Method for generating microlens array, homogenization control optical device and apparatus, processor and medium

Abstract

The application relates to a method for generating a microlens array, a homogenization control optical device and apparatus, a processor and a medium. The method comprises the following steps: determining the number of microlens units according to the distribution density of the microlens units and the size of the microlens array, and generating a number of random points on a planar region; taking each random point as a feature point of each microlens unit to generate a polygon boundary of each microlens unit in the planar region, wherein adjacent microlens units are closely fitted; and forming the microlens units with a radius of curvature in the polygon of the corresponding microlens unit, so as to generate the microlens array.

Description

Technical Field

[0001] This application relates to the field of optical technology, and more specifically to methods for generating microlens arrays, optical devices and apparatuses for homogeneity control, processors and media. Background Technology

[0002] Lasers are high-brightness, highly directional, monochromatic light sources that readily produce interference. Since their invention, they have been widely used in many fields, such as laser processing, spectral analysis, fiber optic communication, and controlled nuclear fusion. However, laser interference can have adverse effects in some applications. For example, in projection displays, when a laser is used as an illumination source to illuminate a projection screen, the roughness of the screen surface and the laser interference can produce severe speckle patterns, affecting display resolution. In optical interferometry systems, defects in optical components (dust, bubbles, etc.) can generate noise, which can then form parasitic fringes in the interference image, affecting image quality and measurement accuracy. Therefore, reducing or even eliminating laser interference is essential for relevant applications.

[0003] Several optical homogenization techniques have been proposed, but none of the existing solutions can provide controllable beam divergence angle while homogenizing the light, and therefore cannot be applied to situations with specific divergence angle requirements. Summary of the Invention

[0004] The purpose of this application is to provide a method for generating a microlens array that can influence the microlens surface shape by setting the distribution density and radius of curvature of the microlens units, thereby allowing adjustment and control of the divergence angle of the beam passing through the microlens array, and the generated microlens array can be used for homogenization of laser beams.

[0005] According to a first aspect of the present invention, a method for generating a microlens array is provided, the method comprising the steps of: determining the number of microlens units based on the distribution density of the microlens units and the size of the microlens array, and generating the number of random points on a planar region; generating a polygonal boundary of each microlens unit in the planar region, using each random point as a feature point of each microlens unit, wherein adjacent microlens units are closely fitted; and forming microlens units having radii of curvature within the polygons of the respective microlens units, thereby generating the microlens array.

[0006] Preferably, the method further includes: detecting whether the divergence angle of the light beam passing through the microlens array meets a first preset range; when the divergence angle does not meet the first preset range, adjusting the distribution density and / or radius of curvature in the processing parameters so that the divergence angle meets the first preset range.

[0007] Preferably, the divergence angle can be characterized by the root mean square roughness of the surface of the microlens array, wherein detecting whether the divergence angle meets a first preset range can be determined by measuring whether the root mean square roughness of the surface meets a second preset range.

[0008] Preferably, generating the polygonal boundary of each microlens unit includes: connecting adjacent feature points pairwise to obtain a line connecting adjacent feature points; and determining the boundary of adjacent microlens units based on a straight line segment perpendicular to the line and passing through the midpoint of the line.

[0009] Preferably, the boundary is an N-sided polygon, where 3 ≤ N.

[0010] According to a second aspect of the present invention, an optical device for controlling light uniformity is provided. The optical device includes a transparent substrate and a microlens array generated using the method described above, located on the transparent substrate.

[0011] Preferably, the distribution density of the microlens units is 50 units / mm. 2 Up to 2000 pieces / mm 2 Within the range.

[0012] Preferably, the radius of curvature of the microlens unit is in the range of 0.1 mm to 10 mm.

[0013] Preferably, the divergence angle of the light beam passing through the microlens array is between 40° and 0.1°.

[0014] Preferably, the root mean square roughness of the surface of the microlens array is between 14.7 μm and 8.1 × 10⁻⁶ μm. -3 Between μm.

