavity. In one exemplary embodiment, the resonant frequency of the microwave resonant cavity is... Where L j The inductor is for the superconducting quantum interference device chain 2. In an exemplary embodiment, the superconducting quantum interference device chain 2 of this invention provides an inductor L for a portion of the microwave resonant cavity. j Furthermore, the inductance L of the superconducting quantum interference device chain 2 can be adjusted via the magnetic flux control unit 3. j This allows for the control of the fundamental frequency f of the generated microwave signal.

[0069] In one exemplary embodiment, the distance between the core conductor 1-1 and the ground layer 1-2 in this invention embodiment can be determined based on the chip substrate material of the microwave signal generating device and the impedance of the microwave device in a predetermined manner; in another exemplary embodiment, the distance between the core conductor 1-1 and the ground layer 1-2 in this invention embodiment depends on the characteristic impedance of the required microwave circuit and can be determined by numerical simulation.

[0070] In one exemplary instance, the flux control unit 3 of this embodiment controls the flux to change at a rate greater than a preset rate threshold; by controlling the rate at which the flux changes, microwave signals can be generated.

[0071] The microwave signal output from the coplanar waveguide in this embodiment of the invention can be used directly at low temperatures, or it can be exported to room temperature through a vacuum penetration device. In an exemplary example, after generating a microwave signal, the microwave signal can be coupled to the coplanar waveguide to output the microwave signal to an external circuit.

[0072] In this embodiment of the invention, a step or pulse current signal is output from current source 3-1 to achieve rapid change of magnetic flux through superconducting quantum interference device chain 2.

[0073] In one exemplary embodiment, the magnetic flux control unit 3 of this invention includes: a current source 3-1 and a current path 3-2; the current source 3-1 is used to output a current with a predetermined rate of change greater than a preset rate of change threshold, and adjust the form of the output current according to a preset form, wherein the form of the output current is used to control the output microwave signal to be in pulse or continuous form; the current path 3-2 is used to generate a magnetic field acting on the superconducting quantum interference device chain 2 according to the current output by the current source 3-1, so as to control the magnetic flux through the superconducting quantum interference device chain 2. In this embodiment, the current source 3-1 is used to output a rapidly changing current in step or pulse form, and the current path 3-2 is used to rapidly change the magnetic field at the position of the superconducting quantum interference device chain 2 in step or pulse form according to the current output by the current source 3-1, so as to realize that the magnetic flux through the superconducting quantum interference device chain 2 changes rapidly in step or pulse form.

[0074] In this embodiment of the invention, by adjusting the conversion rate threshold of current source 3-1, a rapidly changing current signal is obtained, thereby realizing the rapid change of magnetic flux of chain 2 in the superconducting quantum interference device.

[0075] Figure 2 This is a circuit diagram of the microwave signal generating device according to an embodiment of the present invention, as shown below. Figure 2 As shown, it includes: a microwave resonant cavity 1, a superconducting quantum interference device chain 2, a magnetic flux control unit 3, and a coplanar waveguide 4 (signal output unit) for exporting microwave signals; the microwave signal generating device is located in a low-temperature environment to ensure the normal operation of the superconducting quantum interference device chain. The microwave resonant cavity 1 consists of a central conductor 1-1 and a grounding layer 1-2. The magnetic flux control unit 3 consists of a current source 3-1 and a current path 3-2, and is a device for controlling the magnetic flux passing through the superconducting quantum interference device chain 2.

[0076] In one exemplary embodiment, the microwave signal generating device described above in this invention can be installed in a cooling device, such as a dilution refrigerator, and cooled to below the critical temperature of the superconducting material used. The current source 3-1 can be placed at room temperature and transmit a current signal to the current path 3-2 via a vacuum penetration device. The microwave signal output from the coplanar waveguide 4 can be used directly at low temperatures or brought to room temperature via a vacuum penetration device. Rapidly changing the magnetic flux through the superconducting quantum interference device chain 2 can generate a microwave signal in the coplanar microwave resonant cavity 1, which is then coupled to the coplanar waveguide 4 and output to an external circuit. Rapidly changing the magnetic flux of the superconducting quantum interference device chain 2 can be achieved by applying a rapidly changing current to the current path 3-2. Figure 3 The fast rising edge current signal or applied signal shown Figure 4 The pulse current signal shown is shown.

[0077] In one exemplary embodiment, the microwave signal generation of this invention only requires rapidly changing signals. These rapid current changes include, but are not limited to, rising edges, falling edges, and pulses. Pulse-type microwave signals are generated at the moment of rapid change in the control current signal.