[0015] According to a third aspect of the present invention, an apparatus for controlling the uniformity of light is provided. The apparatus includes: a laser for outputting a light beam; a uniformity control module comprising: the aforementioned optical element placed in the optical path of the laser; a driving device for driving the optical element to perform periodic motion in a plane perpendicular to the direction of light beam propagation; a double-aperture plate for receiving the light beam transmitted from the optical element; a sensor for acquiring interference fringes from the double-aperture plate; and a computing device communicatively connected to the driving device and the sensor.

[0016] Preferably, the driving device includes: a motion mechanism for generating the periodic motion; a motion driver for driving the motion mechanism; and a motion controller for controlling the motion driver.

[0017] Preferably, the motion mechanism includes a stepper motor, a servo motor, or a multi-axis linear displacement stage.

[0018] According to a fourth aspect of the invention, a processor is provided for performing the method as described above.

[0019] According to a fifth aspect of the present invention, a computer-readable storage medium is provided having a computer program stored thereon that, when executed by a processor, implements the method described above.

[0020] Other features and aspects will become clear from the following detailed description, accompanying drawings, and claims. Attached Figure Description

[0021] This application can be better understood by describing exemplary embodiments of the application in conjunction with the accompanying drawings, in which:

[0022] Figure 1 A flowchart of a method 100 for generating a microlens array according to an exemplary embodiment of this application is shown;

[0023] Figure 2 An example is shown of generating random points and polygonal boundaries for microlens units;

[0024] Figure 3 A schematic diagram of the two-dimensional distribution of an example microlens array generated using method 100 according to an exemplary embodiment of this application is shown.

[0025] Figure 4 A three-dimensional structural schematic diagram of this example microlens array is shown;

[0026] Figure 5 This illustrates the process of adjusting processing parameters to generate a microlens array with a target divergence angle;

[0027] Figure 6 This illustrates an example of how the root mean square surface roughness value and the outgoing light divergence angle vary with the radius of the microlens unit, as obtained from experiments.

[0028] Figure 7A and Figure 7B Examples of the effects of changes in the radius of curvature and density of microlens units on the divergence angle, obtained from experiments, are shown respectively.

[0029] Figure 8 A block diagram showing an apparatus 800 for homogeneity modulation according to an exemplary embodiment of this application; and

[0030] Figure 9 An example of an electronic device according to an embodiment of the present invention is shown. Detailed Implementation

[0031] The following describes specific embodiments of this application. It should be noted that, in order to maintain brevity, this specification cannot provide a detailed description of all features of the actual embodiments. It should be understood that, in the actual implementation of any embodiment, just as in any engineering or design project, various specific decisions are often made to achieve the developer's specific goals and to meet system-related or business-related constraints, and this can change from one embodiment to another. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, changes in design, manufacturing, or production based on the technical content disclosed in this disclosure are merely conventional technical means and should not be construed as insufficient content of this disclosure.

[0032] Unless otherwise defined, the technical or scientific terms used in the claims and description shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the patent application description and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms "an" or "a" and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" and similar terms mean that the element or object preceding "comprising" or "including" encompasses the element or object listed following "comprising" or "including" and its equivalents, and do not exclude other elements or objects. The terms "connected" or "linked" and similar terms are not limited to physical or mechanical connections, nor are they limited to direct or indirect connections.

[0033] In this disclosure, a structure may be referred to as being "for" or "capable of" performing certain tasks, even if the structure is not currently in operation. For example, "laser for / capable of outputting a beam" is intended to cover a laser having components that perform the function during operation, even if the laser is not currently in use (e.g., not connected to a power source).

[0034] Unless otherwise specified, all embodiments and preferred embodiments mentioned herein can be combined to form new technical solutions. Similarly, unless otherwise specified, all technical features and preferred features mentioned herein can be combined to form new technical solutions.

[0035] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0036] The method for generating a microlens array according to embodiments of this application is described in detail below with reference to the accompanying drawings.

[0037] refer to Figure 1 The diagram illustrates a flowchart of a method 100 for generating a microlens array according to an exemplary embodiment of the present application. The method 100 may include steps S110 to S130.

[0038] In step S110, the number of microlens units is determined based on the distribution density of the microlens units and the size of the microlens array, and this number of random points is generated on a planar region. It is conceivable that the number of microlens units in the microlens array can be calculated based on a pre-set distribution density of the microlens units and the size of the microlens array. Then, a corresponding number of randomly located points can be generated on a planar region (whose size is equal to the size of the microlens array). Note that in this application, the random points can be generated completely randomly within the planar region, or they can exhibit a generally uniform distribution with locally random distribution (i.e., within a local area, the random points are independently distributed without any pattern).

[0039] In step S120, each random point is used as a feature point of each microlens unit, and a polygonal boundary of each microlens unit is generated in the planar region, wherein adjacent microlens units are closely fitted. "Closely fitted" means that there are no gaps between adjacent microlens units, i.e., they share a common boundary. As an example, the polygonal boundary of each microlens unit can be generated by connecting adjacent feature points pairwise to obtain a line connecting adjacent feature points; and determining the boundary of adjacent microlens units based on a straight line segment perpendicular to the line and passing through the midpoint of the line. Adjacent feature points can be defined as follows: when the distance from the intersection of the line connecting two points and the perpendicular bisector of the line to any feature point on the plane is greater than half the distance of the line, these two points are adjacent. It can be understood that the size profile (outer edge) of the microlens array can be used as the outer boundary of the outermost microlens unit. The boundary of each microlens unit can be an N-sided polygon with the same or different number of sides; preferably, 3 ≤ N ≤ 8.

[0040] See Figure 2 , Figure 2An example is shown illustrating the polygonal boundaries for generating random points and microlens units. In this example, the microlens array is rectangular with a side length of 50 mm, and the microlens unit distribution density is 80 units / mm. 2 Furthermore, the microlens units are arranged in a seamless, random pattern based on Thiessen polygons. For example... Figure 2 The number of microlens units can be determined based on the size of the microlens array and the distribution density of the microlens units, thereby generating a corresponding number of random points 201 on a planar region 200 corresponding to that size. These random points 201 can then be used as feature points of the microlens units to generate a polygonal boundary 202 for each microlens unit within the planar region 200. In this example, the Thiessen polygon method is used to divide the planar region 200 based on the feature points, thereby generating a seamless random arrangement of the boundaries of each microlens in the microlens array.

[0041] In step S130, microlens units are formed within the polygonal boundaries of the corresponding microlens units, thereby generating a microlens array. Each microlens unit may have the same pre-set radius of curvature.

[0042] Figure 3 A schematic diagram of the two-dimensional distribution of an example microlens array generated using method 100 according to an exemplary embodiment of this application is shown. Figure 4 A three-dimensional structural schematic diagram of this example microlens array is shown. In this example, under simulation at a wavelength of 632.8 nm, the divergence angle of the light beam passing through the microlens array is 5°.

[0043] The foregoing describes a method 100 for generating a microlens array according to exemplary embodiments of this application. Using method 100, the microlens surface profile can be influenced by setting the distribution density and radius of curvature of the microlens units, thereby allowing adjustment and control of the divergence angle of the light beam passing through the microlens array. Furthermore, the generated microlens array can be used for homogenization of laser light, for example, to reduce interference phenomena in the laser beam.

[0044] In some embodiments of this application, the method 100 for generating a microlens array may further include setting processing parameters. Processing parameters may include the distribution density of the microlens units, the radius of curvature, and the size of the microlens array. Processing parameters can be set by inputting parameter information via an input device, or by reading parameter information from a microlens array processing file (e.g., a drawing file). It is conceivable that the operation of setting processing parameters may be performed before step S110 of method 100, or it may be performed in stages. For example, the distribution density of the microlens units and the size of the microlens array in the processing parameters may be set before step S110, while the radius of curvature in the processing parameters may be set before step S130.