[0078] In one exemplary embodiment, based on the specific time-domain form of a single microwave pulse, the generated microwave signal is amplified and then down-converted from approximately 5 GHz to around 100 MHz using devices including a mixer, to obtain the following... Figure 5 The time-domain signal is shown.

[0079] In one exemplary instance, the magnetic flux control unit of this embodiment controls the magnetic flux of the superconducting quantum interference device chain 2, including:

[0080] A step-form magnetic flux is applied to chain 2 of the superconducting quantum interference device to output a microwave signal in the form of a pulse;

[0081] In this context, the energy of the pulsed microwave signal is determined by the rate of change of the magnetic flux, the phase of the pulsed microwave signal is determined by the initial magnetic flux intensity of the step signal, and the frequency of the pulsed microwave signal is determined by the final magnetic flux intensity of the step signal. Here, the step signal refers to the signal used to generate the step-shaped magnetic flux.

[0082] In one exemplary instance, the magnetic flux control unit of this embodiment controls the magnetic flux of the superconducting quantum interference device chain 2, including:

[0083] A pulsed magnetic flux is applied to chain 2 of the superconducting quantum interference device to output a continuous microwave signal.

[0084] In one exemplary embodiment, the microwave signal of this invention is determined by the resonant frequency f of the microwave resonant cavity 1. The resonant frequency f of the microwave resonant cavity 1 is influenced by the inductance of the superconducting quantum interference device (SQU) chain 2. By adjusting the magnetic flux through the SQU chain 2, the inductance can be adjusted, thereby achieving the adjustment of both the resonant frequency of the microwave resonant cavity 1 and the frequency of the emitted microwave signal.

[0085] In one exemplary embodiment, the present invention generates a pulsed microwave signal by applying a step current signal. The phase of the generated microwave signal can be controlled by changing I1; the frequency of the generated microwave signal can be controlled by changing I2; and the intensity of the generated microwave signal can be controlled by adjusting the rate of change of the current.

[0086] In one exemplary instance, when the microwave signal of the embodiment of the present invention is generated in Figure 3 The rapid change in current shown (between time t1 and t2) is illustrated in [reference needed]. Figure 6By adjusting the value of I2, the intrinsic frequency of the microwave resonant cavity 1 can be controlled, thereby controlling the frequency of the generated microwave signal. In this embodiment of the invention, the Fourier transform spectrum of the generated microwave signal changes with the applied I2. After the generated microwave signal is amplified and down-converted to around 100 MHz, a Fourier transform is performed on the time-domain signal. In the figure, the position of the signal line on the horizontal axis as the applied current changes indicates the frequency shift of the generated microwave signal. In an exemplary example, this embodiment of the invention changes the rate of change of the current signal, for example, by adjusting the applied I2... Figure 3 The slope of the current change between time t1 and t2, (I2-I1) / (t2-t1), can adjust the intensity of the generated microwave signal. (Appendix) Figure 7 The experiment shows how the intensity of the generated microwave signal changes with different (t2-t1) values ​​given I2 and I1. This embodiment of the invention achieves controllable output of the microwave signal intensity by adjusting the (t2-t1) value. When I1 and I2 are fixed, the intensity of the generated microwave signal decreases as (t2-t1) increases. The initial phase of the generated microwave signal is related to I1, and the phase can be continuously adjusted by selecting different I1 values. In one exemplary example, the initial phase value can be obtained from the Fourier transform result of the generated microwave signal; see [link to relevant documentation]. Figure 8 and Figure 9 In this embodiment of the invention, the values ​​of I2, t1, and t2 are fixed, and a microwave signal with continuously changing phase is generated by continuously changing I1.

[0087] In one exemplary embodiment, the present invention can generate a continuous microwave signal by applying a pulsed current signal; when the current source 3-1 outputs a pulsed current signal, a pulsed magnetic flux change can be generated at the position of chain 2 of the superconducting quantum interference device through the current path 3-2, and each magnetic flux pulse corresponds to a pulsed microwave signal. See also Figure 4 When the time interval between current pulses is less than the duration of the microwave pulse signal, a continuous microwave signal can be emitted from the coplanar waveguide 4. The frequency of the microwave signal is determined by the background I of the current pulse. p1 Decide.