[0045] In some embodiments of this application, the method 100 for generating a microlens array may further include an operation 500 of adjusting processing parameters to generate a microlens array having a target divergence angle. See also Figure 5 The operation 500 may include the following steps S140-S150.

[0046] In step S140, it is detected whether the divergence angle of the light beam passing through the microlens array meets the first preset range. After the microlens array is generated, a simulation of the corresponding wavelength can be performed for the design, and the simulation results can be used to determine whether the microlens array meets the target divergence angle. Alternatively, the inventors of this application have discovered that the variation law of the root mean square roughness of the microlens array surface is the same as the variation law of the divergence angle of the emitted light beam. Therefore, the divergence angle can be characterized by the root mean square roughness of the microlens array surface, and whether the microlens array meets the first preset range of the target divergence angle can be determined by measuring whether the root mean square roughness of the microlens array surface meets the second preset range. The second preset range of the root mean square roughness corresponds to the first preset range of the divergence angle of the microlens array.

[0047] Figure 6 This illustrates an example of how the root mean square surface roughness value and the emitted light divergence angle vary with the radius of the microlens unit, as obtained experimentally. Figure 6 As shown, the microlens unit distribution density (100 units / mm in this example) is... 2 Under certain conditions, the root mean square roughness of the microlens array surface is basically consistent with the slope of the divergence angle of the emitted light as a function of the radius of curvature of the microlens unit. Therefore, in practice, the distribution density of the microlens units on the surface of the microlens array and the root mean square roughness can be measured to determine whether the generated random microlens array meets the divergence angle requirements of the design.

[0048] When the divergence angle does not meet the first preset range, step S150 can be performed, i.e., adjusting the distribution density and / or radius of curvature in the processing parameters to make the divergence angle meet the first preset range. The inventors of this application discovered through experiments that the divergence angle of a beam passing through a microlens array is jointly determined by the distribution density and radius of curvature of the microlens units; the larger the distribution density and radius of curvature of the microlens units, the smaller the divergence angle of the emitted beam. Thus, the distribution density and / or radius of curvature can be adjusted based on this relationship, and simulations of the corresponding wavelengths can be performed to achieve the target divergence angle range. Figure 7A and Figure 7B Examples of the effects of changes in the radius of curvature and density of microlens units on the divergence angle, obtained experimentally, are shown, where the coordinate axis unit is mrad. Figure 7A In the example, the microlens unit density in all three images is 400 units / mm. 2The radii are 1mm, 2mm, and 3mm respectively. Figure 7A It can be seen that as the radius of the microlens unit increases, the divergence angle gradually decreases. Figure 7B In the example, the radius of the microlens units in all three images is 2 mm, and the unit density is 100 units / mm, respectively. 2 200 pieces / mm 2 400 pieces / mm 2 ,from Figure 7B As can be seen, the divergence angle gradually decreases with increasing microlens unit density. This is understandable, as the divergence angle of the emitted beam is determined by both the microlens unit distribution density and the microlens unit radius. Therefore, several different microlens unit distribution density values ​​and microlens unit radius values ​​will correspond to the same divergence angle range. Thus, in actual manufacturing, appropriate processing parameters can be selected based on the specific circumstances.

[0049] After step S160, a microlens array that satisfies the target divergence angle can be regenerated based on the adjusted processing parameters.

[0050] By employing the above adjustment operation, the processing parameters of the microlens array can be adjusted when the divergence angle of the emitted light from the microlens array generated by the method 100 for generating the microlens array does not meet the design range, thereby enabling the microlens array generated using the adjusted processing parameters to meet the target divergence angle range.

[0051] Note that microlens arrays are refractive optical components; when light of different wavelengths is incident, the divergence angle will slightly change due to the different refractive indices of the material for different wavelengths. For example, when using microlens units with a distribution density of 200 units / mm... 2 For a microlens array with a unit radius of 1 mm, the divergence angle is 4.5° at a wavelength of 213 nm and 3.82° at a wavelength of 1064 nm. In actual design, the initial parameter selection does not focus on the variation or requirements of the laser wavelength (the initial reference wavelength can be, for example, 632.8 nm). After the initial design of the random microlens array is completed and simulations of the corresponding wavelengths are performed, the relevant parameters of the random microlens array will be adjusted according to the simulation results and actual requirements.

[0052] It is understood that the aforementioned adjustment operations are optional rather than necessary for generating a microlens array with a target divergence angle. For example, an experimental data model of the distribution density, radius of curvature, and divergence angle (or root mean square roughness of the surface) of the microlens units at the corresponding wavelength can be established through data modeling before using the method 100 for generating the microlens array. Thus, when using the method 100 for generating the microlens array, a specific range of distribution density and radius of curvature of the microlens units that satisfies the target divergence angle (or target root mean square roughness of the surface) range at the corresponding wavelength can be found from the data model to set the processing parameters. In this way, it may be possible to generate a microlens array with a target divergence angle without the aforementioned adjustment operations.

[0053] According to an illustrative embodiment of this application, an optical device for controlling beam homogenization is also provided. The optical device may include a transparent substrate and a microlens array generated on the transparent substrate using the method 100 for generating a microlens array according to an exemplary embodiment of this application. This optical device can not only reduce interference from a laser beam but also has a controllable beam divergence angle.

[0054] In some embodiments of this application, the distribution density of microlens units can be 50 units / mm. 2 Up to 2000 pieces / mm 2 Within a certain range, for example, it could be 80 pieces / mm 2 In some embodiments of this application, the radius of curvature of the microlens unit can be in the range of 0.1 mm to 10 mm. Within this range, the divergence angle of the light beam passing through the microlens array can be between 40° and 0.1° (measured using a laser beam with a wavelength of 632.8 nm), and the root mean square roughness of the surface of the microlens array can be between 14.7 μm and 8.1 × 10⁻⁶ mm. -3 Between μm.

[0055] According to an illustrative embodiment of this application, an apparatus for controlling light uniformity is also provided. See also Figure 8 The device 800 for controlling the uniformity of light may include a laser 801, a uniformity control module, a double-hole plate 806, a sensor 807, and a computing device 808.

[0056] Laser 801 can be a pulsed laser of a corresponding wavelength (e.g., 532nm band) for outputting a beam. The uniformity control module can include an optical device 802 and a driving device according to the above illustrative embodiments of this application. Optical device 802 can be placed in the optical path of laser 801, i.e., downstream of laser 801. For example, optical device 802 can be fixed to a motor shaft to form a module, placed between laser 801 and the double-aperture plate 806. The driving device can be used to drive optical device 802 to perform periodic motion, such as reciprocating motion or rotational motion, in a plane perpendicular to the beam propagation direction. As an example, the driving device can include a motion mechanism 803 for generating periodic motion, a motion driver 804 for driving the motion mechanism, and a motion controller 805 for controlling the motion driver. The double-aperture plate 806 can receive the beam transmitted from optical device 802. As an example, the diameter of the two apertures in the double-aperture plate 806 can be 70μm, and the aperture spacing can be 300μm, 400μm, or 500μm. Sensor 807 can acquire interference fringes from the dual-aperture plate 806, and may be, for example, a CCD. A computing device can communicatively connect to the drive and the sensor to send control commands to the drive and process the interference fringes from sensor 807 to evaluate the interference of the beam.

[0057] The motion mechanism 803 can be a stepper motor, servo motor, or other mechanism capable of generating periodic motion. The motor drives the optical device 802 to perform periodic motion in a plane perpendicular to the beam propagation direction. Adjusting the rotation speed can control the degree of reduction in beam interference. Alternatively, the motion mechanism 803 can be an XYZ multi-axis linear displacement stage composed of three stacked high-speed linear displacement stages. The multi-axis displacement stage drives the optical device 802 to perform linear motion in two directions simultaneously in the XY plane perpendicular to the beam propagation direction. Adjusting the motion speed can control the degree of reduction in beam interference.