[0088] It will be understood by those skilled in the art that all or some of the steps, systems, or apparatuses disclosed above, and their functional modules / units, can be implemented as software, firmware, hardware, or suitable combinations thereof. In hardware implementations, the division between functional modules / units mentioned above does not necessarily correspond to the division of physical components; for example, a physical component may have multiple functions, or a function or step may be performed collaboratively by several physical components. Some or all components may be implemented as software executed by a processor, such as a digital signal processor or microprocessor, or as hardware, or as an integrated circuit, such as an application-specific integrated circuit (ASIC). Such software may be distributed on a computer-readable medium, which may include computer storage media (or non-transitory media) and communication media (or transient media). As is known to those skilled in the art, the term computer storage media includes volatile and non-volatile, removable and non-removable media implemented in any method or technology for storing information (such as computer-readable instructions, data structures, program modules, or other data). Computer storage media include, but are not limited to, RAM, ROM, EEPROM, flash memory or other memory technologies, CD-ROM, digital versatile disc (DVD) or other optical disc storage, magnetic cartridges, magnetic tape, disk storage or other magnetic storage devices, or any other medium that can be used to store desired information and can be accessed by a computer. Furthermore, it is well known to those skilled in the art that communication media typically contain computer-readable instructions, data structures, program modules, or other data in modulated data signals such as carrier waves or other transmission mechanisms, and may include any information delivery medium.

Claims

1. A microwave signal generating device, comprising: The system comprises a microwave resonant cavity (1), a superconducting quantum interference device chain (2), and a magnetic flux control unit (3); among which, A superconducting quantum interference device chain (2) is set inside the microwave resonant cavity (1) to generate a microwave signal with a preset fundamental frequency; The magnetic flux control unit (3) is at a first preset distance from the superconducting quantum interference device chain (2) to apply the generated magnetic field to the superconducting quantum interference device chain (2) and control the magnetic flux of the superconducting quantum interference device chain (2) so that the microwave signal generated in the microwave resonant cavity (1) is output in a preset form; The superconducting quantum interference device chain (2) is composed of one or more superconducting quantum interference devices; the preset form includes: pulse form or continuous form; the magnetic flux control unit controls the magnetic flux of the superconducting quantum interference device chain (2), including: applying a step form magnetic flux to the superconducting quantum interference device chain (2) to output a pulse form microwave signal, wherein the energy of the pulse form microwave signal is determined by the rate of change of the magnetic flux, the phase of the pulse form microwave signal is determined by the initial magnetic flux intensity of the step signal, and the frequency of the pulse form microwave signal is determined by the final magnetic flux intensity of the step signal; or, applying a pulse form magnetic flux to the superconducting quantum interference device chain (2) to output a continuous form microwave signal, wherein the time interval between current pulses is less than the duration of the microwave pulse signal.

2. The microwave signal generating device according to claim 1, characterized in that, The microwave signal generating device further includes a signal exporting unit (4) for exporting the microwave signal.

3. The microwave signal generating device according to claim 1, characterized in that, The superconducting quantum interference device chain (2) is one of the following structures: It consists of one of the aforementioned superconducting quantum interference devices; It consists of two or more superconducting quantum interference devices connected in series; It consists of two or more superconducting quantum interference devices connected in parallel; It consists of three or more superconducting quantum interference devices connected in a pre-defined series and parallel configuration.

4. The microwave signal generating device according to claim 2, characterized in that, The microwave resonant cavity (1) includes a coplanar microwave resonant cavity composed of a central conductor (1-1) and a ground layer (1-2), wherein the central conductor (1-1) is connected to the superconducting quantum interference device chain (2).

5. The microwave signal generating device according to claim 4, characterized in that, The materials of the central conductor (1-1) and the grounding layer (1-2) are superconducting materials.

6. The microwave signal generating device according to claim 4, characterized in that, The signal output unit (4) is at a second preset distance from the center conductor (1-1).

7. The microwave signal generating apparatus according to claim 2, 4, 5 or 6, characterized in that, The signal output unit (4) is a coplanar waveguide structure.

8. The microwave signal generating apparatus according to any one of claims 1-6, characterized in that, The flux control unit (3) controls the flux to change at a rate greater than a preset rate threshold.

9. The microwave signal generating apparatus according to claim 8, characterized in that, The magnetic flux control unit (3) includes: a current source (3-1) and a current path (3-2). The current source (3-1) is used to output a current with a predetermined rate of change greater than a preset rate of change threshold, and to adjust the form of the output current according to a preset form. The form of the output current is used to control the output microwave signal to be in the form of pulse or continuous. The current path (3-2) is used to generate a magnetic field acting on the superconducting quantum interference device chain (2) based on the current output from the current source (3-1) in order to control the magnetic flux through the superconducting quantum interference device chain (2).

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