[0058] After passing through the periodically moving optical device 802, the laser beam generates interference fringes via the two holes in the double-hole plate 806. These interference fringes are collected by a sensor, and the computing device 808 quantitatively calculates the contrast of the interference fringes to evaluate the beam interference after passing through the optical device 802. In other words, by adjusting the speed of the motion mechanism and collecting interference fringes in real time via a sensor, real-time quantitative measurement of the beam interference is achieved.

[0059] One or more of the techniques and / or embodiments described above may be implemented in hardware and / or software, or may include hardware and / or software, such as modules or devices executing on one or more computing devices. Of course, the modules or devices described herein illustrate various functions and are not limited to the structure and functionality of any embodiment. Rather, the functions of individual modules or devices may be differently divided and performed by more or fewer modules or devices according to various design considerations.

[0060] Exemplary computing device

[0061] Figure 9 An example of an electronic device 900 according to an embodiment of the present invention is shown. The electronic device 900 includes: one or more processors 920; and a storage device 910 for storing one or more programs that, when executed by the one or more processors 920, cause the one or more processors 920 to implement the methods provided in the embodiments of the present invention. Processors include, for example, digital signal processors (DSPs), microcontrollers, application-specific integrated circuits (ASICs), or microprocessors.

[0062] Figure 9 The electronic device 900 shown is merely an example and should not impose any limitations on the functionality and scope of use of the embodiments of the present invention.

[0063] like Figure 9 As shown, the electronic device 900 is presented in the form of a general-purpose computing device. The components of the electronic device 900 may include, but are not limited to: one or more processors 920, a storage device 910, and a bus 950 connecting different system components (including the storage device 910 and the processor 920).

[0064] Bus 950 represents one or more of several bus architectures, including a memory bus or memory controller, a foreign bus, a graphics acceleration port, a processor, or a local bus using any of the various bus architectures. Examples of these architectures include, but are not limited to, the Industry Standard Architecture (ISA) bus, the Micro Channel Architecture (MAC) bus, the Enhanced ISA bus, the Video Electronics Standards Association (VESA) local bus, and the Foreign Component Interconnect (PCI) bus.

[0065] Electronic device 900 typically includes a variety of computer system readable media. These media can be any available media that can be accessed by electronic device 900, including volatile and non-volatile media, removable and non-removable media.

[0066] Storage device 910 may include computer system readable media in the form of volatile memory, such as random access memory (RAM) 911 and / or cache memory 912. Electronic device 900 may further include other removable / non-removable, volatile / non-volatile computer system storage media. By way of example only, storage system 913 may be used to read and write non-removable, non-volatile magnetic media (… Figure 9 Not shown; usually referred to as a "hard drive"). Although Figure 9 Not shown, a disk drive for reading and writing to removable non-volatile disks (e.g., "floppy disks") and an optical disk drive for reading and writing to removable non-volatile optical disks (e.g., CD-ROMs, DVD-ROMs, or other optical media) may be provided. In these cases, each drive may be connected to bus 950 via one or more data media interfaces. Storage device 910 may include at least one program product having a set (e.g., at least one) of program modules configured to perform the functions of the embodiments of the present invention.

[0067] A program / utility 914 having a set (at least one) of program modules 915 may be stored in, for example, a storage device 910. Such program modules 915 include, but are not limited to, an operating system, one or more application programs, other program modules, and program data. Each or some combination of these examples may include an implementation of a network environment. Program modules 915 typically perform the functions and / or methods described in any of the embodiments of the present invention.

[0068] Electronic device 900 can also communicate with one or more external devices 960 (e.g., keyboard, pointing device, display 970, etc.), and with one or more devices that enable a user to interact with the electronic device 900, and / or with any device that enables the electronic device 900 to communicate with one or more other computing devices (e.g., network card, modem, etc.). This communication can be performed through input / output (I / O) interface 930. Furthermore, electronic device 900 can also communicate with one or more networks (e.g., local area network (LAN), wide area network (WAN), and / or public networks, such as the Internet) via network adapter 940. Figure 9 As shown, network adapter 940 communicates with other modules of electronic device 900 via bus 950. It should be understood that, although not shown in the figure, other hardware and / or software modules can be used in conjunction with electronic device 900, including but not limited to: microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data backup storage systems.

[0069] The processor 920 executes various functional applications and data processing by running programs stored in the storage device 910, such as implementing the methods provided in the embodiments of the present invention.

[0070] The techniques described herein can be implemented in hardware, software, firmware, or any combination thereof, unless specifically described as implemented in a particular manner. Any feature described as a module or component can also be implemented together in an integrated logic device, or separately as a discrete but interoperable logic device. If implemented in software, the technique can be implemented at least in part through a non-transient processor-readable storage medium comprising instructions that, when executed, perform one or more of the methods described above. The non-transient processor-readable data storage medium can form part of a computer program product that may include encapsulation material. The program code can be implemented in a high-level procedural programming language or an object-oriented programming language to communicate with a processing system. Assembly language or machine language can also be used if desired. In fact, the mechanisms described herein are not limited to any particular programming language. In any case, the language can be a compiled language or an interpreted language.

[0071] At least some embodiments may be implemented by representational instructions stored on a machine-readable medium representing various logic in a processor, which, when read by a machine, cause the machine to produce logic for performing the techniques described herein.

[0072] Such machine-readable storage media can include, but are not limited to, non-transitory tangible arrangements of articles made or formed by a machine or device, including storage media such as: hard disks; any other type of disk, including floppy disks, optical disks, compact disc read-only memory (CD-ROM), compact disc rewritable (CD-RW), and magneto-optical disks; semiconductor devices such as read-only memory (ROM), random access memory (RAM) such as dynamic random access memory (DRAM) and static random access memory (SRAM), erasable programmable read-only memory (EPROM), flash memory, electrically erasable programmable read-only memory (EEPROM); phase-change memory (PCM); magnetic cards or optical cards; or any other type of medium suitable for storing electronic instructions.

[0073] Instructions can also be further sent or received via a communication network using a transmission medium, through a network interface device that utilizes any of the many transport protocols (e.g., Frame Relay, Internet Protocol (IP), Transmission Control Protocol (TCP), User Datagram Protocol (UDP), Hypertext Transfer Protocol (HTTP), etc.).

[0074] Example communication networks may include local area networks (LANs), wide area networks (WANs), packet data networks (e.g., the Internet), mobile phone networks (e.g., cellular networks), conventional telephone (POTS) networks, and wireless data networks (e.g., called wireless networks). The Institute of Electrical and Electronics Engineers (IEEE) 802.11 series of standards, known as The network interface device may include one or more physical jacks (e.g., Ethernet, coaxial, or telephone jacks) or one or more antennas for connecting to a communication network, such as the IEEE 802.9 series standards, the IEEE 802.15.4 series standards, and peer-to-peer (P2P) networks. In the example, the network interface device may include multiple antennas for wireless communication using at least one of single-input multiple-output (SIMO), multiple-input multiple-output (MIMO), or multiple-input single-output (MISO) technologies.

[0075] The term “transmission medium” should be considered to include any intangible medium capable of storing, encoding or carrying instructions for machine execution, and “transmission medium” includes digital or analog communication signals or other intangible media used to facilitate communication of such software.

[0076] This concludes the description of the method for generating a microlens array, the optical device for beam homogenization control, and the apparatus according to this application. This application offers advantages such as simple structure and strong engineering practicality: It proposes a method for generating a microlens array, controlling the beam divergence angle after passing through the array by setting the microlens unit distribution density and the microlens radius of curvature; simultaneously, it proposes an apparatus for beam homogenization control using the aforementioned microlens array, achieving real-time quantitative reduction of beam interference by adjusting the speed of the motion mechanism and evaluating beam interference through sensor-collected interference fringes. This ensures the beam interference meets the requirements for laser projection, interference detection, etc. The apparatus has a simple structure, requires minimal space, and possesses strong practicality. Furthermore, compared to existing technologies, this application is the first to propose directly controlling the number of microlenses in the microlens array by defining the microlens unit distribution density, making the parameters more intuitive; this application proposes that controlling the microlens radius and microlens unit distribution density can influence the microlens surface shape, thereby controlling and determining the outgoing beam divergence angle, allowing for better matching with subsequent optical systems.

[0077] Exemplary embodiments have been described above. However, it should be understood that various modifications can be made to the above exemplary embodiments without departing from the spirit and scope of this application. For example, if suitable results can be achieved if the described techniques are performed in a different order and / or if components in the described system, architecture, device, or circuit are combined in different ways and / or replaced or supplemented by other components or their equivalents, then correspondingly, these other modified embodiments also fall within the scope of protection of the claims.

Claims

1. A method for generating a microlens array, comprising the following steps: The number of microlens units is determined based on the distribution density of the microlens units and the size of the microlens array, and the number of random points is generated on a planar region. Using each random point as a feature point of each microlens unit, a polygonal boundary of each microlens unit is generated in the planar region, wherein adjacent microlens units are closely fitted. as well as Microlens units with radii of curvature are formed within the polygons of the corresponding microlens units, thereby generating the microlens array. The method further includes: detecting whether the divergence angle of the light beam passing through the microlens array meets a first preset range; when the divergence angle does not meet the first preset range, adjusting the distribution density and / or radius of curvature in the processing parameters so that the divergence angle meets the first preset range, wherein the divergence angle can be characterized by the root mean square roughness of the surface of the microlens array, and detecting whether the divergence angle meets the first preset range can be determined by measuring whether the root mean square roughness of the surface meets a second preset range.

2. The method as described in claim 1, characterized in that, Generating the polygonal boundary for each microlens unit includes: Connect adjacent feature points pairwise to obtain the lines connecting adjacent feature points; and The boundaries of adjacent microlens units are determined by the straight line segment perpendicular to the line and passing through the midpoint of the line.

3. The method as described in claim 2, characterized in that, The boundary is an N-sided polygon, where 3 ≤ N.

4. An optical device for controlling light uniformity, comprising: Transparent substrate; as well as The microlens array generated by the method described in any one of claims 1-3 is located on the transparent substrate.

5. The optical device as described in claim 4, characterized in that, The distribution density of the microlens units is 50 units / mm. 2 Up to 2000 pieces / mm 2 Within the range.

6. The optical device as described in claim 4, characterized in that, The radius of curvature of the microlens unit is in the range of 0.1 mm to 10 mm.

7. The optical device as described in claim 4, characterized in that, The divergence angle of the light beam passing through the microlens array is between 40° and 0.1°.

8. The optical device as described in claim 7, characterized in that, The root mean square roughness of the surface of the microlens array is between 14.7 μm and 8.1 μm. 10 -3 Between μm.

9. A device for controlling light uniformity, comprising: A laser, used to output a beam of light; A uniformity control module, comprising: The optical device as described in any one of claims 4-8 is placed in the optical path of the laser; and A driving device for driving the optical device to perform periodic motion in a plane perpendicular to the beam propagation direction; A double-aperture plate for receiving light beams transmitted from the optical device; Sensors are used to acquire interference fringes from the double-hole plate; and A computing device, communicatively connected to the drive unit and the sensor.

10. The apparatus as claimed in claim 9, characterized in that, The driving device includes: A motion mechanism for generating the periodic motion; A motion driver for driving the motion mechanism; and A motion controller for controlling the motion driver.

11. The apparatus as claimed in claim 10, characterized in that, The motion mechanism includes a stepper motor, a servo motor, or a multi-axis linear displacement stage.

12. A processor for performing the method as described in any one of claims 1 to 3.

13. A computer-readable storage medium having a computer program stored thereon that, when executed by a processor, implements the method as described in any one of claims 1-3.

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